Electrostatic chuck machining device

Abstract

The invention relates to the technical field of electrostatic chuck equipment, and provides an electrostatic chuck processing device which comprises an upper layer unit, a middle layer unit and a lower layer unit which are concentrically connected with one another from top to bottom, and the upper layer unit comprises a first disc body and a second disc body which are matched on a horizontal plane to form a wavy gap which is communicated end to end; protruding sliding rails which are further close to the circle center of the first disc body and are arranged at intervals are further arranged on the gap to form a fixed sliding way, the lower layer unit comprises a base with inner teeth, a base ring groove is further formed in the base, and a fluctuating part is arranged in the base ring groove. The upper layer unit is used for controlling the motion trail of the cut-in unit on the upper layer unit, the middle layer unit controls the cut-in unit to slide horizontally, and the lower layer unit controls the cut-in unit to slide up and down, so that the cut-in unit is embedded into the gap between the electrostatic chucks, and the gap between the electrostatic chucks is expanded after lifting.

Description

Technical Field

[0001] The invention relates to the technical field of electrostatic chuck equipment, and in particular to an electrostatic chuck processing device. Background Art

[0002] The electrostatic chuck is a precision handling tool widely used in the electronics, semiconductor, liquid crystal display and other industries. It consists of an upper electrode and a lower electrode, located between the upper and lower electrodes. It uses the principle of static electricity to generate an electrostatic field to adsorb and carry light and thin workpieces such as sheets and lenses. In the long-term use process, there will be problems such as electrode damage, insulation material damage, and pollution accumulation, which need to be disassembled for cleaning or replacement. For this reason, we propose an electrostatic chuck processing device. Summary of the invention

[0003] 1. Technical issues to be solved

[0004] In view of the deficiencies of the prior art, the present invention provides an electrostatic chuck processing device, which overcomes the deficiencies of the prior art, has a reasonable design, a compact structure, and solves the problems raised in the background technology.

[0005] (II) Technical solution

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions:

[0007] An electrostatic chuck processing device, characterized in that: it comprises an upper unit, a middle unit, and a lower unit which are concentrically connected to each other from top to bottom, the upper unit comprises a first plate body and a second plate body which cooperate to form a wavy first-connected gap on a horizontal plane, the gap is further provided with a convex slide rail which is further close to the center of the first plate body and is arranged at intervals to form a fixed slideway, the lower unit comprises a base with internal teeth, the base of the base is further provided with a base ring groove, and an undulating portion is provided in the base ring groove;

[0008] It also includes a rotating unit and a cutting unit. The rotating unit is embedded in the inner wall of the middle unit and rotates on its inner wall. The cutting unit connected to the rotating unit cooperates with the gap and the undulating part. The cutting knife on the cutting unit is fixed along the slideway and abuts against the gap of the electrostatic suction cup. The cutting unit drives the base to rotate and lift it so that the electrostatic suction cup can be unfolded and disassembled.

[0009] Preferably, the cutting unit includes a cutting knife, a sliding rod, and a gear connected in sequence. The sliding rod corresponds to the gap so that the cutting unit slides along the gap. The gear engages with the internal teeth of the base to drive the base to rotate. The cutting knife extends to the second disk body and is inclined to correspond to the electrostatic suction cup.

[0010] Preferably, the bottom of the sliding rod is also connected to a limiting block that is slidably matched with the strip groove.

[0011] Preferably, one end of the cutting blade is a sharp edge to facilitate insertion into the gap between the electrostatic chucks, and the other end has a wide edge to expand the gap between the electrostatic chucks.

[0012] Preferably, a plurality of through holes are provided along the cutting knife, and the cutting knife allows the dielectric liquid in the electrostatic chuck to slide out from the through holes, thereby preventing the dielectric liquid from remaining on the cutting knife when the electrostatic chuck is disassembled by the cutting knife, causing the dielectric liquid to flow out of the cutting knife.

[0013] Preferably, the rotating unit comprises a central ring body and an extension plate. The extension plate is arranged on the central ring body and is provided with a strip groove for accommodating the sliding and lifting of the cutting unit.

[0014] Preferably, an arc-shaped flange is provided on the extension plate, and a groove is provided on the inner wall of the middle unit, and the arc-shaped flange and the groove correspond to form an embedded fit.

[0015] Preferably, a rotating drum is also sleeved on the central ring body, and the rotating drum extends downward from the bottom of the lower unit and sleeves on the external teeth, and the external teeth are driven by a motor to rotate the rotating unit.

