Wafer box defect detection device capable of automatically replacing detection light source

Abstract

The invention discloses a wafer cassette defect detection device capable of automatically replacing a detection light source. The wafer cassette defect detection device comprises a supporting base and a plurality of light source carrying seats, and the plurality of light source carrying seats are installed on the supporting base; the light source replacement mechanism comprises a fixed seat mounted on the supporting base, a mechanical arm mounted on the fixed seat and a quick replacement unit mounted at the free end of the mechanical arm; the product bearing assemblies are used for bearing products and driving the products to reciprocate or / and rotate; the quick-change unit comprises an adapter, a supporting frame installed on the adapter, a camera installed on the supporting frame, an insertion female end installed on the supporting frame and a light source module. The light source can be replaced when detected products (the colors of the products are inconsistent) are replaced, the cost is low, and compared with common manual replacement, the risk can be reduced, and the efficiency is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of detection equipment and relates to a wafer box defect detection device capable of automatically replacing a detection light source. Background Art

[0002] Defect detection usually refers to the detection of surface defects of objects; surface defect detection uses advanced machine vision detection technology to detect defects such as spots, pits, scratches, color differences, and defects on the surface of workpieces. At present, although common defect inspection equipment can perform product inspections, it usually does not support the inspection of products with two colors; if you encounter products with two colors, you can only change the color of the light source, and the defect inspection equipment on the market generally replaces the light source manually, which is time-consuming and has certain risks.

[0003] The Chinese invention patent with the authorization announcement number CN219915349U discloses an optical switching detection device and a detection analyzer, wherein the optical switching detection device is arranged in the detection analyzer, and the optical switching detection device includes a bottom plate, an optical detection assembly, a reagent assembly and a plurality of light source switching assemblies; the optical detection assembly includes a plurality of detection members, and the detection members can detect the change of the light signal; the light source switching assembly includes a driving mechanism and two light source bars, the two light source bars are respectively slidably arranged on both sides of the detection member, and a plurality of light sources are arranged on the light source bars at intervals, and at least some of the light sources have different luminous wavelengths, and the light source bars are all driven and connected to the driving mechanism, and the driving mechanism can drive the two light source bars to approach or move away from each other, so that the detection member can selectively sense the light emitted by two light sources with the same luminous wavelength or different luminous wavelengths; the reagent assembly includes a reagent strip, and the light emitted by the light source can irradiate the sample of the reagent strip and reflect to the detection member. It adopts a specific optical switching detection device (including a driving mechanism) to selectively sense the light emitted by two light sources with the same luminous wavelength or different luminous wavelengths, and has a complex structure and low efficiency. Summary of the invention

[0004] The purpose of the present invention is to overcome the deficiencies of the prior art and to provide a wafer box defect detection device with automatic replacement of detection light sources, so as to quickly replace the light source and improve efficiency.

[0005] To achieve the above object, the technical solution adopted by the present invention is: a wafer box defect detection device with automatic replacement of detection light source, which comprises:

[0006] Support base,

[0007] A plurality of light source carriers, wherein the plurality of light source carriers are mounted on the support base;

[0008] A light source replacement mechanism, the light source replacement mechanism comprising a fixing seat mounted on the supporting base, a mechanical arm mounted on the fixing seat, and a quick-change unit mounted at a free end of the mechanical arm;

[0009] At least one set of product carrying components, the product carrying components are used to carry products and drive the products to reciprocate and / or rotate;

[0010] The quick-change unit includes an adapter, a support frame mounted on the adapter, a camera mounted on the support frame, a plug-in female end mounted on the support frame, and a plurality of light source modules, wherein the light source module includes a light source arranged below the camera and a plug-in male end connected to the light source and detachably matched with the plug-in female end;

[0011] Each of the light source carriers is used to carry one of the light source modules.

[0012] Optimally, the support frame includes a support cross plate with a middle portion mounted on the free end of the adapter and an L-shaped support plate mounted on and matched with the support cross plate, the camera is mounted on the support cross plate, and the plug-in female end is mounted on the L-shaped support plate.

[0013] Furthermore, the light source module further comprises a light source carrier board connected to the male plug-in end, and the light source is mounted on an outer end of the light source carrier board.

[0014] Optimally, the plug-in female end includes a female end body mounted on the support frame via a plurality of first fasteners, a plug-in hole opened at the center of the female end body, and a plurality of plug pins arranged on the end surface of the female end body.

