PECVD (plasma enhanced chemical vapor deposition) reaction device and adjusting method

Abstract

The invention relates to a PECVD (Plasma Enhanced Chemical Vapor Deposition) reaction device and an adjusting method. The reaction tube is positioned in the shell; the first connecting assembly comprises a fixing plate, a first adjusting piece and a sealing mechanism, the end of the shell is connected with the fixing plate, the first adjusting piece is connected between the sealing mechanism and the fixing plate, the sealing mechanism comprises a first sealing piece, the end of the reaction tube can abut against the first sealing piece, and the fixing plate is slidably connected with a movable block; the movable block is located between the fixed plate and the sealing mechanism, can move in the radial direction of the reaction tube and abuts against the reaction tube; the shell and the reaction tube are located between the first connecting assembly and the second connecting assembly, the second connecting assembly is connected with the end of the shell, and the second connecting assembly further abuts against the reaction tube. According to the PECVD reaction device and the adjusting method, the replacement efficiency of the reaction tube can be improved.

Description

Technical Field

[0001] The present invention relates to the technical field of reaction devices, and in particular to a PECVD reaction device and a regulating method. Background Art

[0002] Plasma Enhanced Chemical Vapor Deposition (PECVD) technology is a method for preparing semiconductor thin film materials and other material thin films by chemically reacting and depositing them on substrates after ionization by glow discharge in a deposition chamber. Plasma enhanced chemical vapor deposition is usually carried out in a reaction device. A quartz tube for participating in chemical reactions is usually provided in the reaction device. Currently, the quartz tube is usually fixedly connected to the flanges at both ends of the reaction device to fix the position of the quartz tube. However, after the reaction device has been working for a certain period of time, the quartz tube needs to be replaced. Since the time for disassembling and installing the quartz tube is long, the replacement efficiency of the quartz tube is low. Summary of the invention

[0003] Therefore, the technical problem to be solved by the present invention is to provide a PECVD reaction device and an adjustment method, which can improve the replacement efficiency of the reaction tube.

[0004] To solve the above technical problems, the present invention provides a PECVD reaction device, comprising: a shell; a reaction tube, the reaction tube is located in the shell; a first connecting component, the first connecting component comprises a fixed plate, a first adjusting member and a sealing mechanism, the end of the shell is connected to the fixed plate, the first adjusting member is connected between the sealing mechanism and the fixed plate, the sealing mechanism comprises a first sealing member, the end of the reaction tube can be abutted against the first sealing member, the fixed plate is slidably connected with a movable block, the movable block is located between the fixed plate and the sealing mechanism, the movable block can move along the radial direction of the reaction tube and abut against the reaction tube; a second connecting component, the shell and the reaction tube are both located between the first connecting component and the second connecting component, the second connecting component is connected to the end of the shell, and the second connecting component also abuts against the reaction tube.

[0005] In one embodiment of the present invention, a guide block is provided on the fixed plate, and a plurality of the guide blocks are provided along the circumference of the reaction tube. The fixed plate is slidably connected to the movable block through the guide block, and a second adjusting member is connected to the side of the guide block away from the reaction tube, and an end of the second adjusting member abuts against the movable block.

[0006] In one embodiment of the present invention, the fixing plate is further connected to a first connecting member, the first connecting member is connected to a sealing plate, and the sealing plate is sleeved on the sealing mechanism and covers a gap between the fixing plate and the sealing mechanism.

[0007] In one embodiment of the present invention, it also includes a support rod, and the sealing mechanism also includes a first support member, the first support member is provided with a slot, the support rod is engaged with the slot, the first support member is connected to a second connecting member, the second connecting member extends along the circumference of the support rod and abuts against the support rod, and both ends of the second connecting member are connected to the first support member.

[0008] In one embodiment of the present invention, the sealing mechanism also includes a third connecting member, one end of the third connecting member is connected to the end of the support rod, the other end of the third connecting member is connected to the first support member, and the width of the third connecting member gradually decreases towards the direction approaching the first support member.

[0009] In one embodiment of the present invention, it also includes a first electrode rod and a second electrode rod, at least two support rods are provided, and a plurality of insulating sleeves are provided on the support rods. The sealing mechanism also includes two first connectors, the first electrode rod and the second electrode rod are respectively connected to the two first connectors, and the first electrode rod and the second electrode rod are respectively against the insulating sleeves on the two support rods.

[0010] In one embodiment of the present invention, a conductive ring is sleeved on the insulating sleeve, the conductive ring can slide relative to the insulating sleeve, and the first electrode rod and the second electrode rod are respectively connected to the two conductive rings.

