Track power supply processing device and control method based on AMHS control system

Abstract

This invention relates to the field of semiconductor equipment technology, and provides a track power supply processing device and control method based on an AMHS control system. The device includes a processing unit body, comprising a vehicle body and a grinding unit. The vehicle body is mounted on a travel track and drives the grinding unit to move along the track. The grinding unit is located within the vehicle body cavity and is perpendicular to the travel track. The processing end of the grinding unit extends out from the top of the vehicle body and connects to a charging contact. An energy storage device is electrically connected to the vehicle body and the grinding unit to discharge power. Simultaneously, the processing unit body can be connected to the AMHS system to obtain the optimal target path. This achieves the processing of abnormal charging stations without affecting the overall operational efficiency of the AMHS system, increasing the charging efficiency at the charging stations and solving the problem of decreased charging efficiency in the track power supply system within the AMHS system.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and in particular to a track power supply processing device under an AMHS control system. Background Technology

[0002] The Semiconductor Wafer Clean Automated Handling System (AMHS) enables centralized management and route planning for its cluster-controlled automated material handling vehicles. It can quickly and accurately transport clean wafers to their destination, significantly improving efficiency, reducing time, increasing capacity, and enhancing stability. It is a key control system for handling equipment that meets the miniaturization requirements of semiconductors and the precision processing requirements of liquid crystal displays.

[0003] More specifically, in semiconductor wafer fabrication and manufacturing plants, FOUPs (foil cassettes, material storage boxes used to hold wafers) are primarily moved between storage racks and process equipment, and between different pieces of process equipment, using automated material handling vehicles (AGVs) controlled by an AMHS (Advanced Materials Handling System) cluster. Figure 1 (As shown).

[0004] However, although fully automated overhead crane track systems are mature technology and are currently standard equipment in semiconductor wafer fabs, traditional overhead track transport systems also have serious and insurmountable drawbacks, as follows:

[0005] Because some automated material handling vehicles (AWDVs) in factories still rely on their own onboard batteries for power, these batteries need to be recharged after a period of operation. To avoid prolonged downtime for charging, charging stations are often installed along the WADV's operating path. These stations are located at frequent stops where the WADVs stop. When the WADV stops at these stations, the charging port on the WADV extends out of the vehicle body and connects with the charging port on the track to establish an electrical connection. Power is then drawn from the track's power supply to recharge the WADV's onboard batteries (e.g., ...). Figure 2 (As shown). Each time the automated material handling vehicle (AWDV) connects to the power supply interface on the track, a momentary electrical spark is generated, breaking down the air and striking the power supply interface on the track. Over time, the oxide layer at the power supply interface thickens, increasing the charging resistance and severely reducing the charging efficiency of the AWDV. This necessitates manual intervention to replace or grind the power supply interface. However, these interfaces are often located in the ceiling of the factory, making the handling process both difficult and dangerous.

[0006] Therefore, how to safely and effectively maintain the track power supply system in the AMHS control system has become a problem that needs to be solved. Summary of the Invention

[0007] The purpose of this invention is to provide a track power supply processing device and control method based on the AMHS control system, so as to solve the technical problems in the prior art that the increased electrical connection resistance caused by the thickening of the oxide layer at the track power supply interface reduces the charging efficiency of the automatic material handling vehicle, and that when manual intervention is required to replace or grind the charging interface, the operation is difficult and dangerous.

[0008] In a first aspect, embodiments of the present invention provide a track power supply processing device based on an AMHS control system, comprising:

[0009] A track system comprising a travel track parallel to the ground and a track mounting unit, wherein the travel track is suspended below the factory ceiling via the track mounting unit;

[0010] A charging station is set above the running track. The charging station includes a power supply line connected to a power source, and the other end of the power supply line is connected to a charging contact.

[0011] Its characteristics are:

[0012] It also includes a processing device body, which includes a vehicle body and a grinding part. The vehicle body is disposed on the travel track and is used to drive the grinding part to move along the travel track.

[0013] The grinding part is located inside the vehicle body and is arranged perpendicular to the travel track. The processing end of the grinding part extends out of the top of the vehicle body and connects with the charging contact.

[0014] An energy storage device is electrically connected to the vehicle body and the grinding section to discharge and supply power.

