Equipment capable of being used for bonding silicon carbide seed crystals

Abstract

The invention discloses equipment capable of being used for silicon carbide seed crystal bonding, and relates to the technical field of silicon carbide seed crystal bonding, the equipment comprises a supporting platform and a seed crystal, a supporting seat is fixedly mounted on the supporting platform, a placement groove is formed in the supporting seat, and the seed crystal is placed in the placement groove; a cover plate matched with the supporting base is installed on the supporting platform through an opening and closing component. The device has the advantages that the air bag can be rapidly inflated when needed, the pressure borne by the cover plate can be precisely regulated and controlled in the bonding process under the action of the precise pressure regulating valve, meanwhile, the extrusion force applied to the cover plate by the air bag is more uniform, the bonding and pressing effect is effectively improved, and the air bag can be quickly inflated before air enters the air bag through the pneumatic triple piece. And the gas is treated firstly, so that the influence of factors such as unclean gas on subsequently applied uniform extrusion force is effectively reduced.

Description

Technical Field

[0001] The invention relates to the technical field of silicon carbide seed crystal bonding, and in particular to a device that can be used for silicon carbide seed crystal bonding. Background Art

[0002] Compared with silicon, silicon carbide has a larger band gap and better dielectric breakdown performance, heat resistance, radiation resistance, etc. Therefore, it is suitable for electronic device materials such as portable and high-output semiconductors, and is also used as an optical device material due to its excellent optical properties. Compared with silicon carbide polycrystalline, silicon carbide single crystal has advantages such as uniformity of characteristics within the wafer when applied to devices such as wafers. In particular, power converters, battery chargers, and motor drivers used in new energy vehicles are the focus of the future market.

[0003] At present, in the production of silicon carbide single crystals grown by sublimation method, the silicon carbide seed crystal bonding method is the key technology of single crystal growth. The commonly used bonding method is to evenly apply the adhesive on the seed crystal tray with a balancing device, then place the silicon carbide seed crystal in the center of the crystal tray, and then apply force. However, when the existing equipment is in use, the pressing force applied to the silicon carbide seed crystal cannot be adjusted in time according to the pressing situation. At the same time, the uniformity of the applied pressing force is relatively poor, which affects the bonding quality of the seed crystal. For this reason, we propose a device that can be used for bonding silicon carbide seed crystals. Summary of the invention

[0004] The purpose of the present invention is to solve the problems raised in the background technology and to provide a device that can be used for bonding silicon carbide seed crystals.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] A device for bonding silicon carbide seed crystals, comprising a support platform and a seed crystal, wherein a support seat is fixedly mounted on the support platform, a placement groove is provided on the support seat, and the seed crystal is placed in the placement groove, and a cover plate matching the support seat is mounted on the support platform through an opening and closing member;

[0007] A self-adjusting pressing member matched with the seed crystal is installed between the support platform and the cover plate;

[0008] The support platform is provided with a control movement component that matches the support seat;

[0009] The support seat is provided with an annular groove connected with the placement groove, a sealing ring plate is installed on the annular groove through a sealing rotating component, and a second gear ring is fixedly installed on the lower end of the sealing ring plate, and the second gear ring cooperates with the control movement component, a telescopic movable heating component is arranged in the sealing ring plate, and a sealing rotary door cooperating with the telescopic movable heating component is sealed and rotatably installed on the sealing ring plate, and a torsion spring is installed between the sealing rotary door and the sealing ring plate, and the telescopic movable heating component cooperates with the control movement component;

[0010] An auxiliary bonding component is installed between the sealing ring plate and the support seat, and the telescopic heating component cooperates with the auxiliary bonding component;

[0011] An air bag is installed on the inner wall of the cover plate, and the air bag cooperates with the self-adjusting pressing component.

[0012] In the above-mentioned device that can be used for bonding silicon carbide seed crystals, the opening and closing component includes a locking assembly, a driving assembly, a handle, a support seat, and a flip shaft rod. Two support seats are fixedly installed on the support platform, a flip shaft rod is rotatably installed between the two support seats, and the cover plate and the flip shaft rod are rotatably arranged, and the cover plate is fixedly installed with a handle;

[0013] A driving assembly is installed between the cover plate and the supporting platform;

[0014] A locking assembly is installed between the cover plate and the support seat.

[0015] In the above-mentioned device that can be used for bonding silicon carbide seed crystals, the locking assembly includes a locking buckle and a locking buckle block, a plurality of locking buckles are installed on the cover plate, and a plurality of locking buckle blocks matching the locking buckles are fixedly installed on the outside of the support seat.

