Micro-lens array machining device and method based on micro-forming tool

Abstract

The application discloses a kind of micro-lens array processing device and method based on micro-forming cutter, it is related to micro-lens array processing technical field, including containing Y axis's ultra-precision machine tool, lifting tool rest and circular arc cutter, vacuum chuck on the Y axis of ultra-precision machine tool is used to install workpiece, lifting tool rest is used to install circular arc cutter on, lifting tool rest can drive circular arc cutter to lift along Y direction, and make circular arc cutter form microlens unit and process to workpiece surface, ultra-precision machine tool can drive workpiece to move along X direction, Y direction and Z direction compared with circular arc cutter, and make circular arc cutter form micro-lens array and process to workpiece surface, the cutting edge radius of circular arc cutter is equal to the curvature radius of microlens unit.The application can realize high quality, high uniformity to complete micro-lens array processing.

Description

Technical Field

[0001] This invention relates to the field of micron-level lens array processing technology, and in particular to a micron-level lens array processing device and method based on micro-forming tools. Background Technology

[0002] Microlens arrays are optical components widely used in micro-optical systems, possessing excellent optical performance, compactness, and structural simplicity. However, with the advancement of technology, their complex structure, the required high profile accuracy, and the miniaturization of microlens units pose significant challenges to existing fabrication techniques.

[0003] In the machining of microlens arrays, the consistency and shape accuracy of the microlens array are important evaluation criteria. Tool setting errors lead to a decrease in machining quality and can even cause machining failure. Therefore, the key technical challenge in high-quality, high-consistency ultra-precision machining of microlens arrays is how to reduce tool setting errors and ensure the machining path of each microlens unit. To solve this problem, B-axis oscillating machining is a method to reduce the impact of the cutting path on machining small-sized microlens arrays. B-axis oscillating machining refers to mounting the circular arc tool 90° around the Z-axis from the traditional mounting position on a specific tool holder fixed to the B-axis. The linkage between the B-axis and Z-axis enables real-time monitoring of the tool position, and the linkage between the X-axis and C-axis enables the positioning of the microlens units. This B-axis oscillating machining method solves the problem of shape distortion of the microlens array caused by tool setting errors. However, B-axis oscillating machining still requires precise tool setting; otherwise, deformation of adjacent positions in the microlens array will occur. Summary of the Invention

[0004] The purpose of this invention is to provide a micron-level lens array processing device and method based on micro-forming tools, so as to solve the problems existing in the prior art and achieve high-quality and high-uniformity micron-level lens array processing.

[0005] To achieve the above objectives, the present invention provides the following solution:

[0006] This invention provides a micron-level lens array machining device based on micro-forming tools, comprising an ultra-precision machine tool with a Y-axis, a lifting tool holder, and a circular arc tool. A vacuum chuck on the Y-axis of the ultra-precision machine tool is used to mount the workpiece. The lifting tool holder is used to mount the circular arc tool. The lifting tool holder can drive the circular arc tool to move up and down along the Y-axis, and the circular arc tool can machine the workpiece surface to form microlens units. The ultra-precision machine tool can drive the workpiece to move relative to the circular arc tool along the X, Y, and Z axes, and the circular arc tool can machine the workpiece surface to form a microlens array. The cutting edge radius of the circular arc tool is equal to the radius of curvature of the microlens unit.

[0007] Preferably, the ultra-precision machine tool includes an X-axis, a Y-axis, a Z-axis, and a C-axis. The X-axis, Y-axis, and Z-axis are linear axes, the C-axis is a rotary axis, the Z-axis can translate along the Z-direction, the X-axis is connected to the lower end of the Y-axis and can drive the Y-axis to translate along the X-direction, the Y-axis is connected to the C-axis and can drive the C-axis to move up and down along the Y-direction, and the C-axis is connected to the workpiece.

[0008] Preferably, the lifting tool holder is fixedly installed on the Z-axis and is arranged opposite to the Y-axis.

[0009] Preferably, the Z-axis is movably connected to the X-axis, the X-axis to the Y-axis platform, and the Y-axis to the C-axis.

[0010] Preferably, the C-axis is provided with a clamp for holding the workpiece.

[0011] Preferably, the cutting edge waviness of the circular arc tool is less than 50 nm.

