Information processing method, device and system for photoresist and storage medium

Abstract

The embodiment of the invention provides an information processing method, device and system for photoresist and a storage medium, and the method comprises the steps: obtaining first replacement information, the first replacement information comprises first photoresist information and first pipeline information, the first photoresist information is material information of to-be-replaced photoresist, and the first pipeline information is material information of the to-be-replaced photoresist; the first pipeline information is pipeline information of a photoresist pipeline corresponding to the photoresist to be replaced; second replacement information is obtained, the second replacement information comprises second photoresist information and second pipeline information, the second photoresist information is material information of the photoresist after replacement, the second pipeline information is pipeline information of a photoresist pipeline corresponding to the photoresist after replacement, and the photoresist after replacement is used for replacing the photoresist to be replaced; and according to the first replacement information and the second replacement information, generating prompt information about whether the photoresist is correctly replaced after replacement. By adopting the scheme, the probability of photoresist replacement errors can be reduced, and the accuracy of photoresist replacement can be improved.

Description

Technical Field

[0001] The embodiments of the present specification relate to the field of semiconductor device manufacturing technology, and more particularly to an information processing method, device, system and storage medium for photoresist. Background Art

[0002] In the field of semiconductor device manufacturing technology, photoresist is the most critical material in the photolithography process, so photoresist needs to be managed.

[0003] The management of photoresist involves the replacement of photoresist. Due to the chemical properties of photoresist, the storage, transportation and use of photoresist must be strictly controlled. Therefore, the replacement of photoresist usually needs to be performed manually.

[0004] In this context, how to provide a data information processing solution to provide a basis for improving the accuracy of photoresist replacement has become a technical problem that technical personnel in this field urgently need to solve. Summary of the invention

[0005] In view of this, the embodiments of the present specification provide a method, device, system and storage medium for information processing of photoresist, which can reduce the probability of photoresist replacement errors and improve the accuracy of photoresist replacement.

[0006] First, the embodiment of this specification provides an information processing method for photoresist, including:

[0007] Acquire first replacement information, where the first replacement information includes first photoresist information and first pipeline information, wherein the first photoresist information is material information of the photoresist to be replaced, and the first pipeline information is pipeline information of the photoresist pipeline corresponding to the photoresist to be replaced;

[0008] And, obtaining second replacement information, the second replacement information including second photoresist information and second pipeline information, wherein the second photoresist information is material information of the replaced photoresist, the second pipeline information is pipeline information of the photoresist pipeline corresponding to the replaced photoresist, and the replaced photoresist is used to replace the photoresist to be replaced;

[0009] According to the first replacement information and the second replacement information, prompt information is generated to show whether the photoresist is replaced correctly after replacement.

[0010] Optionally, generating prompt information on whether the replaced photoresist is correctly replaced according to the first replacement information and the second replacement information includes:

[0011] Determining whether the first photoresist information and the second photoresist information are the same, and determining whether the first pipeline information and the second pipeline information are the same;

[0012] When it is confirmed that the first photoresist information is the same as the second photoresist information, and the first pipeline information is the same as the second pipeline information, a prompt message indicating that the photoresist is correctly replaced is output; otherwise, a prompt message indicating that the photoresist is incorrectly replaced is output.

[0013] Optionally, the first photoresist information is carried on a first photoresist identifier, the first pipeline information is carried on a first pipeline identifier, the second photoresist information is carried on a second photoresist identifier, and the second pipeline information is carried on a second pipeline identifier.

[0014] Optionally, the first photoresist marker is set on a first container containing photoresist, the first pipeline marker is set on a mounting groove for installing the first container, the second photoresist marker is set on a second container containing photoresist, and the second pipeline marker is set on a mounting groove for installing the second container.

[0015] Optionally, the first photoresist mark, the second photoresist mark, the first pipeline mark and the second pipeline mark are all in the form of barcodes; the first replacement information and the second replacement information are obtained by scanning with a scanner.

[0016] Optionally, the scanning gun simultaneously scans the first photoresist mark and the first pipeline mark in one scanning process to scan and obtain the first photoresist information and the first pipeline information; the scanning gun simultaneously scans the second photoresist mark and the second pipeline mark in one scanning process to scan and obtain the second photoresist information and the second pipeline information.

[0017] Optionally, the first photoresist information includes the category of the photoresist to be replaced; and the second photoresist information includes the category of the replaced photoresist.