[0016] In the above-mentioned device that can be used for bonding silicon carbide seed crystals, the driving assembly includes a nitrogen support seat 1, a nitrogen support rod, and a nitrogen support seat 2. Two nitrogen support seats 1 are fixedly installed on the support platform, and the two nitrogen support seats 1 are respectively located on both sides of the support seat. A nitrogen support rod is rotatably installed on each of the two nitrogen support seats 1, and a nitrogen support seat 2 is rotatably installed on the upper end of the nitrogen support rod, and the nitrogen support seat 2 is fixedly arranged with the cover plate.

[0017] In the above-mentioned device that can be used for bonding silicon carbide seed crystals, the self-adjusting clamping component includes an air-controlled mounting plate, a pneumatic triplet, an air nozzle 1, an air nozzle 2, a precision pressure regulating valve, an air nozzle 3, an air nozzle 4, and an air nozzle 5. An air-controlled mounting plate is fixedly installed in the support platform, a pneumatic triplet is fixedly installed on the air-controlled mounting plate, the pneumatic triplet includes an air nozzle 1 and an air nozzle 2, a precision pressure regulating valve is fixedly installed on the support platform, the precision pressure regulating valve includes an air nozzle 3 and an air nozzle 4, an air nozzle 5 is fixedly connected to the cover plate, and the air nozzle 5 is connected to the airbag;

[0018] A pipe one is fixedly connected between the air nozzle two and the air nozzle three, and a pipe two is fixedly installed between the air nozzle four and the air nozzle five, and the pipe two is an elastic hose.

[0019] In the above-mentioned device that can be used for bonding silicon carbide seed crystals, the sealing rotating component includes a limit ring and an annular limit groove, an annular limit groove is opened on the top wall of the sealing ring plate, and a limit ring matching the annular limit groove is fixedly installed on the upper end surface of the sealing ring plate, and the thickness of the limit ring is less than the thickness of the sealing ring plate.

[0020] In the above-mentioned device that can be used for bonding silicon carbide seed crystals, the telescopic movable heating component includes a mounting frame, a reciprocating screw, a moving block, a connecting rod, a heating seat, and a matching component. The mounting frame is fixedly mounted on the outer wall of the sealing ring plate, and a reciprocating screw is rotatably mounted on the mounting frame. The reciprocating screw is mounted with a moving block through a nut, and the moving block is fixedly mounted with a heating seat through a connecting rod. The heating seat includes a heating element, and a matching component is installed between the reciprocating screw and the support seat, and the matching component matches the control movement component;

[0021] The mounting frame comprises a rod body and a round block. A round block is fixedly mounted on the outer wall of the sealing ring plate through a plurality of rod bodies, and one end of the reciprocating screw is rotatably mounted on the round block.

[0022] In the above-mentioned device that can be used for bonding silicon carbide seed crystals, the matching component includes one-way bearing two, gear three, and gear ring one, the reciprocating screw is equipped with gear three through one-way bearing two, an annular rotating groove is provided on the inner wall of the annular groove, gear ring one is rotatably installed on the annular rotating groove, and a part of the gear ring is located in the annular groove, and a limited rotation component is provided between the gear ring one and the annular rotating groove;

[0023] The limit rotation assembly includes a limit rod and a limit ring groove. A limit ring groove is provided on the bottom wall and the top wall of the annular rotation groove. A plurality of limit rods matching the limit ring grooves are fixedly mounted on the gear ring, and the limit rods are slidably mounted in the corresponding limit ring grooves.

[0024] In the above-mentioned device that can be used for bonding silicon carbide seed crystals, the auxiliary bonding component includes an air cylinder, a one-way tube 1, a one-way tube 2, a magnetic block 1, and a magnetic block 2. A plurality of air cylinders are fixedly installed on the sealing ring plate, and each of the air cylinders is fixedly connected to a one-way tube 1 and a one-way tube 2, and a sealing disk is sealingly and slidably installed in each of the air cylinders, a round rod is fixedly installed on one side of the sealing disk, and one end of the round rod slides through the corresponding air cylinder and is fixedly installed with a magnetic block 1, and the magnetism of two adjacent magnetic blocks on the same side is opposite, and a plurality of mounting grooves are opened on the inner wall of the annular groove, and a magnetic block 2 is fixedly installed in each of the mounting grooves, and the magnetism of two adjacent magnetic blocks on the same side is opposite;

[0025] The one-way tube 1 and the one-way tube 2 located on the same air cylinder are used for one-way air intake and one-way air outlet, respectively. The two adjacent one-way tubes 1 have opposite functions, and the two adjacent one-way tubes 2 have opposite functions.

