Reflection structure, heat radiation unit and heating device

Abstract

The invention relates to the technical field of optical equipment, in particular to a reflection structure, a heat radiation unit and a heating device. The reflecting structure is provided with a containing groove, the containing groove is provided with a first side wall, a second side wall and a bottom wall connected with the first side wall and the second side wall, the first side wall comprises a first paraboloid, the second side wall comprises a second paraboloid, the bottom wall comprises a third paraboloid, and the third paraboloid is arranged in the containing groove. The focal length of the third paraboloid is larger than the focal length of the first paraboloid and the focal length of the second paraboloid. The reflection structure occupies a small space, and the amount of light reflected and converged by the reflection structure is large, so that the heating efficiency of the reflection structure is improved.

Description

Technical Field

[0001] The present application relates to the technical field of optical equipment, and in particular to a reflective structure, a heat radiation unit and a heating device. Background Art

[0002] When processing a wafer, a heat radiation unit is required to heat the wafer. The uniformity of the wafer surface temperature will affect the quality of the wafer. In order to improve the uniformity of the wafer surface temperature, the heat radiation unit includes a reflective structure. The reflective structure can make the heat source in the heat radiation unit emit more light and reflect it to the surface of the wafer. However, the reflective structure in the prior art is large in size and has a low heating efficiency. Summary of the invention

[0003] The present application provides a reflective structure, a heat radiation unit and a heating device. The reflective structure has a smaller size and reflects and converges a larger amount of light, so as to improve the heating efficiency of the reflective structure.

[0004] In the first aspect, the present application provides a reflective structure, which may have a receiving groove, and the receiving groove has a first side wall, a second side wall and a bottom wall. The bottom wall connects the first side wall and the second side wall, the first side wall includes a first parabola, the second side wall includes a second parabola, and the third side wall includes a third parabola, and the focal length of the third parabola is greater than the focal length of the first parabola and the second parabola. Specifically, the focal length of the first parabola and the focal length of the second parabola are both smaller than the focal length of the third parabola, the width of the overall parabola formed by the first parabola and the second parabola is smaller, and the first parabola and the second parabola are respectively located on the first side wall and the second side wall, so that the width of the opening of the receiving groove will be smaller, and the depth of the receiving groove will be deeper, and the convergence angle of the reflective structure will be larger, so that the reflective structure can reflect and converge more light.

[0005] In a possible embodiment, the projections of the first parabola, the second parabola, and the third parabola on the bottom wall do not overlap, which can reduce the multiple refractions of light emitted by the radiation source between the first side wall, the second side wall, and the bottom wall after the radiation source is set in the receiving groove, thereby reducing the loss of light reflected by the radiation source and improving the efficiency of radiation.

[0006] When the first parabola and the second parabola are specifically set, the first parabola and the second parabola can be set symmetrically, so that the amount of light reflected and converged by the first parabola and the second parabola is roughly the same. Correspondingly, the first parabola and the second parabola can also be set asymmetrically, as long as the focal lengths of the first parabola and the second parabola are smaller than the focal length of the third parabola.

[0007] In a possible embodiment, the first side wall may include a first transition surface, and the second side wall may further include a second transition surface, one side of the first transition surface is connected to the first parabola, the other side of the first transition surface is connected to the third parabola, one side of the second transition surface is connected to the second parabola, and the other side of the second transition surface is connected to the third parabola. The provision of the first transition surface and the second transition surface can make the depth of the receiving groove deeper, so as to facilitate the provision of the radiation source in the receiving groove.

[0008] More specifically, when the first transition surface and the second transition surface are specifically arranged, the first transition surface and the second transition surface may be symmetrically arranged, and the extension direction of the first transition surface and the second transition surface may be parallel to the depth direction of the accommodating groove.

[0009] It is worth mentioning that the first transition surface and the second transition surface can be a plane or a curved surface, and when the first transition surface and / or the second transition surface is a curved surface, the first transition surface is arched toward the side away from the focal length of the first parabola, and the second transition surface is arched toward the side away from the focal length of the second parabola, that is, the arching directions of the first transition surface and the second transition surface are opposite to each other, and the surface shape of the first transition surface and the second transition surface can be adjusted according to actual needs.

