Beam extraction structure of multimodal field negative hydrogen ion source

Abstract

The invention discloses a beam extraction structure of a multimodal field negative hydrogen ion source, and relates to the field of multimodal field negative hydrogen ion sources. The beam extraction structure of the multimodal field negative hydrogen ion source comprises a shielding outer shell and a magnetic guiding mechanism installed in the shielding outer shell, a beam pipeline is installed in the middle of the magnetic guiding mechanism, and heat conduction epoxy resin is poured among the shielding outer shell, the magnetic guiding mechanism and the beam pipeline. According to the beam extraction structure of the multimodal field negative hydrogen ion source, the size of a vacuum bin required by use is reduced by optimizing the inner diameter size of a beam pipeline and the structural design of a beam cover plate, meanwhile, a magnetic guiding mechanism and the beam pipeline are poured into a shielding outer shell through heat conduction epoxy resin, and a spiral cooling copper pipe is arranged in the shielding outer shell, so that the beam extraction efficiency is improved. Therefore, the assembly process is simplified, the overall heat dissipation efficiency is improved, and meanwhile the vacuumizing efficiency and mode are optimized.

Description

Technical Field

[0001] The invention relates to the technical field of multi-peak field negative hydrogen ion sources, in particular to a beam extraction structure of a multi-peak field negative hydrogen ion source. Background Art

[0002] The beam of the multi-peak field negative hydrogen ion source needs to be extracted and guided by two separate mechanisms; currently, a mechanical structure combination is used to combine these two mechanisms.

[0003] At present, the multi-peak field negative hydrogen ion source used in the guide magnet of the vacuum chamber has limitations in the working environment, which are:

[0004] 1. Cooling method

[0005] First of all, the guide iron is completely in a vacuum environment when working. Although the power of the guide magnet after being energized is not large, it will still generate a certain amount of heat after long-term operation. Therefore, considering the background of conventional vacuum cooling methods, the original consideration is to use metal materials with relatively high specific heat capacity as the head material and cool it by water cooling. However, the direct water cooling method only works on the head beam cover, but its shielding shell and guide magnet lack corresponding water cooling protection, and there is a possibility of overheating damage;

[0006] 2. Spatial Layout

[0007] In the entire ion source system, the vacuum system is a critical factor. In addition to the vacuum degree, the efficiency of vacuuming is also a major factor in measuring the quality of the vacuum system. The system volume is one of the factors that affect the vacuuming time. In the original design, the beam cover needs to be water-cooled by a water-cooled copper tube without blocking the beam. This will increase the inner diameter of the beam pipeline, and the result is that the number of turns of the guide magnet is increased, thereby increasing the size of the entire guide iron, and finally increasing the volume of the entire vacuum chamber, affecting the efficiency of vacuuming;

[0008] 3. Installation method

[0009] Because the guide iron needs to work in a vacuum environment, its installation space is necessarily limited. Therefore, the original design requires the installation of the fixed seat, the guide magnet and the shielding shell one by one in sequence in the narrow cavity, switching back and forth in the forward and reverse directions. There are problems such as high installation difficulty and long installation time;

[0010] In order to solve the above problems, a beam extraction structure of a multi-peak field negative hydrogen ion source is provided. Summary of the invention

[0011] In view of the deficiencies in the prior art, the present invention provides a beam extraction structure for a multi-peak field negative hydrogen ion source, which solves the problems of the existing beam extraction structure for a multi-peak field negative hydrogen ion source, such as unreasonable cooling method, excessive spatial layout affecting vacuum efficiency, and difficult installation and long installation time.

