Control method of vacuum conveying system, vacuum conveying system and storage medium

Abstract

The invention provides a control method of a vacuum conveying system, the vacuum conveying system and a storage medium. The vacuum conveying system comprises an isolating valve, a main chamber, an exchange bin, an exchange bin vacuum pump set and a main chamber vacuum pump set, the exchange bin is connected with the main chamber through the isolating valve, and the control method of the vacuum conveying system comprises the steps that the air pressure of the main chamber is reduced through the main chamber vacuum pump set, so that the air pressure of the main chamber is smaller than a first air pressure threshold value; the air pressure of the exchange bin is reduced through the exchange bin vacuum pump set to be smaller than a second air pressure threshold value; and the isolation valve is controlled to be opened, so that the conveying device in the exchange bin conveys the sample to the main chamber. According to the method provided by the invention, when the sample is conveyed every time, the air pressure of the main chamber is only slightly changed, so that the time for vacuumizing the main chamber during conveying every time can be shortened, and the influence of the gas as a temperature carrier on equipment in the main chamber is also reduced through less gas exchange; therefore, the stability and the conveying efficiency of vacuum conveying can be improved.

Description

Technical Field

[0001] The present application belongs to the field of vacuum transmission, and specifically relates to a control method of a vacuum transmission system, a vacuum transmission system and a storage medium. Background Art

[0002] Vacuum transfer is a technology for material handling and sample transmission in a vacuum environment. It is widely used in semiconductor manufacturing, flat panel display manufacturing, aerospace, biomedicine and other fields. Currently, there are many ways to transfer samples in a vacuum environment, but the stability and efficiency of vacuum transfer are poor. Therefore, how to improve the stability and efficiency of vacuum transfer is an urgent problem to be solved. Summary of the invention

[0003] In view of the problems existing in the above-mentioned prior art, a control method for a vacuum transmission system, a vacuum transmission system and a storage medium are proposed. By using the control method for a vacuum transmission system, a vacuum transmission system and a storage medium, the stability and transmission efficiency of the vacuum transmission can be improved.

[0004] This application provides the following solution.

[0005] In a first aspect, the present application provides a control method for a vacuum transfer system, wherein the vacuum transfer system comprises an isolation valve, a main chamber, an exchange chamber, an exchange chamber vacuum pump group, and a main chamber vacuum pump group, wherein the exchange chamber is connected to the main chamber via the isolation valve, and the method comprises:

[0006] The air pressure of the main chamber is reduced by a main chamber vacuum pump group so that the air pressure of the main chamber is less than a first air pressure threshold;

[0007] The air pressure of the exchange chamber is reduced by the exchange chamber vacuum pump group so that the air pressure of the exchange chamber is less than the second air pressure threshold;

[0008] The isolation valve is controlled to open, so that the transfer device in the exchange chamber transfers the sample to the main chamber.

[0009] In some possible embodiments, the volume of the main chamber is larger than the volume of the exchange chamber, and the first air pressure threshold is smaller than the second air pressure threshold.

[0010] In some possible embodiments, the main chamber vacuum pump group includes: a main chamber connecting pump, a main chamber fore-stage pump, a main chamber fore-stage valve and a main chamber vacuum gauge;

[0011] The first end of the main chamber connecting pump is connected to the main chamber, and the main chamber front stage pump is connected to the second end of the main chamber connecting pump through the main chamber front stage valve;

[0012] The main chamber vacuum gauge is connected to the main chamber, and the main chamber vacuum gauge is used to measure the air pressure in the main chamber.

[0013] In some possible embodiments, reducing the air pressure of the main chamber by a main chamber vacuum pump group so that the air pressure of the main chamber is less than a first air pressure threshold includes:

[0014] Open the main chamber foreline valve and start the main chamber foreline pump;

[0015] When the main chamber vacuum gauge indicates that the air pressure in the main chamber is less than or equal to the third air pressure threshold, the main chamber connection pump is started until the air pressure in the main chamber is less than the first air pressure threshold.

[0016] In some possible embodiments, the main chamber vacuum pump assembly further includes: a main chamber air release valve, a first end of the main chamber air release valve is connected to the main chamber, and a second end of the main chamber air release valve is connected to nitrogen;

[0017] Prior to activating the main chamber foreline pump, the method further includes:

[0018] Close the main chamber bleed valve;

[0019] After the main chamber is used, the method further comprises:

[0020] The main chamber bleed valve is controlled to open and close repeatedly to allow nitrogen to enter the main chamber.