[0010] In another embodiment, the first side wall may further include a third transition surface and a first elliptical curved surface, the second side wall may further include a fourth transition surface and a second elliptical curved surface, one side of the third transition surface is connected to one side of the third parabola, the other side of the third transition surface is connected to one side of the first elliptical curved surface, the other side of the first elliptical curved surface is connected to the first parabola, one side of the fourth transition surface is connected to a side of the third parabola away from the third transition surface, the other side of the fourth transition surface is connected to one side of the second elliptical curved surface, and the other side of the second elliptical curved surface is connected to the second parabola. The arrangement of the first elliptical curved surface and the second elliptical curved surface can reflect the light emitted by the radiation source arranged in the receiving groove onto the second parabola and the first parabola, and converge through the second parabola and the first parabola to be emitted again to the device to be heated, so that the reflective structure can converge more light, thereby improving the heating efficiency of the thermal radiation unit.

[0011] When the first elliptical curve surface and the second elliptical curve surface are specifically set, the first elliptical curve surface and the second elliptical curve surface can be symmetrically set, and the symmetry axes of the first elliptical curve surface and the second elliptical curve surface coincide with the symmetry axes of the first parabola and the second parabola, so that the amount of light reflected by the first elliptical curve surface and the second elliptical curve surface can also be roughly the same; when the third transition surface and the fourth transition surface are specifically set, the third transition surface and the fourth transition surface can also be symmetrically set, and the symmetry axes of the third transition surface and the fourth transition surface can coincide with the symmetry axes of the first elliptical curve surface and the second elliptical curve surface. Among them, the third transition surface and the fourth transition surface can be planes or curved surfaces, which can be adjusted according to actual needs.

[0012] More specifically, the first elliptical curve surface and the second elliptical curve surface may also be arranged asymmetrically, and correspondingly, the third transition surface and the fourth transition surface may also be arranged asymmetrically.

[0013] In order to make the light reflected and converged by the first side wall and the second side wall, the heat of the heating area formed by the device to be heated is relatively uniform, so as to improve the uniformity of the heating of the device to be heated, thereby improving the performance of the device to be heated. When the first elliptical curve surface, the second elliptical curve surface, the third transition surface and the fourth transition surface are provided, the first elliptical curve surface, the second elliptical curve surface, the third transition surface and the fourth transition surface can all extend along the depth direction of the receiving groove to facilitate the setting of the radiation source. More specifically, the heights of the first elliptical curve surface and the second elliptical curve surface along the depth direction of the receiving groove can be the same, and the areas of the first elliptical curve surface and the second elliptical curve surface can be the same; similarly, the heights of the third transition surface and the fourth transition surface along the depth direction of the receiving groove can be the same, and the areas of the third transition surface and the fourth transition surface can be the same; similarly, the heights of the first parabola and the second parabola along the depth direction of the receiving groove can be the same, and the areas of the first parabola and the second parabola can be the same.

[0014] In the second aspect, the present application also provides a heat radiation unit, which may include a radiation source and a reflective structure in any technical solution of the first aspect, wherein the radiation source is arranged in a receiving groove, and the first focus of the first parabola, the second focus of the second parabola, and the third focus of the third parabola are all located on the radiation source. In this arrangement, the focal length of the first parabola and the focal length of the second parabola are both smaller than the radius of the radiation source, so that the reflective structure obtains a larger convergence angle; the focal length of the third parabola is larger than the radius of the radiation source, that is, the radiation source is farther away from the third parabola, and the radiation source is relatively close to the extension line of the first parabola and the second parabola, which can prevent the radiation source from interfering with the first parabola and the second parabola, and the reflective structure has a larger convergence angle, which can converge and reflect more light emitted by the radiation source to the surface of the device to be heated, thereby improving the heating efficiency of the heat radiation unit.

[0015] When the radiation source is specifically set up, the radiation source can be but is not limited to a linear lamp, an arc lamp or a ring lamp. When the radiation source adopts a linear lamp, the corresponding reflection structure is also a linear structure; when the radiation source adopts an arc lamp, the corresponding reflection structure is also an arc structure; when the radiation source is a ring lamp, the corresponding reflection structure is also a ring structure to match the radiation source.

[0016] In a third aspect, the present application also provides a heating device, the heating device comprising a plurality of heat radiation units in the second aspect, the plurality of heat radiation units are all arranged on the bracket, and the plurality of heat radiation units form a plurality of heat radiation mechanisms on the bracket, and the plurality of heat radiation mechanisms diffuse toward the periphery along the axis of the bracket. The plurality of heat radiation mechanisms can reflect and converge a plurality of annular or polygonal heating rings for heating the heated device. Since the heat radiation unit is small in size and the heat radiation unit reflects and converges more light, the energy of the annular or polygonal heating ring reflected and converged by each heat radiation mechanism element is higher, so as to improve the heating efficiency of the heating device.