[0015] Furthermore, the plug-in male end includes a male end body, a plug formed on any end surface of the male end body and matching with the plug-in hole, a plurality of snap-in balls movably arranged in the plug, a socket opened on one end surface of the male end body and matching with the plug pin, a connecting boss arranged on the other end surface of the male end body, and a plurality of air holes opened on the circumferential surface of the male end body for inputting high-pressure gas; when high-pressure gas is input, the plurality of snap-in balls protrude from the circumferential surface of the plug.

[0016] Optimally, each group of the product carrying components includes multiple groups of slide rails installed on the support base, sliders slidably installed on the slide rails, a carrier plate installed on the slider via multiple support plates, and a rotating carrier plate rotatably installed on the carrier plate for mounting products.

[0017] Furthermore, each group of the product carrying components also includes a limiting track installed on the support base and located outside any of the slide rails, and an induction baffle installed on any of the support plates and cooperating with the limiting track.

[0018] Optimally, it also includes:

[0019] The sample cover carrier comprises a plurality of support rods erected on the support base and a carrier plate installed on the top of the plurality of support rods for placing a sample cover plate.

[0020] Due to the application of the above-mentioned technical scheme, the present invention has the following advantages compared with the prior art: the wafer box defect detection device of the present invention can automatically replace the detection light source, by adopting a light source carrier, a light source replacement mechanism, a product carrying assembly and a quick-change unit with a specific structure. When the detection product is replaced (the product color is inconsistent), the light source can be replaced at a low cost, and compared with ordinary manual replacement, it can reduce risks and improve efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of a wafer box defect detection device with automatic replacement of detection light source according to the present invention;

[0022] Figure 2 It is a partial structural schematic diagram of a wafer box defect detection device with automatic replacement of detection light source of the present invention;

[0023] Figure 3 It is a structural schematic diagram of a quick-change unit in a wafer box defect detection device for automatically replacing a detection light source according to the present invention;

[0024] Figure 4 It is a structural schematic diagram of the female end plug-in in the wafer box defect detection device with automatic replacement of the detection light source of the present invention;

[0025] Figure 5 It is a structural schematic diagram of the male terminal plug-in in the wafer box defect detection device with automatic replacement of the detection light source of the present invention. DETAILED DESCRIPTION

[0026] The present invention will be further described below in conjunction with the embodiments shown in the accompanying drawings.

[0027] The following descriptions of the embodiments are with reference to the accompanying drawings to illustrate specific embodiments in which the present invention can be implemented. The directional terms mentioned in the present invention, such as "upper", "lower", "front", "back", "left", "right", "inner", "outer", "side", etc., are only with reference to the directions of the accompanying drawings. Therefore, the directional terms used are used to illustrate and understand the present application, rather than to limit the present application. In addition, in the specification, unless explicitly described to the contrary, the words "include" or "comprise" should be understood to mean including the element, but not excluding any other elements.

[0028] like Figure 1 and Figure 2 The wafer box defect detection device with automatic replacement of detection light source shown mainly includes a support base 1, a light source replacement mechanism 2, a product carrying component 3 and a light source carrier 6, etc.

[0029] Among them, the support base 1 can adopt the existing conventional ones, such as the support base 1 can include a cabinet, an operating table 11 installed on the top of the cabinet, and a plurality of support rollers installed on the bottom of the cabinet, and the relevant circuits, gas circuits and other structures can be installed in the cabinet. There are multiple light source carriers 6 (2 in this embodiment), and these light source carriers 6 are installed on the support base 1; each light source carrier 6 usually includes two limit plates 61 arranged oppositely and at intervals, and an inner recess 62 opened on the facing surfaces of the two limit plates 61. The light source replacement mechanism 2 includes a fixed base 21 installed on the support base 1, a mechanical arm 22 installed on the fixed base 21 (the mechanical arm can adopt various existing conventional multi-axis mechanical arms according to the application of the device) and a quick-change unit 23 installed at the free end of the mechanical arm 22.

