A defect detection device and method for optical polishing sheet

Abstract

The present invention discloses a defect detection device and method for optical polishing sheets, which relates to the field of detection technology. The detection device includes a machine platform, a module mechanism and a machine body are installed on the machine platform, a mounting frame is installed on the top of the machine body, a detection mechanism is installed on the mounting frame, a clamping mechanism is installed on the module mechanism, the module mechanism pushes part of the clamping mechanism out of the machine body, the clamping mechanism connects the optical polishing sheet from the outside of the machine body, and then the module mechanism cooperates with the clamping mechanism to bring the optical polishing sheet into the machine body, the detection mechanism performs defect detection on the optical polishing sheet, and after the detection is completed, the module mechanism cooperates with the clamping mechanism to send the optical polishing sheet out of the machine body. In addition to clamping the optical polishing sheet, the clamping mechanism also has the function of using gas to clean the surface of the optical polishing sheet. The clamping mechanism uses gas to clean the surface of the optical polishing sheet, blows off impurities on the surface of the optical polishing sheet, and effectively prevents impurities attached to the surface of the optical polishing sheet from affecting the detection accuracy and detection effect.

Description

Technical Field

[0001] The invention relates to the field of detection technology, and in particular to a defect detection device and method for optical polishing sheets. Background Art

[0002] Optical polishing sheets are high-precision polishing tools used in the manufacture of optical components. The main function of optical polishing sheets is to remove impurities and rough surfaces during the optical manufacturing process, so that the surface smoothness of optical components meets the requirements, thereby ensuring that light can be efficiently transmitted or reflected. Optical polishing sheets are widely used in the fields of optical cold processing, optical grinding and optical polishing, especially in the manufacture of high-end optical components, such as telescopes, microscopes, optical instruments, etc. In addition, in the field of semiconductor manufacturing, polishing sheets also play a vital role, especially in the chemical mechanical polishing (CMP) process, for achieving high-precision flattening of the wafer surface. Optical polishing sheets are an indispensable tool in the manufacturing process of optical components. They need to meet specific optical performance requirements, and their quality directly affects the performance and quality of optical components.

[0003] In order to accurately detect the quality of optical polishing sheets, the optical polishing sheets must be moved smoothly during the inspection. Manual movement will cause shaking, which will affect the precision and accuracy of the inspection. At the same time, the existing inspection equipment only inspects the optical polishing sheets and does not have the function of cleaning the surface of the optical polishing sheets. Summary of the invention

[0004] The object of the present invention is to provide a defect detection device and method for optical polishing sheets to solve the problems raised in the prior art.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a defect detection device for optical polishing sheets, comprising a machine and a detection mechanism for performing spectral detection on the optical polishing sheets, a body is installed above the machine, an air supply system for suction and blowing is installed inside the machine, a mounting frame is installed at the top of the body, the detection mechanism is installed below the mounting frame, a module mechanism is also installed above the machine, a clamping mechanism is installed on the module mechanism, the clamping mechanism comprises an adsorption cleaning part and a clamping detection part, the adsorption cleaning part performs gas cleaning on the optical polishing sheet, and places the cleaned optical polishing sheet on the clamping detection part, and the clamping detection part cooperates with the detection mechanism to realize defect detection on the optical polishing sheet. The module mechanism pushes part of the clamping mechanism out of the machine body, the clamping mechanism connects the optical polishing sheet from the outside of the machine body, and then the module mechanism cooperates with the clamping mechanism to bring the optical polishing sheet into the machine body, the detection mechanism performs defect detection on the optical polishing sheet, and after the detection is completed, the module mechanism cooperates with the clamping mechanism to send the optical polishing sheet out of the machine body. In addition to clamping the optical polishing sheet, the clamping mechanism also has the function of using gas to clean the surface of the optical polishing sheet. The clamping mechanism uses gas to clean the surface of the optical polishing sheet and blows away impurities on the surface of the optical polishing sheet, effectively preventing impurities attached to the surface of the optical polishing sheet from affecting the detection accuracy and detection effect.