[0015] A charging control unit is installed inside the vehicle body, and the top of the charging control unit extends movably out of the top of the vehicle body. The charging unit includes an electric push rod fixed in the inner cavity and a charging terminal. The charging terminal is located at the top of the movable end of the electric push rod, and is driven by the electric push rod to approach the charging contact, and abuts against the charging contact to establish an electrical connection to charge the energy storage device.

[0016] The communication unit is installed inside the vehicle body and is connected to the AMHS system control center to establish a data transmission network channel.

[0017] The main control unit and the controlled unit are used to receive command information from the communication unit and control the electrical groups of the vehicle body and the grinding unit.

[0018] Furthermore, the polishing unit includes a mounting base and a polishing drive motor. The mounting base is detachably mounted on the bottom of the inner cavity of the vehicle body. A polishing roller is rotatably mounted on the mounting base via a rotating shaft, and the top of the polishing roller extends beyond the top of the vehicle body. A drive pulley is mounted on one side of the rotating shaft, and the polishing drive motor drives the rotating shaft and the polishing roller to rotate via a transmission belt and the drive pulley. A recessed splash guard is provided at the bottom of the mounting base, and the protective face of the splash guard is located on the polishing surface of the polishing roller. An impurity port is opened at the bottom of the splash guard. Impurities polished away by the rotating polishing roller are constrained by the splash guard and collect at the impurity port. A purification unit is installed at the impurity port to collect and treat the impurities.

[0019] Furthermore, the grinding section also includes an adaptive component for the height of the grinding roller, at least one pair of the adaptive components are respectively disposed on both sides of the grinding roller, and the two ends of the rotating shaft are respectively rotatably mounted on the top of the adaptive component.

[0020] Furthermore, the adaptive component includes a fixed rod perpendicular to the mounting base, the bottom of the fixed rod being fixedly connected to the fixed base, and an axially formed movable cavity at the top of the fixed rod, in which a movable rod is slidably mounted, and an adjusting spring is provided at the bottom end of the movable rod and the bottom end of the movable cavity; the end of the movable rod away from the fixed base is rotatably connected to the rotating shaft via a connector.

[0021] Furthermore, a flexible dust cover is provided on the top of the vehicle body, and the cross-section of the dust cover is a corrugated structure.

[0022] Furthermore, the purification unit includes an upper cavity and a lower cavity, which are fastened together to form a box structure. The upper cavity has an air inlet on one side facing the impurity port and an air outlet on the other side. The air inlet is connected to the impurity port, and the air outlet is connected to the outside. An impeller and a wind turbine motor for driving the impeller to rotate are installed in the lower cavity. An isolation grid is installed between the air inlet and the air outlet to isolate and adsorb impurities.

[0023] Furthermore, a magnetic adsorption plate is installed on the upper layer of the isolation fence plate.

[0024] Furthermore, both the isolation grid plate and the adsorption plate are inserted into the upper cavity.

[0025] Furthermore, the isolation grid plate and the adsorption plate are detachably installed in the upper cavity, and the inner wall of the upper cavity is provided with a drawer-type slide groove that allows the isolation grid plate and the adsorption plate to be pulled out from the air outlet.

[0026] Secondly, the present invention provides a track power supply processing method for an AMHS control system, comprising the following steps:

[0027] S1: The AMHS system obtains the charging efficiency of the current charging station based on the charging efficiency of the automated material handling vehicle;

[0028] S2: The AMHS system compares and analyzes the charging efficiency of charging stations with the preset charging efficiency threshold. If the threshold is less than the preset value, it is marked as abnormal.

[0029] S3: The AMHS system sends the coordinates of charging stations with abnormal charging performance to the device body and sets a travel route for the processing device body, and dispatches the processing device body to the designated location to perform the operation.

[0030] S4: The processing device body arrives at the designated location to perform the operation and uploads the operation record to the AMHS system for recording.

[0031] Specifically, the road priority of the processing device body is lower than the priority of the automated material handling vehicle in the AMHS system.

[0032] Specifically, the AMHS system continuously acquires the position coordinates of the processing device body and sets a safe distance for the processing device body to avoid the automatic material handling vehicle in a timely manner.

