Photomask substrate blank cutting device

Abstract

The invention belongs to the technical field of cutting devices, and particularly relates to a photomask substrate blank cutting device which comprises a working table, a lifting table and a cutting tool arranged on the lifting table, a water storage cavity is formed in the working table, a surrounding frame is arranged at the top end of the working table, and a supporting table used for fixing a photomask substrate blank is arranged in the surrounding frame. A water passing pipe is arranged in the workbench, an overflow pipe is arranged at the top end of the water passing pipe and used for conveying water flow to the surface of the photomask substrate blank, a siphon is arranged in the enclosure frame, one end of the siphon extends to the water storage cavity, and an opening of the other end of the siphon is not higher than the top face of the photomask substrate blank. The siphon is arranged on the bottom surface of the photomask substrate blank and is not lower than the bottom surface of the photomask substrate blank, the outer wall of the siphon is sleeved with a water limiting pipe, a siphon opening is formed in the outer wall of the water limiting pipe, and through cooperative use of the structures, the influence of dust particles on the working environment can be effectively reduced.

Description

Technical Field

[0001] The invention belongs to the technical field of cutting devices, in particular to a photomask substrate blank cutting device. Background Art

[0002] Photomask blanks are mainly used to make photomasks, which are crucial materials in the fields of microelectronics, microfabrication, optoelectronics, etc. Photomask blanks are mainly made of high-purity quartz glass, and their structure usually includes two parts: substrate and light-shielding film. In the manufacturing process, a thin film is first deposited on a flat, high-finish glass substrate through a specific process (such as DC magnetron sputtering) to form a chromium film substrate, and then a layer of photoresist (photoresist) or electron beam resist is coated on it to make a uniform chrome plate (i.e., photomask base plate).

[0003] Compared with laser cutting equipment, mechanical cutting equipment usually has lower purchase and maintenance costs, and mechanical cutting is suitable for blanks of various materials and thicknesses, so mechanical cutting is the most common choice.

[0004] For example, the disclosed patent: CN220219161U discloses a photomask blank cutting tool, which uses relatively arranged support frames to clamp the workpiece, and then uses cutting devices on both sides to cut the workpiece, thereby solving the problem of water absorption when the workpiece is laid flat and cut, which causes the quartz glass to crack due to excessive stress.

[0005] However, in the above-mentioned patent, by placing the blank sheet upright, the cutting direction is limited, requiring a more complicated cutting path and more cutting steps, thereby affecting the cutting efficiency. In addition, during the cutting process of the upright blank sheet, since there is no obstruction around the photomask substrate blank sheet, the dust particles can diffuse more freely in all directions under the action of the airflow, and there is no obstacle to limit their movement, so they are more likely to be widely dispersed in the air, affecting the air working environment.

[0006] To this end, the present invention provides a photomask substrate blank cutting device. Summary of the invention

[0007] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0008] The technical solution adopted by the present invention to solve the technical problem is: a photomask substrate blank cutting device described in the present invention comprises a workbench, a lifting platform and a cutting tool arranged on the lifting platform, and a water storage chamber is provided inside the workbench; A frame is provided on the top of the workbench, and a support platform for fixing the photomask substrate blank is provided inside the frame; A water pipe is arranged inside the workbench, and an overflow pipe is arranged at the top of the water pipe for delivering water to the surface of the photomask blank; A siphon is provided inside the surrounding frame, one end of the siphon extends to the water storage chamber, and the opening of the other end of the siphon is not higher than the top surface of the photomask substrate blank and not lower than the bottom surface of the photomask substrate blank; The outer wall of the siphon tube is sleeved with a water limit tube, and the outer wall of the water limit tube is provided with a siphon port, the height of the siphon port is lower than the top opening of the siphon tube, but not lower than the bottom surface of the photomask blank; A water circulation component is arranged on the workbench and is used for conveying the water in the water storage chamber to the inside of the water pipe.

[0009] The water circulation component includes a water pump, a first output pipe and a second output pipe. The water pump is arranged on one side of the workbench. The suction end of the water pump is connected to the water storage chamber, the output end of the water pump is connected to the first output pipe, one end of the second output pipe is connected to the first output pipe, and the other end of the second output pipe extends into the water pipe.

[0010] A flow port is provided inside the lifting platform, and a water inlet corresponding to the flow port is provided on the top of the workbench. Both the flow port and the water inlet are arranged in a C shape, and one end of the first output pipe away from the water pump extends to the inside of the lifting platform.

