Chip cooling system and control method thereof

Abstract

The invention relates to the technical field of chip cooling, in particular to a chip cooling system which comprises a plurality of cooling plates, an inlet pipe communicated with each inlet branch pipe, an outlet pipe communicated with each outlet branch pipe, a flow control valve arranged on the inlet branch pipe and a liquid inlet temperature sensor arranged on the inlet pipe. And the outlet liquid temperature sensor is arranged on the outlet pipe. When the chips are cooled, numerical values measured by the temperature sensors on the outlet branch pipes corresponding to the chips and numerical values measured by the liquid outlet temperature sensors on the total outlet pipes are analyzed to obtain the cooling condition of the chips by refrigerants and the demand quantity of the chips for the refrigerants; according to the chip cooling system, the opening degree of the flow control valve corresponding to each chip is adjusted, so that the supply amount of the refrigerant in the cooling plate corresponding to each chip can be matched with the requirement of the chip for the refrigerant, the refrigerant is reasonably distributed, and the energy utilization efficiency of the whole chip cooling system is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of chip cooling, and in particular to a system for chip cooling and a control method thereof. Background Art

[0002] In recent years, the computing requirements of chips have become increasingly large, and the construction of data centers has become increasingly large, resulting in a large amount of electricity demand. Chip heat dissipation usually requires mechanical refrigeration to provide cooling. The common air cooling method is that the air conditioner provides cold air to the computer room, the server inhales the cold air and discharges the hot air, and the hot air returns to the air conditioner to form cold air, and the cycle continues. Due to the low heat exchange coefficient and small specific heat capacity of air, the required air temperature is relatively low, the air volume is large, the noise is high, and the energy consumption is high. Therefore, a cooling plate with lower energy consumption than air cooling is usually selected to dissipate the heat of the chip, and a refrigerant is placed in the cooling plate. In the prior art, multiple chips are usually cooled at the same time, and correspondingly, the refrigerant has multiple flow paths. However, in the prior art, the same flow distribution method is used for the refrigerant in each flow path, resulting in insufficient supply of refrigerant when the refrigerant demand of some flow paths exceeds the set value, and excessive supply of refrigerant when the refrigerant demand of some flow paths is lower than the set value, resulting in waste. Summary of the invention

[0003] Based on the above prior art, one of the objectives of the embodiments of the present invention is to provide a system for chip cooling.

[0004] The technical solution adopted by the present invention to solve the technical problem is: providing a system for chip cooling, comprising:

[0005] A cooling plate, wherein a plurality of cooling plates are provided, and each cooling plate is fitted with a corresponding chip, each cooling plate is provided with an inlet branch pipe and an outlet branch pipe, and each outlet branch pipe is provided with an outlet temperature sensor;

[0006] an inlet pipe, each of the inlet branch pipes being in communication with the inlet pipe;

[0007] An outlet pipe, each of the outlet branch pipes is interconnected with the outlet pipe;

[0008] A flow control valve, wherein the flow control valve is arranged on the inlet branch pipe;

[0009] An inlet liquid temperature sensor, wherein the inlet liquid temperature sensor is arranged on the inlet pipe;

[0010] The outlet liquid temperature sensor is arranged on the outlet pipe.

[0011] Furthermore, the chip cooling system also includes a liquid inlet pressure sensor and a liquid outlet pressure sensor, wherein the liquid inlet pressure sensor is arranged on the inlet pipe, and the liquid outlet pressure sensor is arranged on the outlet pipe.

[0012] Based on the technical problems existing in the above-mentioned prior art, a second purpose of an embodiment of the present invention is to provide a control method for controlling a system for chip cooling provided by any of the above-mentioned solutions.

