Packaging process for processing high-precision pressure sensor

Abstract

The invention discloses a packaging process for high-precision pressure sensor processing, and relates to the technical field of pressure sensor packaging, and the packaging process comprises an outer shell, a conveying and cleaning mechanism, a conveying and drying mechanism and a collecting device; the overall packaging process is comprehensive and reasonable in design, and the preparation work is comprehensive to guarantee the foundation; the chip cleaning and drying integrated equipment is high in integration, all parts cooperate to ensure that the chip is clean, a high-quality chip is provided for subsequent packaging, the process is simplified, efficiency is improved, and pollution is reduced; the chip mounting and bonding control parameters are accurate, the encapsulation measures are proper, and the stability is enhanced; curing post-treatment and aging screening are strictly controlled, and reliable performance of the sensor is ensured; the collecting device facilitates chip management, improves operation convenience and production efficiency, assists automatic large-scale production, and remarkably improves sensor packaging quality and performance through the whole process.

Description

Technical Field

[0001] The present invention relates to the technical field of pressure sensor packaging, and in particular to a packaging process for processing a high-precision pressure sensor. Background Art

[0002] In the field of modern science and technology, the application of high-precision pressure sensors is becoming more and more extensive, and the stability and reliability of their performance are crucial to the normal operation of many industries. With the continuous advancement of science and technology, higher requirements are placed on the accuracy, stability and reliability of pressure sensors. As a key link in the sensor production process, the packaging process directly affects the final performance of the sensor.

[0003] As the core component of the pressure sensor, the cleanliness of the chip surface plays a decisive role in the successful implementation of the subsequent packaging process and the performance of the sensor. In the process of chip manufacturing, transportation and storage, pollutants such as oil, dust, and impurities will inevitably be adsorbed. If these pollutants are not thoroughly removed, they will cause many problems in the chip mounting and bonding processes. For example, when the chip is mounted, pollutants will cause the adhesion between the chip and the packaging shell to deteriorate, affecting the stability of the electrical connection and thus reducing the accuracy of the sensor. During the bonding process, pollutants may hinder the good bonding of the bonding wire with the chip pins and the shell pins, resulting in a weak bonding point, which is prone to loosening or falling off, seriously affecting the reliability of the sensor, and even causing the sensor to fail during use.

[0004] The traditional chip cleaning and drying process is often carried out in steps, which is not only cumbersome to operate, but also increases the risk of the chip being contaminated again during the transfer process. In addition, the step-by-step process makes it difficult to achieve continuous and automated production, which reduces production efficiency and is not conducive to the large-scale production of high-precision pressure sensors. Moreover, the traditional process may not be able to completely remove tiny particle contaminants during the cleaning process, and it is difficult to ensure that the chip surface is completely dry and not affected by oxidation and other adverse effects during the drying process. These problems have restricted the further development of the pressure sensor packaging process. In order to solve these problems, the development of an efficient and integrated chip cleaning and drying process has become an urgent need in the field of high-precision pressure sensor packaging. Summary of the invention

[0005] The purpose of the present invention is to provide a packaging process for high-precision pressure sensor processing in order to solve the above problems, thereby solving the problems of poor packaging quality and low processing efficiency of existing pressure sensors.

[0006] In order to solve the above problems, the present invention provides a technical solution: a packaging process for high-precision pressure sensor processing, comprising the following steps:

[0007] A. Preparation:

[0008] a. Material preparation: prepare high-precision pressure sensor chips, metal or ceramic packaging shells, bonding wires, packaging glue and auxiliary materials;

[0009] b. Environmental preparation: Ensure operation in a dust-free clean room with constant temperature (20 - 25°C) and constant humidity (40% - 60%);

[0010] c. Equipment preparation: debug the placement machine, bonding machine, vacuum packaging machine, curing oven and other equipment;

[0011] B. Chip cleaning and pretreatment: Use cleaning and drying equipment to clean and dry the chips;

[0012] C. Chip mounting: Apply glue to the package shell and use a chip mounter to accurately mount the chip with an error of less than ±5μm;

[0013] D. Bonding: Use hot pressing or ultrasonic bonding process to connect the chip and the shell pins, and control the bonding parameters;

[0014] E. Potting and encapsulation: Fill the shell with glue to avoid bubbles, then seal the shell and evacuate it;

[0015] F. Curing and post-processing: Curing in a curing oven according to the characteristics of the glue, inspecting the appearance and preliminary testing of performance;

[0016] G. Aging and screening: Aging test simulates actual working conditions, and qualified products are screened out according to standards after aging;

[0017] The specific structure of the integrated cleaning and drying equipment in step B includes an outer shell, a conveying and cleaning mechanism, a conveying and drying mechanism and a collecting device; a conveying and cleaning mechanism is provided inside the right side of the outer shell; the conveying and drying mechanism is provided inside the upper left side of the outer shell, and the upper right side inlet of the conveying and drying mechanism is connected to the upper left side outlet of the conveying and cleaning mechanism; the collecting device is provided on the lower left side of the outer shell, and the upper right side of the collecting device is connected to the lower right side outlet of the conveying and drying mechanism.

