Shock absorber and shock absorption system

Abstract

The present application relates to a shock absorber and a shock absorption system, belonging to the field of precision shock absorption technology. The shock absorber includes a base and a top plate that are relatively spaced apart, as well as a piston and a support member. A cavity is formed on the side of the base facing the top plate. The piston is connected to the base in the cavity in a manner that allows it to move along the depth direction of the cavity, and is sealed with the cavity to form a sealed cavity. The piston is connected to the top plate through the support member, thereby integrating a pneumatic component with a vertical shock absorption function in the shock absorber. Both the air cavity and the piston included in the pneumatic component are arranged at the bottom of the shock absorber, thus avoiding the occupation of the space between the base and the top plate in the shock absorber by the air cavity and the piston. Since the area of the region where the air cavity can be arranged on the shock absorber base is larger, the air cavity and the piston can be arranged inside the shock absorber base without increasing or slightly increasing the thickness of the base. Furthermore, the integration density of the device can be improved, and the space can be made compact, which is beneficial to the miniaturization and multi-functionality of the shock absorber.

Description

Technical Field

[0001] This application relates to the field of precision vibration damping technology, and particularly to a shock absorber and a vibration damping system. Background Art

[0002] With the continuous improvement of the accuracy of ultra-precision machining equipment and measuring instruments, the requirements for the vibration of their working environment tend to be micro-amplitude and low-frequency, thus putting more stringent requirements on the vibration damping performance of vibration damping tables. Traditional passive vibration isolation technology consists of a mass-spring-damper. Due to the inherent contradiction between its low-frequency vibration transmission rate and high-frequency vibration attenuation rate, it cannot meet the vibration damping requirements of ultra-precision equipment. Therefore, there is an urgent need for some new technologies and new methods to improve this situation.

[0003] Active vibration damping is an important technology to solve the above problems. An active vibration damping system is generally composed of a passive vibration isolation element and an active actuator combined, such as an active shock absorber with an air spring and a voice coil motor in parallel, an active shock absorber composed of vibration isolation rubber and piezoelectric ceramics, an active shock absorber combining an air spring and a pneumatic actuator, etc. Such active shock absorbers can all achieve the functions of low-frequency suppression and high-frequency isolation.

[0004] However, the device integration density in the above-mentioned active shock absorbers is low, which is not conducive to the miniaturization and multi-functionality of shock absorbers. Summary of the Invention

[0005] The purpose of this application is to provide a shock absorber and a vibration damping system to improve the integration density of devices in existing active shock absorbers, thereby facilitating the miniaturization and multi-functionality of shock absorbers.

[0006] An embodiment of this application provides a shock absorber, which includes: a base and a top plate that are relatively spaced apart, wherein a cavity is formed on the side of the base facing the top plate; a piston and a support member, wherein the piston is connected to the base in a manner that can move along the depth direction of the cavity in the cavity, and forms a sealed cavity with the cavity in a sealed manner, and the piston is connected to the top plate through the support member.

[0007] Wherein, the shock absorber further includes: a bearing plate, a motor assembly, and a motor fixing seat; wherein the bearing plate is arranged between the base and the top plate, and the bearing plate is relatively spaced apart from the top plate and connected to the base; the motor fixing seat is arranged between the bearing plate and the top plate and connected to the bearing plate; the motor assembly is arranged between the bearing plate and the top plate and includes a stator and a rotor, wherein one of the stator and the rotor is connected to the motor fixing seat, and the other is connected to the top plate.

[0008] Among them, the shock absorber further includes a motor fixing seat reinforcing plate, which is arranged between the bearing plate and the top plate and is connected to the bearing plate and the motor fixing seat; the shock absorber has a working state and a non-working state; and when the shock absorber is in the non-working state, the motor fixing seat reinforcing plate provides support for the top plate; when the shock absorber is in the working state, the top plate is separated from the motor fixing seat reinforcing plate.

[0009] Among them, the support member is a support rod, the support rod is arranged vertically, and a through hole is provided in the area of the bearing plate corresponding to the support rod. The top end of the support rod is connected to the top plate, and the bottom end of the support rod passes through the through hole and is connected to the piston; and the part of the support rod located in the through hole is spaced apart from the inner side wall of the through hole. The motor fixing seat is arranged around the support rod and is spaced apart from the support rod.

[0010] Among them, the top end of the motor fixing seat is opposite to the top end of the support rod; the shock absorber further includes: a damping member, which is connected between the top end of the motor fixing seat and the top end of the support rod and is arranged around the top end of the support rod.

[0011] Among them, the damping member is a rubber block, and the rubber block is adhesively bonded between the top end of the motor fixing seat and the top end of the support rod through glue.

[0012] Among them, the shock absorber further includes: an elastic member, one end of the elastic member in the horizontal direction is connected to the base, and the other end of the elastic member in the horizontal direction is connected to the piston.

[0013] Among them, the elastic member is located between the piston and the inner bottom wall surface of the sealed cavity in the sealed cavity.

[0014] Among them, the elastic member includes a plurality of leaf springs stacked vertically, and adjacent two leaf springs are separated by gaskets.

[0015] The embodiment of the present application also provides a shock absorption system, which includes the shock absorber of any one of the above.