[0026] In the above-mentioned device that can be used for bonding silicon carbide seed crystals, the control motion component includes a servo motor, a rotating shaft, a one-way bearing 1, a gear 1, and a gear 2. The support platform is fixedly mounted with a servo motor, and the driving end of the servo motor is fixedly mounted with a rotating shaft. Two one-way bearings 1 are mounted on the rotating shaft, and the two one-way bearings 1 are self-locking in opposite directions. Gear 1 is mounted on the upper one-way bearing 1, and gear 2 is mounted on the lower one-way bearing 1.

[0027] The support seat is provided with a groove body 1 which matches with the gear 1, and the groove body 1 is connected with the annular groove, and the gear 1 is meshed with the gear ring 1;

[0028] The support seat is provided with a groove body 2 which matches with the gear 2, and the groove body 2 is communicated with the annular groove, and the gear 2 is meshed with the gear ring 2.

[0029] Compared with the prior art, the present invention has the following advantages:

[0030] 1: When needed, the airbag can be quickly inflated, and under the action of the precision pressure regulating valve, the pressure on the cover can be accurately regulated during the bonding process. At the same time, the extrusion force exerted by the airbag on the cover is more uniform, which effectively improves the bonding and pressing effect. The pneumatic triplet can be used to process the gas before it enters the airbag, effectively reducing the influence of factors such as impure gas on the subsequent uniform extrusion force.

[0031] 2: The heat generated by the heating seat can be used to apply the required drying temperature to the adhesive. At the same time, the straight-line distance between the heating seat and the center of the support seat can be adjusted as needed, which is more suitable for bonding needs. The heating seat can be rotated in the support seat when needed, which can make the temperature in the support seat rise faster and the temperature is quickly and evenly distributed, effectively improving the bonding efficiency. The movement and rotation of the heating seat can be completed using the heating seat as a power source. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 This is a schematic diagram of the structure of a device that can be used for bonding silicon carbide seed crystals proposed by the present invention;

[0033] Figure 2 for Figure 1 An enlarged schematic diagram of the structure of the middle support seat;

[0034] Figure 3 for Figure 1 Schematic diagram of the state when the middle cover is opened;

[0035] Figure 4 for Figure 3 A schematic diagram of the structure from another perspective;

[0036] Figure 5 for Figure 4 Another perspective and a schematic diagram of the structure after removing some supporting platforms;

[0037] Figure 6 for Figure 5 An enlarged schematic diagram of the structure of the middle support seat;

[0038] Figure 7 for Figure 6 A structural schematic diagram of the middle cover plate from another perspective;

[0039] Figure 8 for Figure 6 An enlarged structural diagram of the middle support seat and the servo motor from another perspective;

[0040] Fig. 9 for Figure 8 Schematic diagram of the structure after removing the support seat;

[0041] Fig.10 for Fig. 9 A schematic structural diagram of a part of the middle gear ring from another perspective;

[0042] Fig.11 for Fig.10 An enlarged schematic diagram of the structure after the two parts of the middle magnetic block are rotated by a certain angle;

[0043] Fig.12 for Fig.10An enlarged schematic diagram of the structure after the middle heating seat part is rotated to a certain angle;

[0044] Fig.13 for Figure 8 Schematic diagram of the structure after the middle support seat is rotated to a certain angle;

[0045] Fig.14 for Fig.13 Cross-sectional view after rotation at a certain angle;

[0046] Fig.15 for Fig.14 Schematic diagram of the enlarged structure of part A.

[0047] In the figure: 1. Support platform; 2. Support seat; 3. Cover plate; 4. Air control mounting plate; 5. Pneumatic triplex; 6. Air nozzle 1; 7. Air nozzle 2; 8. Precision pressure regulating valve; 9. Air nozzle 3; 10. Air nozzle 4; 11. Air nozzle 5; 12. Nitrogen support rod; 13. Handle; 14. Locking buckle; 15. Seed crystal; 16. Annular groove; 17. Servo motor; 18. Rotating shaft; 19. One-way bearing 1; 20. Gear Wheel 1; 21. Gear 2; 22. Sealing ring plate; 23. Mounting frame; 24. Reciprocating screw; 25. Moving block; 26. Connecting rod; 27. Heating seat; 28. Gear 3; 29. ​​Gear ring 1; 30. Gear ring 2; 31. Sealing rotary door; 32. Limiting ring; 33. Annular limiting groove; 34. Air cylinder; 35. One-way tube 1; 36. One-way tube 2; 37. Magnetic block 1; 38. Magnetic block 2; 39. Air bag. DETAILED DESCRIPTION

