Method and sensor device for automatically calibrating a sensor through humidity change

Abstract

The present invention relates to the technical field of gas sensors, specifically to a method and a sensor device for automatically calibrating a sensor through humidity changes. The method includes measuring the temperature and humidity data of the environment where the current gas sensor is located by a temperature sensor and a humidity sensor; recording the resistance value of the gas sensor at the current temperature and humidity; finding the resistance values of the gas sensor under the condition of the same temperature but different humidity according to the temperature and humidity data; calculating the response value and the calibration coefficient through a calibration algorithm and uploading them to the server. The present invention can automatically restore the accuracy of the gas sensor when its performance is reduced due to environmental factors or long-term use. The method takes the controllable humidity as the calibration basis and does not require manual operation, improving the accuracy of the gas sensor.

Description

Technical Field

[0001] The present invention relates to the technical field of gas sensors, and specifically to a method and a sensor device for automatically calibrating a sensor through humidity change. Background Art

[0002] Metal oxide semiconductor gas sensors are widely used in various environmental monitoring and safety systems due to their advantages such as low cost, fast response speed, high sensitivity, and easy integration. Their gas sensing is achieved through the change of resistance in different atmospheres. For example, when an N-type semiconductor gas sensor is exposed to a reducing gas, its resistance will decrease significantly. Usually, the resistance value Ra (referred to as the baseline resistance) in clean air and the resistance value Rg (referred to as the response resistance) that reaches a stable state after contacting the gas to be measured, Ra / Rg - 1 is called the response value. The response value has a linear relationship with the concentration of the response gas within a certain range, so the concentration of the test gas can be determined by the magnitude of the response value.

[0003] However, with the continuous use of the gas sensor and the change of the environment, the performance of the sensor will continuously decline. At the same concentration, the response of the sensor will continuously decrease with the increase of the number of use days, and there is a certain irregularity, resulting in a serious deviation in the calculated concentration. At this time, calibrating the sensor can greatly improve the quantitative accuracy of the sensor to the response gas. However, a simple mathematical model cannot well correct the concentration deviation, which is mainly related to the individual differences of the sensors and the uncertainty of the use environment. Different sensors decay differently over time and irregularly. Summary of the Invention

[0004] The purpose of the present invention is to provide a method and a sensor device for automatically calibrating a sensor through humidity change to solve the problem that a simple mathematical model cannot well calibrate the sensor proposed in the above background art.

[0005] To achieve the above purpose, the present invention provides the following technical solution: A method for automatically calibrating a sensor through humidity change, the method comprising the following steps:

[0006] Step 1, measuring the temperature and humidity data of the environment where the current gas sensor is located by a temperature sensor and a humidity sensor;

[0007] Step 2, recording the resistance value Ra of the gas sensor at the current temperature and humidity;

[0008] Step 3, finding the resistance value Rg of the gas sensor under the condition of the same temperature but different humidity according to the temperature and humidity data;

[0009] Step 4, calculating the response value of humidity through a calibration algorithm, calculating a calibration coefficient according to the change of the humidity response value, and uploading it to the server.

[0010] The calibration algorithm is as follows:

[0011] Let the humidity change value on the first day be Δh 1 which is the standard humidity change value Δh s , that is, Δh 1 = Δh s . When the environmental humidity change is the standard humidity change value, the standard response value of the gas sensor at this time is Rd Δhs . At the same time, the standard response value when the gas sensor measures a certain gas at a certain concentration on the first day is Rd gas-1 . After the sensor has been used for t days, its performance changes. That is, at this time, the responses of the sensor to humidity changes and gases are different from those on the first day. The response of the sensor is automatically calibrated using the humidity change value. The humidity change value on the t-th day is represented by Δh t , the humidity response is represented by Rd Δht , and the response when measuring a certain gas at a certain concentration on the t-th day is represented by Rd gas-t . Define a calibration coefficient α, and the calculation process of α is as follows:

[0012] a. When the humidity change value on the t-th day is the same as the standard humidity change value, that is, Δh t = Δh 1 = Δh s : ;

[0013] b. When the humidity change value Δh t on the t-th day is different from the standard humidity change value Δh s , that is, Δh t ≠ Δh s , it is known that the response values generated by different humidity change values are different from the response value generated by the standard humidity change value. Therefore, it is necessary to map the response value Rd Δht of non-standard humidity change to the response value Rd Δht-标准 of standard humidity change. The response value and the humidity change value conform to the functional relationship Rd = f(Δh), then Rd’ Δhs = f(Δh s ), Rd’ Δht = f(Δh t ), Rd’ Δhs and Rd’ Δht are the theoretical values obtained through function calculation;

[0014] Let β = Rd’ Δhs / Rd’ Δht , then the response value Rd Δht-标准 mapped to the standard humidity change can be given as Rd Δht * β;

[0015] Then, ;

[0016] The response value of a certain concentration of gas after humidity change calibration is:

[0017] Rd gas-t-校准 = Rd gas-t *α.

[0018] A sensor device that realizes automatic calibration by the above method, including a sensor housing and a gas sensor arranged inside the sensor housing. An air-permeable gate with opening and closing functions is embedded on the surface of the sensor housing. The air-permeable gate is in an open state under non-calibration conditions, and the gas sensor detects the external gas through the air-permeable gate;

[0019] A temperature control module, a temperature sensor, and a humidity sensor are arranged inside the sensor housing. The temperature control module is used to heat the inside of the sensor housing. The temperature sensor is used to detect the temperature inside the sensor housing. The humidity sensor is used to detect the humidity inside the sensor housing;

[0020] A humidity control module is connected and arranged outside the sensor housing through a pipeline. A channel valve is installed on the pipeline between the humidity control module and the sensor housing. When the channel valve is closed, the connection between the humidity control module and the sensor housing can be cut off. A water storage bottle is fixedly arranged inside the humidity control module. The water storage bottle is filled with water. A heating wire is arranged on the surface of the water storage bottle, and the water storage bottle can be heated through the heating wire. A ventilation hole is penetrated and opened at the top of the water storage bottle, and the ventilation hole is closed by a waterproof breathable membrane.

[0021] An upper part of the water storage bottle is connected and provided with a water delivery pipe, and a water pipe valve for controlling the on-off of the water delivery pipe is arranged on the water delivery pipe.

[0022] A supply bin is fixedly arranged on the upper part of the humidity control module. A diversion bottom groove is opened on the lower surface inside the supply bin, and the lowest point of the diversion bottom groove is communicated with the upper end of the water delivery pipe.

[0023] An internal partition is fixedly arranged inside the supply bin, and a semiconductor refrigeration sheet is embedded and installed in the internal partition.

[0024] The refrigerating surface of the semiconductor refrigeration sheet faces downward, and a cold end fin is thermally conducted on the lower refrigerating surface. The lower part of the cold end fin is in a pointed shape, and a hot end fin is thermally conducted on the upper heating surface of the semiconductor refrigeration sheet.

[0025] An air inlet side window and an air outlet are penetrated and opened on the supply bin. The air inlet side window is located below the internal partition, and a gas filter membrane is arranged in the air inlet side window. The air outlet is located above the internal partition.

[0026] A built-in fan is provided inside the supply bin, and an air intake bottom window with a dust filtering function is opened through the lower surface of the supply bin. When the built-in fan rotates, air flows in through the air intake side windows and the air intake bottom window, and flows out through the air outlet.

[0027] An external environment humidity probe is fixedly installed on the surface of the supply bin, and the external environment humidity probe is used to detect the environmental humidity outside the supply bin.