[0016] The beneficial effects of the present application are as follows: The shock absorber and the shock absorption system provided by the present application, the shock absorber is applied to the shock absorption system, and includes a base and a top plate which are relatively spaced apart, and a piston and a support member. Wherein, a cavity is formed on one side of the base facing the top plate, the piston is connected to the base in the cavity in a manner that can move along the depth direction of the cavity, and is sealed with the cavity to form a sealed cavity, and the piston is connected to the top plate through the support member, thereby integrating a pneumatic component with vertical shock absorption function in the shock absorber, and both the air cavity and the piston included in the pneumatic component are arranged at the bottom of the shock absorber, thus avoiding the occupation of the space between the base and the top plate in the shock absorber by the air cavity and the piston, enabling more devices to be arranged in the space between the base and the top plate in the shock absorber, and because the area of the region where the air cavity can be arranged on the shock absorber base is larger, the air cavity and the piston can be arranged inside the shock absorber base without increasing or slightly increasing the thickness of the base, thereby improving the integration density of the devices in the shock absorber and making the space of the shock absorber compact, which is beneficial to the miniaturization and multi-functionality of the shock absorber. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The following will, by way of a detailed description of the specific embodiments of the present application in conjunction with the accompanying drawings, make the technical solutions and other beneficial effects of the present application obvious.

[0018] Figure 1 is a three-dimensional structural schematic diagram of the shock absorber provided by an embodiment of the present application;

[0019] Figure 2 is along Figure 1 The three-dimensional structural schematic diagram after sectioning along the line A-A' in

[0020] Figure 3 is along Figure 1 The sectional structural schematic diagram after sectioning along the line B-B' in

[0021] Figure 4 is a top view structural schematic diagram of the shock absorber provided by an embodiment of the present application after removing the top plate;

[0022] REFERENCE SIGNS:

[0023] 10 - Shock absorber; 11 - Base; 111 - Cavity; 111A - Sealed cavity; 12 - Top plate; 13 - Piston; 131 - Protrusion; 14 - Support member / Support rod; 15 - Bearing plate; 151 - First through hole; 16 - Motor fixing seat / Annular wall; 16A - Connecting plate; 161 / 162 - Semi - annular wall; 17 - First motor assembly; 171 - First stator; 172 - First rotor; 18 - Second motor assembly; 181 - Second stator; 182 - Second rotor; 19 - Motor fixing seat reinforcement plate; 20 - Damping member / Rubber block; 21 - Elastic member; 211 - Leaf spring; 212 - Spacer; 22 - Inner pressure ring for leaf spring; 221 - Connecting plate; 23 - First locking screw; 24 - Second locking screw; 25 - Lower pressure ring for leaf spring; 26 - Upper pressure ring for leaf spring; 27 - Third locking screw; 28 - Sealing end cover; 31 - Sealing film; 32 - Inner pressure ring for sealing film; 33 - Outer pressure ring for sealing film; 41 - Screw; 42 - Stop plate. Detailed implementation manner

[0024] In order to make the objectives, technical solutions and advantages of the present application clearer and more understandable, the following further details the present application in conjunction with the accompanying drawings and embodiments. Examples of the embodiments are shown in the drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions from beginning to end. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application and should not be construed as a limitation of the present application. In addition, it should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0025] In the following description, when the second component is connected to the first component, it may include embodiments where the second component is directly connected to the first component, and may also include embodiments where the second component is connected to the first component through an additional component, such that the second component is not directly connected to the first component.

[0026] In the following description, when the second component is connected with the first component, it may include embodiments where the second component is directly connected with the first component, and may also include embodiments where the second component is connected with the first component through an additional component, such that the second component is not directly connected with the first component.

[0027] When describing the structure of a component, when a layer or a region is referred to as being "on" or "above" another layer or another region, it may mean directly on top of the other layer or another region, or there may be other layers or regions between it and the other layer or another region. And if the component is flipped, this layer or this region will be "under" or "below" the other layer or another region. In addition, the features, structures or characteristics described below can be combined in any suitable manner in one or more embodiments.

[0028] In addition, the directional terms mentioned in the embodiments of the present application, such as [up], [down], [front], [back], [left], [right], [inside], [outside], [side], etc., are only referenced to the directions of the attached drawings. Therefore, the directional terms used are used to illustrate and understand the embodiments of the present application, rather than to limit the embodiments of the present application. In each of the accompanying drawings, units with similar structures are represented by the same figure numbers. For clarity, the various parts in the drawings are not drawn to scale. In addition, certain related parts may not be shown in the drawings.

[0029] The following is a detailed description with reference to specific embodiments. It should be noted that the serial numbers of the following embodiments are not intended to limit the preferred order of the embodiments.

[0030] See also Figures 1 to 3 , Figure 1 is a schematic diagram of the three-dimensional structure of the shock absorber provided in the embodiment of the present application, Figure 2 is along Figure 1 Schematic diagram of the three-dimensional structure after cutting along the line A-A' in FIG. Figure 3 is along Figure 1 The schematic diagram of the cross-sectional structure after the line B-B' is cut. Figures 1 to 3 As shown, the shock absorber 10 includes a base 11 and a top plate 12, a piston 13 and a support member 14 that are relatively spaced apart, wherein a cavity 111 is provided on a side of the base 11 facing the top plate 12, the piston 13 is connected to the base 11 in the cavity 111 in a manner that it can move along the depth direction of the cavity 111, and is sealed with the cavity 111 to form a sealed cavity 111A, and the piston 13 is connected to the top plate 12 through the support member 14, so that when the piston 13 moves along the depth direction of the cavity 111, it can drive the top plate 12 to move in a direction away from the base 11, or can drive the top plate 12 to move in a direction close to the base 11.