[0021] In some possible embodiments, the exchange chamber vacuum pump group includes: an exchange chamber connecting pump, an exchange chamber vacuum gauge, a bypass valve, an exchange chamber fore-stage valve and an exchange chamber fore-stage pump;

[0022] The first end of the exchange chamber connecting pump is connected to the exchange chamber, and the exchange chamber front stage pump is connected to the second end of the exchange chamber connecting pump through the exchange chamber front stage valve;

[0023] The first end of the exchange chamber vacuum gauge is connected to the exchange chamber, and the exchange chamber vacuum gauge is used to measure the air pressure in the exchange chamber;

[0024] The first end of the bypass valve is connected to the first end of the exchange chamber vacuum gauge, and the second end of the bypass valve is connected to the second end of the exchange chamber connection pump.

[0025] In some possible embodiments, reducing the air pressure of the exchange chamber by the exchange chamber vacuum pump group so that the air pressure of the exchange chamber is less than the second air pressure threshold includes:

[0026] Open the fore-stage valve and bypass valve of the exchange chamber, and start the fore-stage pump of the exchange chamber;

[0027] When the exchange bin vacuum gauge indicates that the air pressure in the exchange bin is less than or equal to the fourth air pressure threshold, the exchange bin connection pump is started;

[0028] When the exchange bin vacuum gauge indicates that the air pressure in the exchange bin is less than or equal to the fifth air pressure threshold and the speed of the exchange bin connection pump is greater than the speed threshold, close the bypass valve until the air pressure in the exchange bin is less than the second air pressure threshold.

[0029] In some possible embodiments, the exchange bin vacuum pump assembly further includes: an exchange bin air release valve;

[0030] The first end of the exchange bin vent valve is connected to the first end of the bypass valve, and the second end of the exchange bin vent valve is connected to nitrogen;

[0031] Prior to starting the exchange chamber foreline pump, the method further includes:

[0032] Close the main chamber bleed valve;

[0033] After the exchange bin is used, the method further includes:

[0034] Open the exchange chamber vent valve.

[0035] In some possible embodiments, an active shock absorbing device is provided at the lower portion of the main chamber.

[0036] In a second aspect, the present application provides a vacuum transfer system, characterized in that the vacuum transfer system comprises an isolation valve, a main chamber, an exchange chamber, an exchange chamber vacuum pump group and a main chamber vacuum pump group, and the exchange chamber is connected to the main chamber through the isolation valve;

[0037] The main chamber vacuum pump group is used to reduce the air pressure of the main chamber so that the air pressure of the main chamber is less than a first air pressure threshold;

[0038] The exchange chamber vacuum pump group is used to reduce the air pressure of the exchange chamber so that the air pressure of the exchange chamber is less than the second air pressure threshold;

[0039] The isolation valve is used to allow the transfer device in the exchange chamber to transfer the sample to the main chamber when it is opened.

[0040] In a third aspect, the present application provides a computer-readable storage medium storing a program, which, when executed by a multi-core processor, enables the multi-core processor to execute the above-mentioned control method of the vacuum transfer system.

[0041] The control method of the vacuum transfer system provided in the embodiment of the present application reduces the air pressure of the main chamber through the main chamber vacuum pump group, and reduces the air pressure of the exchange chamber through the exchange chamber vacuum pump group, and then opens the isolation valve to allow the transfer device in the exchange chamber to transfer the sample to the main chamber. In this way, the control method of the vacuum transfer system provided in the embodiment of the present application will only slightly change the air pressure of the main chamber each time the sample is transferred, which can reduce the time for evacuating the main chamber each time the transfer is performed, and through less gas exchange, the influence of the gas as a temperature carrier on the equipment in the main chamber is also reduced, thereby improving the stability and transfer efficiency of the vacuum transfer.

[0042] Other advantages of the present application will be explained in more detail with reference to the following description and drawings.