[0048] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0049] Reference Figure 1-Figure 15, a device that can be used for bonding silicon carbide seed crystals, including a support platform 1 and a seed crystal 15. The support platform 1 serves as a load-bearing and mounting platform for the equipment and is used to fix other parts of the equipment. It is composed of an adjustable support, a support plate, a profile, and a sheet metal door panel. The specific technology is prior art and will not be elaborated here. A support seat 2 is fixedly installed on the support platform 1. The support seat 2 is circular and has a placement groove, and the seed crystal 15 is placed in the placement groove. More specifically, during the specific operation, a graphite pad is first placed in the middle of the placement groove, and then the seed crystal 15 is placed on the graphite pad, and the surfaces of the two that are in contact are coated with the adhesive required for bonding before placement. At the same time, a cover plate 3 that matches the support seat 2 is installed on the support platform 1 through an opening and closing component; the opening or closing of the cover plate 3 is controlled by the opening and closing component. When the cover plate 3 is opened, it can be used for placing the graphite pad and the seed crystal 15 or taking them out after bonding. When the cover plate 3 is closed, it is used for bonding between the graphite pad and the seed crystal 15.

[0050] The opening and closing component includes a locking assembly, a driving assembly, a handle 13, a support seat, and a flip shaft rod. Two support seats are fixedly installed on the support platform 1, a flip shaft rod is rotatably installed between the two support seats, and the cover plate 3 is rotatably arranged with the flip shaft rod, and the handle 13 is fixedly installed on the cover plate 3; a driving assembly is installed between the cover plate 3 and the support platform 1; the driving assembly includes a nitrogen support seat 1, a nitrogen support rod 12, and a nitrogen support seat 2. Two nitrogen support seats 1 are fixedly installed on the support platform 1, and the two nitrogen support seats 1 are respectively located on both sides of the support seat 2, a nitrogen support rod 12 is rotatably installed on each of the two nitrogen support seats 1, and a nitrogen support seat 2 is rotatably installed on the upper end of the nitrogen support rod 12, and the nitrogen support seat 2 is fixedly arranged with the cover plate 3, and further, the nitrogen support seat 1 and the nitrogen support seat 2 are rotatably connected to the nitrogen support rod 12 and fixed by a retaining spring.

[0051] A locking assembly is installed between the cover plate 3 and the support seat 2, and the locking assembly includes a locking buckle 14 and a locking buckle block. A plurality of locking buckles 14 are installed on the cover plate 3, and a plurality of locking buckle blocks matching the locking buckle 14 are fixedly installed on the outside of the support seat 2. The arrangement of the locking assembly is convenient for forming a further fixing effect between the support seat 2 and the cover plate 3 when the cover plate 3 is closed. At the same time, after the cover plate 3 is closed, it forms a sealed environment for the support seat 2. Furthermore, a sealing annular groove body can be opened on the upper surface of the support seat 2, and a sealing rubber ring matching the sealing annular groove body is arranged on the inner wall of the cover plate 3. When the cover plate 3 is closed, the sealing rubber ring is sealed and clamped in the sealing annular groove body.

[0052] Reference Figure 1-Figure 15A self-adjusting clamping component matched with the seed crystal 15 is installed between the support platform 1 and the cover plate 3, an air bag 39 is installed on the inner wall of the cover plate 3, and the air bag 39 cooperates with the self-adjusting clamping component; the self-adjusting clamping component includes an air control mounting plate 4, a pneumatic triplet 5, an air nozzle 1 6, an air nozzle 2 7, a precision pressure regulating valve 8, an air nozzle 3 9, an air nozzle 4 10, and an air nozzle 5 11. An air control mounting plate 4 is fixedly installed in the support platform 1, and a pneumatic triplet 5 is fixedly installed on the air control mounting plate 4. The pneumatic triplet 5 includes an air nozzle 1 6, an air nozzle 2 7, and a precision pressure regulating valve 8, an air nozzle 3 9, an air nozzle 4 10, and an air nozzle 5 11. A precision pressure regulating valve 8 is installed, which includes an air nozzle three 9 and an air nozzle four 10. An air nozzle five 11 is fixedly connected to the cover plate 3, and the air nozzle five 11 is connected to the air bag 39; a pipe one is fixedly connected between the air nozzle two 7 and the air nozzle three 9, and a pipe two is fixedly installed between the air nozzle four 10 and the air nozzle five 11, and the pipe two is an elastic hose; the self-adjusting clamping component is arranged to inject gas into the air bag 39 during subsequent use, and keep the air bag 39 as a whole under the required pressure environment of precision, to ensure the clamping force provided by the air bag 39 on the seed crystal 15 after inflation.

