A multilayer refractive sample detection device and method

Abstract

This application belongs to the field of sample morphology detection, specifically disclosing a device and method for detecting multilayer refractive samples. The method involves: splitting an initial light beam into a first beam and a second beam; further decomposing the first beam into two reference beams with orthogonal polarization states and a fixed optical path difference; transmitting the second beam to the sample under test to generate several reflected beams; acquiring the initial interference spectrum generated by the interference between the reference beams and the reflected beams; removing inherent artifacts introduced by the reference arms, autocorrelation artifacts within the sample under test, and image artifacts from the initial interference spectrum to obtain an artifact-free interference spectrum, thereby acquiring the three-dimensional information of the sample under test. This application allows for precise measurement of the inner structure of multilayer refractive samples without damaging the sample under test.

Description

Technical Field

[0001] This application belongs to the field of sample morphology detection, and more specifically, relates to a multilayer refractive sample detection device and method. Background Technology

[0002] Tomographic imaging of multilayer refractive samples involves multiple fields, including medical imaging, industrial production inspection, and optical component assembly inspection. However, due to the unique structure of multilayer refractive samples, there is currently no mature and reliable non-destructive tomographic imaging solution. Taking the display industry as an example, during manufacturing, LCD panels may suffer defects or damage due to flaws in raw materials and industrial liquid resins. Defects can occur in industrial liquid resins due to tiny dirt (dust particles) or impurities, and incomplete curing of the liquid resin between the inner layers of the LCD panel. During the encapsulation process, defects can also occur in the upper substrate during color filter (CF) deposition and alignment layer friction. Reliable inspection equipment can detect and analyze defects and their potential causes in the LCD manufacturing process, minimizing production line downtime. Traditional inspection technologies include visual inspection methods, machine vision inspection, and electronic inspection; however, these technologies only provide two-dimensional inspection information and are difficult to obtain three-dimensional information about defects in sublayers. Furthermore, lens modules face similar inspection challenges. Existing inspection technologies can only measure individual lenses and cannot provide the three-dimensional morphology of the assembled lens to assess errors such as lens spacing and eccentricity, making it difficult to guarantee the yield rate of lens assemblies. Although spectral interferometry can perform non-destructive tomographic imaging, it has inherent artifacts when imaging multi-layer samples. In addition, the measurement range of spectral interferometry is limited, and it cannot measure display panels with large thicknesses. Summary of the Invention

[0003] In view of the shortcomings of the prior art, the purpose of this application is to provide a multilayer refractive sample detection device and method, which aims to solve the problems of limited measurement range and complex artifact interference in the detection of multilayer refractive samples.

[0004] To achieve the above objectives, in a first aspect, this application provides a multilayer refractive sample detection device, comprising: a data processing system and a spectral domain interferometric imaging system; the spectral domain interferometric imaging system includes a broadband coherent light source, a reference arm, a measurement probe, an optical fiber coupler, and a spectrometer;

[0005] The first end of the fiber optic coupler is connected to a broadband light source, the second end is connected to a spectrometer, the third end is connected to a reference arm, and the fourth end is connected to a measurement probe; during detection, the sample to be tested is located below the measurement probe; the data processing system is connected to the spectrometer.

[0006] A broadband coherent light source is used to output an initial beam and transmit it to an optical fiber coupler; the optical fiber coupler is used to split the initial beam into a first beam and a second beam, and transmit the first beam to a reference arm and the second beam to a measurement probe;

[0007] The reference arm is used to split the first beam into two reference beams with orthogonal polarization states and a fixed optical path difference; the fiber coupler is used to return the two reference beams to the spectrometer.

[0008] The measuring probe is used to transmit the second beam to the sample under test, generating a reflected light on each layer of the sample surface; the fiber optic coupler is used to transmit the reflected light to the spectrometer.

[0009] The spectrometer is used to collect the interference spectrum generated by the reflected light and the reference light;

[0010] The data processing system is used to remove the inherent artifacts introduced by the reference arm, the autocorrelation artifacts inside the sample under test, and the mirror artifacts from the initial interference spectrum transmitted by the spectrometer, so as to obtain an artifact-free interference spectrum.

[0011] Among them, the sample to be tested is a multilayer refractive sample.

[0012] More preferably, the multilayer refractive sample includes a display panel, biological tissue, and a lens module.