[0006] The module mechanism includes a horizontal module and a guide rail 1 installed on the machine platform, a vertical module and a guide rail 2 are installed on the moving block of the horizontal module and the guide rail 1, two side panels are symmetrically installed on the moving block of the vertical module and the guide rail 2, one of the side panels is installed with a lead screw and a lead screw motor, and the other side panel is installed with a moving slide rod, the clamping mechanism also includes an angle plate threadedly installed on the lead screw and slidably installed on the moving slide rod, and the adsorption cleaning part and the clamping detection part are both installed on the angle plate.

[0007] The adsorption cleaning part includes a vertical plate installed on two corner plates, a carrier plate is rotatably installed between the two vertical plates through a driving shaft, one end of the driving shaft is connected to a flip motor, the flip motor is fixed to the vertical plate, a through groove is provided in the middle of the carrier plate, an inner plate is installed in the through groove, a negative pressure groove is provided inwardly on one end surface of the inner plate, an air pipe connected to the negative pressure groove is provided on the other end surface of the inner plate, and the air pipe is connected to the air supply system;

[0008] The clamping detection part comprises a clamping cylinder installed on two angle plates, a clamping plate is installed at the output end of the clamping cylinder, and a rubber pad is arranged on the clamping plate.

[0009] A groove is provided on the outer circle of the negative pressure groove on the other side end surface of the inner plate, and a plurality of sealing grooves connecting the groove and the negative pressure groove are provided on one side end surface of the inner plate, a frame of adapted size is installed in the groove, a sealing strip is slidably installed in each sealing groove, one side of the sealing strip is connected to the frame, a cover plate is installed on the groove, a blowing and suction pipe connecting the groove is provided on the cover plate, and the blowing and suction pipe is connected to the air supply system.

[0010] The carrier plate is provided with a plurality of "L"-shaped air holes, the air inlet ends of the plurality of air holes are commonly connected to a cleaning pipe, the cleaning pipe is connected to an air supply system, and the air outlet ends of the air holes face the inner plate.

[0011] A card slot is arranged outward from the middle of the through slot, and an integrally formed card plate is arranged at the position of the inner plate corresponding to the card slot, the thickness of the card plate is less than the height of the card slot, and an annular air bag of a bellows structure is arranged at the upper and lower ends of the card slot, and the two air bags are connected through a pipeline;

[0012] The flipping motor flips the carrier plate 180°, so that when the air pipe faces downward, the inner plate avoids the blowing position of the air hole, and the air hole blows air to the optical polishing sheet on the inner plate; the flipping motor flips the carrier plate 180° in the opposite direction, so that when the air pipe faces upward, the inner plate blocks the air hole. When loading the optical polishing sheet, the screw motor drives the screw to rotate, and the screw cooperates with the moving slide bar to push the corner plate away from the vertical module. During the pushing process, the flipping motor flips the carrier plate 180°, so that the air pipe faces downward, and the loading mechanism or the staff places the optical polishing sheet on the inner plate, and makes the optical polishing sheet in the square area formed by several sealing grooves. Then the control system makes the negative pressure system work, and draws air through the air pipe and the blowing and suction pipe. The air in the groove is drawn through the blowing and suction pipe to generate negative pressure in the groove. Under the action of the external air pressure, the sealing strip moves toward the cover plate together with the frame, so that the sealing groove is When it is opened, external air flows into the negative pressure groove through the sealing groove. During the air flow, the surface of the end face of one side of the optical polishing sheet is cleaned. When the air pipe is facing downward, the inner plate moves downward in the slot under the influence of its own gravity and the air pipe, blowing and suction pipes and other structures. During the movement, the air bag below is gradually compressed, and the gas inside the lower air bag gradually moves to the upper air bag. When the lower air bag cannot be compressed, the inner plate avoids the blowing position of the air outlet, and the air supply system injects gas into the air hole through the cleaning pipe, so that part of the gas is blown onto the other side of the optical polishing sheet through the air hole, and the other part of the gas is sucked into the negative pressure groove. In the process of using gas to clean the optical polishing sheet, the screw motor pulls the angle plate back through the screw and the movable slide rod, so that the clamping detection part on the angle plate is directly below the detection mechanism. After the clamping detection part is in place, the air supply system stops injecting gas into the cleaning pipe and stops extracting air from the air pipe and the blowing and suction pipe. Then, the air supply system injects gas into the blowing and suction pipe to increase the air pressure in the groove, so that the frame pushes the sealing strip back into the sealing groove and seals the sealing groove, so that the negative pressure groove cannot extract external air through the sealing groove. After that, the air supply system uses the air pipe to extract the air in the negative pressure groove again, so that the optical polishing sheet is adsorbed on the inner plate by negative pressure. After the negative pressure reaches a certain pressure, the air supply system stops extracting air and closes the pipeline through a valve. At this time, the flip motor flips the carrier plate 180° in the opposite direction, so that the air tube faces upward. Under the influence of its own gravity, the air tube, the blowing and suction tube and the gravity of the optical polishing sheet, the inner plate compresses the airbag below (i.e., the expanded airbag when the air tube faces downward), so that the gas in the lower airbag gradually flows into the upper airbag. During the flow of gas in the airbag, the inner plate gradually descends. The setting of the airbag slows down the descending speed of the inner plate to achieve the purpose of buffering. When the lower airbag cannot be compressed, one end of the inner plate that absorbs the optical polishing sheet protrudes from the carrier plate, making it convenient to place the optical polishing sheet on the clamping plate. When the optical polishing sheet contacts the clamping plate, the valve on the air supply system pipeline is opened, and the air supply system injects gas into the negative pressure tank to relieve pressure, so that the optical polishing sheet can be smoothly placed on the clamping plate.After the optical polishing sheet is placed, the flip motor flips the carrier plate 180° again and waits for the optical polishing sheet to be adsorbed and picked up for inspection.

