An etching device and method for semiconductor lead frame processing

Abstract

The present invention relates to the technical field of lead frame processing equipment, and specifically discloses an etching device for semiconductor lead frame processing, which includes a main body structure, a conveying structure, a carrying unit, a flow dividing valve pipe, and several spraying structures. The present invention has the advantages of convenient guide wheel maintenance and easy cleaning of the inner wall of the equipment, which helps to keep the interior of the equipment clean and avoid affecting the performance of the equipment due to the accumulation of dirt on the inner wall. The length of the equipment can be spliced and extended according to requirements, and the spraying and etching adaptability is strong. The number and layout of the spraying structures can be flexibly adjusted according to the actual different product sizes and etching requirements. At the same time, the width of the carrying unit is adjustable and the cooperation with the spraying structure can set the nozzles on the spray pipe to spray downward from above the second guide wheel or upward from below the second guide wheel for different etching times and methods to meet different etching process requirements.

Description

Technical Field

[0001] The present invention relates to the technical field of lead frame processing equipment, and specifically to an etching device and method for semiconductor lead frame processing. Background Art

[0002] As a chip carrier for integrated circuits, a lead frame is a key structural component that realizes the electrical connection between the internal circuit leads of a chip and the external leads by means of a bonding material to form an electrical loop. It serves as a bridge for connecting to external wires. The lead frame is processed by etching to form a wire structure with specific shapes and sizes on the conductive layer, thereby realizing the processing technology of circuit connection;

[0003] Existing etching equipment mostly only realizes etching through single conveyance and spraying; moreover, the spraying mechanism and the conveyance structure cannot be adjusted and disassembled, which is inconvenient for maintenance during use, and can only realize spraying etching in a single direction; at the same time, during maintenance, it is not conducive to wiping the conveying rollers and cleaning the inner wall of the equipment, where etching solution or impurities are likely to remain. If not cleaned regularly and effectively, it is easy to cause changes in the etching lines or scratching of the surface of the lead frame. When the etched frame breaks and falls below the rollers, it is also inconvenient to take out. Therefore, an etching device and method for semiconductor lead frame processing are now designed. Summary of the Invention

[0004] The purpose of the present invention is to provide an etching device and method for semiconductor lead frame processing to solve the problems raised in the above background art.

[0005] To achieve the above solution, the present invention provides the following technical solution: An etching device for semiconductor lead frame processing, including a main body structure, a conveying structure, a carrying unit, a flow dividing valve pipe, and a plurality of spraying structures; the conveying structure is detachably arranged inside the main body structure, the carrying unit is detachably arranged inside the main body structure and is located above the conveying structure, the flow dividing valve pipe is movably arranged inside the conveying structure, and a plurality of valves are equidistantly arranged on the flow dividing valve pipe. A plurality of the spraying structures are detachably arranged on the carrying unit and are respectively connected to the flow dividing valve pipe through pipelines.

[0006] Preferably, the main body structure includes an etching tank, a rear cover, a control panel, a liquid pump, a front baffle, a pair of docking components, a pair of flipping units, and a tank cover; the etching tank is a box body without an upper wall, and conveying ports are provided near the middle of the left and right side walls of the etching tank, a cleaning port is opened near the middle of the front side wall of the etching tank, a driving port is opened near the middle of the rear side wall of the etching tank, the rear cover is detachably buckled at the driving port position on the rear side of the etching tank, the control panel is fixedly arranged on the front side wall of the etching tank and above the cleaning port, the liquid pump is fixedly arranged on the lower wall of the etching tank, and a first pipeline penetrating the left side wall of the etching tank is arranged at the liquid inlet end of the liquid pump, the front baffle is detachably buckled at the cleaning port position and fixed by bolts, a first handle is arranged in the middle of the front side wall of the front baffle, a pair of the docking components are respectively detachably arranged at the conveying port positions of the etching tank, a pair of the flipping units are respectively detachably arranged on the rear side wall of the etching tank and symmetrically arranged near the top, the tank cover is a convex frame structure, and a glass plate is embedded in the middle of the upper wall of the tank cover, the tank cover is movably buckled above the etching tank, and the tank cover is respectively connected to the flipping units.

[0007] Preferably, the docking component includes a docking frame, a sealing plate, a first shaft rod, and a plurality of first guide wheels; the docking frame is a concave structure, and vertical edges are provided in the middle of the upper and lower side walls, the docking frame is detachably embedded in the conveying port of the etching tank, and the vertical edges are attached to the side wall of the etching tank, the sealing plate is detachably buckled between the two ends of the docking frame, and the sealing plate fits with the docking frame, one end of the sealing plate is movably inserted into the conveying port, the two ends of the first shaft rod are respectively movably inserted between the docking frame and the sealing plate, a plurality of the first guide wheels are respectively equidistantly sleeved on the first shaft rod, and the first guide wheels are located in the middle of the docking frame.

[0008] Preferably, the flipping unit includes a flipping seat, a push-pull rod, and a flipping arm; the flipping seat is concave, the flipping seat is detachably arranged on the rear side wall of the etching tank, and first shaft holes are opened in the middle of both ends of the flipping seat, a cross-shaped locking groove communicating with the first shaft hole is opened at one end of the flipping seat, the push-pull rod movably penetrates through the first shaft holes at both ends of the flipping seat, and blocking pieces are arranged at both ends of the push-pull rod, a handle is arranged at one end of the push-pull rod, locking edges fitting with the cross-shaped locking groove are arranged on the front and rear sides of the middle of the push-pull rod, and the locking edges are inserted into both ends of the cross-shaped locking groove, the length of the locking edge is greater than the width of one end of the flipping seat, the flipping arm is L-shaped, and a second shaft hole is opened in the middle of one end of the flipping arm, an elongated locking groove communicating with each other is opened on the front and rear sides of the second shaft hole, one end of the flipping arm is movably sleeved on the push-pull rod, and the elongated locking groove is sleeved on the locking edge, and the other end of the flipping arm is fixedly connected to the rear side wall of the tank cover.