[0031] Specifically, the air pressure in the sealed cavity 111A can be adjustable, and the shock absorber 10 can have a working state and a non-working state. Moreover, when the shock absorber 10 is in the working state, the sealed cavity 111A is filled with gas, so that the piston 13 floats under the action of the air pressure in the sealed cavity 111A, so that the piston 13 drives the support member 14 to support the top plate 12 and the load on the top plate 12, so that the top plate 12 is in a suspended state, and because the pneumatic assembly composed of the sealed cavity 111A and the piston 13 has a small vertical stiffness, the pneumatic assembly can play a role in vertical vibration reduction for the top plate 12 when the top plate 12 is in a suspended state.

[0032] When the shock absorber 10 is in a non-operating state, the air pressure in the sealed cavity 111A is insufficient to cause the piston 13 to float. At this time, the piston 13 and the top plate 12 are both in a descending state and are supported by other device structures in the shock absorber 10 .

[0033] In some embodiments, as Figures 1 to 3 shown, the above-mentioned support member 14 may specifically be a support rod 14, and the support rod 14 is used for vibration damping in the horizontal upward direction, so as to enable the above-mentioned shock absorber 10 to have both a vertical vibration damping function and a horizontal upward vibration damping function.

[0034] Moreover, it should be noted that the vertical direction in the embodiments of the present application may refer to any direction perpendicular to the horizontal plane, and the horizontal direction in the embodiments of the present application may refer to any direction parallel to the horizontal plane. Specifically, the depth direction of the above-mentioned cavity 111 may be parallel to the vertical direction.

[0035] Specifically, as Figures 1 to 3 shown, the support rod 14 may be vertically arranged, and the opposite ends (i.e., the top end and the bottom end) of the support rod 14 may be respectively connected to the top plate 12 and the piston 13, so as to enable the piston 13 to be connected to the top plate 12 through the support rod 14, and make the bottom end of the support rod 14 fixed to the piston 13. Since the support rod 14 has a small horizontal stiffness, the top end of the support rod 14 can drive the top plate 12 to swing horizontally within a certain range when the top plate 12 is in a suspended state, so as to achieve the purpose of horizontal vibration damping of the top plate 12, thereby enabling the above-mentioned shock absorber 10 to have both a vertical vibration damping function and a horizontal upward vibration damping function.

[0036] Exemplarily, as Figure 2 and Figure 3 shown, the top end of the above-mentioned support rod 14 may be connected to the top plate 12 by a screw 41. Specifically, a groove may be formed in the middle area of the top end surface of the above-mentioned support rod 14, and the screw 41 may pass through the top plate 12 from the side of the top plate 12 facing away from the base 11 and then be fixedly connected to the groove formed in the top end surface of the above-mentioned support rod 14 through a thread.

[0037] In some examples, the above-mentioned support rod 14 may specifically be a flexible rod.

[0038] In other examples, the above-mentioned support rod 14 may be made of an elastic material, and it will undergo elastic deformation when subjected to a horizontal force, so as to achieve horizontal upward vibration damping of the top plate 12.

[0039] Moreover, it should be noted that, compared with the solution in the related art where the air chamber and the piston included in the pneumatic component of the shock absorber are arranged between the base and the top plate, in the embodiment of the present application, by arranging the air chamber (i.e., the sealed cavity 111A) and the piston 13 included in the pneumatic component of the shock absorber 10 inside the base 11 of the shock absorber 10, the occupation of the space between the base 11 and the top plate 12 inside the shock absorber 10 by the sealed cavity 111A and the piston 13 is avoided, so that more devices can be arranged in the space between the base 11 and the top plate 12 inside the shock absorber 10. And because the area of the region where the chamber 111 can be arranged on the base 11 of the shock absorber 10 is larger, the sealed cavity 111A and the piston 13 can be arranged inside the base 11 of the shock absorber 10 without increasing or slightly increasing the thickness of the base 11. Furthermore, the integration density of the devices inside the shock absorber 10 can be improved, and the space of the shock absorber 10 can be made compact, which is beneficial to the miniaturization and multifunctionality of the shock absorber 10.

[0040] In addition, in the embodiment of the present application, by arranging the air chamber (i.e., the sealed cavity 111A) and the piston 13 included in the pneumatic component of the shock absorber 10 inside the base 11 of the shock absorber 10, the sealed cavity 111A can have a larger internal space, the support rod 14 can have a longer length, and more motors can be arranged inside the shock absorber 10, so that a large output force can be achieved, and the shock absorption effect of the above shock absorber 10 can be effectively improved.