[0013] More preferably, the measuring probe includes a first fiber collimator, a two-dimensional galvanometer, and a scanning lens;

[0014] The fiber optic collimator is used to collimate the second beam; the two-dimensional galvanometer is used to deflect the collimated second beam; and the scanning lens is used to focus the deflected second beam.

[0015] More preferably, the reference arm includes: a second fiber collimator, a crystal, a focusing lens, and a reflecting mirror arranged in sequence;

[0016] The second fiber collimator is used to collimate the first beam; the crystal is used to generate two reference beams with orthogonal polarization states and a fixed optical path difference; the focusing lens and the reflecting mirror are used to focus and reflect the two reference beams respectively.

[0017] Secondly, this application provides a method for detecting multilayer refractive samples, comprising the following steps:

[0018] Step 1: Divide the initial beam into a first beam and a second beam. Then, decompose the first beam into two reference beams with orthogonal polarization states and fixed optical path difference. Transmit the second beam to the sample to be tested to generate several reflected beams.

[0019] Step 2: Collect the initial interference spectrum generated by the interference of the reference light and the reflected light. Remove the inherent artifacts introduced by the reference arm, the autocorrelation artifacts inside the sample under test, and the mirror artifacts from the initial interference spectrum to obtain an artifact-free interference spectrum.

[0020] Step 3: Obtain the three-dimensional information of the sample under test based on the artifact-free interference spectrum.

[0021] More preferably, the method for removing autocorrelation artifacts within the sample under test from the initial interference spectrum specifically includes the following steps:

[0022] The interference spectrum generated by the reference light interference is removed from the initial interference spectrum, and then the first interference spectrum in the frequency domain is obtained by Fourier transform.

[0023] Phase shift of the first interference spectrum Then, a Fourier transform is performed to obtain the second interference spectrum; and simultaneously, the first interference spectrum is phase-shifted. Then, a Fourier transform is performed to obtain the third interference spectrum;

[0024] Summing the second and third interference spectra and taking the absolute value yields the sum of the spectra.

[0025] The difference between the second and third interference spectra is calculated, and the absolute value is taken to obtain the spectral difference quantity.

[0026] Then, the absolute value of the difference between the summation and difference of the spectra is taken to obtain the reconstructed signal after removing the autocorrelation artifacts inside the sample under test.

[0027] in, This represents the phase difference between the reference beams.

[0028] More preferably, the method for removing image artifacts in the initial interference spectrum specifically includes the following steps:

[0029] Peak locations are found using a given threshold along the negative half-axis of the reconstructed signal. ;

[0030] According to the peak position in the second interference spectrum as well as Find the amplitude as and The signal peak;

[0031] when When the amplitude is extracted from the reconstructed signal, it is... The signal peak, with amplitude removed The mirror artifact; conversely, the amplitude is extracted from the reconstructed signal. The signal peak, with amplitude removed The mirror artifacts are identified, and the interference spectrum without artifacts is obtained.

[0032] More preferably, the optical path difference between the two reference beams introduced by the crystal in the reference arm is:

[0033]

[0034] in, These are the ordinary refractive index and the unusual refractive index of the crystal, respectively. It is the central wavenumber. The thickness is the crystal thickness.

[0035] Overall, the technical solutions conceived in this application have the following beneficial effects compared with the prior art:

[0036] This application provides a method for detecting multilayer refractive samples, belonging to the field of spectral domain interferometric imaging. It uses a crystal in the reference arm to generate two reference beams with orthogonal polarization states and a fixed optical path difference. Based on this, the inherent artifacts introduced by the reference arm, the autocorrelation artifacts inside the sample under test, and the image artifacts are removed from the interference spectrum transmitted by the spectrometer, so that an artifact-free interference spectrum can be obtained. Therefore, this application can accurately measure the inner structure of multilayer refractive samples without damaging the sample under test.