[0011] A filter plate is arranged inside the water storage chamber, a hollow upper slide is slidably mounted on the top surface of the filter plate, a debris discharge pipe is arranged on the upper slide, a hollow lower slide is slidably mounted on the bottom end of the filter plate, the upper slide and the lower slide are attracted by magnetic force, a first water inlet is arranged at the bottom of the upper slide, and a second water inlet is arranged at the top of the lower slide.

[0012] A piston cylinder is fixedly installed at the bottom end of the lower slide plate, a first piston is slidably installed inside the piston cylinder, and a first tube and a second tube are arranged on the piston cylinder; The other end of the first tube extends to the interior of the lower slide plate, and the other end of the second tube extends below the liquid surface of the water storage chamber; Both the first pipe and the second pipe are provided with a one-way valve.

[0013] The suction end of the water pump is fixedly connected with a bellows, the other end of the bellows is fixedly connected with a bent pipe, and the other end of the bent pipe passes through the piston cylinder; One end of the first piston is fixedly connected to a slide rod, the interior of the slide rod is threadedly connected to a reciprocating screw rod, and the end of the reciprocating screw rod away from the first piston extends to the interior of the curved pipe and is fixedly mounted with a turbine blade.

[0014] A rotating rod is rotatably mounted inside the lower slide plate, and a shielding block for shielding the second water inlet is fixedly mounted on the outer wall of the rotating rod; A second piston is elastically installed inside the lower slide plate, one end of the rotating rod passes through the second piston and is slidably connected to the second piston, a ring is slidably installed on the outer wall of the rotating rod, the ring is fixedly connected to the second piston, a first spiral groove is opened on the outer wall of the rotating rod, and a first guide block extending to the first spiral groove is fixedly installed inside the ring.

[0015] A slide groove is provided on the inner wall of the workbench, a moving gear is arranged inside the slide groove, a tooth groove meshing with the moving gear is provided inside the slide groove, and one end of the rotating rod passes through the lower slide plate and is connected with the moving gear.

[0016] One end of the rotating rod extends to the inside of the moving gear and is fixedly installed with the rotating gear. The first and second gear rods are elastically installed inside the moving gear. A top block is rotatably installed between the first and second gear rods.

[0017] A magnetic rod is slidably mounted inside the top block, a second spiral groove is formed on the outer wall of the magnetic rod, and a second guide block extending into the second spiral groove is fixedly mounted on the inner wall of the top block; One end of the slide slot is provided with a second magnetic block for repelling the magnetic rod, and the other end of the slide slot is provided with a first magnetic block for attracting the magnetic rod.

[0018] The beneficial effects of the present invention are as follows: 1. A photomask blank cutting device described in the present invention transports water to a water pipe and a lifting platform through a water circulation component, and the clean water discharged through an overflow pipe flows on the photomask blank to ensure the cleanliness of the surface of the photomask blank. The clean water discharged through a flow port opened on the lifting platform will form a water curtain in the air, which can block the generated water splashes and the dust particles thrown out. Through the cooperation of a siphon tube and a water limit tube, the water level in the enclosure can be kept in contact with the photomask blank at all times, thereby ensuring the heat dissipation effect and reducing the impact of dust particles on the working environment.

[0019] 2. In the photomask blank cutting device described in the present invention, when water flows toward the water pump, it will impact the turbine blades, causing it to drive the reciprocating screw to rotate. At this time, the sliding rod will drive the first piston to slide back and forth inside the piston cylinder, and cooperate with the first tube and the second tube to transport the clean water in the water storage chamber to the inside of the lower sliding plate, and push the second piston to drive the sleeve ring to slide through pressure, so that the rotating rod drives the block to release the obstruction of the second water inlet. At this time, the high-pressure gas in the lower sliding block will first spray the filter plate from bottom to top, and then the clean water will flow upward from the lower sliding block to rinse the filter plate, completing the secondary cleaning, and cooperating with the top block to switch the top pressure on the first block rod or the second block rod, the movement of the moving gear in the slide groove can be controlled, and the efficiency of the water circulation is guaranteed by cleaning the filter plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The present invention will be further described below in conjunction with the accompanying drawings.