[0018] Preferably, the specific structure of the conveying and cleaning mechanism includes a cleaning chamber, a guide wheel 1, a porous guide plate, a porous conveyor belt 1, a porous partition, an ultrasonic generator, a porous tube, a guide wheel 2, a flushing nozzle, a flushing pump, a filter housing, a conveying hole, a circulation pump, a discharge hole, a filter element, a filter element housing, a motor 1, a driving wheel 1, a conveying port and a feeding pipe; the cleaning chamber is arranged inside the right side of the outer shell, and a conveying port is opened on the upper left side of the cleaning chamber; the guide wheel 1 is movably connected to the upper center side of the right side of the cleaning chamber; the guide wheel 2 is movably connected to the cleaning chamber The center of the lower side; the driving wheel 1 is movably connected to the upper left side of the cleaning chamber, the rear center of the driving wheel 1 is fixedly connected to the output shaft of the motor 1, and the motor 1 is fixedly connected to the rear outside of the outer shell, and the driving wheel 1 is connected to the guide wheel 1 and the guide wheel 2 through the porous conveyor belt 1; the porous guide plate is fixedly connected to the inside of the cleaning chamber; the porous conveyor belt 1 is located on the inner side of the porous guide plate, and the outside of the porous conveyor belt 1 is evenly fixedly connected with a number of porous partitions; the lower outside of the feeding pipe is fixedly connected to the upper left opening of the cleaning chamber, The lower outlet of the feeding pipe is connected with the upper opening of the porous guide plate; there are two ultrasonic generators, which are respectively located on the inner and outer sides of the porous conveyor belt, and both of the ultrasonic generators are fixedly connected to the lower side of the cleaning chamber; the flushing nozzle is fixedly connected to the left inner side of the porous conveyor belt; the flushing pump is fixedly connected to the lower side of the cleaning chamber, and the outlet of the flushing pump is connected to the inlet of the flushing nozzle through a pipeline; the filter housing is fixedly connected to the center of the lower left side of the cleaning chamber, and a circulation pump is fixedly connected to the lower right side of the filter housing; the porous tube is fixedly connected to the bottom surface of the cleaning chamber, and the left opening of the porous tube is connected to the right inlet of the circulation pump; the delivery hole is opened inside the upper right side of the outer shell, and the lower opening of the delivery hole is connected to the upper outlet of the circulation pump; a plurality of discharge holes are opened on the lower side of the left inner side of the filter housing, and the discharge holes are connected to the inside of the cleaning chamber; the outer side of the filter element housing is fixedly connected to the inner side of the left side of the filter housing, and a plurality of filter elements are fixedly connected to the inner side of the filter element housing, and the upper openings of the filter elements are all connected to the upper outlet of the delivery hole.

[0019] Preferably, the motor 1 is a servo motor or a stepper motor.

[0020] Preferably, the cleaning liquid inside the cleaning chamber is anhydrous ethanol.

[0021] Preferably, the specific structure of the conveying and drying mechanism includes a drying chamber, a baffle, a driven wheel, a fixed seat, an output port, an exhaust box 1, an exhaust box 2, an air blowing head 2, a motor 2, a driving wheel 2, a porous conveyor belt 2, an air blowing head 1, a blower, an air supply pipe, an exhaust fan and an exhaust pipe; the drying chamber is arranged inside the upper left side of the outer shell, the right side of the drying chamber is movably connected with the driven wheel, the left side of the drying chamber is movably connected with the driving wheel 2, and the rear center of the driving wheel 2 is fixedly connected to the output shaft of the motor 2, and the motor 2 is fixedly connected to the outside of the outer shell, the upper and lower positions of the left side of the drying chamber are respectively fixedly connected with the air blowing head 1 and the exhaust box 2, and the lower side of the drying chamber is provided with an output port; The driving wheel 2 is connected to the driven wheel through the porous conveyor belt 2, and a number of baffles are evenly fixedly connected to the outside of the porous conveyor belt 2; the fixed seat is located on the inner side of the porous conveyor belt 2, and the fixed seat is fixedly connected to the center of the drying chamber, and the upper and lower sides of the fixed seat are respectively fixedly connected to the exhaust box 1 and the blowing head 2; the blower is fixedly connected to the upper side of the outer shell, and the blower outlet is connected to the inlet of the blowing head 1 and the blowing head 2 through a pipeline, and the blower outlet is connected to the air supply pipe; the exhaust fan is fixedly connected to the upper side of the outer shell, and the exhaust fan inlet is connected to the outlet of the exhaust box 1 and the exhaust box 2 through a pipeline, and the upper outlet of the exhaust fan is connected to the exhaust pipe.