[0012] To achieve the above objectives, the present invention is implemented by the following technical solutions: a beam extraction structure of a multi-peak field negative hydrogen ion source, comprising a shielding shell and a magnetic guide mechanism installed inside the shielding shell, a beam pipeline is installed in the middle of the magnetic guide mechanism, and a thermal conductive epoxy resin is poured between the shielding shell, the magnetic guide mechanism and the beam pipeline;

[0013] The inner diameter of the upper end of the beam pipe is smaller than the inner diameter of the lower end;

[0014] A cooling copper tube in the inner wall interlayer of the shielding shell, wherein the cooling copper tube is arranged in a spiral manner;

[0015] The magnetic guide mechanism includes a vacuum chamber and a guide magnet arranged inside the vacuum chamber, and fixed rods are installed at both ends of the vacuum chamber, and the fixed rods at the upper and lower ends respectively fix the upper and lower ends of the guide magnet, so that the guide magnet remains suspended inside the vacuum chamber;

[0016] Among them, a group of fixed pull rods are provided with a vacuum channel connected to the vacuum chamber, and a vacuum sealing piece is provided inside the vacuum channel.

[0017] Preferably, the shielding shell body includes a shell member and a beam cover and a beam base fixedly installed at the upper and lower ends of the shell member, an annular chamber is provided in the middle of the shell member, the cooling copper tube is assembled inside the annular chamber, and coolant circulation connecting pipes are installed at both ends of the cooling copper tube through the outer wall of the vacuum chamber.

[0018] Preferably, an assembly station is provided at the bottom of the shell member, a mounting flange ring is integrally formed on the outer surface of the lower end of the shell member, the beam base comprises a bottom plate and an annular contact plate integrally formed on the top of the bottom plate, and the annular contact plate is fixedly welded in the assembly station.

[0019] Preferably, a through groove is provided in the middle of the base plate, the beam cover plate includes a sealing top plate and a diffusion cover integrally formed at the top of the sealing top plate, a diffusion groove is provided on the outer surface of the diffusion cover, a positioning portion is integrally formed in the middle of the sealing top plate, and both ends of the beam duct are fixedly installed in the positioning portion and the through groove.

[0020] Preferably, the outer shell is welded together by an inner ring shell and an outer cover shell, the bottom end of the positioning portion is fixedly inserted into the inner ring shell, a sealing edge is provided on the outer side of the sealing top plate, and the sealing edge is fixedly welded to the top of the outer cover shell.

[0021] Preferably, the beam duct comprises a tube body, a diffuser section through groove at the inner top of the tube body, a beam groove is formed at the inner bottom of the tube body, and the diffuser section through groove is communicated with the beam groove.

[0022] Preferably, the vacuum chamber is fixedly assembled inside the inner ring shell, and the thermal conductive epoxy resin is densely filled between the two, the fixed pull rod passes through the upper and lower sides of the inner ring shell, and the lower fixed pull rod passes through the bottom plate.

[0023] Preferably, a threaded connector is integrally formed at the end of the fixed pull rod, the threaded connector is threadedly connected to the side wall of the guide magnet, a seal is fixedly installed on the side wall of the vacuum chamber, and the fixed pull rod passes through the seal.

[0024] Preferably, an air guide hole is provided on the outer surface of the upper end of the fixed pull rod, the air guide hole is located inside the vacuum chamber, and the air guide hole is connected to the vacuum channel, and the vacuum sealing member is used to seal the air guide hole.

[0025] Preferably, the vacuum sealing member includes a threaded head and a top shaft fixedly arranged at the end of the threaded head, a sealing plug is installed on the outer surface of the end of the top shaft, the sealing plug fits against the inner wall of the air guide hole, a threaded assembly groove is provided at the outer end of the vacuum channel, and the threaded head is threadedly connected in the threaded assembly groove.

[0026] The present invention discloses a beam extraction structure of a multi-peak field negative hydrogen ion source, which has the following beneficial effects:

[0027] 1. The beam extraction structure of the multi-peak field negative hydrogen ion source is achieved by arranging a spirally coiled cooling copper tube in the annular chamber of the shielding shell, and at the same time, the two ends of the cooling copper tube extend to the outside of the shielding shell and are connected to two groups of coolant circulation connecting pipes, which are connected through an external coolant circulation device to achieve liquid cooling circulation. At the same time, the inside of the shielding shell is fixed to the magnetic guide mechanism and the beam pipeline by thermal conductive epoxy resin, thereby simplifying the overall assembly steps, facilitating the overall installation, reducing the installation difficulty and saving the installation time, and at the same time realizing the cooling of the magnetic guide mechanism and the beam pipeline inside the entire shielding shell.

