Chuck pin and substrate holding device

Abstract

The invention provides a chuck pin and a substrate holding device, wherein a holding part can be easily replaced. The chuck pin includes a holding portion and a fixing portion, and holds a substrate. The holding portion has an inner peripheral surface and an outer peripheral surface capable of coming into contact with the substrate. A protruding portion protruding inward is formed on the inner peripheral surface of the holding portion. The fixing portion includes a pressing portion, a pressed portion, and a biasing portion, and detachably fixes the holding portion. The pressing portion has a side wall portion in which a first opening portion is formed. The pressed portion has a side wall portion in which a second opening portion is formed. The urging portion urges the pressing portion in a rotational direction with respect to the pressed portion. The protruding portion of the inner peripheral surface of the holding portion is sandwiched between the pressing portion and the pressed portion at the first opening portion and the second opening portion.

Description

Technical Field

[0001] The invention relates to a chuck pin for holding a substrate and a substrate holding device. Background Art

[0002] A substrate processing device is used to perform various processes on a semiconductor substrate. In the substrate processing device, a plurality of chuck pins abut against the outer peripheral end of the substrate, so that the substrate to be processed can be held in a horizontal position. If the chuck pins are used for a long time, the portion of the chuck pins in contact with the substrate wears out, and the substrate cannot be held or released accurately. Therefore, the chuck pins are replaced regularly before they wear out.

[0003] Japanese Patent Publication No. 2000-100706 describes a retaining pin in which a pin member is supported by a pin support portion. The pin support portion is provided with a hole portion having a spiral groove formed on the inner circumference. A protrusion portion that is screwed into the hole portion of the pin support portion is formed on the pin member. Therefore, the pin member is fixed to the pin support portion by rotating in one direction, and is removed from the pin support portion by rotating in the opposite direction. Summary of the invention

[0004] According to the retaining pin of Japanese Patent Laid-Open No. 2000-100706, the replacement operation of the pin member becomes easy. However, in order to prevent the degradation of productivity caused by the decrease in the operating rate of the substrate holding device accompanying the replacement of parts and the increase in the labor cost of the replacement operator, a chuck pin that can more easily replace the holding part is needed.

[0005] An object of the present invention is to provide a chuck pin and a substrate holding device that can easily replace a holding portion.

[0006] According to one aspect of the present invention, a chuck pin is used to hold a substrate, and the chuck pin includes: a holding portion having an inner circumferential surface and an outer circumferential surface capable of abutting against the substrate; and a fixing portion, which fixes the holding portion in a manner that allows loading and unloading, and the fixing portion includes: a pressing portion having a first side wall portion having a first opening; a pressed portion having a second side wall portion having a second opening; and a force applying portion, which applies force to the pressing portion in a first rotational direction relative to the pressed portion, and a protrusion is formed on the inner circumferential surface of the holding portion, the protrusion protruding inwardly and clamped by the pressing portion and the pressed portion at the first opening and the second opening.

[0007] A substrate holding device according to another aspect of the present invention includes: the chuck pin; and a plate portion on which the fixing portion of the chuck pin is mounted.

[0008] According to the present invention, the pin member can be easily replaced. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 It is a schematic cross-sectional view of a substrate holding device according to one embodiment of the present invention.

[0010] Figure 2 It is an exploded perspective view of the chuck pin.

[0011] Figure 3 This is an enlarged longitudinal sectional view of a portion of the chuck pin.

[0012] Figure 4 It is a three-dimensional view of the fixing part of the chuck pin.

[0013] Figure 5 It is used to explain the installation operation of the holding part using the arm.

[0014] Figure 6 It is used to explain the disassembly operation of the holding portion using the arm portion.

[0015] [Explanation of Symbols]