[0053] Reference Figure 1-Figure 15 A control motion component matched with the support seat 2 is arranged on the support platform 1; the control motion component includes a servo motor 17, a rotating shaft 18, a one-way bearing 19, a gear 20, and a gear 21. The servo motor 17 is fixedly installed on the support platform 1, and the driving end of the servo motor 17 is fixedly installed with a rotating shaft 18. Two one-way bearings 19 are installed on the rotating shaft 18, and the self-locking directions of the two one-way bearings 19 are opposite. A gear 20 is installed on the upper one-way bearing 19, and a gear 21 is installed on the lower one-way bearing 19; by controlling the rotation direction of the rotating shaft 18, the gear 20 and the gear 2 21 can be rotated separately when needed.

[0054] Reference Figure 1-Figure 15 An annular groove 16 connected to the placement groove is provided in the support seat 2, and a sealing ring plate 22 is installed on the annular groove 16 through a sealing rotating component. The sealing rotating component includes a limit ring 32 and an annular limit groove 33. An annular limit groove 33 is provided on the top wall of the sealing ring plate 22. A limit ring 32 matching the annular limit groove 33 is fixedly installed on the upper end surface of the sealing ring plate 22, and the thickness of the limit ring 32 is less than the thickness of the sealing ring plate 22; a gear ring 2 30 is fixedly installed on the lower end of the sealing ring plate 22, and the gear ring 2 30 matches the control motion component. A groove body 2 matching the gear 2 21 is provided on the support seat 2, and the groove body 2 is connected to the annular groove 16, and the gear 2 21 is meshed with the gear ring 2 30.

[0055] A telescopic movable heating component is arranged in the sealing ring plate 22, and the telescopic movable heating component includes a mounting frame 23, a reciprocating screw 24, a moving block 25, a connecting rod 26, a heating seat 27, and a matching component. The mounting frame 23 is fixedly mounted on the outer wall of the sealing ring plate 22. Furthermore, the mounting frame 23 includes a rod body and a round block. A round block is fixedly mounted on the outer wall of the sealing ring plate 22 through a plurality of rod bodies, and one end of the reciprocating screw 24 is rotatably mounted on the round block; a reciprocating screw 24 is rotatably mounted on the mounting frame 23, and a moving block 25 is mounted on the reciprocating screw 24 through a nut, and a heating seat 27 is fixedly mounted on the moving block 25 through a connecting rod 26. The heating seat 27 includes a heating element and a mounting seat. At this time, the mounting seat is fixed to the connecting rod 26, and the heating element is a device with a heating function, which can generate heat when working. The specific selection can be made according to needs. When specifically set, a groove body can be opened on the mounting seat, and then the heating element is fixedly set in the groove body.

[0056] A matching component is installed between the reciprocating screw 24 and the support seat 2, and the matching component matches with the control motion component; the matching component includes a one-way bearing 2, a gear 3 28, and a gear ring 1 29. The reciprocating screw 24 is equipped with a gear 3 28 through the one-way bearing 2, an annular rotating groove is provided on the inner wall of the annular groove 16, a gear ring 1 29 is rotatably installed on the annular rotating groove, and the gear ring 1 29 is partially located in the annular groove 16, a groove body 1 that matches with the gear 1 20 is provided on the support seat 2, and the groove body 1 is connected to the annular groove 16, and the gear 1 20 is meshed with the gear ring 1 29. The gear ring 29 is provided with a limited rotation assembly between the gear ring 29 and the annular rotation groove; the limited rotation assembly includes a limit rod and a limit ring groove, and a limit ring groove is provided on the bottom wall and the top wall of the annular rotation groove; a plurality of limit rods matching the limit ring grooves are fixedly mounted on the gear ring 29, and the limit rods are slidably mounted in the corresponding limit ring grooves; a sealed rotary door 31 matching the telescopic movable heating component is sealed and rotatably mounted on the sealing ring plate 22, and a torsion spring is installed between the sealed rotary door 31 and the sealing ring plate 22, and the telescopic movable heating component matches the control motion component.