[0013] To achieve the above-mentioned purpose, the technical solution adopted by the present invention to solve the technical problem is: to provide a system control method for chip cooling, the method comprising:

[0014] Acquiring the temperature of the liquid in the outlet branch pipe or acquiring the temperature of the liquid in the outlet branch pipe and the temperature of the liquid in the outlet pipe;

[0015] The temperature of the liquid in the outlet branch pipe is obtained by measuring the outlet temperature sensor on the outlet branch pipe, and the temperature of the liquid in the outlet pipe is obtained by measuring the outlet liquid temperature sensor;

[0016] The opening degree of the corresponding flow control valve is selected according to the temperature of the liquid in the outlet branch pipe or according to the difference between the temperature of the liquid in the outlet branch pipe and the temperature of the liquid in the outlet pipe.

[0017] Further, selecting the opening of the corresponding flow control valve according to the liquid temperature in the outlet branch pipe includes:

[0018] First, set the maximum value of the liquid outlet temperature T max , the middle value of the liquid outlet temperature T mid and the minimum outlet temperature T min and the outlet temperature T of the nth outlet branch pipe n , n is a positive integer greater than 1, if the outlet temperature of the nth outlet branch is T n Greater than the maximum outlet temperature T max , then the opening of the corresponding flow control valve becomes fully open; if the outlet temperature of the nth outlet branch is T n At the maximum outlet temperature T max and the middle value of the outlet temperature T mid , then the opening of the corresponding flow control valve remains unchanged; if the outlet temperature of the nth outlet branch is T n Located at the middle value of the outlet temperature T mid and the minimum outlet temperature T min If the outlet temperature of the nth outlet branch is T n Less than the minimum outlet temperature T min, the corresponding opening of the flow control valve is reduced by 10%.

[0019] Furthermore, the opening degree of the flow control valve is not less than 10%.

[0020] Furthermore, when the outlet temperature of the outlet branch pipe is T n Greater than the maximum outlet temperature T max When the number of cooling plates exceeds 20% of the total number of cooling plates in the system for chip cooling, the water pump speed is increased so that the difference between the water pump inlet pressure Pin and the water pump outlet pressure Pout, i.e. Pin-Pout, is increased by 10%.

[0021] Furthermore, when the outlet temperature of the outlet branch pipe is T n Less than the minimum outlet temperature T min When the number of cooling plates exceeds 20% of the total number of cooling plates in the system for chip cooling, the water pump speed is reduced so that the difference between the water pump inlet pressure Pin and the water pump outlet pressure Pout, i.e. Pin-Pout, is reduced by 10%.

[0022] Further, selecting the opening of the corresponding flow control valve according to the difference between the temperature of the liquid in the outlet branch pipe and the temperature of the liquid in the outlet pipe comprises:

[0023] First, the difference between the temperature of the liquid in the outlet branch pipe and the temperature of the liquid in the outlet pipe is set to deltaT, and the maximum value of the difference between the temperature of the liquid in the outlet branch pipe and the temperature of the liquid in the outlet pipe is deltaT. max , the difference between the liquid temperature in the outlet branch pipe and the liquid temperature in the outlet pipe, deltaT mid The minimum difference between the liquid temperature in the outlet branch pipe and the liquid temperature in the outlet pipe is deltaT min The difference between the liquid temperature in the nth outlet branch pipe and the liquid temperature in the outlet pipe is deltaT n , n is a positive integer greater than 1, if the difference between the liquid temperature in the nth outlet branch pipe and the liquid temperature in the outlet pipe is deltaT n Greater than the maximum value deltaT of the difference between the liquid temperature in the outlet branch pipe and the liquid temperature in the outlet pipe max , the opening of the corresponding flow control valve becomes fully open; if the difference between the liquid temperature in the nth outlet branch pipe and the liquid temperature in the outlet pipe is deltaT n The maximum value deltaT of the difference between the temperature of the liquid in the outlet branch pipe and the temperature of the liquid in the outlet pipe maxThe difference between the liquid temperature in the outlet branch pipe and the liquid temperature in the outlet pipe is the intermediate value deltaT mid , then the opening of the corresponding flow control valve remains unchanged; if the difference between the liquid temperature in the nth outlet branch pipe and the liquid temperature in the outlet pipe is deltaT n The difference between the temperature of the liquid in the outlet branch pipe and the temperature of the liquid in the outlet pipe is deltaT mid The minimum value deltaT of the difference between the liquid temperature in the outlet branch pipe and the liquid temperature in the outlet pipe min If the difference between the liquid temperature in the nth outlet branch pipe and the liquid temperature in the outlet pipe is deltaT n is less than the minimum value deltaT of the difference between the liquid temperature in the outlet branch pipe and the liquid temperature in the outlet pipe min , the corresponding opening of the flow control valve is reduced by 10%.