[0022] Preferably, the second motor is a servo motor or a stepper motor.

[0023] Preferably, the gas inside the exhaust pipe is nitrogen.

[0024] Preferably, the specific structure of the collecting device includes a base, a motor three, a rotating seat, a motor four, a turntable, a slot, a tray and a collecting slot; the motor three is fixedly connected to the inside of the lower side of the base; the central outer part of the lower side of the rotating seat is movably connected to the inside of the upper side of the base, and the center of the lower side of the rotating seat is fixedly connected to the output shaft of the upper side of the motor three; there are several motors four, and several motors four are respectively fixedly connected to the four sides of the lower side of the rotating seat; there are several turntables, and the central outer parts of several lower sides of the turntables are respectively movably connected to the inside of the four sides of the upper side of the rotating seat, and the centers of several lower sides of the turntables are respectively fixedly connected to the corresponding centers of the upper sides of the motor three, and the upper sides of several turntables are provided with slots; there are several trays, and the outer parts of several trays are respectively located in the corresponding slots, and several collecting slots are opened around the top surfaces of several trays.

[0025] Preferably, the motor three and the motor four are both servo motors or stepper motors.

[0026] The beneficial effects of the present invention are as follows: (1) The overall packaging process design of the present invention is comprehensive and reasonable, covering preparation work, chip processing, various packaging steps and subsequent detection and screening, ensuring the high quality and stability of sensor packaging. The preparation work guarantees the basic conditions from multiple aspects such as materials, environment and equipment, laying the foundation for the smooth progress of subsequent processes; the integrated chip cleaning and drying equipment and the precise implementation of various packaging processes effectively improve the various performance indicators of the sensor and meet the application requirements of high precision and high reliability.

[0027] (2) The chip cleaning and drying integrated equipment of the present invention realizes the integration of cleaning and drying functions, simplifies the process flow, reduces the risk of contamination during chip transfer, and improves production efficiency. By precisely controlling the coordinated work of various components, such as motor-driven conveyor belt operation, ultrasonic and flushing combined with efficient cleaning, filter element filtration to achieve recycling of cleaning liquid, nitrogen drying and exhaust gas treatment, etc., it ensures that the chip surface is clean and not affected by oxidation, thereby providing high-quality chips for subsequent packaging processes.

[0028] (3) In the chip mounting process, the present invention strictly controls the mounting error to be less than ±5μm, ensures good electrical connection and mechanical stability between the chip and the housing, avoids affecting the sensor accuracy due to improper mounting, accurately controls the bonding parameters during bonding, ensures that the bonding points are firm and reliable, maintains the stability of the electrical connection, and takes effective measures during the potting and packaging process to avoid the generation of bubbles and achieve sealed vacuum, thereby enhancing the overall stability of the sensor.

[0029] (4) The curing and post-processing steps of the present invention are cured according to the characteristics of the glue, combined with appearance inspection and preliminary performance testing to timely discover and deal with potential problems. The aging and screening process simulates actual working conditions, strictly screens according to standards, and eliminates defective products, ensuring the high reliability, high precision and long-term stability of the final delivered sensor, so that it can accurately measure pressure signals in various complex working environments.

[0030] (5) The collecting device of the present invention controls the rotation of the rotating seat and the turntable by a motor, and can flexibly collect chips of different batches, which is convenient for subsequent processing, improves the operational convenience and chip management efficiency in the production process, and helps to realize the automation and large-scale production of the packaging process. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 This is a schematic diagram of the structure of the cleaning and drying equipment.

[0032] Figure 2 for Figure 1 sectional view of .

[0033] Figure 3 It is a structural diagram of the conveying and cleaning mechanism.

[0034] Figure 4It is a structural schematic diagram of the conveying and drying mechanism.

[0035] Figure 5 Schematic diagram of the structure of the collection device.

[0036] 1-outer shell; 2-conveying and cleaning mechanism; 3-conveying and drying mechanism; 4-collecting device; 21-cleaning chamber; 22-guide wheel 1; 23-porous guide plate; 24-porous conveyor belt 1; 25-porous partition; 26-ultrasonic generator; 27-porous tube; 28-guide wheel 2; 29-flushing nozzle; 210-flushing pump; 211-filter shell; 212-conveying hole; 213-circulating pump; 214-discharge hole; 215-filter element; 216-filter element shell; 217-motor 1; 218-driving wheel 1; 219-output port; 220-feeding pipe; 31-drying chamber; 32-baffle; 33-driven wheel; 34-fixed seat; 35-output port; 36-exhaust box one; 37-exhaust box two; 38-blowing head two; 39-motor two; 310-driving wheel two; 311-porous conveyor belt two; 312-blowing head one; 313-blower; 314-air supply pipe; 315-exhaust fan; 316-exhaust pipe; 41-base; 42-motor three; 43-rotating seat; 44-motor four; 45-turntable; 46-card slot; 47-tray; 48-collecting tank. DETAILED DESCRIPTION