[0030] like Figures 3 to 5As shown, the quick-change unit 23 includes an adapter 231, a support frame mounted on the adapter 231, a camera 233 mounted on the support frame, a plug-in female end 235 mounted on the support frame, and a plurality of light source modules (the light source modules correspond to the aforementioned light source carrier 6 one by one, and each light source module is detachably mounted on the plug-in female end 235), and the light source module includes a light source 238 disposed below the camera 233 and a plug-in male end 236 connected to the light source 238 and detachably matched with the plug-in female end 235. There is at least one group of product carrying components 3, which are used to carry the product 5 (i.e., the wafer box) and drive the product 5 to reciprocate or / and rotate; in this embodiment, there are two groups, which can be designed to perform work according to the process of the product, such as only reciprocating, only rotating, or reciprocating and rotating (as in this embodiment). Each light source carrier 6 is used to carry a light source module. In the initial state, two light source modules are respectively installed on the two light source carriers 6 (no light source module is installed on the quick-change unit 23); when the light source module needs to be installed, the mechanical arm 22 moves to drive the plug-in female end 235 of the quick-change unit 23 to move to the position of any light source carrier 6, and the plug-in female end 235 is plugged and matched with the plug-in male end 236; when the light source module needs to be replaced, the installed light source module is transferred to the light source carrier 6 by the mechanical arm 22, and then the empty quick-change unit 23 is plugged and matched with another light source module. In this embodiment, the camera 233 is usually connected to a processor (such as an industrial computer or various microprocessors, etc.) to obtain the signal transmitted by the camera 233 and process and identify it to realize the detection of surface defects of the product; when it is necessary to realize automatic control of the structure such as the mechanical arm 22, it can be connected to an industrial computer, etc. (which can be the aforementioned processor or another independent one).

[0031] The support frame includes a support cross plate 232 whose middle is installed on the free end of the adapter 231 and an L-shaped support plate 234 installed on the support cross plate 232 and matched with it. The camera 233 is installed on the support cross plate 232, and the plug-in female end 235 is installed on the L-shaped support plate 234, so that the camera 233 is located directly above the light source 238; the light source module also includes a light source carrier board 237 connected to the plug-in male end 236, and the light source 238 is installed on the outer end of the light source carrier board 237.

[0032] In this embodiment, the plug-in female end 235 includes a female end body 2351 (specifically, installed on the lower end of the L-shaped support plate 234) installed on the support frame by multiple first fasteners (such as conventional bolts), a plug-in hole 2352 opened at the center of the female end body 2351, and multiple pins 2353 (usually two and symmetrical about the axis of the plug-in hole 2352) arranged on the end surface of the female end body 2351. The plug-in male end 236 includes a male end body 2361, a plug 2363 formed on any end surface of the male end body 2361 and matched with the plug hole 2352 (the formation method is usually a conventional fixed connection method such as integral molding or welding, the same below), a plurality of snap-in balls 2364 movably arranged in the plug 2363 (specifically, a plurality of openings with a diameter slightly smaller than the diameter of the snap-in balls 2364 are provided on the circumference of the plug 2363, and a receiving concave hole that can accommodate the snap-in balls 2364 and communicates with the opening is provided in the plug 2363; at the same time, a plurality of air passages corresponding to the receiving concave holes are also provided in the plug 2363), a plug hole 2362 opened on one end surface of the male end body 2361 and matched with the plug pin 2353 (the plug hole 2362 and the plug 2363 are located in the male end body 2361 On the same end surface of the male end body 2361), a connecting boss 2365 arranged on the other end surface of the male end body 2361 and a plurality of air holes 2366 (the air holes 2366 are connected to the aforementioned ventilation channels one by one) provided on the circumferential surface of the male end body 2361 for inputting high-pressure gas; in this way, high-pressure gas can be transported into the male end body 2361 through the air holes 2366, so that the snap-in balls 2364 protrude from the circumferential surface of the male end body 2361 (that is, when high-pressure gas is input, a plurality of snap-in balls 2364 protrude from the circumferential surface of the plug 2363), so that the snap-in balls 2364 are in close contact with the inner wall of the plug hole 2352 to achieve a firm connection between the plug male end 236 and the plug female end 235; when the high-pressure gas is released, the snap-in balls 2364 can be reset, so that the plug male end 236 and the plug female end 235 can be easily disassembled.

[0033] In this embodiment, each set of product carrying components 3 includes multiple sets of slide rails 31 installed on the support base 1, sliders 32 slidably installed on the slide rails 31, a carrier plate 33 installed on the slider 32 through multiple support plates 34, and a rotating carrier plate 37 rotatably installed on the carrier plate 33 for mounting the product 5; the reciprocating movement of the product 5 is achieved through the cooperation of the slider 32, the slide rail 31 and other structures, and the rotating carrier plate 37 can be an existing conventional one as long as it can achieve the rotation of the product 5 (the rotation axis is perpendicular to the horizontal plane). Each set of product carrying components 3 also includes a limiting rail 35 installed on the support base 1 and located outside any slide rail 31, and an induction baffle 36 installed on any support plate 34 and matched with the limiting rail 35, so that the reciprocating movement of the product 5 can be limited to avoid excessive movement.