[0009] Preferably, the conveying structure includes a carrying box, a drain pipe, an adapter pipe, a plurality of bearings, a plurality of shaft seats, a plurality of second shaft rods, a plurality of second guide wheels, a motor, a plurality of double-groove pulleys and a plurality of belts; the carrying box is a box body without an upper wall, and a pickup port corresponding to the cleaning port is provided on the front side wall of the carrying box. Vertical plates are arranged along the upper wall edges at both the front and rear ends of the carrying box. The carrying box is detachably installed in the etching tank, and the pickup port and the cleaning port are fitted together. The upper wall edge of the carrying box and the inner lower wall of the conveying port are on the same horizontal line. The carrying box is fixed by bolts passing through the vertical plates, and the carrying box is located above the liquid pump. One end of the drain pipe is fixed to the middle of the lower wall of the carrying box, and the other end of the drain pipe penetrates the bottom of the left side wall of the etching tank. One end of the adapter pipe is fixedly penetrated through the lower wall of the carrying box, and the other end of the adapter pipe is connected to the liquid outlet end of the liquid pump. A plurality of the bearings are respectively installed in the vertical plates at equal intervals, and the centers of the bearings correspond to both ends of the second shaft rod. One end of each of the plurality of shaft seats is a round rod structure, and the other end is a rectangular rod body structure. One end of each shaft seat is respectively fixedly penetrated through the middle of the bearing above the rear side wall of the carrying box and is located inside the rear cover. A U-shaped groove communicating with the upper wall is provided in the middle of the front side wall of the other end of the shaft seat, and arc-shaped grooves communicating with each other are provided on both the left and right sides of the U-shaped groove. The front and rear ends of the plurality of second shaft rods are movably connected to each other, and both ends of the second shaft rod are relatively flipped. One end of the second shaft rod is fixedly inserted into the bearing above the front side wall of the carrying box, and the other end is movably installed in the U-shaped groove of the shaft seat. Twist blocks are arranged on both the left and right sides of the other end of the second shaft rod, and the twist blocks are movably installed in the arc-shaped grooves. A plurality of the second guide wheels are the same as the first guide wheels. A plurality of the second guide wheels are respectively sleeved on the second shaft rods at equal intervals, and the upper walls of the second guide wheels and the upper walls of the first guide wheels are on the same horizontal plane. The motor is fixedly arranged on the lower wall inside the rear cover, and the motor is located below one of the shaft seats. A plurality of the double-groove pulleys are respectively fixedly sleeved on the driving end of the motor and one end of the shaft seat. Both ends of the plurality of belts are alternately sleeved between the double-groove pulleys, and the double-groove pulleys are connected in series by the belts and rotate in the same direction.

[0010] Preferably, the carrying unit includes a carrying plate, a pair of carrying seats, two pairs of adjusting bolts and two pairs of adjusting nuts; the carrying plate is rectangular, and a first adjusting groove is penetrated through the middle of the carrying plate. Second adjusting grooves are symmetrically provided on both sides of the first adjusting groove. Both of the pair of carrying seats are L-shaped, and first adjusting ports corresponding to the first adjusting groove are respectively provided at one ends of the carrying seats. One ends of the pair of carrying seats are respectively movably placed below both ends of the carrying plate and are symmetric to each other. The other ends of the pair of carrying seats are respectively detachably placed on the front and rear side walls inside the etching tank. One ends of the two pairs of adjusting bolts respectively movably penetrate through the two corner parts of one end of the carrying seat, and one ends of the adjusting bolts movably penetrate through the second adjusting ports. The two pairs of adjusting nuts are respectively movably screwed on the adjusting bolts.

[0011] Preferably, in order to meet the actual etching spray requirements, the carrier seat in the carrier unit moves a certain distance on the carrier plate to adjust the length, so that the carrier unit can be detachably installed between the front and rear side walls of the etching chamber or between the front and rear side walls of the carrier box, for adjusting the upward or downward spraying of the nozzles and adjusting according to the actual etching time or the use requirements of double-sided etching.

[0012] Preferably, the spraying structure includes a locking assembly, a spray pipe, and a plurality of nozzles; the locking assembly is movably installed on the carrier plate, the spray pipe is detachably installed on the locking assembly, and one end of the spray pipe is connected to the shunt valve pipe, and a plurality of the nozzles are respectively detachably installed on the lower wall of the spray pipe at equal intervals; the locking assembly includes a locking table, a fastening screw, a pressing rod, a finger rod, a spring, and a locking rod; the locking table is a convex structure, and a socket groove is opened on the upper wall of the middle part of the locking table near the rear end, the locking table is detachably installed on the carrier plate, and the socket groove is sleeved on the spray pipe and located between two nozzles, an installation cavity communicating with the front side wall is opened in the top end of the locking table, a locking hole is opened on the upper wall of the front end of the locking table, the inner diameter of the locking hole is larger than the diameter at the locking hole part, and fitting ports communicating with each other are opened on both sides of the locking hole, the fastening screw movably penetrates through the first adjustment groove and is screwed into the lower wall of the locking table, the pressing rod is L-shaped, one end of the pressing rod movably penetrates through the upper wall of the locking table and is located in the middle of the installation cavity, the other end of the pressing rod is located above the middle of the socket groove and is attached to the upper wall of the locking table, one end of the finger rod is fixedly arranged in the middle of the pressing rod and one end of the finger rod movably penetrates through the front side wall of the installation cavity, the spring is movably sleeved on one end of the pressing rod and is located between one end of the finger rod and the lower wall of the installation cavity, one end of the locking rod movably penetrates through the other end of the finger rod, and fitting blocks corresponding to the fitting ports are symmetrically arranged at the other end of the locking rod, and the fitting blocks movably penetrate through the locking hole and then rotate to lock.