[0037] like Figure 1 and Figure 2 As shown, this specific embodiment adopts the following technical solution: a packaging process for high-precision pressure sensor processing, comprising the following steps:

[0038] A. Preparation:

[0039] a. Material preparation: prepare high-precision pressure sensor chips, metal or ceramic packaging shells, bonding wires, packaging glue and auxiliary materials;

[0040] b. Environmental preparation: Ensure operation in a dust-free clean room with constant temperature (20 - 25°C) and constant humidity (40% - 60%);

[0041] c. Equipment preparation: debug the placement machine, bonding machine, vacuum packaging machine, curing oven and other equipment;

[0042] B. Chip cleaning and pretreatment: Use cleaning and drying equipment to clean and dry the chips;

[0043] C. Chip mounting: Apply glue to the package shell and use a chip mounter to accurately mount the chip with an error of less than ±5μm;

[0044] D. Bonding: Use hot pressing or ultrasonic bonding process to connect the chip and the shell pins, and control the bonding parameters;

[0045] E. Potting and encapsulation: Fill the shell with glue to avoid bubbles, then seal the shell and evacuate it;

[0046] F. Curing and post-processing: Curing in a curing oven according to the characteristics of the glue, inspecting the appearance and preliminary testing of performance;

[0047] G. Aging and screening: Aging test simulates actual working conditions, and qualified products are screened out according to standards after aging;

[0048] The specific structure of the integrated cleaning and drying equipment in step B includes an outer shell 1, a conveying and cleaning mechanism 2, a conveying and drying mechanism 3 and a collecting device 4; the conveying and cleaning mechanism 2 is provided inside the right side of the outer shell 1; the conveying and drying mechanism 3 is provided inside the upper left side of the outer shell 1, and the upper right side inlet of the conveying and drying mechanism 3 is connected to the upper left side outlet of the conveying and cleaning mechanism 2; the collecting device 4 is provided on the lower left side of the outer shell 1, and the upper right side of the collecting device 4 is connected to the lower right side outlet of the conveying and drying mechanism 3.

[0049] like Figure 3As shown, the specific structure of the conveying and cleaning mechanism 2 includes a cleaning chamber 21, a guide wheel 22, a porous guide plate 23, a porous conveyor belt 24, a porous partition 25, an ultrasonic generator 26, a porous tube 27, a guide wheel 28, a flushing nozzle 29, a flushing pump 210, a filter housing 211, a conveying hole 212, a circulation pump 213, a discharge hole 214, a filter element 215, a filter element housing 216, a motor 217, a driving wheel 218, a conveying port 219 and a feeding pipe 220; the cleaning chamber 21 is arranged inside the right side of the outer shell 1, and a conveying port 219 is opened on the upper left side of the cleaning chamber 21; the guide wheel 22 is movably connected to the upper center side of the right side of the cleaning chamber 21; The guide wheel 28 is movably connected to the center of the lower side of the cleaning chamber 21; the driving wheel 1 218 is movably connected to the upper left side of the cleaning chamber 21, the rear center of the driving wheel 1 218 is fixedly connected to the output shaft of the motor 1 217, and the motor 1 217 is fixedly connected to the rear outside of the outer shell 1, and the driving wheel 1 218 is connected to the guide wheel 1 22 and the guide wheel 2 28 through the porous conveyor belt 1 24; the porous guide plate 23 is fixedly connected to the inside of the cleaning chamber 21; the porous conveyor belt 1 24 is located on the inner side of the porous guide plate 23, and the outside of the porous conveyor belt 1 24 is evenly and fixedly connected with a plurality of porous partitions 25; the lower side of the feeding pipe 220 is fixedly connected to the cleaning chamber 21 At the upper left opening, the lower outlet of the feeding pipe 220 is connected to the upper opening of the porous guide plate 23; there are two ultrasonic generators 26, and the two ultrasonic generators 26 are respectively located on the inner and outer sides of the porous conveyor belt 24, and the two ultrasonic generators 26 are fixedly connected to the lower side of the cleaning chamber 21; the flushing nozzle 29 is fixedly connected to the left inner side of the porous conveyor belt 24; the flushing pump 210 is fixedly connected to the lower side of the cleaning chamber 21, and the outlet of the flushing pump 210 is connected to the inlet of the flushing nozzle 29 through a pipeline; the filter housing 211 is fixedly connected to the center of the lower left side of the cleaning chamber 21, and the lower right side of the filter housing 211 is fixedly connected to a circulation Pump 213; the porous tube 27 is fixedly connected to the bottom surface of the cleaning chamber 21, and the left opening of the porous tube 27 is connected to the right inlet of the circulation pump 213; the delivery hole 212 is opened inside the upper right side of the outer shell 1, and the lower opening of the delivery hole 212 is connected to the upper outlet of the circulation pump 213; a plurality of discharge holes 214 are opened on the lower side of the left inner side of the filter shell 211, and the discharge holes 214 are connected to the inside of the cleaning chamber 21; the outside of the filter element shell 216 is fixedly connected to the left inner side of the filter shell 211, and a plurality of filter elements 215 are fixedly connected to the inside of the filter element shell 216, and the upper openings of the filter elements 215 are all connected to the upper outlet of the delivery hole 212.