[0012] Preferably, the circular arc cutting tool is made of diamond material.

[0013] This invention also provides a method for machining micron-scale lens arrays based on micro-forming tools, and the micron-scale lens array machining apparatus based on micro-forming tools according to any one of the above technical solutions includes the following steps:

[0014] S1. Machining trajectory point calculation: Calculate the machining trajectory points of the circular arc tool according to the design parameters of the microlens array, write the machining program, and ensure that the machining trajectory radius of the circular arc tool, the cutting edge radius of the circular arc tool, and the curvature radius of the microlens unit are all the same.

[0015] S2. Ensure the workpiece surface is flat. After rough setting of the circular arc tool, use the circular arc tool to rough machine the workpiece surface to eliminate tilting error, obtain a workpiece with a flat surface, and set the workpiece surface as Z0 of the programming coordinate system.

[0016] S3. Machining the microlens unit: Move the cutting edge of the circular arc tool to the edge coordinates P0(X0, Y0, Z0) of the first microlens unit to be machined. Use an ultra-precision machine tool to achieve linkage between the Y-axis and Z-axis. Follow the machining program written in S1 to complete the machining of a single microlens unit.

[0017] S4. Machining the microlens array: According to the design requirements of the microlens array, the workpiece is first offset n times in the Y direction under the drive of the ultra-precision machine tool to realize the machining of a single row of microlens units. After the machining of a single row of microlens units is completed, it is moved in the X direction until the machining process of a single row of microlens units is repeated n times, thus obtaining a microlens array that meets the design requirements.

[0018] Preferably, in S3, the first microlens unit to be processed is located at the lower left corner of the workpiece, and the edge coordinates P0(X0, Y0, Z0) of the first microlens unit to be processed are the lowest point of the first microlens unit to be processed.

[0019] Preferably, in S4, the machining sequence of the circular arc tool on the microlens array on the workpiece surface is as follows: the circular arc tool starts from P0 (X0, Y0, Z0) and cuts the microlens units located in the first column from bottom to top. Then, the circular arc tool retracts along the Z-axis and moves from top to bottom without cutting to the bottom of the first column of microlens units. Then, the circular arc tool feeds along the X-axis until it reaches the bottom of the second column of microlens units. The microlens units located in the second column are cut from bottom to top. This process is repeated until the nth column of microlens units is cut, and finally the microlens array is obtained.

[0020] The present invention achieves the following technical effects compared to the prior art:

[0021] The micron-level lens array processing device and method based on micro-forming tools provided by this invention are applicable to ultra-precision machine tools with a Y-axis. A vacuum chuck on the Y-axis is used to mount the workpiece, and a lifting tool holder is used to mount the arc-shaped tool. The lifting tool holder can drive the arc-shaped tool to move up and down along the Y-axis, allowing the arc-shaped tool to machine microlens units on the workpiece surface. The ultra-precision machine tool can move the workpiece relative to the arc-shaped tool along the X, Y, and Z axes, allowing the arc-shaped tool to machine microlens arrays on the workpiece surface. Since the processing program for each microlens unit is the same, and the shape of the arc-shaped tool used for processing is identical, the microlens array can be effectively improved. The machining accuracy and consistency are improved. At the same time, since the circular arc tool no longer needs to rotate during the machining process, the problems caused by tool setting errors are effectively avoided, and the shape distortion of the microlens array caused by tool setting errors is avoided, which effectively improves the shape accuracy of the microlens array. The cutting edge radius of the circular arc tool is equal to the curvature radius of the microlens unit, so the machining of a single microlens unit can be completed in one feed. Compared with the traditional slow tool servo machining method, it can effectively reduce the tool cutting distance, reduce or avoid tool wear, save machining time and machining costs, and ultimately achieve high-quality and high-uniformity machining of the microlens array. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1This is a schematic diagram of the micron-scale lens array processing device based on micro-forming tools in Example 1;

[0024] Figure 2 This is a diagram showing the machining trajectory of the circular arc tool when machining a single microlens unit in Example 2;

[0025] Figure 3 This is a diagram showing the movement trajectory of the circular arc tool during the machining of the microlens array in Example 2;

[0026] In the diagram: 1-X-axis, 2-Y-axis, 3-Z-axis, 4-C-axis, 5-lifting tool holder, 6-workpiece, 7-circular arc tool, 8-microlens unit. Detailed Implementation

[0027] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0028] The purpose of this invention is to provide a micron-level lens array processing device and method based on micro-forming tools, so as to solve the problems existing in the prior art and achieve high-quality and high-uniformity micron-level lens array processing.