[0013] A usage method of an etching device for semiconductor lead frame processing includes the following steps:

[0014] Step 1: The lead frame is moved through the docking assembly from one side of the main structure by an existing conveying device and is continuously conveyed and moved by the conveying structure;

[0015] Step 2: During the movement of the lead frame in the etching chamber through the conveying structure, the etching liquid is supplied by the liquid pump and sprayed out from the nozzles in the spraying structure to contact the lead frame to process and etch the corresponding parts, and then it moves out from the other side of the main structure;

[0016] Step 3: According to the etching requirements, with the help of the carrier unit, it is installed above the second guide wheel in the etching chamber or placed below the second guide wheel in the carrier box for spraying use with different etching times, and the corresponding locking assembly is used to facilitate setting different numbers and spacings of spray pipes to set the spraying range requirements according to actual needs;

[0017] Step 4: During maintenance, by opening the box cover, it is convenient to clean and wipe the second guide wheel and to clean the inner wall of the carrier box or pick up the materials that have fallen due to conveying movement;

[0018] Step 5: The flipping unit facilitates the locking and fixing after the box cover is opened or closed.

[0019] An etching device and method for semiconductor lead frame processing proposed by the present invention have the following beneficial effects: Through the simple design of the connection and disassembly structure in this solution, the second guide wheel for internal conveying can be flipped and disassembled by means of the second shaft rod, which is convenient for wiping and maintenance and cleaning the inner wall of the equipment; Through the docking component, the equipment can be spliced to extend the use of the production line; Through the bearing unit, it can fit the width of the inner wall of the equipment, and multiple spraying structures can be installed according to requirements for spraying and etching use, with more adaptability; At the same time, through the adjustable width of the bearing unit and the cooperation with the spraying structure, it is possible to set the nozzles on the spray pipe to spray downward above the second guide wheel or upward from below the guide wheel according to requirements, for different spraying and etching times and methods; And through the detachable bearing unit and spraying structure, it further ensures the convenient maintenance and replacement adjustment of the equipment; Finally, if there is a situation where materials fall through the second guide wheel during the conveying process, it is also convenient to pick them up after stopping the machine, so as to achieve the following effects:

[0020] 1. Convenient guide wheel maintenance: The second guide wheel for internal conveying can be flipped and disassembled by means of the second shaft rod, improving the convenience of wiping and maintaining the guide wheel. Since the guide wheel in traditional equipment is difficult to disassemble and clean, while the guide wheel in the present invention can be easily disassembled, the cleaning work is more thorough. After the guide wheel has been used for a period of time, its surface may be contaminated with impurities during the etching process, and it can be easily disassembled for comprehensive wiping, reducing the impact of impurities on the rotation of the guide wheel and product conveying.

[0021] 2. Convenient cleaning of the inner wall of the equipment: The flip - up and disassembly of the guide wheel not only facilitates its own maintenance but also provides convenience for cleaning the inner wall of the equipment. After the guide wheel is disassembled, it is easier to reach the inner wall of the equipment to remove dirt, etching residues, etc. on the inner wall, which helps to keep the inside of the equipment clean and avoid affecting the performance of the equipment due to the accumulation of dirt on the inner wall, especially for etching liquid with viscosity.

[0022] 3. Overall equipment maintainability: The detachable design of the bearing unit and the spraying structure further ensures the convenient maintenance of the equipment. When the spraying structure is blocked, damaged or the nozzle position needs to be adjusted, etc., it can be easily disassembled for repair or replacement, which reduces the difficulty and time cost of equipment maintenance and improves the overall maintenance efficiency of the equipment.

[0023] 4. Scalability of the production line: Through the docking component, the equipment is promoted to be spliced to extend the use of the production line, which makes the production line have strong scalability.

[0024] 5. Strong adaptability of spray etching: The carrier unit can fit the width of the inner wall of the equipment and multiple spray structures can be installed according to requirements for spray etching, with more adaptability. The number and layout of the spray structures can be flexibly adjusted according to different product sizes and etching requirements.

[0025] 6. Diversity of etching methods: The adjustable width of the carrier unit and its cooperation with the spray structure enable the nozzles on the spray pipe to be set to spray downward from above the second guide wheel or upward from below the second guide wheel according to requirements, for different etching times and methods (spraying the etching solution upward will not cause the solution to stay on the material for a long time, thus shortening the time); this flexibility can meet different etching process requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic assembly structure diagram of the present invention;

[0027] Figure 2 It is a schematic display structure diagram of the combined use of the present invention;

[0028] Figure 3 It is a schematic assembly structure diagram of the main body structure of the present invention;

[0029] Figure 4 It is a schematic assembly structure diagram of the conveying structure of the present invention;

[0030] Figure 5 It is a schematic assembly structure diagram of the spray structure of the present invention;

[0031] Figure 6 It is a schematic disassembly structure diagram of the main body structure of the present invention;

[0032] Figure 7 It is a schematic disassembly structure diagram of the conveying structure of the present invention;

[0033] Figure 8 It is a schematic enlarged display structure diagram of the disassembly of the carrier unit of the present invention;

[0034] Figure 9 It is a schematic enlarged display structure diagram of the disassembly of the spray structure of the present invention;

[0035] Figure 10 It is a schematic enlarged display structure diagram of the disassembly of the flipping unit of the present invention;

[0036] Figure 11 It is a schematic enlarged display structure diagram of the assembly of the flipping unit of the present invention;

[0037] Figure 12 For the present invention Figure 6 Partial enlarged view at A in;

[0038] Figure 13 For the present invention Figure 7 Partial enlarged view at position B in the present invention;

[0039] Figure 14 For the present invention Figure 7 Partial enlarged view at position C in the present invention;

[0040] Figure 15 For the present invention Figure 7 Partial enlarged view at position D in the present invention.

