Molten liquid spacing measuring assembly and crystal pulling furnace

Abstract

The embodiment of the invention provides a melt spacing measuring assembly and a crystal pulling furnace, the melt spacing measuring assembly comprises a lifting hook main body, the lifting hook main body comprises a first rod body and a second rod body, an included angle is formed between the first rod body and the second rod body, and one end, far away from the second rod body, of the first rod body in the axial direction is a hanging end; the connecting head is connected to the hanging end, the connecting head comprises an inserting rod part and at least one stopping part, the at least one stopping part is connected to the end, far away from the lifting hook body in the axial direction, of the inserting rod part, and the radial size of the inserting rod part is smaller than that of the stopping part. According to the melt space measuring assembly and the crystal pulling furnace, the lifting hook can be prevented from shaking or falling off, and stable operation of the crystal pulling furnace is effectively guaranteed.

Description

Technical Field

[0001] The invention relates to the technical field of single crystal silicon growth processing, and in particular to a melt spacing measurement component and a crystal pulling furnace. Background Art

[0002] Melt Gap refers to the distance from the lower end of the reflector in the crystal pulling furnace to the melt surface. In the process of single crystal silicon pulling, the melt gap needs to be accurately monitored and adjusted in real time to ensure the quality of the crystal. At present, quartz nitrate is hung on the end of the reflector close to the melt surface to monitor and adjust the distance from the melt surface to the bottom of the reflector. Therefore, the stability of the quartz pin plays a vital role in the quality of crystal pulling.

[0003] However, when the thermal field of the crystal pulling furnace causes turbulent airflow fluctuations due to uncertain factors, the quartz pins will shake and fall, making it impossible to detect the melt level, which in turn makes it impossible to accurately calculate the crystal rod diameter and pulling speed, making it impossible to continue pulling crystal rod products, resulting in product losses and affecting the safe and efficient production of single crystal preparation. Summary of the invention

[0004] In order to solve at least one technical problem in the above-mentioned prior art, an embodiment of the present disclosure provides a melt spacing measurement component and a crystal pulling furnace.

[0005] The technical solutions provided by the embodiments of the present disclosure are as follows:

[0006] In a first aspect, an embodiment of the present disclosure provides a melt spacing measurement component, comprising:

[0007] The hook body comprises a first rod body and a second rod body bent relative to the first rod body, wherein one end of the first rod body away from the second rod body along its axial direction is a hanging end;

[0008] A connecting head connected to the hanging end, the connecting head includes an inserting rod portion and at least one stop portion, at least one stop portion is connected to one end of the inserting rod portion axially away from the hook body, and the radial dimension of the inserting rod portion is smaller than the radial dimension of the stop portion.

[0009] Exemplarily, the connection between the connecting head and the hook body is detachable.

[0010] Exemplarily, the stopper is a T-shaped stopper, and the T-shaped stopper includes a cross beam portion and a vertical beam portion, and the cross beam portion and the vertical beam portion are arranged perpendicular to each other to form a T shape.

[0011] Exemplarily, the cross beam portion is perpendicular to the second rod body, and the vertical beam portion is parallel to the second rod body.

[0012] Exemplarily, when there are at least two stop portions, the cross beam portions of at least two of the T-shaped stop portions are arranged parallel to each other, and the vertical beam portions of at least two of the T-shaped stop portions are arranged parallel to each other.

[0013] Exemplarily, the stopper includes two stoppers, and the two stoppers are connected to opposite ends of the insertion rod portion axially away from the hook body.

[0014] Exemplarily, the cross section of the insertion rod portion is rectangular.

[0015] In a second aspect, the present disclosure also provides a single crystal furnace, including a guide tube, wherein the guide tube has a molten liquid spacing measuring assembly as described above detachably mounted at one end thereof close to the molten liquid surface; wherein:

[0016] The guide tube is provided with a mounting hole which passes through the inner wall and the outer wall thereof, and the mounting hole includes a first hole area and a second hole area which is connected to the lower part of the first hole area, wherein the first hole area is adapted to the shape of the stopper, and the hole diameter of the first hole area is larger than that of the stopper; the second hole area is adapted to the cross-sectional shape of the insertion rod part, and the inner diameter of the second hole area is larger than that of the insertion rod part and smaller than that of the stopper; the insertion rod part is inserted into the second hole area, and at least one of the stopper parts abuts against the inner wall of the mounting hole to stop the insertion rod part.