[0016] 10: Pressing part

[0017] 11, 21: Main face

[0018] 11a, 12a, 22a: Opening

[0019] 11b, 23a: Hole

[0020] 12, 22, 23: Side wall

[0021] 12b: Cone

[0022] 20: Pressed part

[0023] 21a: threaded hole

[0024] 21b: Slit

[0025] 22b: concave part

[0026] 30: Force application part

[0027] 31, 32: End

[0028] 100: Chuck pin

[0029] 101: Bolts

[0030] 102: Screw

[0031] 110: Maintenance

[0032] 111: Pin component

[0033] 112: Base

[0034] 113: Outer surface

[0035] 114: Inner Surface

[0036] 115: Protrusion

[0037] 120: Fixed part

[0038] 130: Installation

[0039] 131: Barrel

[0040] 132: Base

[0041] 133: Through hole

[0042] 140: Rotation drive unit

[0043] 200: Substrate holding device

[0044] 210: Rotation drive unit

[0045] 211: Rotation axis

[0046] 220: Board

[0047] 221: Through hole

[0048] 230: Support pin

[0049] 240: Magnetic support

[0050] 241: Magnet

[0051] 250: Arm

[0052] 251, 252: fingers

[0053] R1, R2: Rotation direction

[0054] W: substrate DETAILED DESCRIPTION

[0055] 1. Substrate holding device

[0056] Hereinafter, a chuck pin and a substrate holding device according to an embodiment of the present invention will be described with reference to the drawings. Figure 1 1 is a schematic cross-sectional view of a substrate holding device according to an embodiment of the present invention. Figure 1 As shown, the substrate holding device 200 includes a plurality of chuck pins 100 , a rotation driving portion 210 , a plate portion 220 , a plurality of (three in this example) support pins 230 , a magnet support portion 240 , and an arm portion 250 .

[0057] In this example, the rotation drive unit 210 is provided at the bottom of the substrate holding device 200. The rotation drive unit 210 includes a rotation motor having a rotation shaft 211 extending upward. The plate portion 220 has a circular plate shape and is arranged at the upper end of the rotation shaft 211 of the rotation drive unit 210 in a substantially horizontal posture. By rotating the rotation shaft 211 by the rotation drive unit 210, the plate portion 220 rotates around the vertical axis. A plurality of through holes 221 corresponding to the support pins 230 are formed in the plate portion 220. A plurality of chuck pins 100 are provided at the peripheral portion of the plate portion 220 at substantially equal angle intervals relative to the rotation shaft 211.

[0058] Each chuck pin 100 includes a holding portion 110, a fixing portion 120, an installation portion 130, and a rotation driving portion 140. The holding portion 110 includes a pin member and is fixed to the fixing portion 120 in a detachable manner. The arm portion 250 operates when the holding portion 110 is installed and removed. The details of the chuck pin 100 and the arm portion 250 will be described later. The fixing portion 120 is installed on the plate portion 220 through the installation portion 130. The holding portion 110 protrudes above the plate portion 220 when fixed to the fixing portion 120.

[0059] The rotation driving part 140 includes a magnet and is fixed to the fixing part 120 below the plate part 220. The rotation driving part 140 rotates the corresponding holding part 110 between a holding state and a non-holding state. The holding state is a state in which the outer peripheral surface of the holding part 110 abuts against the outer peripheral end of the substrate W. In the holding state, the substrate W is held by a plurality of holding parts 110. The non-holding state is a state in which the holding part 110 is not in contact with the substrate W and is away from the substrate W. In the non-holding state, the holding of the substrate W by the plurality of holding parts 110 is released.

[0060] A plurality of support pins 230 are provided in a manner extending upward and surrounding the rotating shaft 211 of the rotating drive unit 210. Each support pin 230 is raised and lowered between a standby position and a handover position by an actuator not shown in the figure. In the standby position, the upper end portion of each support pin 230 is located below the plate portion 220. In the handover position, each support pin 230 is inserted into the corresponding through hole 221 of the plate portion 220, whereby the upper end portion of each support pin 230 is located at substantially the same height as the holding portion 110 of the chuck pin 100. Each support pin 230 rises to the handover position when the substrate W is handed over between the substrate conveying device not shown in the figure and the substrate holding device 200, and descends to the standby position at other time points.

[0061] The magnet support part 240 has a circular ring shape and surrounds the rotating shaft 211 of the substrate holding device 200 and the plurality of support pins 230. The magnet support part 240 supports the circular ring-shaped magnet 241 and is raised and lowered between a holding position and a non-holding position by an actuator not shown. The holding position is located at a height substantially the same as the rotation drive part 140 of the chuck pin 100. The non-holding position is located below the holding position. Figure 1 As shown by the middle dotted line, when the magnet support part 240 rises to the holding position, the magnet 241 approaches the magnet of the rotation drive part 140, thereby the holding part 110 rotates to the holding state. When the magnet support part 240 descends to the non-holding position, the magnet 241 moves away from the magnet of the rotation drive part 140, thereby the holding part 110 rotates to the non-holding state.

[0062] 2. Chuck pin

[0063] Figure 2 It is an exploded perspective view of the chuck pin 100 . Figure 3 It is a longitudinal sectional view which enlarges a part of the chuck pin 100. Figure 4 1 is a perspective view of the fixing portion 120 of the chuck pin 100. Figure 2 As shown, the chuck pin 100 includes a holding portion 110 , a fixing portion 120 , a mounting portion 130 and a rotation driving portion 140 .

