Single crystal furnace leakage detection device and method

Abstract

The invention provides a single crystal furnace leakage detection device and method, and the device comprises a sensing element which comprises a thermosensitive probe and is used for generating a corresponding induction signal according to the temperature information of the thermosensitive probe around a leakage detection point of a single crystal furnace; and the processor is connected with the thermosensitive probe, and the processor is used for judging whether leakage exists at the current leakage detection point or not according to the sensing signal of the sensing element. The invention provides the single crystal furnace leakage detection device and method which are simple to operate, do not need to be matched with a plurality of operators, and are time-saving and labor-saving.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor processing, and in particular to a single crystal furnace leakage detection device and method. Background Art

[0002] In the photovoltaic and semiconductor crystal pulling process, CZ Czochralski Process is a mainstream method. The crystal pulling process must be carried out in a closed environment. It is particularly important to maintain the negative pressure and oxygen-free environment of the crystal pulling furnace to ensure the quality of single crystal silicon. Therefore, it is very important to detect the leakage of the crystal pulling furnace before crystal pulling. For example, for a 12-inch Czochralski single crystal furnace, the leakage rate is generally less than 300mTorr.l / sec. If the leakage rate is higher than this value, leak detection is required to find the leak point.

[0003] However, in the prior art, the single crystal furnace leakage detection operation is carried out by spraying helium at different positions of the single crystal furnace. If there is a leak, the helium will be sucked into the helium leak detector through the leak. By observing the changes in the helium leak detector, it can be determined whether there is a leak. The entire leak detection operation is relatively complicated and requires the cooperation of three operators. In the specific leak detection process, it is necessary to first evacuate the furnace body and connect the helium pipe to the helium leak detector. The first operator needs to pull the helium pipe and detect and find the leak one by one in a top-down order. The second operator needs to cooperate in dragging the helium bottle during this process. The third operator needs to observe the changes in the helium leak detector to determine the leak, and then deal with the leak. The whole process takes about 3 to 4 hours, which is time-consuming and laborious. Summary of the invention

[0004] In order to solve at least one technical problem in the above-mentioned prior art, the embodiments of the present disclosure provide a single crystal furnace leakage detection device and method.

[0005] The technical solutions provided by the embodiments of the present disclosure are as follows:

[0006] In a first aspect, an embodiment of the present disclosure provides a single crystal furnace leakage detection device, comprising:

[0007] The sensing element includes a thermal probe, and the sensing element is used to generate a corresponding sensing signal according to the temperature information of the thermal probe around the leak detection point of the single crystal furnace;

[0008] A processor is connected to the thermistor, and the processor is used to determine whether there is a leak at the current leak detection point according to the sensing signal of the sensor element.

[0009] Exemplarily, the single crystal furnace leakage detection device further includes a heating component, which is connected to the thermistor and the processor respectively, and is used to heat the thermistor to a preset initial temperature according to the initial temperature data preset in the processor;

[0010] The processor is specifically used to: when the temperature difference between the current temperature of the thermistor located around the leak detection point and the initial temperature is greater than or equal to a threshold, determine that there is a leak at the current leak detection point.

[0011] Exemplarily, the thermal probe comprises a diamond-shaped thermal metal probe.

[0012] Exemplarily, the single crystal furnace leakage detection device further includes at least one of the following:

[0013] A display, connected to the processor, and used to display whether there is a leak at the current leak detection point;

[0014] An alarm is connected to the processor, and is used to send out an alarm signal when it is determined that there is a leak at the leak detection point.

[0015] In a second aspect, the embodiments of the present disclosure further provide a single crystal furnace leakage detection method, using the single crystal furnace leakage detection device as described above to perform leakage detection on the single crystal furnace; the method comprises:

[0016] Evacuating the single crystal furnace to keep the single crystal furnace in a predetermined furnace environment;

[0017] The single crystal furnace leakage detection device is placed around each leakage detection point on the single crystal furnace, and leakage detection is performed on each leakage detection point.