[0034] In this embodiment, the wafer box defect detection device with automatically changing detection light sources also includes a sample cover carrier 4, which includes a plurality of support rods 41 erected on a support base 1 and a supporting plate 42 installed on the top of the plurality of support rods 41 for placing a sample cover plate 51. This is because the product 5 usually has a sample cover plate 51, and when performing inspection, the sample cover plate 51 needs to be removed from the product 5 and placed on the supporting plate 42.

[0035] The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with the technology to understand the content of the present invention and implement it accordingly, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A wafer box defect detection device with automatic replacement of detection light source, comprising: Support base (1), A plurality of light source carriers (6), wherein the plurality of light source carriers (6) are mounted on the support base (1); A light source replacement mechanism (2), the light source replacement mechanism (2) comprising a fixing seat (21) mounted on the supporting base (1), a mechanical arm (22) mounted on the fixing seat (21), and a quick-change unit (23) mounted on the free end of the mechanical arm (22); At least one set of product carrying components (3), wherein the product carrying components (3) are used to carry products (5) and drive the products (5) to reciprocate and / or rotate; The quick-change unit (23) is characterized in that: the quick-change unit (23) comprises an adapter (231), a support frame mounted on the adapter (231), a camera (233) mounted on the support frame, a female plug end (235) mounted on the support frame, and a plurality of light source modules, wherein the light source module comprises a light source (238) arranged below the camera (233) and a male plug end (236) connected to the light source (238) and detachably matched with the female plug end (235); Each of the light source carriers (6) is used for carrying one of the light source modules.

2. The wafer box defect detection device with automatic replacement of detection light source according to claim 1 is characterized in that: The support frame comprises a support cross plate (232) whose middle is mounted on the free end of the adapter (231) and an L-shaped support plate (234) mounted on and matched with the support cross plate (232); the camera (233) is mounted on the support cross plate (232); and the plug-in female end (235) is mounted on the L-shaped support plate (234).

3. The wafer box defect detection device with automatic replacement of detection light source according to claim 1 or 2, characterized in that: The light source module further comprises a light source carrier board (237) connected to the plug-in male end (236), and the light source (238) is mounted on the outer end of the light source carrier board (237).

4. The wafer box defect detection device with automatic replacement of detection light source according to claim 1 is characterized in that: The plug-in female end (235) comprises a female end body (2351) mounted on the support frame via a plurality of first fasteners, a plug-in hole (2352) provided at the center of the female end body (2351), and a plurality of plug pins (2353) provided on the end surface of the female end body (2351).

5. The wafer box defect detection device with automatic replacement of detection light source according to claim 4 is characterized in that: The plug-in male end (236) includes a male end body (2361), a plug (2363) formed on any end surface of the male end body (2361) and matched with the plug hole (2352), a plurality of snap-in balls (2364) movably arranged in the plug (2363), a plug hole (2362) provided on one end surface of the male end body (2361) and matched with the plug pin (2353), a connecting boss (2365) provided on the other end surface of the male end body (2361), and a plurality of air holes (2366) provided on the peripheral surface of the male end body (2361) for inputting high-pressure gas; when high-pressure gas is input, the plurality of snap-in balls (2364) protrude from the peripheral surface of the plug (2363).

6. The wafer box defect detection device with automatic replacement of detection light source according to claim 1, characterized in that: Each group of the product carrying components (3) comprises a plurality of groups of slide rails (31) mounted on the support base (1), a slider (32) slidably mounted on the slide rails (31), a carrier plate (33) mounted on the slider (32) via a plurality of support plates (34), and a rotating carrier plate (37) rotatably mounted on the carrier plate (33) for mounting a product (5).

7. The wafer box defect detection device with automatic replacement of detection light source according to claim 6 is characterized in that: Each group of the product carrying components (3) further comprises a limiting rail (35) mounted on the supporting base (1) and located outside any one of the slide rails (31), and an induction baffle (36) mounted on any one of the supporting plates (34) and matched with the limiting rail (35).

8. The wafer box defect detection device with automatic replacement of detection light source according to claim 1, characterized in that: It also includes: A sample cover carrier (4), the sample cover carrier (4) comprising a plurality of support rods (41) erected on the support base (1) and a carrier plate (42) mounted on top of the plurality of support rods (41) for placing a sample cover plate (51).

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