Megasonic cleaning tank and megasonic cleaning machine

Abstract

The invention relates to a megasonic cleaning tank and a megasonic cleaning machine. In one aspect, a megasonic cleaning tank is provided for cleaning a to-be-cleaned piece placed therein with megasonic waves, where the megasonic waves propagate through a bottom of the megasonic cleaning tank into the interior thereof, the megasonic cleaning tank comprises a wall portion and a bottom portion, the bottom portion is connected with the wall portion to define a space for placing the to-be-cleaned piece, the wall portion is made of plastic, the bottom portion is made of quartz, and the bottom portion is in the form of a single quartz plate. Therefore, the manufacturing difficulty of the megasonic rinse tank can be reduced, the manufacturing cost is reduced, and the megasonic rinse tank is not easy to break and easy to replace.

Description

Technical Field

[0001] The present disclosure relates to the field of cleaning technology, and in particular, to a megasonic cleaning tank and a megasonic cleaning machine. Background Art

[0002] Megasonic cleaning is a cleaning technology that utilizes the high-energy frequency vibration effect generated by megahertz-level high-energy sound waves. It is mainly used for cleaning semiconductor materials, electronic devices, optical devices, etc.

[0003] The corresponding equipment generally includes a megasonic cleaning tank, a water bath and a megasonic generator, wherein the megasonic generator and the megasonic cleaning tank are both arranged in the water bath. During the cleaning process, the workpiece to be cleaned is placed in the cleaning liquid in the megasonic cleaning tank, and the megasonic waves emitted by the megasonic generator are transmitted to the megasonic cleaning tank via the liquid in the water bath, thereby achieving the cleaning of the workpiece to be cleaned.

[0004] In order to obtain a higher megasonic energy transfer efficiency to enhance the cleaning effect, megasonic cleaning tanks are usually made of stainless steel or quartz. However, stainless steel may cause metal contamination of the parts to be cleaned. Therefore, in some situations where the metal content is strictly required, stainless steel tanks cannot be used and only quartz tanks can be used. However, quartz tanks are difficult to manufacture, have high manufacturing costs, are easy to break, and are difficult to replace. Summary of the invention

[0005] This section provides a general summary of the disclosure, and is not a comprehensive disclosure of its full scope or all of its features.

[0006] The purpose of the present disclosure is to provide a megasonic cleaning tank that has low manufacturing difficulty, low manufacturing cost, is not easy to break and is easy to replace.

[0007] In order to achieve the above-mentioned object, according to one aspect of the present disclosure, a megasonic cleaning tank is provided, which is used to clean the parts to be cleaned placed therein by using megasonic waves, wherein the megasonic waves propagate through the bottom of the megasonic cleaning tank to the inside thereof, and the megasonic cleaning tank comprises: a wall portion; and The bottom portion is connected to the wall portion to define a space for placing items to be cleaned. The wall portion is made of plastic, the bottom portion is made of quartz, and the bottom portion is in the form of a whole quartz plate.

[0008] In some embodiments, the wall portion may include a support portion, and the megasonic cleaning tank may include a pressure plate, the support portion supports the bottom from below the bottom, the pressure plate is arranged above the bottom, and the bottom is fixed in place by connection of the pressure plate to the support portion.

[0009] In some embodiments, the megasonic cleaning tank may further include a sealing ring, and a surface of the supporting portion for supporting the bottom may be provided with a groove for accommodating the sealing ring.

[0010] In some embodiments, the pressure plate may be in the shape of an annulus extending around the circumference of the base.

[0011] In some embodiments, the pressing plate may be provided with at least one drainage port, and the inner side of the pressing plate is connected with the outer side of the pressing plate via the at least one drainage port.

[0012] In some embodiments, the lower surface of the bottom portion may be inclined at an angle relative to a horizontal plane.

[0013] In some embodiments, the wall portion may be provided with an opening therethrough, the opening being located immediately below the uppermost edge of the lower surface.

[0014] In some embodiments, the openings may be in the form of a plurality of holes.