[0018] The embodiment of this specification also provides an information processing device for photoresist, including:

[0019] The information acquisition unit is adapted to acquire first replacement information and second replacement information; the first replacement information includes first photoresist information and first pipeline information, wherein the first photoresist information is material information of the photoresist to be replaced, and the first pipeline information is pipeline information of the photoresist pipeline corresponding to the photoresist to be replaced; the second replacement information includes second photoresist information and second pipeline information, wherein the second photoresist information is material information of the replaced photoresist, and the second pipeline information is pipeline information of the photoresist pipeline corresponding to the replaced photoresist, and the replaced photoresist is used to replace the photoresist to be replaced;

[0020] The information processing unit is adapted to generate prompt information on whether the replaced photoresist is correct according to the first replacement information and the second replacement information.

[0021] The embodiment of this specification also provides an information processing system for photoresist, including:

[0022] A scanning gun, adapted to scan and obtain first replacement information, and scan and obtain second replacement information; the first replacement information includes first photoresist information and first pipeline information, wherein the first photoresist information is material information of the photoresist to be replaced, and the first pipeline information is pipeline information of the photoresist pipeline corresponding to the photoresist to be replaced; the second replacement information includes second photoresist information and second pipeline information, wherein the second photoresist information is material information of the replaced photoresist, and the second pipeline information is pipeline information of the photoresist pipeline corresponding to the replaced photoresist, and the replaced photoresist is used to replace the photoresist to be replaced;

[0023] The computer device is suitable for obtaining the first replacement information and the second replacement information from the scanning gun; and generating prompt information on whether the replaced photoresist is correctly replaced according to the first replacement information and the second replacement information.

[0024] Optionally, the first photoresist information is carried on a first photoresist identifier, the first pipeline information is carried on a first pipeline identifier, the second photoresist information is carried on a second photoresist identifier, and the second pipeline information is carried on a second pipeline identifier.

[0025] Optionally, the first photoresist marker is set on a first container for containing photoresist, the first pipeline marker is set on a mounting groove for installing the first container, the second photoresist marker is set on a second container for containing photoresist, and the second pipeline marker is set on a mounting groove for installing the second container.

[0026] Optionally, the first photoresist identifier, the second photoresist identifier, the first pipeline identifier and the second pipeline identifier are all in the form of barcodes; the scanning gun simultaneously scans the first photoresist identifier and the first pipeline identifier in one scanning process to scan and obtain the first photoresist information and the first pipeline information; the scanning gun simultaneously scans the second photoresist identifier and the second pipeline identifier in one scanning process to scan and obtain the second photoresist information and the second pipeline information.

[0027] Optionally, the computer device is adapted to generate prompt information on whether the replaced photoresist is correctly replaced according to the first replacement information and the second replacement information, including:

[0028] Determining whether the first photoresist information and the second photoresist information are the same, and determining whether the first pipeline information and the second pipeline information are the same;

[0029] When it is confirmed that the first photoresist information is the same as the second photoresist information, and the first pipeline information is the same as the second pipeline information, a prompt message indicating that the photoresist is correctly replaced is output; otherwise, a prompt message indicating that the photoresist is incorrectly replaced is output.

[0030] An embodiment of the present specification also provides a computer-readable storage medium having a computer program stored thereon, wherein when the computer program is run, the steps of the information processing method for photoresist described in any of the aforementioned embodiments are executed.

[0031] Using the information processing method for photoresist provided in the embodiment of this specification, since the first replacement information includes the first photoresist information and the first pipeline information, and the second replacement information includes the second photoresist information and the second pipeline information, by obtaining the first replacement information and the second replacement information, and then based on the first replacement information and the second replacement information, it can be determined whether the photoresist is replaced correctly after replacement, so that prompt information can be generated to reduce the probability of incorrect photoresist replacement.

[0032] Furthermore, by judging whether the first photoresist information and the second photoresist information are the same, and judging whether the first pipeline information and the second pipeline information are the same, it is possible not only to confirm whether the replaced photoresist is the target replaced photoresist, but also to further confirm whether the replaced photoresist is placed in the correct position and corresponds to the correct pipeline. Then, when it is confirmed that the first photoresist information and the second photoresist information are the same, and the first pipeline information and the second pipeline information are the same, a prompt message indicating that the replaced photoresist is correctly replaced is output, otherwise a prompt message indicating that the replaced photoresist is incorrectly replaced is output, thereby greatly reducing the probability of incorrect photoresist replacement.