[0041] In some embodiments, as Figures 1 to 3 shown, in order to form the sealed cavity 111A by sealing the piston 13 and the cavity 111, the shock absorber 10 may further include a sealing film 31, an inner sealing film pressure ring 32, and an outer sealing film pressure ring 33. Among them, the sealing film 31 can be arranged on the side of the piston 13 and the base 11 facing the top plate 12, and cover the interval region between the inner side wall of the cavity 111 and the piston 13. The inner sealing film pressure ring 32 can be arranged on the side of the piston 13 facing the top plate 12, and seal and connect the part of the sealing film 31 directly above the piston 13 with the piston 13. The outer sealing film pressure ring 33 can be arranged on the side of the base 11 facing the top plate 12, and seal and connect the part of the sealing film 31 directly above the base 11 with the base 11, so as to realize the sealing of the above piston 13 and the cavity 111 through the sealing film 31 to form the sealed cavity 111A.

[0042] Among them, the sealing film 31 can be made of a flexible material to ensure that the piston 13 can move along the depth direction of the cavity 111 inside the cavity 111.

[0043] In some embodiments, as Figures 1 to 3As shown, the above-mentioned shock absorber 10 may further include a bearing plate 15, which is disposed between the base 11 and the top plate 12, and the bearing plate 15 is spaced apart from the top plate 12 and connected to the base 11. Specifically, the base 11 may include a middle region and an edge region surrounding the middle region, and the cavity 111 may be specifically disposed in the middle region of the base 11, and the bearing plate 15 may be connected to the edge region of the base 11 by screws. In this way, by providing the bearing plate 15 between the base 11 and the top plate 12, not only can the sealed cavity 111A in the base 11 be separated from the space between the base 11 and the top plate 12 through the bearing plate 15, but also the bearing plate 15 can be used to support other devices disposed between the base 11 and the top plate 12, thereby improving the structural stability of the above-mentioned shock absorber 10.

[0044] And, in specific implementation, as Figures 1 to 3 shown, a first through hole 151 may be formed in the area of the bearing plate 15 corresponding to the support rod 14, and one end (i.e., the top end) of the above-mentioned support rod 14 may be connected to the top plate 12, and the other end (i.e., the bottom end) of the above-mentioned support rod 14 may pass through the first through hole 151 and be connected to the piston 13. And, the part of the support rod 14 located in the first through hole 151 is spaced apart from the inner side wall of the first through hole 151 to ensure that the support rod 14 does not touch the inner side wall of the first through hole 151 during its horizontal swing, thereby ensuring the shock absorption effect of the support rod 14 in the horizontal upward direction.

[0045] In some embodiments, as Figures 1 to 4 shown, the above-mentioned shock absorber 10 may further include a motor fixing seat 16 and a first motor assembly 17. Among them, the motor fixing seat 16 is disposed between the base 11 and the top plate 12 and connected to the base 11. The first motor assembly 17 is disposed between the base 11 and the top plate 12 and includes a first stator 171 and a first mover 172. Among them, one of the first stator 171 and the first mover 172 is connected to the motor fixing seat 16, and the other is connected to the top plate 12, so as to realize locking the first stator 171 or the first mover 172 on the base 11 through the motor fixing seat 16. And, the first mover 172 may be configured to move relative to the first stator 171 in a first horizontal direction, where the first horizontal direction refers to a direction parallel to the horizontal plane. For example, specifically, it may be horizontal transverse or horizontal longitudinal, and the horizontal transverse and the horizontal longitudinal are perpendicular to each other.

[0046] Exemplarily, as Figures 1 to 4As shown, the first stator 171 included in the first motor assembly 17 can be connected to the motor fixing base 16. For example, specifically, it can be connected to the motor fixing base 16 through an adapter. The first rotor 172 included in the first motor assembly 17 can be connected to the top plate 12. For example, specifically, it can be connected to the top plate 12 through screws, so as to lock the first stator 171 included in the first motor assembly 17 to the base 11 through the motor fixing base 16.

[0047] Specifically, in the above embodiment where the shock absorber 10 further includes a bearing plate 15, as Figures 1 to 3 shown, the motor fixing base 16 can be specifically disposed between the bearing plate 15 and the top plate 12 and connected to the bearing plate 15. For example, it can be connected to the bearing plate 15 through screws, so as to connect the motor fixing base 16 to the base 11 through the bearing plate 15.

[0048] Specifically, in the above embodiment where the shock absorber 10 further includes a bearing plate 15, as Figures 1 to 4 shown, the shock absorber 10 may further include a second motor assembly 18. The second motor assembly 18 is disposed between the bearing plate 15 and the top plate 12 and includes a second stator 181 and a second rotor 182. Among them, one of the second stator 181 and the second rotor 182 is connected to the bearing plate 15, and the other is connected to the top plate 12. And the second rotor 182 can be configured to move relative to the second stator 181 in a second horizontal direction, where the second horizontal direction refers to a direction parallel to the horizontal plane and perpendicular to the first horizontal direction. For example, the second horizontal direction and the first horizontal direction can be specifically the horizontal transverse direction and the horizontal longitudinal direction respectively.

[0049] Exemplarily, as Figures 1 to 4 shown, the second stator 181 included in the second motor assembly 18 can be connected to the motor fixing base 16. For example, specifically, it can be connected to the bearing plate 15 through an adapter. The second rotor 182 included in the second motor assembly 18 can be connected to the top plate 12. For example, specifically, it can be connected to the top plate 12 through screws, so as to lock the second stator 181 included in the second motor assembly 18 to the base 11 through the bearing plate 15.