[0013] Two hollow rods are symmetrically installed on each of the angle plates, and the hollow rod is located below the clamping cylinder, and one end of the hollow rod extends outward to form an integral "L"-shaped extension plate, and a slide groove is provided on the hollow rod, and a guide rod is slidably installed in the hollow rod, and a slider is installed at one end of the guide rod, and the slider is located in the slide groove, and a rotating shaft is installed between the two guide rods, and one end face of the clamping plate is connected to the rotating shaft, and a support rod is installed on the angle plate through a support, and the support rod is connected to the clamping cylinder through a rotating shaft seat, and the output ends of the two clamping cylinders are commonly connected to an inner shaft, and a sleeve is sleeved on the inner shaft, and the sleeve is connected to the end face of one side of the clamping plate, and the length of the guide rod is less than the length of the slide groove;

[0014] When the optical polishing sheet is not clamped, the clamping plate is in an inclined state, and when the optical polishing sheet is clamped, the clamping plate is in a vertical state. The clamping cylinder is a multi-stroke cylinder. When the optical polishing sheet is not clamped, the guide rod is retracted in the hollow rod, and the output end of the clamping cylinder does not extend. With the cooperation of the clamping cylinder and the rotating shaft, the clamping plate is in an inclined state. When the optical polishing sheet needs to be lowered from the inner plate, when the clamping cylinder pushes the inner shaft outward, since the guide rod is fixed to the rotating shaft and the guide rod is in the hollow rod, the clamping plate can only move outward in an inclined state, and the guide rod moves with the clamping plate through the rotating shaft. When the guide rod moves out of the internal channel of the hollow rod, the clamping cylinder stops working, so that the clamping plate remains in an inclined state. At this time, the slider is located at the end of the slide slot, and the inclined state facilitates the placement of the optical polishing sheet on the two clamping plates. After the optical polishing sheet is placed on the inclined clamping plate, the clamping cylinder works again. Since one end of the guide rod has moved out of the channel of the hollow rod and the slider is located at the end of the slide slot, when the clamping cylinder pushes the clamping plate again, the clamping plate rotates around the center line of the shaft, so that the clamping plate clamps the optical polishing sheet again through the rubber pad. After the optical polishing sheet is inspected, the clamping cylinder pulls the clamping plate to restore the inclined state. After the inner plate absorbs and removes the optical polishing sheet, the clamping plate changes from a vertical state to an inclined state again under the continuous pulling of the clamping cylinder and the influence of the gravity of the guide rod. As the clamping cylinder continues to shrink, the guide rod is finally retracted into the internal channel of the hollow rod.