[0041] In the figure: 1. Main body structure, 11. Etching box, 12. Rear cover, 13. Control panel, 14. Liquid pump, 15. Front baffle, 16. Docking component, 161. Docking frame, 162. Sealing plate, 163. First shaft rod, 164. First guide wheel, 17. Flipping unit, 171. Flipping seat, 172. Push-pull rod, 173. Flipping arm, 18. Box cover, 2. Conveying structure, 21. Carrying box, 22. Drain pipe, 23. Adapter pipe, 24. Bearing, 25. Shaft seat, 26. Second shaft rod, 27. Second guide wheel, 28. Motor, 29. Double-groove pulley, 20. Belt, 3. Carrying unit, 31. Carrying plate, 32. Carrying seat, 33. Adjusting bolt, 34. Adjusting nut, 4. Diverting valve pipe, 5. Spraying structure, 51. Locking component, 511. Locking platform, 512. Tightening screw, 513. Pressing rod, 514. Finger rod, 515. Spring, 516. Locking rod, 52. Nozzle pipe, 53. Nozzle, 61. Conveying port, 62. Cleaning port, 63. Driving port, 71. Picking port, 72. U-shaped groove, 73. Arc-shaped groove, 74. Torsion block, 75. Vertical plate, 81. First adjusting groove, 82. Second adjusting groove, 83. First adjusting opening, 91. Installation cavity, 92. Sleeve groove, 93. Locking hole, 101. Cross-shaped locking groove, 102. Linear locking groove. Detailed implementation manners

[0042] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0043] Please refer to Figures 1-15, the present invention provides a technical solution: an etching device for semiconductor lead frame processing, including a main body structure 1, a conveying structure 2, a carrying unit 3, a flow dividing valve pipe 4, and a plurality of spraying structures 5; the conveying structure 2 is detachably installed in the main body structure 1, the carrying unit 3 is detachably installed in the main body structure 1 and is located above the conveying structure 2, the flow dividing valve pipe 4 is movably installed in the conveying structure 2 and a plurality of valves are equidistantly arranged on the flow dividing valve pipe 4, and the plurality of spraying structures 5 are detachably installed on the carrying unit 3 and are respectively connected to the flow dividing valve pipe 4 through pipelines.

[0044] As a further solution of the present invention, the main body structure 1 includes an etching tank 11, a rear cover 12, a control panel 13, a liquid pump 14, a front baffle 15, a pair of docking components 16, a pair of flipping units 17, and a tank cover 18; the etching tank 11 is a box body without an upper wall, and conveying ports 61 are provided near the middle of the left and right side walls of the etching tank 11, a cleaning port 62 is opened near the middle of the front side wall of the etching tank 11, a driving port 63 is opened near the middle of the rear side wall of the etching tank 11, the rear cover 12 is detachably buckled at the driving port 63 at the rear side of the etching tank 11, the control panel 13 is fixedly arranged on the front side wall of the etching tank 11 and is located above the cleaning port 62, the liquid pump 14 is fixedly arranged on the lower wall of the etching tank 11, and a first pipeline penetrating the left side wall of the etching tank 11 is arranged at the liquid inlet end of the liquid pump 14, the front baffle 15 is detachably buckled at the cleaning port 62 and is fixed by bolts, a first handle is arranged in the middle of the front side wall of the front baffle 15, a pair of docking components 16 are respectively detachably installed at the conveying ports 61 of the etching tank 11, a pair of flipping units 17 are respectively detachably arranged on the rear side wall of the etching tank 11 and are symmetrically arranged near the top, the tank cover 18 is a convex frame structure, and a glass plate is embedded in the middle of the upper wall of the tank cover 18, the tank cover 18 is movably buckled above the etching tank 11, and the tank cover 18 is respectively connected to the flipping units 17.

[0045] As a further solution of the present invention, the docking component 16 includes a docking frame 161, a sealing plate 162, a first shaft rod 163, and a plurality of first guide wheels 164; the docking frame 161 is a concave structure, and vertical edges are provided in the middle of the upper and lower side walls, the docking frame 161 is detachably embedded in the conveying port 61 of the etching tank 11, and the vertical edges are attached to the side wall of the etching tank 11, the sealing plate 162 is detachably buckled between the two ends of the docking frame 161, and the sealing plate 162 fits with the docking frame 161, one end of the sealing plate 162 is movably inserted into the conveying port 61, the two ends of the first shaft rod 163 are respectively movably inserted between the docking frame 161 and the sealing plate 162, and a plurality of first guide wheels 164 are respectively equidistantly sleeved on the first shaft rod 163, and the first guide wheels 164 are located in the middle of the docking frame 161.

[0046] As a further solution of the present invention, the flipping unit 17 includes a flipping base 171, a push-pull rod 172, and a flipping arm 173; the flipping base 171 is concave, the flipping base 171 is detachably installed on the rear side wall of the etching tank 11, and first shaft holes are formed in the middle of both ends of the flipping base 171. A cross-shaped locking groove 101 communicating with the first shaft hole is formed at one end of the flipping base 171. The push-pull rod 172 movably penetrates through the first shaft holes at both ends of the flipping base 171, and blocking pieces are arranged at both ends of the push-pull rod 172. A handle is arranged at one end of the push-pull rod 172. Lock edges that fit with the cross-shaped locking groove 101 are arranged on the front and rear sides of the middle of the push-pull rod 172, and the lock edges are inserted into both ends of the cross-shaped locking groove 101. The length of the lock edge is greater than the width of one end of the flipping base 171. The flipping arm 173 is L-shaped, and a second shaft hole is formed in the middle of one end of the flipping arm 173. An elongated slot communicating with each other is formed on the front and rear sides of the second shaft hole. One end of the flipping arm 173 is movably sleeved on the push-pull rod 172, and the elongated slot 102 is sleeved on the lock edge. The other end of the flipping arm 173 is fixedly connected to the rear side wall of the box cover 18