[0057] Reference Figure 1-Figure 15An auxiliary bonding component is installed between the sealing ring plate 22 and the support seat 2, and the telescopic movable heating component cooperates with the auxiliary bonding component; the auxiliary bonding component includes an air cylinder 34, a one-way tube 1 35, a one-way tube 2 36, a magnetic block 1 37, and a magnetic block 2 38. A plurality of air cylinders 34 are fixedly installed on the sealing ring plate 22, and each air cylinder 34 is fixedly connected to a one-way tube 1 35 and a one-way tube 2 36. A sealing disk is sealed and slidably installed in each air cylinder 34, and a round rod is fixedly installed on one side of the sealing disk. One end of the round rod slides through the corresponding air cylinder 34 and is fixedly installed with a magnetic block 1 37, and two adjacent magnetic blocks 1 37 are fixedly installed. 7 The magnetism on the same side is opposite. A plurality of mounting grooves are provided on the inner wall of the annular groove 16. A second magnetic block 38 is fixedly installed in each mounting groove, and the magnetism on the same side of two adjacent magnetic blocks 2 38 is opposite. The one-way tube 1 35 and the one-way tube 2 36 located on the same air cylinder 34 are used for one-way air intake and one-way air outlet respectively. The two adjacent one-way tubes 1 35 have opposite effects, and the two adjacent one-way tubes 2 36 have opposite effects. The purpose of the arrangement here is to make one of the two adjacent air cylinders 34 be used to suck the gas in the placement groove into the annular groove 16, and the other be used to transport the gas in the annular groove 16 to the support seat 2, so as to form the required air flow.

[0058] It is further explained that the above-mentioned fixed connection should be understood in a broad sense unless otherwise clearly specified and limited. For example, it can be welding, gluing, or one-piece molding, etc., which are conventional means well known to those skilled in the art.

[0059] In the present invention, the graphite pad and the seed crystal 15 are coated with the required adhesive and then placed on the support seat 2 in sequence. The cover plate 3 is closed by manually applying the required action to the handle 13, and the locking buckle 14 is buckled on the locking buckle block. Then, the external gas is sucked in, processed and adjusted, and then transported to the precision pressure regulating valve 8 through the air nozzle three 9, and then transported to the air bag 39 through the air nozzle four 10 and the air nozzle five 11. At this time, the air bag 39 is inflated and the air pressure in the air bag 39 is accurately regulated by the precision pressure regulating valve 8. When the air bag 39 is filled with gas, a uniform and stable extrusion force can be applied to the seed crystal 15, so that the seed crystal 15 can be better bonded.

[0060] Turn on the servo motor 17, the servo motor 17 drives the shaft 18 to rotate, and controls the forward and reverse rotation of the shaft 18 to drive the gear 1 20 or the gear 2 21 to rotate respectively;

[0061] When the gear 1 20 rotates, it can drive the gear ring 1 29 to rotate, and the gear ring 1 29 rotates to drive multiple gears 3 28 to rotate, and the gear 3 28 rotates to drive the one-way bearing 2 to rotate, and the one-way bearing 2 rotates to drive the reciprocating screw 24 to rotate, and the reciprocating screw 24 rotates to drive the moving block 25 to move. When the moving block 25 moves away from the direction of the gear 3 28, it will drive the heating seat 27 to move together, and apply a thrust to the sealing rotary door 31 during the movement, so that it rotates and opens, so that the heating seat 27 can be partially moved into the placement groove. At this time, the heating element in the heating seat 27 works to generate heat, which is used to better make the adhesive produce a bonding effect. When the use is over, the heating seat 27 can be controlled to reset, and the sealing rotary door 31 also returns to the closed state under the action of the torsion spring.

[0062] When gear 21 rotates, it can drive gear ring 2 30 to rotate, and the rotation of gear ring 2 30 drives the annular groove 16 to rotate. The rotation of annular groove 16 will first drive the air cylinder 34 to rotate. During the rotation of air cylinder 34, the magnetic block 2 38 corresponding to magnetic block 1 37 will be continuously changed, thereby producing a reciprocating movement effect, thereby achieving the required air extraction and exhaust, so that gas flow is generated in the support seat 2, which is convenient for better required bonding; the rotation of annular groove 16 will secondly drive the mounting frame 23 to move, and the movement of mounting frame 23 will drive the reciprocating screw 24, heating seat 27 and other structures to move together, thereby causing the position of heating seat 27 to change continuously, so that the heat in the support seat 2 can be quickly and evenly increased, thereby accelerating the bonding efficiency.