[0015] A defect detection method for an optical polishing sheet, using a defect detection device for an optical polishing sheet, the detection method comprises the following steps:

[0016] S1, loading;

[0017] S2, using airflow to clean the surface of the optical polishing sheet;

[0018] S3, transfer;

[0019] S4, performing spectral detection on the optical polishing sheet;

[0020] S5. Cutting materials.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] The module mechanism pushes part of the clamping mechanism out of the machine body, and the clamping mechanism connects the optical polishing sheet from the outside of the machine body. After that, the module mechanism cooperates with the clamping mechanism to bring the optical polishing sheet into the machine body, and the detection mechanism performs defect detection on the optical polishing sheet. After the detection is completed, the module mechanism cooperates with the clamping mechanism to send the optical polishing sheet out of the machine body. In addition to clamping the optical polishing sheet, the clamping mechanism also has the function of using gas to clean the surface of the optical polishing sheet. The clamping mechanism uses gas to clean the surface of the optical polishing sheet and blows off the impurities on the surface of the optical polishing sheet, effectively preventing the impurities attached to the surface of the optical polishing sheet from affecting the detection accuracy and detection effect.

[0023] With the cooperation of the horizontal module, vertical module, lead screw and lead screw motor, the clamping plate clamps the optical polishing sheet to move in the XYZ three-axis to achieve comprehensive inspection of the optical polishing sheet. The use of modules and clamping plates instead of manual movement of the optical polishing sheet makes the optical polishing sheet more stable during movement, thereby effectively ensuring the precision and accuracy of the inspection. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a three-dimensional diagram of the overall structure of the present invention;

[0025] Figure 2 A three-dimensional diagram of the module mechanism of the present invention;

[0026] Figure 3 A three-dimensional diagram of the clamping mechanism of the present invention installed on the module mechanism;

[0027] Figure 4 It is an exploded view of the adsorption cleaning part and the clamping detection part of the present invention when they are separated;

[0028] Figure 5 An exploded view of the adsorption cleaning portion of the present invention;

[0029] Figure 6 A half-section diagram of the carrier plate and the inner plate of the present invention when connected;

[0030] Figure 7 A three-dimensional diagram of the connection between the screw rod, the angle plate and the clamping detection part of the present invention;

[0031] Figure 8 It is an exploded view of the clamping detection part of the present invention.

[0032] In the figure: 1. machine body; 2. machine table; 3. detection mechanism; 4. module mechanism; 5. clamping mechanism; 6. clamping plate; 7. hollow rod; 8. clamping cylinder; 9. rotating shaft; 10. slide groove; 11. slider; 12. guide rod; 13. sleeve; 14. inner shaft; 41. horizontal module; 42. vertical module; 43. side plate; 44. screw rod; 51. angle plate; 52. carrier plate; 53. inner plate; 54. cleaning tube; 55. air hole; 56. groove; 57. frame; 58. sealing strip; 59. cover plate; 60. air pipe. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] Example: Figure 1 - Figure 8 As shown, the present invention provides a technical solution, a defect detection device for an optical polishing sheet, comprising a machine table 2 and a detection mechanism 3 for performing spectral detection on the optical polishing sheet, an organic body 1 is installed above the machine table 2, an air supply system for suction and blowing is installed inside the machine table 2 (not shown in the figure), a mounting frame is installed at the top of the inner part of the machine body 1, the detection mechanism 3 is installed below the mounting frame, a module mechanism 4 is also installed above the machine table 2, and a clamping mechanism 5 is installed on the module mechanism 4.

[0035] The module mechanism 4 includes a horizontal module 41 and a guide rail 1 installed on the machine table 2, and a vertical module 42 and a guide rail 2 are installed on the moving block of the horizontal module 41 and the guide rail 1. Two side panels 43 are symmetrically installed on the moving block of the vertical module 42 and the guide rail 2, one of the side panels 43 is installed with a screw 44 and a screw motor, and the other side panel 43 is installed with a moving slide rod.

[0036] The clamping mechanism 5 includes an adsorption cleaning part and a clamping detection part. The adsorption cleaning part performs gas cleaning on the optical polishing sheet and places the cleaned optical polishing sheet on the clamping detection part. The clamping detection part cooperates with the detection mechanism 3 to realize defect detection of the optical polishing sheet.

