Carbon dioxide mixer capable of removing static electricity

Abstract

The invention discloses a carbon dioxide mixer for removing static electricity, which comprises a gas-water mixing membrane device, a water inlet pipeline, a water outlet pipeline, a gas inlet pipeline and a gas exhaust pipeline, the gas-water mixing membrane device mixes carbon dioxide into ultrapure water to generate carbon dioxide mixed water, and the gas exhaust pipeline is provided with a speed control valve. And the exhaust pipeline is also provided with a pneumatic diaphragm valve which is connected in parallel with the speed control valve and is opened and closed at a set frequency gap. According to the invention, the pneumatic diaphragm valve connected in parallel with the speed control valve is arranged on the exhaust pipeline to dynamically adjust the emission of the undissolved carbon dioxide gas, so that the stability of the resistivity of the generated carbon dioxide mixed water is ensured.

Description

Technical Field

[0001] The invention belongs to the technical field of water treatment, and in particular relates to a carbon dioxide mixer for dissolving carbon dioxide into ultrapure water to remove static electricity of the ultrapure water. Background Art

[0002] In semiconductor industry production, the use of ultrapure water helps improve product yield, but ultrapure water has a very high resistivity, so it is also easy to generate static electricity on the product surface, and static electricity adsorption can cause damage to the product.

[0003] In order to reduce the resistivity of ultrapure water, a commonly used method is to add carbon dioxide to ultrapure water with high resistivity to reduce the resistivity of ultrapure water, that is, to reduce the resistivity of ultrapure water by increasing the hydrogen ions and bicarbonate ions ionized in ultrapure water.

[0004] In the prior art, a carbon dioxide mixer is used to dissolve carbon dioxide into ultrapure water to reduce the resistivity of ultrapure water. The carbon dioxide mixer includes a gas-water mixing membrane device, a water inlet pipeline connected to the water inlet of the gas-water mixing membrane device, a water outlet pipeline connected to the water outlet of the gas-water mixing membrane device, an air inlet pipeline connected to the air inlet of the gas-water mixing membrane device, and an exhaust pipeline connected to the exhaust outlet of the gas-water mixing membrane device.

[0005] In order to obtain carbon dioxide mixed water with stable resistivity, the water inlet pipeline usually controls a constant flow of ultrapure water to enter the gas-water mixed membrane device, and the gas inlet pipeline controls a constant flow rate of carbon dioxide gas to enter the gas-water mixed membrane device. At the same time, the exhaust pipeline controls the undissolved carbon dioxide gas to be discharged at a constant low flow rate. However, since the exhaust flow rate of the exhaust pipeline is too low, if the working time is slightly longer, carbon dioxide and water vapor will accumulate in the exhaust pipeline, and the resistivity of the carbon dioxide mixed water will fluctuate, deviating from the required resistivity, resulting in unstable resistivity of the obtained carbon dioxide mixed water. Summary of the invention

[0006] The technical problem to be solved by the present invention is to provide a static electricity-removing carbon dioxide mixer which can keep the resistivity of carbon dioxide-mixed water stable, so as to overcome the shortcomings of the prior art.

[0007] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0008] A carbon dioxide mixer for removing static electricity, comprising:

[0009] The gas-water mixing membrane device mixes carbon dioxide into ultrapure water to generate carbon dioxide mixed water, and has a water inlet, a water outlet, an air inlet and an exhaust port;

[0010] a water inlet pipeline connected to the water inlet, supplying ultrapure water to the gas-water mixing membrane device, and having a liquid regulating valve thereon;

[0011] A water outlet pipeline connected to the water outlet and used to deliver the carbon dioxide mixed water generated by the gas-water mixed membrane device to the water-using equipment;

[0012] An air inlet pipeline, connected to the air inlet, for delivering carbon dioxide gas to the gas-water mixed membrane device, and having a gas pressure regulating valve thereon;

[0013] The exhaust pipeline is connected to the exhaust port to discharge the carbon dioxide gas that is not dissolved in the ultrapure water, and has a speed control valve.

[0014] The fixed liquid regulating valve, the gas pressure regulating valve and the speed control valve are normally open during operation, and the carbon dioxide mixed water generated by the gas-water mixed membrane device is controlled to have a certain resistivity by setting the fixed liquid regulating valve, the gas pressure regulating valve and the speed control valve;

[0015] The feature is that a pneumatic diaphragm valve connected in parallel with the speed control valve is arranged on the exhaust pipeline and is opened and closed at a set frequency interval.