[0021] Figure 1 It is a stereogram in the present invention; Figure 2 It is a structural schematic diagram of the lifting platform in the present invention; Figure 3 It is a structural schematic diagram of the filter plate in the present invention; Figure 4 The present invention Figure 3 A in the enlarged view; Figure 5 It is a schematic diagram of the structure of the upper slide plate in the present invention; Figure 6 It is a structural schematic diagram of the piston cylinder in the present invention; Figure 7 The present invention Figure 6 The enlarged view of point B in the figure; Figure 8 The present invention Figure 6 The enlarged view of point C in the figure; Fig. 9 The present invention Figure 6 The enlarged view of point D in the figure; Fig.10 is a cross-sectional view of the mobile gear in the present invention; Fig.11 The present invention Fig.10 Enlarged view of point E in FIG.

[0022] In the figure: 1, workbench; 2, lifting platform; 3, water inlet; 4, frame; 5, water pump; 6, first output pipe; 7, flow outlet; 8, second output pipe; 9, water pipe; 10, overflow pipe; 11, filter plate; 12, water limit pipe; 13, siphon; 14, siphon outlet; 15, bellows; 16, upper slide; 17, lower slide; 18, piston cylinder; 19, first pipe; 20, second pipe; 21, first piston; 22, slide rod; 23, first magnetic block; 24, elbow; 2 5. Reciprocating screw; 26. Turbine blade; 27. First water inlet; 28. Rotating rod; 29. ​​Block; 30. Ring; 31. First spiral groove; 32. First guide block; 33. Second piston; 34. Second magnetic block; 35. Second water inlet; 36. Moving gear; 37. Tooth groove; 38. Rotating gear; 39. First gear lever; 40. Second gear lever; 41. Magnetic rod; 42. Second spiral groove; 43. Second guide block; 44. Top block; 45. Slide; 46. Drain pipe. DETAILED DESCRIPTION

[0023] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0024] like Figures 1 to 11 As shown, a photomask substrate blank cutting device according to an embodiment of the present invention comprises a workbench 1, a lifting platform 2 and a cutting tool arranged on the lifting platform 2, and a water storage chamber is provided inside the workbench 1; The cutting tool can be controlled to cut the photomask substrate blank by controlling the height of the lifting platform 2, and clean water is stored in the water storage chamber.

[0025] A frame 4 is disposed on the top of the workbench 1, and a support platform for fixing the photomask substrate blank is disposed inside the frame 4 (the support device is a technical means well known to those skilled in the art, and will not be described in detail herein); The surrounding frame 4 is hollow, and the photomask substrate blank to be cut can be placed on the support table for fixing, and then the cutting tool can be controlled to cut the photomask substrate blank.

[0026] A water pipe 9 is provided inside the workbench 1, and an overflow pipe 10 is provided at the top of the water pipe 9 for delivering water to the surface of the photomask blank. An overflow pipe 10 is arranged on the side of the enclosure 4 facing the staff. A plurality of overflow pipes 10 are arranged, and the plurality of overflow pipes 10 are equidistantly arranged. The overflow pipe 10 can spray the clean water in the water pipe 9. At this time, the water will flow toward the end of the photomask substrate away from the staff. The flow of the water can wash away the dust particles generated by the cutting tool when cutting the photomask substrate. In addition, by setting the overflow pipe 10, the surface of the photomask substrate can always maintain the effect of water flow, which can not only reduce the dispersion of dust, but also wash the surface of the photomask substrate, further improving the effect of cutting the photomask substrate.

[0027] When water falls from the photomask substrate blank, it will accumulate inside the surrounding frame 4. When the water level is in contact with the bottom surface of the photomask substrate blank, the bottom of the photomask substrate blank will be immersed in the water. By improving the heat dissipation effect, the problem of heat melting caused by the heat energy generated by the cutting tool when cutting the photomask substrate blank can be solved, thereby further improving the quality of cutting the photomask substrate blank.

[0028] A siphon tube 13 is provided inside the surrounding frame 4, one end of the siphon tube 13 extends to the water storage chamber, the opening of the other end of the siphon tube 13 is not higher than the top surface of the photomask blank and not lower than the bottom surface of the photomask blank, the outer wall of the siphon tube 13 is sleeved with a water limit tube 12, the outer wall of the water limit tube 12 is provided with a siphon port 14, the height of the siphon port 14 is lower than the top opening of the siphon tube 13, but not lower than the bottom surface of the photomask blank; When the height of the water flowing into the enclosure 4 exceeds the opening of the siphon tube 13, the water will be sucked into the siphon tube 13 through the siphon port 14 opened on the outer wall of the water limit tube 12, and transported into the water storage chamber until the liquid level is lower than the siphon port 14 opened on the outer wall of the water limit tube 12. At this time, air enters through the siphon port 14 to destroy the siphoning of the siphon tube 13. By setting the above structure, the water level in the enclosure 4 can always be in contact with the photomask substrate blank, ensuring the heat dissipation effect on the photomask substrate blank. At the same time, it can avoid the problem that the water with dust particles in the enclosure 4 re-contaminates the surface of the photomask substrate blank when the water level is higher than the photomask substrate blank, thereby ensuring the heat dissipation effect and improving the cutting effect on the photomask substrate blank.