[0017] Exemplarily, the shapes of the first hole area and the stop portion are arranged in mirror symmetry with respect to a horizontal axis.

[0018] Exemplarily, when the stop portion includes two stop portions, the two stop portions are connected to the opposite ends of the insertion rod portion axially away from the hook body, and one of the stop portions abuts against the inner wall of the guide tube, and the other stop portion abuts against the outer wall of the guide tube, and the axial length of the insertion rod portion is greater than or equal to the side wall thickness of the guide tube.

[0019] The beneficial effects brought by the embodiments of the present disclosure are as follows:

[0020] In the above scheme, the melt spacing measurement component is used to measure the Melt Gap, that is, the distance between the melt surface and the guide tube during the crystal pulling process. The melt spacing measurement component includes a hook body and a connecting head connected to the hook body, wherein the hook body includes a first rod body and a second rod body, and the end of the first rod body away from the second rod body is a hanging end, the connecting head is connected to the hanging end of the first rod body, the connecting head is constructed to include an insertion rod portion and at least one stop portion, and at least one of the stop portions is connected to an end of the insertion rod portion axially away from the hook body, and the radial dimension of the insertion rod portion is smaller than the radial dimension of the stop portion. In this way, the connecting head can hang the hook body on the guide tube, wherein the rod portion of the connecting head can be inserted into the mounting hole of the guide tube. Since the stop portion is larger than the radial dimension of the rod portion, the stop portion can abut against the inner side wall of the guide tube to stop the rod portion and prevent the rod portion from escaping from the mounting hole. The connecting head plays a riveting connection role, which can prevent the hook body from shaking or falling when it moves in the furnace or the air flow fluctuates turbulently, thereby effectively ensuring the stable operation of the crystal pulling furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic diagram showing the structure of a melt spacing measurement assembly in some embodiments of the present disclosure;

[0022] Figure 2 A schematic diagram showing the structure of the mounting holes on the guide tube in some embodiments of the present disclosure;

[0023] Figure 3 A schematic diagram showing the assembly structure of a melt spacing measurement component and a guide tube in some embodiments of the present disclosure;

[0024] Figure 4 A schematic diagram showing the structure of a melt spacing measurement assembly in some other embodiments of the present disclosure;

[0025] Figure 5 A schematic diagram showing the structure of the mounting holes on the guide tube in some embodiments of the present disclosure. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0027] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. The "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, similar words such as "one", "one" or "the" do not indicate quantity restrictions, but indicate that there is at least one. Similar words such as "include" or "comprise" mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Similar words such as "connect" or "connected" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0028] The features such as "parallel", "perpendicular", and "same" used in the embodiments of the present disclosure include the features such as "parallel", "perpendicular", and "same" in a strict sense, as well as the cases where "approximately parallel", "approximately perpendicular", "approximately the same", etc. include certain tolerances, taking into account the tolerances associated with the measurement of specific quantities (e.g., the limitations of the measurement system), and represent the acceptable deviation range for a specific value determined by ordinary technicians in the field. For example, "approximately" can mean within one or more standard deviations, or within 3% or 5% of the value.

[0029] In addition, in this document, unless otherwise defined, the terms "substantially", "substantially", "approximately" and "about" are used to describe and explain small changes. When used with an event or situation, these terms can cover situations where the event or situation occurs exactly, and can also cover situations where the event or situation occurs approximately. For example, when used with a numerical value, these terms can include a range of variation of less than or equal to 10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, less than or equal to ±0.05%. The term "substantially coplanar" can refer to two surfaces being arranged along the same plane in the micrometer range, for example, arranged along the same plane within 40μm, 30μm, 20μm, 10μm or 1μm.

[0030] At present, the CZ (Czochralski) method is widely used to produce single crystal silicon ingots, wherein a quartz crucible is used to hold polycrystalline silicon raw materials in a single crystal pulling furnace, and the polycrystalline silicon raw materials are melted by heating the crucible. A guide tube is arranged above the crucible in the single crystal pulling furnace. In the CZ single crystal silicon growth process, argon gas is usually continuously filled from the guide tube, and the argon gas is allowed to flow through the gap between the melt surface in the crucible and the guide tube, and finally discharged from the exhaust port of the hot field under the action of a vacuum pump.