[0064] The holding portion 110 includes a pin member 111 and a base 112. The pin member 111 protrudes upward from the upper portion of the base 112. The pin member 111 has an outer peripheral surface 113 that can abut against the substrate W at the upper portion. The base 112 has a cylindrical shape with an upper portion closed. The base 112 is fixed to the fixing portion 120 in a manner covering the fixing portion 120. A protrusion 115 that protrudes inward is formed on the inner peripheral surface 114 of the base 112. In this example, three protrusions 115 are formed on the inner peripheral surface 114 of the base 112 at intervals of 120 degrees in the circumferential direction.

[0065] The fixing portion 120 includes a pressing portion 10, a pressed portion 20, a force applying portion 30 and a supporting member (not shown). The pressing portion 10 has a main surface portion 11 and a side wall portion 12. The main surface portion 11 has a disk shape. A circular opening portion 11a is formed in the central portion of the main surface portion 11. In addition, a hole portion 11b is formed in the main surface portion 11. In this example, the hole portion 11b is formed in a cutout shape in a manner connected to the opening portion 11a, but the embodiment is not limited thereto.

[0066] The side wall portion 12 is curved so as to extend downward from the outer edge of the main surface portion 11. An opening portion 12a is formed in the side wall portion 12. In this example, three opening portions 12a are formed in the side wall portion 12 at intervals of 120 degrees in the circumferential direction. The opening portion 12a indicates a portion that is recessed toward the center of the side wall portion 12 when the side wall portion 12 is viewed from above. The three opening portions 12a of the side wall portion 12 correspond to the three protrusions 115 of the retaining portion 110, respectively. In addition, the cutout of the side wall portion 12 in which each opening portion 12a is formed has a tapered surface 12b.

[0067] The pressed portion 20 includes a main surface portion 21, a side wall portion 22, and a side wall portion 23 ( Figure 3 The main surface portion 21 has a disk shape. A screw hole 21 a is formed in the center of the main surface portion 21 . In addition, a slit 21 b extending parallel to the rotation direction R1 described later is formed in the main surface portion 21 .

[0068] The side wall portion 22 is formed to extend downward and partially upward from the outer edge of the main surface portion 21. An opening portion 22a is formed in the side wall portion 22. In this example, three opening portions 22a are formed in the side wall portion 22 at intervals of 120 degrees in the circumferential direction. The three opening portions 22a of the side wall portion 22 correspond to the three protrusions 115 of the retaining portion 110, respectively. In addition, the cutout of the side wall portion 22 where each opening portion 22a is formed has a recessed portion 22b. Figure 3 As shown in FIG. 1 , the side wall portion 23 extends downward from the main surface portion 21 at the inner side of the side wall portion 22 . The side wall portion 23 is formed with a hole 23 a.

[0069] like Figure 4 As shown, the pressing portion 10 is provided in a manner covering the pressed portion 20. In the above state, the side wall portion 22 of the pressed portion 20 is exposed from the opening portion 12a of the side wall portion 12 of the pressing portion 10. Thus, the cutout of the side wall portion 12 formed with the opening portion 12a faces the cutout of the side wall portion 22 formed with the opening portion 22a. The tapered surface 12b of the side wall portion 12 is formed to gradually approach the recessed portion 22b of the side wall portion 22 toward the rotation direction R1.

[0070] like Figure 2 As shown, the force applying part 30 is, for example, a torsion spring wound around an axis parallel to the up-down direction, and has an end 31 and an end 32. The end 31 is located at the upper end of the force applying part 30 and is bent upward. The end 32 is located at the lower end of the force applying part 30 and is bent inward. The force applying part 30 generates a force in a specified rotational direction. Hereinafter, the direction in which the force applying part 30 generates the force is referred to as the rotational direction R1, and the opposite direction thereof is referred to as the rotational direction R2. Figure 2 and Figure 4 In the figure, the thick arrows indicate the rotation direction R1 and the rotation direction R2. Figure 1The rotation direction of the plate portion 220 based on the rotation driving unit 210 may be the same as or opposite to the rotation direction of the plate portion 220 .