[0011] In one embodiment of the present invention, the sealing mechanism further includes a first mounting ring, a second mounting ring and a third mounting ring connected in sequence, the third mounting ring is connected to the first adjusting member, the second mounting ring is provided with a mounting groove, and the first sealing member is clamped in the mounting groove.

[0012] In one embodiment of the present invention, the sealing mechanism also includes a second seal, a third seal and a fourth seal, the end of the first mounting ring away from the third mounting ring is clamped with the second seal, the end of the second mounting ring away from the third mounting ring is clamped with the third seal, the third seal also abuts against the first mounting ring, the fourth seal is clamped with the third mounting ring, and the fourth seal also abuts against the reaction tube.

[0013] In one embodiment of the present invention, cooling channels are provided in the first mounting ring, the second mounting ring and the third mounting ring, and the first mounting ring, the second mounting ring and the third mounting ring are connected with connecting pipes for circulating cooling medium.

[0014] In one embodiment of the present invention, the first mounting ring is also connected to an air inlet member extending into the reaction tube, the air inlet member is provided with a plurality of air inlet holes, and the side wall of the first mounting ring is connected to an air inlet valve, which is in communication with the air inlet member.

[0015] In one embodiment of the present invention, it also includes a heating rod, which is located between the first connecting component and the second connecting component. The sealing mechanism also includes a mounting plate, which is connected to a second support member, which extends toward the second connecting component. The second support member is provided with a receiving groove, and one end of the heating rod extends into the receiving groove and is clamped with the receiving groove.

[0016] In one embodiment of the present invention, the second connecting component is connected to a plurality of filter plates, a plurality of through holes are provided on the filter plates, pads are provided between adjacent filter plates, fasteners are connected to the pads, the fasteners pass through the filter plates and the pads, and at least one filter plate is connected to the second connecting component.

[0017] In one embodiment of the present invention, a heat insulating sleeve is further provided between the shell and the fixing plate, a connecting sleeve is provided on the heat insulating sleeve, one end of the connecting sleeve is connected to the fixing plate, and the other end of the connecting sleeve is connected to the shell.

[0018] The present invention also provides an adjustment method for a PECVD reaction device, which uses the above-mentioned PECVD reaction device for adjustment, including the following steps: S1: placing a reaction tube in a shell so that the reaction tube abuts against a movable block, and the end of the reaction tube abuts against a second connecting component; S2: moving the movable block so that the end of the reaction tube corresponds to the sealing position of the sealing mechanism in the axial direction of the reaction tube; S3: adjusting the first adjustment member to move the sealing mechanism toward the direction of the reaction tube until the sealing mechanism seals the end of the reaction tube.

[0019] In one embodiment of the present invention, after the movable block is moved in step S2, the end of the reaction tube corresponds to the axial position of the first sealing member in the reaction tube, and after the first adjusting member is adjusted in step S3, the first sealing member abuts against the end of the reaction tube.

[0020] The above technical solution of the present invention has the following advantages compared with the prior art:

[0021] A PECVD reaction device and adjustment method described in the present invention, through the setting of a movable block, the position of the reaction tube can be adjusted radially, the end of the reaction tube and the first sealing component have higher matching accuracy, thereby making the sealing of the reaction space in the reaction tube better, and through the setting of the first adjusting member between the fixed plate and the sealing mechanism, the sealing mechanism can adjust the position along the axial direction, so that the force between the first sealing component and the end of the reaction tube is greater, the fit is higher, and the sealing is better, and through the radial and axial adjustment of the reaction tube, the reaction tube does not need to be connected to the first connecting assembly and the second connecting assembly, thereby improving the replacement efficiency of the quartz tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to make the contents of the present invention more clearly understood, the present invention is further described in detail below based on specific embodiments of the present invention in conjunction with the accompanying drawings.

[0023] Figure 1 It is a structural schematic diagram of a PECVD reaction device of the present invention;

[0024] Figure 2 yes Figure 1 Schematic diagram of some structures;

[0025] Figure 3 yes Figure 2 Schematic diagram of some structures;

[0026] Figure 4 It is a structural schematic diagram of the fixed plate;

[0027] Figure 5 It is a schematic diagram of the assembly structure of the fixed plate and the sealing mechanism;

[0028] Figure 6 is an axial cross-sectional view of the sealing mechanism;

[0029] Figure 7 yes Figure 2 Schematic diagram of the internal structure;

[0030] Figure 8 yes Figure 7 Schematic diagram of some structures;

[0031] Fig. 9 is a schematic diagram of the assembly structure of the first electrode rod, the second electrode rod and the support rod;

[0032] Fig.10 yes Fig. 9 A partial enlarged view of the middle A;

[0033] Fig.11 is a schematic diagram of the assembly structure of the second connecting component and the filter plate;

[0034] Fig.12 It is a schematic diagram of the structure of the filter plate;

[0035] Fig.13 is a schematic structural diagram of the second connection component.