[0029] A water circulation component is provided on the workbench 1 for conveying the water in the water storage chamber to the inside of the water pipe 9 .

[0030] As a preferred embodiment of the present invention, the water circulation component includes a water pump 5, a first output pipe 6 and a second output pipe 8. The water pump 5 is arranged on one side of the workbench 1, the suction end of the water pump 5 is connected to the water storage chamber, the output end of the water pump 5 is connected to the first output pipe 6, one end of the second output pipe 8 is connected to the first output pipe 6, and the other end of the second output pipe 8 extends into the water pipe 9.

[0031] When the water pump 5 is started, the clean water in the water storage chamber can be pumped out and discharged through the first output pipe 6, and part of the water can be transported to the inside of the water pipe 9 through the setting of the second output pipe 8. Under the pressure of the water pump 5, the clean water will be discharged through the overflow pipe 10 and flow on the photomask substrate, ensuring the cleanliness of the photomask substrate during cutting.

[0032] As a preferred embodiment of the present invention, a flow outlet 7 is opened inside the lifting platform 2, and a water inlet 3 corresponding to the flow outlet 7 is opened at the top of the workbench 1. The flow outlet 7 and the water inlet 3 are both arranged in a C shape, and the end of the first output pipe 6 away from the water pump 5 extends to the interior of the lifting platform 2.

[0033] A cavity is provided inside the lifting platform 2. When the water pump 5 is started, the water discharged from the first output pipe 6 will enter the cavity. The clean water entering the cavity can be discharged through the flow port 7 provided inside the lifting platform 2. Since the flow port 7 is provided in a C shape, when the water is discharged from the flow port 7, a water curtain will be formed in the air, wrapping the entire frame 4 except for one side of the staff. At the same time, the water curtain will be received by the water inlet 3 provided on the workbench 1. The water curtain entering the water inlet 3 will directly enter the water storage chamber for subsequent water circulation.

[0034] Since the surface of the photomask substrate blank is cleaned by flowing water, when the cutting tool cuts the photomask substrate blank, the high-speed rotating tool will drive the water to form splashes and splash. The formed water curtain can block the generated splashes and the dust particles thrown out. The flow of the water curtain can also send the dust particles directly into the water storage chamber.

[0035] As a preferred embodiment of the present invention, a filter plate 11 is provided inside the water storage chamber, and a hollow upper slide plate 16 is slidably installed on the top surface of the filter plate 11, and a drainage pipe 46 is provided on the upper slide plate 16. A hollow lower slide plate 17 is slidably installed on the bottom end of the filter plate 11. The upper slide plate 16 and the lower slide plate 17 are attracted by magnetic force. A first water inlet 27 is provided at the bottom of the upper slide plate 16, and a second water inlet 35 is provided at the top of the lower slide plate 17.

[0036] The filter plate 11 can block the dust particles brought by the water curtain and the dust particles transported by the siphon 13, thereby preventing the dust particles from damaging the water pump 5.

[0037] The two sides of the lower slide plate 17 are slidably connected to the inner wall of the workbench 1 through support rods to play a supporting effect. At the same time, under the action of magnetic force, the sliding of the lower slide plate 17 can synchronously drive the upper slide plate 16 to slide. The clean water inside the lower slide plate 17 can be discharged through the second water inlet 35 and enter the interior of the upper slide plate 16 from the first water inlet 27. Since the filter plate 11 is arranged between the upper slide plate 16 and the lower slide plate 17, the filter plate 11 will have a recoil effect in the process of water flowing from bottom to top. With the upper slide plate 16 and the lower slide plate 17 sliding on the surface of the filter plate 11, the cleaning effect of the filter plate 11 can be further improved. Finally, the sewage in the upper slide plate 16 is discharged through the drainage pipe 46. The other end of the drainage pipe 46 can also be connected to an external negative pressure device to assist in the discharge of sewage.