[0015] In some embodiments, the thickness of the edge portion of the bottom may be different from the thickness of other portions of the bottom, and the thickness of the edge portion and the thickness of other portions may be configured such that the sound wave propagation rate of the edge portion is greater than the sound wave propagation rate of other portions, wherein the edge portion corresponds to the highest edge of the lower surface of the bottom.

[0016] According to another aspect of the present disclosure, a megasonic cleaning machine is provided, comprising: The megasonic cleaning tank according to any of the above embodiments; a water bath, wherein the megasonic cleaning tank is arranged in the water bath; and The megasonic generator is used to emit megasonic waves, and the megasonic generator is arranged at the bottom of the water bath and below the megasonic cleaning tank.

[0017] According to the above technical solution, by connecting the megasonic cleaning tank with a wall made of plastic and a bottom made of quartz, the manufacturing difficulty of the megasonic cleaning tank can be reduced. Moreover, by making the wall made of plastic and the bottom made of quartz, the manufacturing cost of the megasonic cleaning tank can be reduced while ensuring a good megasonic propagation effect, and the reduction in manufacturing difficulty can also reduce the manufacturing cost. In addition, the wall made of plastic also makes the megasonic cleaning tank less likely to break. Even if the bottom made of quartz breaks, since the wall and the bottom are two separate parts, only the bottom needs to be replaced, and the megasonic cleaning tank does not need to be replaced as a whole, making replacement easier. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The features and advantages of the embodiments of the present disclosure will become more easily understood through the following description with reference to the accompanying drawings. The drawings are not drawn to scale and some features may be enlarged or reduced to show details of specific parts. In the drawings: Figure 1 The schematic structure diagram of a megasonic cleaning machine of the related art.

[0019] Figure 2 It is a schematic structural diagram of a megasonic cleaning tank according to an embodiment of the present disclosure.

[0020] Figure 3 To include Figure 2 A schematic structural diagram of a megasonic cleaning machine of a megasonic cleaning tank shown in FIG.

[0021] Figure 4 for Figure 2 A top view of a megasonic cleaning tank is shown in FIG.

[0022] Figure 5 It is a schematic structural diagram of a megasonic cleaning tank according to another embodiment of the present disclosure.

[0023] Figure 6 To include Figure 5 A schematic structural diagram of a megasonic cleaning machine of a megasonic cleaning tank shown in FIG.

[0024] Figure 7 Graph showing the relationship between the sound pressure when megasonic waves propagate through the bottom and the inclination angle of the lower surface of the bottom.

[0025] Figure 8 The side view schematically shows Figure 5 An implementation form of the wall of the megasonic cleaning tank shown in FIG.

[0026] Fig. 9 The side view schematically shows Figure 5 Another implementation form of the wall of the megasonic cleaning tank is shown in FIG.

[0027] Fig.10 FIG. 4 is a graph showing the relationship between the acoustic wave propagation rate in megasonic waves and the thickness of the bottom.

[0028] In the drawings, the same or corresponding technical features, parts or components are represented by the same or corresponding reference numerals. DETAILED DESCRIPTION

[0029] The present disclosure is described in detail below with reference to the accompanying drawings by means of exemplary embodiments. It should be noted that the following detailed description of the present disclosure is only for illustrative purposes and is by no means a limitation of the present disclosure.

[0030] It should be noted that, for the sake of clarity, not all features of a specific implementation are described and illustrated in the specification and drawings. Furthermore, in order to avoid unnecessary details that obscure the technical solution focused on by the present disclosure, only the device structures and parts closely related to the technical solution of the present disclosure are described and illustrated in the specification and drawings, while other details that are not closely related to the technical content of the present disclosure and are known to those skilled in the art are omitted.

[0031] Reference Figure 1 The related art megasonic cleaning machine 1' comprises a megasonic cleaning tank 10', a water bath tank 20' and a megasonic generator 30'.

[0032] The megasonic cleaning tank 10 ′ and the megasonic generator 30 ′ are both disposed in the water bath 20 ′. The megasonic generator 30 ′ is located at the bottom of the water bath 20 ′, and the megasonic cleaning tank 10 ′ is located above the megasonic generator 30 ′.