[0043] It should be understood that the above description is only an overview of the technical solution of the present application, so that the technical means of the present application can be more clearly understood and implemented according to the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are specifically described below by way of example. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] The advantages and benefits described herein and other advantages and benefits will be apparent to those skilled in the art by reading the detailed description of the exemplary embodiments below. The accompanying drawings are only used for the purpose of illustrating the exemplary embodiments and are not to be considered as limiting the present application. In the accompanying drawings:

[0045] Figure 1 A schematic diagram of a vacuum conveying system provided in an embodiment of the present application;

[0046] Figure 2 A flow chart of a control method provided in an embodiment of the present application;

[0047] Figure 3 A schematic diagram of another vacuum conveying system provided in an embodiment of the present application;

[0048] Figure 4 A schematic diagram of a vacuum conveying system provided in an embodiment of the present application;

[0049] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0050] Isolation valve 100; main chamber 200; exchange chamber 300; exchange chamber vacuum pump group 400; exchange chamber connecting pump 401; exchange chamber vacuum gauge 402; bypass valve 403; exchange chamber fore-stage valve 404; exchange chamber fore-stage pump 405; exchange chamber vent valve 406; main chamber vacuum pump group 500; main chamber connecting pump 501; main chamber fore-stage pump 502; main chamber fore-stage valve 503; main chamber vacuum gauge 504; main chamber vent valve 505.

[0051] In the drawings, the same or corresponding reference numerals represent the same or corresponding parts. DETAILED DESCRIPTION

[0052] The exemplary embodiments of the present application will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present application are shown in the accompanying drawings, it should be understood that the present application can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided to enable a more thorough understanding of the present application and to fully convey the scope of the present application to those skilled in the art.

[0053] In the description of the embodiments of the present application, it should be understood that terms such as "including" or "having" are intended to indicate the presence of disclosed features, numbers, steps, behaviors, components, parts, or a combination thereof in the present specification, and do not exclude the possibility of the presence of one or more other features, numbers, steps, behaviors, components, parts, or a combination thereof.

[0054] Unless otherwise specified, “ / ” means or. For example, A / B can mean A or B. The “and / or” in this article is merely a way to describe the association relationship of associated objects, indicating that three relationships can exist. For example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone.

[0055] The terms "first", "second", etc. are used only to distinguish the same or similar technical features for the convenience of description, and should not be understood as indicating or implying the relative importance or quantity of these technical features. Thus, the features defined by "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the embodiments of the present application, unless otherwise specified, the term "plurality" means two or more than two.

[0056] It should also be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0057] like Figure 1 As shown, the vacuum transfer system provided in the embodiment of the present application includes an isolation valve 100, a main chamber 200, an exchange chamber 300, an exchange chamber vacuum pump group 400 and a main chamber vacuum pump group 500, and the exchange chamber is connected to the main chamber through the isolation valve. The vacuum transfer system provided in the embodiment of the present application can be applied to the medical field or to other technical fields, which is not limited in the embodiment of the present application.

[0058] See also Figure 2 , which is a flow chart of a control method for a vacuum conveying system provided in an embodiment of the present application.

[0059] like Figure 2 As shown, the control method of the vacuum conveying system provided in the embodiment of the present application includes:

[0060] S201: reducing the air pressure of the main chamber by a main chamber vacuum pump assembly so that the air pressure of the main chamber is less than a first air pressure threshold.

[0061] In practical applications, the main chamber vacuum control unit in the embodiment of the present application can reduce the air pressure of the main chamber through the main chamber vacuum pump group, so that the air pressure of the main chamber is less than the first air pressure threshold. Figure 3As shown, the main chamber vacuum pump group 500 provided in the embodiment of the present application may include: a main chamber connection pump 501, a main chamber front stage pump 502, a main chamber front stage valve 503 and a main chamber vacuum gauge 504. Among them, the first end of the main chamber connection pump 501 is connected to the main chamber 200, and the main chamber front stage pump 502 is connected to the second end of the main chamber connection pump 501 through the main chamber front stage valve 503. The main chamber vacuum gauge 504 is connected to the main chamber 200, and the main chamber vacuum gauge 504 is used to measure the air pressure in the main chamber 200.

[0062] In the process of executing step S201, the embodiment of the present application can first open the main chamber front stage valve 503 and start the main chamber front stage pump 502. At this time, the main chamber front stage pump 502 will quickly evacuate the main chamber 200. When the main chamber vacuum gauge 504 indicates that the air pressure in the main chamber 200 is less than or equal to the third air pressure threshold, the main chamber connecting pump 501 is started. At this time, the main chamber front stage pump 502 and the main chamber connecting pump 501 jointly evacuate the main chamber until the air pressure of the main chamber 200 is less than the first air pressure threshold. The first air pressure threshold is usually less than the third air pressure threshold. As an example, the third air pressure threshold can be between 150Pa-100Pa, and the first air pressure threshold can be around 0.0004Pa.