[0024] Furthermore, the opening degree of the flow control valve is not less than 20%.

[0025] Furthermore, when the difference between the temperature of the liquid in the outlet branch pipe and the temperature of the liquid in the outlet pipe is T n Greater than the maximum value T of the difference between the liquid temperature in the outlet branch pipe and the liquid temperature in the outlet pipe max When the number of cooling plates exceeds 20% of the total number of cooling plates in the system for chip cooling, the water pump speed is increased so that the difference between the water pump inlet pressure Pin and the water pump outlet pressure Pout, i.e. Pin-Pout, is increased by 10%.

[0026] The beneficial effects of the present invention are as follows: a system for chip cooling is provided, which includes a plurality of cooling plates, an inlet pipe connected to each inlet branch pipe, an outlet pipe connected to each outlet branch pipe, a flow control valve arranged on the inlet branch pipe, a liquid inlet temperature sensor arranged on the inlet pipe, and a liquid outlet temperature sensor arranged on the outlet pipe. Each cooling plate is provided with an inlet branch pipe and an outlet branch pipe, and each outlet branch pipe is provided with an outlet temperature sensor. When cooling the chip, the cooling condition of the chip by the refrigerant and the refrigerant demand of the chip are obtained by analyzing the values ​​measured by the temperature sensor on the outlet branch pipe corresponding to each chip and the values ​​measured by the liquid outlet temperature sensor on the total outlet pipe. The opening of the flow control valve corresponding to each chip is adjusted so that the supply of refrigerant in the cooling plate corresponding to each chip can be adapted to the refrigerant demand of the chip, thereby achieving a reasonable distribution of the refrigerant and improving the energy efficiency of the entire chip cooling system. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0028] In the figure: Figure 1 An overall structural diagram of a system for chip cooling provided in an embodiment of the present invention (the direction of the arrow in the figure is the direction of refrigerant flow).

[0029] Explanation of the reference numerals: 100, system for chip cooling; 10, cooling plate; 11, inlet branch pipe; 12, outlet branch pipe; 121, outlet temperature sensor; 20, flow control valve; 30, inlet liquid temperature sensor; 40, outlet liquid temperature sensor; 50, inlet pipe; 60, outlet pipe; 70, inlet liquid pressure sensor; 80, outlet liquid pressure sensor; 200, chip. DETAILED DESCRIPTION

[0030] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer, the present invention is now described in detail in conjunction with the accompanying drawings. This figure is a simplified schematic diagram, which only illustrates the basics of the present invention in an illustrative manner, so it only shows the composition related to the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0031] Please refer to Figure 1 The embodiment of the present invention provides a system 100 for chip cooling, including a cooling plate 10, a flow control valve 20, a liquid inlet temperature sensor 30, a liquid outlet temperature sensor 40, an inlet pipe 50 and an outlet pipe 60. There are multiple cooling plates 10, and each cooling plate 10 is attached to the corresponding chip 200, and each cooling plate 10 is provided with an inlet branch pipe 11 and an outlet branch pipe 12. The refrigerant in the inlet pipe 50 enters the corresponding cooling plate 10 through the corresponding inlet branch pipe 11 to cool and dissipate the chip 200. After heat dissipation, the refrigerants in the multiple cooling plates 10 enter the outlet pipe 60 through the corresponding outlet branch pipes 12 and are collected.