[0033] Furthermore, by carrying the first photoresist information, the first pipeline information, the second photoresist information and the second pipeline information through the first photoresist identifier, the first pipeline identifier, the second photoresist identifier and the second pipeline identifier, information carrying can be achieved, which is convenient for scanning and identification of information.

[0034] Furthermore, by setting the first photoresist identifier on the first container for containing photoresist, the first pipeline identifier on the mounting groove for installing the first container, the second photoresist identifier on the second container for containing photoresist, and the second pipeline identifier on the mounting groove for installing the second container, not only can the first photoresist information, the first pipeline information, the second photoresist information and the second pipeline information be obtained quickly and conveniently, but also the accuracy of the obtained information can be guaranteed, which can further reduce the probability of photoresist replacement errors.

[0035] Furthermore, the first photoresist mark, the second photoresist mark, the first pipeline mark and the second pipeline mark can be in the form of a barcode, which can not only carry a variety of information but also facilitate subsequent information collection; in addition, the first replacement information and the second replacement information can be obtained by scanning with a scanner, which is not only convenient to operate, but also due to the telemetry technology of the scanner, it will not be restricted by the collection environment and is flexible to operate.

[0036] Furthermore, the scanning gun can simultaneously scan the first photoresist mark and the first pipeline mark in one scanning process to scan and obtain the first photoresist information and the first pipeline information, thereby realizing the simultaneous acquisition of the first photoresist information and the first pipeline information in one information acquisition process; the scanning gun can simultaneously scan the second photoresist mark and the second pipeline mark in one scanning process to scan and obtain the second photoresist information and the second pipeline information, thereby realizing the simultaneous acquisition of the second photoresist information and the second pipeline information in one information acquisition process. As can be seen from the above, not only can the efficiency of information acquisition be improved, but also it is convenient to confirm the corresponding relationship between the first photoresist information and the first pipeline information, and to confirm the corresponding relationship between the second photoresist information and the second pipeline information, thereby further reducing the probability of photoresist replacement errors.

[0037] Furthermore, the type of photoresist can be accurately identified by the category of the photoresist, so that it can be determined whether the photoresist is replaced correctly after replacement. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0039] Figure 1 A flow chart of an information processing method for photoresist in an embodiment of this specification is shown;

[0040] Figure 2 A schematic diagram of the steps of generating prompt information on whether the replaced photoresist is correctly replaced is shown in an embodiment of this specification;

[0041] Figure 3 A schematic diagram of the structure of an information processing device for photoresist in an embodiment of this specification is shown;

[0042] Figure 4 A schematic diagram of the structure of an information processing system for photoresist in an embodiment of this specification is shown;

[0043] Figure 5 A schematic diagram of the working process of an information processing system for photoresist in an embodiment of this specification is shown. DETAILED DESCRIPTION

[0044] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific implementation disclosed below.

[0045] As described in the background art, due to the chemical properties of photoresist, the storage, transportation and use of photoresist must be strictly controlled, so the replacement of photoresist must be done manually. However, the probability of manual replacement errors is very high.

[0046] In view of the above problems, the present specification provides an information processing method for photoresist, referring to Figure 1 The flowchart of a method for information processing of photoresist shown in the figure may adopt the following information processing scheme, when replacing the photoresist, output prompt information whether the replaced photoresist is correct, thereby providing a guarantee and reminder mechanism for the correct replacement of the photoresist. The steps may include:

[0047] Step A, obtaining first replacement information, wherein the first replacement information includes first photoresist information and first pipeline information, wherein the first photoresist information is material information of the photoresist to be replaced, and the first pipeline information is pipeline information of the photoresist pipeline corresponding to the photoresist to be replaced.

[0048] In some embodiments of the present specification, the photoresist to be replaced refers to the photoresist used up in the photolithography process. For the used up photoresist, new photoresist needs to be provided so that the photolithography process can continue.

[0049] As an optional example, the first photoresist information may include the category of the photoresist to be replaced.

[0050] By adopting the above-mentioned embodiment, the type of photoresist can be accurately identified by the type of photoresist, so that it can be determined whether the photoresist is replaced correctly after replacement.

[0051] In some embodiments of the present specification, the first photoresist information may include information such as the type, production batch number, and expiration time of the photoresist to be replaced. Specifically, after determining whether the replaced photoresist is correct by the type of the photoresist, the production batch number, expiration time, and other information of the photoresist to be replaced may be further checked to confirm whether the photoresist meets the usage conditions.