[0063] In the embodiment of the present application, the main chamber vacuum pump group 500 may further include a main chamber vent valve 505. The first end of the main chamber vent valve 505 is connected to the main chamber 200, and the second end of the main chamber vent valve 505 is connected to nitrogen. The main chamber vent valve 505 is usually used to open the main chamber vent valve 505 after the main chamber is used to allow nitrogen to enter the main chamber 200 and balance the air pressure in the main chamber 200. Before starting the main chamber fore-stage pump 502, the embodiment of the present application can close the main chamber vent valve 505 to prevent the main chamber vent valve 505 from affecting the vacuuming process of the main chamber 200.

[0064] S202: Reduce the air pressure in the exchange bin by using the exchange bin vacuum pump group so that the air pressure in the exchange bin is less than a second air pressure threshold.

[0065] In practical applications, the exchange chamber vacuum control unit in the embodiment of the present application can reduce the air pressure of the exchange chamber through the exchange chamber vacuum pump group, so that the air pressure of the exchange chamber is less than the second air pressure threshold. Figure 3As shown, in the embodiment of the present application, the exchange chamber vacuum pump group 400 may include: an exchange chamber connection pump 401, an exchange chamber vacuum gauge 402, a bypass valve 403, an exchange chamber fore-stage valve 404 and an exchange chamber fore-stage pump 405. The first end of the exchange chamber connection pump 401 is connected to the exchange chamber 300, and the exchange chamber fore-stage pump 405 is connected to the second end of the exchange chamber connection pump 401 through the exchange chamber fore-stage valve 404. The first end of the exchange chamber vacuum gauge 402 is connected to the exchange chamber 300, and the exchange chamber vacuum gauge 402 is used to measure the air pressure in the exchange chamber 300. The first end of the bypass valve 403 is connected to the first end of the exchange chamber vacuum gauge 402, and the second end of the bypass valve 403 is connected to the second end of the exchange chamber connection pump 401.

[0066] In the process of executing step S202, the embodiment of the present application can first open the exchange chamber front stage valve 404 and the bypass valve 403, and start the exchange chamber front stage pump 405. At this time, the exchange chamber front stage pump 405 will quickly evacuate the exchange chamber 300. When the exchange chamber vacuum gauge 402 indicates that the air pressure in the exchange chamber 300 is less than or equal to the fourth air pressure threshold, start the exchange chamber connection pump 401. When the exchange chamber vacuum gauge 402 indicates that the air pressure in the exchange chamber 300 is less than or equal to the fifth air pressure threshold and the speed of the exchange chamber connection pump 401 is greater than the speed threshold, close the bypass valve 403 until the air pressure in the exchange chamber is less than the second air pressure threshold. It should be noted that the second air pressure value is usually less than the fifth air pressure value, and the fifth air pressure value is usually less than the fourth air pressure value. As an example, the fifth air pressure value can be about 100 Pa, and the second air pressure value is about 0.0004 Pa. The speed threshold may be about 80 revolutions per minute. Depending on the volume of the exchange bin and the model of the pump connected to the exchange bin, the speed threshold may be other values, which are not limited in the embodiments of the present application.

[0067] In some possible embodiments, the exchange bin vacuum pump group may further include an exchange bin vent valve 406. The first end of the exchange bin vent valve 406 is connected to the first end of the bypass valve 403, and the second end of the exchange bin vent valve 406 is connected to nitrogen. The exchange bin vent valve 406 is usually used to open the exchange bin vent valve after the exchange bin is used to allow nitrogen to enter the exchange bin 300 and balance the air pressure in the exchange bin. In an embodiment of the present application, before starting the exchange bin front stage pump 405, the main chamber vent valve 406 can be closed first to prevent the exchange bin vent valve 406 from affecting the vacuum pumping process of the exchange bin 300.