[0031] With the continuous improvement of the quality requirements of silicon wafer materials, in addition to controlling the resistivity and oxygen content concentration during the crystal pulling process, it is also necessary to well control the crystal defects in the crystal rod, so the crystal pulling process parameters need to be continuously optimized. The measurement of some crystal pulling process parameters also requires more precision, and one of the important parameters is Melt Gap. The melt spacing (Melt Gap) refers to the distance from the lower end of the reflector in the crystal pulling furnace to the melt surface. The measurement and control of Melt Gap is an important parameter indicator in the crystal pulling process. Its size has a great influence on the flow of argon gas, the evaporation of impurities, the rotation stability of the silicon rod, the oxygen content of the silicon rod, and other factors related to the growth and quality of single crystals.

[0032] Melt Gap is the distance from the bottom of the guide tube to the melt surface in the crucible. After the melting is completed, the Melt Gap should be measured and adjusted to the set value by adjusting the liquid level position. In the subsequent crystal rod pulling process, the solution will continue to decrease during the pulling process, and the liquid level will continue to drop. At the same time, the crucible must continue to rise, which requires real-time monitoring and precise adjustment of the Melt Gap.

[0033] Usually, the measurement and monitoring method is to insert a quartz hook at the bottom of the guide tube, and measure it through the reflection imaging principle of the quartz hook on the melt surface. The reflection imaging principle is to use a camera to capture the reflection of the quartz hook on the melt surface, and then detect the position of the reflection edge of the quartz hook on the melt surface in the image, and then calculate the pulling speed. In the actual measurement process, due to operating errors or the up and down movement of the heat screen, the airflow in the crystal pulling furnace becomes turbulent, and the quartz hook can easily fall into the crucible solution, making it impossible to detect the liquid level, contaminating the silicon solution, and causing the crystal rod diameter and pulling speed to be unable to be accurately calculated, resulting in the inability to continue pulling crystal rod products and product losses, thereby affecting the safety and efficient production of single crystal preparation.

[0034] In order to solve the above problems, the embodiments of the present disclosure provide a melt spacing measurement component and a crystal pulling furnace, which can prevent the hook from shaking or falling, and effectively ensure the stable operation of the crystal pulling furnace.

[0035] like Figure 1 and Figure 4As shown, the melt spacing measurement component includes:

[0036] The hook body 100 includes a first rod body 110 and a second rod body 120 which is at an angle to the first rod body 110, wherein an end of the first rod body 110 which is away from the second rod body 120 along its axial direction is a hanging end;

[0037] The connecting head 200 is connected to the hanging end, and the connecting head 200 includes a rod insertion portion 210 and at least one stop portion 220. At least one stop portion 220 is connected to one end of the rod insertion portion 210 axially away from the hook body 100, and the radial dimension of the rod insertion portion 210 is smaller than the radial dimension of the stop portion 220.

[0038] like Figure 2 and Figure 5 As shown, in some embodiments, the guide tube 10 in the crystal pulling furnace is detachably mounted with a melt spacing measuring assembly of the embodiment of the present disclosure at one end close to the melt surface, wherein the guide tube 10 is provided with a mounting hole 11 penetrating the inner wall and the outer wall thereof, the mounting hole 11 comprises a first hole area 11A and a second hole area 11B connected to the lower part of the first hole area 11A, the first hole area 11A is adapted to the shape of the stopper 220, and the aperture of the first hole area 11A is larger than that of the stopper 220;

[0039] The second hole area 11B is adapted to the cross-sectional shape of the insertion rod portion 210, and the inner diameter of the second hole area 11B is larger than the insertion rod portion 210 and smaller than the stop portion 220; the insertion rod portion 210 is inserted into the second hole area 11B, and at least one of the stop portions 220 abuts against the inner wall of the mounting hole 11 to stop the insertion rod portion 210.

[0040] The hook body 100 is mainly used to form a reflection on the melt surface for Melt Gap monitoring, and the connector 200 is mainly used to hang the hook body 100 on the guide tube 10 .