[0033] The embodiments of the present invention have at least the following technical effects:

[0034] 1. The design provided by this invention enables the grinding device body to establish data communication with the AMHS main control system through the communication unit, connecting the grinding device body to the AMHS cluster control environment. The road priority of the grinding device body is set to be lower than that of the automated material handling vehicle (AWDV), so that when the grinding device body is on its way to the target point and encounters an AWDV in operation, it will give priority to passing the AWDV. Simultaneously, when the grinding device body is grinding the charging contacts, it can continuously communicate with the AMHS system to obtain the positions of other AWDV vehicles within a preset distance range on the work section, and promptly and effectively avoid nearby AWDV vehicles on that section, completing the surface treatment of the power supply contacts on the travel track without affecting the normal passage of the AWDV.

[0035] 2. The charging contact grinding method in the AMHS system provided by this invention adopts a comprehensive coverage approach to the construction site. A corrugated flexible dust cover is placed at the work point. The grinding wheel is activated to grind the oxide layer on the charging contact. Afterwards, a combination of negative pressure suction from the clean treatment unit, magnetic plate dust collection, and static dust collection via filter screen can effectively clean the metal dust particles generated after grinding the charging contact. This prevents the dust from spreading into the clean environment required for semiconductor manufacturing and processing. It solves the shortcomings of incomplete dust collection and collection in traditional manual grinding, greatly improves the dust collection effect generated by grinding the charging contact, reduces the labor intensity of workers, and improves work efficiency. Attached Figure Description

[0036] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0037] Figure 1 This is a schematic diagram of the track handling system in the AMHS system;

[0038] Figure 2 for Figure 1 A front view structural diagram;

[0039] Figure 3 This is a schematic diagram of the device structure of the present invention;

[0040] Figure 4 for Figure 3 A schematic diagram of the grinding unit structure;

[0041] Figure 5 For this Figure 4 A schematic diagram of the principle;

[0042] Figure 6 for Figure 4 A schematic diagram of the adjustment component structure;

[0043] Figure 7 This is a schematic diagram of the purification unit structure of this device;

[0044] Figure 8 for Figure 7 Partial structural diagram;

[0045] Figure 9 This is a schematic diagram of the internal structure of the present invention;

[0046] Figure 10 A flowchart of the device control method provided by the present invention.

[0047] Icons: 100, Track system; 110, Travel track; 120, Installation unit; 200, Charging station; 210, Power supply line; 220, Charging contact; 300, Device body; 310, Vehicle body;

[0048] 320. Grinding section; 321. Grinding roller; 323. Drive pulley; 324. Mounting base; 325. Adaptive component; 3251. Fixed base; 3252. Fixed rod; 3253. Movable rod; 3254. Connector; 326. Splash guard; 327. Impurity port; 328. Rotating shaft; 329. Grinding drive motor; 400. Communication section; 500. Charging control section; 600. Energy storage device; 700. Purification unit; 710. Upper cavity; 711. Air inlet; 712. Air outlet; 720. Lower cavity; 722. Wind turbine; 730. Adsorption plate; 740. Isolation grid plate; 750. Impeller; 800. Dust cover; 900. Main control section. Detailed Implementation

[0049] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0050] It will be understood by those skilled in the art that, unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. It should also be understood that terms such as those defined in general dictionaries should be understood to have the same meaning as in the context of the prior art, and should not be interpreted in an idealized or overly formal sense unless specifically defined as herein.

[0051] Those skilled in the art will understand that, unless specifically stated otherwise, the singular forms “a,” “an,” “the,” and “the” used herein may also include the plural forms. It should be further understood that the term “comprising” as used in this specification means the presence of the stated features, integers, steps, operations, elements, and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or combinations thereof. The term “and / or” as used herein includes all or any units and all combinations of one or more associated listed items.

[0052] For the first aspect, please refer to Figures 1 to 6 This invention provides a track power supply processing device based on an AMHS control system, comprising:

[0053] The track system 100 includes a travel track 110 and a track installation unit 120 arranged parallel to the ground. The travel track 110 is laid along the path of the workshop equipment and the material transmission path, and the travel track 110 is suspended below the factory ceiling by the track installation unit 120.