[0016] (III) Beneficial effects

[0017] The embodiment of the present invention provides an electrostatic chuck processing device, which has the following beneficial effects:

[0018] The upper unit is set to control the movement trajectory of the cutting unit on it, the middle unit controls the horizontal sliding of the cutting unit, and the lower unit controls the up and down sliding of the cutting unit to achieve embedding into the gap between the electrostatic suction cups. After lifting, the gap between the electrostatic suction cups is expanded. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the structure of the present invention;

[0020] Figure 2 It is a specific schematic diagram of the structure of the present invention;

[0021] Figure 3 For the present invention Figure 2 Bottom schematic diagram of ;

[0022] Figure 4 For the present invention Figure 2 Explosion diagram of

[0023] Figure 5 The bottom schematic diagram of the layer unit and the rotating unit in the structure of the present invention;

[0024] Figure 6 is a schematic diagram of a rotating unit of the present invention;

[0025] Figure 7 is a schematic diagram of the cut-in unit of the present invention;

[0026] Figure 8 Schematic diagram of the lower unit of the present invention.

[0027] In the figure: 1. upper unit; 11. first disk body; 12. second disk body; 13. gap; 14. fixed rod; 2. middle unit; 3. rotating unit; 31. central ring body; 32. extension plate; 33. strip groove; 34. rotating drum; 35. external teeth; 4. cutting unit; 41. cutting knife; 42. sliding rod; 43. gear; 44. limit block; 45. through hole; 46. sharp edge; 47. wide edge; 5. lower unit; 51. base; 52. base ring groove; 53. undulating part. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] See attached Figure 1-8The present invention provides an electrostatic suction cup processing device, comprising an upper unit (1) connected concentrically from top to bottom to provide an operating platform for placing an electrostatic suction cup to be processed, a middle unit (2) for connecting the upper and lower layers, transmitting power and positioning, and a lower unit (5) as a basic support to fix the entire device. The lower unit (5) is connected to the housing of the device through a bearing. The lower unit (5) comprises a base (51) with internal teeth, and a base ring groove (52) is also provided on the base of the base (51). An undulating portion (53) is provided in the base ring groove (52). The undulating portion (53) provides support for the lifting of the cutting unit (4). The upper unit (1) comprises a first disk body (11) and a second disk body (12) that cooperate on a horizontal plane to form a wavy first connected gap (13), and the gap (13) is further provided with a gap (13) close to the second disk body. A disc (11) has protruding slide rails arranged at intervals at the center of the disc (11) to form a fixed slideway. The fixed slideway can allow the cutting unit (4) to slide along a fixed orientation. Specifically, the cutting knife (41) is abutted and matched with the gap of the electrostatic suction cup along the fixed slideway to facilitate the cutting knife 41 to enter the gap of the suction cup. The gear (43) fixedly connected to the bottom of the cutting knife (41) is meshed with the internal gear of the driving base (51). The driving base (51) rotates to lift it so that the electrostatic suction cup is unfolded and disassembled. When in use, the electrostatic suction cup is fixed on the second disc (12). The bottom of the second disc (12) is also connected to a fixing rod (14). The fixing rod (14) passes downward through the middle unit (2) and the lower unit (5) and fixes them inside the box body of the entire device. The first disc (11) is connected to the box body of the entire device through a connecting block. The first disc (11) and the second disc (12) are maintained on the same horizontal plane.

[0030] The rotating unit (3) is embedded in the inner wall of the middle unit (2) and rotates on the inner wall thereof; the cutting unit (4) connected to the rotating unit (3) cooperates with the gap (13) and the undulating portion (53); the cutting unit (4) is inserted into the gap (13) and contacts with the undulating portion (53) to achieve precise positioning, which is convenient for subsequent processing operations; the cutting knife (41) on the cutting unit (4) abuts against the gap of the electrostatic suction cup along the fixed slideway; the cutting unit (4) drives the base (51) to rotate and lift it, thereby allowing the electrostatic suction cup to be unfolded and disassembled; the base (51) is rotated by gear meshing, and the undulating portion (53) on the base (51) lifts the cutting unit (4), which is convenient for disassembling the electrostatic suction cup.

[0031] In this embodiment, the cutting unit (4) includes a cutting knife (41), a sliding rod (42), and a gear (43) connected in sequence. The sliding rod (42) corresponds to the gap (13) so that the cutting unit (4) slides along the gap (13). Since the gear (43) is fixed on (42) and meshes with the internal teeth of the base (51), it can push the base (51) to rotate, thereby holding the undulating portion (53) against the sliding rod (42). The cutting knife (41) extends to the second disk body (12) and is inclined to correspond to the electrostatic suction cup.

[0032] In this embodiment, the bottom of the sliding rod (42) is also connected to a limit block (44) that slides with the strip groove (33) to prevent the entire cutting unit (4) from rotating in the strip groove (33), thereby better controlling the docking and disassembly of the cutting unit (4) and the electrostatic suction cup.