[0050] Moreover, in specific implementation, in the above shock absorber 10, the number of the first motor components 17 can be multiple, and the number of the second motor components 18 can also be multiple. Specifically, the multiple first motor components 17 can be divided into two groups, and the two groups of first motor components 17 can be respectively arranged in the edge regions on the opposite sides along the first direction of the space between the bearing plate 15 and the top plate 12 in the shock absorber 10. The multiple second motor components 18 can be divided into two groups, and the two groups of second motor components 18 can be respectively arranged in the edge regions on the opposite sides along the second direction of the space between the bearing plate 15 and the top plate 12 in the shock absorber 10. Wherein, the second direction is perpendicular to the first direction, and both are directions parallel to the horizontal plane.

[0051] It should be noted that in the above shock absorber 10, the number and the installation positions of the first motor components 17 and the second motor components 18 can be set according to actual requirements, and the present case does not limit this.

[0052] Exemplarily, as Figures 1 to 4 shown, in the above shock absorber 10, the number of the first motor components 17 can be four. The four first motor components 17 can be divided into two groups, and the two groups of first motor components 17 can be respectively arranged in the edge regions on the opposite sides along the first direction (for example, Figure 4 the left - right direction in ) of the space between the bearing plate 15 and the top plate 12 in the shock absorber 10. Wherein, each group of first motor components 17 can include two first motor components 17.

[0053] Exemplarily, as Figures 1 to 4 shown, in the above shock absorber 10, the number of the second motor components 18 can be specifically two. The two second motor components 18 can be respectively arranged in the edge regions on the opposite sides along the second direction (for example, Figure 4 the front - back direction in ) of the space between the bearing plate 15 and the top plate 12 in the shock absorber 10.

[0054] In some specific embodiments, as Figures 1 to 4 shown, the above motor fixing seat 16 can be arranged around the support rod 14 and spaced apart from the support rod 14 to ensure that the support rod 14 will not touch the motor fixing seat 16 during its horizontal swinging process, thereby ensuring the shock - absorbing effect of the support rod 14 in the horizontal direction.

[0055] Specifically, as Figures 1 to 3 shown, the top end of the above motor fixing seat 16 and the top end of the above support rod 14 can be opposite, and the shock absorber 10 can further include a damping member 20. The damping member 20 is connected between the top end of the motor fixing seat 16 and the top end of the support rod 14 and can be arranged around the top end of the support rod 14. And the damping member 20 can only provide damping, or can provide both damping and stiffness.

[0056] Moreover, in specific implementation, the damping member 20 can adopt a damping member with both a small vertical stiffness and a small horizontal stiffness to ensure that when the damping member 20 is horizontally stressed, the damping member 20 will undergo elastic deformation, and when the damping member 20 is vertically stressed, the damping member 20 will also undergo elastic deformation.

[0057] Exemplarily, the material of the damping member 20 can be an elastic material such as rubber. For example, the damping member 20 can specifically be a rubber block 20, and the rubber block 20 can provide damping and also provide damping.

[0058] Moreover, in specific implementation, the damping member 20 (or the rubber block 20) can be adhesively bonded between the top end of the motor fixing base 16 and the top end of the support rod 14 by glue and completely fill the gap between the top end of the motor fixing base 16 and the top end of the support rod 14.

[0059] In this way, by opposing the top end of the motor fixing base 16 to the top end of the support rod 14 and filling the damping member 20 in the gap between the top end of the motor fixing base 16 and the top end of the support rod 14 to increase damping, on the one hand, this can cause the vibration to decay rapidly, and on the other hand, it can also adjust the stiffness of the shock absorber 10 through the damping member 20, so that without changing other structural components, simply changing the material of the damping member 20 can obtain different stiffnesses within a certain range, thereby meeting the shock absorption requirements in different scenarios to a certain extent. For example, if the anti-impact requirement is high, the damping member 20 can be replaced with a material with a large stiffness, and vice versa. Therefore, the applicability of the shock absorber 10 is greatly improved.

[0060] Specifically, as Figure 4 shown, the motor fixing base 16 can be an annular wall 16 provided around the support member 14 (or the support rod 14) in a circle, and the annular wall 16 can specifically be formed by splicing two semi-annular walls 161 / 162.

[0061] Moreover, in specific implementation, as Figure 4 shown, the cross-section of the inner side wall of the annular wall 16 can be circular, and the cross-section of the outer side wall of the annular wall 16 can be square.

[0062] Exemplarily, as Figure 4 shown, the cross-section of the outer side wall of the annular wall 16 can be square, and square openings can be provided at the four corners of the outer side wall of the annular wall 16. And in the shock absorber 10, the number of the first motor assemblies 17 can specifically be four, and the first stators 171 of the four first motor assemblies 17 can be respectively installed on the inner wall surfaces of the square openings at the four corners of the outer side wall of the annular wall 16.

[0063] Exemplarily, as Figures 1 to 3 shown, a connecting plate 16A may be convexly provided along the transverse direction at the bottom end of the above-mentioned motor fixing base 16, and the connecting plate 16A may be fixedly connected to the above-mentioned bearing plate 15 by screws, so as to realize the fixed connection between the bottom end of the above-mentioned motor fixing base 16 and the bearing plate 15.