[0054] The charging station 200, which supplies energy to the device, is located above the travel track 110. The charging station 200 includes a power supply line 210 connected to a power source, with a charging contact 220 connected to the other end of the power supply line 210. Figure 1 and Figure 2 As shown, the automated material handling vehicle (AWDV) travels along the track 110. When the AWDV's battery is low, to avoid the AWDV's prolonged shutdown for charging affecting the material transfer efficiency of the entire wafer fab, multiple charging contacts 220 are spaced apart on the top of the track 110. These charging contacts 220 are usually located directly above the machine, so that when the AWDV stops above the machine to perform material turnover, the top of the AWDV can extend a charging connector to abut against the charging contacts 220 above the AWDV to establish a path. The charging station above the track provides temporary charging for the AWDV. The AWDV typically stays above the machine for 3 to 6 seconds, increasing the AWDV's endurance. Because the AMHS system uses high-voltage electricity, a high-temperature, high-voltage electric arc is instantly generated between the automated material handling vehicle and the charging contacts when a circuit is established. This arc strikes the contact area, and after prolonged use, the oxide layer on the surface of the charging contacts 220 thickens, increasing the resistance during charging. This severely affects the charging efficiency of the automated material handling vehicle, significantly reducing its range. To address these issues, the device provided in this design includes a grinding device body 300, which comprises a vehicle body 310 and a grinding unit 320. The vehicle body 310 is mounted on a travel track 110 and is used to move the grinding unit 320 along the travel track 110.

[0055] The grinding section 320 is located inside the body section 310 and is perpendicular to the travel track 110. The processing end of the grinding section 320 extends out of the top of the body section 310 and connects with the charging contact 220. Preferably, a flexible dust cover 800 is provided on the top of the body section 310, and the cross-section of the dust cover 800 is a corrugated structure. The grinding section 320 is set on the body section 310. When it is necessary to treat the surface oxide layer of the charging contact 220, the grinding device body 300 is directly dispatched to the work site on the AMHS track system to carry out the work. The dust cover 800 is placed on the work site to reduce the diffusion of impurities and pollutants. This avoids the traditional method of manually carrying equipment on the ground to grind the charging contact 220 on the overhead track. This reduces the workload of workers and avoids the dangers caused by workers having to climb to work.

[0056] The energy storage device 600 is electrically connected to the vehicle body 310 and the grinding part 320 to discharge and supply power.

[0057] A charging control unit 500 is installed inside the vehicle body 310, and its top end extends movably out of the top of the vehicle body 310. The charging control unit 500 includes an electric push rod fixed in the inner cavity and a charging terminal. The charging terminal is located at the top of the movable end of the electric push rod. Driven by the electric push rod, it approaches the charging contact 220 and abuts against the charging contact 220 to establish an electrical connection and charge the energy storage device 600. Since the grinding device body 300 itself requires electric power, its own endurance is also crucial. In addition to carrying the necessary energy storage device 600 to power the electrical components, the grinding device body 300 itself also needs to be able to replenish its own power in a timely manner according to the stored power, avoiding... The failure of the grinding device 300 caused a large-scale traffic jam and paralysis on the AMHS track system, affecting the normal passage of the automated material handling vehicle. Therefore, its charging method also needs to be optimized: when the stored power is lower than the threshold, the charging terminal on the top of the grinding device 300 is gradually raised under the drive of the electric push rod until it contacts the charging contact 220 to establish a path for charging the storage device 600, increasing its range. Moreover, the power of the grinding device itself is much smaller than that of the automated material handling vehicle, so the total charging time for the storage device 600 is much shorter than the charging time for the automated material handling vehicle. This allows the device to replenish its own power without affecting the normal operation of the automated material handling vehicle.

[0058] The communication unit 400 is installed inside the body section 310. The communication unit 400 is connected to the AMHS system control center to establish a data transmission network channel.

[0059] The main control unit 900 is used to receive command information from the communication unit 400 and control the electrical groups of the body unit 310 and the grinding unit 320. By receiving and transmitting signals, the electrical components in the equipment can work together.