[0029] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0030] Example 1

[0031] like Figure 1As shown, this embodiment provides a micron-level lens array processing device based on micro-forming tools, including an ultra-precision machine tool with a Y-axis, a lifting tool holder 5, and a circular arc tool 7. The ultra-precision machine tool has a positional accuracy of 1 arcsecond and a feedback resolution of 0.01 arcseconds. The ultra-precision machine tool is used to mount the workpiece 6, and the lifting tool holder 5 is used to mount the circular arc tool 7. The lifting tool holder 5 can drive the circular arc tool 7 to move up and down along the Y-axis, allowing the circular arc tool 7 to process the surface of the workpiece 6 to form microlens units 8. The ultra-precision machine tool can also drive the workpiece 6 to move relative to the circular arc tool 7 along the X, Y, and Z axes, allowing the circular arc tool 7 to process the surface of the workpiece 6 to form a microlens array. Since the processing procedure for each microlens unit 8 is the same, and the processing of each microlens unit 8 is... The circular arc tool 7 has the same shape, which can effectively improve the machining accuracy and consistency of the microlens array. At the same time, since the circular arc tool 7 no longer needs to rotate during the machining process, it effectively avoids the problems caused by tool setting errors and avoids shape distortion of the microlens array caused by tool setting errors, thus effectively improving the shape accuracy of the microlens array. The cutting edge radius of the circular arc tool 7 is equal to the curvature radius of the microlens unit 8, so a single microlens unit 8 can be machined in one feed. Compared with the traditional slow tool servo machining method, it can effectively reduce the tool cutting distance, reduce or avoid tool wear, save machining time and machining costs, and ultimately achieve high-quality and high-uniformity machining of the microlens array.

[0032] Specifically, the ultra-precision machine tool includes X-axis 1, Y-axis 2, Z-axis 3 and C-axis 4. X-axis 1, Y-axis 2 and Z-axis 3 are linear axes, C-axis 4 is a rotary axis, Z-axis 3 translates along the Z direction, X-axis 1 is connected to the lower end of Y-axis 2 and can drive Y-axis 2 to translate along the X direction, Y-axis 2 is connected to C-axis 4 and can drive C-axis 4 to move up and down along the Y direction, C-axis 4 is connected to workpiece 6, and thus the multi-directional movement of workpiece 6 realizes the multi-directional displacement of the arc tool 7 relative to workpiece 6. C-axis is the machine tool spindle.

[0033] The lifting tool holder 5 can drive the arc tool 7 to move up and down within a small range, thereby adjusting the level of the arc tool 7 and the microlens unit 8.

[0034] The lifting tool holder 5 is fixedly installed on the Z-axis 3 and is set opposite to the Y-axis 2, so that the circular arc tool 7 can process a single microlens unit 8 through the relative displacement of the Z-axis.

[0035] There are movable connections between Z-axis 3 and X-axis 1, X-axis 1 and Y-axis 2, and Y-axis 2 and C-axis 4, improving movement stability. In this embodiment, the ultra-precision machine tool can be an ultra-precision five-axis machine tool, or other types of machine tools, as long as they meet the usage requirements.

[0036] The C-axis 4 is equipped with a fixture for holding the workpiece 6, which improves the stability of the workpiece 6 during the cutting process and ensures cutting accuracy.

[0037] The cutting edge ripple of the circular arc tool 7 is less than 50nm, which ensures the surface shape of the microlens array and enables the machining of high-precision microlens arrays.

[0038] The circular arc cutting tool 7 is made of diamond material.

[0039] Example 2

[0040] like Figures 2-3 As shown, this embodiment provides a method for machining micron-scale lens arrays based on micro-forming tools, using the micron-scale lens array machining device based on micro-forming tools from Embodiment 1, including the following steps:

[0041] S1. Machining trajectory point calculation: The machining trajectory of the circular arc tool 7 is calculated based on the design parameters of the microlens array, and a machining program is written. The machining trajectory radius of the circular arc tool 7, the cutting edge radius of the circular arc tool 7, and the curvature radius of the microlens unit 8 are all the same. In this step, a reasonable number of machining trajectory positioning points are obtained through calculation software, and the calculation method is a conventional and mature technology.