[0038] As a preferred embodiment of the present invention, a piston cylinder 18 is fixedly installed at the bottom end of the lower slide plate 17, a first piston 21 is slidably installed inside the piston cylinder 18, and a first tube 19 and a second tube 20 are arranged on the piston cylinder 18; The other end of the first tube 19 extends to the interior of the lower slide plate 17, and the other end of the second tube 20 extends below the liquid surface of the water storage chamber; Both the first pipe 19 and the second pipe 20 are provided with a one-way valve.

[0039] The one-way valve provided on the first tube 19 can block the flow direction toward the piston cylinder 18 , and the one-way valve provided on the second tube 20 can block the flow direction of the piston cylinder 18 toward the second tube 20 .

[0040] Therefore, when the first piston 21 slides to the left (slides in the direction away from the first tube 19), the clean water in the water storage chamber can be sucked into the interior of the piston cylinder 18 through the second tube 20. When the first piston 21 slides to the right (slides in the direction of the first tube 19), the clean water in the piston cylinder 18 will be discharged into the interior of the lower slide plate 17 through the first tube 19. Through the reciprocating sliding of the first piston 21, the clean water can be intermittently transported to the interior of the lower slide plate 17.

[0041] As a preferred embodiment of the present invention, the suction end of the water pump 5 is fixedly connected with a bellows 15, the other end of the bellows 15 is fixedly connected with a bent pipe 24, and the other end of the bent pipe 24 passes through the piston cylinder 18; One end of the first piston 21 is fixedly connected to a slide rod 22 , and the interior of the slide rod 22 is threadedly connected to a reciprocating screw 25 . The end of the reciprocating screw 25 away from the first piston 21 extends to the interior of the curved pipe 24 and is fixedly mounted with a turbine blade 26 .

[0042] One end of the curved pipe 24 enters from the axial end of the piston cylinder 18, bends downward to penetrate the outer wall of the piston cylinder 18, and extends below the liquid surface of the water storage chamber. At this time, when the water pump 5 is started, the suction end will extract the clean water in the water storage chamber through the bellows 15 and the curved pipe 24, and discharge it through the first output pipe 6. During this period, when the water flows toward the water pump 5, it will impact the turbine blades 26, causing it to drive the reciprocating screw 25 to rotate. At this time, the sliding rod 22 will slide back and forth on the surface of the reciprocating screw 25, and at the same time drive the first piston 21 to slide back and forth inside the piston cylinder 18, and cooperate with the first tube 19 and the second tube 20 to transport the clean water in the water storage chamber to the inside of the lower slide plate 17.

[0043] As a preferred embodiment of the present invention, a rotating rod 28 is rotatably mounted inside the lower slide plate 17, and a shielding block 29 for shielding the second water inlet 35 is fixedly mounted on the outer wall of the rotating rod 28; A second piston 33 is elastically installed inside the lower slide plate 17, one end of the rotating rod 28 passes through the second piston 33 and is slidably connected to the second piston 33, a collar 30 is slidably installed on the outer wall of the rotating rod 28, and the collar 30 is fixedly connected to the second piston 33. A first spiral groove 31 is opened on the outer wall of the rotating rod 28, and a first guide block 32 extending to the first spiral groove 31 is fixedly installed inside the collar 30.

[0044] A pressure spring is provided between the second piston 33 and the lower slide plate 17. Through the provision of the pressure spring, the second piston 33 can drive the collar 30 to maintain a state of being in contact with the side wall of the shielding block 29; When the second piston 33 drives the ring 30 to slide in the direction away from the blocking block 29, it will squeeze the top pressure spring, causing it to deform and store elastic potential energy. At the same time, when the ring 30 moves, through the cooperation of the first guide block 32 and the first spiral groove 31, it will drive the rotating rod 28 to drive the blocking block 29 to rotate and release the obstruction to the second water inlet 35. At this time, the clean water entering the lower slide 17 will enter the interior of the upper slide 16 through the second water inlet 35.

[0045] When the top pressure spring drives the second piston 33 to reset, the ring 30 is again fitted with the blocking block 29. The first spiral groove 31 and the first guide block 32 can control the rotating rod 28 and the blocking block 29 to block the second water inlet 35 again. At this time, the clean water entering the lower slide plate 17 cannot enter the upper slide plate 16.