[0033] As mentioned above, during the cleaning process, the megasonic generator 30' emits megasonic waves, which propagate to the bottom of the megasonic cleaning tank 10' through the liquid (liquid level is shown by dotted lines) in the water bath 20', which is usually water, and propagate through the bottom to the inside of the megasonic cleaning tank 10'. The inside of the megasonic cleaning tank 10' contains a cleaning liquid (liquid level is shown by dotted lines). With the help of the high-energy frequency vibration effect generated by the megasonic waves, the cleaning liquid can accelerate the movement to achieve cleaning of the to-be-cleaned parts 2' placed in the cleaning liquid.

[0034] like Figure 1 As shown in , the megasonic cleaning tank 10 ′ is entirely made of quartz, which is difficult to manufacture and has high manufacturing costs. In addition, the tank body made of quartz is easy to break, and it is also difficult to replace the megasonic cleaning tank 10 ′ in the megasonic cleaning machine 1 ′ in operation.

[0035] In this regard, according to an embodiment of the present disclosure, a megasonic cleaning tank is provided, which is used to clean parts to be cleaned placed therein using megasonic waves, wherein the megasonic waves propagate through the bottom of the megasonic cleaning tank into the interior thereof.

[0036] Below, refer to Figure 2 and Figure 3 , the megasonic cleaning tank 10 is described in detail.

[0037] The megasonic cleaning tank 10 includes a wall portion 110 and a bottom portion 120 .

[0038] The wall portion 110 constitutes a side portion of the megasonic cleaning tank 10, and the bottom portion 120 constitutes a bottom portion of the megasonic cleaning tank 10. The bottom portion 120 is connected to the wall portion 110 to define a space for placing the workpiece 2 to be cleaned. The workpiece 2 to be cleaned can be suspended in the cleaning liquid contained in the space of the megasonic cleaning tank 10, for example, by the support portion 110a, so as to perform a megasonic cleaning operation.

[0039] In an embodiment of the present disclosure, the wall portion 110 is made of plastic, the bottom portion 120 is made of quartz, and the bottom portion 120 is in the form of a whole quartz plate.

[0040] The plastic may be, for example, polypropylene (PP), polyvinylidene fluoride (PVDF), polytetrafluoroethylene (PTFE), or the like.

[0041] By making the megasonic cleaning tank 10 consist of a wall portion 110 made of plastic and a bottom portion 120 made of quartz, that is, by making it consist of two separate parts, the two parts can be manufactured separately and then assembled to form the megasonic cleaning tank 10. In addition, the relatively complex wall portion 110 can be manufactured using plastic, and the relatively simple bottom portion 120 can be manufactured using a quartz plate, thereby reducing the manufacturing difficulty of the megasonic cleaning tank 10. Moreover, by making the wall portion 110 made of plastic, the manufacturing cost of the megasonic cleaning tank 10 can be reduced, and the reduction in manufacturing difficulty is also conducive to reducing the manufacturing cost. On the other hand, if Figure 3 As shown in , since the megasonic waves generated by the megasonic generator 30 are transmitted to the bottom 120 through the liquid in the water bath 20 and then transmitted to the inside of the megasonic cleaning tank 10 through the bottom 120, by making the bottom 120 made of quartz having excellent megasonic wave conduction performance, the megasonic energy loss in the process of the megasonic waves propagating through the bottom 120 can be kept small, thereby ensuring a good cleaning effect on the parts to be cleaned 2. In addition, the wall 110 made of plastic also makes the megasonic cleaning tank 10 less likely to break. Even if the bottom 120 made of quartz material breaks, since the wall 110 and the bottom 120 are two separate parts, only the bottom 120 needs to be replaced, and the megasonic cleaning tank 10 does not need to be replaced as a whole, making replacement easier.

[0042] In addition, by making the bottom 120 in the form of a whole quartz plate, the manufacturing difficulty and manufacturing cost can be reduced, and it is also convenient to replace it when it is broken. Moreover, the form of a whole quartz plate can make the energy transmitted to the megasonic cleaning tank 10 through various positions of the bottom 120 be distributed more evenly, and the situation that some parts of the workpiece 2 to be cleaned are not insufficiently cleaned will not occur. Next, continue to refer to Figure 2 and Figure 3 In the case of Figure 4 , the connection structure between the wall portion 110 and the bottom portion 120 is described in detail.