[0037] The clamping mechanism 5 also includes an angle plate 51 threadedly mounted on the screw rod 44 and slidably mounted on the movable slide rod. The angle plate 51 is threadedly connected to the screw rod 44 through a sliding block. The angle plate 51 is slidably connected to the movable slide rod through a sliding block. The adsorption cleaning part and the clamping detection part are both mounted on the angle plate 51.

[0038] The adsorption cleaning part includes a vertical plate installed on two angle plates 51, a carrier plate 52 is rotatably installed between the two vertical plates through a driving shaft, one end of the driving shaft is connected to a flip motor, and the flip motor is fixed to the vertical plate. A through groove is provided in the middle of the carrier plate 52, and an inner plate 53 is installed in the through groove. A negative pressure groove is provided inwardly on one end surface of the inner plate 53, and an air pipe 60 connected to the negative pressure groove is provided on the other end surface of the inner plate 53, and the air pipe 60 is connected to the air supply system;

[0039] A groove 56 is provided on the outer circle of the negative pressure groove on the other side end face of the inner plate 53, and a plurality of sealing grooves connecting the groove 56 and the negative pressure groove are provided on the one side end face of the inner plate 53. A frame 57 of matching size is installed in the groove 56, and a sealing strip 58 is slidably installed in each sealing groove, and one side of the sealing strip 58 is connected to the frame 57. A cover plate 59 is installed on the groove 56, and a blowing and suction pipe connecting the groove 56 is provided on the cover plate 59, and the blowing and suction pipe is connected to the air supply system.

[0040] Sensors are arranged on both sides of the negative pressure groove, the groove 56, the clamping plate 6, the angle plate 51 and the inner plate 53. The sensors in the negative pressure groove and the groove 56 are air pressure sensors, the sensor on the clamping plate 6 is a pressure sensor, and the sensors on both sides of the clamping plate are distance sensors, which are used to monitor the distance between the clamping plate and the end face of the groove; the data transmitted to the control system by the above sensors is used to determine whether the optical polishing sheet is adsorbed by negative pressure, the air pressure when the optical polishing sheet is adsorbed by negative pressure, and whether the optical polishing sheet is placed on the clamping plate 6. The sensor on the angle plate 51 is a distance sensor, which is used to detect the distance between the upper edge of the clamping plate 6 and the angle plate 51, so that the control system can determine the angle of the clamping plate 6.

[0041] A plurality of “L”-shaped air holes 55 are provided on the carrier plate 52 . The air inlet ends of the plurality of air holes 55 are commonly connected to a cleaning pipe 54 . The cleaning pipe 54 is connected to an air supply system. The air outlet ends of the air holes 55 face the inner plate 53 .

[0042] A card slot is arranged outward from the middle of the through slot, and an integrally formed card plate is arranged at the position of the inner plate 53 corresponding to the card slot, the thickness of the card plate is less than the height of the card slot, and an annular air bag of a bellows structure is arranged at the upper and lower ends of the card slot, and the two air bags are connected through a pipe;

[0043] The flip motor flips the carrier plate 52 180°, so that when the air pipe 60 faces downward, the inner plate 53 avoids the blowing position of the air outlet 55, and the air hole 55 blows air to the optical polishing sheet on the inner plate 53; the flip motor flips the carrier plate 52 180° in the opposite direction, so that when the air pipe 60 faces upward, the inner plate 53 blocks the air hole 55.

[0044] The clamping detection part includes a clamping cylinder 8 installed on two angle plates 51, and a clamping plate 6 is installed on the output end of the clamping cylinder 8, and a rubber pad is arranged on the clamping plate 6. Two hollow rods 7 are symmetrically installed on each angle plate 51, and the hollow rod 7 is located below the clamping cylinder 8. One end of the hollow rod 7 extends outward with an integral "L"-shaped extension plate, and a slide groove 10 is arranged on the hollow rod 7. A guide rod 12 is slidably installed in the hollow rod 7, and a slider 11 is installed at one end of the guide rod 12. The slider 11 is located in the slide groove 10, and a rotating shaft 9 is installed between the two guide rods 12. One end face of the clamping plate 6 is connected to the rotating shaft 9, and a support rod is installed on the angle plate 51 through a support. The support rod is connected to the clamping cylinder 8 through a rotating shaft seat, and the output ends of the two clamping cylinders 8 are commonly connected to an inner shaft 14, and a sleeve 13 is sleeved on the inner shaft 14. The sleeve 13 is connected to the end face of one side of the clamping plate 6, and the length of the guide rod 12 is less than the length of the slide groove 10;