[0032] Each outlet branch pipe 12 is provided with an outlet temperature sensor 121, and each inlet branch pipe 11 is connected to the inlet pipe 50. Each outlet branch pipe 12 is connected to the outlet pipe 60, the flow control valve 20 is arranged on the inlet branch pipe 11, the inlet temperature sensor 30 is arranged on the inlet pipe 50, and the outlet temperature sensor 40 is arranged on the outlet pipe 60.

[0033] Specifically, in this embodiment, both the inlet pipe 50 and the outlet pipe 60 are provided with a water pump for driving the refrigerant, but the water pump is not shown in the figure.

[0034] The chip 200 cooling system 100 further includes a liquid inlet pressure sensor 70 and a liquid outlet pressure sensor 80, wherein the liquid inlet pressure sensor 70 is disposed on the inlet pipe 50, and the liquid outlet pressure sensor 80 is disposed on the outlet pipe 60. Specifically, in this embodiment, the readings of the liquid inlet pressure sensor 70 and the liquid outlet pressure sensor 80 can be used as reference data for measuring the refrigerant temperature.

[0035] The embodiment of the present invention further provides a control method for controlling the system 100 for chip cooling provided by any of the above embodiments.

[0036] The method comprises:

[0037] Obtaining the liquid temperature in the outlet branch pipe 12;

[0038] The temperature of the liquid in the outlet branch pipe 12 is obtained by measuring the outlet temperature sensor 121 on the corresponding outlet branch pipe 12;

[0039] The opening degree of the flow control valve 20 is selected according to the liquid temperature in the outlet branch pipe 12 .

[0040] The opening degree of the flow control valve 20 is selected according to the liquid temperature in the outlet branch pipe 12, including:

[0041] First, set the maximum value of the liquid outlet temperature T max , the middle value of the liquid outlet temperature T mid and the minimum outlet temperature T min and the outlet temperature T of the nth outlet branch n , n is a positive integer greater than 1, if the outlet temperature of the nth outlet branch pipe 12 is T n Greater than the maximum outlet temperature T max , the opening of the corresponding flow control valve 20 becomes fully open; if the outlet temperature of the nth outlet branch pipe 12 is T n At the maximum outlet temperature T max and the middle value of the outlet temperature T mid If the outlet temperature of the nth outlet branch pipe 12 is T n Located at the middle value of the outlet temperature T mid and the minimum outlet temperature T min , the opening of the corresponding flow control valve 20 is reduced by 5%; if the outlet temperature of the nth outlet branch pipe 12 is T n Less than the minimum outlet temperature T min , the corresponding opening of the flow control valve 20 is reduced by 10%, and the calculation cycle of the above process is 2 minutes. Further, the opening of the flow control valve 20 in the above process is not less than 10%.

[0042] Specifically, the maximum outlet temperature Tmax , the middle value of the liquid outlet temperature T mid and the minimum outlet temperature T min The general settings are 55, 50, 45, and the unit is ℃.

[0043] When the outlet temperature of the outlet branch pipe 12 is T n Greater than the maximum outlet temperature T max When the number of cooling plates 10 exceeds 20% of the total number of cooling plates 10 in the system 100 for chip cooling, the water pump speed is increased so that the difference between the water pump inlet pressure Pin and the water pump outlet pressure Pout, i.e. Pin-Pout, is increased by 10%.

[0044] When the outlet temperature of the outlet branch pipe 12 is T n Less than the minimum outlet temperature T min When the number of cooling plates exceeds 20% of the total number of cooling plates 10 in the system 100 for chip cooling, the water pump speed is reduced so that the difference between the water pump inlet pressure Pin and the water pump outlet pressure Pout, i.e. Pin-Pout, is reduced by 10%. The calculation cycle of the above process is 2 minutes.