[0047] As a further solution of the present invention, the conveying structure 2 includes a carrier box 21, a drain pipe 22, a transfer pipe 23, a plurality of bearings 24, a plurality of shaft seats 25, a plurality of second shaft rods 26, a plurality of second guide wheels 27, a motor 28, a plurality of double-groove pulleys 29 and a plurality of belts 20; the carrier box 21 is a box body without an upper wall, and a pickup port 71 corresponding to the cleaning port 62 is provided on the front side wall of the carrier box 21. Vertical plates 75 are provided along the upper wall edges at both the front and rear ends of the carrier box 21. The carrier box 21 is detachably installed in the etching tank 11, and the pickup port 71 and the cleaning port 62 are relatively fitted. The upper wall edge of the carrier box 21 and the lower wall inside the conveying port 61 are on the same horizontal line. The carrier box 21 is fixed by bolts passing through the vertical plates 75, and the carrier box 21 is located above the liquid pump 14. One end of the drain pipe 22 is fixed to the middle inside the lower wall of the carrier box 21, and the other end of the drain pipe 22 penetrates through the bottom of the left side wall of the etching tank 11. One end of the transfer pipe 23 is fixedly penetrated through the lower wall of the carrier box 21, and the other end of the transfer pipe 23 is connected to the liquid outlet end of the liquid pump 14. A plurality of bearings 24 are respectively equidistantly installed in the vertical plates 75, and the centers of the bearings 24 correspond to both ends of the second shaft rod 26. One end of each of the plurality of shaft seats 25 is a round rod structure, and the other end is a rectangular rod body structure. One end of each shaft seat 25 is fixedly penetrated through the middle of the bearing 24 above the rear side wall of the carrier box 21 and is located inside the rear cover 12. A U-shaped groove 72 communicating with the upper wall is provided in the middle of the front side wall of the other end of the shaft seat 25, and arc-shaped grooves 73 communicating with each other are provided on both the left and right sides of the U-shaped groove 72. The front and rear ends of a plurality of second shaft rods 26 are relatively movably connected, and both ends of the second shaft rod 26 are relatively flipped. One end of the second shaft rod 26 is fixedly inserted into the bearing 24 above the front side wall of the carrier box 21, and the other end is movably installed in the U-shaped groove 72 of the shaft seat 25. Twisting blocks 74 are provided on both the left and right sides of the other end of the second shaft rod 26, and the twisting blocks 74 are movably installed in the arc-shaped grooves 73. A plurality of second guide wheels 27 are the same as the first guide wheels 164. A plurality of second guide wheels 27 are respectively equidistantly sleeved on the second shaft rods 26, and the upper walls of the second guide wheels 27 and the upper walls of the first guide wheels 164 are on the same horizontal plane. The motor 28 is fixedly installed on the lower wall inside the rear cover 12, and the motor 28 is located below one of the shaft seats 25. A plurality of double-groove pulleys 29 are respectively fixedly sleeved on the driving end of the motor 28 and one end of the shaft seat 25. Both ends of a plurality of belts 20 are alternately sleeved between the double-groove pulleys 29, and the double-groove pulleys 29 are connected in series by the belts 20 and rotate in the same direction.

[0048] As a further solution of the present invention, the bearing unit 3 includes a bearing plate 31, a pair of bearing seats 32, two pairs of adjusting bolts 33 and two pairs of adjusting nuts 34; the bearing plate 31 is rectangular, and a first adjusting groove 81 is formed through the middle of the bearing plate 31, and second adjusting grooves 82 are symmetrically formed on both sides of the first adjusting groove 81. Both of the pair of bearing seats 32 are L-shaped, and a first adjusting opening 83 corresponding to the first adjusting groove 81 is formed at one end of each bearing seat 32. One ends of the pair of bearing seats 32 are respectively movably arranged below both ends of the bearing plate 31 and are symmetric to each other, and the other ends of the pair of bearing seats 32 are respectively detachably arranged on the front and rear side walls inside the etching tank 11. One ends of the two pairs of adjusting bolts 33 respectively movably penetrate through the two corner parts at one end of the bearing seat 32, and one end of the adjusting bolt 33 movably penetrates through the second adjusting opening. The two pairs of adjusting nuts 34 are respectively movably screwed on the adjusting bolts 33.

[0049] As a further solution of the present invention, the spraying structure 5 includes a locking component 51, a spray pipe 52 and a plurality of spray heads 53; the locking component 51 is movably arranged on the bearing plate 31, the spray pipe 52 is detachably arranged on the locking component 51, and one end of the spray pipe 52 is connected to the flow dividing valve pipe 4. The plurality of spray heads 53 are respectively detachably arranged at equal intervals on the lower wall of the spray pipe 52;

[0050] The locking component 51 includes a locking platform 511, a fastening screw 512, a pressing rod 513, a finger rod 514, a spring 515 and a locking rod 516; the locking platform 511 is of a convex structure, and a sleeve groove 92 is formed on the upper wall of the middle part of the locking platform 511 near the rear end. The locking platform 511 is detachably arranged on the bearing plate 31, and the sleeve groove 92 is sleeved on the spray pipe 52 and is located between two spray heads 53. An installation cavity 91 communicating with the front side wall is formed in the top end of the locking platform 511. A locking hole 93 is formed on the upper wall of the front end of the locking platform 511. The inner diameter of the locking hole 93 is larger than the diameter of the part of the locking hole 93, and fitting openings communicating with each other are formed on both sides of the locking hole 93. The fastening screw 512 movably penetrates through the first adjusting groove 81 and is screwed into the lower wall inside the locking platform 511. The pressing rod 513 is L-shaped, one end of the pressing rod 513 movably penetrates through the upper wall of the locking platform 511 and is located in the middle of the installation cavity 91, and the other end of the pressing rod 513 is located above the middle of the sleeve groove 92 and is attached to the upper wall of the locking platform 511. One end of the finger rod 514 is fixedly arranged in the middle of the pressing rod 513, and one end of the finger rod 514 movably penetrates through the front side wall of the installation cavity 91. The spring 515 is movably sleeved on one end of the pressing rod 513 and is located between one end of the finger rod 514 and the lower wall inside the installation cavity 91. One end of the locking rod 516 movably penetrates through the other end of the finger rod 514. Fitting blocks corresponding to the fitting openings are symmetrically arranged at the other end of the locking rod 516, and the fitting blocks movably penetrate through the locking hole 93 and then rotate and lock.