[0018] Exemplarily, the predetermined furnace environment is a vacuum environment when the single crystal furnace performs a crystal pulling process.

[0019] Exemplarily, the predetermined furnace environment is that the vacuum pressure in the single crystal furnace is less than or equal to 20 mTorr.

[0020] Exemplarily, placing the single crystal furnace leakage detection device around each leakage detection point on the single crystal furnace and performing leakage detection on each leakage detection point specifically includes:

[0021] The various leak detection points on the single crystal furnace include several dynamic sealing leak detection points. For any of the dynamic sealing leak detection points, the single crystal furnace leakage detection device is placed around the dynamic sealing leak detection point while the moving parts corresponding to the dynamic sealing leak detection point maintain continuous motion, and leakage detection is performed on the dynamic sealing leak detection point.

[0022] Exemplarily, the dynamic seal leak detection point includes at least one of the following:

[0023] The crystal-turning magnetic fluid dynamic seal leak detection point of the single crystal furnace;

[0024] The crucible rotation dynamic seal leak detection point of the single crystal furnace;

[0025] The heat shield of the single crystal furnace is lifted and lowered to dynamically seal the leak detection point.

[0026] Exemplarily, each leak detection point on the single crystal furnace also includes a plurality of static sealing leak detection points.

[0027] The beneficial effects brought by the embodiments of the present disclosure are as follows:

[0028] In the single crystal furnace leakage detection device and method provided in the embodiments of the present disclosure, the single crystal furnace leakage detection device may include a sensor element and a processor. The sensor element may include a thermistor, and the sensor element may generate a corresponding sensing signal based on the temperature information of the thermistor around the leakage detection point of the single crystal furnace. The processor may determine whether there is a leakage at the current leakage detection point based on the sensing signal.

[0029] When leak detection is performed on a single crystal furnace, the single crystal furnace can be evacuated first to keep the single crystal furnace in a predetermined furnace environment, and then the single crystal furnace leakage detection device can be placed around each leak detection point on the single crystal furnace to perform leak detection on each leak detection point. The temperature of the surrounding environment of each leak detection point is measured by using the temperature-dependent characteristics of the thermal probe. When a gas leak occurs at a leak detection point, there is a pressure difference between the internal and external environments of the furnace body, and the external ambient air will be quickly sucked into the furnace from the leak point. The local air flow rate will be significantly greater than other positions. Therefore, when the flowing air passes through the thermal probe, it will exchange heat with the thermal probe, and the temperature of the thermal probe itself will change accordingly. According to the forced convection heat exchange theory, there is a relationship between the heat exchanged between the thermal probe and the flowing air and the speed of the air. Therefore, the temperature change of the thermal probe can be used to reflect the speed of the air, and then determine whether a leak occurs at the leak detection point. Compared with the existing technology of detecting single crystal furnace leaks by using a helium detector, the operation is simple, and there is no need for multiple operators to cooperate, which saves time and effort. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 A schematic diagram showing the structure of a single crystal furnace leakage detection device provided in an embodiment of the present disclosure;

[0031] Figure 2 A flow chart showing a single crystal furnace leakage detection method provided in an embodiment of the present disclosure;

[0032] Figure 3A schematic diagram showing the single crystal furnace leakage detection device provided in an embodiment of the present disclosure performing leakage detection on a single crystal furnace. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0034] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. The "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, similar words such as "one", "one" or "the" do not indicate quantity restrictions, but indicate that there is at least one. Similar words such as "include" or "comprise" mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Similar words such as "connect" or "connected" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0035] The features such as "parallel", "perpendicular", and "same" used in the embodiments of the present disclosure include the features such as "parallel", "perpendicular", and "same" in a strict sense, as well as the cases where "approximately parallel", "approximately perpendicular", "approximately the same", etc. include certain tolerances, taking into account the tolerances associated with the measurement of specific quantities (e.g., the limitations of the measurement system), and represent the acceptable deviation range for a specific value determined by ordinary technicians in the field. For example, "approximately" can mean within one or more standard deviations, or within 3% or 5% of the value.