[0050] Wherein, the motor 1 217 is a servo motor or a stepper motor, so that it is convenient to control the motor 1 217 through existing automation technology; the cleaning liquid inside the cleaning chamber 21 is anhydrous ethanol.

[0051] like Figure 4 As shown, the specific structure of the conveying and drying mechanism 3 includes a drying chamber 31, a baffle 32, a driven wheel 33, a fixed seat 34, an output port 35, an exhaust box 1 36, an exhaust box 2 37, an air blowing head 2 38, a motor 2 39, a driving wheel 2 310, a porous conveyor belt 2 311, an air blowing head 1 312, a blower 313, an air supply pipe 314, an exhaust fan 315 and an exhaust pipe 316; the drying chamber 31 is arranged inside the upper left side of the outer shell 1, the right side of the drying chamber 31 is movably connected with the driven wheel 33, the left side of the drying chamber 31 is movably connected with the driving wheel 2 310, and the rear center of the driving wheel 2 310 is fixedly connected to the output shaft of the motor 2 39, and the motor 2 39 is fixedly connected to the outside of the outer shell 1, the upper and lower positions of the left side of the drying chamber 31 are respectively fixedly connected with the air blowing head 1 312 and the exhaust box 2 37, and the lower side of the drying chamber 31 is provided with an output port 3 5; the driving wheel 2 310 is connected to the driven wheel 33 through the porous conveyor belt 2 311, and a plurality of baffles 32 are evenly fixedly connected to the outside of the porous conveyor belt 2 311; the fixed seat 34 is located on the inner side of the porous conveyor belt 2 311, and the fixed seat 34 is fixedly connected to the center of the drying chamber 31, and the upper and lower sides of the fixed seat 34 are respectively fixedly connected to the exhaust box 1 36 and the blowing head 2 38; the blower 313 is fixedly connected to the upper side of the outer shell 1, and the outlet of the blower 313 is connected to the inlet of the blowing head 1 312 and the blowing head 2 38 through a pipeline, and the outlet of the blower 313 is connected to the air supply pipe 314; the exhaust fan 315 is fixedly connected to the upper side of the outer shell 1, and the inlet of the exhaust fan 315 is connected to the outlet of the exhaust box 1 36 and the exhaust box 2 37 through a pipeline, and the upper outlet of the exhaust fan 315 is connected to the exhaust pipe 316.

[0052] Wherein, the second motor 39 is a servo motor or a stepper motor, so that the second motor 39 can be easily controlled by existing automation technology; the gas inside the exhaust pipe 316 is nitrogen.

[0053] like Figure 5As shown, the specific structure of the collecting device 4 includes a base 41, a motor three 42, a rotating base 43, a motor four 44, a turntable 45, a slot 46, a tray 47 and a collecting slot 48; the motor three 42 is fixedly connected to the inside of the lower side of the base 41; the central outer portion of the lower side of the rotating base 43 is movably connected to the inner portion of the upper side of the base 41, and the lower center of the rotating base 43 is fixedly connected to the upper output shaft of the motor three 42; there are several motors 44, and several motors 44 are respectively fixedly connected to the lower side of the rotating base 43 around; there are several turntables 45, and the central outer portions of the lower sides of several turntables 45 are respectively movably connected to the inner portions around the upper side of the rotating base 43, and the lower centers of several turntables 45 are respectively fixedly connected to the corresponding upper centers of the motor three 42, and the upper inner portions of several turntables 45 are provided with slots 46; there are several trays 47, and the outer portions of several trays 47 are respectively located in the corresponding slots 46, and several collecting slots 48 are opened around the top surfaces of several trays 47.

[0054] Among them, the motor three 42 and the motor four 44 are both servo motors or stepper motors, so it is convenient to control the motor three 42 and the motor four 44 through existing automation technology.