[0017] When the heat radiation unit is arranged on the bracket, the heat radiation unit is detachably arranged on the bracket to improve the convenience of disassembly of the heating device.

[0018] The heating device can be applied to a process treatment equipment, which may also include a vacuum chamber, in which a support component may be provided, on which a device to be heated may be provided, a heating device may be provided on one side of the vacuum chamber, and a heating device may also be provided on the other side of the vacuum chamber, and the two heating devices may simultaneously reflect and converge light to the surface of the device to be heated, and the light may pass through the vacuum chamber and heat the device to be heated provided on the support component; or, one of the two heating devices may work to heat one side of the device to be heated. Since the size of the heating device is small, when the heating device is applied to the process treatment equipment, the size of the process treatment equipment is also small, and when the process treatment equipment heats the device to be heated, the heating device heats the device to be heated, thereby ensuring the heating efficiency of the device to be heated by the process treatment equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1a and Figure 1b is a graph showing the relationship between the focal length and width of a parabola;

[0020] Figure 2 A schematic diagram of a structure of a process treatment device provided in an embodiment of the present application;

[0021] Figure 3a A top view of a heat radiation unit provided in an embodiment of the present application;

[0022] Figure 3b Another top view of the heat radiation unit provided in the embodiment of the present application;

[0023] Figure 3c Another top view of the heat radiation unit provided in the embodiment of the present application;

[0024] Figure 3d Another top view of the heat radiation unit provided in the embodiment of the present application;

[0025] Figure 4a A schematic diagram of an annular heating zone formed on the surface of a device to be heated by a counter-heating device provided in an embodiment of the present application;

[0026] Figure 4b for Figure 4a Schematic diagram of energy distribution in the middle annular heating zone;

[0027] Figure 5 A schematic diagram of a structure of a heat radiation unit provided in an embodiment of the present application;

[0028] Figure 6a A schematic diagram of a structure of a heat radiation unit provided in an embodiment of the present application;

[0029] Figure 6b A schematic diagram of another structure of a heat radiation unit provided in an embodiment of the present application;

[0030] Figure 7 for Figure 6a and Figure 6b A cross-sectional view of

[0031] Figure 8 for Figure 6a and Figure 6b Thermal simulation diagram of the heat radiation unit reflecting and converging light.

[0032] Reference numerals:

[0033] 1-heating device; 2-vacuum chamber; 20-bracket; 3-support component; 4-central axis; 5-device to be heated; 50-heating zone; 10-thermal radiation unit; 11-radiation source; 12-reflection structure; 120-accommodation groove; 121-first side wall; 1210-first parabola; 1211-first transition surface; 1212-first elliptical curve surface; 1213-third transition surface; 122-second side wall; 1220-second parabola; 1221-second transition surface; 1222-second elliptical curve surface; 1223-fourth transition surface; 123-bottom wall; 1230-third parabola. DETAILED DESCRIPTION

[0034] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings.

[0035] In the prior art, the reflection convergence angle of the parabola on the reflection structure has the following relationship with the focal length (L) and the width (W) of the parabola: the larger the focal length, the shallower the parabola, the smaller the reflection convergence angle, the larger the width of the parabola, and the farther the radiation source is from the vertex of the parabola; conversely, the smaller the focal length, the deeper the parabola, the larger the reflection convergence angle, and the smaller the width of the parabola. For details, please refer to Figure 1a and Figure 1b , Figure 1a The focal length of the parabola A1 is L1, the width of the parabola A1 is W1, and the convergence angle is C1. Figure 1b The focal length of the parabola A2 in is L2, the width of the parabola A2 is W2, and the convergence angle is C2. Among them, L1 is smaller than L2, W1 is smaller than W2, and C1 is larger than C2. When a radiation source is arranged on the reflective structure, if the focal length of the parabola on the reflective structure is small, when the radiation source is arranged at the focal length of the parabola, the radiation source will be close to the parabola, which will affect the heat dissipation of the radiation source. In addition, the radiation source also has certain external dimensions, and the radiation source cannot be infinitely close to the reflective surface (parabola). If the width of the reflector is increased, the width of the corresponding parabola will also increase accordingly, and the size of the entire reflective structure will also increase, which will cause the distance between the radiation source and the device to be heated to increase, thereby reducing the heating efficiency.

[0036] Therefore, a new reflection structure is urgently needed to reduce the size of the reflection structure and improve the reflection efficiency of the reflection structure.