[0060] The grinding device body 300 completes the overall information transmission and reception through the communication unit 400 and the main control unit 900. The main function of the communication unit 400 is to establish communication between the grinding device body 300 and the AMHS system center, and temporarily incorporate the grinding device body 300 into the AMHS cluster control system. Since the grinding device body 300 itself is a non-transportation device and does not participate in the material scheduling operation in the workshop, the AMHS system will allocate secondary road priority to the grinding device body 300. When the grinding device body 300 is traveling on the travel track 110, if it encounters an automatic material transport vehicle in operation, the grinding device body 300 will slow down or stop to give way and allow the automatic material transport vehicle to pass normally.

[0061] Meanwhile, after the grinding device body 300 is connected to the AMHS system, the grinding device body 300 can obtain the optimal road path design through the AMHS system for passage. At the same time, when the grinding device body 300 is working on the charging contact 220, it can monitor the vehicles on the same track at all times and avoid them in time. The grinding time of the grinding device body 300 on the charging contact 220 is 2~4 seconds. When facing a road section that cannot be avoided, and when the operation time is longer than 2 seconds, the grinding device body 300 will prioritize the operation and remind the nearby automatic material handling vehicle to slow down. When the operation time is less than 2 seconds, the grinding device body 300 will pause the operation, first avoid the nearby automatic material handling vehicle, and then reprocess the operation position after it has passed.

[0062] See Figure 4 and Figure 5 As shown, the preferred grinding unit 320 includes a mounting base 324 and a grinding drive motor 329. The mounting base 324 is detachably mounted to the bottom of the inner cavity of the vehicle body 310. A grinding roller 321 is rotatably mounted on the mounting base 324 via a rotating shaft 328, and the top of the grinding roller 321 extends out of the top of the vehicle body 310. A drive pulley 323 is mounted on one side of the rotating shaft 328, and the grinding drive motor 329 is driven by a transmission belt and the drive pulley 323. The rotating shaft 328 and the grinding roller 321 rotate; a recessed splash guard 326 is provided at the bottom of the mounting base. The protective face of the splash guard 326 is located on the grinding surface of the grinding roller 321. An impurity port 327 is opened at the bottom of the splash guard 326. Impurities removed by the rotation of the grinding roller 321 are constrained by the splash guard 326 and collect at the impurity port 327. A purification unit 700 is installed at the impurity port 327 to collect and treat the impurities. See Figure 4 and Figure 5 As shown, the grinding drive motor 329 drives the grinding roller 321 to rotate and grind the oxide layer on the surface of the charging contact 220. Under the action of the rotational inertia of the grinding roller 321, the peeled oxide layer particles will move along the tangential direction of the grinding roller 321. In order to avoid the irregular diffusion of impurities, a splash guard 326 is set to constrain the path. The negative pressure generated at the impurity port 327 generates a suction force on the inner cavity of the splash guard 326, adsorbing the impurities in the inner cavity for centralized treatment, and preventing them from spreading into the semiconductor manufacturing workshop environment and affecting the quality of the wafer.

[0063] See Figure 4 and Figure 6 As shown, at least one pair of adaptive components 325 are respectively disposed on both sides of the grinding roller 321, and the two ends of the rotating shaft 328 are respectively rotatably mounted on the top of the adaptive component 325; preferably, the adaptive component 325 includes a fixed rod 3252 disposed perpendicular to the mounting base 324, the bottom of the fixed rod 3252 is fixedly connected to the fixed base 3251, and an axially formed movable cavity is formed on the top of the fixed rod 3252, a movable rod 3253 is slidably mounted in the movable cavity, and an adjusting spring is provided at the bottom end of the movable rod 3253 and the bottom end of the movable cavity; the end of the movable rod 3253 away from the fixed base 3251 is rotatably connected to the rotating shaft 328 through a connector 3254. This design enables the grinding roller 321 to operate in a floating manner. Because during the initial installation of the charging contacts 220, it is impossible to ensure that the distance between all charging contacts 220 and the travel track 110 is consistent, the grinding roller 321 needs to be able to adaptively identify the height of the charging contacts 200. This increases the versatility of the grinding operation and also maintains the contact pressure between the grinding roller 321 and the charging contacts 220 at all times, avoiding omissions caused by the grinding roller 321's surface wear failing to reach the work point.