[0051] Working principle:

[0052] First, docking components 16 are provided at the conveying ports 61 on the left and right side walls of the etching tank 11 in the device. Then, the two etching tanks 11 can be connected and extended through the docking frame 161 in the docking component 16. Connect the drain pipe 22 of the device to the corresponding pipeline for discharging after spray etching, and connect the liquid inlet end of the liquid pump 14 to the corresponding supply of etching solution. At the same time, a solenoid valve with multiple ports can be set at the liquid inlet end of the liquid pump 14 according to requirements, so that the liquid pump 14 can supply etching solution and clean water respectively. Connect the liquid outlet end of the liquid pump 14 to the adapter pipe 23. The liquid conveyed through the adapter pipe 23 passes through the carrier box 21 and is split and supplied to the spray pipe 52 by means of the split valve pipe 4 connected to the adapter pipe 23. Supply clean water for later maintenance to dilute the etching solution and rinse the etching solution. Then, after the device is powered on, it is controlled through the control panel 13.

[0053] During use, the lead frame for conveying and processing is fed in through the docking component 16 on one side of the etching tank 11 by other existing devices and is carried and moved through the first guide wheel 164 on the first shaft 163 supported by the sealing plate 162. After the lead frame enters the etching tank 11, it will be carried and moved through the second guide wheel 27 in the conveying structure 2.

[0054] Among them, the second guide wheel 27 is driven by the motor 28 in the rear cover 12 behind the control driving port 63. With the series connection and linkage of the double-groove pulley 29 and the belt 20, the shaft seat 25 is rotated through the bearing 24, and the second shaft 26 is forced by the arc groove 73, so that multiple second shafts 26 rotate in the same direction, and the second guide wheel 27 rotates above the carrier box 21 to convey and move the lead frame.

[0055] As the lead frame is conveyed and moved, the liquid pump 14 is driven to extract the etching solution and is split and supplied to multiple installed spray pipes 52 through the split valve pipe 4. As shown in the attached Figure 1 in the specification, the spraying structure 5 is arranged below the second guide wheel 27 through the carrying unit 3 and sprays from the spray head 53 to perform spray etching processing on the lead frame. Finally, the lead frame is moved out of the device or enters the next etching tank 11 through the docking component 16 on the other side of the etching tank 11.

[0056] When cleaning and maintaining the device, the inner wall of the carrier box 21 can be directly cleaned by removing the front baffle 15 and passing through the cleaning port 62 and the picking port 71, without removing the second guide wheel 27 for cleaning from above.

[0057] If it is necessary to clean the second guide wheel 27, the box cover 18 can be opened. The box cover 18 is supported and turned open by the turning unit 17. When the box cover 18 turns, it will drive the turning arm 173 to turn on the turning seat 171. Through the force applied by the linear lock groove 102 on the turning arm 173 and the lock edge in the middle of the push-pull rod 172, the push-pull rod 172 is driven to rotate 90 degrees. After the lock edge on the push-pull rod 172 corresponds to two ends of the cross-shaped lock groove 101, the push-pull rod 172 is pulled, and the lock edge on the push-pull rod 172 is moved to one side and inserted into the cross-shaped lock groove 101 to achieve locking and limiting. By the same principle, when the box cover 18 is closed, it is also locked by means of the push-pull rod 172;

[0058] Before the box cover 18 is opened, it is necessary to pump clear water through the liquid pump 14 and spray it through the nozzle 53 to neutralize, dilute and wash the residual etching solution in the equipment, preventing the diffusion of odors or corrosion of the human body and causing harm; and then, in the state where the box cover 18 is opened, as shown in the following instruction manual attachment Figure 2 As shown, first apply force to the end of the second shaft rod 26 connected to the shaft seat 25, turn one end of the second shaft rod 26 upward, so that the second shaft rod 26 disengages from the U-shaped groove 72 and the arc-shaped groove 73. Then, by means of the length of one end of the second shaft rod 26 and the other end, the space in the middle of the carrier box 21 is opened after turning, and the second guide wheel 27 and the first guide wheel 164 can be wiped one by one. The other end of the second shaft rod 26 can also be pulled out from the bearing 24 for disassembly;

[0059] After the second guide wheel 27 is disassembled, the spraying structure 5 supported by the bearing unit 3 in the carrier box 21 can be seen from above. Since the carrier seat 32 in the bearing unit 3 can move a certain distance on the carrier plate 31, and the carrier seat 32 is fixed on the carrier plate 31 by the adjusting bolt 33 passing through the second adjusting groove 82 and cooperating with the adjusting nut 34, the overall support width of the bearing unit 3 is adjusted, which can be used to fit inside the carrier box 21 or the etching box 11, and can be installed above or below the second guide wheel 27 according to requirements, respectively for downward spraying or upward spraying of the nozzle 53;

[0060] After the bearing unit 3 is fixed, the locking component 51 in the spraying structure 5 can be installed on the bearing unit 3 according to requirements, and the spacing can be adjusted movably, so as to adjust the spacing of the nozzles 53 on the spray pipe 52 installed through the fixing component and adjust the spraying range according to requirements;

[0061] When the spray pipe 52 needs to be disassembled, by rotating the lock rod 516, the lock rod 516 is unlocked and disengaged from the lock hole 93. Then, the pressure rod 513 rises under the action of the spring 515, and the upper part of the sleeve groove 92 can be unlocked. The spray pipe 52 can be picked up, pressed down and blocked for disassembly;

[0062] When the nozzle 52 needs to be installed, the nozzle 52 is snapped into the socket groove 92 of the locking platform 511, and the nozzle head 53 is located on both sides of the locking platform 511. Then, the pressing rod 513 is pressed down to compress the spring 515, so that one end of the pressing rod 513 fits above the socket groove 92 to limit the nozzle 52. At this time, one end of the locking rod 516 will be inserted into the locking hole 93, and by rotating the locking rod 516 through the fitting port of the locking hole 93, it can be locked with the locking hole 93 for locking;

[0063] When the locking platform 511 needs to be disassembled or moved, it can be adjusted and disassembled by rotating the fastening screw 512 passing through the first adjustment groove 81 and the first adjustment port 83 corresponding to the first adjustment groove 81. Moreover, the bearing unit 3 is detachable, so that the overall space inside the device can be cleaned without obstruction.