[0043] In some embodiments, Figure 2 and Figure 3 As shown in , the wall portion 110 may include a support portion 111, and the megasonic cleaning tank 10 may include a pressing plate 130, the supporting portion 111 supports the bottom 120 from below the bottom 120, the pressing plate 130 is arranged above the bottom 120, and the bottom 120 is fixed in place by the connection between the pressing plate 130 and the supporting portion 111.

[0044] exist Figure 2 and Figure 4 In the embodiment, the support portion 111 is exemplarily shown as extending inwardly from the wall portion 110 in the horizontal direction, thereby forming a ring-shaped protrusion extending along the circumference of the wall portion 110. The bottom portion 120 is placed on the support portion 111 to be supported by the support portion 111. The pressure plate 130 is placed above the bottom portion 120, and the pressure plate 130 is fixed by, for example, screws 150 (see Figure 2 and Figure 4 ) is connected to the support portion 111, so that the bottom 120 is fixed between the pressure plate 130 and the support portion 111, for example, by screwing the screw 150, thereby achieving the connection between the bottom 120 and the wall portion 110.

[0045] In this way, not only can the wall 110 and the bottom 120 made of different materials be firmly connected, but the bottom 120 can also be easily disassembled and replaced. For example, the pressing plate 130 can be disconnected from the supporting portion 111 by screwing the screw 150, thereby disconnecting the wall 110 and the bottom 120, and then the pressing plate 130 can be removed, and the bottom 120 can be disassembled and replaced.

[0046] It is conceivable that the material of the pressing plate 130 and the material of the fasteners such as screws can be selected according to the type of cleaning liquid in the megasonic cleaning tank 10. For example, the pressing plate 130 and the screws can be made of plastic.

[0047] In some embodiments, the megasonic cleaning tank 10 may further include a sealing ring 140, such as Figure 2 and Figure 4 As shown in , the sealing ring 140 may be disposed between a surface 1110 of the support portion 111 for supporting the bottom portion 120 and a lower surface 1201 of the bottom portion 120 to achieve sealing between the bottom portion 120 and the support portion 111 .

[0048] This seal can prevent the cleaning liquid in the megasonic cleaning tank 10 from leaking from the connection between the support portion 111 and the bottom portion 120 .

[0049] It is conceivable that Figure 2 As shown in , the surface 1110 of the support portion 111 may be provided with a groove 1111 for accommodating the sealing ring 140. Through the groove 1111, the position of the sealing ring 140 placed therein can always be kept fixed without moving, thereby improving the stability of the seal.

[0050] In some embodiments, reference Figure 2 and Figure 4 The pressing plate 130 may be in the shape of a ring extending around the circumference of the bottom 120 .

[0051] exist Figure 4 In the figure, the bottom 120 is exemplarily shown as a rectangle, and the pressing plate 130 extending around the circumference of the bottom 120 is thus in the shape of a ring with a rectangular outline. In this way, most of the upper surface 1202 of the bottom 120 can be directly exposed to the cleaning liquid in the megasonic cleaning tank 10, except for the portion that must be covered by the pressing plate 130 to achieve the connection between the wall 110 and the bottom 120.

[0052] In this case, most of the megasonic waves propagating from the lower surface 1201 of the bottom 120 through the bottom 120 can be directly propagated into the cleaning liquid without passing through the pressure plate 130, so that the loss of megasonic energy in the process of the megasonic waves entering the cleaning liquid from the bottom 120 is small, thereby being able to more effectively clean the items 2 to be cleaned.

[0053] It should be noted that in order to clearly show the connection between the wall portion 110 and the bottom portion 120, the top view Figure 4 The supporting portion 110a for supporting the object 2 to be cleaned so as to be suspended in the cleaning liquid is omitted.