[0036] Description of the accompanying drawings: 1. Shell; 2. First connecting assembly; 3. Second connecting assembly; 4. Reaction tube; 5. Support rod; 6. Heating rod; 7. Temperature sensor; 8. Filter plate; 11. Connecting sleeve; 12. Insulating sleeve; 21. Fixing plate; 22. Movable block; 23. First mounting ring; 24. Second mounting ring; 25. Third mounting ring; 26. First supporting member; 27. Second supporting member; 28. First connector; 29. ​​Connecting tube; 31. End cover; 32. Observation window; 33. Second connector; 34. Third connector; 35. Exhaust port; 36. Fourth connector; 51. First electrode rod; 52. Second electrode rod Pole; 53, insulating sleeve; 54, conductive ring; 55, third electrode rod; 56, fourth electrode rod; 81, sixth connecting piece; 82, cushion block; 211, sealing plate; 212, third adjusting piece; 213, fourth connecting piece; 214, first connecting piece; 215, positioning column; 216, fifth connecting piece; 217, first adjusting piece; 221, guide block; 231, air inlet piece; 232, air inlet valve; 233, mounting plate; 234, mounting seat; 235, second sealing piece; 241, first sealing piece; 242, third sealing piece; 251, fourth sealing piece; 261, second connecting piece; 262, third connecting piece. DETAILED DESCRIPTION

[0037] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention. Embodiment 1

[0038] Reference Figures 1 to 5As shown, a PECVD reaction device of the present invention comprises: a shell 1; a reaction tube 4, wherein the reaction tube 4 is located in the shell 1; a first connecting component 2, wherein the first connecting component 2 comprises a fixed plate 21, a first adjusting member 217 and a sealing mechanism, wherein the end of the shell 1 is connected to the fixed plate 21, the first adjusting member 217 is connected between the sealing mechanism and the fixed plate 21, the sealing mechanism comprises a first sealing member 241, the end of the reaction tube 4 can be against the first sealing member 241, the fixed plate 21 is slidably connected with a movable block 22, the movable block 22 is located between the fixed plate 21 and the sealing mechanism, the movable block 22 can move along the radial direction of the reaction tube 4 and against the reaction tube 4; a second connecting component 3, wherein the shell 1 and the reaction tube 4 are both located between the first connecting component 2 and the second connecting component 3, the second connecting component 3 is connected to the end of the shell 1, and the second connecting component 3 also against the reaction tube 4.

[0039] In a PECVD reaction device of this embodiment, when installing the reaction tube 4, the reaction tube 4 abuts against the movable block 22, and the end of the reaction tube 4 abuts against the second connection assembly 3, then the movable block 22 is moved to make the end of the reaction tube 4 correspond to the axial position of the first sealing member 241 of the reaction tube 4, and finally the first adjusting member 217 is adjusted to move the sealing mechanism toward the reaction tube 4 until the first sealing member 241 abuts against the end of the reaction tube 4, thereby completing the installation of the reaction tube 4. When disassembling the reaction tube 4, the sealing mechanism is separated from the fixed plate 21, and the reaction tube 4 can be taken out of the shell 1. By setting the movable block 22, the position of the reaction tube 4 can be adjusted radially, and the end of the reaction tube 4 and the first sealing member 241 have a higher matching accuracy, thereby making the sealing of the reaction space in the reaction tube 4 better. By setting the first adjusting member 217 between the fixed plate 21 and the sealing mechanism, the sealing mechanism can adjust the position along the axial direction, so that the force between the first sealing member 241 and the end of the reaction tube 4 is greater, the fit is higher, and the sealing is better. In addition, by adjusting the reaction tube 4 radially and axially, the reaction tube 4 does not need to be connected to the first connecting component 2 and the second connecting component 3, thereby improving the replacement efficiency of the quartz tube.

[0040] Reference Figure 1 As shown, the shell 1 is in a circular tube shape as a whole, and the shell 1 is used to protect the internal structure.

[0041] Reference Figure 2 As shown, the reaction tube 4 is in a round tube shape and is located in the shell 1 , and the interior of the reaction tube 4 is a reaction space.