[0037] The terms used in the following embodiments are only for the purpose of describing specific embodiments and are not intended to be limiting of the present application. As used in the specification and appended claims of the present application, the singular expressions "a", "an", "said", "above", "the" and "this" are intended to also include expressions such as "one or more", unless there is a clear contrary indication in the context.

[0038] References to "one embodiment" or "some embodiments" etc. described in this specification mean that a particular feature, structure or characteristic described in conjunction with the embodiment is included in one or more embodiments of the present application. Thus, the phrases "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. that appear at different places in this specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways. The terms "including", "comprising", "having" and their variations all mean "including but not limited to", unless otherwise specifically emphasized in other ways.

[0039] Figure 2 A process treatment device is provided in an embodiment of the present application, and the process treatment device includes a vacuum chamber 2 and at least one heating device 1. A support component 3 may be provided in the vacuum chamber 2, and the support component 3 may rotate around a central axis 4, and a device to be heated 5 may be provided on the support component 3. At least one heating device 1 is located on one side of the vacuum chamber 2, and the heating device 1 may reflect and converge light toward the vacuum chamber 2, and the light may pass through the vacuum chamber 2 and heat the device to be heated 5 provided on the support component 3, so that the surface of the device to be heated 5 is heated evenly. Specifically, the vacuum chamber 2 may be a light-transmitting vacuum chamber 2 to ensure that light can enter the interior of the vacuum chamber 2 to heat the surface of the device to be heated 5.

[0040] In order to improve the heating efficiency of the heated device 5, two heating devices 1 can be provided, and the two heating devices 1 are symmetrically arranged on both sides of the vacuum chamber 2. It can be understood that the two heating devices 1 are symmetrically arranged on both sides of the heated device 5 along the extension direction of the central axis 4, one heating device 1 is used to heat one surface of the heated device 5, and the other heating device 1 is used to heat the other surface of the heated device 5, so that the two surfaces of the heated device 5 can be heated at the same time, thereby improving the heating efficiency of the process equipment.

[0041] For more details, please refer to Figure 2The heating device 1 may include a bracket 20 and a plurality of heat radiation units 10. The heat radiation unit 10 may include a radiation source 11 and a reflective structure 12 for reflecting and converging the light emitted by the radiation source 11. The plurality of heat radiation units 10 may form a plurality of heat radiation mechanisms. The plurality of circumferential heat radiation mechanisms diffuse from the central axis to the periphery of the central axis 4, that is, a plurality of groups of circumferential heat radiation units diffuse from the center of the bracket to the periphery of the bracket 20. Each group of circumferential heat radiation units may reflect and converge light to the device to be heated, and form a plurality of annular heating zones on the surface of the device to be heated 5. The annular heating zones surround the central axis 4, and the plurality of annular heating zones may completely cover the surface of the device to be heated. Among them, since the reflective structure 12 included in the heat radiation unit 10 used in the heating device 1 is relatively small in size, and the reflective structure 12 reflects and converges more light, the heating efficiency of the heating device 1 is ensured, and the size of the space occupied by the heating device 1 can be reduced, thereby making the space occupied by the process equipment smaller.

[0042] Specifically, when each heat radiation unit 10 is disposed on the bracket, each heat radiation unit 10 can be detachably disposed on the bracket to improve the convenience of assembling the heating device 1 .

[0043] The radiation source 11 included in the heat radiation unit 10 may be a ring-shaped lamp, an arc-shaped lamp or a linear lamp. Correspondingly, the reflective structure 12 included in the heat radiation unit 10 is also ring-shaped, arc-shaped or linear. Figure 3a A top view of the heat radiation unit 10 provided in an embodiment of the present application; Figure 3b A top view of a heat radiation unit 10 provided in an embodiment of the present application, wherein the heat radiation mechanism comprises a plurality of heat radiation units 10 arranged in concentric circles, wherein: Figure 3a The radiation source 11 is annular. Figure 3a When the radiation source 11 is in the middle, in order to facilitate the setting, Figure 3a The radiation source 11 in is set to Figure 3b In the form, continue to refer to Figure 2 , Figure 3a and Figure 3b When the radiation source 11 is an annular lamp, each group of circumferential heat radiation units includes a radiation source 11, and a heat radiation unit 10 includes an annular lamp and a reflective structure 12 (not shown in the figure) corresponding to the annular lamp. At this time, multiple annular lamps are diffused and distributed from the central axis 4 to the periphery of the central axis 4. Each heat radiation mechanism forms an annular heating zone on the surface of the device to be heated 5. The light reflected and converged by the heating device 1 formed by the multiple circumferential heat radiation units and the bracket 20 forms multiple annular heating zones on the surface of the device to be heated 5, so as to heat the device to be heated 5.