[0055] The use state of the present invention is as follows: during packaging, first of all, the preparation work covers the preparation of materials, environment and equipment. In terms of materials, the chip, shell, bonding wire, glue and auxiliary materials must be prepared; the environment needs to maintain a constant temperature (20-25°C), constant humidity (40%-60%) and dust-free; the equipment must be debugged, such as the mounter and bonding machine, and the chip cleaning and pretreatment are completed with a cleaning and drying integrated device. After that, the packaging shell is coated with glue and the chip is accurately mounted with a mounter, with an error of less than ±5μm. Then, a hot pressing or ultrasonic bonding process is used to connect the chip and the shell pins, and the bonding parameters are strictly controlled. Then, glue is poured into the shell to avoid the generation of bubbles, and then the shell is sealed and vacuumed. Then, it is cured in a curing furnace according to the glue characteristics, the appearance is checked and the performance is preliminarily tested, and finally, an aging test is performed to simulate the actual working conditions. Qualified products are screened out according to the standards to ensure the high precision, high reliability and stability of the sensor to meet the application requirements. When the chip is processed by the integrated cleaning and drying equipment, first, the high-precision pressure sensor chip to be cleaned and dried is added to the cleaning chamber 21 through the feeding pipe 220. At this time, the motor 217 (which can be a servo motor or a stepper motor) is in a stopped state, the porous conveyor belt 24 is stationary, the cleaning chamber 21 is pre-filled with anhydrous ethanol as a cleaning liquid, the two ultrasonic generators 26 are in a closed state, the flushing pump 210 is not started, the circulating pump 213 stops working, the filter element 215 is in a standby state, the filter element housing 216 and the filter housing 211 are normal, the discharge hole 214 is closed, and the chip cleaning process is set according to the program The motor 217 is started to drive the driving wheel 218 to rotate, thereby starting the porous conveyor belt 24. The porous partition 25 evenly fixed on the porous conveyor belt 24 moves with the conveyor belt. The chip is separated by the porous partition 25 and moves to the upper right along the inner side of the porous guide plate 23 with the conveyor belt. When the chip enters the cleaning liquid, the two ultrasonic generators 26 are started. The ultrasonic waves emitted by the ultrasonic generators 26 propagate in the anhydrous ethanol cleaning liquid, so that the oil, dust, impurities and other pollutants on the chip surface are separated from the chip surface due to the cavitation effect of the ultrasonic wave. At the same time, the flushing pump 210 is started to spray the cleaning liquid from the flushing nozzle 29 to flush the chip, further removing the pollutants on the chip surface. The flushed cleaning liquid falls into the cleaning chamber 2 with the pollutants. 1, is drawn by the circulation pump 213 through the porous pipe 27, and then enters the filter element housing 216 through the delivery hole 212. After being filtered by the filter element 215, the clean cleaning liquid returns to the cleaning chamber 21 to realize the recycling of the cleaning liquid. During the cleaning process, the guide wheel 1 22 and the guide wheel 28 play the role of auxiliary support and guidance of the porous conveyor belt 1 24 to ensure the smooth operation of the conveyor belt. When the chip moves to the delivery port 219 on the upper left side of the cleaning chamber 21 with the porous conveyor belt 1 24, the chip falls into the right entrance of the drying chamber 31 under the push of the porous partition 25. When the chip enters the drying chamber 31, the motor 2 39 (which can be a servo motor or a stepping motor) is started to drive the driving wheel 2 310 to rotate, so that the porous conveyor belt 2 311 starts to operate.The baffle 32 on the porous conveyor belt 2 311 moves with the conveyor belt, pushing the chip to move to the left. At the same time, the blower 313 is started to transport nitrogen to the blowing head 1 312 and the blowing head 2 38 through the air supply pipe 314. The blowing head 1 312 and the blowing head 2 38 blow air to the chip to dry it. The exhaust box 1 36 and the blowing head 2 38 on the upper and lower sides of the fixed seat 34 are respectively located above and below the chip, which helps to improve the drying efficiency. The dried chip continues to move under the push of the baffle 32. The moisture generated during the drying process is extracted by the exhaust fan 315 through the exhaust box 1 36 and the exhaust box 2 37, and then discharged through the exhaust pipe 316. The gas in the exhaust pipe 316 is nitrogen, which can prevent The chips are oxidized during the drying process. When the chips move to the output port 35 at the lower side of the drying chamber 31 along the porous conveyor belt 2 311, the chips fall into the collection slot 48 on the tray 47 of the collection device 4. At this time, the motor 3 42 (which can be a servo motor or a stepper motor) and the motor 4 44 (which can be a servo motor or a stepper motor) can control the rotation of the rotating seat 43 and the turntable 45 as needed, so as to collect different batches of chips on the trays 47 at different positions, which is convenient for subsequent processing. When a tray 47 is full of chips, the motor 3 42 can drive the rotating seat 43 to rotate and rotate the empty tray 47 to the output port 35 to continue collecting chips. In addition, it is also convenient to take out the tray 47 after collecting full chips.

[0056] The control method in the present invention is to start manually or control through existing automation technology. The wiring diagram of the power element and the provision of power supply are common knowledge in the field, and the present invention is mainly used to protect mechanical devices, so the present invention will no longer explain the control method and wiring layout in detail.

[0057] In the description of the invention, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inside", "front", "center", "both ends" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the invention.