[0071] like Figure 3 As shown, the force-applying portion 30 is disposed between the side wall portion 22 and the side wall portion 23 of the pressed portion 20. In this example, the force-applying portion 30 is disposed between the side wall portion 22 and the side wall portion 23 in a state where a force is applied in the rotation direction R2, and the end portion 32 is embedded in the hole portion 23a of the side wall portion 23. Here, the force-applying portion 30 is wound around the outer side surface of the side wall portion 23 in a state where the end portion 32 is embedded in the hole portion 23a of the side wall portion 23 by releasing the force in the rotation direction R2 of the force-applying portion 30. In addition, the end portion 31 of the force-applying portion 30 is embedded in the slit 21b of the main surface portion 21 of the pressed portion 20. Figure 2 The pressing portion 10 is provided in the hole portion 11 b of the main surface portion 11 .

[0072] In the above structure, the pressing portion 10 applies force to the pressed portion 20 in the rotation direction R1 through the force applying portion 30. Therefore, the fixing portion 120 is covered by the base 112 of the holding portion 110, and the protrusion 115 of the base 112 is clamped by the pressing portion 10 and the pressed portion 20 at the opening 12a and the opening 22a. Thus, the holding portion 110 is fixed to the fixing portion 120. In this example, each protrusion 115 is guided to the corresponding recess 22b of the pressed portion 20 along the tapered surface 12b of the pressing portion 10, and abuts against the recess 22b. Therefore, the holding portion 110 is fixed more stably.

[0073] The support member (not shown) is arranged below the pressed portion 20. In the above state, the bolt 101 is inserted through the support member from below. The front end of the bolt 101 protrudes from the support member and is screwed into the threaded hole 21a of the main surface 21 of the pressed portion 20. Thus, the pressed portion 20 is supported by the support member. Figure 4 As shown, the front end of the bolt 101 screwed into the threaded hole 21 a passes through the opening 11 a of the pressing portion 10 and protrudes upward.

[0074] like Figure 2 As shown in FIG. 1 , the mounting portion 130 includes a barrel 131 and a base 132. The barrel 131 has a substantially cylindrical shape and is inserted into the Figure 1 The base 132 has a substantially elliptical shape and extends outward from the lower end of the cylinder 131 below the plate 220. Two through holes 133 are formed in the base 132 so as to face each other with the cylinder 131 sandwiched therebetween. A screw 102 is inserted from below into each through hole 133 and screwed into a threaded hole (not shown) on the lower surface of the plate 220. Thus, the mounting portion 130 is fixed to the plate 220.

[0075] In this example, a ball bearing (not shown) having a plurality of rolling members, an inner ring, and an outer ring is provided. The plurality of rolling members are held between the inner ring and the outer ring by a retainer. The inner ring is embedded in the outer peripheral surface of the support member (not shown) of the fixing portion 120. In addition, the outer ring is embedded in the inner peripheral surface of the cylinder 131 of the mounting portion 130. Thus, the fixing portion 120 is mounted on the mounting portion 130 in a manner that allows it to rotate around the center axis of the ball bearing.

[0076] The rotation driving unit 140 is installed at the lower end of the supporting member of the fixing unit 120. Figure 1 The action of the magnet support portion 240 causes the holding portion 110 and the fixing portion 120 to rotate together between the holding state and the non-holding state.

[0077] 3. Arm

[0078] Figure 5 2 is a diagram for explaining the installation operation of the holding portion 110 based on the arm portion 250. Figure 5 As shown, the arm 250 includes a pair of fingers 251 and 252. When the holding portion 110 is installed, the arm 250 moves to the upper side of the fixing portion 120 while holding the holding portion 110 by the fingers 251 and 252. Figure 5 As shown by the hollow arrow, the arm 250 moves downward. In this case, the holding portion 110 held by the fingers 251 and 252 is pressed into the fixing portion 120 .

[0079] Here, the holding portion 110 is pressed into the fixing portion 120. Figure 2 The pressing portion 10 of the holding portion 110 rotates in the rotation direction R2 against the force applied by the force applying portion 30, and the protrusion 115 of the holding portion 110 enters the opening 12a of the pressing portion 10 and the opening 22a of the pressed portion 20. Then, when the fingers 251 and 252 release the grip of the holding portion, the pressing portion 10 is rotated in the rotation direction R1 by the force applied by the force applying portion 30, and the protrusion 115 of the holding portion 110 is clamped by the pressing portion 10 and the pressed portion 20 at the opening 12a and the opening 22a. Thus, the holding portion 110 is mounted on the fixing portion 120.