[0036] In addition, in this document, unless otherwise defined, the terms "substantially", "substantially", "approximately" and "about" are used to describe and explain small changes. When used with an event or situation, these terms can cover situations where the event or situation occurs exactly, and can also cover situations where the event or situation occurs approximately. For example, when used with a numerical value, these terms can include a range of variation of less than or equal to 10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, less than or equal to ±0.05%. The term "substantially coplanar" can refer to two surfaces being arranged along the same plane in the micrometer range, for example, arranged along the same plane within 40μm, 30μm, 20μm, 10μm or 1μm.

[0037] like Figure 1 As shown, the embodiment of the present disclosure provides a single crystal furnace leakage detection device, comprising:

[0038] The sensing element includes a thermal probe 100, and the sensing element is used to generate a corresponding sensing signal according to the temperature information of the thermal probe 100 around the leak detection point of the single crystal furnace;

[0039] The processor 200 is connected to the thermistor probe 100, and the processor 200 is used to determine whether there is a leak at the current leak detection point according to the sensing signal of the sensor element.

[0040] The working principle of the single crystal furnace leakage detection device provided by the embodiment of the present disclosure is that when the fluid flows through the thermistor 100, heat exchange occurs with the thermistor 100, thereby causing the temperature of the thermistor 100 to change. According to the forced convection heat exchange theory, there is a relationship between the heat Q exchanged between the thermistor 100 and the fluid and the velocity v of the fluid. Therefore, the temperature change of the thermistor 100 can be converted into the velocity of the fluid.

[0041] Based on the working principle of the single crystal furnace leakage detection device provided in the embodiment of the present disclosure, when performing leakage detection on the single crystal furnace, the single crystal furnace can be first evacuated to keep the single crystal furnace under a predetermined furnace environment, and then the single crystal furnace leakage detection device can be placed around each leakage detection point on the single crystal furnace to perform leakage detection on each leakage detection point.

[0042] Among them, the characteristic of the thermistor 100 that changes with temperature is used to measure the ambient temperature around each of the leak detection points. When gas leakage occurs at the leak detection point, there is a pressure difference between the internal and external environments of the furnace body, and the external ambient air will be quickly sucked into the furnace from the leakage point. The local air flow rate will be significantly greater than other positions. Therefore, when the flowing air passes through the thermistor 100, heat exchange will occur with the thermistor 100, and the temperature of the thermistor 100 itself will change accordingly. According to the forced convection heat exchange theory, there is a relationship between the heat Q exchanged between the thermistor 100 and the flowing air and the air speed v. Therefore, the temperature change of the thermistor 100 can be used to reflect the air speed, and then determine whether a leak occurs at the leak detection point.

[0043] Compared with the prior art of detecting single crystal furnace leakage by using a helium detector, the single crystal furnace leakage detection device provided in the embodiment of the present disclosure is used to perform leakage detection on the single crystal furnace. The operation is simple, and the cooperation of multiple operators is not required, which saves time and effort.

[0044] It should be noted that when the single crystal furnace leakage detection device provided in the embodiment of the present disclosure is used to perform leakage detection on the single crystal furnace, the single crystal furnace is first evacuated. On the one hand, the vacuum inside the single crystal furnace is maintained to create a pressure difference with the environment outside the furnace to generate flowing air for heat exchange with the thermistor 100. On the other hand, since the vacuum environment inside the furnace needs to be maintained when the crystal pulling process is performed in the single crystal furnace, the single crystal furnace can also be maintained in a vacuum environment when leak detection is performed to simulate the crystal pulling process environment.