[0058] In the invention, unless otherwise clearly stipulated and limited, the terms such as "installation", "setting", "connection", "fixation", "screw-on" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, ordinary technicians in this field can understand the specific meanings of the above terms in the invention according to the specific circumstances.

[0059] The above shows and describes the basic principles, main features and advantages of the invention. Those skilled in the art should understand that the invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the invention. Without departing from the spirit and scope of the invention, the invention may have various changes and improvements, which shall fall within the scope of the invention to be protected. The scope of protection of the invention shall be defined by the attached claims and their equivalents.

Claims

1. A packaging process for high-precision pressure sensor processing, characterized in that: The following steps are involved: A. Preparation: a. Material preparation: prepare high-precision pressure sensor chips, metal or ceramic packaging shells, bonding wires, packaging glue and auxiliary materials; b. Environmental preparation: Ensure operation in a dust-free clean room with constant temperature (20 - 25°C) and constant humidity (40% - 60%); c. Equipment preparation: debug the placement machine, bonding machine, vacuum packaging machine, curing oven and other equipment; B. Chip cleaning and pretreatment: Use cleaning and drying equipment to clean and dry the chips; C. Chip mounting: Apply glue to the package shell and use a chip mounter to accurately mount the chip with an error of less than ±5μm; D. Bonding: Use hot pressing or ultrasonic bonding process to connect the chip and the shell pins, and control the bonding parameters; E. Potting and encapsulation: Fill the shell with glue to avoid bubbles, then seal the shell and evacuate it; F. Curing and post-processing: Curing in a curing oven according to the characteristics of the glue, inspecting the appearance and preliminary testing of performance; G. Aging and screening: Aging test simulates actual working conditions, and qualified products are screened out according to standards after aging; The specific structure of the integrated cleaning and drying equipment in step B comprises an outer shell (1), a conveying and cleaning mechanism (2), a conveying and drying mechanism (3) and a collecting device (4); A conveying and cleaning mechanism (2) is provided inside the right side of the outer shell (1); The conveying and drying mechanism (3) is arranged inside the upper left side of the outer shell (1), and the upper right side inlet of the conveying and drying mechanism (3) is connected to the upper left side outlet of the conveying and cleaning mechanism (2); The collecting device (4) is arranged on the lower left side of the outer shell (1), and the upper right side of the collecting device (4) is connected to the lower right outlet of the conveying and drying mechanism (3).

2. The packaging process for high-precision pressure sensor processing according to claim 1, characterized in that: The specific structure of the conveying and cleaning mechanism (2) includes a cleaning chamber (21), a guide wheel (22), a porous guide plate (23), a porous conveyor belt (24), a porous partition (25), an ultrasonic generator (26), a porous tube (27), a guide wheel (28), a flushing nozzle (29), a flushing pump (210), a filter housing (211), a conveying hole (212), a circulation pump (213), a discharge hole (214), a filter element (215), a filter element housing (216), a motor (217), a driving wheel (218), a conveying port (219) and a feeding pipe (220); The cleaning chamber (21) is arranged inside the right side of the outer shell (1), and a delivery port (219) is opened on the upper left side of the cleaning chamber (21); The guide wheel 1 (22) is movably connected to the upper center of the right side of the cleaning chamber (21); The second guide wheel (28) is movably connected to the center of the lower side of the cleaning chamber (21); The driving wheel 1 (218) is movably connected to the upper left side of the cleaning chamber (21), the rear center of the driving wheel 1 (218) is fixedly connected to the output shaft of the motor 1 (217), and the motor 1 (217) is fixedly connected to the rear exterior of the outer shell (1), and the driving wheel 1 (218) is connected to the guide wheel 1 (22) and the guide wheel 2 (28) through the porous conveyor belt 1 (24); The porous guide plate (23) is fixedly connected inside the cleaning chamber (21); The porous conveyor belt 1 (24) is located inside the porous guide plate (23), and a plurality of porous partitions (25) are evenly and fixedly connected to the outside of the porous conveyor belt 1 (24); The lower exterior of the feeding pipe (220) is fixedly connected to the upper left opening of the cleaning chamber (21), and the lower outlet of the feeding pipe (220) is in communication with the upper opening of the porous guide plate (23); There are two ultrasonic generators (26), and the two ultrasonic generators (26) are respectively located on the inner and outer sides of the porous conveyor belt (24), and the two ultrasonic generators (26) are fixedly connected to the lower side of the cleaning chamber (21); The flushing nozzle (29) is fixedly connected to the left side of the inner side of the porous conveyor belt (24); The flushing pump (210) is fixedly connected to the lower side of the cleaning chamber (21), and the outlet of the flushing pump (210) is connected to the inlet of the flushing nozzle (29) via a pipeline; The filter housing (211) is fixedly connected to the center of the lower left side of the cleaning chamber (21), and a circulation pump (213) is fixedly connected to the interior of the lower right side of the filter housing (211); The porous tube (27) is fixedly connected to the bottom surface of the cleaning chamber (21), and the left opening of the porous tube (27) is connected to the right inlet of the circulation pump (213); The delivery hole (212) is opened inside the upper right side of the outer shell (1), and the lower opening of the delivery hole (212) is connected to the upper outlet of the circulation pump (213); A plurality of discharge holes (214) are provided on the lower inner side of the left side of the filter housing (211), and the discharge holes (214) are connected to the interior of the cleaning chamber (21); The outside of the filter element housing (216) is fixedly connected to the inside of the left side of the filter housing (211), and a plurality of filter elements (215) are fixedly connected to the inside of the filter element housing (216), and the upper openings of the filter elements (215) are all connected to the upper outlet of the delivery hole (212).