[0068] It should be noted that the present application is provided with a bypass valve in the exchange bin vacuum pump group corresponding to the exchange bin. When the exchange bin front stage pump is just turned on, the bypass valve is in an open state, so that the exchange bin front stage pump can be connected to the exchange bin through two-way channels, so that the air pressure in the exchange size drops relatively quickly. When the exchange bin vacuum gauge indicates that the air pressure in the exchange bin is less than or equal to the fifth air pressure threshold and the speed of the exchange bin connection pump is greater than the speed threshold, closing the bypass valve can further reduce the air pressure in the exchange bin. In this way, the time for vacuuming the exchange bin can be increased. Since the exchange bin needs to be vacuumed each time it is transmitted, the method provided in the embodiment of the present application can improve the transmission efficiency.

[0069] S203: Control the isolation valve to open, so that the transfer device in the exchange chamber transfers the sample to the main chamber.

[0070] It should be noted that the volume of the main chamber in the embodiment of the present application is usually larger than the volume of the exchange chamber, and the first air pressure threshold corresponding to the main chamber is usually slightly smaller than the second air pressure threshold corresponding to the exchange chamber. Therefore, the control method of the vacuum transfer system provided in the embodiment of the present application will only slightly change the air pressure of the main chamber each time the sample is transferred, which can reduce the time for evacuating the main chamber each time the transfer is performed. After the main chamber is used up, the embodiment of the present application can also control the main chamber vent valve to repeatedly cycle open and close, so that nitrogen enters the main chamber more slowly. After the exchange chamber is used up, the embodiment of the present application can also open the exchange chamber vent valve to allow nitrogen to enter the exchange chamber. The embodiment of the present application is provided with an active shock absorbing device at the lower part of the main chamber, which can further reduce the vibration in the main chamber and improve the stability of the vacuum transfer.

[0071] The control method of the vacuum transfer system provided in the embodiment of the present application reduces the air pressure of the main chamber through the main chamber vacuum pump group, and reduces the air pressure of the exchange chamber through the exchange chamber vacuum pump group, and then opens the isolation valve to allow the transfer device in the exchange chamber to transfer the sample to the main chamber. In this way, the control method of the vacuum transfer system provided in the embodiment of the present application can reduce the time for evacuating the main chamber during each transfer, and through less gas exchange, it also reduces the influence of the gas as a temperature carrier on the equipment in the main chamber, thereby improving the stability and transfer efficiency of the vacuum transfer.

[0072] In the description of this specification, the description with reference to the terms "some possible embodiments", "some embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application, and the above terms do not necessarily represent the same embodiment or example. Moreover, the described specific features, structures, materials or characteristics may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.

[0073] About the method flow chart of the present application embodiment, some operations are described as different steps performed in a certain order. Such flow chart belongs to illustrative and non-restrictive. Some steps described in this article can be grouped together and performed in a single operation, or some steps can be divided into multiple sub-steps and can be performed in an order different from that shown in this article. Each step shown in the flow chart can be realized in any way by any circuit structure and / or tangible mechanism (for example, by software, hardware (for example, the logical function realized by processor or chip) etc. running on computer equipment and / or any combination thereof).

[0074] Those skilled in the art will appreciate that, in the method described in the above specific implementation, the writing order of each step does not mean a strict execution order, and the specific execution order of each step should be determined by its function and possible internal logic.

[0075] According to the control method of the vacuum conveying system provided in the above embodiment, the embodiment of the present application further provides a vacuum conveying system.

[0076] like Figure 4 As shown, the vacuum transfer system provided in the embodiment of the present application includes an isolation valve 100, a main chamber 200, an exchange chamber 300, an exchange chamber vacuum pump group 400 and a main chamber vacuum pump group 500, and the exchange chamber 300 is connected to the main chamber 200 through the isolation valve 100. The main chamber vacuum pump 500 group is used to reduce the air pressure of the main chamber 200 so that the air pressure of the main chamber 200 is less than the first air pressure threshold. The exchange chamber vacuum pump 400 group is used to reduce the air pressure of the exchange chamber 300 so that the air pressure of the exchange chamber 300 is less than the second air pressure threshold. The isolation valve 100 is used to enable the conveying device in the exchange chamber 300 to transfer the sample to the main chamber 200 when it is opened.

[0077] As a possible implementation, the volume of the main chamber is greater than the volume of the exchange chamber, and the first air pressure threshold is less than the second air pressure threshold.