[0045] When detecting a leak, the single crystal furnace is first evacuated to keep the single crystal furnace in a predetermined furnace environment. Specifically, the predetermined furnace environment is the vacuum environment of the single crystal furnace during the crystal pulling process. In other words, the single crystal furnace is kept in the vacuum environment during the crystal pulling process.

[0046] For example, in some embodiments, the predetermined furnace environment is a vacuum pressure in the single crystal furnace that is less than or equal to 20 mTorr. However, the present invention is not limited thereto.

[0047] In addition, in some exemplary embodiments, the single crystal furnace leakage detection device also includes a heating component, which is connected to the thermistor 100 and the processor 200 respectively, and the heating component is used to heat the thermistor 100 to a preset initial temperature according to the initial temperature data preset in the processor 200; the processor 200 is specifically used to: when the temperature difference between the current temperature of the thermistor 100 around the leak detection point and the initial temperature is greater than or equal to a threshold value, it is determined that there is a leak at the current leak detection point.

[0048] By adopting the above scheme, when performing single crystal furnace leakage detection, the thermistor 100 can be first heated to an initial temperature through the heating component. The initial temperature can be higher than the temperature of the surrounding air. In this way, when the surrounding air flows through the thermistor 100, it can take away part of the heat of the thermistor 100, and then it can be converted into the air flow rate according to the relationship between heat and air flow rate.

[0049] In some embodiments, the heating component may heat the thermistor 100 by passing an electric current to heat the thermistor 100 , but the present invention is not limited thereto.

[0050] In addition, in some embodiments, the thermal probe 100 may include a thermocouple, a thermistor, etc., and its material may include but is not limited to metal material.

[0051] In some exemplary embodiments, Figure 1 As shown, the thermistor probe 100 includes a diamond-shaped thermistor metal probe. The probe is designed in a diamond shape, which can increase the surface area of ​​the probe, so that it can quickly absorb and conduct heat, thereby quickly reflecting temperature changes; and the metal probe usually has a high measurement accuracy, can provide accurate temperature readings, and help better determine the existence and location of the leak point; in addition, the diamond-shaped thermistor metal probe is made of high-temperature resistant materials, suitable for use in high temperature or extreme environments, and can maintain stability under harsh conditions; the design of the diamond-shaped thermistor metal probe also makes it easy to place the probe around the leak detection point outside various furnaces, and the structure is more adapted to the space around the leak detection point, which is convenient for on-site application.

[0052] However, it is understandable that the specific structure of the thermal probe 100 is not limited thereto.

[0053] In addition, in some exemplary embodiments, the single crystal furnace leakage detection device further includes at least one of a display and an alarm. The display is connected to the processor 200, and the display is used to display whether there is a leak at the current leak detection point. The alarm is connected to the processor 200, and the alarm is used to send an alarm signal when it is determined that there is a leak at the leak detection point.

[0054] In addition, it should be noted that other components of the single crystal furnace leakage detection device, such as the outer shell, etc., are well understood by ordinary technicians in the field and are not elaborated here, nor should they be used as a limitation to the present disclosure.

[0055] In addition, the embodiment of the present disclosure also provides a single crystal furnace leakage detection method, using the single crystal furnace leakage detection device in the embodiment of the present disclosure to perform leakage detection on the single crystal furnace; Figure 2 As shown, the method comprises the following steps:

[0056] Step S01, evacuating the single crystal furnace to keep the single crystal furnace under a predetermined furnace environment;

[0057] Step S02: placing the single crystal furnace leakage detection device around each leakage detection point on the single crystal furnace, and performing leakage detection on each leakage detection point.

[0058] Based on the working principle of the single crystal furnace leakage detection device, when performing leakage detection on the single crystal furnace, the single crystal furnace can be evacuated first to keep the single crystal furnace in a predetermined furnace environment, and then the single crystal furnace leakage detection device can be placed around each leakage detection point on the single crystal furnace to perform leakage detection on each leakage detection point.