[0037] The existing mainstream artifact removal methods are phase modulation techniques based on devices such as piezoelectric displacement stages. These techniques require active phase shifting devices, resulting in a more complex system structure and higher requirements for phase stability. In contrast, the solution proposed in this application has a simpler structure, a more compact system, does not require additional volume, has stronger shock resistance, lower cost, and does not require sacrificing measurement speed. Attached Figure Description

[0038] Figure 1 This is a schematic diagram of the structure of the multilayer refractive sample detection device provided in the embodiments of this application;

[0039] Figure 2 This is a schematic diagram of the internal structure of the measurement probe provided in an embodiment of this application;

[0040] Figure 3 This is a schematic diagram of the internal structure of the reference arm provided in an embodiment of this application;

[0041] Figure 4(a) is a simulation of the signal transformation spectrum at 1000 μm provided in the embodiment of this application. , );

[0042] Figure 4(b) is a simulation of the signal transformation spectrum at 100 μm provided in the embodiment of this application. , );

[0043] Figure 4(c) is a simulation of the signal transformation spectrum at -1000μm provided in the embodiment of this application. , );

[0044] Figure 4(d) is a simulation of the signal transformation spectrum at -100μm provided in the embodiment of this application. , );

[0045] Figure 5 This is a schematic diagram illustrating the principle of polarization multiplexing autocorrelation artifact removal provided in the embodiments of this application;

[0046] Figure 6 This is a schematic diagram illustrating the principle of image artifact removal provided in the embodiments of this application;

[0047] In all the accompanying drawings, the same reference numerals are used to denote the same elements or structures, wherein:

[0048] 1 is a broadband light source; 2 is a spectrometer; 3 is a computer; 4 is a fiber optic coupler; 5 is a support; 6 is a measuring probe; 7 is the sample to be tested; 8 is a reference arm. Detailed Implementation

[0049] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0050] The terms "first" and "second," etc., used in the specification and claims herein are used to distinguish different objects, not to describe a specific order of objects.

[0051] In the embodiments of this application, the terms "exemplary" or "for example" are used to indicate that something is an example, illustration, or description. Any embodiment or design that is described as "exemplary" or "for example" in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or designs. Specifically, the use of the terms "exemplary" or "for example" is intended to present the relevant concepts in a specific manner.

[0052] In the description of the embodiments in this application, unless otherwise stated, "multiple" means two or more.

[0053] First, the technical terms involved in the embodiments of this application will be introduced.

[0054] Multi-layered refractive samples include, but are not limited to, display panels, biological tissues, and lens modules. Display panels are a typical example of multi-layered refractive samples.

[0055] Spectral domain interferometric imaging technology is a non-contact measurement method based on broadband optical interferometric imaging. Because it is a non-contact measurement, it will not damage the sample. In addition, this technology has the characteristics of tomographic imaging, so it can realize the measurement of the inner structure of multilayer refractive samples.

[0056] To address the limitations of existing display panel inspection methods, such as inability to detect interlayer defects, limited measurement range, and artifact interference, this application provides a multilayer refractive sample inspection method based on spectral domain interferometric imaging. This method is used to detect the three-dimensional morphology and interlayer defects of display panels, thereby improving the yield rate of production lines.

[0057] The embodiments of this application are described below with reference to the accompanying drawings.

[0058] Figure 1 This is a schematic diagram of a multilayer refractive sample detection device provided in an embodiment of this application. The device includes: a spectral domain interferometric imaging system and a computer; the spectral domain interferometric imaging system includes a broadband coherent light source, a reference arm, a measurement probe, an optical fiber coupler, and a spectrometer; wherein, the reference arm is coupled to the input via optical fiber and includes an optical fiber collimator, a crystal, a focusing lens, and a reflecting mirror; the measurement probe is coupled to the input via optical fiber and includes: an optical fiber collimator, a two-dimensional galvanometer, and a scanning lens; when the multilayer refractive sample detection device performs measurement, one output of the optical fiber coupler is connected to the measurement probe, and the other is connected to the reference arm;

[0059] The display panel to be tested is placed on the sample stage, and the measuring probe is fixed by a bracket;

[0060] During measurement, follow Figure 1 The apparatus shown is configured such that the light emitted from the broadband light source 3 is split into two paths by the fiber optic coupler 4; one path is fed into the reference arm, and the other into the measurement probe 6. The beam fed into the reference arm is collimated by a collimator, and then decomposed into two orthogonally polarized beams with a phase difference when passing through the crystal. These beams are then focused onto the reflector, and a portion of the reflected light returns to the fiber. Input spectrometer 2;

[0061] More preferably, the measuring probe 6 has the following structure: Figure 2 As shown, the light entering the measurement probe is collimated by the fiber collimating mirror, the two-dimensional galvanometer deflects the beam, and the scanning lens focuses the beam again.