[0041] like Figures 1 to 5As shown, when the hook body 100 is hung on the guide tube 10, since the first hole area 11A is adapted to the shape of the stopper 220, and the aperture of the first hole area 11A is larger than that of the stopper 220, the stopper 220 can pass through the first hole area 11A and enter the inner side of the guide tube 10, and the insertion rod part 210 can be inserted into the first hole area 11A, and then the insertion rod part 210 is moved into the second hole area 11B below the first hole area 11A. It is adapted to the cross-sectional shape of the rod portion 210, and the inner diameter of the second hole area 11B is larger than the rod portion 210 and smaller than the stop portion 220. Therefore, the stop portion 220 will abut against the inner wall of the guide tube 10 to stop the rod portion 210 and form a riveted structure, which can effectively prevent the rod portion 210 from escaping from the mounting hole 11, and prevent the hook body 100 from shaking or falling when it moves in the furnace or the air flow fluctuates turbulently, thereby effectively ensuring the stable operation of the crystal pulling furnace.

[0042] In some embodiments, the diameter of the first hole region 11A is 0.2 mm larger than the size of the stopper 220. The diameter of the second hole region 11B is 0.2 mm larger than the size of the rod insertion portion 210. However, this is not limited thereto.

[0043] In some embodiments, in the hook body 100, the second rod body 120 and the first rod body 110 form an angle, in other words, the second rod body 120 is bent relative to the first rod body 110, for example, the angle may be 90°, and when the hook body 100 is suspended on the guide tube 10, the first rod body 110 may be arranged horizontally, and the second rod body 120 may be arranged vertically. However, the angle between the first rod body 110 and the second rod body 120 is not limited thereto.

[0044] In some embodiments, the connection head 200 and the hook body 100 are detachably connected. In this way, the connection head 200 or the hook body 100 of different shapes can be replaced according to the needs of different application scenarios. In addition, the hook body 100 and the connection head 200 can be made of different materials. For example, in order to prevent the hook body 100 from contaminating the silicon solution, the hook body 100 can be made of quartz material, and the connection head 200 can be made of other materials besides quartz material in combination with its connection strength, heat resistance and wear resistance.

[0045] Exemplarily, the connection between the connecting head 200 and the hook body 100 may be a threaded connection, a snap connection, an interference fit, or any other suitable detachable connection method, which is not limited thereto.

[0046] Of course, it is understandable that the connecting head 200 and the hook body 100 can also be connected into an integral structure.

[0047] In some embodiments, Figures 1 to 3 As shown, the stopper 220 is a T-shaped stopper, and the T-shaped stopper includes a cross beam portion 221 and a vertical beam portion 222 , and the cross beam portion 221 and the vertical beam portion 222 are arranged perpendicular to each other to form a T shape.

[0048] Correspondingly, the first hole area 11A is a T-shaped hole area adapted to the shape of the stopper 220 .

[0049] It is understandable that the shape of the stopper 220 is not limited to T-shaped, and may also be other shapes, such as rectangle, diamond or triangle. Figure 4 In the embodiment shown, the shape of the stopper 220 is a rhombus, and, accordingly, as shown in FIG. Figure 5 As shown, the shape of the first hole area 11A is a rhombus that matches the stopper 220 .

[0050] In some embodiments, the shapes of the first hole area 11A and the stopper 220 are arranged in mirror symmetry with respect to a horizontal axis.

[0051] For example, Figures 1 to 3 As shown, taking the stop portion 220 as a T-shaped stopper as an example, the first hole area 11A may be an inverted T-shaped hole, the first hole area 11A may include a transverse hole area a corresponding to the cross beam portion 221 and a vertical hole area b corresponding to the vertical beam portion 222, the second hole area 11B is a vertical strip hole adapted to the shape of the insertion rod portion 210, and the second hole area 11B may be located below the first hole area 11A, and the mounting hole 11 is roughly in the shape of a cross hole.

[0052] And, illustratively, the lateral width of the second hole region 11B may be smaller than the lateral width of the vertical hole region b.

[0053] When hanging the hook body 100, first, invert the hook body 100 and the connecting head 200, pass the T-shaped stopper through the inverted T-shaped first hole area 11A, and then flip the entire melt spacing measurement assembly 180°, and then push the entire assembly down to the second hole area 11B. Since the inner diameter of the second hole area 11B is larger than the insertion rod part 210 and smaller than the stop part 220, the stop part 220 will abut against the inner wall of the guide tube 10 to form a riveted structure.

[0054] The entire hanging process is easy to operate; and, if the shape of the first hole area 11A is exactly the same as the shape of the T-shaped stopper (i.e., a non-mirror setting), when the T-shaped stopper shakes due to the influence of airflow, it may fall out of the first hole area 11A again. By designing the first hole area 11A and the T-shaped stopper to be mirror images about the horizontal axis, even if the T-shaped stopper shakes, it will not fall out of the first hole area 11A, thereby further preventing the hook body 100 from falling.