[0046] When the piston cylinder 18 transports water to the interior of the lower slide plate 17, since the water in the first tube 19 flows in one direction, when the clean water enters the interior of the lower slide plate 17, the air in the inner cavity of the lower slide plate 17 will be squeezed. With the entry of clean water, the pressure increases, which will push the second piston 33 to drive the sleeve ring 30 to slide and press the top pressure spring. At this time, with the cooperation of the first spiral groove 31 and the first guide block 32, the rotating rod 28 drives the blocking block 29 to release the obstruction of the second water inlet 35. At this time, the high-pressure gas in the lower slide plate 17 will first be ejected from the second water inlet 35, first back-spraying the filter plate 11 from bottom to top, first performing air spray cleaning on the filter plate 11, and then, the clean water will flow upward from the lower slide plate 17 to rinse the filter plate 11, completing the secondary cleaning.

[0047] Since the intermittent water supply is achieved by the reciprocating sliding of the first piston 21, when the piston cylinder 18 does not supply water to the lower slide plate 17, the internal pressure of the lower slide plate 17 is reduced, and the top pressure spring releases its elastic potential energy, driving the second piston 33 to reset, so that the blocking block 29 blocks the second water inlet 35 again, thereby accumulating air pressure again and realizing the next aeration back-spraying filter plate 11.

[0048] As a preferred embodiment of the present invention, a slide groove 45 is provided on the inner wall of the workbench 1, a moving gear 36 is arranged inside the slide groove 45, a tooth groove 37 meshing with the moving gear 36 is provided inside the slide groove 45, and one end of the rotating rod 28 passes through the lower slide plate 17 and is connected to the moving gear 36.

[0049] When the moving gear 36 rotates, it will move inside the slide groove 45 with the cooperation of the tooth groove 37. Since the rotating rod 28 is connected to the moving gear 36, when the moving gear 36 moves inside the slide groove 45, it will also drive the lower slide plate 17 and the upper slide plate 16 to move. By moving the lower slide plate 17 and the upper slide plate 16 on the surface of the filter plate 11 and cooperating with the recoil of the filter plate 11, the filter plate 11 can be fully cleaned.

[0050] As a preferred embodiment of the present invention, one end of the rotating rod 28 extends to the interior of the moving gear 36 and is fixedly installed with the rotating gear 38. The interior of the moving gear 36 is elastically installed with a first gear rod 39 and a second gear rod 40, and a top block 44 is rotatably installed between the first gear rod 39 and the second gear rod 40.

[0051] The first stopper 39 will block the counterclockwise rotation of the rotating gear 38, but will not block the clockwise rotation; The second stop lever 40 blocks the clockwise rotation of the rotating gear 38 but does not block the counterclockwise rotation.

[0052] When the internal pressure of the lower slide 17 increases and pushes the second piston 33 to slide, the rotating rod 28 will drive the blocking block 29 to release the obstruction of the second water inlet 35. At this time, the rotating rod 28 will drive the rotating gear 38 to rotate counterclockwise inside the moving gear 36. Through the obstruction of the first blocking rod 39, the rotating gear 38 will drive the moving gear 36 to rotate synchronously. At this time, the moving gear 36 will move a distance inside the slide groove 45. As the piston cylinder 18 intermittently delivers water toward the lower slide 17, the rotating rod 28 will also rotate reciprocatingly with the cooperation of the second piston 33, so that the moving gear 36 can be controlled to continue to slide inside the slide groove 45. The moving gear 36 drives the upper slide 16 and the lower slide 17 to move synchronously. Therefore, every time the moving gear 36 moves, the lower slide 17 will backwash the current position of the filter plate 11 from bottom to top.

[0053] As a preferred embodiment of the present invention, a magnetic rod 41 is slidably mounted inside the top block 44, a second spiral groove 42 is formed on the outer wall of the magnetic rod 41, and a second guide block 43 extending into the second spiral groove 42 is fixedly mounted on the inner wall of the top block 44; A second magnetic block 34 for repelling the magnetic rod 41 is disposed at one end of the slide slot 45 , and a first magnetic block 23 for attracting the magnetic rod 41 is disposed at the other end of the slide slot 45 .