[0042] Reference Figures 3 to 6As shown, the first connecting assembly 2 includes a fixing plate 21, a first adjusting member 217 and a sealing mechanism, wherein the sealing mechanism includes a first mounting ring 23, a second mounting ring 24 and a third mounting ring 25 connected in sequence, and the first mounting ring 23, the second mounting ring 24 and the third mounting ring 25 are all annular and have the same diameter, and the third mounting ring 25 is located close to the fixing plate 21. The opening formed by the first mounting ring 23, the second mounting ring 24 and the third mounting ring 25 is used for the graphite boat to enter or move out of the reaction tube 4, and the graphite boat is a carrier for placing the plate to be coated.

[0043] The sealing mechanism also includes a first seal 241, a second seal 235, a third seal 242 and a fourth seal 251, and the first seal 241, the second seal 235, the third seal 242 and the fourth seal 251 can all be regarded as sealing rings. The second mounting ring 24 is provided with a boss protruding toward the center of the second mounting ring 24, and a mounting groove is provided on the side of the boss facing the reaction tube 4. The first seal 241 is engaged with the mounting groove, so that the end of the reaction tube 4 can be against the first seal 241, thereby improving the sealing of the reaction space. The end of the first mounting ring 23 away from the third mounting ring 25 is engaged with the second seal 235. Specifically, the second seal 235 is located at the edge of the inner circle of the first mounting ring 23. During the operation of the PECVD reaction device, the first mounting ring 23 is connected to the door plate, and the door plate covers the opening position of the first mounting ring 23. The second seal 235 can be against the door plate, thereby improving the sealing of the reaction space. One end of the second mounting ring 24 away from the third mounting ring 25 is clamped with the third sealing member 242, and the third sealing member 242 abuts against the first mounting ring 23, so that the third sealing member 242 can seal between the second mounting ring 24 and the first mounting ring 23. One end of the third mounting ring 25 close to the second mounting ring 24 is clamped with the fourth sealing member 251, and the fourth sealing member 251 also abuts against the outer side wall of the reaction tube 4, so that the fourth sealing member 251 seals between the third mounting ring 25 and the second mounting ring 24, and the fourth sealing member 251 can also seal between the third mounting ring 25 and the reaction tube 4, thereby improving the overall sealing performance.

[0044] Preferably, the first mounting ring 23, the second mounting ring 24 and the third mounting ring 25 are all provided with cooling channels arranged in an annular shape along the edge, and the side walls of the first mounting ring 23, the second mounting ring 24 and the third mounting ring 25 are all connected with two connecting pipes 29, which are respectively used for the entry and exit of cooling medium, and the cooling medium can be regarded as cooling liquid or cooling gas. The connecting pipe 29 is connected to an external cooling source, and the cooling medium can enter the cooling channel through the connecting pipe 29, thereby cooling the first seal 241, the second seal 235, the third seal 242 and the fourth seal 251, and preventing the seals of the PECVD reaction device from being damaged due to high temperature during operation.

[0045] The end of the shell 1 is connected to the fixed plate 21. Specifically, a heat insulating sleeve 12 is provided between the shell 1 and the fixed plate 21. A connecting sleeve 11 is provided on the heat insulating sleeve 12. One end of the connecting sleeve 11 is connected to the fixed plate 21, and the other end of the connecting sleeve 11 is connected to the end of the shell 1. The reaction tube 4 is arranged through the heat insulating sleeve 12, and the heat insulating sleeve 12 has a heat preservation function.

[0046] The fixed plate 21 is slidably connected with a movable block 22, which is located between the fixed plate 21 and the sealing mechanism. Specifically, the reaction tube 4 is arranged through the fixed plate 21, and a guide block 221 is provided on the side of the fixed plate 21 close to the third mounting ring 25. The guide block 221 is provided with a slide groove, which is arranged along the radial direction of the reaction tube 4. A plurality of guide blocks 221 are arranged along the circumference of the reaction tube 4. In this embodiment, two guide blocks 221 are connected to the fixed plate 21, and the two guide blocks 221 are located below the reaction tube 4, and the two guide blocks 221 are axially symmetrically arranged with a vertical symmetry axis along the radial direction of the reaction tube 4. The movable block 22 is slidably connected with the slide groove, and a second adjusting member is connected to the side of the guide block 221 away from the reaction tube 4, and the second adjusting member can be regarded as a bolt, and the end of the bolt can be abutted against the movable block 22 by rotating the bolt. The movable block 22 can move along the radial direction of the reaction tube 4 and abut against the outer wall of the reaction tube 4. By moving the movable block 22, the radial position of the reaction tube 4 can be adjusted. The second adjusting member abuts against the movable block 22, so that the position of the movable block 22 is fixed, and the position of the reaction tube 4 is further fixed.