[0052] By using the above embodiment, the type of photoresist, production batch number and expiration time can not only accurately identify the type of photoresist, but also confirm whether the photoresist meets the usage conditions, thereby avoiding the adverse effects of expired photoresist on the processing process.

[0053] It is understandable that the first photoresist information may also only include the category of the photoresist to be replaced, or include the category of the photoresist to be replaced and any other one or more types of information in combination.

[0054] The photoresist pipeline is used to transport the corresponding photoresist. As an optional example, the first pipeline information may be information indicating the photoresist pipeline used to transport the photoresist to be replaced.

[0055] It should be noted that the first photoresist information is not specifically limited in the embodiments of this specification, and the first photoresist information listed in the above embodiments is only for illustrative purposes. In some embodiments of this specification, the first photoresist information may also include other information such as the composition of the photoresist.

[0056] Step B, obtain second replacement information, the second replacement information includes second photoresist information and second pipeline information, wherein the second photoresist information is the material information of the replaced photoresist, and the second pipeline information is the pipeline information of the photoresist pipeline corresponding to the replaced photoresist, and the replaced photoresist is used to replace the photoresist to be replaced.

[0057] As an optional example, the information type of the second photoresist information may be the same as the information type of the first photoresist information. For example, the second photoresist information includes the category of the replaced photoresist.

[0058] In some embodiments of the present specification, the second photoresist information may include information such as the type, production batch number, and expiration date of the replaced photoresist.

[0059] As an optional example, the second pipeline information may be information indicating a photoresist pipeline used to transport the replaced photoresist.

[0060] Step C, generating prompt information on whether the replaced photoresist is correct based on the first replacement information and the second replacement information.

[0061] Using the above embodiment, since the first replacement information includes the first photoresist information and the first pipeline information, and the second replacement information includes the second photoresist information and the second pipeline information, by obtaining the first replacement information and the second replacement information, and then based on the first replacement information and the second replacement information, it can be determined whether the photoresist is replaced correctly after replacement, so that prompt information can be generated to reduce the probability of incorrect photoresist replacement.

[0062] In some embodiments of this specification, for step C, refer to Figure 2 The schematic diagram of the steps for generating prompt information on whether the replaced photoresist is correctly replaced may specifically include the following steps:

[0063] Step C1, determining whether the first photoresist information and the second photoresist information are the same, and determining whether the first pipeline information and the second pipeline information are the same.

[0064] Step C2, when confirming that the first photoresist information and the second photoresist information are the same, and the first pipeline information and the second pipeline information are the same, output a prompt message indicating that the photoresist is replaced correctly after replacement, otherwise output a prompt message indicating that the photoresist is replaced incorrectly after replacement.

[0065] By adopting the above embodiment, by judging whether the first photoresist information and the second photoresist information are the same, and judging whether the first pipeline information and the second pipeline information are the same, not only can it be confirmed whether the replaced photoresist is the target replaced photoresist, but it can also be further confirmed whether the replaced photoresist is placed in the correct position and corresponds to the correct pipeline. Then, when it is confirmed that the first photoresist information and the second photoresist information are the same, and the first pipeline information and the second pipeline information are the same, a prompt message indicating that the replaced photoresist is correctly replaced is output, otherwise a prompt message indicating that the replaced photoresist is incorrectly replaced is output, thereby greatly reducing the probability of incorrect photoresist replacement.

[0066] As an optional example, the first photoresist information may be carried on a first photoresist identifier, the first pipeline information may be carried on a first pipeline identifier, the second photoresist information may be carried on a second photoresist identifier, and the second pipeline information may be carried on a second pipeline identifier.

[0067] By adopting the above embodiment, the first photoresist information, the first pipeline information, the second photoresist information and the second pipeline information are carried by the first photoresist identifier, the first pipeline identifier, the second photoresist identifier and the second pipeline identifier, so that information carrying can be achieved, which is convenient for scanning and identification of information.

[0068] As an optional example, the first photoresist marker can be set on a first container for containing photoresist, the first pipeline marker can be set on a mounting groove for installing the first container, the second photoresist marker can be set on a second container for containing photoresist, and the second pipeline marker can be set on a mounting groove for installing the second container.

[0069] In some embodiments of the present specification, the first container and the second container may be bottles having the same shape and capacity.

[0070] It is to be understood that the embodiments of this specification do not impose any specific restrictions on the first container and the second container. In other embodiments of this specification, the shapes and capacities of the first container and the second container may be different.