[0028] 2. The beam extraction structure of the multi-peak field negative hydrogen ion source optimizes the inner diameter of the beam pipe and the structural design of the beam cover. When deflecting a beam of the same energy, the smaller the radius of the guide magnet, the lower the power required by the magnet, the fewer turns the magnet is wound around, the smaller the overall size of the magnet, and the less power the magnet requires. This reduces the required volume of the vacuum chamber, thereby shortening the time required for evacuating the vacuum chamber and improving the evacuation efficiency.

[0029] 3. The beam extraction structure of the multi-peak field negative hydrogen ion source adopts a fixed pull rod to suspend and fix the guide magnet inside the vacuum chamber. A vacuum sealing part is arranged inside a group of fixed pull rods. When in use, the threaded head is unscrewed from the threaded assembly groove, so that the threaded head pulls the sealing plug outward through the top shaft, so that the sealing plug is moved out of the air guide hole. At this time, the entire vacuum chamber is evacuated through the fixed pull rod. After the vacuuming is completed, the sealing plug is installed back to the air guide hole for sealing, thereby facilitating the vacuuming operation and effectively maintaining the sealing state of the vacuum chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0031] Figure 1 It is a cross-sectional view of the overall structure of the present invention;

[0032] Figure 2 It is a schematic diagram of the overall outer surface structure of the present invention;

[0033] Figure 3 A cross-sectional view of the internal structure of the shielding shell of the present invention;

[0034] Figure 4 It is a cross-sectional view of the internal structure of the magnetic guide mechanism of the present invention;

[0035] Figure 5 This is a schematic diagram of the structure of the vacuum sealing member of the present invention;

[0036] Figure 6 It is an exploded view of the internal structure of the shielding shell of the present invention.

[0037] In the figure: 1, shielding shell; 11, shell member; 111, inner ring shell; 112, annular chamber; 113, mounting flange ring; 114, outer cover shell; 115, assembly station; 12, beam cover plate; 121, sealing top plate; 122, diffusion cover; 123, positioning part; 124, diffusion notch; 125, sealing edge; 13, beam base; 131, bottom plate; 132, annular contact plate; 133, through groove; 14, cooling copper tube; 15. Coolant circulation connecting pipe; 2. Magnetic guide mechanism; 21. Vacuum chamber; 22. Guide magnet; 23. Fixed pull rod; 231. Vacuum channel; 232. Air guide hole; 24. Sealing part; 25. Threaded connector; 26. Vacuum sealing part; 261. Threaded head; 262. Threaded assembly groove; 263. Top shaft; 264. Sealing plug; 3. Beam duct; 31. Tube body; 32. Beam groove; 33. Diffusion section groove; 4. Thermal conductive epoxy resin. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0039] The embodiment of the present application provides a beam extraction structure for a multi-peak field negative hydrogen ion source, thereby solving the problems of unreasonable cooling method, excessive spatial layout affecting vacuum efficiency, and difficult installation and long installation time in the existing beam extraction structure of a multi-peak field negative hydrogen ion source.

[0040] In order to better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0041] The embodiment of the present invention discloses a beam extraction structure of a multi-peak field negative hydrogen ion source.

[0042] According to the attached Figure 1-6 As shown, it comprises a shielding shell 1 and a magnetic guide mechanism 2 installed inside the shielding shell 1, a beam pipe 3 is installed in the middle of the magnetic guide mechanism 2, and a thermal conductive epoxy resin 4 is poured between the shielding shell 1, the magnetic guide mechanism 2 and the beam pipe 3;

[0043] The inner diameter of the upper end of the beam pipe 3 is smaller than the inner diameter of the lower end;

[0044] A cooling copper tube 14 in the inner wall interlayer of the shielding outer shell 1, wherein the cooling copper tube 14 is arranged in a spiral manner;

[0045] The magnetic guide mechanism 2 includes a vacuum chamber 21 and a guide magnet 22 disposed inside the vacuum chamber 21. Fixed rods 23 are installed at both ends of the vacuum chamber 21. The fixed rods 23 at both ends fix the upper and lower ends of the guide magnet 22 respectively, so that the guide magnet 22 remains suspended inside the vacuum chamber 21.