[0044] Figure 3cAnother top view of the heat radiation unit provided in the embodiment of the present application, referring to Figure 2 and Figure 3c When the radiation source 11 is an arc lamp, each heat radiation mechanism includes a plurality of heat radiation units 10, each heat radiation mechanism is annular, and each heat radiation unit 10 includes an arc lamp and a reflective structure 12 corresponding to the arc lamp. At this time, the plurality of arc lamps included in each radiation mechanism form a ring. Each heat radiation mechanism forms an annular heating zone on the surface of the device to be heated 5. The light reflected and converged by the heating device 1 formed by the plurality of heat radiation mechanisms and the bracket 20 forms a plurality of annular heating zones on the surface of the device to be heated 5, so as to heat the device to be heated 5.

[0045] Figure 3d This is another top view of the heat radiation unit provided in the embodiment of the present application. Figure 2 and Figure 3d When the radiation source 11 is a linear lamp, each heat radiation mechanism includes a plurality of heat radiation units 10. Each heat radiation unit 10 is arranged in a linear shape, and each heat radiation mechanism includes a plurality of linear lamps and a plurality of reflective structures 12 corresponding to the linear lamps. At this time, the plurality of linear lamps included in each radiation mechanism form a polygon. When each heat radiation mechanism includes a large number of heat radiation units 10, an approximately annular heating zone is formed on the surface of the device to be heated 5. The light reflected and converged by the heating device 1 formed by the plurality of heat radiation mechanisms and the bracket 20 forms a plurality of approximately annular heating zones on the surface of the device to be heated 5, so as to heat the device to be heated 5.

[0046] Figure 4a It is a schematic diagram of the annular heating zone formed by the heating device on the surface of the device to be heated. Figure 4b for Figure 4a Schematic diagram of the energy distribution in the annular heating zone. Figure 4b In the surface in the figure, the energy gradually decreases from the vertex to the two ends of the surface, that is, the energy gradually decreases from the center of each annular heating area to the edge of the annular heating area. Figure 4a and Figure 4b The light reflected and converged by the above-mentioned heating device 1 can form multiple annular heating zones 50 or approximately annular heating zones on the surface of the device to be heated 5, and two adjacent heating zones 50 partially overlap, so that the multiple heating zones 50 can completely cover the surface of the device to be heated 5, thereby heating the device to be heated 5, and the two adjacent heating zones 50 partially overlap, which can make the temperature uniformity of the surface of the device to be heated better.

[0047] The heat radiation unit is described in more detail below.

[0048] Figure 5A schematic diagram of the structure of a heat radiation unit provided in an embodiment of the present application. Figure 5 The heat radiation unit 10 includes a radiation source 11 and a reflective structure 12. The reflective structure 12 has a receiving groove 120, and the receiving groove has a first side wall 121, a second side wall 122, and a bottom wall 123 connecting the first side wall 121 and the second side wall 122. The first side wall 121 may include a first parabola 1210, the second side wall 122 may include a second parabola 1220, and the bottom wall 123 may include a third parabola 1230. Among them, the first parabola 1210, the second parabola 1220, and the third parabola 1230 are parts of a hyperbolic parabola, a rotating parabola, or an elliptical parabola. The focal length of the third parabola 1230 is greater than the focal length of the first parabola 1210 and the second parabola 1220, and the projections of the first parabola 1210, the second parabola 1220, and the third parabola 1230 on the bottom wall 123 do not overlap. The radiation source 11 may be disposed in the receiving groove 120, and the radiation source 11 may cover the first focus of the first parabola 1210, the second focus of the second parabola 1220, and the third focus of the third parabola 1230. The first focus of the first parabola 1210, the second focus of the second parabola 1220, and the third focus of the third parabola 1230 are all located on the radiation source 11. In this arrangement, since the focal length of the third parabola 1230 is greater than the focal length of the first parabola 1210 and the second parabola 1220, the width of the overall parabola formed by the first parabola 1210 and the second parabola 1220 is smaller. The first parabola 1210 and the second parabola 1220 are arranged on the first side wall 121 and the second side wall 122 of the receiving groove, respectively, that is, the interval between the first side wall 121 and the second side wall 122 away from the bottom wall 123 is small, so that the opening of the receiving groove 120 away from the bottom wall 123 is small, the overall size of the reflective structure is small, and the convergence angle of the reflective structure is larger, so that the reflective structure can reflect and converge more light. Specifically, when the radiation source 11 is set, the radiation source 11 can cover the focal points of the first parabola 1210, the second parabola 1220 and the third parabola 1230. Since the focal length of the third parabola 1230 is greater than the focal length of the first parabola 1210 and the second parabola 1220, the reflective structure 12 has a larger convergence angle to converge and reflect more light radiated by the radiation source to the device to be heated, thereby improving the heating efficiency. In addition, the diameter of the radiation source 11 is smaller than the focal length of the third parabola 1230, and the diameter of the radiation source 11 is also larger than the focal lengths of the first parabola 1210 and the second parabola 1220, so that the radiation source 11 is farther away from the third parabola 1230, and the distance between the radiation source 11 and the extension line of the first parabola 1210 and the second parabola 1220 is relatively close, which can prevent the radiation source 11 from interfering with the first parabola 1210 and the second parabola 1220.