[0045] In some other embodiments, the method comprises:

[0046] Obtaining the liquid temperature in the outlet branch pipe 12 and the liquid temperature in the outlet pipe 60;

[0047] The temperature of the liquid in the outlet branch pipe 12 is measured by the outlet temperature sensor 121 on the corresponding outlet branch pipe 12, and the temperature of the liquid in the outlet pipe 60 is measured by the outlet liquid temperature sensor 61;

[0048] The opening degree of the corresponding flow control valve 20 is selected according to the difference between the temperature of the liquid in the outlet branch pipe 12 and the temperature of the liquid in the outlet pipe 60. The opening degree of the corresponding flow control valve 20 is selected according to the difference between the temperature of the liquid in the outlet branch pipe 12 and the temperature of the liquid in the outlet pipe 60, including:

[0049] First, the difference between the temperature of the liquid in the outlet branch pipe 12 and the temperature of the liquid in the outlet pipe 60 is set to deltaT. The maximum difference between the temperature of the liquid in the outlet branch pipe 12 and the temperature of the liquid in the outlet pipe 60 is deltaT. max , the difference between the liquid temperature in the outlet branch pipe 12 and the liquid temperature in the outlet pipe 60 is the intermediate value deltaT mid The minimum difference between the liquid temperature in the outlet branch pipe 12 and the liquid temperature in the outlet pipe 60 is deltaT min The difference between the liquid temperature in the nth outlet branch pipe 12 and the liquid temperature in the outlet pipe 60 is deltaTn , n is a positive integer greater than 1, if the difference between the liquid temperature in the nth outlet branch pipe 12 and the liquid temperature in the outlet pipe 60 is deltaT n Greater than the maximum difference deltaT between the liquid temperature in the outlet branch pipe 12 and the liquid temperature in the outlet pipe 60 max , the opening of the corresponding flow control valve 20 becomes fully open; if the difference between the liquid temperature in the nth outlet branch pipe 12 and the liquid temperature in the outlet pipe 60 is deltaT n The maximum value deltaT of the difference between the temperature of the liquid in the outlet branch pipe 12 and the temperature of the liquid in the outlet pipe 60 is max The difference between the liquid temperature in the outlet branch pipe 12 and the liquid temperature in the outlet pipe 60 is deltaT mid , the opening of the corresponding flow control valve 20 remains unchanged; if the difference between the liquid temperature in the nth outlet branch pipe 12 and the liquid temperature in the outlet pipe 60 is deltaT n The difference between the temperature of the liquid in the outlet branch pipe 12 and the temperature of the liquid in the outlet pipe 60 is deltaT mid The minimum difference between the liquid temperature in the outlet branch pipe 12 and the liquid temperature in the outlet pipe 60 is deltaT min If the difference between the liquid temperature in the nth outlet branch pipe 12 and the liquid temperature in the outlet pipe 60 is deltaT n is less than the minimum value deltaT of the difference between the liquid temperature in the outlet branch pipe 12 and the liquid temperature in the outlet pipe 60 min , the corresponding opening of the flow control valve 20 is reduced by 10%, and the calculation cycle of the above process is 2 minutes. Further, the opening of the flow control valve 20 in the above process is not less than 20%.

[0050] Specifically, the maximum difference between the liquid temperature in the outlet branch pipe 12 and the liquid temperature in the outlet pipe 60 is deltaT max , the difference between the liquid temperature in the outlet branch pipe 12 and the liquid temperature in the outlet pipe 60 is the intermediate value deltaT mid The minimum difference between the liquid temperature in the outlet branch pipe 12 and the liquid temperature in the outlet pipe 60 is deltaT min The common settings are 9, 6 and 3, in degrees Celsius.

[0051] When the difference between the liquid temperature in the outlet branch pipe 12 and the liquid temperature in the outlet pipe 60 is n Greater than the maximum value T of the difference between the liquid temperature in the outlet branch pipe 12 and the liquid temperature in the outlet pipe 60 maxWhen the number of cooling plates 10 exceeds 20% of the total number of cooling plates 10 in the system 100 for chip cooling, the water pump speed is increased so that the difference between the water pump inlet pressure Pin and the water pump outlet pressure Pout, i.e. Pin-Pout, is increased by 10%.