[0042] S2. Ensure that the surface of workpiece 6 is flat. After rough setting of the circular arc tool 7, use the circular arc tool 7 to rough machine the surface of workpiece 6 to eliminate tilting error, and obtain a flat surface workpiece 6. Set the surface of workpiece 6 as Z0 of the programming coordinate system.

[0043] S3. Machining the microlens unit 8: Move the cutting edge of the circular arc tool 7 to the edge coordinates P0(X0, Y0, Z0) of the first microlens unit 8 to be machined. Use an ultra-precision machine tool to achieve linkage between the Y and Z axes. Follow the machining program written in S1 to complete the machining of a single microlens unit 8. Figure 2 As shown in the figure, the dashed line represents the machining trajectory of the circular arc tool 7 when machining a single microlens unit 8;

[0044] S4. Machining the microlens array: According to the design requirements of the microlens array, the workpiece 6 is first offset n times in the Y direction under the drive of an ultra-precision machine tool to realize the machining of a single row of microlens units 8. After completing the machining of the single row of microlens units 8, it is then moved in the X direction until the machining process of the single row of microlens units 8 is repeated n times, thus obtaining the microlens array that meets the design requirements. Figure 3 As shown in the figure, the solid and dashed lines with arrows represent the travel trajectory of the circular arc tool 7 when it continuously processes multiple microlens units 8. The solid lines represent the actual machining trajectory, and the dashed lines represent the retraction trajectory.

[0045] This embodiment uses the above-described processing method to process the microlens array, abandoning the use of the C-axis and directly avoiding the transmission of tool setting errors caused by C-axis rotation. This eliminates problems such as poor positioning accuracy, decreased machining accuracy, and shape distortion caused by tool setting errors. At the same time, it effectively reduces the cutting distance of the circular arc tool 7, reduces or avoids tool wear, and thus avoids machining quality problems caused by tool wear. It also avoids the need for mid-process tool changes due to tool wear, thereby avoiding resource waste and saving time and costs.

[0046] Specifically, in S3, the first microlens unit 8 to be processed is located at the lower left corner of the workpiece 6, and the edge coordinates P0(X0, Y0, Z0) of the first microlens unit 8 to be processed are the lowest point of the first microlens unit 8 to be processed.

[0047] In S4, the machining sequence of the circular arc tool 7 on the microlens array on the surface of the workpiece 6 is as follows: The circular arc tool 7 starts from P0 (X0, Y0, Z0) and cuts the microlens units 8 located in the first column from bottom to top. Then, the circular arc tool 7 retracts along the Z-axis and moves from top to bottom without cutting to the bottom of the first column of microlens units 8. Then, the circular arc tool 7 feeds along the X-axis until it reaches the bottom of the second column of microlens units 8. It then cuts the microlens units 8 located in the second column from bottom to top. This process is repeated until the nth column of microlens units 8 is cut, and finally the microlens array is obtained.

[0048] The offset distance of the circular arc cutter 7 in the Y and X directions is equal to the design diameter of the microlens unit 8 (i.e., the opening diameter of the microlens unit 8).

[0049] The micron-level lens array processing method based on micro-forming tools in this embodiment is simple to operate, does not require a lot of calculation, and has high efficiency.

[0050] Specific examples have been used to illustrate the principles and implementation methods of this invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this invention. Furthermore, those skilled in the art will recognize that, based on the ideas of this invention, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this invention.

Claims

1. A micron-scale lens array processing device based on micro-forming tools, characterized in that: The system includes an ultra-precision machine tool with a Y-axis, a lifting tool post, and a circular arc cutting tool. A vacuum chuck on the Y-axis of the ultra-precision machine tool is used to mount the workpiece. The lifting tool post is used to mount the circular arc cutting tool. The lifting tool post can move the circular arc cutting tool up and down along the Y-axis, allowing it to machine microlens units onto the workpiece surface. The ultra-precision machine tool can also move the workpiece relative to the circular arc cutting tool along the X, Y, and Z axes, allowing the circular arc cutting tool to machine a microlens array onto the workpiece surface. During machining, the circular arc cutting tool does not rotate, and its cutting edge radius is equal to the radius of curvature of the microlens unit. During machining, the workpiece is first offset n times in the Y-axis by the ultra-precision machine tool to machine a single row of microlens units. After completing the machining of a single row of microlens units, it moves in the X-axis, repeating the machining process n times to obtain a microlens array.