[0064] Secondly, see Figure 7 and Figure 8As shown, the purification unit 700 includes an upper cavity 710 and a lower cavity 720, which are fastened together to form a box structure. The upper cavity 710 has an air inlet 711 on one side facing the impurity port 327 and an air outlet 712 on the other side. The air inlet 711 is connected to the impurity port 327, and the air outlet 712 is connected to the outside. An impeller 750 and a wind turbine 722 for driving the impeller 750 are installed inside the lower cavity 720. An isolation grid 740 is installed between the air inlet 711 and the air outlet 712 to isolate and adsorb impurities. A magnetic adsorption plate 730 is installed on the upper layer of the 740. A purification unit is installed at the impurity outlet 327. A wind turbine 722 drives an impeller 750 to rotate, generating negative pressure. Impurities generated during grinding at the work site are drawn into the purification chamber through this negative pressure, reducing the diffusion of pollutants. Simultaneously, the magnetic adsorption plate 730 inside the purification chamber can adsorb larger diameter metal impurity particles, while impurities that cannot be magnetically adsorbed are isolated by a finer isolation grid 740. The purified and filtered air is then discharged through the outlet 712, completing the purification cycle. Preferably, both the isolation grid 740 and the adsorption plate 730 are inserted into the upper cavity 710. Preferably, the isolation grid 740 and the adsorption plate 730 are detachably installed in the upper cavity 710, and the inner wall of the upper cavity 710 is provided with a drawer-type slide groove that allows the isolation grid 740 and the adsorption plate 730 to be pulled out from the outlet 712. Both the isolation grid plate 740 and the adsorption plate 730 can be removed from the cavity for cleaning, which increases the cleaning ability and recyclability of the purification unit 700.

[0065] Thirdly, the present invention also discloses a track power supply processing method for an AMHS control system, comprising the following steps:

[0066] S1: The AMHS system obtains the current charging efficiency of the charging station based on the charging power of the automated material handling vehicle;

[0067] S2: The AMHS system compares and analyzes the charging efficiency of 200 charging stations with the preset charging efficiency threshold;

[0068] S3: The AMHS system sends the coordinates of the charging station 200 with abnormal charging performance to the device body 300, and dispatches the device body 300 to the designated location to perform the operation.

[0069] S4: The device arrives at the designated location to perform the operation and uploads the operation record to the AMHS system for recording.

[0070] Preferably, the road priority of the device body 300 is lower than the priority of the automated material handling vehicle in the AMHS system.

[0071] Similarly, the AMHS system can continuously acquire the position coordinates of the device body 300 and set a safe distance for the device body to avoid automated material handling vehicles in a timely manner. By controlling the equipment through this control method and managing the grinding device through a network, it can operate according to the planned path given by the AMHS system, which can minimize the number of automated material handling vehicles on the travel path, reduce travel time, and increase work efficiency.

[0072] Since the device requires power support, although it carries its own energy storage device 600, it needs to be replenished when the energy storage device 600's power level is below the threshold. Therefore, when the device needs to be recharged, it is handled by the charging control unit 500 on the top of the device. Its working principle is as follows: the electric push rod pushes the charging terminal on the top to rise and approach the charging contact 220 to establish an electrical connection, and draws power from the grid to the energy storage device 600 for energy storage.

[0073] More specifically, because the device can communicate with the AMHS system, it mainly operates in two modes:

[0074] Form 1: Single-point operation mode

[0075] The AMHS system monitors the charging status of the automated material handling vehicles (AWDVs) under cluster control. When an AWDV is charging at a charging contact, the AMHS system detects the charging efficiency via the onboard controller. If the charging efficiency is detected to be below a preset threshold, the AMHS system records the charging station location at that coordinate and sends the coordinates to the device itself via communication unit 400. The device itself receives the AMHS dispatch instruction via communication unit 400 and proceeds to the destination to perform the operation. More specifically, the device itself follows the operating route to the target point. The path is planned uniformly by the AMHS system to avoid the device body affecting the operation of automated material handling vehicles (AWDVs) on other routes. Since the device's road priority is lower than that of the AWDVs, this means that when the alignment of the device body and the AWDVs needs adjustment, the AWDVs will be given priority, minimizing the impact on the AMHS system's transport function. When the device body reaches the target point, the grinding drive motor 329 is activated, driving the grinding roller 321 to rotate via the drive belt pulley 323. The rough surface of the grinding roller 321 then grinds the surface of the grinding roller 321 against the surface of the grinding roller 321. When the charging contact 220 contacts, the oxide layer on the surface of the charging contact is peeled off, forming oxide particles and powder. Because a flexible, corrugated shield 900 is installed on top of the device body, it effectively shields the work area, preventing the diffusion of impurities removed during grinding. Simultaneously, a purification unit 700 is installed inside the device, and the impurity port 327 is connected to the purification unit 700. That is, when the wind turbine 722 drives the impeller 750 to rotate and generate negative pressure, impurity particles at the work area can be extracted and adsorbed through the impurity port 722, preventing contaminants from entering the air inlet 71. 1. Filtration is performed to reduce the spread of contaminants and reduce their impact on the cleanliness of the semiconductor manufacturing workshop. When these impurities are drawn into the inner cavity, larger metal particles are attracted by the magnetic adsorption plate 730, while impurities that cannot be attracted by magnets are isolated by the isolation grid plate 740. The filtered air is then discharged from the air outlet 712, completing the polishing and purification work at the work site. The work information is uploaded to the AMHS system for marking and abnormal data is cleared. Since the adsorption plate 730 and the isolation grid plate 740 are detachable, they can be disassembled and cleaned for continued use after a long period of use.

[0076] Form 2: Multi-point operation mode

[0077] When the AMHS system track system is under unified maintenance, since all automatic material handling vehicles are taken offline for maintenance, the device body has the highest road priority when traveling. In this mode, the device body travels along all tracks and performs unified maintenance on all charging contacts 220 on the track.

[0078] Those skilled in the art will understand that the steps, measures, and schemes in the various operations, methods, and processes discussed in this invention can be alternated, modified, combined, or deleted. Furthermore, other steps, measures, and schemes in the various operations, methods, and processes discussed in this invention can also be alternated, modified, rearranged, decomposed, combined, or deleted. Furthermore, steps, measures, and schemes in the prior art that are similar to those disclosed in this invention can also be alternated, modified, rearranged, decomposed, combined, or deleted.

[0079] In the description of this invention, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0080] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0081] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0082] In the description of this specification, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

[0083] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A track power supply processing device based on an AMHS control system, comprising: A track system (100) includes a travel track (110) arranged parallel to the ground and a track mounting unit (120), wherein the travel track (110) is suspended below the factory ceiling by the track mounting unit (120); A charging station (200) is located above the travel track (110). The charging station (200) includes a power supply line (210) connected to a power source, and the other end of the power supply line (210) is connected to a charging contact (220). Its features are: It also includes a processing device body (300), which includes a vehicle body (310) and a grinding part (320). The vehicle body (310) is disposed on the travel track (110) and drives the grinding part (320) to move. The polishing part (320) is located in the inner cavity of the vehicle body part (310), and the polishing part (320) is arranged perpendicular to the travel track (110). The processing end of the polishing part (320) extends out of the top of the vehicle body part (310) and connects with the charging contact (220). The grinding unit (320) includes a mounting base (324) and a grinding drive motor (329). The mounting base (324) is detachably mounted to the bottom of the inner cavity of the vehicle body (310). A grinding roller (321) is rotatably mounted on the mounting base (324) via a rotating shaft (328). The top of the grinding roller (321) extends beyond the top of the vehicle body (310). A drive pulley (323) is mounted on one side of the rotating shaft (328). The grinding drive motor (329) drives the grinding roller (321) via a transmission belt and the drive pulley (323). The shaft (328) and the grinding roller (321) rotate; a recessed splash guard (326) is provided at the bottom of the mounting base (324), the protective face of the splash guard (326) is provided on the grinding surface of the grinding roller (321), and an impurity port (327) is opened at the bottom of the splash guard (326). The impurities that are ground off by the rotating grinding roller (321) are constrained by the splash guard (326) and gather at the impurity port (327). A purification unit (700) is installed at the impurity port (327) to collect and process the impurities. The purification unit (700) includes an upper cavity (710) and a lower cavity (720), which are fastened together to form a box structure. The upper cavity (710) has an air inlet (711) facing the impurity port (327) and an air outlet (712) on the other side. The air inlet (711) is connected to the impurity port (327), and the air outlet (712) is connected to the outside. An impeller (750) and a wind turbine (722) for driving the impeller (750) are installed inside the lower cavity (720). An isolation grid (740) is installed between the air inlet (711) and the air outlet (712) to isolate and adsorb impurities. An energy storage device (600) is electrically connected to the vehicle body (310) and the grinding part (320) to discharge and supply power; A charging control unit (500) is installed inside the vehicle body (310), and the top of the charging control unit (500) can extend movably out of the top of the vehicle body (310); the charging control unit (500) includes an electric push rod fixed in the inner cavity and a charging terminal, and the charging terminal is located at the top of the movable end of the electric push rod. The charging terminal is driven by the electric push rod to approach the charging contact (220) and abut against the charging contact (220) to establish an electrical connection to charge the energy storage device (600); The communication unit (400) is installed in the inner cavity of the vehicle body (310) and is connected to the AMHS system control center to establish a data transmission network channel. The main control unit (900) is used to receive command information from the communication unit (400) and control the electrical components of the vehicle body (310) and the polishing unit (320).