[0049] It is worth mentioning that when forming the above-mentioned first parabola 1210, second parabola 1220 and third parabola 1230, since the focal length of the first parabola 1210 is relatively small, the first parabola 1210 can be disconnected at a position close to the radiation source 11. Similarly, the focal length of the second parabola 1220 is also relatively small, and the second parabola 1220 can also be disconnected at a position close to the radiation source 11. When the third parabola 1230 is set, the third parabola 1230 is actually located at the disconnection point between the first parabola 1210 and the second parabola 1220, so that the bottom wall 123 connects the first side wall 121 and the second side wall 122.

[0050] In addition, the projections of the first parabola 1210, the second parabola 1220 and the third parabola 1230 on the bottom wall 123 do not overlap, so that a smooth curved surface can be formed between the first side wall 121, the second side wall 122 and the bottom wall 123 of the accommodating groove 120, so as to prevent the light radiated by the radiation source from being refracted multiple times between the first side wall 121, the second side wall 122 and the bottom wall 123, thereby improving the ability of the reflective structure 12 to converge light.

[0051] In the above-mentioned embodiment, the relationship between the first focus of the first parabola 1210, the second focus of the second parabola 1220, and the third focus of the third parabola 1230 can be in various forms. For example, the first focus, the second focus, and the third focus coincide; or, the first focus coincides with the second focus, in which case the extension lines of the first parabola 1210 and the second parabola 1220 can coincide, and the third focus can be close to the first focus and the second focus; or, the first focus coincides with the third focus, and the second focus is close to the first focus and the third focus; or, the second focus coincides with the third focus, and the first focus is close to the second focus and the third focus. The first focus, the second focus, and the third focus are relatively close, and the position where the radiation source 11 is set can be located. It can also be understood that the radiation source 11 is set at the convergence of the first focus, the second focus, and the third focus.

[0052] It is worth mentioning that when the third parabola 1230 is specifically set, the third parabola 1230 can be formed by connecting multiple sub-paraboloids in sequence, the focal lengths of the multiple sub-paraboloids are greater than the focal lengths of the first parabola 1210 and the second parabola 1220, and the focal lengths of the multiple sub-paraboloids are approximately the same.

[0053] In one possible embodiment, continue to refer to Figure 5The first parabola 1210 and the second parabola 1220 are symmetrically arranged so that the amount of light reflected and converged by the first parabola 1210 and the second parabola 1220 is approximately the same, thereby ensuring that the amount of light reflected and converged to each part of the heating area on the surface of the device to be heated is relatively uniform. In addition, when the first parabola 1210 and the second parabola 1220 are specifically arranged, the first parabola 1210 and the second parabola 1220 can also be arranged asymmetrically, as long as the focal lengths of the first parabola 1210 and the second parabola 1220 are smaller than the focal length of the third parabola.

[0054] In the above embodiment, continue to refer to Figure 5 The first side wall 121 may further include a first transition surface 1211, and the first transition surface 1211 may connect the first parabola 1210 and the third parabola 1230. The second side wall 122 may further include a second transition surface 1221, and the second transition surface 1221 may connect the second parabola 1220 and the third parabola 1230. The first transition surface 1211 and the second transition surface 1221 may be symmetrically arranged, and the first transition surface 1211 and the second transition surface 1221 may be symmetrically arranged, so that the distances between the third focus of the third parabola 1230, the second focus of the second parabola 1220, and the first focus of the first parabola 1210 are closer, which is more convenient for the arrangement of the radiation source 11.