[0080] Afterwards, the arm 250 grasps another holding portion 110 through the fingers 251 and 252 and repeats the same installation operation on another fixing portion 120. Thus, the holding portion 110 is installed on all the fixing portions 120. In addition, in a series of installation operations of multiple holding portions 110, the arm 250 can be moved to the top of multiple fixing portions 120 in sequence, or it can be moved to the top of multiple fixing portions 120 in sequence. Figure 1 The plate portion 220 rotates so that the plurality of fixing portions 120 are moved to below the arm portion 250 in sequence.

[0081] Figure 6 2 is a diagram for explaining the disassembly operation of the holding portion 110 based on the arm portion 250. Figure 6 As shown, when the holding portion 110 is removed, the arm portion 250 moves to the upper side of the fixing portion 120, and the holding portion 110 fixed to the fixing portion 120 is gripped by the finger portion 251 and the finger portion 252. In the above state, the arm portion 250 rotates along the rotation direction R2 as shown in FIG. Figure 6 In this case, the holding part 110 is pulled out from the fixing part 120 while being twisted in the rotation direction R2. Thus, the holding part 110 is removed from the fixing part 120.

[0082] Afterwards, the arm 250 grasps another holding portion 110 through the fingers 251 and 252 and repeats the same disassembly operation on another fixing portion 120. Thus, the holding portion 110 is disassembled relative to all the fixing portions 120. In addition, in a series of disassembly operations of multiple holding portions 110, the arm 250 can be moved to the top of multiple fixing portions 120 in sequence, or can be moved to the top of multiple fixing portions 120 in sequence. Figure 1 The plate portion 220 rotates so that the plurality of fixing portions 120 are moved to below the arm portion 250 in sequence.

[0083] 4. Effect

[0084] In the chuck pin 100 of the present embodiment, when the holding portion 110 is mounted, the holding portion 110 is pressed into the fixing portion 120, and the pressing portion 10 of the fixing portion 120 rotates in the rotation direction R2 against the applied force of the force applying portion 30, and the protrusion 115 of the holding portion 110 enters the opening 12a of the pressing portion 10 and the opening 22a of the pressed portion 20. In the above state, the pressing portion 10 is applied force by the force applying portion 30 and rotates in the rotation direction R1, and the protrusion 115 of the holding portion 110 is clamped by the pressing portion 10 and the pressed portion 20 at the opening 12a and the opening 22a. In this way, the holding portion 110 can be mounted on the fixing portion 120.

[0085] On the other hand, when removing the holding part 110, the holding part 110 is pulled out from the fixing part 120 while being twisted in the rotation direction R2. Thus, the holding part 110 can be removed from the fixing part 120. In this way, the holding part 110 can be attached to and detached from the fixing part 120 with a simple operation. Thus, the holding part 110 can be easily replaced.

[0086] The side wall portion 22 of the pressed portion 20 is exposed from the opening 12a of the pressing portion 10. In this case, the holding portion 110 can be fixed to the fixing portion 120 with a simple structure without increasing the size of the chuck pin 100.

[0087] In the pressed portion 20, the cutout of the side wall portion 22 in which the opening 22a is formed has a recessed portion 22b that abuts against the protruding portion 115 of the holding portion 110. In this case, the holding portion 110 can be fixed more stably.

[0088] In the pressing portion 10, the cutout of the side wall portion 12 having the opening 12a has a tapered surface 12b that gradually approaches the recessed portion 22b of the pressed portion 20 toward the rotation direction R1. In this case, it is easy to rotate the pressing portion 10 in the rotation direction R2 when the holding portion 110 is mounted, and to guide the protrusion 115 of the holding portion 110 to the recessed portion 22b of the pressed portion 20.

[0089] The force-applying portion 30 has an end portion 31. The pressing portion 10 has a main surface portion 11 formed with a hole portion 11b into which the end portion 31 of the force-applying portion 30 is inserted. The pressed portion 20 has a main surface portion 21 formed with a slit 21b extending parallel to the rotation direction R1 and through which the end portion 31 of the force-applying portion 30 is inserted. In this case, the pressing portion 10 can be easily rotated without rotating the pressed portion 20.

[0090] The pressed portion 20 has a side wall portion 23 formed on the inner side of the side wall portion 22. The biasing portion 30 is disposed between the side wall portion 22 and the side wall portion 23 of the pressed portion 20. In this case, the biasing portion 30 can be compactly accommodated.

[0091] The urging portion 30 has an end portion 32. A hole portion 23a into which the end portion 32 of the urging portion 30 is inserted is formed in the side wall portion 23 of the pressed portion 20. In this case, the urging portion 30 can be easily fixed.