2. The micron-scale lens array processing device based on micro-forming tools according to claim 1, characterized in that: The ultra-precision machine tool includes an X-axis, a Y-axis, a Z-axis, and a C-axis. The X-axis, Y-axis, and Z-axis are linear axes, and the C-axis is a rotary axis. The Z-axis can translate along the Z-direction. The X-axis is connected to the lower end of the Y-axis and can drive the Y-axis to translate along the X-direction. The Y-axis is connected to the C-axis and can drive the C-axis to move up and down along the Y-direction. The C-axis is connected to the workpiece.

3. The micron-scale lens array processing device based on micro-forming tools according to claim 2, characterized in that: The lifting tool holder is fixedly installed on the Z-axis and is arranged opposite to the Y-axis.

4. The micron-scale lens array processing device based on micro-forming tools according to claim 2, characterized in that: The Z-axis is movably connected to the X-axis, the X-axis to the Y-axis, and the Y-axis to the C-axis.

5. The micron-scale lens array processing device based on micro-forming tools according to claim 2, characterized in that: The C-axis is equipped with a clamp for holding the workpiece.

6. The micron-scale lens array processing device based on micro-forming tools according to claim 1, characterized in that: The cutting edge ripple of the circular arc tool is less than 50 nm.

7. The micron-scale lens array processing device based on micro-forming tools according to claim 1, characterized in that: The circular arc cutting tool is made of diamond.

8. A method for machining micron-scale lens arrays based on micro-forming tools, characterized in that: The micron-scale lens array processing apparatus based on micro-forming tools according to any one of claims 1-7 includes the following steps: S1. Machining trajectory point calculation: Calculate the machining trajectory points of the circular arc tool according to the design parameters of the microlens array, write the machining program, and ensure that the machining trajectory radius of the circular arc tool, the cutting edge radius of the circular arc tool, and the curvature radius of the microlens unit are all the same. S2. Ensure the workpiece surface is flat. After rough setting of the circular arc tool, use the circular arc tool to rough machine the workpiece surface to eliminate tilting error, obtain a workpiece with a flat surface, and set the workpiece surface as Z0 of the programming coordinate system. S3. Machining the microlens unit: Move the cutting edge of the circular arc tool to the edge coordinates P0(X0, Y0, Z0) of the first microlens unit to be machined. Use an ultra-precision machine tool to achieve linkage between the Y-axis and Z-axis. Follow the machining program written in S1 to complete the machining of a single microlens unit. S4. Machining the microlens array: According to the design requirements of the microlens array, the workpiece is first offset n times in the Y direction under the drive of the ultra-precision machine tool to realize the machining of a single row of microlens units. After the machining of a single row of microlens units is completed, it is moved in the X direction until the machining process of a single row of microlens units is repeated n times, thus obtaining a microlens array that meets the design requirements.

9. The method for machining micron-scale lens arrays based on micro-forming tools according to claim 8, characterized in that: In S3, the first microlens unit to be processed is located at the lower left corner of the workpiece, and the edge coordinates P0(X0, Y0, Z0) of the first microlens unit to be processed are the lowest point of the first microlens unit to be processed.

10. The method for machining micron-scale lens arrays based on micro-forming tools according to claim 9, characterized in that: In S4, the machining sequence of the circular arc tool on the microlens array on the workpiece surface is as follows: The circular arc tool starts from P0 (X0, Y0, Z0) and cuts the microlens units located in the first column from bottom to top. Then, the circular arc tool retracts along the Z-axis and moves from top to bottom without cutting to the bottom of the first column of microlens units. Then, the circular arc tool feeds along the X-axis until it reaches the bottom of the second column of microlens units. It then cuts the microlens units located in the second column from bottom to top. This process is repeated until the nth column of microlens units is cut, and finally the microlens array is obtained.

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