[0055] In addition, it should be noted that the stopper 220 is designed to be T-shaped. Compared with other shapes, the T-shaped stopper 220 cooperates with the inverted T-shaped first hole area 11A to effectively prevent the hook body 100 from falling when it shakes.

[0056] In addition, it should be noted that the shapes of the first hole area 11A and the stopper 220 are arranged mirror-symmetrically about the horizontal axis. In other words, the shape of the first hole area 11A is a shape obtained by rotating the shape of the stopper 220 by 180°. In other embodiments, the first hole area 11A may also be adapted to a shape obtained by rotating the shape of the stopper 220 by other angles. For example, as shown in the figure, the first hole area 11A may also be adapted to a shape obtained by rotating the shape of the stopper 220 by 90°.

[0057] like Figure 1 As shown, in some exemplary embodiments, the cross beam 221 is perpendicular to the second rod 120, and the vertical beam 222 is parallel to the second rod 120. In this way, the vertical beam 222 of the T-shaped stopper is arranged in parallel with the second rod 120 of the hook body 100. During the hanging operation, the T-shaped stopper and the hook body 100 can keep the same direction when flipping, which makes it easier to ensure that the second rod 120 of the hook body 100 remains in a vertical state and avoids the second rod 120 from tilting.

[0058] like Figure 1 As shown, in some exemplary embodiments, when there are at least two stop portions 220, at least two cross beam portions 221 of the T-shaped stop members are arranged parallel to each other, and at least two vertical beam portions 222 of the T-shaped stop members are arranged parallel to each other.

[0059] Thus, the first hole area 11A of the mounting hole 11 is in an inverted T shape, which is relatively simple in shape. However, it is understandable that in other embodiments, the cross beams 221 of at least two of the T-shaped stoppers may also be arranged at an angle, and similarly, the vertical beams 222 of at least two of the T-shaped stoppers may also be arranged at an angle.

[0060] In some exemplary embodiments, the stopper 220 includes two stoppers 220 , and the two stoppers 220 are connected to opposite ends of the insertion rod portion 210 axially away from the hook body 100 .

[0061] In this way, when the stop portion 220 includes two stop portions 220, the two stop portions 220 can be connected to the opposite ends of the insertion rod portion 210 axially away from the hook body 100, one of the stop portions 220 abuts against the inner wall of the guide tube 10, and the other stop portion 220 abuts against the outer wall of the guide tube 10 to form a snap-fit ​​structure, which can further prevent the hook body 100 from shaking or falling.

[0062] In some embodiments, the axial length of the rod portion 210 may be greater than or equal to the side wall thickness of the guide tube 10. For example, the axial length of the rod portion 210 may be greater than the side wall thickness of the guide tube 10 by 0.2 mm.

[0063] Furthermore, in some embodiments, Figure 1 and Figure 2 As shown, the cross section of the rod insertion portion 210 is illustratively rectangular. Accordingly, the second hole area 11B is a rectangular hole. In this way, the rod insertion portion 210 can be prevented from rotating in the second hole to ensure that the second rod body 120 always remains in a vertical state.

[0064] The first rod body 110 and the second rod body 120 of the hook body 100 may also be configured to have a circular or rectangular cross section.

[0065] Furthermore, in some embodiments, the hook body 100 may be made of quartz to avoid contamination of the silicon solution.

[0066] In addition, the embodiment of the present disclosure further provides a single crystal furnace, comprising a guide tube 10, wherein the guide tube 10 is detachably mounted with the above-mentioned melt spacing measurement assembly at one end close to the melt surface; wherein:

[0067] The guide tube 10 is provided with a mounting hole 11 which passes through the inner wall and the outer wall thereof, and the mounting hole 11 includes a first hole area 11A and a second hole area 11B connected to the lower part of the first hole area 11A, wherein the first hole area 11A is adapted to the shape of the stop portion 220, and the hole diameter of the first hole area 11A is larger than the stop portion 220; the second hole area 11B is adapted to the cross-sectional shape of the insertion rod portion 210, and the inner diameter of the second hole area 11B is larger than the insertion rod portion 210 and smaller than the stop portion 220; the insertion rod portion 210 is inserted into the second hole area 11B, and at least one of the stop portions 220 abuts against the inner wall of the mounting hole 11 to stop the insertion rod portion 210.