[0046] A vacuum channel 231 communicating with the vacuum chamber 21 is disposed inside a group of fixed pull rods 23 , and a vacuum sealing member 26 is disposed inside the vacuum channel 231 .

[0047] The shielding shell 1 includes a shell part 11 and a beam cover plate 12 and a beam base 13 fixedly installed at the upper and lower ends of the shell part 11. An annular chamber 112 is arranged in the middle of the shell part 11. A cooling copper tube 14 is assembled inside the annular chamber 112, and both ends of the cooling copper tube 14 are penetrated through the outer wall of the vacuum chamber 21 and are equipped with cooling liquid circulation connecting tubes 15. The cooling liquid circulation connecting tubes 15 are connected to an external cooling liquid circulation device to realize liquid cooling circulation. The heat conductive epoxy resin 4 is used to realize heat conduction, so as to realize cooling of the magnetic guide mechanism 2 and the beam pipe 3 inside the entire shielding shell 1.

[0048] An assembly station 115 is provided at the bottom of the outer shell 11, and a mounting flange ring 113 is integrally formed on the outer surface of the lower end of the outer shell 11. The beam base 13 includes a bottom plate 131 and an annular contact plate 132 integrally formed on the top of the bottom plate 131. The annular contact plate 132 is fixedly welded in the assembly station 115, so that the beam base 13 can be embedded in the bottom of the outer shell 11.

[0049] A through groove 133 is provided in the middle of the bottom plate 131, and the beam cover 12 includes a sealing top plate 121 and a diffusion cover 122 integrally formed at the top of the sealing top plate 121, and a diffusion groove 124 is provided on the outer surface of the diffusion cover 122. A positioning portion 123 is integrally formed in the middle of the sealing top plate 121, and both ends of the beam pipe 3 are fixedly installed in the positioning portion 123 and the through groove 133, which has a fixing effect on the beam pipe 3.

[0050] The outer shell 11 is welded together by an inner ring shell 111 and an outer cover shell 114. The bottom end of the positioning portion 123 is fixedly inserted into the inner ring shell 111. A sealing edge 125 is provided on the outer side of the sealing top plate 121. The sealing edge 125 is fixedly welded to the top of the outer cover shell 114, so that the top end of the entire outer shell 11 is in a closed state.

[0051] The beam pipe 3 includes a tube body 31 , a diffuser slot 33 at the inner top of the tube body 31 , a beam slot 32 at the inner bottom of the tube body 31 , the diffuser slot 33 is connected to the beam slot 32 , and the inner diameter of the diffuser slot 33 is smaller than the inner diameter of the beam slot 32 .

[0052] The vacuum chamber 21 is fixedly assembled inside the inner ring shell 111, and the thermal conductive epoxy resin 4 is densely filled between the two. The fixed pull rod 23 passes through the upper and lower sides of the inner ring shell 111, and the lower fixed pull rod 23 passes through the bottom plate 131. The fixed pull rod 23 allows the guide magnet 22 to be suspended and fixed inside the vacuum chamber 21.

[0053] A threaded connector 25 is integrally formed at the end of the fixed rod 23, and the threaded connector 25 is threadedly connected to the side wall of the guide magnet 22. A seal 24 is fixedly installed on the side wall of the vacuum chamber 21. The fixed rod 23 passes through the seal 24. At the same time, the thermal conductive epoxy resin 4 is wrapped around the outer surface of the connection between the three, so that there is a good sealing connection effect between the fixed rod 23 and the vacuum chamber 21.