[0064] Exemplarily, as Figures 1 to 3 shown, the above-mentioned shock absorber 10 may further include a stop plate 42, the stop plate 42 is located between the above-mentioned top plate 12 and the above-mentioned motor fixing base 16, and is connected to the top end of the above-mentioned motor fixing base 16. For example, specifically, it may be connected to the top end of the above-mentioned motor fixing base 16 by screws. The stop plate 42 is arranged around the above-mentioned support rod 14 and is spaced apart from the above-mentioned support rod 14. Moreover, the spacing distance between the stop plate 42 and the above-mentioned support rod 14 may be smaller than the spacing distance between the top end of the above-mentioned motor fixing base 16 and the above-mentioned support rod 14. In this way, by replacing the stop plate 42, the maximum amplitude when the above-mentioned support rod 14 makes a horizontal swing can be controlled.

[0065] In some specific embodiments, as Figures 1 to 4 shown, the above-mentioned shock absorber 10 may further include a motor fixing base reinforcing plate 19, the motor fixing base reinforcing plate 19 is arranged between the bearing plate 15 and the top plate 12, and is connected to the bearing plate 15 and the motor fixing base 16, so as to increase the strength of the motor fixing base 16.

[0066] Specifically, the above-mentioned motor fixing base reinforcing plate 19 may further be configured to provide support for the top plate 12 when the shock absorber 10 is in a non-working state. During specific implementation, one end (i.e., the bottom end) of the above-mentioned motor fixing base reinforcing plate 19 along the vertical direction may be connected to the bearing plate 15, for example, it may be connected to the bearing plate 15 by screws, and the other end (i.e., the top end) of the above-mentioned motor fixing base reinforcing plate 19 along the vertical direction may be arranged towards the top plate 12. Moreover, when the shock absorber 10 is in a non-working state, the top plate 12 may be in contact with the top end of the above-mentioned motor fixing base reinforcing plate 19, so that the weight of the top plate 12 and the load above the top plate 12 is borne by the above-mentioned motor fixing base reinforcing plate 19; when the shock absorber 10 is in a working state, the top plate 12 may be separated from the top end of the above-mentioned motor fixing base reinforcing plate 19, so as to realize shock absorption of the top plate 12.

[0067] Moreover, in the above-mentioned embodiment where the above-mentioned motor fixing base 16 is an annular wall 16 formed by splicing two semi-circular walls 161 / 162, as Figures 1 to 4 shown, the above-mentioned motor fixing base reinforcing plate 19 may be connected to both of the two semi-circular walls 161 / 162, so as to lock the two semi-circular walls 161 / 162 together, thereby increasing the strength of the above-mentioned motor fixing base 16.

[0068] Exemplarily, as Figures 1 to 4 shown, in the above shock absorber 10, the number of the above motor fixing seats 16 can be two. The two motor fixing seats 16 can be respectively arranged at the joints on the opposite sides of the above annular wall 16, and each motor fixing seat 16 can connect the two semi-annular walls 161 / 162 at the corresponding joint together.

[0069] In the above embodiment, as Figures 1 to 3 shown, the above shock absorber 10 can further include an elastic member 21. The elastic member 21 is used to provide horizontal stiffness, and one end of the elastic member 21 in the horizontal direction can be connected to the base 11, and the other end of the elastic member 21 in the horizontal direction can be connected to the piston 13. Moreover, in specific implementation, the elastic member 21 can adopt an elastic member with small vertical stiffness and large horizontal stiffness, so that not only can the movement of the piston 13 in the horizontal direction be restricted by the elastic member 21, but also the piston 13 can move up and down vertically within a specific range, thus improving the impact resistance of the above shock absorber 10.

[0070] Specifically, as Figures 1 to 3 shown, the above elastic member 21 can be located between the piston 13 and the inner bottom wall surface of the sealed cavity 111A in the sealed cavity 111A. And one end of the elastic member 21 in the horizontal direction can be connected to the inner bottom wall surface of the sealed cavity 111A in the sealed cavity 111A, and the other end of the elastic member 21 in the horizontal direction can be connected to the piston 13 in the sealed cavity 111A.

[0071] In some embodiments, the above elastic member 21 can include a leaf spring 211. For example, specifically, it can be a leaf spring 211. The leaf spring 211 provides stiffness and does not provide damping. Specifically, the leaf spring 211 can be arranged parallel to the horizontal plane, and the shape of the leaf spring 211 can be strip-shaped or annular.

[0072] Exemplarily, the shape of the above leaf spring 211 can be specifically strip-shaped, and one end of the leaf spring 211 along its length direction can be connected to the base 11, and the other end of the leaf spring 211 along its length direction can be connected to the piston 13.

[0073] Exemplarily, the shape of the above leaf spring 211 can be specifically annular, and the outer end of the leaf spring 211 can be connected to the base 11, and the inner end of the leaf spring 211 can be connected to the piston 13.

[0074] In some specific embodiments, as Figures 1 to 3As shown, the elastic member 21 may include a plurality of leaf springs 211 stacked vertically, and two adjacent leaf springs 212 are separated by a gasket 212. In addition, in a specific implementation, during the use of the shock absorber 10, the number of leaf springs 211 included in the elastic member 21 may be adjusted according to actual needs to achieve the purpose of changing the stiffness.