[0078] In some possible embodiments, the main chamber vacuum pump group includes: a main chamber connecting pump, a main chamber fore-stage pump, a main chamber fore-stage valve and a main chamber vacuum gauge; the first end of the main chamber connecting pump is connected to the main chamber, and the main chamber fore-stage pump is connected to the second end of the main chamber connecting pump through the main chamber fore-stage valve; the main chamber vacuum gauge is connected to the main chamber, and the main chamber vacuum gauge is used to measure the air pressure in the main chamber.

[0079] In some possible embodiments, the main chamber vacuum pump group further includes: a main chamber air release valve, a first end of the main chamber air release valve is connected to the main chamber, and a second end of the main chamber air release valve is connected to nitrogen.

[0080] In some possible embodiments, the exchange chamber vacuum pump group includes: an exchange chamber connecting pump, an exchange chamber vacuum gauge, a bypass valve, an exchange chamber fore-stage valve and an exchange chamber fore-stage pump; the first end of the exchange chamber connecting pump is connected to the exchange chamber, and the exchange chamber fore-stage pump is connected to the second end of the exchange chamber connecting pump through the exchange chamber fore-stage valve; the first end of the exchange chamber vacuum gauge is connected to the exchange chamber, and the exchange chamber vacuum gauge is used to measure the air pressure in the exchange chamber; the first end of the bypass valve is connected to the first end of the exchange chamber vacuum gauge, and the second end of the bypass valve is connected to the second end of the exchange chamber connecting pump.

[0081] In some possible embodiments, the exchange bin vacuum pump group further includes: an exchange bin air vent valve; a first end of the exchange bin air vent valve is connected to a first end of the bypass valve, and a second end of the exchange bin air vent valve is connected to nitrogen.

[0082] In some possible embodiments, an active shock absorbing device is provided at the lower portion of the main chamber.

[0083] It should be noted that the vacuum conveying system in the embodiment of the present application can implement the various processes of the embodiment of the control method of the aforementioned vacuum conveying system and achieve the same effects and functions, which will not be repeated here.

[0084] According to some embodiments of the present application, a control device for a vacuum conveying system according to an embodiment of the present application is provided for executing Figure 2 The control method of the vacuum conveying system shown in the figure comprises: at least one processor; and a memory connected to the at least one processor in communication; wherein the memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor so that the at least one processor can execute the method described in the above embodiment.

[0085] According to some embodiments of the present application, a non-volatile computer storage medium of a vacuum transfer system control method is provided, on which computer executable instructions are stored. The computer executable instructions are configured to execute, when executed by a processor: the vacuum transfer system control method described in the above embodiments.

[0086] Computer-readable media include permanent and non-permanent, removable and non-removable media, and information storage can be achieved by any method or technology. Information can be computer-readable instructions, data structures, modules of programs, or other data. Examples of computer-readable storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory, read-only memory, electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, CD-ROM, digital versatile disc (DVD) or other optical storage, magnetic cassettes, tape disk storage or other magnetic storage devices or any other non-transmission media that can be used to store information that can be accessed by a computing device. In addition, although the operations of the method of the present application are described in a specific order in the accompanying drawings, this does not require or imply that these operations must be performed in this specific order, or that all the operations shown must be performed to achieve the desired results. In addition, some steps can be omitted, multiple steps can be combined into one step, and / or one step can be decomposed into multiple sub-steps.

[0087] Although the spirit and principle of the present application have been described above with reference to several specific embodiments, it should be understood that the present application is not limited to the disclosed specific embodiments, and the division of various aspects does not mean that the features in these aspects cannot be combined. The present application is intended to cover various modifications and equivalent arrangements included in the spirit and scope of the attached claims.

Claims

1. A control method for a vacuum conveying system, characterized in that: The vacuum transfer system comprises an isolation valve, a main chamber, an exchange chamber, an exchange chamber vacuum pump group and a main chamber vacuum pump group, the exchange chamber is connected to the main chamber through the isolation valve, and the method comprises: Reducing the air pressure of the main chamber by the main chamber vacuum pump group so that the air pressure of the main chamber is less than a first air pressure threshold; The air pressure of the exchange bin is reduced by the exchange bin vacuum pump group so that the air pressure of the exchange bin is less than a second air pressure threshold; The isolation valve is controlled to open, so that the transfer device in the exchange chamber transfers the sample to the main chamber.

2. The method according to claim 1, characterized in that The volume of the main chamber is greater than the volume of the exchange chamber, and the first air pressure threshold is less than the second air pressure threshold.