[0059] Among them, the characteristic of the thermistor 100 that changes with temperature is used to measure the ambient temperature around each of the leak detection points. When gas leakage occurs at the leak detection point, there is a pressure difference between the internal and external environments of the furnace body, and the external ambient air will be quickly sucked into the furnace from the leakage point. The local air flow rate will be significantly greater than other positions. Therefore, when the flowing air passes through the thermistor 100, heat exchange will occur with the thermistor 100, and the temperature of the thermistor 100 itself will change accordingly. According to the forced convection heat exchange theory, there is a relationship between the heat Q exchanged between the thermistor 100 and the flowing air and the air speed v. Therefore, the temperature change of the thermistor 100 can be used to reflect the air speed, and then determine whether a leak occurs at the leak detection point.

[0060] The single crystal furnace leakage detection method provided in the embodiment of the present disclosure is used to perform leakage detection on the single crystal furnace. Compared with the existing technology of detecting single crystal furnace leakage by using a helium detector, the operation is simple, and the cooperation of multiple operators is not required, which saves time and effort.

[0061] It should be noted that when the single crystal furnace leakage detection method provided in the embodiment of the present disclosure is used to perform leakage detection on the single crystal furnace, the single crystal furnace is first evacuated. On the one hand, the vacuum inside the single crystal furnace is maintained to create a pressure difference with the environment outside the furnace to generate flowing air for heat exchange with the thermistor 100. On the other hand, since the vacuum environment inside the furnace needs to be maintained when the crystal pulling process is performed in the single crystal furnace, the single crystal furnace can also be maintained in a vacuum environment when leak detection is performed to simulate the crystal pulling process environment.

[0062] In some embodiments, when detecting a leak, the single crystal furnace is first evacuated to keep the single crystal furnace in a predetermined furnace environment. Specifically, the predetermined furnace environment is the vacuum environment of the single crystal furnace when performing a crystal pulling process. In other words, the single crystal furnace is kept in a vacuum environment during the crystal pulling process.

[0063] For example, in some embodiments, the predetermined furnace environment is a vacuum pressure in the single crystal furnace that is less than or equal to 20 mTorr. However, the present invention is not limited thereto.

[0064] In addition, for a single crystal furnace, it is a huge furnace body. In the prior art, the single crystal furnace leakage detection operation is carried out by spraying helium at different positions of the single crystal furnace. If there is a leak, the helium will be sucked into the helium leak detector through the leak. By observing the changes in the helium leak detector, it can be determined whether there is a leak. The entire leak detection operation is relatively complicated and requires the cooperation of three operators. In the specific leak detection process, it is necessary to first evacuate the furnace body and connect the helium pipe to the helium leak detector. The first operator needs to pull the helium pipe to detect and find the leak. The second operator needs to cooperate in dragging the helium bottle during this process. The third operator needs to observe the changes in the helium leak detector to determine the leak, and then deal with the leak. The whole process takes about 3 to 4 hours, which is time-consuming and laborious.

[0065] Furthermore, in the process of finding the leakage point, the first operator needs to detect and find the leakage point one by one in a top-down order, which is time-consuming.

[0066] For single crystal furnaces, sealing is an important part of ensuring system safety and efficiency in the design and operation of the furnace body. According to different application requirements, sealing can be divided into dynamic sealing and static sealing. The following are the definitions, characteristics and applications of these two sealing methods in furnace leak detection.

[0067] Static seals are seals between two or more parts without relative motion. They are commonly found on joints, flanges, gaskets, etc. Rubber, polymer, metal gaskets, etc. are commonly used. In furnace applications, static seal materials need to have good high temperature resistance to adapt to the working environment of the furnace. Pressure is applied by bolts or other means to maintain the sealing effect. Static seals are usually easier to replace and maintain in the event of a leak. Generally speaking, static seals are used in flange connections, gas outlets, feed ports, etc. of the furnace to prevent gas or liquid leakage.