[0063] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A device for bonding silicon carbide seed crystals, comprising a support platform (1) and a seed crystal (15), characterized in that: A support seat (2) is fixedly mounted on the support platform (1), a placement groove is provided on the support seat (2), and a seed crystal (15) is placed in the placement groove, and a cover plate (3) matched with the support seat (2) is mounted on the support platform (1) via an opening and closing component; A self-adjusting pressing component matched with the seed crystal (15) is installed between the support platform (1) and the cover plate (3); The support platform (1) is provided with a control movement component that matches the support seat (2); The support seat (2) is provided with an annular groove (16) connected with the placement groove, a sealing ring plate (22) is installed on the annular groove (16) through a sealing rotating component, and a second gear ring (30) is fixedly installed on the lower end of the sealing ring plate (22), and the second gear ring (30) cooperates with the control movement component, a telescopic movable heating component is arranged in the sealing ring plate (22), and a sealing rotary door (31) cooperating with the telescopic movable heating component is sealed and rotatably installed on the sealing ring plate (22), and a torsion spring is installed between the sealing rotary door (31) and the sealing ring plate (22), and the telescopic movable heating component cooperates with the control movement component; An auxiliary bonding component is installed between the sealing ring plate (22) and the support seat (2), and the telescopic heating component cooperates with the auxiliary bonding component; An air bag (39) is installed on the inner wall of the cover plate (3), and the air bag (39) cooperates with the self-adjusting pressing component.

2. The device for bonding silicon carbide seed crystals according to claim 1, characterized in that: The opening and closing component comprises a locking assembly, a driving assembly, a handle (13), a support seat, and a flip shaft rod; two support seats are fixedly mounted on the support platform (1); a flip shaft rod is rotatably mounted between the two support seats; the cover plate (3) and the flip shaft rod are rotatably arranged; and the handle (13) is fixedly mounted on the cover plate (3); A driving assembly is installed between the cover plate (3) and the supporting platform (1); A locking assembly is installed between the cover plate (3) and the support seat (2).

3. The device for bonding silicon carbide seed crystals according to claim 2, characterized in that: The locking assembly comprises a locking buckle (14) and a locking buckle block; a plurality of locking buckles (14) are mounted on the cover plate (3); and a plurality of locking buckle blocks matching the locking buckles (14) are fixedly mounted on the outside of the support seat (2).

4. The device for bonding silicon carbide seed crystals according to claim 3, characterized in that: The driving assembly comprises a nitrogen support seat 1, a nitrogen support rod (12), and a nitrogen support seat 2. Two nitrogen support seats 1 are fixedly mounted on the support platform (1), and the two nitrogen support seats 1 are respectively located on both sides of the support seat (2). A nitrogen support rod (12) is rotatably mounted on each of the two nitrogen support seats 1, and a nitrogen support seat 2 is rotatably mounted on the upper end of each of the nitrogen support rods (12), and the nitrogen support seat 2 is fixedly arranged with the cover plate (3).

5. The device for bonding silicon carbide seed crystals according to claim 1, characterized in that: The self-adjusting clamping component comprises an air control mounting plate (4), a pneumatic triplet (5), an air nozzle 1 (6), an air nozzle 2 (7), a precision pressure regulating valve (8), an air nozzle 3 (9), an air nozzle 4 (10), and an air nozzle 5 (11); the air control mounting plate (4) is fixedly mounted in the support platform (1); the pneumatic triplet (5) is fixedly mounted on the air control mounting plate (4); the pneumatic triplet (5) comprises an air nozzle 1 (6) and an air nozzle 2 (7); the precision pressure regulating valve (8) is fixedly mounted on the support platform (1); the precision pressure regulating valve (8) comprises an air nozzle 3 (9) and an air nozzle 4 (10); the cover plate (3) is fixedly connected with an air nozzle 5 (11), and the air nozzle 5 (11) is connected to the air bag (39); A pipe 1 is fixedly connected between the air nozzle 2 (7) and the air nozzle 3 (9), and a pipe 2 is fixedly installed between the air nozzle 4 (10) and the air nozzle 5 (11), and the pipe 2 is an elastic hose.