[0064] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An etching device for semiconductor lead frame processing, characterized in that, It includes a main body structure (1), a conveying structure (2), a bearing unit (3), a shunt valve pipe (4), and several spraying structures (5); the conveying structure (2) is detachably arranged inside the main body structure (1), the bearing unit (3) is detachably arranged inside the main body structure (1) and above the conveying structure (2), the shunt valve pipe (4) is movably arranged inside the conveying structure (2), and several valves are equidistantly arranged on the shunt valve pipe (4), and several of the spraying structures (5) are detachably arranged on the bearing unit (3) and are respectively connected to the shunt valve pipe (4) through pipelines; The main body structure (1) includes an etching tank (11), a rear cover (12), a control panel (13), a liquid pump (14), a front baffle (15), a pair of docking components (16), a pair of flipping units (17), and a tank cover (18); The etching tank (11) is a box body without an upper wall, and conveying openings (61) are arranged near the middle of the left and right side walls of the etching tank (11), a cleaning opening (62) is formed near the middle of the front side wall of the etching tank (11), a driving opening (63) is formed near the middle of the rear side wall of the etching tank (11), the rear cover (12) is detachably buckled at the driving opening (63) at the rear side of the etching tank (11), the control panel (13) is fixedly arranged on the front side wall of the etching tank (11) and above the cleaning opening (62), the liquid pump (14) is fixedly arranged on the lower wall of the etching tank (11), and a first pipeline penetrating the left side wall of the etching tank (11) is arranged at the liquid inlet end of the liquid pump (14), the front baffle (15) is detachably buckled at the cleaning opening (62) and fixed by bolts, a first handle is arranged in the middle of the front side wall of the front baffle (15), a pair of the docking components (16) are respectively detachably arranged at the conveying openings (61) of the etching tank (11), a pair of the flipping units (17) are respectively detachably arranged on the rear side wall of the etching tank (11) and are symmetric to each other near the top, the tank cover (18) is a convex frame structure, and a glass plate is embedded in the middle of the upper wall of the tank cover (18), the tank cover (18) is movably buckled above the etching tank (11), and the tank cover (18) is respectively connected to the flipping units (17).

2. The etching device for semiconductor lead frame processing according to claim 1, wherein The docking component (16) includes a docking frame (161), a sealing plate (162), a first shaft rod (163), and several first guide wheels (164); The docking frame (161) is of a concave structure, and vertical edges are provided in the middle of the upper and lower side walls. The docking frame (161) is detachably fitted into the conveying port (61) of the etching tank (11), and the vertical edges are fitted with the side wall of the etching tank (11). The sealing plate (162) is detachably buckled between the two ends of the docking frame (161), and the sealing plate (162) fits with the docking frame (161). One end of the sealing plate (162) is movably inserted into the conveying port (61). The two ends of the first shaft rod (163) are respectively movably inserted between the docking frame (161) and the sealing plate (162). A number of the first guide wheels (164) are respectively equidistantly sleeved on the first shaft rod (163), and the first guide wheels (164) are located in the middle inside the docking frame (161).

3. An etching device for semiconductor lead frame processing according to claim 2, characterized in that, The flipping unit (17) includes a flipping base (171), a push-pull rod (172) and a flipping arm (173); The flipping base (171) is of a concave shape. The flipping base (171) is detachably arranged on the rear side wall of the etching tank (11), and first shaft holes are respectively opened in the middle of the two ends of the flipping base (171). A cross-shaped locking groove (101) communicated with the first shaft hole is opened at one end of the flipping base (171). The push-pull rod (172) movably penetrates through the first shaft holes at the two ends of the flipping base (171), and retaining plates are arranged at both ends of the push-pull rod (172). A handle is arranged at one end of the push-pull rod (172). Locking edges matching with the cross-shaped locking groove (101) are arranged on the front and rear sides of the middle of the push-pull rod (172), and the locking edges are inserted into the two ends inside the cross-shaped locking groove (101). The length of the locking edge is greater than the width of one end of the flipping base (171). The flipping arm (173) is of an L shape, and a second shaft hole is opened in the middle of one end of the flipping arm (173). An elongated hole-shaped locking groove communicated with each other is opened on the front and rear sides of the second shaft hole. One end of the flipping arm (173) is movably sleeved on the push-pull rod (172), and the elongated hole-shaped locking groove (102) is sleeved on the locking edge. The other end of the flipping arm (173) is fixedly connected to the rear side wall of the box cover (18).

4. An etching device for semiconductor lead frame processing according to claim 3, characterized in that, The conveying structure (2) includes a carrier box (21), a drain pipe (22), a connecting pipe (23), a number of bearings (24), a number of shaft seats (25), a number of second shaft rods (26), a number of second guide wheels (27), a motor (28), a number of double-groove pulleys (29) and a number of belts (20); The carrier box (21) is a box body without an upper wall, and a pickup port (71) corresponding to the cleaning port (62) is formed in the front side wall of the carrier box (21). Vertical plates (75) are arranged along the upper wall edges at both the front and rear ends of the carrier box (21). The carrier box (21) is detachably installed in the etching tank (11), and the pickup port (71) and the cleaning port (62) are relatively fitted. The upper wall edge of the carrier box (21) and the inner lower wall of the conveying port (61) are on the same horizontal line. The carrier box (21) is fixed by bolts passing through the vertical plates (75), and the carrier box (21) is located above the liquid pump (14). One end of the drain pipe (22) is fixed with a front claw in the middle of the lower wall of the carrier box (21), and the other end of the drain pipe (22) penetrates the bottom of the left side wall of the etching tank (11). One end of the adapter pipe (23) is fixedly penetrated through the lower wall of the carrier box (21), and the other end of the adapter pipe (23) is connected to the liquid outlet end of the liquid pump (14). A plurality of the bearings (24) are respectively equidistantly installed in the vertical plates (75), and the centers of the bearings (24) correspond to both ends of the second shaft rod (26). One end of each of the plurality of shaft seats (25) is a round rod structure, and the other end is a rectangular rod structure. One end of each of the shaft seats (25) is fixedly penetrated through the middle of the bearing (24) above the rear side wall of the carrier box (21) and is located in the rear cover (12). A U-shaped groove (72) communicating with the upper wall is formed in the middle of the front side wall of the other end of the shaft seat (25), and arc-shaped grooves (73) communicating with each other are formed on the left and right sides of the U-shaped groove (72). The front ends and the rear ends of the plurality of second shaft rods (26) are relatively movably connected, and both ends of the second shaft rod (26) are relatively flipped. One end of the second shaft rod (26) is fixedly inserted into the bearing (24) above the front side wall of the carrier box (21), and the other end is movably installed in the U-shaped groove (72) of the shaft seat (25). Twist blocks (74) are arranged on both the left and right sides of the other end of the second shaft rod (26), and the twist blocks (74) are movably installed in the arc-shaped grooves (73). A plurality of the second guide wheels (27) are the same as the first guide wheels (164). A plurality of the second guide wheels (27) are respectively equidistantly sleeved on the second shaft rods (26), and the upper walls of the second guide wheels (27) and the upper walls of the first guide wheels (164) are on the same horizontal plane. The motor (28) is fixedly arranged on the inner lower wall of the rear cover (12), and the motor (28) is located below one of the shaft seats (25). A plurality of double-groove pulleys (29) are respectively fixedly sleeved on the driving end of the motor (28) and one end of the shaft seat (25). Both ends of a plurality of the belts (20) are alternately sleeved between the double-groove pulleys (29), and the double-groove pulleys (29) are connected in series by the belts (20) and rotate in the same direction.