[0068] Motion dynamic seals refer to the sealing method between two or more parts in the presence of relative motion. They are commonly found in pistons, bearings, pumps and other parts. Mechanical seals, oil seals, lip seals and other structural designs are usually used. Dynamic seal materials need to have good wear resistance to withstand the friction caused by movement. In some cases, dynamic seals require the use of lubricants to reduce friction and wear. The design and installation of dynamic seals are usually more complicated than static seals. In furnaces, motion dynamic seals are often used in valves, pumps, rotating moving parts, lifting moving parts and other parts to prevent gas or liquid leakage.

[0069] For example, the dynamic sealing of the single crystal furnace may include crystal rotation magnetic fluid dynamic sealing, crucible rotation motion dynamic sealing, heat shield lifting dynamic sealing, etc.

[0070] In some exemplary embodiments of the present disclosure, in the above step S02, each leak detection point on the single crystal furnace includes a plurality of dynamic sealing leak detection points.

[0071] In this way, there is no need to strictly follow the top-down order to detect and find leaks one by one. The dynamic seal leak detection point can be used as the inspection point with a greater possibility of leakage to perform leak detection, avoid blindly searching for leaks and improve detection efficiency.

[0072] In addition, during the production process of the single crystal furnace, for example, dynamic seals such as crystal rotation magnetic fluid dynamic seal, crucible rotation dynamic seal, and heat screen lifting dynamic seal, if the dynamic seal leaks, when the moving parts corresponding to the dynamic seal are in a stationary state, these dynamic sealing points may not leak. Only when the moving parts are in motion can it be detected whether the dynamic seal is leaking.

[0073] Therefore, in some exemplary embodiments of the present disclosure, Figure 3 As shown, the above step S02 may further include:

[0074] For any of the dynamic sealing leak detection points, while the moving parts corresponding to the dynamic sealing leak detection points of the single crystal furnace 20 maintain continuous movement, the single crystal furnace leakage detection device 10 is placed around the dynamic sealing leak detection point to perform leakage detection on the dynamic sealing leak detection point.

[0075] By adopting the above scheme, for dynamic seals, leakage detection can be performed on corresponding dynamic seal leak detection points when the moving parts are in continuous motion, thereby improving detection accuracy.

[0076] Wherein, exemplarily, the dynamic seal leak detection point includes at least one of the following:

[0077] The crystal-turning magnetic fluid dynamic seal leak detection point of the single crystal furnace;

[0078] The crucible rotation dynamic seal leak detection point of the single crystal furnace;

[0079] The heat shield of the single crystal furnace is lifted and lowered to dynamically seal the leak detection point.

[0080] In addition, in some exemplary embodiments of the present disclosure, the above step S02 may further specifically include: each leak detection point on the single crystal furnace further includes a plurality of static sealing leak detection points.

[0081] In this way, there is no need to strictly follow the top-down order to detect and find leaks one by one. Static seal leak detection points can be used as the inspection points with a greater possibility of leakage to perform leak detection, avoid blindly searching for leaks and improve detection efficiency.

[0082] Among them, Figure 3 As shown, when the static seal leak detection point is detected, it can also be performed when the moving parts corresponding to the dynamic seal leak detection point keep moving continuously.

[0083] Alternatively, when the static seal leak detection point is detected, the detection may be performed while the moving parts corresponding to the dynamic seal leak detection point remain stationary.

[0084] In summary, the single crystal furnace leakage detection device and single crystal furnace leakage detection method provided by the embodiments of the present disclosure can efficiently and quickly find the leakage position of the single crystal furnace so as to repair the leakage position and reduce equipment downtime; in addition, it can also reduce labor costs, and only one operator is required to complete the leakage detection operation; and there is no need to follow a strict top-down leak detection sequence, and the focus can be on checking the inspection points with a greater possibility of leakage; in addition, the moving parts in the single crystal furnace can be tracked for continuous leak detection to improve the accuracy of leak detection.