[0054] In some embodiments, Figure 4 As shown in , the pressing plate 130 may be provided with at least one drainage port 1301 , and the inner side of the pressing plate 130 is communicated with the outer side of the pressing plate 130 via the at least one drainage port 1301 .

[0055] It is understandable that the pressing plate 130 itself has a certain thickness, that is, the upper surface of the pressing plate 130 is slightly higher than the upper surface 1202 of the bottom 120 in a direction perpendicular to the upper surface 1202. Therefore, when the cleaning liquid in the megasonic cleaning tank 10 needs to be drained, the pressing plate 130 may block the cleaning liquid inside it from flowing out, making it difficult to drain the cleaning liquid.

[0056] By providing the drain port 1301 , the cleaning liquid inside the pressing plate 130 can be discharged to the outside of the pressing plate 130 through the drain port 1301 , so that the cleaning liquid in the megasonic cleaning tank 10 can be easily drained.

[0057] exist Figure 4 In the figure, two drain ports 1301 are exemplarily shown to be provided, however, it is conceivable that only one drain port 1301 may be provided, or more drain ports 1301 may be provided.

[0058] It is conceivable that the ratio of the total width of the at least one drainage port 1301 to the length of the side of the pressing plate 130 where the at least one drainage port 1301 is disposed may be less than or equal to one third.

[0059] For example, in Figure 4 In the embodiment, the sum of the widths of the two drain ports 1301 does not exceed one third of the length of the side portion 130a of the pressing plate 130. In this way, the clamping effect of the pressing plate 130 and the supporting portion 111 on the bottom 120 disposed therebetween can be ensured, thereby preventing the bottom 120 from loosening and possible leakage of the cleaning liquid.

[0060] In some embodiments, reference Figure 5 and Figure 6 , the lower surface 1201 of the bottom 120 can be inclined at an angle β relative to the horizontal plane S.

[0061] For example, the support portion 111 may be configured such that its surface 1110 is inclined at an angle relative to a horizontal plane, thereby allowing the lower surface 1201 of the bottom portion 120 disposed thereon to be inclined at the same angle relative to the horizontal plane.

[0062] like Figure 6 As shown in the figure, when the megasonic generator 30 emits megasonic waves, bubbles are generated at the lower surface 1201 of the bottom 120 of the megasonic cleaning tank 10. These bubbles are located on the propagation path of the megasonic waves to the bottom 120, thereby causing the loss of megasonic energy. In particular, when the gathering area of ​​the bubbles corresponds to the area of ​​the workpiece 2 to be cleaned, the megasonic energy propagated to the area of ​​the workpiece 2 to be cleaned will be greatly reduced, thereby causing a greater impact on the cleaning effect.

[0063] By making the lower surface 1201 of the bottom 120 form an inclination angle β relative to the horizontal plane S, the bubbles generated on the lower surface 1201 will float toward the highest position of the lower surface 1201, for example, toward Figure 6In this way, no bubbles can stay in most areas of the lower surface 1201, especially in the area corresponding to the area of ​​the workpiece 2 to be cleaned, thereby reducing or even eliminating the adverse effect of bubbles on megasonic energy, thereby enhancing the cleaning effect on the workpiece 2 to be cleaned.

[0064] In some embodiments, the tilt angle β may be 2° to 15°.

[0065] Figure 7 The figure shows the relationship between the sound pressure U when the megasonic wave propagates through the bottom 120 made of quartz and the inclination angle β of the lower surface 1201 of the bottom 120. Figure 7 It is observed that when the inclination angle β is in the range of 2° to 15°, the corresponding sound pressure is small, which results in a small energy loss of the megasonic wave when it propagates through the bottom 120. Thus, the items to be cleaned 2 can be cleaned more effectively by megasonic waves.

[0066] It is understandable that, when the lower surface 1201 of the bottom 120 is inclined at an angle β relative to the horizontal plane S, the drain port 1301 can be set on the lowest side of the pressure plate 130 so that the cleaning liquid on the inner side of the pressure plate 130 can be easily drained.

[0067] In some embodiments, reference Figure 8 The wall portion 110 may be provided with an opening 1101 therethrough, the opening 1101 being located immediately below the highest edge 1201 a of the lower surface 1201 of the bottom portion 120 .