5. An etching device for semiconductor lead frame processing according to claim 4, characterized in that, The carrying unit (3) includes a carrying plate (31), a pair of carrying seats (32), two pairs of adjusting bolts (33) and two pairs of adjusting nuts (34); The bearing plate (31) is rectangular, and a first adjustment groove (81) is formed through the middle of the bearing plate (31). Second adjustment grooves (82) are symmetrically formed on both sides of the first adjustment groove (81). Each of the pair of bearing seats (32) is L-shaped, and a first adjustment opening (83) corresponding to the first adjustment groove (81) is formed at one end of each bearing seat (32). One end of each of the pair of bearing seats (32) is movably placed below both ends of the bearing plate (31) and is symmetric with each other. The other end of each of the pair of bearing seats (32) is detachably placed on the front and rear side walls inside the etching tank (11). One end of each of the two pairs of adjustment bolts (33) movably penetrates through the two corner parts at one end of the bearing seat (32), and one end of the adjustment bolt (33) movably penetrates through the second adjustment opening. Each of the two pairs of adjustment nuts (34) is movably screwed onto the adjustment bolt (33).

6. The etching device for semiconductor lead frame processing according to claim 5, characterized in that, The spraying structure (5) includes a locking assembly (51), a spray pipe (52), and a plurality of spray heads (53); the locking assembly (51) is movably placed on the bearing plate (31), the spray pipe (52) is detachably placed on the locking assembly (51), and one end of the spray pipe (52) is connected to the flow dividing valve pipe (4). A plurality of the spray heads (53) are detachably placed on the lower wall of the spray pipe (52) at equal intervals; The locking assembly (51) includes a locking platform (511), a fastening screw (512), a pressing rod (513), a finger rod (514), a spring (515), and a locking rod (516); The locking platform (511) is of a convex structure, and a sleeve groove (92) is formed in the upper wall of the middle part of the locking platform (511) near the rear end. The locking platform (511) is detachably placed on the bearing plate (31), and the sleeve groove (92) is sleeved on the spray pipe (52) and is located between two spray heads (53). An installation cavity (91) communicating with the front side wall is formed in the top end of the locking platform (511). A locking hole (93) is formed in the upper wall of the front end of the locking platform (511), and a communicating fitting opening is formed on both sides of the locking hole (93). The fastening screw (512) movably penetrates through the first adjustment groove (81) and is screwed into the lower wall of the locking platform (511). The pressing rod (513) is L-shaped. One end of the pressing rod (513) movably penetrates through the upper wall of the locking platform (511) and is located in the middle of the installation cavity (91). The other end of the pressing rod (513) is located above the middle of the sleeve groove (92) and is attached to the upper wall of the locking platform (511). One end of the finger rod (514) is fixedly arranged in the middle of the pressing rod (513), and one end of the finger rod (514) movably penetrates through the front side wall of the installation cavity (91). The spring (515) is movably sleeved on one end of the pressing rod (513) and is located between one end of the finger rod (514) and the lower wall inside the installation cavity (91). One end of the locking rod (516) movably penetrates through the other end of the finger rod (514). The other end of the locking rod (516) is symmetrically provided with fitting blocks corresponding to the fitting openings, and the fitting blocks movably penetrate through the locking hole (93) and then rotate and lock.

7. An etching method for semiconductor lead frame processing, which is applied to an etching device for semiconductor lead frame processing as described in claim 6, and is characterized in that, Including the following steps: Step 1: The lead frame is moved through the docking component (16) from one side of the main structure (1) by an existing conveying device and continuously conveyed and moved through the conveying structure (2). Step 2: During the movement of the lead frame through the conveying structure (2) in the etching tank (11), the etching solution is supplied by the liquid pump (14) and sprayed out from the nozzle (53) in the spraying structure (5) to contact the lead frame for processing and etching of the corresponding parts, and then it is moved out from the other side of the main structure (1). Step 3: According to the etching requirements, it is installed above the second guide wheel in the etching tank (11) with the aid of the carrying unit (3) or placed below the second guide wheel (27) in the carrying box (21) for spraying during different etching times, and the corresponding locking components (51) are used to facilitate the setting of different numbers and spacings of the spray pipes (52) to set the spraying range according to actual requirements. Step 4: During maintenance, by opening the box cover (18), it is convenient to clean and wipe the second guide wheel (27) and to clean the inner wall of the carrying box (21) or pick up the materials that fall due to the conveying and movement. Step 5: The flipping unit (17) is used to facilitate the locking and fixing of the box cover (18) after it is opened or closed.

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