[0054] The second magnetic block 34 is arranged on a side of the slide slot 45 facing the water pump 5, and the first magnetic block 23 is arranged on a side of the slide slot 45 away from the water pump 5; When the moving gear 36 moves to the position of the second magnetic block 34, the second magnetic block 34 releases the repulsive force to push the magnetic rod 41 into the interior of the top block 44, and under the cooperation of the second spiral groove 42 and the second guide block 43, the top block 44 is controlled to rotate toward the first stopper 39 and the rotation of the first stopper 39 is restricted. At this time, the second stopper 40 can block the counterclockwise rotation of the rotating gear 38; When the movable gear 36 moves to the position of the first magnetic block 23, the magnetic rod 41 is sucked out from the inside of the top block 44 by attraction, and the top block 44 is driven to rotate toward the second gear rod 40 through the cooperation of the second spiral groove 42 and the second guide block 43. At this time, the second gear rod 40 will block the clockwise rotation of the rotating gear 38. At this time, when the rotating rod 28 rotates back and forth, it will drive the movable gear 36 to move toward the second magnetic block 34 inside the slide groove 45 through the rotating gear 38.

[0055] By controlling the pressing of the top block 44 on the first stop bar 39 or the second stop bar 40 , the moving direction of the moving gear 36 can be controlled.

[0056] Working principle: when the water pump 5 is started, the clean water in the water storage chamber is pumped out and transported to the inside of the water pipe 9 through the second output pipe 8. The clean water will be discharged through the overflow pipe 10 and flow on the photomask substrate. At the same time, when the clean water transported to the lifting platform 2 through the first output pipe 6 is discharged through the flow port 7 arranged in a C shape, a water curtain will be formed in the air. The formed water curtain can block the generated water splashes and the dust particles thrown out. Through the cooperation of the siphon tube 13 and the water limit tube 12, the water level in the frame 4 can always be in contact with the photomask substrate, ensuring the heat dissipation effect on the photomask substrate. At the same time, it can avoid the problem that the water with dust particles in the frame 4 re-contaminates the surface of the photomask substrate when the water body height is higher than the photomask substrate. While ensuring the heat dissipation effect, the influence of dust particles on the working environment is reduced.

[0057] When the water pump 5 is started, the clean water in the water storage chamber is pumped out through the bellows 15 and the bent pipe 24. When the water flows toward the water pump 5, it will impact the turbine blades 26, causing the reciprocating screw 25 to rotate. At this time, the slide bar 22 will slide back and forth on the surface of the reciprocating screw 25, and at the same time, it will drive the first piston 21 to slide back and forth inside the piston cylinder 18, and cooperate with the first tube 19 and the second tube 20 to transport the clean water in the water storage chamber to the inside of the lower slide plate 17, squeeze the air in the inner cavity of the lower slide plate 17, push the second piston 33 to drive the sleeve ring 30 to slide, and press the top pressure spring. At this time, the first spiral groove 31 and the second spiral groove 32 are connected. With the cooperation of a guide block 32, the rotating rod 28 drives the blocking block 29 to release the obstruction of the second water inlet 35. At this time, the high-pressure gas in the lower slide plate 17 will first be ejected from the second water inlet 35, first back-spraying the filter plate 11 from bottom to top, and first performing air spray cleaning on the filter plate 11. Subsequently, clean water will flow upward from the lower slide plate 17 to rinse the filter plate 11, completing the secondary cleaning. By switching the top block 44 to press the first baffle bar 39 or the second baffle bar 40, the reciprocating rotating rod 28 can control the movement of the moving gear 36 in the slide groove 45, thereby ensuring the cleaning range while improving the cleaning effect of the filter plate 11.

[0058] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A photomask blank cutting device, characterized in that: It comprises a workbench (1), a lifting platform (2), and a cutting tool arranged on the lifting platform (2); a water storage chamber is provided inside the workbench (1); A surrounding frame (4) is arranged at the top of the workbench (1), and a supporting platform for fixing a photomask substrate blank is arranged inside the surrounding frame (4); A water pipe (9) is arranged inside the workbench (1), and an overflow pipe (10) is arranged at the top of the water pipe (9) for delivering water to the surface of the photomask substrate blank; A siphon tube (13) is arranged inside the surrounding frame (4), one end of the siphon tube (13) extends to the water storage chamber, and the opening of the other end of the siphon tube (13) is not higher than the top surface of the photomask substrate blank and not lower than the bottom surface of the photomask substrate blank; The outer wall of the siphon tube (13) is sheathed with a water limit tube (12), and the outer wall of the water limit tube (12) is provided with a siphon port (14), the height of the siphon port (14) being lower than the top opening of the siphon tube (13) but not lower than the bottom surface of the photomask substrate blank; The workbench (1) is provided with a water circulation component for conveying water in the water storage chamber to the interior of the water pipe (9); A flow opening (7) is provided inside the lifting platform (2).