[0045] When the optical polishing sheet is not clamped, the clamping plate 6 is in an inclined state, and when the optical polishing sheet is clamped, the clamping plate 6 is in a vertical state. The clamping cylinder 8 is a multi-stroke cylinder. When the optical polishing sheet is not clamped, the guide rod 12 is retracted in the hollow rod 7, and the output end of the clamping cylinder 8 does not extend. Under the cooperation of the clamping cylinder 8 and the rotating shaft 9, the clamping plate 6 is in an inclined state.

[0046] A defect detection method for an optical polishing sheet, using a defect detection device for an optical polishing sheet, the detection method comprises the following steps:

[0047] S1, loading;

[0048] S2, using airflow to clean the surface of the optical polishing sheet;

[0049] S3, transfer;

[0050] S4, performing spectral detection on the optical polishing sheet;

[0051] S5. Cutting materials.

[0052] The working principle of the present invention is as follows: when the optical polishing sheet is loaded, the screw motor drives the screw 44 to rotate, and the screw 44 cooperates with the moving slide rod to push the angle plate 51 in the direction away from the vertical module 42. During the pushing process, the flip motor flips the carrier plate 52 by 180 degrees, so that the air pipe 60 faces downward, and the loading mechanism or the staff places the optical polishing sheet on the inner plate 53, and the optical polishing sheet is placed in the square area formed by a plurality of sealing grooves. Then the control system makes the negative pressure system work, and draws air through the air pipe 60 and the blowing and suction pipe, and draws air in the groove 56 through the blowing and suction pipe, so that negative pressure is generated in the groove 56. Under the action of the external air pressure, the sealing strip 58 moves together with the frame 57 toward the cover plate 59, so that the sealing groove is opened, and the external air flows into the negative pressure groove through the sealing groove. In the process of air flow, the surface cleaning of the end face of one side of the optical polishing sheet is achieved;

[0053] When the air tube 60 is facing downward, the inner plate 53 moves downward in the slot under the influence of its own gravity and the air tube 60, blowing and suction tubes and other structures, and gradually compresses the airbag below during the movement, and the gas inside the lower airbag gradually moves to the upper airbag. When the lower airbag cannot be compressed, the inner plate 53 avoids the blowing position of the air outlet 55, and the air supply system injects gas into the air hole 55 through the cleaning tube 54, so that part of the gas is blown onto the other side surface of the optical polishing sheet through the air hole 55, and the other part of the gas is sucked into the negative pressure tank.

[0054] In the process of using gas to clean the optical polishing sheet, the screw motor pulls the angle plate 51 back through the screw 44 and the movable slide rod, so that the clamping detection part on the angle plate 51 is directly below the detection mechanism 3. After the clamping detection part is in place, the air supply system stops injecting gas into the cleaning tube 54 and stops extracting air from the air pipe 60 and the blowing and suction pipe. Then, the air supply system injects gas into the blowing and suction pipe to increase the air pressure in the groove 56, so that the frame 57 pushes the sealing strip 58 back into the sealing groove and seals the sealing groove, so that the negative pressure groove cannot extract external air through the sealing groove. After that, the air supply system uses the air pipe 60 to extract the air in the negative pressure groove again, so that the optical polishing sheet is adsorbed on the inner plate 53 by the negative pressure. After the negative pressure reaches a certain pressure, the air supply system stops extracting air and closes the pipeline through the valve. At this time, the flip motor flips the carrier plate 52 180° in the opposite direction, so that the air tube 60 faces upward. Under the influence of its own gravity, the air tube 60, the blowing and suction tubes and the gravity of the optical polishing sheet, the inner plate 53 compresses the lower air bag, that is, the expanded air bag when the air tube 60 faces downward, so that the gas in the lower air bag gradually flows into the upper air bag. During the flow of gas in the air bag, the inner plate 53 gradually descends. By setting the air bag, the descending speed of the inner plate 53 is slowed down to achieve the buffering purpose. When the lower air bag cannot be compressed, one end of the inner plate 53 that adsorbs the optical polishing sheet protrudes from the carrier plate 52, making it convenient to place the optical polishing sheet on the clamping plate 6.