[0092] The chuck pin 100 includes a rotation driving portion 140 that rotates the holding portion 110 and the fixing portion 120 between a holding state in which the outer peripheral surface 113 of the holding portion 110 abuts against the substrate W to hold the substrate W, and a non-holding state in which the outer peripheral surface 113 of the holding portion 110 is separated from the substrate W and does not hold the substrate W. In this case, the chuck pin 100 can be used as a rotary pin.

[0093] The substrate holding device 200 includes a chuck pin 100 and a plate portion 220 to which a fixing portion 120 of the chuck pin 100 is attached. In this case, the holding portion 110 can be easily replaced by using the chuck pin 100. In addition, the substrate holding device 200 includes a rotation drive portion 210 that rotates the plate portion 220. In this case, the substrate W can be processed while the substrate W is rotated.

[0094] Furthermore, the substrate holding device 200 includes an arm 250, which, while holding the holding portion 110 of the chuck pin 100, presses the holding portion 110 into the fixing portion 120, and, while holding the holding portion 110 of the chuck pin 100, pulls the holding portion 110 out of the fixing portion 120 while twisting it in the rotation direction R2. In this case, the holding portion 110 is automatically attached to the fixing portion 120 by the arm 250. In addition, the holding portion 110 is automatically removed from the fixing portion 120 by the arm 250. Thus, manpower can be saved when replacing the holding portion 110.

[0095] 5. Other Implementation Methods

[0096] (1) In the above embodiment, the chuck pin 100 is a rotary chuck pin in which the holding portion 110 rotates between the holding state and the non-holding state, but the embodiment is not limited thereto. At least a portion of the chuck pin 100 provided in the substrate holding device 200 may also be a fixed chuck pin. In this case, the holding portion 110 may also not include the rotation drive portion 140.

[0097] (2) In the above embodiment, the substrate holding device 200 holds the outer peripheral end of the substrate W from below, but the embodiment is not limited to this. The substrate holding device 200 may also hold the outer peripheral end of the substrate W from above. In this case, the holding portion 110 of each chuck pin 100 is arranged to protrude below the plate portion 220.

[0098] (3) In the above embodiment, the tapered surface 12b is formed on the side wall portion 12 of the pressing portion 10, and the recessed portion 22b is formed on the side wall portion 22 of the pressed portion 20, but the embodiment is not limited thereto. When the holding portion 110 is stably fixed to the fixing portion 120, the tapered surface 12b may not be formed on the side wall portion 12 of the pressing portion 10, and the recessed portion 22b may not be formed on the side wall portion 22 of the pressed portion 20.

[0099] (4) In the above embodiment, the arm 250 performs both installation and removal of the holding portion 110, but the embodiment is not limited to this. The arm 250 may perform only one of installation and removal of the holding portion 110. Alternatively, the arm 250 for installing the holding portion 110 and the arm 250 for removing the holding portion 110 may be separately provided.

[0100] (5) In the above embodiment, the substrate holding device 200 includes the rotation drive unit 210 and the arm unit 250, but the embodiment is not limited thereto. When it is not necessary to rotate the plate unit 220, the substrate holding device 200 may not include the rotation drive unit 210. In addition, when the user manually replaces the holding unit 110 of the chuck pin 100, the substrate holding device 200 may not include the arm unit 250.

[0101] 6. Correspondence between the components of the claims and the parts of the embodiments

[0102] Hereinafter, examples of correspondence between the components of the claims and the components of the embodiments will be described, but the present invention is not limited to the following examples. As the components of the claims, various other components having the structures or functions described in the claims may also be used.

[0103] In the above-described embodiment, the substrate W is an example of a substrate, the chuck pin 100 is an example of a chuck pin, the inner peripheral surface 114 is an example of an inner peripheral surface, the outer peripheral surface 113 is an example of an outer peripheral surface, the holding portion 110 is an example of a holding portion, and the fixing portion 120 is an example of a fixing portion. The opening 12a and the opening 22a are examples of a first opening and a second opening, respectively, the side wall 12, the side wall 22, and the side wall 23 are examples of a first side wall, a second side wall, and a third side wall, respectively, the pressing portion 10 is an example of a pressing portion, and the pressed portion 20 is an example of a pressed portion.