[0062] Reference arm structure as follows Figure 3 As shown, it includes: an optical fiber collimator, a focusing lens, a crystal, and a mirror; the function of the crystal is to generate two reference beams with orthogonal polarization states and a fixed optical path difference. Devices that achieve the same function include, but are not limited to, polarization-maintaining optical fibers.

[0063] The light entering the measurement probe is collimated by an optical fiber collimator, deflected by a two-dimensional galvanometer, and then focused by a scanning lens. The focused light enters the lens group, and each layer of the sample under test generates a reflected light. After returning to the optical fiber, a portion of the reflected light is transmitted to spectrometer 2. The two beams transmitted to the spectrometer interfere, and the spectrometer collects the interference fringes. By using data processing algorithms such as Fourier transform on the spectral data, the spectrum of the reflected light from the reference arm can be obtained. and the reflected light spectrum from the sample to be tested Spatial reflection information By scanning the sample under test with a galvanometer, the spatial reflection information of the entire sample can be obtained. ,right Peak values ​​are extracted to obtain the three-dimensional information of the entire sample.

[0064] The following section introduces the principle of spectral interferometry for suppressing polarization multiplexing artifacts.

[0065] For multilayer samples, the light returning from the sample includes reflections from each internal interface. Without loss of generality, it is assumed that the reflectance of each layer of the sample is 0. r For m The sample light field of a layered refractive object can be expressed as:

[0066]

[0067] in, , indicating a reflecting mirror; This represents the illumination field incident at a 45° polarization. For amplitude factor, For wave number, It is located at the j Optical path difference between the layer and the reference plane;

[0068] The Jones matrix of reference light is described as follows:

[0069]

[0070] in, , indicating a birefringent filter, Indicates the birefringence phase difference; They are ordinary refractive index and unusual refractive index, respectively. The thickness of the crystal;

[0071] The interference spectrum then has the following form:

[0072]

[0073] in, Let be the power spectral density of the light source, and , It is the optical path difference of the orthogonally polarized states of a birefringent crystal, and ;

[0074] Record the spectrum of the reference arm By removing this as background, we obtain the interference spectrum that suppresses the inherent artifacts introduced into the system by the reference arm:

[0075]

[0076] in, for ;

[0077] To ensure the symmetry of the reconstructed signal in the spatial domain, the phase shift in the above equation is adjusted. Then perform a Fourier transform:

[0078]

[0079] right Phase shift Then perform a Fourier transform:

[0080]

[0081] Summing and taking the absolute value:

[0082]

[0083] Find the difference and take its absolute value:

[0084]

[0085] The reconstructed signal after removing autocorrelation artifacts from the sample is:

[0086]

[0087] in, express Fourier transform; reconstructed signal It only contains signals and image artifacts with zero optical path symmetry, and autocorrelation artifacts are eliminated;

[0088] To achieve signal-image resolution, the fast axis of the crystal is deflected. If the intensities of the two orthogonally polarized reference beams are unequal, then the reference field can be written as:

[0089]

[0090] Under these conditions, the interference spectrum after subtracting the reference light is:

[0091]

[0092] For a certain interface j Let its two orthogonally polarized cross-correlation signals be respectively , Their signal strength ratio is defined as ,when , It can be judged based on the strength. and At the same time, due to If it is a positive number, then the signal in Fourier space Forever On the right side, Figures 4(a) to 4(d) show when , The simulation results of the transform spectrum when the real signal is 1000um, 100um, -1000um, and -100um are shown. Based on this characteristic, it is possible to distinguish between the real signal and the image artifact.

[0093] It should be noted that the above explanation is to clarify the principle of spectral interferometry for suppressing polarization multiplexing artifacts. First, it introduces the removal of inherent artifacts introduced by the reference arm and autocorrelation artifacts of the sample under test in the interference spectrum generated by the reference and reflected light. Then, it explains how to remove image artifacts when the crystal fast axis is deflected. In practical applications, the crystal fast axis is deflected first. When the intensities of the two orthogonally polarized reference lights are unequal, the inherent artifacts introduced by the reference arm, the autocorrelation artifacts of the sample under test, and the image artifacts are removed from the interference spectrum generated by the reference light and the reflected light.