[0052] When the difference between the liquid temperature in the outlet branch pipe 12 and the liquid temperature in the outlet pipe 60 is n is less than the minimum value deltaT of the difference between the liquid temperature in the outlet branch pipe 12 and the liquid temperature in the outlet pipe 60 min When the number of cooling plates exceeds 20% of the total number of cooling plates 10 in the system 100 for chip cooling, the water pump speed is reduced so that the difference between the water pump inlet pressure Pin and the water pump outlet pressure Pout, i.e. Pin-Pout, is reduced by 10%. The calculation cycle of the above process is 2 minutes.

[0053] The control method of the chip cooling system 100 described in any of the above embodiments measures the value measured by the temperature sensor on the outlet branch pipe 12 corresponding to each chip 200 and the value measured by the liquid outlet temperature sensor 61 on the total outlet pipe 60, and analyzes the cooling condition of the chip 200 by the refrigerant and the refrigerant demand of the chip 200, and adjusts the opening of the flow control valve 20 corresponding to each chip 200 accordingly, so that the supply of refrigerant in the cooling plate 10 corresponding to each chip 200 can be adapted to the refrigerant demand of the chip 10, thereby achieving a reasonable distribution of the refrigerant and improving the energy utilization efficiency of the entire chip cooling system 100.

Claims

1. A system for chip cooling, characterized in that, include: A cooling plate, wherein a plurality of cooling plates are provided, and each cooling plate is fitted with a corresponding chip, each cooling plate is provided with an inlet branch pipe and an outlet branch pipe, and each outlet branch pipe is provided with an outlet temperature sensor; an inlet pipe, each of the inlet branch pipes being in communication with the inlet pipe; An outlet pipe, each of the outlet branch pipes is interconnected with the outlet pipe; A flow control valve, wherein the flow control valve is arranged on the inlet branch pipe; An inlet liquid temperature sensor, wherein the inlet liquid temperature sensor is arranged on the inlet pipe; The outlet liquid temperature sensor is arranged on the outlet pipe.

2. The chip cooling system according to claim 1, characterized in that :The system for chip cooling also includes a liquid inlet pressure sensor and a liquid outlet pressure sensor, the liquid inlet pressure sensor is arranged on the inlet pipe, and the liquid outlet pressure sensor is arranged on the outlet pipe.

3. A control method for a chip cooling system, characterized in that : Used to control the system for chip cooling according to any one of claims 1-2, the method comprising: Acquiring the temperature of the liquid in the outlet branch pipe or acquiring the temperature of the liquid in the outlet branch pipe and the temperature of the liquid in the outlet pipe; The temperature of the liquid in the outlet branch pipe is obtained by measuring the outlet temperature sensor on the outlet branch pipe, and the temperature of the liquid in the outlet pipe is obtained by measuring the outlet liquid temperature sensor; The opening degree of the corresponding flow control valve is selected according to the temperature of the liquid in the outlet branch pipe or according to the difference between the temperature of the liquid in the outlet branch pipe and the temperature of the liquid in the outlet pipe.

4. The control method for a chip cooling system according to claim 3, characterized in that : Selecting the opening of the corresponding flow control valve according to the liquid temperature in the outlet branch pipe, including: First, set the maximum value of the liquid outlet temperature T max , the middle value of the liquid outlet temperature T mid and the minimum outlet temperature T min and the outlet temperature T of the nth outlet branch pipe n , n is a positive integer greater than 1, if the outlet temperature of the nth outlet branch is T n Greater than the maximum outlet temperature T max , then the opening of the corresponding flow control valve becomes fully open; if the outlet temperature of the nth outlet branch is T n At the maximum outlet temperature T max and the middle value of the outlet temperature T mid , then the opening of the corresponding flow control valve remains unchanged; if the outlet temperature of the nth outlet branch is T n Located at the middle value of the outlet temperature T mid and the minimum outlet temperature T min If the outlet temperature of the nth outlet branch is T n Less than the minimum outlet temperature T min , the corresponding opening of the flow control valve is reduced by 10%.