[0068] exist Figure 8 In the figure, the opening 1101 is exemplarily shown as one and in a long strip shape, and the opening 1101 is located below the edge 1201a and close to the edge 1201a.

[0069] As bubbles are continuously generated and accumulated, more and more bubbles will float up to the edge 1201a, thereby possibly covering a larger area of ​​the lower surface 1201 of the bottom 120 , thereby causing a greater impact on the propagation of megasonic waves toward the bottom 120 and into the megasonic cleaning tank 10 .

[0070] By providing the opening 1101 and positioning the opening 1101 just below the edge 1201a, the bubbles that float up to the vicinity of the edge 1201a can be discharged promptly from the adjacent opening 1101, thereby reducing or even eliminating the adverse effects of the continuously generated and accumulated bubbles on the propagation of megasonic waves, thereby enhancing the cleaning effect.

[0071] It is understood that the opening 1101 may also be in other forms. For example, in some embodiments, referring to Fig. 9, the opening 1101 may be in the form of a plurality of holes.

[0072] In this way, not only can the bubbles be discharged from the wall 110 in time, but also the structural strength of the wall 110 can be enhanced. In particular, considering that the opening 1101 is opened at the portion of the wall 110 below the bottom 120, the portion must have a greater structural strength to bear the weight of the bottom 120 made of quartz.

[0073] It is conceivable that Fig. 9 As shown in , the plurality of holes may be arranged to correspond to the entire range of the edge 1201a. That is, the plurality of holes are arranged on a range of the wall portion 110, wherein the range corresponds to the entire range of the edge 1201a.

[0074] In this way, the bubbles gathered near the edge 1201a can be discharged from the nearby holes, which speeds up the rate at which the bubbles are discharged from the opening 1101 and reduces the possibility that the bubbles will adversely affect the propagation of megasonic waves.

[0075] The inventors have noticed that the thickness of the quartz plate will have a certain influence on the propagation of megasonic waves. Based on this, a bottom 120 of a certain thickness can be selected to increase the acoustic wave propagation rate of megasonic waves propagating through the bottom 120, thereby obtaining a better cleaning effect.

[0076] In some embodiments, when the megasonic waves used in the megasonic cleaning tank 10 propagate in water and the frequency of the megasonic waves is 950 Khz, the thickness of the bottom 120 may be 3 mm.

[0077] The acoustic wave propagation rate D of megasonic waves and the thickness t of the bottom 120 can be expressed by the following relationship:

[0078] Among them, under the condition that megasonic waves propagate in water and the frequency of megasonic waves is 950Khz, ρ0 is the density of water, ρ1 is the density of quartz, c0 is the propagation speed of megasonic waves in water, c1 is the propagation speed of megasonic waves in quartz, λ1 is the wavelength of megasonic waves propagating in quartz, λ1=c1 / f, and f is the frequency of megasonic waves.

[0079] In this way, refer to Fig.10 , a curve diagram of the relationship between the acoustic wave propagation rate D of megasonic waves and the thickness t of the bottom 120 is obtained. It can be observed that when the thickness t of the bottom 120 is 3 mm, the acoustic wave propagation rate D is the largest, so the maximum megasonic energy can be obtained in the cleaning liquid, thereby providing a better cleaning effect.

[0080] In some embodiments, the thickness of the edge portion of the bottom 120 may be different from the thickness of other portions of the bottom 120, and the thickness of the edge 120a and the thickness of the other portions are configured so that the sound wave propagation rate of the edge 120a is greater than the sound wave propagation rate of the other portions, wherein the edge portion corresponds to the highest edge 1201a of the lower surface 1201 of the bottom 120.

[0081] As discussed above, bubbles generated by megasonic waves at the lower surface 1201 of the bottom 120 will float up to the vicinity of the edge 1201a due to the inclined lower surface 1201. Therefore, the megasonic waves propagating through the edge portion of the bottom 120 corresponding to the edge 1201a will suffer energy loss due to the presence of bubbles, resulting in uneven distribution of megasonic energy in the megasonic cleaning tank 10, affecting the cleaning effect.