[0047] The first adjusting member 217 is connected between the sealing mechanism and the fixed plate 21. Specifically, the first adjusting member 217 is connected to the third mounting ring 25, and the first adjusting member 217 is provided with a plurality of first adjusting members and is arranged along the inner ring edge of the third mounting ring 25. The first adjusting member 217 can be regarded as a long bolt and a nut. At least two nuts are threadedly connected to the long bolt. The long bolt passes through the third mounting ring 25 and the first adjusting member 217 in sequence. The third mounting ring 25 is provided with a groove for accommodating the screw head. The nuts are all located between the fixed plate 21 and the third mounting ring 25. The two nuts are respectively abutted against the fixed plate 21 and the third mounting ring 25, so that the position between the sealing mechanism and the fixed plate 21 is fixed. By adjusting the position of the two nuts, the distance between the sealing mechanism and the fixed plate 21 is adjusted.

[0048] The fixed plate 21 is also connected to a first connecting member 214, and the first connecting member 214 is connected to a sealing plate 211. The sealing plate 211 is sleeved on the sealing mechanism, and the sealing plate 211 covers the gap between the fixed plate 21 and the sealing mechanism. Specifically, two first connecting members 214 are provided on the fixed plate 21, and the two ends of the sealing plate 211 are respectively connected to the two first connecting members 214. The two sealing plates 211 can form a ring shape, so that the sealing plate 211 can completely cover the gap between the fixed plate 21 and the sealing mechanism, thereby improving the sealing performance. The sealing plate 211 is sleeved on the third mounting ring 25, and the width of the sealing plate 211 is greater than the maximum value of the gap between the fixed plate 21 and the sealing mechanism, so that when the sealing mechanism is located at different positions, the sealing plate 211 can completely cover the gap between the fixed plate 21 and the sealing mechanism. A waist-shaped hole is also provided at the connection position of the sealing plate 211 with the first connecting member 214, so that the position of the sealing plate 211 is adjustable, and the sealing plate 211 can fit tightly with the third mounting ring 25, thereby improving the sealing performance.

[0049] Two positioning posts 215 are vertically connected to the fixing plate 21 . The positioning posts 215 abut against the sealing mechanism. The positioning posts 215 are used to position and guide the sealing mechanism to prevent the sealing mechanism from moving or being offset from the fixing plate 21 during installation.

[0050] The fixing plate 21 is also connected to a fourth connecting member 213, and the sealing mechanism also includes a third adjusting member 212, which is fixed to the outside, and the third connecting member 262 is connected to a bolt, which is arranged in the horizontal direction, and the end of the bolt abuts against the fourth connecting member 213, and the position of the first connecting component 2 can be adjusted in the horizontal direction by rotating the bolt. The fixing plate 21 is also connected to a fifth connecting member 216, and the sealing mechanism also includes a fourth adjusting member, which is connected to a bolt arranged in the vertical direction, and the bolt can adjust the position of the first connecting component 2 in the vertical direction, and the adjustment method is the same as that of the third adjusting member 212, which will not be repeated.

[0051] Reference Figures 7 to 10As shown, the PECVD reaction device also includes a support rod 5, which is used to support the graphite boat. The support rod 5 is located in the reaction tube 4, and both ends of the support rod 5 are clamped with the first connecting component 2 and the second connecting component 3. The sealing mechanism also includes a first support member 26 and a second connecting member 261. The first support member 26 is provided with an arc-shaped clamping groove, and the end of the support rod 5 is clamped with the clamping groove. The first support member 26 is connected to the second connecting member 261, and the second connecting member 261 is arc-shaped. The second connecting member 261 extends along the circumference of the support rod 5 and abuts against the side wall of the support rod 5. Both ends of the second connecting member 261 are connected to the first support member 26. After the bolts at the connection position of the second connecting member 261 and the first support member 26 are tightened, the support rod 5 is clamped between the second connecting member 261 and the first support member 26, so that the support rod 5 is stably fixed.

[0052] The sealing mechanism further includes a third connecting member 262, one end of which is connected to the end of the support rod 5, and the other end of the third connecting member 262 is connected to the first support member 26, so that the support rod 5 is fixed more stably. The width of the third connecting member 262 gradually decreases toward the first support member 26, thereby reducing the volume of the connection position between the third connecting member 262 and the first support member 26, and avoiding the third connecting member 262 being unable to connect to the first support member 26 due to its excessive volume.