[0055] More specifically, when the first transition surface 1211 and the second transition surface 1221 are specifically arranged, the first transition surface 1211 and the second transition surface 1221 may extend along the depth direction of the receiving groove 120, so that when the radiation source 11 is arranged, the radiation source 11 is at a moderate distance from the first parabola 1210, the second parabola 1220, and the third parabola 1230. That is, when the radiation source 11 is arranged, the radiation source 11 will not interfere with the first parabola 1210 and the second parabola 1220.

[0056] In addition, the first transition surface 1211 and the second transition surface 1221 can be symmetrically arranged, or asymmetrically arranged, and the extension direction of the first transition surface 1211 and the second transition surface 1221 can also be arranged parallel to the depth direction of the receiving groove 120, that is, the first transition surface 1211 and the second transition surface 1221 are planes. The first transition surface 1211 and the second transition surface 1221 can also be curved surfaces, in which case the first transition surface 1211 is arched toward the side away from the focal length of the first parabola, and the second transition surface 1221 is arched toward the side away from the focal length of the second parabola. The surface shape of the first transition surface 1211 and the second transition surface 1221 can be adjusted according to actual needs.

[0057] In another possible embodiment, Figure 6aA schematic diagram of the structure of a heat radiation unit provided in an embodiment of the present application, Figure 6b This is another structural schematic diagram of a heat radiation unit provided in an embodiment of the present application. Figure 7 for Figure 6a and Figure 6b Specifically, in Figure 6a The radiation source 11 in the heat radiation unit is a linear lamp. Figure 6b The radiation source 11 in the heat radiation unit is an arc lamp. The radiation source 11 in the heat radiation unit can also be other types of lamps, which are not listed here. Figure 6a , Figure 6b as well as Figure 7 The first side wall 121 in the reflective structure 12 may further include a third transition surface 1213 and a first elliptical curve surface 1212, one side of the third transition surface 1213 is connected to one side of the third parabola 1230, the other side of the third transition surface 1213 is connected to one side of the first elliptical curve surface 1212, and the other side of the first elliptical curve surface 1212 is connected to the first parabola 1210. The second side wall 122 also includes a fourth transition surface 1223 and a second elliptical curve surface 1222, one side of the fourth transition surface 1223 is connected to the third parabola 1230, the other side of the fourth transition surface 1223 is connected to one side of the second elliptical curve surface 1222, and the other side of the second elliptical curve surface 1222 is connected to the second parabola 1220. In this arrangement, the radiation source 11 is also located in the receiving groove 120 and is arranged at a position that can cover the focal points of the first parabola 1210, the second parabola 1220, and the third parabola 1230. The first elliptical curve surface 1212 and the second elliptical curve surface 1222 can reflect the light emitted by the radiation source 11 onto the second parabola 1220 and the first parabola 1210, and converge through the second parabola 1220 and the first parabola 1210 and re-emit it toward the device to be heated, so that the reflective structure 12 can converge more light, thereby improving the heating efficiency of the thermal radiation unit.

[0058] When the first elliptical curve surface 1212 and the second elliptical curve surface 1222 are specifically set, the first elliptical curve surface 1212 and the second elliptical curve surface 1222 can be symmetrically set, and the symmetry axes of the first elliptical curve surface 1212 and the second elliptical curve surface 1222 coincide with the symmetry axes of the first parabola 1210 and the second parabola 1220. When the third transition surface 1213 and the fourth transition surface 1223 are specifically set, the third transition surface 1213 and the fourth transition surface 1223 can also be symmetrically set, and the symmetry axes of the third transition surface 1213 and the fourth transition surface 1223 can coincide with the symmetry axes of the first elliptical curve surface 1212 and the second elliptical curve surface 1222.

[0059] In addition, when the first elliptical curve surface 1212, the second elliptical curve surface 1222, the third transition surface 1213 and the fourth transition surface 1223 are specifically arranged, the first elliptical curve surface 1212, the second elliptical curve surface 1222, the third transition surface 1213 and the fourth transition surface 1223 can all extend along the depth direction of the receiving groove 120 to facilitate the arrangement of the radiation source 11. More specifically, the heights of the first elliptical curve surface 1212 and the second elliptical curve surface 1222 along the depth direction of the receiving groove can be the same, and the areas of the first elliptical curve surface 1212 and the second elliptical curve surface 1222 can be the same. Similarly, the heights of the third transition surface 1213 and the fourth transition surface 1223 along the depth direction of the receiving groove can be the same, and the areas of the third transition surface 1213 and the fourth transition surface 1223 can be the same. Similarly, the heights of the first parabola 1210 and the second parabola 1220 along the depth direction of the receiving groove can be the same, and the areas of the first parabola 1210 and the second parabola 1220 can be the same. In this way, the light reflected and converged by the first side wall 121 and the second side wall 122 can be distributed relatively evenly in the heating area formed by the device to be heated, so as to improve the uniformity of heating of the device to be heated, thereby improving the performance of the device to be heated.