[0016] By adopting the above technical scheme, the present invention provides a pneumatic diaphragm valve in parallel with the speed control valve on the exhaust pipeline. When the carbon dioxide mixer is working, by setting the closing time and opening time of the pneumatic diaphragm valve, when the pneumatic diaphragm valve is closed, the undissolved carbon dioxide gas is discharged only from the speed control valve at the set speed, maintaining the pressure required for mixing carbon dioxide in the gas-water mixing membrane device, ensuring the normal mixing of gas and water, but after the set closing time, the solenoid valve is opened again to allow the carbon dioxide gas and water vapor accumulated in the exhaust pipeline to be quickly released, so as to avoid the resistivity fluctuation of the carbon dioxide mixed water caused by long-term accumulation, thereby ensuring the stability of the resistivity of the carbon dioxide mixed water.

[0017] In the present invention, the water inlet pipe has a water inlet joint, the water outlet pipe has a water outlet joint, the water inlet joint and the water outlet joint are connected by a bypass pipe, the water outlet joint is also connected to the water delivery pipe, the water inlet joint supplies part of the ultrapure water to the gas-water mixed membrane device through the water inlet pipe, and the other part is supplied to the water outlet joint through the bypass pipe to be mixed with the carbon dioxide mixed water in the water outlet pipe and then delivered to the water-using equipment through the water delivery pipe. By adopting such a water supply method, the efficiency of carbon dioxide mixed water generation can be improved to quickly obtain a large flow of carbon dioxide mixed water.

[0018] In the present invention, the water delivery pipeline is provided with a flow meter and a resistance probe in sequence, which are used to feed back the flow rate and resistivity of the final carbon dioxide mixed water, respectively.

[0019] In the present invention, a filter is further provided on the air inlet pipeline in front of the gas pressure regulating valve to ensure the purity of the carbon dioxide gas flowing into the gas-water mixed membrane device through filtering by the filter.

[0020] In summary, the present invention dynamically adjusts the discharge of undissolved carbon dioxide gas by arranging a pneumatic diaphragm valve in parallel with the speed control valve on the exhaust pipeline, thereby ensuring the stability of the resistivity of the generated carbon dioxide mixed water. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The present invention is described in detail below in conjunction with the accompanying drawings:

[0022] Figure 1 It is a pipeline diagram of the present invention. DETAILED DESCRIPTION

[0023] like Figure 1 As shown, the static electricity removing carbon dioxide mixer of the present invention comprises a gas-water mixing membrane device 100 , a water inlet pipeline 200 , a water outlet pipeline 300 , an air inlet pipeline 400 , an exhaust pipeline 500 and a water delivery pipeline 600 .

[0024] The gas-water mixing membrane device 100 is a mature product in the prior art and can be purchased directly from the market. It has an ultrafiltration membrane for gas-water mixing inside, which can mix carbon dioxide gas into ultrapure water to reduce the resistivity of ultrapure water and remove static electricity. The gas-water mixing membrane device 100 has a water inlet, a water outlet, an air inlet and an exhaust port.

[0025] The water inlet pipeline 200 is connected to the water inlet and is used to supply ultrapure water to the gas-water mixed membrane device 100. According to the flow direction of water, it includes a water inlet joint 201 and a liquid regulating valve 202. The liquid regulating valve 202 is used to adjust the flow rate of ultrapure water entering the gas-water mixed membrane device 100.

[0026] The water outlet pipeline 300 is connected to the water outlet and has a water outlet joint 301 thereon. The water inlet joint 201 and the water outlet joint 301 are connected via a bypass pipeline 302. The water outlet joint 301 is also connected to the water delivery pipeline 600.

[0027] The air inlet pipeline 400 is connected to the air inlet and is used to deliver carbon dioxide gas to the gas-water mixed membrane device 100. It includes a filter 401, a solenoid valve 402 and a gas pressure regulating valve 403 in order according to the gas flow direction.

[0028] The exhaust pipeline 500 is connected to the exhaust port and is used to exhaust the carbon dioxide gas that is not dissolved in the ultrapure water. A speed control valve 501 and a pneumatic diaphragm valve 502 are arranged in parallel with each other.

[0029] A flow meter 601 and a resistance probe 602 are arranged in sequence on the water delivery pipeline 600 according to the flow direction of water. The flow meter 601 and the resistance probe 602 are used to feed back the flow rate and resistivity of the final carbon dioxide mixed water, respectively.