[0085] There are a few points to note:

[0086] (1) The drawings of the embodiments of the present disclosure only relate to the structures related to the embodiments of the present disclosure, and other structures may refer to the general design.

[0087] (2) For the sake of clarity, in the drawings used to describe the embodiments of the present disclosure, the thickness of layers or regions is exaggerated or reduced, that is, these drawings are not drawn according to the actual scale. It is understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element or there may be intermediate elements.

[0088] (3) In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to obtain new embodiments.

[0089] The above are only specific implementations of the present disclosure, but the protection scope of the present disclosure is not limited thereto, and the protection scope of the present disclosure shall be based on the protection scope of the claims.

Claims

1. A single crystal furnace leakage detection device, characterized in that: include: The sensing element includes a thermal probe, and the sensing element is used to generate a corresponding sensing signal according to the temperature information of the thermal probe around the leak detection point of the single crystal furnace; A processor is connected to the thermistor, and the processor is used to determine whether there is a leak at the current leak detection point according to the sensing signal of the sensor element.

2. The single crystal furnace leakage detection device according to claim 1, characterized in that: The single crystal furnace leakage detection device further includes a heating component, which is connected to the thermistor and the processor respectively, and is used to heat the thermistor to a preset initial temperature according to the initial temperature data preset in the processor; The processor is specifically used to: when the temperature difference between the current temperature of the thermistor located around the leak detection point and the initial temperature is greater than or equal to a threshold, determine that there is a leak at the current leak detection point.

3. The single crystal furnace leakage detection device according to claim 1, characterized in that: The thermal probe comprises a diamond-shaped thermal metal probe.

4. The single crystal furnace leakage detection device according to claim 1, characterized in that: The single crystal furnace leakage detection device further includes at least one of the following: A display, connected to the processor, and used to display whether there is a leak at the current leak detection point; An alarm is connected to the processor, and is used to send out an alarm signal when it is determined that there is a leak at the leak detection point.

5. A single crystal furnace leakage detection method, characterized in that: Using the single crystal furnace leakage detection device according to any one of claims 1 to 4, leakage detection is performed on the single crystal furnace; the method comprises: Evacuating the single crystal furnace to keep the single crystal furnace in a predetermined furnace environment; The single crystal furnace leakage detection device is placed around each leakage detection point on the single crystal furnace, and leakage detection is performed on each leakage detection point.

6. The single crystal furnace leakage detection method according to claim 5, characterized in that: The predetermined furnace environment is a vacuum environment when the single crystal furnace performs a crystal pulling process.

7. The single crystal furnace leakage detection method according to claim 6, characterized in that: The predetermined furnace environment is that the vacuum pressure in the single crystal furnace is less than or equal to 20 mTorr.

8. The single crystal furnace leakage detection method according to claim 5, characterized in that: Placing the single crystal furnace leakage detection device around each leakage detection point on the single crystal furnace and performing leakage detection on each leakage detection point specifically includes: The various leak detection points on the single crystal furnace include several dynamic sealing leak detection points. For any of the dynamic sealing leak detection points, the single crystal furnace leakage detection device is placed around the dynamic sealing leak detection point while the moving parts corresponding to the dynamic sealing leak detection point maintain continuous motion, and leakage detection is performed on the dynamic sealing leak detection point.

9. The single crystal furnace leakage detection method according to claim 8, characterized in that: The dynamic seal leak detection point includes at least one of the following: The crystal-turning magnetic fluid dynamic seal leak detection point of the single crystal furnace; The crucible rotation dynamic seal leak detection point of the single crystal furnace; The heat shield of the single crystal furnace is lifted and lowered to dynamically seal the leak detection point.

10. The single crystal furnace leakage detection method according to claim 8, characterized in that: Each leak detection point on the single crystal furnace also includes a number of static sealing leak detection points.

Images