[0094] According to the above theory, such as Figure 5 and Figure 6 As shown, this application provides a method for removing autocorrelation artifacts and a method for removing image artifacts using polarization multiplexing, specifically including the following steps:

[0095] Step S1: Remove autocorrelation artifacts

[0096] Step S1.1: Remove the background and collect the interference spectrum. and reference spectrum The difference is calculated, and then a Fourier transform is performed to obtain the result. ;

[0097] Step S1.2: For Frequency shift Later obtained ;

[0098] Step S1.3: For Frequency shift Later obtained ;

[0099] Step S1.4: For and Summing and taking the absolute value ;

[0100] Step S1.5: For and Find the difference and take the absolute value. ;

[0101] Step S1.6: For and The reconstructed signal after removing autocorrelation artifacts is obtained by subtracting the absolute value. .

[0102] Step S2: Remove mirror artifacts

[0103] Step S2.1: In Peak location is found using a given threshold on the negative half-axis. ;

[0104] Step S2.2: In According to coordinates , Find the peak , ;

[0105] Step S2.3: If Then in Extract all real signals Remove mirror artifacts Conversely, in Extract all real signals Remove mirror artifacts To obtain an artifact-free full-range signal .

[0106] Crystal Design

[0107] The choice of crystal thickness needs to make The point spread function is greater than that of the spectral domain interferometric system; the point spread function of the system in this application is 11. Taking quartz crystal as an example, set At 840nm ;

[0108] For the proposed system setup, the orthogonal polarization path difference introduced by the birefringent crystal can be written as:

[0109]

[0110] in, These are the ordinary refractive index and the unusual refractive index of the crystal, respectively. It is the central wavenumber; The thickness of the crystal;

[0111] By increasing crystal thickness Alternatively, choosing a crystal with a high birefringence coefficient can increase the polarization-dependent optical path difference caused by birefringence.

[0112] In summary, this application has the following advantages compared with the prior art:

[0113] This application provides a method for detecting multilayer refractive samples, belonging to the field of spectral domain interferometric imaging. It employs a crystal in the reference arm to generate two reference beams with orthogonal polarization states and a fixed optical path difference. Based on this, the inherent artifacts introduced by the reference arm, the autocorrelation artifacts within the sample under test, and the image artifacts are removed from the interference spectrum transmitted by the spectrometer, resulting in an artifact-free interference spectrum. Therefore, the inner structure of multilayer refractive samples can be accurately measured without damaging the sample. Existing mainstream artifact removal methods are phase modulation techniques based on devices such as piezoelectric displacement stages. These techniques require active phase-shifting devices, resulting in more complex system structures and higher requirements for phase stability. In contrast, the proposed solution has a simpler structure, a more compact system, requires no additional volume, has stronger shock resistance, lower cost, and does not sacrifice measurement speed.

[0114] It should be understood that expressions such as “comprising” and “may include” used in this application indicate the existence of the disclosed functions, operations, or constituent elements, and do not limit one or more additional functions, operations, and constituent elements. In this application, terms such as “comprising” and / or “having” are to be interpreted as indicating a particular characteristic, number, operation, constituent element, component, or combination thereof, but not to exclude the existence or possibility of adding one or more other characteristics, numbers, operations, constituent elements, components, or combinations thereof.

[0115] Furthermore, in this application, the expression "and / or" includes any and all combinations of the associated listed words. For example, the expression "A and / or B" may include A, may include B, or may include both A and B.

[0116] In the description of the embodiments of this application, it should be noted that, unless otherwise expressly specified and limited, the term "connection" should be interpreted broadly.

[0117] Furthermore, the mathematical concepts mentioned in the embodiments of this application, such as symmetry, equality, parallelism, and perpendicularity, are limitations specific to the current technological level, rather than absolute and strict mathematical definitions. Slight deviations are permissible; approximations of symmetry, equality, parallelism, and perpendicularity are all acceptable. For example, "A and B are parallel" means that A and B are parallel or approximately parallel, and the angle between A and B can be between 0 and 10 degrees. "A and B are perpendicular" means that A and B are perpendicular or approximately perpendicular, and the angle between A and B can be between 80 and 100 degrees.