[0071] By adopting the above embodiment, by setting the first photoresist identifier on the first container for containing photoresist, the first pipeline identifier on the installation groove for installing the first container, the second photoresist identifier on the second container for containing photoresist, and the second pipeline identifier on the installation groove for installing the second container, not only can the first photoresist information, the first pipeline information, the second photoresist information and the second pipeline information be obtained quickly and conveniently, but also the accuracy of the obtained information can be guaranteed, and the probability of photoresist replacement errors can be further reduced.

[0072] In some embodiments of the present specification, the first photoresist mark, the second photoresist mark, the first pipeline mark and the second pipeline mark are all in the form of barcodes. Using this example, the barcode can not only carry a variety of information, but also facilitate subsequent information collection.

[0073] As an optional example, the first replacement information and the second replacement information can be obtained by scanning with a scanner, which is not only convenient to operate, but also flexible in operation because it is not limited by the collection environment due to the telemetry technology of the scanner.

[0074] As another optional example, the scanning gun can simultaneously scan the first photoresist mark and the first pipeline mark in one scanning process to scan and obtain the first photoresist information and the first pipeline information, thereby realizing the simultaneous acquisition of the first photoresist information and the first pipeline information in one information acquisition process; the scanning gun can simultaneously scan the second photoresist mark and the second pipeline mark in one scanning process to scan and obtain the second photoresist information and the second pipeline information, thereby realizing the simultaneous acquisition of the second photoresist information and the second pipeline information in one information acquisition process.

[0075] The above embodiment can not only improve the efficiency of information collection, but also facilitate confirmation of the correspondence between the first photoresist information and the first pipeline information, and confirmation of the correspondence between the second photoresist information and the second pipeline information, thereby further reducing the probability of photoresist replacement errors.

[0076] It is understandable that the embodiments of this specification do not specifically limit the manner of obtaining the first replacement information and the second replacement information. In other embodiments of this specification, the first photoresist information and the first pipeline information or the second photoresist information and the second pipeline information can be collected twice.

[0077] The present specification also provides an information processing device for photoresist, referring to Figure 3 The schematic diagram of the structure of an information processing device for photoresist is shown, and the information processing device T for photoresist may include:

[0078] The information acquisition unit T1 is adapted to acquire first replacement information and second replacement information; the first replacement information includes first photoresist information and first pipeline information, wherein the first photoresist information is material information of the photoresist to be replaced, and the first pipeline information is pipeline information of the photoresist pipeline corresponding to the photoresist to be replaced; the second replacement information includes second photoresist information and second pipeline information, wherein the second photoresist information is material information of the replaced photoresist, and the second pipeline information is pipeline information of the photoresist pipeline corresponding to the replaced photoresist, and the replaced photoresist is used to replace the photoresist to be replaced;

[0079] The information processing unit T2 is adapted to generate prompt information on whether the replaced photoresist is correct according to the first replacement information and the second replacement information.

[0080] Using the above embodiment, the first replacement information and the second replacement information are obtained by the information acquisition unit. Since the first replacement information includes the first photoresist information and the first pipeline information, and the second replacement information includes the second photoresist information and the second pipeline information, by obtaining the first replacement information and the second replacement information, the information processing unit can determine whether the photoresist is replaced correctly according to the first replacement information and the second replacement information, thereby generating prompt information on whether the photoresist is replaced correctly after replacement, so as to reduce the probability of incorrect photoresist replacement.

[0081] In a specific implementation, the information acquisition unit may acquire information by using the relevant embodiments of acquiring information in the above-mentioned information processing method for photoresist, which will not be described in detail here.

[0082] In a specific implementation, the information processing unit may generate prompt information by adopting the relevant embodiments of the above-mentioned information processing method for photoresist for generating prompt information on whether the photoresist is replaced correctly after replacement, which will not be described in detail here.

[0083] For ease of implementation, the present specification also provides an information processing system for photoresist, referring to Figure 4 The structural schematic diagram of an information processing system for photoresist shown in FIG. 1 is a schematic diagram of an information processing system for photoresist, and the information processing system X for photoresist may include:

[0084] The scanning gun X1 is suitable for scanning to obtain the first replacement information and the second replacement information; the first replacement information includes the first photoresist information and the first pipeline information, wherein the first photoresist information is the material information of the photoresist to be replaced, and the first pipeline information is the pipeline information of the photoresist pipeline corresponding to the photoresist to be replaced; the second replacement information includes the second photoresist information and the second pipeline information, wherein the second photoresist information is the material information of the replaced photoresist, and the second pipeline information is the pipeline information of the photoresist pipeline corresponding to the replaced photoresist, and the replaced photoresist is used to replace the photoresist to be replaced.