3. The method according to claim 1, characterized in that The main chamber vacuum pump group includes: a main chamber connecting pump, a main chamber fore-stage pump, a main chamber fore-stage valve and a main chamber vacuum gauge; The first end of the main chamber connection pump is connected to the main chamber, and the main chamber front stage pump is connected to the second end of the main chamber connection pump through the main chamber front stage valve; The main chamber vacuum gauge is connected to the main chamber, and the main chamber vacuum gauge is used to measure the air pressure in the main chamber.

4. The method according to claim 3, characterized in that The step of reducing the air pressure of the main chamber by the main chamber vacuum pump group so that the air pressure of the main chamber is less than a first air pressure threshold comprises: Open the main chamber fore-stage valve and start the main chamber fore-stage pump; When the main chamber vacuum gauge indicates that the air pressure in the main chamber is less than or equal to the third air pressure threshold, the main chamber connection pump is started until the air pressure in the main chamber is less than the first air pressure threshold.

5. The method according to claim 4, characterized in that The main chamber vacuum pump assembly further comprises: a main chamber air release valve, a first end of the main chamber air release valve is connected to the main chamber, and a second end of the main chamber air release valve is connected to nitrogen; Before starting the main chamber backing pump, the method further includes: Closing the main chamber air release valve; After the main chamber is used, the method further comprises: The main chamber vent valve is controlled to open and close repeatedly to allow nitrogen to enter the main chamber.

6. The method according to claim 1, characterized in that The exchange chamber vacuum pump group includes: an exchange chamber connecting pump, an exchange chamber vacuum gauge, a bypass valve, an exchange chamber fore-stage valve and an exchange chamber fore-stage pump; The first end of the exchange chamber connecting pump is connected to the exchange chamber, and the exchange chamber front stage pump is connected to the second end of the exchange chamber connecting pump through the exchange chamber front stage valve; The first end of the exchange bin vacuum gauge is connected to the exchange bin, and the exchange bin vacuum gauge is used to measure the air pressure in the exchange bin; The first end of the bypass valve is connected to the first end of the exchange chamber vacuum gauge, and the second end of the bypass valve is connected to the second end of the exchange chamber connection pump.

7. The method according to claim 6, characterized in that The step of reducing the air pressure of the exchange bin by the exchange bin vacuum pump group so that the air pressure of the exchange bin is less than a second air pressure threshold comprises: Open the exchange chamber fore-stage valve and the bypass valve, and start the exchange chamber fore-stage pump; When the exchange bin vacuum gauge indicates that the air pressure in the exchange bin is less than or equal to a fourth air pressure threshold, starting the exchange bin connection pump; When the exchange bin vacuum gauge indicates that the air pressure in the exchange bin is less than or equal to the fifth air pressure threshold and the speed of the exchange bin connection pump is greater than the speed threshold, the bypass valve is closed until the air pressure in the exchange bin is less than the second air pressure threshold.

8. The method according to claim 6, characterized in that The exchange bin vacuum pump assembly further includes: an exchange bin air release valve; The first end of the exchange bin air release valve is connected to the first end of the bypass valve, and the second end of the exchange bin air release valve is connected to nitrogen; Before starting the exchange chamber fore-stage pump, the method further includes: Closing the main chamber air release valve; After the exchange bin is used up, the method further comprises: Open the exchange bin vent valve.

9. The method according to any one of claims 1 to 8, characterized in that: An active shock absorbing device is arranged at the lower part of the main chamber.

10. A vacuum conveying system, characterized in that: The vacuum transfer system comprises an isolation valve, a main chamber, an exchange chamber, an exchange chamber vacuum pump group and a main chamber vacuum pump group, and the exchange chamber is connected to the main chamber through the isolation valve; The main chamber vacuum pump group is used to reduce the air pressure of the main chamber so that the air pressure of the main chamber is less than a first air pressure threshold; The exchange bin vacuum pump group is used to reduce the air pressure of the exchange bin so that the air pressure of the exchange bin is less than a second air pressure threshold; The isolation valve is used to enable the transfer device in the exchange chamber to transfer the sample to the main chamber when it is opened.

11. A computer-readable storage medium storing a program, wherein when the program is executed by a multi-core processor, the multi-core processor executes the method according to any one of claims 1 to 8.

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