[0068] Exemplarily, the shapes of the first hole area 11A and the stopper 220 are arranged in mirror symmetry with respect to a horizontal axis.

[0069] Exemplarily, when the stop portion 220 includes two stop portions 220, the two stop portions 220 are connected to the opposite ends of the insertion rod portion 210 axially away from the hook body 100, and one of the stop portions 220 abuts against the inner wall of the guide tube 10, and the other stop portion 220 abuts against the outer wall of the guide tube 10, and the axial length of the insertion rod portion 210 is greater than or equal to the side wall thickness of the guide tube 10.

[0070] Obviously, the crystal pulling furnace provided in the embodiment of the present invention also has the technical effects brought by the melt spacing measurement component provided in the embodiment of the present invention, which will not be elaborated here.

[0071] There are a few points to note:

[0072] (1) The drawings of the embodiments of the present disclosure only relate to the structures related to the embodiments of the present disclosure, and other structures may refer to the general design.

[0073] (2) For the sake of clarity, in the drawings used to describe the embodiments of the present disclosure, the thickness of layers or regions is exaggerated or reduced, that is, these drawings are not drawn according to the actual scale. It is understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element or there may be intermediate elements.

[0074] (3) In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to obtain new embodiments.

[0075] The above are only specific implementations of the present disclosure, but the protection scope of the present disclosure is not limited thereto, and the protection scope of the present disclosure shall be based on the protection scope of the claims.

Claims

1. A melt spacing measuring component, characterized in that: include: The hook body comprises a first rod body and a second rod body which is at an angle to the first rod body, wherein an end of the first rod body which is away from the second rod body along its axial direction is a hanging end; A connecting head connected to the hanging end, the connecting head includes an inserting rod portion and at least one stop portion, at least one stop portion is connected to one end of the inserting rod portion axially away from the hook body, and the radial dimension of the inserting rod portion is smaller than the radial dimension of the stop portion.

2. The melt distance measuring assembly according to claim 1, characterized in that: The connection between the connecting head and the hook body is detachable.

3. The melt distance measuring assembly according to claim 1, characterized in that: The stopper is a T-shaped stopper, and the T-shaped stopper comprises a cross beam portion and a vertical beam portion, and the cross beam portion and the vertical beam portion are arranged perpendicular to each other to form a T shape.

4. The melt distance measuring assembly according to claim 3, characterized in that: The cross beam is perpendicular to the second rod, and the vertical beam is parallel to the second rod.

5. The melt distance measuring assembly according to claim 3, characterized in that: When there are at least two stop parts, the cross beam parts of at least two of the T-shaped stop parts are arranged parallel to each other, and the vertical beam parts of at least two of the T-shaped stop parts are arranged parallel to each other.

6. The melt distance measuring assembly according to claim 1, characterized in that: The stopper includes two stoppers, and the two stoppers are connected to opposite ends of the inserting rod portion axially away from the hook body.

7. The melt distance measuring assembly according to claim 1, characterized in that: The cross section of the inserting rod portion is rectangular.

8. A single crystal furnace, comprising a guide tube, characterized in that: The guide tube is detachably mounted with a melt spacing measuring assembly as claimed in any one of claims 1 to 7 at one end close to the melt surface; wherein: The guide tube is provided with a mounting hole which passes through the inner wall and the outer wall thereof, and the mounting hole includes a first hole area and a second hole area which is connected to the lower part of the first hole area, wherein the first hole area is adapted to the shape of the stopper, and the hole diameter of the first hole area is larger than that of the stopper; the second hole area is adapted to the cross-sectional shape of the insertion rod part, and the inner diameter of the second hole area is larger than that of the insertion rod part and smaller than that of the stopper; the insertion rod part is inserted into the second hole area, and at least one of the stopper parts abuts against the inner wall of the mounting hole to stop the insertion rod part.

9. The single crystal furnace according to claim 8, characterized in that: The shapes of the first hole area and the stopper are arranged in mirror symmetry with respect to a horizontal axis.

10. The single crystal furnace according to claim 8, characterized in that: When the stop portion includes two stop portions, the two stop portions are connected to the opposite ends of the insertion rod portion axially away from the hook body, and one of the stop portions abuts against the inner wall of the guide tube, and the other stop portion abuts against the outer wall of the guide tube, and the axial length of the insertion rod portion is greater than or equal to the side wall thickness of the guide tube.

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