[0085] The computer device X2 is adapted to obtain the first replacement information and the second replacement information from the scanning gun X1; and generate prompt information on whether the replaced photoresist is correctly replaced according to the first replacement information and the second replacement information.

[0086] By adopting the above embodiment, the first replacement information is obtained by scanning with the scanning gun, and the second replacement information is obtained by scanning, and then the first replacement information and the second replacement information are obtained from the scanning gun by the computer device. Since the first replacement information includes the first photoresist information and the first pipeline information, and the second replacement information includes the second photoresist information and the second pipeline information, therefore, by obtaining the first replacement information and the second replacement information, the computer device can determine whether the replaced photoresist is correctly replaced according to the first replacement information and the second replacement information, thereby generating prompt information on whether the replaced photoresist is correctly replaced, so as to reduce the probability of incorrect photoresist replacement.

[0087] As an optional example, the first photoresist information may be carried on a first photoresist identifier, the first pipeline information may be carried on a first pipeline identifier, the second photoresist information may be carried on a second photoresist identifier, and the second pipeline information may be carried on a second pipeline identifier.

[0088] By adopting the above embodiment, the first photoresist information, the first pipeline information, the second photoresist information and the second pipeline information are carried by the first photoresist identifier, the first pipeline identifier, the second photoresist identifier and the second pipeline identifier, so that information carrying can be achieved, which is convenient for scanning and identification of information.

[0089] As an optional example, the first photoresist marker can be set on a first container for containing photoresist, the first pipeline marker can be set on a mounting groove for installing the first container, the second photoresist marker can be set on a second container for containing photoresist, and the second pipeline marker can be set on a mounting groove for installing the second container.

[0090] In some embodiments of the present specification, the first container and the second container may be bottles having the same shape and capacity.

[0091] It is to be understood that the embodiments of this specification do not impose any specific restrictions on the first container and the second container. In other embodiments of this specification, the shapes and capacities of the first container and the second container may be different.

[0092] By adopting the above embodiment, by setting the first photoresist identifier on the first container for containing photoresist, the first pipeline identifier on the installation groove for installing the first container, the second photoresist identifier on the second container for containing photoresist, and the second pipeline identifier on the installation groove for installing the second container, not only can the first photoresist information, the first pipeline information, the second photoresist information and the second pipeline information be obtained quickly and conveniently, but also the accuracy of the obtained information can be guaranteed, and the probability of photoresist replacement errors can be further reduced.

[0093] As an optional example, the first photoresist mark, the second photoresist mark, the first pipeline mark and the second pipeline mark can all be in the form of barcodes. In this example, the barcode can not only carry a variety of information, but also facilitate subsequent information collection.

[0094] As another optional example, the scanning gun can simultaneously scan the first photoresist mark and the first pipeline mark in one scanning process to scan and obtain the first photoresist information and the first pipeline information, thereby realizing the simultaneous acquisition of the first photoresist information and the first pipeline information in one information acquisition process; the scanning gun can simultaneously scan the second photoresist mark and the second pipeline mark in one scanning process to scan and obtain the second photoresist information and the second pipeline information, thereby realizing the simultaneous acquisition of the second photoresist information and the second pipeline information in one information acquisition process.

[0095] The above embodiment can not only improve the efficiency of information collection, but also facilitate confirmation of the correspondence between the first photoresist information and the first pipeline information, and confirmation of the correspondence between the second photoresist information and the second pipeline information, thereby further reducing the probability of photoresist replacement errors.

[0096] In a specific implementation, the computer device may generate prompt information by using the relevant embodiments of the above-mentioned information processing method for photoresist to generate prompt information on whether the photoresist has been replaced correctly, which will not be described in detail here.

[0097] The following describes in detail the process of managing photoresist using the information processing method and system for photoresist described in the embodiments of this specification through a specific example.

[0098] Reference Figure 5 The working process diagram of an information processing system for photoresist shown in the figure, the information processing system X includes a scanning gun X1 and a computer device X2. A barcode 01 is provided on the first container B1, and the barcode 01 carries the first photoresist information of the photoresist contained in the first container B1. A barcode 02 is provided on the second container B2, and the barcode 02 carries the second photoresist information of the photoresist contained in the second container B2. A barcode 00 is provided on the installation groove G for installing the first container B1 or the second container B2, and the barcode 00 carries the pipeline information of the pipeline corresponding to the installation groove G.