2. The photomask substrate blank cutting device according to claim 1, characterized in that: The water circulation assembly comprises a water pump (5), a first output pipe (6) and a second output pipe (8); the water pump (5) is arranged on one side of the workbench (1); the suction end of the water pump (5) is communicated with the water storage chamber; the output end of the water pump (5) is connected to the first output pipe (6); one end of the second output pipe (8) is communicated with the first output pipe (6); and the other end of the second output pipe (8) extends into the water passage pipe (9).

3. The photomask blank cutting device according to claim 2, characterized in that: The top of the workbench (1) is provided with a water inlet (3) corresponding to the flow outlet (7); the flow outlet (7) and the water inlet (3) are both arranged in a C shape; and the end of the first output pipe (6) away from the water pump (5) extends to the interior of the lifting platform (2).

4. The photomask substrate blank cutting device according to claim 2, characterized in that: A filter plate (11) is arranged inside the water storage chamber, a hollow upper slide plate (16) is slidably mounted on the top surface of the filter plate (11), a debris discharge pipe (46) is arranged on the upper slide plate (16), a hollow lower slide plate (17) is slidably mounted on the bottom end of the filter plate (11), the upper slide plate (16) and the lower slide plate (17) are attracted by magnetic force, a first water inlet (27) is provided at the bottom of the upper slide plate (16), and a second water inlet (35) is provided at the top end of the lower slide plate (17).

5. The photomask substrate blank cutting device according to claim 4, characterized in that: A piston cylinder (18) is fixedly mounted on the bottom end of the lower slide plate (17), a first piston (21) is slidably mounted inside the piston cylinder (18), and a first tube (19) and a second tube (20) are arranged on the piston cylinder (18); The other end of the first tube (19) extends to the interior of the lower slide plate (17), and the other end of the second tube (20) extends below the liquid surface of the water storage chamber; Both the first tube (19) and the second tube (20) are provided with a one-way valve.

6. The photomask substrate blank cutting device according to claim 5, characterized in that: The suction end of the water pump (5) is fixedly connected to a bellows (15), the other end of the bellows (15) is fixedly connected to a bent pipe (24), and the other end of the bent pipe (24) passes through the piston cylinder (18); One end of the first piston (21) is fixedly connected to a slide rod (22), the interior of the slide rod (22) is threadedly connected to a reciprocating screw rod (25), and one end of the reciprocating screw rod (25) away from the first piston (21) extends to the interior of the curved pipe (24) and is fixedly mounted with a turbine blade (26).

7. The photomask substrate blank cutting device according to claim 4, characterized in that: A rotating rod (28) is rotatably mounted inside the lower slide plate (17), and a shielding block (29) for shielding the second water inlet (35) is fixedly mounted on the outer wall of the rotating rod (28); A second piston (33) is elastically mounted inside the lower slide plate (17); one end of the rotating rod (28) passes through the second piston (33) and is slidably connected to the second piston (33); a collar (30) is slidably mounted on the outer wall of the rotating rod (28); the collar (30) is fixedly connected to the second piston (33); a first spiral groove (31) is formed on the outer wall of the rotating rod (28); and a first guide block (32) extending to the first spiral groove (31) is fixedly mounted inside the collar (30).

8. The photomask substrate blank cutting device according to claim 7, characterized in that: The inner wall of the workbench (1) is provided with a slide groove (45), a movable gear (36) is arranged inside the slide groove (45), a tooth groove (37) meshing with the movable gear (36) is provided inside the slide groove (45), and one end of the rotating rod (28) passes through the lower slide plate (17) and is connected to the movable gear (36).

9. The photomask substrate blank cutting device according to claim 8, characterized in that: One end of the rotating rod (28) extends to the interior of the moving gear (36) and is fixedly mounted with the rotating gear (38); a first stop rod (39) and a second stop rod (40) are elastically mounted inside the moving gear (36); a top block (44) is rotatably mounted between the first stop rod (39) and the second stop rod (40).

10. The photomask substrate blank cutting device according to claim 9, characterized in that: A magnetic rod (41) is slidably mounted inside the top block (44), a second spiral groove (42) is formed on the outer wall of the magnetic rod (41), and a second guide block (43) extending into the second spiral groove (42) is fixedly mounted on the inner wall of the top block (44); One end of the slide groove (45) is provided with a second magnetic block (34) for repelling the magnetic rod (41), and the other end of the slide groove (45) is provided with a first magnetic block (23) for attracting the magnetic rod (41).

Images