[0055] When the optical polishing sheet needs to be lowered from the inner plate 53, when the clamping cylinder 8 pushes the inner shaft 14 outward, since the guide rod 12 is fixed to the rotating shaft 9 and the guide rod 12 is in the hollow rod 7, the clamping plate 6 can only move outward in an inclined state, and the guide rod 12 moves with the clamping plate 6 through the rotating shaft 9. When the guide rod 12 moves out of the internal channel of the hollow rod 7, the clamping cylinder 8 stops working, so that the clamping plate 6 remains in an inclined state. At this time, the slider 11 is located at the end of the slide groove 10, and the optical polishing sheet is conveniently placed on the two clamping plates 6 through the inclined state. After the optical polishing sheet is placed on the clamping plate 6 in an inclined state, the valve on the air supply system pipeline is opened, and the air supply system injects gas into the negative pressure tank to relieve pressure, so that the optical polishing sheet is smoothly placed on the clamping plate 6. After the optical polishing sheet is placed, the flip motor flips the carrier plate 52 180° again, and waits for the optical polishing sheet that has been adsorbed and picked up for inspection.

[0056] After the optical polishing sheet is placed, the clamping cylinder 8 works again. Since one end of the guide rod 12 has moved out of the channel of the hollow rod 7 and the slider 11 is located at the end of the slide groove 10, when the clamping cylinder 8 pushes the clamping plate 6 again, the clamping plate 6 rotates around the center line of the rotating shaft, so that the clamping plate 6 clamps the optical polishing sheet again through the rubber pad.

[0057] Under the cooperation of the horizontal module 41, the vertical module 42, the lead screw 44 and the lead screw motor, the clamping plate 6 clamps the optical polishing sheet and performs XYZ three-axis movement to achieve comprehensive detection of the optical polishing sheet.

[0058] When the optical polishing sheet is detected, the clamping cylinder 8 pulls the clamping plate 6 to restore the inclined state and release the clamped optical polishing sheet. After that, the flipping motor flips the carrier plate 52 180° and negatively adsorbs the optical polishing sheet through the inner plate 53. Then the flipping motor flips the carrier plate 52 180° in the opposite direction again. After the inner plate 53 adsorbs and removes the optical polishing sheet, under the continuous pulling of the clamping cylinder 8 and the influence of the gravity of the guide rod 12, the clamping plate 6 changes from the vertical state to the inclined state again. As the clamping cylinder 8 continues to contract, the guide rod 12 is finally retracted into the internal channel of the hollow rod 7.

[0059] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

Claims

1. A defect detection device for an optical polishing sheet, comprising a machine platform (2) and a detection mechanism (3) for performing spectral detection on the optical polishing sheet, wherein a body (1) is installed above the machine platform (2), an air supply system for suction and blowing is installed inside the machine platform (2), a mounting frame is installed at the top of the body (1), and the detection mechanism (3) is installed below the mounting frame, characterized in that: A module mechanism (4) is also installed above the machine platform (2), a clamping mechanism (5) is installed on the module mechanism (4), and a screw rod (44) and a movable slide rod are installed on the module mechanism (4); The clamping mechanism (5) comprises an adsorption cleaning part and a clamping detection part, the adsorption cleaning part performs gas cleaning on the optical polishing sheet and places the cleaned optical polishing sheet on the clamping detection part, and the clamping detection part cooperates with the detection mechanism (3) to realize defect detection on the optical polishing sheet; The clamping mechanism (5) further comprises an angle plate (51) threadedly mounted on the screw rod (44) and slidably mounted on the movable slide rod; The adsorption cleaning part comprises a vertical plate mounted on two corner plates (51), a carrier plate (52) which can be turned 180 degrees around a horizontal axis is mounted between the two vertical plates, a through groove is arranged in the middle of the carrier plate (52), and an air pipe (60) connected to an air supply system is arranged in the through groove; The clamping detection part comprises a clamping cylinder (8) mounted on two angle plates (51), a clamping plate (6) being mounted on the output end of the clamping cylinder (8), and a rubber pad being arranged on the clamping plate (6); A carrier plate (52) is rotatably mounted between the two vertical plates via a drive shaft, one end of the drive shaft is connected to a flip motor, the flip motor is fixed to the vertical plate, an inner plate (53) is mounted in the through groove, a negative pressure groove is provided inwardly on one end surface of the inner plate (53), and an air pipe (60) is connected to the negative pressure groove; The other end surface of the inner plate (53) is provided with a groove (56) on the outer ring of the negative pressure groove, and a plurality of sealing grooves connecting the groove (56) and the negative pressure groove are provided on one end surface of the inner plate (53), a frame (57) of suitable size is installed in the groove (56), a sealing strip (58) is slidably installed in each of the sealing grooves, one side of the sealing strip (58) is connected to the frame (57), a cover plate (59) is installed on the groove (56), and a blowing and suction pipe connecting the groove (56) is provided on the cover plate (59), and the blowing and suction pipe is connected to the air supply system; The carrier plate (52) is provided with a plurality of "L"-shaped air holes (55), the air inlet ends of the plurality of air holes (55) are commonly connected to a cleaning pipe (54), the cleaning pipe (54) is connected to an air supply system, and the air outlet ends of the air holes (55) face the inner plate (53).