[0053] The PECVD reaction device also includes a first electrode rod 51 and a second electrode rod 52 located in the reaction tube 4. There are at least two support rods 5. A plurality of insulating sleeves 53 are sleeved on the support rods 5. The four corners of the graphite boat are against the insulating sleeves 53. The sealing mechanism also includes two first connectors 28. The first connector 28 passes through the first mounting ring 23. The first connector 28 is used to connect to the controller. The first electrode rod 51 and the second electrode rod 52 are respectively connected to the two first connectors 28. The first electrode rod 51 and the second electrode rod 52 are respectively against the insulating sleeves 53 on the two support rods 5, and the length of the second electrode rod 52 is greater than the length of the first electrode rod 51. Specifically, a conductive ring 54 is sleeved on the insulating sleeve 53. The conductive ring 54 can slide relative to the insulating sleeve 53. The first electrode rod 51 and the second electrode rod 52 are respectively connected to the two conductive rings 54. After the graphite boat is against the two conductive rings 54, the graphite boat can be energized. The setting of the conductive ring 54 enables the electrode rod to stably energize the graphite boat after the support rod 5 and the electrode rod position move. The first electrode rod 51 and the second electrode rod 52 are arranged so that the electrode rods are arranged along the support rod 5 , and will not block the path for the graphite boat to enter or move out of the reaction tube 4 .

[0054] The PECVD reaction device also includes a temperature sensor 7, which is connected between the first connecting component 2 and the second connecting component 3. The temperature sensor 7 is connected to the controller, and the temperature sensor 7 is located in the reaction tube 4. The temperature sensor 7 is used to detect the temperature in the reaction tube 4. The temperature sensor 7 is connected to the first mounting ring 23 through the mounting seat 234.

[0055] The PECVD reaction device also includes a heating rod 6, which is used to heat the inside of the reaction tube 4. The heating rod 6 is located between the first connecting component 2 and the second connecting component 3, and the heating rod 6 is located in the reaction tube 4. The sealing mechanism also includes a mounting plate 233, which is connected to the inner ring of the first mounting ring 23, and the mounting plate 233 extends in the direction of the center of the first mounting ring 23. The mounting plate 233 is vertically connected to a second support member 27, which extends in the direction of the second connecting component 3, and the second support member 27 is provided with a receiving groove that matches the heating rod 6, and one end of the heating tube extends into the receiving groove and is clamped with the receiving groove. The second support member 27 is also provided with a support plate extending in the direction of the second connecting component 3, the support plate is arc-shaped and arranged along the edge of the second support member 27, and the support plate extends from the bottom side of the end of the second support member 27 and can support the heating rod 6, so that the fixing of the heating rod 6 is more stable.

[0056] The inner circle of the first mounting ring 23 is also connected to an air inlet piece 231 extending into the reaction tube, and a plurality of air inlet holes are provided on the air inlet piece 231. The outer wall of the first mounting ring 23 is connected to an air inlet valve 232, and the air inlet valve 232 is communicated with the air inlet piece 231. The reaction gas can be introduced into the air inlet piece 231 through the air inlet valve 232, and the reaction gas enters the reaction tube 4 through the air inlet piece 231.

[0057] Reference Figures 11 to 13 As shown, the shell 1 and the reaction tube 4 are both located between the first connecting assembly 2 and the second connecting assembly 3, the second connecting assembly 3 is connected to the end of the shell 1, and the second connecting assembly 3 is also against the reaction tube 4. The second connecting assembly 3 can also adjust the radial and axial directions of the reaction tube 4, and the adjustment structure is the same as the fixed plate 21, the first adjustment member 217 and the sealing mechanism, which will not be repeated. The support structure of the second connecting assembly 3 for the support rod 5 is the same as that of the first connecting assembly 2, and the adjustment structure of the second connecting assembly 3 in the horizontal and vertical directions is the same as that of the first connecting assembly 2, which will not be repeated.

[0058] The second connection component 3 includes an end cap 31, which is located at one end of the second connection component 3 away from the first connection component 2. The second connection component 3 is connected with a plurality of filter plates 8, which are located in the reaction tube 4. The filter plates 8 are used to filter the exhaust gas generated during the operation of the PECVD reaction device. The filter plates 8 are provided with a plurality of through holes, and a pad 82 is provided between adjacent filter plates 8, so that there is a gap between adjacent filter plates 8. The pad 82 is connected with a fastener, which can be regarded as a bolt. The bolt passes through and threadedly connects the plurality of pads 82 and the filter plates 8 in sequence, so that the plurality of filter plates 8 are connected to each other. At least one filter plate 8 is connected to the second connection component 3. In this embodiment, the filter plate 8 close to the end cap 31 is connected to the inner ring of the second connection component 3 through the sixth connector 81, so that the position of the filter plate 8 is fixed.