[0054] An air guide hole 232 is provided on the outer surface of the upper end of the fixed pull rod 23. The air guide hole 232 is located inside the vacuum chamber 21 and is connected to the vacuum channel 231. The vacuum sealing member 26 is used to seal the air guide hole 232. The vacuum sealing member 26 includes a threaded head 261 and a top shaft 263 fixedly arranged at the end of the threaded head 261. A sealing plug 264 is installed on the outer surface of the end of the top shaft 263. The sealing plug 264 fits the inner wall of the air guide hole 232. A threaded assembly groove 262 is provided on the outer end of the vacuum channel 231. The threaded head 261 is threadedly connected in the threaded assembly groove 262. By unscrewing the threaded head 261 from the threaded assembly groove 262, the threaded head 261 pulls the sealing plug 264 outward through the top shaft 263, so that the sealing plug 264 is moved out of the air guide hole 232. At this time, the entire vacuum chamber 21 is evacuated through the fixed pull rod 23. After the vacuuming is completed, the sealing plug 264 is installed back to the air guide hole 232 for sealing, thereby facilitating the vacuuming operation and effectively maintaining the sealing state of the vacuum chamber 21.

[0055] Working principle: The device is provided with a spirally coiled cooling copper tube 14 in the annular chamber 112 of the shielding shell 1, and at the same time, the two ends of the cooling copper tube 14 extend to the outside of the shielding shell 1 and are connected with two sets of cooling liquid circulation connecting tubes 15, which are connected through an external cooling liquid circulation device to realize liquid cooling circulation. At the same time, the inside of the shielding shell 1 is fixed with the heat-conductive epoxy resin 4 to the magnetic guide mechanism 2 and the beam pipeline 3, thereby simplifying the overall assembly steps, facilitating the integral installation, reducing the installation difficulty and saving the installation time, and realizing the cooling of the magnetic guide mechanism 2 and the beam pipeline 3 inside the entire shielding shell 1;

[0056] By optimizing the inner diameter of the beam pipe 3 and the structural design of the beam cover 12, when deflecting a beam of the same energy, the smaller the radius of the guide magnet 22, the lower the power required by the magnet, the fewer the number of turns of the magnet, the smaller the overall size of the guide magnet 22, and the lower the power required by the guide magnet 22, so that the required volume of the vacuum chamber 21 is reduced, thereby shortening the time required for evacuating the vacuum chamber 21 and improving the evacuation efficiency;

[0057] At the same time, a fixed pull rod 23 is used to suspend and fix the guide magnet 22 inside the vacuum chamber 21. A vacuum sealing member 26 is arranged inside a group of fixed pull rods 23. When in use, the threaded head 261 is unscrewed from the threaded assembly groove 262, so that the threaded head 261 pulls the sealing plug 264 outward through the top shaft 263, so that the sealing plug 264 is moved out from the air guide hole 232. At this time, the entire vacuum chamber 21 is evacuated through the fixed pull rod 23. After the vacuuming is completed, the sealing plug 264 is installed back to the air guide hole 232 for sealing, thereby facilitating the vacuuming operation and effectively maintaining the sealing state of the vacuum chamber 21.

[0058] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A beam extraction structure of a multi-peak field negative hydrogen ion source, comprising a shielding outer shell (1) and a magnetic guide mechanism (2) installed inside the shielding outer shell (1), wherein a beam pipe (3) is installed in the middle of the magnetic guide mechanism (2), characterized in that: A heat-conducting epoxy resin (4) is poured between the shielding shell (1), the magnetic guide mechanism (2) and the beam pipe (3); The inner diameter of the upper end of the beam pipe (3) is smaller than the inner diameter of the lower end; A cooling copper tube (14) in the inner wall interlayer of the shielding outer shell (1), wherein the cooling copper tube (14) is arranged in a spiral manner; The magnetic guide mechanism (2) comprises a vacuum chamber (21) and a guide magnet (22) arranged inside the vacuum chamber (21); fixed pull rods (23) are installed at both upper and lower ends of the vacuum chamber (21); the fixed pull rods (23) at the upper and lower ends respectively fix the upper and lower ends of the guide magnet (22), so that the guide magnet (22) remains suspended inside the vacuum chamber (21); A vacuum channel (231) connected to the vacuum chamber (21) is arranged inside a group of the fixed pull rods (23), and a vacuum sealing member (26) is arranged inside the vacuum channel (231).