[0033] In this embodiment, one end of the cutting knife (41) is a sharp edge (46) for easy insertion into the gap between the electrostatic suction cups, and the wide edge (47) at the other end can expand the gap between the electrostatic suction cups. The wide edge (47) is used to expand the gap, and the undulating portion (53) is used to lift the cutting knife (41) to completely disassemble the electrostatic suction cups.

[0034] In this embodiment, a plurality of through holes (45) are provided along the cutting blade (41), and the cutting blade (41) causes the dielectric liquid in the electrostatic chuck to slide out from the through holes (45), thereby preventing the dielectric liquid from remaining on the cutting blade (41) when the electrostatic chuck is disassembled by the cutting blade (41), causing the dielectric liquid to flow out of the cutting blade (41), preventing the dielectric liquid from remaining on the cutting blade (41) during the processing, and preventing the dielectric liquid from overflowing from the electrostatic chuck.

[0035] In this embodiment, the rotating unit (3) includes a central ring body (31) and an extension plate (32). The extension plate (32) is arranged around the central ring body (31) and is provided with a strip groove (33) for accommodating the sliding and lifting of the cutting unit (4). The extension plate (32) is provided with an arc-shaped flange, and the inner wall of the middle unit (2) is provided with a groove. The arc-shaped flange and the groove correspond to form an embedded fit to provide a stable rotating platform. The central ring body (31) is also sleeved with a rotating drum (34). The rotating drum (34) extends downward from the bottom of the lower unit (5) and is sleeved with external teeth (35). The external teeth (35) are driven by a motor to rotate the rotating unit (3).

[0036] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0037] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An electrostatic chuck processing device, characterized in that: It comprises an upper unit (1), a middle unit (2), and a lower unit (5) which are concentrically connected to each other from top to bottom; The upper unit (1) comprises a first disk body (11) and a second disk body (12) which cooperate to form a wave-shaped first-connected gap (13) on a horizontal plane, and the gap (13) is further provided with raised slide rails which are further close to the center of the first disk body (11) and are arranged at intervals to form a fixed slideway; The lower unit (5) comprises a base (51) having internal teeth, a base ring groove (52) is further provided on the base of the base (51), and an undulating portion (53) is provided in the base ring groove (52); It also comprises a rotating unit (3) and a cutting unit (4); the rotating unit (3) is embedded in the inner wall of the middle layer unit (2) and rotates on the inner wall; the cutting unit (4) connected to the rotating unit (3) cooperates with the gap (13) and the undulating portion (53); the cutting knife (41) on the cutting unit (4) cooperates with the gap of the electrostatic suction cup along the fixed slideway; the cutting unit (4) drives the base (51) to rotate and lift it, thereby allowing the electrostatic suction cup to be unfolded and disassembled.

2. An electrostatic chuck processing device as claimed in claim 1, characterized in that: The cutting unit (4) comprises a cutting knife (41), a sliding rod (42), and a gear (43) which are connected in sequence. The sliding rod (42) corresponds to the gap (13) so that the cutting unit (4) slides along the gap (13). The gear (43) meshes with the inner teeth of the base (51) to drive the base (51) to rotate. The cutting knife (41) extends to the second disk body (12) and is inclined to correspond to the electrostatic suction cup.

3. An electrostatic chuck processing device as claimed in claim 1, characterized in that: The bottom of the sliding rod (42) is also connected to a limiting block (44) which is slidably matched with the strip groove (33).

4. The electrostatic chuck processing device according to claim 1, characterized in that: One end of the cutting blade (41) is a sharp edge (46) for easy insertion into the gap between the electrostatic chucks, and the other end has a wide edge (47) for expanding the gap between the electrostatic chucks.

5. The electrostatic chuck processing device according to claim 1, characterized in that: A plurality of through holes (45) are provided along the cutting blade (41), and the cutting blade (41) causes the dielectric liquid in the electrostatic chuck to slide out from the through holes (45), thereby preventing the dielectric liquid from remaining on the cutting blade (41) when the electrostatic chuck is disassembled by the cutting blade (41), thereby preventing the dielectric liquid from flowing out from the cutting blade (41).

6. The electrostatic chuck processing device according to claim 1, characterized in that: The rotating unit (3) comprises a central ring body (31) and an extension plate (32). The extension plate (32) is arranged around the central ring body (31) and is provided with a strip groove (33) for accommodating the sliding and lifting of the cutting unit (4).

7. An electrostatic chuck processing device as claimed in claim 6, characterized in that: The extension plate (32) is provided with an arc-shaped flange, and the inner wall of the middle layer unit (2) is provided with a groove, and the arc-shaped flange and the groove correspond to form an embedded fit.

8. An electrostatic chuck processing device as claimed in claim 6, characterized in that: The central ring body (31) is also sleeved with a rotating drum (34), which extends downward from the bottom of the lower unit (5) and sleeves with external teeth (35), and the external teeth (35) are driven by a motor to rotate the rotating unit (3).

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