[0059] The PECVD reaction device also includes a third electrode rod 55 and a fourth electrode rod 56 of the same length located in the reaction tube 4. The third electrode rod 55 and the fourth electrode rod 56 are arranged through the filter plate 8. The end cover 31 is also connected to two second connectors 33. The second connector 33 is connected to an external controller. The third electrode rod 55 and the fourth electrode rod 56 are respectively connected to the two second connectors 33. The third electrode rod 55 and the fourth electrode rod 56 are used to abut against the end surface of the graphite boat, so that the graphite boat is energized. Through the arrangement of the first electrode rod 51, the second electrode rod 52, the third electrode rod 55 and the fourth electrode rod 56, the reaction tube 4 can supply power to the two graphite boats at the same time, thereby improving the reaction efficiency.

[0060] The end cap 31 is also connected to a third connector 34, one end of which is connected to the heating rod 6, and the other end of which is connected to the controller. The end cap 31 is also connected to a fourth connector 36, one end of which is connected to the temperature sensor 7, and the other end of which is connected to the controller. The end cap 31 is also provided with an observation window 32 for observing the filter plate 8 and the internal conditions of the reaction tube 4. The end cap 31 is also provided with an exhaust port 35, which is connected to an external exhaust gas treatment device.

[0061] When in use, two graphite boats carrying the plates to be coated are placed on the insulating sleeve 53 through the first connecting component 2, and the bottom of one of the graphite boats is against the conductive ring 54, and the other graphite boat is against the third electrode rod 55 and the fourth electrode rod 56, and then connected to the first mounting ring 23 through the door plate, so that the door plate covers the opening position of the first mounting ring 23, and the reaction gas enters the reaction tube 4 through the air inlet 231, and the chemical reaction starts in the reaction tube 4 by controlling the connector by the controller. Embodiment 2

[0062] The present invention also provides an adjustment method for a PECVD reaction device, which uses the PECVD reaction device in Example 1 for adjustment, and includes the following steps: S1: placing a reaction tube 4 in a shell 1, so that the reaction tube 4 abuts against the movable block 22, and the end of the reaction tube 4 abuts against the second connecting component 3; S2: moving the movable block 22, so that the reaction tube 4 moves radially, so that the end of the reaction tube 4 corresponds to the sealing position of the sealing mechanism in the axial direction of the reaction tube 4, that is, after moving the movable block 22, the end of the reaction tube 4 corresponds to the axial position of the first sealing member 241 in the reaction tube 4; S3: adjusting the first adjusting member 217, so that the sealing mechanism moves toward the direction approaching the reaction tube 4, that is, the sealing mechanism approaches the reaction tube 4 in the axial direction until the sealing mechanism seals the end of the reaction tube 4, that is, after adjusting the first adjusting member 217, the first sealing member 241 abuts against the end of the reaction tube 4.

[0063] A PECVD reaction device and adjustment method of the present invention, through the setting of the movable block 22, the position of the reaction tube 4 can be adjusted radially, the end of the reaction tube 4 and the first sealing member 241 have a higher matching accuracy, thereby making the sealing of the reaction space in the reaction tube 4 better, and the first adjusting member 217 is set between the fixed plate 21 and the sealing mechanism, so that the sealing mechanism can adjust the position along the axial direction, so that the force between the first sealing member 241 and the end of the reaction tube 4 is greater, the fit is higher, and the sealing is better, and through the radial and axial adjustment of the reaction tube 4, the reaction tube 4 does not need to be connected to the first connecting component 2 and the second connecting component 3, thereby improving the replacement efficiency of the quartz tube.

[0064] Obviously, the above embodiments are merely examples for clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the protection scope of the invention.

Claims

1. A PECVD reaction device, characterized in that: include: case; A reaction tube, wherein the reaction tube is located in the shell; a first connection assembly, the first connection assembly comprising a fixed plate, a first adjusting member and a sealing mechanism, the end of the shell being connected to the fixed plate, the first adjusting member being connected between the sealing mechanism and the fixed plate, the sealing mechanism comprising a first sealing member, the end of the reaction tube being able to abut against the first sealing member, the fixed plate being slidably connected with a movable block, the movable block being located between the fixed plate and the sealing mechanism, and the movable block being able to move along the radial direction of the reaction tube and abut against the reaction tube; The second connecting component, the shell and the reaction tube are both located between the first connecting component and the second connecting component, the second connecting component is connected to the end of the shell, and the second connecting component is also against the reaction tube.

2. The PECVD reaction device according to claim 1, characterized in that: The fixed plate is provided with a guide block, and a plurality of the guide blocks are provided along the circumference of the reaction tube. The fixed plate is slidably connected with the movable block through the guide block. A second adjusting member is connected to a side of the guide block away from the reaction tube, and an end of the second adjusting member abuts against the movable block.