5. The control method for a chip cooling system according to claim 3, characterized in that :The opening of the flow control valve is not less than 10%.

6. The control method for a chip cooling system according to claim 3, characterized in that : When the outlet temperature of the outlet branch pipe is T n Greater than the maximum outlet temperature T max When the number of cooling plates exceeds 20% of the total number of cooling plates in the system for chip cooling, the water pump speed is increased so that the difference between the water pump inlet pressure Pin and the water pump outlet pressure Pout, i.e. Pin-Pout, is increased by 10%.

7. The control method for a chip cooling system according to claim 3, characterized in that : When the outlet temperature of the outlet branch pipe is T n Less than the minimum outlet temperature T min When the number of cooling plates exceeds 20% of the total number of cooling plates in the system for chip cooling, the water pump speed is reduced so that the difference between the water pump inlet pressure Pin and the water pump outlet pressure Pout, i.e. Pin-Pout, is reduced by 10%.

8. The control method for a chip cooling system according to claim 3, characterized in that : Selecting the opening of the corresponding flow control valve according to the difference between the liquid temperature in the outlet branch pipe and the liquid temperature in the outlet pipe, comprising: First, the difference between the temperature of the liquid in the outlet branch pipe and the temperature of the liquid in the outlet pipe is set to deltaT, and the maximum value of the difference between the temperature of the liquid in the outlet branch pipe and the temperature of the liquid in the outlet pipe is deltaT. max , the difference between the liquid temperature in the outlet branch pipe and the liquid temperature in the outlet pipe, deltaT mid The minimum difference between the liquid temperature in the outlet branch pipe and the liquid temperature in the outlet pipe is deltaT min The difference between the liquid temperature in the nth outlet branch pipe and the liquid temperature in the outlet pipe is deltaT n , n is a positive integer greater than 1, if the difference between the liquid temperature in the nth outlet branch pipe and the liquid temperature in the outlet pipe is deltaT n Greater than the maximum value deltaT of the difference between the liquid temperature in the outlet branch pipe and the liquid temperature in the outlet pipe max , the opening of the corresponding flow control valve becomes fully open; if the difference between the liquid temperature in the nth outlet branch pipe and the liquid temperature in the outlet pipe is deltaT n The maximum value deltaT of the difference between the temperature of the liquid in the outlet branch pipe and the temperature of the liquid in the outlet pipe max The difference between the liquid temperature in the outlet branch pipe and the liquid temperature in the outlet pipe is the intermediate value deltaT mid , then the opening of the corresponding flow control valve remains unchanged; if the difference between the liquid temperature in the nth outlet branch pipe and the liquid temperature in the outlet pipe is deltaT n The difference between the temperature of the liquid in the outlet branch pipe and the temperature of the liquid in the outlet pipe is deltaT mid The minimum value deltaT of the difference between the liquid temperature in the outlet branch pipe and the liquid temperature in the outlet pipe min If the difference between the liquid temperature in the nth outlet branch pipe and the liquid temperature in the outlet pipe is deltaT n is less than the minimum value deltaT of the difference between the liquid temperature in the outlet branch pipe and the liquid temperature in the outlet pipe min , the corresponding opening of the flow control valve is reduced by 10%.

9. The control method for a chip cooling system according to claim 8, characterized in that :The opening of the flow control valve is not less than 20%.

10. The control method for a chip cooling system according to claim 3, characterized in that : When the difference between the liquid temperature in the outlet branch pipe and the liquid temperature in the outlet pipe is T n Greater than the maximum value T of the difference between the liquid temperature in the outlet branch pipe and the liquid temperature in the outlet pipe max When the number of cooling plates exceeds 20% of the total number of cooling plates in the system for chip cooling, the water pump speed is increased so that the difference between the water pump inlet pressure Pin and the water pump outlet pressure Pout, i.e. Pin-Pout, is increased by 10%.

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