[0030] The above is the static-eliminating carbon dioxide mixer of the present invention, and its working mode is as follows:

[0031] During operation, the liquid regulating valve 202, the solenoid valve 402, the gas pressure regulating valve 403 and the speed control valve 501 are all normally open. The resistivity of the carbon dioxide mixed water can be adjusted by setting the opening of the liquid regulating valve 202, the gas pressure regulating valve 403 and the speed control valve 501. The opening time and closing time of the first cut-off control valve 502 are also set.

[0032] The water inlet joint 201 delivers part of the ultrapure water to the gas-water mixing membrane device 100 through the water inlet pipeline 200, and the other part is supplied to the water outlet joint 301 through the bypass pipeline 302. Such a water supply method can improve the gas-water mixing efficiency.

[0033] The ultrapure water entering the gas-water mixing membrane device 100 is mixed with the carbon dioxide gas entering through the air inlet pipe 400 to generate carbon dioxide mixed water, which flows to the water outlet joint 301 through the water outlet pipe 300 and is mixed again with another part of ultrapure water and delivered to the water-using equipment through the water delivery pipe 600.

[0034] By setting the closing time (for example, 1200 seconds) and opening time (for example, 1 second) of the pneumatic diaphragm valve 502, when the pneumatic diaphragm valve 502 is closed, the undissolved carbon dioxide gas is only discharged from the speed control valve at a set low speed (i.e., a small amount of carbon dioxide gas is discharged), maintaining the pressure required for mixing carbon dioxide in the gas-water mixing membrane device 100, and ensuring the normal mixing of gas and water. However, after the set closing time, the solenoid valve 502 is opened again to allow the carbon dioxide gas and water vapor accumulated in the exhaust pipe to be quickly released (i.e., a large amount of carbon dioxide gas and water vapor is quickly discharged in a short time), so as to avoid the resistivity fluctuation of the carbon dioxide mixed water caused by long-term accumulation, and ensure the stability of the resistivity of the carbon dioxide mixed water.

[0035] It can be seen from the above detailed introduction that the present invention dynamically adjusts the discharge of undissolved carbon dioxide gas by arranging a pneumatic diaphragm valve in parallel with the speed control valve on the exhaust pipeline, thereby ensuring the stability of the resistivity of the generated carbon dioxide mixed water.

Claims

1. A carbon dioxide mixer for removing static electricity, comprising: The gas-water mixing membrane device mixes carbon dioxide into ultrapure water to generate carbon dioxide mixed water, and has a water inlet, a water outlet, an air inlet and an exhaust port; a water inlet pipeline connected to the water inlet, supplying ultrapure water to the gas-water mixed membrane device, and having a liquid regulating valve thereon; A water outlet pipeline connected to the water outlet and used for delivering the carbon dioxide mixed water generated by the gas-water mixed membrane device to the water-using equipment; An air inlet pipeline, connected to the air inlet, for delivering carbon dioxide gas to the gas-water mixed membrane device, and having a gas pressure regulating valve thereon; The exhaust pipeline is connected to the exhaust port to discharge the carbon dioxide gas that is not dissolved in the ultrapure water, and has a speed control valve. The fixed liquid regulating valve, the gas pressure regulating valve and the speed control valve are normally open during operation, and the carbon dioxide mixed water generated by the gas-water mixed membrane device is controlled to have a certain resistivity by setting the fixed liquid regulating valve, the gas pressure regulating valve and the speed control valve; Features: The exhaust pipeline is provided with a pneumatic diaphragm valve connected in parallel with the speed control valve and opened and closed at a set frequency interval.

2. The electrostatically-eliminating carbon dioxide mixer according to claim 1, characterized in that: The water inlet pipe is provided with a water inlet joint, and the water outlet pipe is provided with a water outlet joint. The water inlet joint and the water outlet joint are connected via a bypass pipe, and the water outlet joint is also connected to a water supply pipe. The water inlet joint supplies part of ultrapure water to the gas-water mixing membrane device via the water inlet pipe, and supplies the other part to the water outlet joint via the bypass pipe to be mixed with the carbon dioxide mixed water in the water outlet pipe and then transported to the water-using equipment via the water supply pipe.

3. The electrostatically-eliminating carbon dioxide mixer according to claim 2, characterized in that: The water delivery pipeline is provided with a flow meter and a resistance probe in sequence.

4. The electrostatically-eliminating carbon dioxide mixer according to claim 2, characterized in that: A filter is also provided on the air intake pipeline in front of the gas pressure regulating valve.

5. The electrostatically-eliminating carbon dioxide mixer according to claim 4, characterized in that: A solenoid valve is provided on the air intake pipeline between the gas pressure regulating valve and the filter.

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