6. The device for bonding silicon carbide seed crystals according to claim 1, characterized in that: The sealing rotating component comprises a limiting ring (32) and an annular limiting groove (33); an annular limiting groove (33) is provided on the top wall of the sealing ring plate (22); a limiting ring (32) matching with the annular limiting groove (33) is fixedly mounted on the upper end surface of the sealing ring plate (22); and the thickness of the limiting ring (32) is smaller than the thickness of the sealing ring plate (22).

7. The device for bonding silicon carbide seed crystals according to claim 1, characterized in that: The telescopic movable heating component comprises a mounting frame (23), a reciprocating screw (24), a moving block (25), a connecting rod (26), a heating seat (27), and a matching component. The mounting frame (23) is fixedly mounted on the outer wall of the sealing ring plate (22). The reciprocating screw (24) is rotatably mounted on the mounting frame (23). The reciprocating screw (24) is mounted with a moving block (25) via a nut. The moving block (25) is fixedly mounted with a heating seat (27) via a connecting rod (26). The heating seat (27) comprises a heating element. A matching component is installed between the reciprocating screw (24) and the support seat (2), and the matching component matches the control movement component. The mounting frame (23) comprises a rod body and a round block. A round block is fixedly mounted on the outer wall of the sealing ring plate (22) via a plurality of rod bodies, and one end of the reciprocating screw rod (24) is rotatably mounted on the round block.

8. The device for bonding silicon carbide seed crystals according to claim 7, characterized in that: The mating assembly comprises a one-way bearing 2, a gear 3 (28), and a gear ring 1 (29); the gear 3 (28) is mounted on the reciprocating screw (24) via the one-way bearing 2; an annular rotating groove is provided on the inner wall of the annular groove (16); a gear ring 1 (29) is rotatably mounted on the annular rotating groove, and a portion of the gear ring 1 (29) is located in the annular groove (16); a limited rotation assembly is provided between the gear ring 1 (29) and the annular rotating groove; The limit rotation assembly includes a limit rod and a limit ring groove. A limit ring groove is provided on the bottom wall and the top wall of the annular rotation groove. A plurality of limit rods matching the limit ring grooves are fixedly mounted on the gear ring (29), and the limit rods are slidably mounted in the corresponding limit ring grooves.

9. The device for bonding silicon carbide seed crystals according to claim 1, characterized in that: The auxiliary bonding component comprises an air cylinder (34), a one-way tube 1 (35), a one-way tube 2 (36), a magnetic block 1 (37), and a magnetic block 2 (38); a plurality of air cylinders (34) are fixedly mounted on the sealing ring plate (22); each of the air cylinders (34) is fixedly connected to a one-way tube 1 (35) and a one-way tube 2 (36); a sealing disk is sealingly and slidably mounted in each of the air cylinders (34); a round rod is fixedly mounted on one side of the sealing disk; one end of the round rod slides through the corresponding air cylinder (34) and is fixedly mounted with a magnetic block 1 (37); and two adjacent magnetic blocks 1 (37) have opposite magnetic properties on the same side; a plurality of mounting grooves are opened on the inner wall of the annular groove (16); a magnetic block 2 (38) is fixedly mounted in each of the mounting grooves; and two adjacent magnetic blocks 2 (38) have opposite magnetic properties on the same side; The one-way tube 1 (35) and the one-way tube 2 (36) located on the same air cylinder (34) are used for one-way air intake and one-way air outlet respectively. The two adjacent one-way tubes 1 (35) have opposite functions, and the two adjacent one-way tubes 2 (36) have opposite functions.

10. The device for bonding silicon carbide seed crystals according to claim 1, characterized in that: The control motion component comprises a servo motor (17), a rotating shaft (18), a one-way bearing 1 (19), a gear 1 (20), and a gear 2 (21); the servo motor (17) is fixedly mounted on the support platform (1); the driving end of the servo motor (17) is fixedly mounted with a rotating shaft (18); two one-way bearings 1 (19) are mounted on the rotating shaft (18); and the two one-way bearings 1 (19) are self-locking in opposite directions; the upper one-way bearing 1 (19) is mounted with a gear 1 (20); and the lower one-way bearing 1 (19) is mounted with a gear 2 (21); The support seat (2) is provided with a groove body 1 which matches with the gear 1 (20), and the groove body 1 is connected with the annular groove (16), and the gear 1 (20) is meshed with the gear ring 1 (29); The support seat (2) is provided with a groove body 2 which matches the gear 2 (21), and the groove body 2 is connected to the annular groove (16), and the gear 2 (21) is meshed with the gear ring 2 (30).

Images