2. The beam extraction structure of a multi-peak field negative hydrogen ion source according to claim 1, characterized in that: The shielding shell (1) comprises a shell part (11) and a beam cover plate (12) and a beam base (13) fixedly mounted at the upper and lower ends of the shell part (11); an annular chamber (112) is arranged in the middle of the shell part (11); the cooling copper tube (14) is mounted inside the annular chamber (112); and cooling liquid circulation connecting tubes (15) are installed at both ends of the cooling copper tube (14) through the outer wall of the vacuum chamber (21).

3. The beam extraction structure of a multi-peak field negative hydrogen ion source according to claim 2, characterized in that: An assembly station (115) is provided at the bottom of the shell member (11); a mounting flange ring (113) is integrally formed on the outer surface of the lower end of the shell member (11); the beam base (13) comprises a bottom plate (131) and an annular contact plate (132) integrally formed on the top of the bottom plate (131); the annular contact plate (132) is fixedly welded in the assembly station (115).

4. The beam extraction structure of a multi-peak field negative hydrogen ion source according to claim 3, characterized in that: A through groove (133) is provided in the middle of the bottom plate (131); the beam cover plate (12) comprises a sealing top plate (121) and a diffusion cover (122) integrally formed at the top of the sealing top plate (121); a diffusion notch (124) is provided on the outer surface of the diffusion cover (122); a positioning portion (123) is integrally formed in the middle of the sealing top plate (121); and both ends of the beam pipe (3) are fixedly mounted in the positioning portion (123) and the through groove (133).

5. The beam extraction structure of a multi-peak field negative hydrogen ion source according to claim 4, characterized in that: The outer shell (11) is welded together by an inner ring shell (111) and an outer cover shell (114); the bottom end of the positioning portion (123) is fixedly inserted into the inner ring shell (111); a sealing edge (125) is provided on the outer side of the sealing top plate (121); and the sealing edge (125) is fixedly welded to the top of the outer cover shell (114).

6. The beam extraction structure of a multi-peak field negative hydrogen ion source according to claim 4, characterized in that: The beam pipeline (3) comprises a tube body (31), a diffuser section through groove (33) at the inner top of the tube body (31), a beam groove (32) at the inner bottom of the tube body (31), and the diffuser section through groove (33) is connected to the beam groove (32).

7. The beam extraction structure of a multi-peak field negative hydrogen ion source according to claim 5, characterized in that: The vacuum chamber (21) is fixedly assembled inside the inner ring shell (111), and the heat-conductive epoxy resin (4) is densely filled between the two. The fixed pull rod (23) passes through the upper and lower sides of the inner ring shell (111), and the lower fixed pull rod (23) passes through the bottom plate (131).

8. The beam extraction structure of a multi-peak field negative hydrogen ion source according to claim 7, characterized in that: A threaded connector (25) is integrally formed at the end of the fixed pull rod (23), and the threaded connector (25) is threadedly connected to the side wall of the guide magnet (22). A sealing member (24) is fixedly mounted on the side wall of the vacuum chamber (21), and the fixed pull rod (23) passes through the sealing member (24).

9. The beam extraction structure of a multi-peak field negative hydrogen ion source according to claim 8, characterized in that: An air guide hole (232) is provided on the outer surface of the upper end of the fixed pull rod (23), the air guide hole (232) is located inside the vacuum chamber (21), and the air guide hole (232) is connected to the vacuum channel (231), and the vacuum sealing member (26) is used to seal the air guide hole (232).

10. The beam extraction structure of a multi-peak field negative hydrogen ion source according to claim 9, characterized in that: The vacuum sealing member (26) comprises a threaded head (261) and a top shaft (263) fixedly arranged at the end of the threaded head (261); a sealing plug (264) is installed on the outer surface of the end of the top shaft (263); the sealing plug (264) is fitted with the inner wall of the air guide hole (232); a threaded assembly groove (262) is provided at the outer end of the vacuum channel (231); and the threaded head (261) is threadedly connected in the threaded assembly groove (262).

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