[0082] By changing the thickness of the edge portion to obtain a greater acoustic wave propagation rate, the energy loss of megasonic waves propagating through the edge portion of the bottom 120 can be reduced overall, thereby improving the uniformity of megasonic energy distribution in the megasonic cleaning tank 10 and thereby enhancing the cleaning effect.

[0083] According to another aspect of the present disclosure, Figure 3 and Figure 6 As shown in , a megasonic cleaning machine 1 is also provided.

[0084] The megasonic cleaning machine 1 comprises a megasonic cleaning tank 10 , a water bath 20 and a megasonic generator 30 .

[0085] The megasonic cleaning tank 10 is arranged in the water bath 20. The megasonic generator 30 is used to emit megasonic waves, and the megasonic generator 30 is arranged at the bottom of the water bath 20 and below the megasonic cleaning tank 10.

[0086] In the present disclosure, although the present disclosure has been described with reference to exemplary embodiments, it should be understood that the present disclosure is not limited to the specific embodiments described and shown in detail herein. Those skilled in the art may make various changes to the exemplary embodiments without departing from the scope defined by the claims of the present disclosure.

[0087] The features mentioned and / or shown in the above description of the exemplary embodiments of the present disclosure may be combined in the same or similar manner into one or more other embodiments, combined with the features in other embodiments or substituted for the corresponding features in other embodiments. The technical solutions obtained by these combinations or substitutions shall also be deemed to be included in the protection scope of the present disclosure.

Claims

1. A megasonic cleaning tank, used for cleaning the parts to be cleaned placed inside the tank by using megasonic waves, wherein: The megasonic wave propagates through the bottom of the megasonic wave cleaning tank to the inside thereof, wherein the megasonic wave cleaning tank comprises: a wall portion; and The bottom portion is connected to the wall portion to define a space for placing the items to be cleaned, The wall portion is made of plastic, the bottom portion is made of quartz, and the bottom portion is in the form of a whole quartz plate.

2. The megasonic cleaning tank according to claim 1, characterized in that: The wall portion includes a support portion, and the megasonic cleaning tank includes a pressing plate, the supporting portion supports the bottom portion from below the bottom portion, the pressing plate is arranged above the bottom portion, and the bottom portion is fixed in place by connection of the pressing plate to the support portion.

3. The megasonic cleaning tank according to claim 2, characterized in that: A sealing ring is also included, and a surface of the supporting portion for supporting the bottom is provided with a groove for accommodating the sealing ring.

4. The megasonic cleaning tank according to claim 2 or 3, characterized in that: The pressure plate is in the shape of a ring extending around the circumference of the bottom.

5. The megasonic cleaning tank according to claim 4, characterized in that: The pressing plate is provided with at least one liquid discharge port, and the inner side of the pressing plate is communicated with the outer side of the pressing plate via the at least one liquid discharge port.

6. The megasonic cleaning tank according to any one of claims 1 to 3, characterized in that: The lower surface of the bottom forms an inclined angle relative to a horizontal plane.

7. The megasonic cleaning tank according to claim 6, characterized in that: The wall portion is provided with an opening therethrough, the opening being located immediately below the uppermost edge of the lower surface.

8. The megasonic cleaning tank according to claim 7, characterized in that: The openings are in the form of a plurality of holes.

9. The megasonic cleaning tank according to claim 6, characterized in that: The thickness of the edge portion of the bottom is different from the thickness of other portions of the bottom, and the thickness of the edge portion and the thickness of the other portions are configured so that the sound wave propagation rate of the edge portion is greater than the sound wave propagation rate of the other portions, wherein the edge portion corresponds to the highest edge of the lower surface of the bottom.

10. A megasonic cleaning machine, characterized in that: include: The megasonic cleaning tank according to any one of claims 1 to 9; a water bath, wherein the megasonic cleaning tank is arranged in the water bath; as well as A megasonic generator is used to emit megasonic waves, and the megasonic generator is arranged at the bottom of the water bath and below the megasonic cleaning tank.

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