2. The track power supply processing device based on the AMHS control system according to claim 1, characterized in that: The grinding section (320) further includes an adaptive component (325) for the height of the grinding roller (321), at least one pair of the adaptive components (325) are respectively disposed on both sides of the grinding roller (321), and the two ends of the rotating shaft (328) are respectively rotatably mounted on the top of the adaptive component (325).

3. The track power supply processing device based on the AMHS control system according to claim 2, characterized in that: The adaptive component (325) includes a fixed rod (3252) perpendicular to the mounting base (324). The bottom of the fixed rod (3252) is fixedly connected to the fixed base (3251), and an axially formed movable cavity is formed at the top of the fixed rod (3252). A movable rod (3253) is slidably installed in the movable cavity. An adjusting spring is provided at the bottom end of the movable rod (3253) and the bottom end of the movable cavity. The end of the movable rod (3253) away from the fixed base (3251) is rotatably connected to the rotating shaft (328) through a connector (3254).

4. The track power supply processing device based on the AMHS control system according to claim 1, characterized in that: A flexible dust cover (800) is provided on the top of the vehicle body (310), and the cross section of the dust cover (800) is a corrugated structure.

5. The track power supply processing device based on the AMHS control system according to claim 1, characterized in that: A magnetic adsorption plate (730) is installed on the upper layer of the isolation fence plate (740).

6. The track power supply processing device based on the AMHS control system according to claim 5, characterized in that: Both the isolation grid plate (740) and the adsorption plate (730) are inserted into the upper cavity (710).

7. The track power supply processing device based on the AMHS control system according to claim 6, characterized in that: The isolation grid plate (740) and the adsorption plate (730) can be detachably installed in the upper cavity (710). The inner wall of the upper cavity (710) is provided with a drawer-type slide that allows the isolation grid plate (740) and the adsorption plate (730) to be pulled out from the air outlet (712).

8. A method for processing track power supply in an AMHS control system, based on the track power supply processing device for an AMHS control system as described in claim 1, characterized in that, Includes the following steps: S1: The AMHS system obtains the charging efficiency of the current charging station (200) based on the charging efficiency of the automated material handling vehicle; S2: The AMHS system compares and analyzes the charging efficiency of the charging station (200) with the preset charging efficiency threshold. If the threshold is less than the preset value, it is marked as abnormal. S3: The AMHS system sends the coordinates of the charging station (200) with abnormal charging performance to the device body (300) and sets a travel route for the processing device body (300), and dispatches the processing device body (300) to the designated location to perform the operation; S4: The processing device body (300) arrives at the designated position to perform the operation and uploads the operation record to the AMHS system for recording; The road priority of the processing device body (300) is lower than the priority of the automatic material handling vehicle in the AMHS system, and the AMHS system can obtain the position coordinates of the processing device body (300) at all times and set a safe distance for the processing device body (300) to avoid the automatic material handling vehicle.

Images