[0099] In a specific implementation, after the photoresist contained in the first container B1 is used up, the operator uses a scanner X1 to scan the barcode 01 on the first container B1 and the barcode 00 on the installation slot G for installing the first container B1 to obtain the first photoresist information of the photoresist contained in the first container B1 and the pipeline information of the pipeline corresponding to the installation slot G, that is, the first pipeline information.

[0100] Further, according to the first photoresist information of the photoresist contained in the first container B1, the second container B2 is selected to replace the first container B1, wherein the second photoresist information of the photoresist contained in the second container B2 is consistent with the first photoresist information of the photoresist contained in the first container B1.

[0101] In a specific implementation, the first photoresist information includes the type information of the photoresist contained in the first container B1, and the second photoresist information includes the type information of the photoresist contained in the second container B2.

[0102] Furthermore, after determining the second container B2, the first container B1 can be removed from the mounting slot G and placed in a temporary card slot, and then the second container B2 is placed on the mounting slot G. The operator continues to use the scanner X1 to scan the barcode 02 on the second container B2 and the barcode 00 on the mounting slot G for installing the second container B2 to obtain the second photoresist information of the photoresist contained in the second container B2 and the pipeline information of the pipeline corresponding to the mounting slot G, that is, the second pipeline information.

[0103] Furthermore, after acquiring the first photoresist information, the second photoresist information, the first pipeline information and the second pipeline information, the computer device X2 determines whether the first photoresist information and the second photoresist information are the same, and determines whether the first pipeline information and the second pipeline information are the same. When confirming that the first photoresist information and the second photoresist information are the same, and the first pipeline information and the second pipeline information are the same, it outputs a prompt message indicating that the photoresist is replaced correctly after replacement; otherwise, it outputs a prompt message indicating that the photoresist is replaced incorrectly after replacement. The operator can confirm whether the photoresist is replaced correctly based on the prompt message, thereby greatly reducing the probability of incorrect photoresist replacement.

[0104] It should be noted that the position of the barcode shown in this embodiment is only an optional example, and the embodiments of this specification do not specifically limit the position of the barcode. In other embodiments of this specification, the barcodes of the first container and the mounting slot, and the barcodes of the second container and the mounting slot may not be adjacent or aligned.

[0105] The present specification also provides a computer-readable storage medium on which a computer program is stored, wherein the computer program executes the steps of the information processing method for photoresist described in any of the above embodiments when it is executed. The specific steps can be found in the above embodiments and will not be repeated here.

[0106] In a specific implementation, the computer-readable storage medium may be any appropriate readable storage medium such as an optical disk, a mechanical hard disk, a solid-state hard disk, etc.

[0107] It should be noted that the terms "first", "second", etc. in the embodiments of this specification are only used to distinguish different replacement information, photoresist information, pipeline information, photoresist identification, and pipeline identification, and are not used to make any limitations on their specific information or form.

[0108] Although the embodiments of this specification are disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, so the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. An information processing method for photoresist, characterized in that, include: Acquire first replacement information, where the first replacement information includes first photoresist information and first pipeline information, wherein the first photoresist information is material information of the photoresist to be replaced, and the first pipeline information is pipeline information of the photoresist pipeline corresponding to the photoresist to be replaced; And, obtaining second replacement information, the second replacement information including second photoresist information and second pipeline information, wherein the second photoresist information is material information of the replaced photoresist, the second pipeline information is pipeline information of the photoresist pipeline corresponding to the replaced photoresist, and the replaced photoresist is used to replace the photoresist to be replaced; According to the first replacement information and the second replacement information, prompt information is generated to show whether the photoresist is replaced correctly after replacement.

2. The method according to claim 1, characterized in that The generating, according to the first replacement information and the second replacement information, prompt information on whether the replaced photoresist is correctly replaced includes: Determining whether the first photoresist information and the second photoresist information are the same, and determining whether the first pipeline information and the second pipeline information are the same; When it is confirmed that the first photoresist information is the same as the second photoresist information, and the first pipeline information is the same as the second pipeline information, a prompt message indicating that the photoresist is correctly replaced is output; otherwise, a prompt message indicating that the photoresist is incorrectly replaced is output.