3. The PECVD reaction device according to claim 1, characterized in that: The fixing plate is also connected to a first connecting member, the first connecting member is connected to a sealing plate, and the sealing plate is sleeved on the sealing mechanism and covers the gap between the fixing plate and the sealing mechanism.

4. The PECVD reaction device according to claim 1, characterized in that: It also includes a support rod, and the sealing mechanism also includes a first support member, the first support member is provided with a slot, the support rod is engaged with the slot, the first support member is connected to a second connecting member, the second connecting member extends along the circumference of the support rod and abuts against the support rod, and both ends of the second connecting member are connected to the first support member.

5. The PECVD reaction device according to claim 4, characterized in that: The sealing mechanism also includes a third connecting member, one end of which is connected to the end of the support rod, and the other end of which is connected to the first support member, and the width of the third connecting member gradually decreases towards the first support member.

6. The PECVD reaction device according to claim 4, characterized in that: It also includes a first electrode rod and a second electrode rod, at least two support rods are provided, and a plurality of insulating sleeves are provided on the support rods. The sealing mechanism also includes two first connectors, the first electrode rod and the second electrode rod are respectively connected to the two first connectors, and the first electrode rod and the second electrode rod are respectively against the insulating sleeves on the two support rods.

7. The PECVD reaction device according to claim 6, characterized in that: A conductive ring is sleeved on the insulating sleeve, and the conductive ring can slide relative to the insulating sleeve. The first electrode rod and the second electrode rod are respectively connected to the two conductive rings.

8. The PECVD reaction device according to claim 1, characterized in that: The sealing mechanism further comprises a first mounting ring, a second mounting ring and a third mounting ring which are connected in sequence, the third mounting ring is connected to the first adjusting member, the second mounting ring is provided with a mounting groove, and the first sealing member is clamped in the mounting groove.

9. The PECVD reaction device according to claim 8, characterized in that: The sealing mechanism also includes a second seal, a third seal and a fourth seal. The end of the first mounting ring away from the third mounting ring is clamped with the second seal, the end of the second mounting ring away from the third mounting ring is clamped with the third seal, the third seal also abuts against the first mounting ring, the fourth seal is clamped with the third mounting ring, and the fourth seal also abuts against the reaction tube.

10. The PECVD reaction device according to claim 8, characterized in that: The first mounting ring, the second mounting ring and the third mounting ring are all provided with cooling channels, and the first mounting ring, the second mounting ring and the third mounting ring are all connected with connecting pipes, and the connecting pipes are used for the circulation of cooling medium.

11. The PECVD reaction device according to claim 8, characterized in that: The first mounting ring is also connected to an air inlet member extending into the reaction tube, the air inlet member is provided with a plurality of air inlet holes, the side wall of the first mounting ring is connected to an air inlet valve, and the air inlet valve is in communication with the air inlet member.

12. The PECVD reaction device according to claim 1, characterized in that: It also includes a heating rod, which is located between the first connecting component and the second connecting component. The sealing mechanism also includes a mounting plate, which is connected to a second support member, which extends toward the second connecting component. The second support member is provided with a receiving groove, and one end of the heating rod extends into the receiving groove and is clamped with the receiving groove.

13. The PECVD reaction device according to claim 1, characterized in that: The second connection assembly is connected to a plurality of filter plates, a plurality of through holes are provided on the filter plates, pads are provided between adjacent filter plates, fasteners are connected to the pads, and the fasteners penetrate the filter plates and the pads, and at least one filter plate is connected to the second connection assembly.

14. The PECVD reaction device according to claim 1, characterized in that: A heat insulating sleeve is further provided between the shell and the fixing plate, a connecting sleeve is sleeved on the heat insulating sleeve, one end of the connecting sleeve is connected to the fixing plate, and the other end of the connecting sleeve is connected to the shell.

15. A method for adjusting a PECVD reaction device, using the PECVD reaction device according to any one of claims 1 to 14 for adjustment, characterized in that: The following steps are involved: S1: placing a reaction tube in the housing so that the reaction tube abuts against the movable block, and an end of the reaction tube abuts against the second connecting assembly; S2: moving the movable block so that the end of the reaction tube corresponds to the sealing position of the sealing mechanism in the axial direction of the reaction tube; S3: adjusting the first adjusting member to move the sealing mechanism toward the reaction tube until the sealing mechanism seals the end of the reaction tube.

16. The method for adjusting the PECVD reaction device according to claim 15, characterized in that: After the movable block is moved in step S2, the end of the reaction tube corresponds to the axial position of the first sealing member in the reaction tube. After the first adjusting member is adjusted in step S3, the first sealing member abuts against the end of the reaction tube.

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