2. A defect detection device for optical polishing sheets according to claim 1, characterized in that: The module mechanism (4) comprises a horizontal module (41) and a guide rail 1 mounted on the machine platform (2); a vertical module (42) and a guide rail 2 are mounted on the moving blocks of the horizontal module (41) and the guide rail 1; two side plates (43) are symmetrically mounted on the moving blocks of the vertical module (42) and the guide rail 2; a lead screw (44) and a lead screw motor are mounted on one of the side plates (43); and a moving slide rod is mounted on the other side plate (43).

3. A defect detection device for optical polishing sheets according to claim 1, characterized in that: A card slot is arranged outward from the middle of the through slot, and an integrally formed card plate is arranged at a position corresponding to the card slot on the inner plate (53), the thickness of the card plate is smaller than the height of the card slot, and an annular air bag with a bellows structure is arranged at the upper and lower ends of the card slot, and the two air bags are connected through a pipe; The flip motor flips the carrier plate (52) by 180°, so that when the air pipe (60) faces downward, the inner plate (53) avoids the blowing position of the air outlet hole (55), and the air hole (55) blows air to the optical polishing sheet on the inner plate (53); the flip motor flips the carrier plate (52) by 180° in the opposite direction, so that when the air pipe (60) faces upward, the inner plate (53) blocks the air hole (55).

4. A defect detection device for optical polishing sheets according to claim 1, characterized in that: Two hollow rods (7) are symmetrically mounted on each of the angle plates (51). The hollow rods (7) are located below the clamping cylinder (8). One end of the hollow rods (7) is provided with an integral "L"-shaped extension plate extending outward. A slide groove (10) is provided on the hollow rods (7). A guide rod (12) is slidably mounted in the hollow rods (7). A slider (11) is mounted at one end of the guide rod (12). The slider (11) is located in the slide groove (10). The two guide rods (12) A rotating shaft (9) is installed between the two clamping plates (6), one end face of the clamping plate (6) is connected to the rotating shaft (9), a support rod is installed on the angle plate (51) via a support, the support rod is connected to the clamping cylinder (8) via a rotating shaft seat, the output ends of the two clamping cylinders (8) are commonly connected to an inner shaft (14), a sleeve (13) is sleeved on the inner shaft (14), the sleeve (13) is connected to one end face of the clamping plate (6), and the length of the guide rod (12) is less than the length of the slide groove (10); When the optical polishing sheet is not clamped, the clamping plate (6) is in an inclined state, and when the optical polishing sheet is clamped, the clamping plate (6) is in a vertical state.

5. A defect detection method for an optical polishing sheet, characterized in that: Using a defect detection device for an optical polishing sheet according to any one of claims 1 to 4, the detection method comprises the following steps: S1, loading; S2, using airflow to clean the surface of the optical polishing sheet; S3, transfer; S4, performing spectral detection on the optical polishing sheet; S5. Cutting materials.

Images