[0075] Specifically, Figures 1 to 3 As shown, the elastic member 21 may be annular and include a plurality of annular leaf springs 211 stacked vertically, and two adjacent annular leaf springs 212 are separated by a gasket 212 .

[0076] And, in specific implementation, Figures 1 to 3 As shown, the piston 13 may have a first surface (i.e., an upper surface) facing the top plate 12 and a second surface (i.e., a lower surface) facing away from the top plate 12. Specifically, the piston 13 may further include a protrusion 131, which may be provided on the middle area of ​​the lower surface of the piston 13, and the inner end of the elastic member 21 may be located directly below the protrusion 131, so as to facilitate connecting the protrusion 131 of the piston 13 with the inner end of the elastic member 21.

[0077] For example, Figures 1 to 3 As shown, the shock absorber 10 may further include a leaf spring inner pressure ring 22 and a first locking screw 23. The leaf spring inner pressure ring 22 is located in the sealing cavity 111A. The elastic member 21 may be sleeved on the side wall of the leaf spring inner pressure ring 22. The end (i.e., the bottom end) of the leaf spring inner pressure ring 22 facing the inner bottom wall of the sealing cavity 111A may be laterally protruding and provided with a connecting plate 221. At least a portion of the connecting plate 221 is located between the inner end of the elastic member 21 and the inner bottom wall of the sealing cavity 111A. The first locking screw 23 may pass through the connecting plate 221 and the inner end of the elastic member 21 in sequence from the side of the connecting plate 221 away from the elastic member 21, and then be connected to the raised portion 131 of the piston 13 through a thread, thereby realizing the connection between the inner end of the elastic member 21 and the raised portion 131 of the piston 13.

[0078] Specifically, Figures 1 to 3 As shown, the shock absorber 10 may further include a second locking screw 24. The second locking screw 24 may pass through the middle region of the leaf spring inner pressure ring 22 and the middle region of the piston 13 in sequence from the side of the leaf spring inner pressure ring 22 away from the piston 13, and then be connected to the bottom end of the support member 14 (or the support rod 14) through a thread, thereby connecting the piston 13 to the support member 14 (or the support rod 14).

[0079] And, in specific implementation, Figures 1 to 3As shown, a window may be provided on the lower surface of the base 11 in an area corresponding to the inner bottom wall of the sealing cavity 111A, and the window is connected to the space in the sealing cavity 111A to expose the leaf spring inner pressure ring 22, the first locking screw 23 and the second locking screw 24 in the sealing cavity 111A, so as to facilitate the disassembly and assembly of the elastic member 21 in the sealing cavity 111A.

[0080] Specifically, Figures 1 to 3 As shown, the shock absorber 10 may further include a sealing end cover 28, and the sealing end cover 28 is used to cover the window opened on the lower surface of the base 11 to ensure the sealing performance of the sealing cavity 111A.

[0081] For example, Figures 1 to 3 As shown, the shock absorber 10 may further include a leaf spring lower pressure ring 25, a leaf spring upper pressure ring 26 and a third locking screw 27, wherein the leaf spring lower pressure ring 25 and the leaf spring upper pressure ring 26 are respectively on opposite sides of the elastic member 21 in the vertical direction in the sealing cavity 111A, and the leaf spring lower pressure ring 25 can be connected to the inner bottom wall of the sealing cavity 111A by screws, the outer end of the elastic member 21 can be clamped between the leaf spring lower pressure ring 25 and the leaf spring upper pressure ring 26, and the third locking screw 27 can pass through the leaf spring upper pressure ring 26 and the first end of the elastic member 21 in the horizontal direction from the side of the leaf spring upper pressure ring 26 away from the elastic member 21, and then be connected to the leaf spring lower pressure ring 25 through a thread, thereby realizing the connection of the outer end of the elastic member 21 with the inner bottom wall of the sealing cavity 111A.

[0082] In the above embodiment, the shock absorber 10 may further include a sensor assembly and a controller disposed between the base 11 (or the bearing plate 15) and the top plate 12. The sensor assembly is used to detect the movement of the top plate 12. The controller is used to: control the operation of the first motor assembly 17 and / or the second motor assembly 18 according to the detection result of the sensor assembly; and / or control the air intake or air outlet of the sealed cavity 111A according to the detection result of the sensor assembly. In this way, by controlling the output of the motor assembly and the air intake and outlet of the sealed cavity 111A, the vibration state of the top plate 12 can be changed, thereby achieving the vibration reduction effect of the shock absorber 10.

[0083] In the above embodiment, the vibration damper 10 can be used as a vibration damping platform for damping the vibration of precision equipment such as semiconductor equipment and / or precision machine tools.