3. The packaging process for high-precision pressure sensor processing according to claim 2, characterized in that: The motor 1 (217) is a servo motor or a stepper motor.

4. The packaging process for high-precision pressure sensor processing according to claim 2, characterized in that: The cleaning liquid inside the cleaning chamber (21) is anhydrous ethanol.

5. The packaging process for high-precision pressure sensor processing according to claim 1, characterized in that: The specific structure of the conveying and drying mechanism (3) includes a drying chamber (31), a baffle (32), a driven wheel (33), a fixing seat (34), an output port (35), an exhaust box 1 (36), an exhaust box 2 (37), an air blowing head 2 (38), a motor 2 (39), a driving wheel 2 (310), a porous conveyor belt 2 (311), an air blowing head 1 (312), a blower (313), an air supply pipe (314), an exhaust fan (315) and an exhaust pipe (316); The drying chamber (31) is arranged inside the upper left side of the outer shell (1); the right side of the drying chamber (31) is movably connected to a driven wheel (33); the left side of the drying chamber (31) is movably connected to a second driving wheel (310); the rear center of the second driving wheel (310) is fixedly connected to the output shaft of a second motor (39); and the second motor (39) is fixedly connected to the outside of the outer shell (1); the upper and lower positions of the left side of the drying chamber (31) are respectively fixedly connected to a first blowing head (312) and a second exhaust box (37); and an output port (35) is provided at the lower side of the drying chamber (31); The second driving wheel (310) is connected to the driven wheel (33) via a second porous conveyor belt (311), and a plurality of baffles (32) are evenly and fixedly connected to the outside of the second porous conveyor belt (311); The fixing seat (34) is located inside the second porous conveyor belt (311), the fixing seat (34) is fixedly connected to the center of the drying chamber (31), and the upper and lower sides of the fixing seat (34) are respectively fixedly connected to the first exhaust box (36) and the second blowing head (38); The blower (313) is fixedly connected to the upper side of the outer shell (1); the outlet of the blower (313) is connected to the inlets of the first blowing head (312) and the second blowing head (38) through a pipeline; and the outlet of the blower (313) is connected to the air supply pipe (314); The exhaust fan (315) is fixedly connected to the upper side of the outer shell (1); the inlet of the exhaust fan (315) is connected to the outlets of exhaust box one (36) and exhaust box two (37) via a pipeline; and the upper outlet of the exhaust fan (315) is connected to the exhaust pipe (316).

6. The packaging process for processing a high-precision pressure sensor according to claim 5, characterized in that: The second motor (39) is a servo motor or a stepper motor.

7. The packaging process for high-precision pressure sensor processing according to claim 5, characterized in that: The gas inside the exhaust pipe (316) is nitrogen.

8. The packaging process for high-precision pressure sensor processing according to claim 1, characterized in that: The specific structure of the collecting device (4) comprises a base (41), a third motor (42), a rotating base (43), a fourth motor (44), a rotating disk (45), a card slot (46), a tray (47) and a collecting slot (48); A motor three (42) is fixedly connected inside the lower side of the base (41); The central outer portion of the lower side of the rotating seat (43) is movably connected to the inner portion of the upper side of the base (41), and the lower center of the rotating seat (43) is fixedly connected to the upper output shaft of the motor three (42); There are a plurality of motors four (44), and the plurality of motors four (44) are respectively fixedly connected to the four sides of the lower side of the rotating seat (43); There are a plurality of rotating disks (45), the central outer portions of the lower portions of the rotating disks (45) are movably connected to the inner portions of the upper portions of the rotating seat (43), the lower centers of the rotating disks (45) are fixedly connected to the upper centers of the corresponding motors (42), and the upper portions of the rotating disks (45) are provided with slots (46); There are a plurality of trays (47), the exteriors of the plurality of trays (47) are respectively located within the corresponding card slots (46), and a plurality of collecting slots (48) are provided around the top surfaces of the plurality of trays (47).

9. The packaging process for processing a high-precision pressure sensor according to claim 8, characterized in that: The motor three (42) and the motor four (44) are both servo motors or stepper motors.

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