[0104] The rotation direction R1 and the rotation direction R2 are examples of the first rotation direction and the second rotation direction, respectively. The force applying portion 30 is an example of the force applying portion. The protrusion 115 is an example of the protrusion. The recess 22b is an example of the recess. The tapered surface 12b is an example of the tapered surface. The end portions 31 and 32 are examples of the first end portion and the second end portion, respectively. The hole portion 11b and the hole portion 23a are examples of the first hole portion and the second hole portion, respectively. The main surface portion 11 and the main surface portion 21 are examples of the first main surface portion and the second main surface portion, respectively. The slit 21b is an example of the slit. The rotation driving portion 140 is an example of the rotation driving portion, the plate portion 220 is an example of the plate portion, the substrate holding device 200 is an example of the substrate holding device, the rotation driving portion 210 is an example of the rotation driving portion, and the arm portion 250 is an example of the arm portion.

[0105] 7. Summary of implementation methods

[0106] (Item 1) The chuck pin of Item 1 holds the substrate.

[0107] The chuck pin comprises:

[0108] a holding portion having an inner peripheral surface and an outer peripheral surface capable of abutting against the substrate; and

[0109] a fixing portion for fixing the holding portion in a detachable manner,

[0110] The fixing portion comprises:

[0111] The pressing portion has a first side wall portion having a first opening portion formed therein;

[0112] a pressed portion having a second side wall portion having a second opening portion formed therein; and

[0113] a force applying portion for applying force to the pressing portion in a first rotation direction relative to the pressed portion,

[0114] A protrusion is formed on the inner peripheral surface of the holding portion. The protrusion protrudes inward and is sandwiched between the pressing portion and the pressed portion at the first opening and the second opening.

[0115] In the chuck pin, when the holding part is installed, the holding part is pressed into the fixed part, whereby the pressing part of the fixed part resists the force applied by the force applying part and rotates in the opposite direction of the first rotation direction, and the protrusion of the holding part enters the first opening of the pressing part and the second opening of the pressed part. In the state, the pressing part is rotated in the first rotation direction by the force applied by the force applying part, and the protrusion of the holding part is clamped by the pressing part and the pressed part at the first opening and the second opening. In this way, the holding part can be installed on the fixed part.

[0116] On the other hand, when removing the holding part, the holding part is pulled out from the fixing part while being twisted in the direction opposite to the first rotation direction. Thus, the holding part can be removed from the fixing part. Thus, the holding part can be attached and detached relative to the fixing part with a simple operation. Thus, the holding part can be easily replaced.

[0117] (Second Item) The chuck pin according to the first item may be:

[0118] The second side wall portion of the pressed portion is exposed from the first opening portion of the pressing portion.

[0119] In this case, the holding portion can be fixed to the fixing portion with a simple structure without increasing the size of the chuck pin.

[0120] (Item 3) The chuck pin according to Item 1 or Item 2 may be:

[0121] In the pressed portion, a cutout of the second side wall portion in which the second opening is formed has a recessed portion that abuts against the protruding portion of the holding portion.

[0122] In this case, the protruding portion of the holding portion abuts against the recessed portion of the pressed portion, so the holding portion can be fixed more stably.

[0123] (Item 4) The chuck pin according to Item 3 may be:

[0124] In the pressing portion, the cutout of the first side wall portion in which the first opening is formed has a tapered surface that gradually approaches the recessed portion of the pressed portion toward the first rotation direction.

[0125] In this case, it is easy to guide the protruding portion of the holding portion to the recessed portion of the pressed portion while rotating the pressing portion in the direction opposite to the first rotation direction when attaching the holding portion.

[0126] (Item 5) The chuck pin according to any one of Items 1 to 4 may be:

[0127] The force applying portion has a first end portion,

[0128] The pressing portion further includes a first main surface portion having a first hole portion into which the first end portion of the force applying portion is inserted.

[0129] The pressed portion further includes a second main surface portion having a slit formed therein that extends parallel to the first rotation direction and through which the first end portion of the urging portion is inserted.

[0130] In this case, the pressing portion can be easily rotated without rotating the pressed portion.

[0131] (Item 6) The chuck pin according to any one of Items 1 to 5 may be:

[0132] The pressed portion further includes a third side wall portion formed on the inner side of the second side wall portion.

[0133] The force applying portion is disposed between the second side wall portion and the third side wall portion of the pressed portion.

[0134] In this case, the urging portion can be accommodated compactly.

[0135] (Item 7) The chuck pin according to Item 6 may be:

[0136] The force applying portion has a second end portion,

[0137] A second hole portion into which the second end portion of the biasing portion is inserted is formed in the third side wall portion of the pressed portion.

[0138] In this case, the biasing portion can be easily fixed.