[0084] As can be seen from the above, the shock absorber provided in this embodiment includes a base and a top plate, as well as a piston and a support member, which are relatively spaced apart. Among them, a cavity is formed on one side of the base facing the top plate. The piston is connected to the base in the cavity in a manner that allows it to move along the depth direction of the cavity, and is sealed with the cavity to form a sealed cavity. The piston is connected to the top plate through the support member, thus integrating a pneumatic component with vertical shock absorption function in the shock absorber. Moreover, both the air cavity and the piston included in this pneumatic component are arranged at the bottom of the shock absorber, thereby avoiding the occupation of the space between the base and the top plate in the shock absorber, enabling more devices to be arranged in the space between the base and the top plate in the shock absorber. And because the area of the region where the air cavity can be arranged on the shock absorber base is larger, the air cavity and the piston can be arranged inside the shock absorber base without increasing or slightly increasing the thickness of the base. Furthermore, the integration density of the devices in the shock absorber can be improved, and the space of the shock absorber can be made compact, which is conducive to the miniaturization and multifunction of the shock absorber.

[0085] The embodiment of the present application also provides a shock absorption system, which includes the shock absorber of any one of the above embodiments.

[0086] Specifically, in this shock absorption system, the shock absorber includes a base and a top plate, as well as a piston and a support member, which are relatively spaced apart. Among them, a cavity is formed on one side of the base facing the top plate. The piston is connected to the base in the cavity in a manner that allows it to move along the depth direction of the cavity, and is sealed with the cavity to form a sealed cavity. The piston is connected to the top plate through the support member.

[0087] Specifically, the shock absorption system may further include a load, and the load can be fixed above the top plate of the shock absorber, thereby realizing shock absorption for the load.

[0088] Exemplarily, the load can be a semiconductor device, a precision machine tool or other precision equipment.

[0089] In some embodiments, the number of shock absorbers included in the above shock absorption system can be multiple (for example, at least three), and the above shock absorption system may further include a workbench installed above the multiple shock absorbers. Thus, the height of the workbench at the positions of each shock absorber can be detected by a sensor, and based on the detection result of the sensor, the output of the motor in the shock absorber and / or the air intake and exhaust of the sealed cavity can be controlled to keep the workbench always in a horizontal state.

[0090] It should be noted that for the shock absorption system provided in the embodiment of the present application, due to the provision of the shock absorber provided in the embodiment of the present application, the beneficial effects achievable by any one of the shock absorbers provided in the embodiment of the present application can be realized. For details, please refer to the previous embodiments and will not be elaborated here.

[0091] The foregoing are only the preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application shall be included within the protection scope of the present application.

Claims

1. A shock absorber, characterized in that: include: A base and a top plate are arranged relatively spaced apart, wherein a cavity is formed on a side of the base facing the top plate; A piston and a support member, wherein the piston is connected to the base in the cavity in a manner that it can move along the depth direction of the cavity and is sealed with the cavity to form a sealed cavity, and the piston is connected to the top plate through the support member, and the support member is a support rod for horizontally reducing vibration of the top plate; A bearing plate, a motor fixing seat and a damping member; wherein the bearing plate is arranged between the base and the top plate, and the bearing plate and the top plate are arranged relatively spaced apart and connected to the base; the motor fixing seat is arranged between the bearing plate and the top plate, and connected to the bearing plate; Furthermore, the top and bottom ends of the support rod are connected to the top plate and the piston respectively; the motor fixing seat is arranged around the support rod and is spaced apart from the support rod; the top end of the motor fixing seat is opposite to the top end of the support rod, and the damping member is connected between the top end of the motor fixing seat and the top end of the support rod.

2. The shock absorber according to claim 1, characterized in that: The vibration absorber further comprises: A motor assembly is disposed between the bearing plate and the top plate, and comprises a stator and a mover, wherein one of the stator and the mover is connected to the motor fixing seat, and the other is connected to the top plate.

3. The shock absorber according to claim 1, characterized in that: The vibration absorber further comprises a motor fixing seat reinforcement plate, wherein the motor fixing seat reinforcement plate is arranged between the bearing plate and the top plate, and is connected to the bearing plate and the motor fixing seat; The shock absorber has a working state and a non-working state; Furthermore, when the shock absorber is in a non-working state, the motor fixing seat reinforcement plate provides support for the top plate; When the vibration absorber is in working state, the top plate is separated from the reinforcing plate of the motor fixing seat.

4. The shock absorber according to claim 1, characterized in that: The support rod is arranged vertically, and a through hole is opened in the area of ​​the supporting plate corresponding to the support rod, the top end of the support rod is connected to the top plate, and the bottom end of the support rod passes through the through hole and is connected to the piston; and the part of the support rod located in the through hole is separated from the inner side wall of the through hole.

5. The vibration absorber according to claim 1, characterized in that: The damping member is arranged around the top end portion of the support rod.

6. The shock absorber according to claim 1, characterized in that The damping member is a rubber block, and the rubber block is bonded between the top end of the motor fixing seat and the top end of the support rod by glue.

7. The vibration absorber according to claim 1, characterized in that: The vibration absorber further comprises: An elastic member, wherein one end of the elastic member along the horizontal direction is connected to the base, and the other end of the elastic member along the horizontal direction is connected to the piston.

8. The shock absorber according to claim 7, characterized in that The elastic member is located in the sealing cavity between the piston and the inner bottom wall surface of the sealing cavity.

9. The vibration absorber according to claim 7, characterized in that: The elastic member comprises a plurality of leaf springs stacked vertically, and two adjacent leaf springs are separated by a gasket.

10. A vibration reduction system, characterized in that: A vibration absorber comprising the vibration absorber according to any one of claims 1 to 9.

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