3. The method according to claim 1, characterized in that The first photoresist information is carried on a first photoresist identifier, the first pipeline information is carried on a first pipeline identifier, the second photoresist information is carried on a second photoresist identifier, and the second pipeline information is carried on a second pipeline identifier.

4. The method according to claim 3, characterized in that The first photoresist mark is set on the first container containing photoresist, the first pipeline mark is set on the installation groove for installing the first container, the second photoresist mark is set on the second container containing photoresist, and the second pipeline mark is set on the installation groove for installing the second container.

5. The method according to any one of claims 3-4, characterized in that: The first photoresist mark, the second photoresist mark, the first pipeline mark and the second pipeline mark are all in the form of barcodes; the first replacement information and the second replacement information are obtained by scanning with a scanner.

6. The method according to claim 5, characterized in that The scanning gun simultaneously scans the first photoresist mark and the first pipeline mark in one scanning process to scan and obtain the first photoresist information and the first pipeline information; The scanning gun simultaneously scans the second photoresist mark and the second pipeline mark in one scanning process to scan and obtain the second photoresist information and the second pipeline information.

7. The method according to claim 1, characterized in that The first photoresist information includes the category of the photoresist to be replaced; the second photoresist information includes the category of the replaced photoresist.

8. An information processing device for photoresist, characterized in that include: an information acquisition unit, adapted to acquire first replacement information and to acquire second replacement information; The first replacement information includes first photoresist information and first pipeline information, wherein the first photoresist information is material information of the photoresist to be replaced, and the first pipeline information is pipeline information of the photoresist pipeline corresponding to the photoresist to be replaced; the second replacement information includes second photoresist information and second pipeline information, wherein the second photoresist information is material information of the replaced photoresist, and the second pipeline information is pipeline information of the photoresist pipeline corresponding to the replaced photoresist, and the replaced photoresist is used to replace the photoresist to be replaced; The information processing unit is adapted to generate prompt information on whether the replaced photoresist is correct according to the first replacement information and the second replacement information.

9. An information processing system for photoresist, characterized in that include: A scanner, adapted to scan to obtain the first replacement information and scan to obtain the second replacement information; The first replacement information includes first photoresist information and first pipeline information, wherein the first photoresist information is material information of the photoresist to be replaced, and the first pipeline information is pipeline information of the photoresist pipeline corresponding to the photoresist to be replaced; the second replacement information includes second photoresist information and second pipeline information, wherein the second photoresist information is material information of the replaced photoresist, and the second pipeline information is pipeline information of the photoresist pipeline corresponding to the replaced photoresist, and the replaced photoresist is used to replace the photoresist to be replaced; The computer device is suitable for obtaining the first replacement information and the second replacement information from the scanning gun; and generating prompt information whether the photoresist is replaced correctly after replacement according to the first replacement information and the second replacement information.

10. The system according to claim 9, characterized in that The first photoresist information is carried on a first photoresist identifier, the first pipeline information is carried on a first pipeline identifier, the second photoresist information is carried on a second photoresist identifier, and the second pipeline information is carried on a second pipeline identifier.

11. The system according to claim 10, characterized in that The first photoresist mark is set on the first container containing photoresist, the first pipeline mark is set on the installation groove for installing the first container, the second photoresist mark is set on the second container containing photoresist, and the second pipeline mark is set on the installation groove for installing the second container.

12. The system according to any one of claims 10-11, characterized in that: The first photoresist mark, the second photoresist mark, the first pipeline mark and the second pipeline mark are all in the form of barcodes; the scanning gun simultaneously scans the first photoresist mark and the first pipeline mark in one scanning process to scan and obtain the first photoresist information and the first pipeline information; The scanning gun simultaneously scans the second photoresist mark and the second pipeline mark in one scanning process to scan and obtain the second photoresist information and the second pipeline information.

13. The system according to claim 9, characterized in that The computer device is adapted to generate prompt information on whether the replaced photoresist is correctly replaced according to the first replacement information and the second replacement information, including: Determining whether the first photoresist information and the second photoresist information are the same, and determining whether the first pipeline information and the second pipeline information are the same; When it is confirmed that the first photoresist information is the same as the second photoresist information, and the first pipeline information is the same as the second pipeline information, a prompt message indicating that the photoresist is correctly replaced is output; otherwise, a prompt message indicating that the photoresist is incorrectly replaced is output.

14. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is run, the steps of the information processing method for photoresist according to any one of claims 1 to 7 are executed.

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