[0139] (Item 8) The chuck pin according to any one of Items 1 to 7 may be:

[0140] It also includes a rotation driving unit that rotates the holding unit and the fixing unit between a holding state in which the substrate is held by the outer peripheral surface of the holding unit abutting against the substrate, and a non-holding state in which the substrate is not held by the outer peripheral surface of the holding unit leaving the substrate.

[0141] In this case, the chuck pin can be used as a swivel pin.

[0142] (Item 9) The substrate holding device of Item 9 includes:

[0143] A chuck pin according to any one of items 1 to 8; and

[0144] A plate portion is provided with the fixing portion of the chuck pin being mounted thereon.

[0145] In this case, since the chuck pin is used, the holding portion can be easily replaced.

[0146] (Item 10) A substrate holding substrate according to Item 9,

[0147] A rotation driving portion for rotating the plate portion may be further included.

[0148] In this case, the substrate can be processed while being rotated.

[0149] (Item 11) The substrate holding device according to Item 9 or Item 10,

[0150] The invention may further include a first arm portion configured to press the holding portion of the chuck pin into the fixing portion while holding the holding portion of the chuck pin.

[0151] In this case, the holding part is automatically mounted on the fixing part by the arm part, thereby saving manpower when replacing the holding part.

[0152] (Item 12) A substrate holding device according to any one of Items 9 to 11,

[0153] The invention may further include a second arm portion that, while holding the holding portion of the chuck pin, twists the holding portion in a second rotation direction opposite to the first rotation direction and pulls the holding portion out of the fixing portion.

[0154] In this case, the holding part is automatically detached from the fixing part by the arm part, thereby saving manpower when replacing the holding part.

Claims

1. A chuck pin for holding a substrate, the chuck pin comprising: A holding portion having an inner peripheral surface and an outer peripheral surface capable of abutting against the substrate; as well as a fixing portion for fixing the holding portion in a detachable manner, The fixing portion comprises: The pressing portion has a first side wall portion having a first opening portion formed therein; a pressed portion having a second side wall portion having a second opening portion formed therein; and a force applying portion for applying force to the pressing portion in a first rotation direction relative to the pressed portion, A protrusion is formed on the inner peripheral surface of the holding portion. The protrusion protrudes inward and is sandwiched between the pressing portion and the pressed portion at the first opening and the second opening.

2. The chuck pin according to claim 1, wherein: The second side wall portion of the pressed portion is exposed from the first opening portion of the pressing portion.

3. The chuck pin according to claim 1 or 2, wherein: In the pressed portion, a cutout of the second side wall portion in which the second opening is formed has a recessed portion that abuts against the protruding portion of the holding portion.

4. The chuck pin according to claim 3, wherein: In the pressing portion, the cutout of the first side wall portion in which the first opening is formed has a tapered surface that gradually approaches the recessed portion of the pressed portion toward the first rotation direction.

5. The chuck pin according to any one of claims 1 to 4, wherein: The force applying portion has a first end portion, The pressing portion further includes a first main surface portion having a first hole portion into which the first end portion of the force applying portion is inserted. The pressed portion further includes a second main surface portion having a slit formed therein that extends parallel to the first rotation direction and through which the first end portion of the biasing portion is inserted.

6. The chuck pin according to any one of claims 1 to 5, wherein: The pressed portion further includes a third side wall portion formed on the inner side of the second side wall portion. The force applying portion is disposed between the second side wall portion and the third side wall portion of the pressed portion.

7. The chuck pin according to claim 6, wherein: The force applying portion has a second end portion, A second hole portion into which the second end portion of the urging portion is inserted is formed in the third side wall portion of the pressed portion.

8. The chuck pin according to any one of claims 1 to 7, further comprising a rotational driving portion, which causes the holding portion and the fixing portion to rotate between a holding state in which the substrate is held by abutting the outer peripheral surface of the holding portion against the substrate, and a non-holding state in which the outer peripheral surface of the holding portion leaves the substrate and does not hold the substrate.

9. A substrate holding device, comprising: A chuck pin as claimed in any one of claims 1 to 8; as well as A plate portion is provided with the fixing portion of the chuck pin being mounted thereon. 10 . The substrate holding device according to claim 9 , further comprising a rotation driving portion that rotates the plate portion. 11 . The substrate holding device according to claim 9 , further comprising a first arm portion configured to press the holding portion of the chuck pin into the fixing portion while holding the holding portion.

12. The substrate holding device according to any one of claims 9 to 11, further comprising a second arm portion, which, while holding the holding portion of the chuck pin, pulls the holding portion out from the fixing portion while twisting the holding portion in a second rotation direction opposite to the first rotation direction.

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