[0060] In another possible embodiment, when setting the first elliptical curve surface 1212, the second elliptical curve surface 1222, the third transition surface 1213 and the fourth transition surface 1223, the first elliptical curve surface 1212 and the second elliptical curve surface 1222 may also be set asymmetrically, and correspondingly, the third transition surface 1213 and the fourth transition surface 1223 may also be set asymmetrically, as long as it can be ensured that the reflective structure can converge and reflect more light and the size of the reflective structure is small.

[0061] To further illustrate the Figure 6a and Figure 6b The heating effect of the set heat radiation unit is shown in the following figure. Figure 8 ,exist Figure 8 In the embodiment, the distance between the radiation source in the heat radiation unit and the surface of the device to be heated is a set value, and the set value can be adjusted according to the actual situation, such as: the set value can be but not limited to 450mm, 600mm, 800mm or 1050mm, etc. Figure 8 The horizontal axis is the size, and the vertical axis is the energy. In the area radiated by the heat radiation unit, the energy at the zero point (center of the radiation area) close to the radiation area is 2.5~3*10 4 W / m 2 , compared with the radiation unit in the prior art, the radiation energy radiated is more, which shows that the heating effect of the heat radiation unit is better.

[0062] The above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A reflective structure, characterized in that: The reflective structure has a receiving groove, which has a first side wall, a second side wall and a bottom wall connected to the first side wall and the second side wall, the first side wall includes a first parabola, the second side wall includes a second parabola, and the bottom wall includes a third parabola, and the focal length of the third parabola is respectively greater than the focal length of the first parabola and the focal length of the second parabola.

2. The reflective structure according to claim 1, characterized in that: The projections of the first parabola, the second parabola and the third parabola on the bottom wall do not overlap.

3. The reflective structure according to claim 1 or 2, characterized in that: The first parabola and the second parabola are symmetrically arranged.

4. The reflective structure according to any one of claims 1 to 3, characterized in that: The first side wall further includes a first transition surface, and the second side wall further includes a second transition surface. The first transition surface connects the first parabola and the third parabola, and the second transition surface connects a side of the second parabola away from the first transition surface and the third parabola.

5. The reflective structure according to claim 4, characterized in that: The first transition surface and the second transition surface are symmetrically arranged, and the first transition surface and the second transition surface extend along the depth direction of the accommodating groove respectively.

6. The reflective structure according to any one of claims 1 to 3, characterized in that: The first side wall also includes a third transition surface and a first elliptical curve surface, and the second side wall also includes a fourth transition surface and a second elliptical curve surface; one side of the third transition surface is connected to one side of the third parabola, the other side of the third transition surface is connected to one side of the first elliptical curve surface, and the other side of the first elliptical curve surface is connected to the first parabola; one side of the fourth transition surface is connected to a side of the third parabola away from the third transition surface, the other side of the fourth transition surface is connected to one side of the second elliptical curve surface, and the other side of the second elliptical curve surface is connected to the second parabola.

7. The reflective structure according to claim 6, characterized in that: The first elliptical curve surface and the second elliptical curve surface are symmetrically arranged, the third transition surface and the fourth transition surface are symmetrically arranged, and the first elliptical curve surface, the second elliptical curve surface, the third transition surface and the fourth transition surface all extend along the depth direction of the accommodating groove.

8. A heat radiation unit, characterized in that: It comprises a radiation source and the reflective structure according to any one of claims 1 to 7, wherein the radiation source is arranged in the accommodating groove, and the first focus of the first parabola, the second focus of the second parabola and the third focus of the third parabola are all located on the radiation source.

9. The heat radiation unit according to claim 8, characterized in that: The radiation source is one or more of a linear lamp, an arc lamp or a ring lamp.

10. A heating device, characterized in that: It comprises a bracket and a plurality of heat radiation units as described in claim 8 or 9; the plurality of heat radiation units are all arranged on the bracket, and the plurality of heat radiation units form a plurality of heat radiation mechanisms on the bracket, and the plurality of heat radiation mechanisms diffuse toward the periphery along the axis of the bracket.

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