[0118] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A method for detecting multilayer refractive samples based on a multilayer refractive sample detection device, characterized in that, Includes the following steps: Step 1: Divide the initial beam into a first beam and a second beam. Then, decompose the first beam into two reference beams with orthogonal polarization states and fixed optical path difference. Transmit the second beam to the sample to be tested to generate several reflected beams. Step 2: Collect the initial interference spectrum generated by the interference of the reference light and the reflected light. Remove the inherent artifacts introduced by the reference arm, the autocorrelation artifacts inside the sample under test, and the mirror artifacts from the initial interference spectrum to obtain an artifact-free interference spectrum. Step 3: Obtain the three-dimensional information of the sample under test based on the artifact-free interference spectrum; The method for removing autocorrelation artifacts within the sample under test from the initial interference spectrum includes the following steps: The interference spectrum generated by the reference light interference is removed from the initial interference spectrum, and then the first interference spectrum in the frequency domain is obtained by Fourier transform. Phase shift of the first interference spectrum Then, a Fourier transform is performed to obtain the second interference spectrum; and simultaneously, the first interference spectrum is phase-shifted. Then, a Fourier transform is performed to obtain the third interference spectrum; Summing the second and third interference spectra and taking the absolute value yields the sum of the spectra. The difference between the second and third interference spectra is calculated, and the absolute value is taken to obtain the spectral difference quantity. Then, the difference between the summation and difference of the spectra is taken and the absolute value is obtained to obtain the reconstructed signal after removing the autocorrelation artifacts inside the sample under test. in, The phase difference between the reference beams; The method for removing image artifacts from the initial interference spectrum includes the following steps: Peak locations are found using a given threshold along the negative half-axis of the reconstructed signal. ; According to the peak position in the second interference spectrum as well as Find the amplitude as and The signal peak; when When the amplitude is extracted from the reconstructed signal, it is... The signal peak, with amplitude removed The mirror artifact; conversely, the amplitude is extracted from the reconstructed signal. The signal peak, with amplitude removed To obtain an artifact-free interference spectrum by eliminating mirror artifacts; One of the multilayer refractive sample detection devices includes: a data processing system and a spectral domain interferometric imaging system; the spectral domain interferometric imaging system includes a broadband coherent light source, a reference arm, a measurement probe, an optical fiber coupler, and a spectrometer; The first end of the fiber optic coupler is connected to a broadband light source, the second end is connected to a spectrometer, the third end is connected to a reference arm, and the fourth end is connected to a measuring probe; during detection, the sample to be tested is located below the measuring probe; the data processing system is connected to the spectrometer. A broadband coherent light source is used to output an initial beam and transmit it to an optical fiber coupler; the optical fiber coupler is used to split the initial beam into a first beam and a second beam, and transmit the first beam to a reference arm and the second beam to a measurement probe; The reference arm is used to split the first beam into two reference beams with orthogonal polarization states and a fixed optical path difference; the fiber coupler is used to return the two reference beams to the spectrometer. The measuring probe is used to transmit the second beam to the sample under test, generating a reflected light on each layer of the sample surface. The fiber optic coupler is used to transmit the reflected light to the spectrometer. The spectrometer is used to collect the initial interference spectrum generated by the reflected light and the reference light; The data processing system is used to remove the inherent artifacts introduced by the reference arm, the autocorrelation artifacts inside the sample under test, and the mirror artifacts from the initial interference spectrum transmitted by the spectrometer, so as to obtain an artifact-free interference spectrum. The sample to be tested is a multilayer refractive sample.

2. The method for detecting multilayer refractive samples according to claim 1, characterized in that, The optical path difference between the two reference beams introduced by the crystal in the reference arm is: in, These are the ordinary and unusual refractive indices of the crystal, respectively. Central wavenumber; The thickness is the crystal thickness.

3. The method for detecting multilayer refractive samples according to claim 1, characterized in that, Multi-layered refractive samples include display panels, biological tissues, and lens modules.

4. The method for detecting multilayer refractive samples according to claim 1, characterized in that, The measuring probe includes a first fiber collimator, a two-dimensional galvanometer, and a scanning lens; The fiber optic collimator is used to collimate the second beam; the two-dimensional galvanometer is used to deflect the collimated second beam; and the scanning lens is used to focus the deflected second beam.

5. The method for detecting multilayer refractive samples according to claim 1 or 4, characterized in that, The reference arm includes: The second fiber collimator, crystal, focusing lens, and mirror are arranged in sequence. The second fiber collimator is used to collimate the first beam. The crystal is used to generate two reference beams with orthogonal polarization states and a fixed optical path difference; the focusing lens and the reflecting mirror are used to focus and reflect the two reference beams respectively.

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