[0028] Compared with the prior art, the present invention has the following beneficial effects:

[0029] The method of automatically calibrating a sensor through humidity changes of the present invention can automatically restore the accuracy of a gas sensor when its performance is reduced due to environmental factors or long-term use. The method uses controllable humidity as a calibration basis, does not require manual operation, and improves the accuracy of the gas sensor.

[0030] The sensor device of the present invention can establish a standard environment required for calibration of the gas sensor. The sensor device controls the humidity and temperature of the environment in which the gas sensor is located, so that the gas sensor can be calibrated independently of the external environment, avoiding the randomness of the external environment, and allowing the gas sensor to complete automatic calibration at any time.

[0031] The sensor device of the present invention cooperates with structures such as a supply bin, cold end fins and a guide bottom trough, and can automatically replenish water in the water storage bottle after the water in the water storage bottle is consumed without the need for a water pipe connection. When it detects that the humidity of the external environment is high, it can automatically capture moisture from the outside air and merge it into the water storage bottle, thereby further improving the practicality of the device and reducing personnel maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 This is a graph showing how the resistance of the gas sensor changes with humidity.

[0033] Figure 2 This is the response value change diagram for different humidity differences.

[0034] Figure 3 Gas response diagram.

[0035] Figure 4 This is the normalized attenuation diagram of the response values ​​for different gases.

[0036] Figure 5 Schematic diagram of the sensor device.

[0037] Figure 6 This is a schematic diagram of the sensor device from another angle.

[0038] Figure 7 This is a schematic diagram of the sensor housing being cut open.

[0039] Figure 8 It is a schematic diagram of a three-dimensional half-section of a sensor device.

[0040] Figure 9 is Figure 8 an enlarged schematic diagram of area A in

[0041] In the figure: 1. Sensor housing; 2. Temperature control module; 3. Humidity control module; 4. Channel valve; 5. Ventilation gate; 6. Temperature sensor; 7. Humidity sensor; 8. Heating wire; 9. Water storage bottle; 10. Ventilation hole; 11. Gas sensor; 301. Water delivery pipe; 302. Water pipe valve; 303. Supply bin; 304. Diversion bottom groove; 305. Internal partition; 306. Semiconductor refrigeration sheet; 307. Cold end fin; 308. Hot end fin; 309. Intake side window; 310. Gas filter membrane; 311. Air outlet; 312. Built-in fan; 313. Intake bottom window; 314. External environment humidity probe. Specific embodiments

[0042] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0043] Please refer to Figures 1 to 9 , the present invention provides a technical solution: a method for automatically calibrating a sensor through humidity change. Since humidity is also a test gas, there is a linear relationship within a certain range like other test gases. As Figure 1 and Figure 2 shown, there is a high degree of consistency between humidity and the resistance value of the gas sensor, and its R² value is 0.9978, indicating a strong linear correlation between the two. The response values for different humidity differences increase with the increase of the difference. Therefore, we can reasonably regard air with different humidities as a response medium.

[0044] As Figure 3 shown, Figure 3 shows the selectivity characteristics of the gas sensor for different gases under clean air with the same temperature and humidity, indicating that the gas sensor itself responds to multiple gases and also responds to humidity, which gives the possibility of automatically calibrating the sensor with humidity.

[0045] During the weakening process of the gas sensor, the response of humidity is consistent with the response of other gases in terms of weakening. As Figure 4As shown, the gas response change curves of carbon monoxide, ethanol, etc. are consistent with the humidity response change curve, and the changes caused by the attenuation of the sensor usage time can be calibrated through this calibration method.

[0046] Therefore, this method includes the following steps:

[0047] Step 1: Measure the temperature and humidity data of the environment where the current gas sensor is located by the temperature sensor and the humidity sensor;

[0048] Step 2: Record the resistance value Ra of the gas sensor at the current temperature and humidity;

[0049] Step 3: Find the resistance value Rg of the gas sensor under the condition of the same temperature and different humidity according to the temperature and humidity data;

[0050] Step 4: Calculate the response value of humidity through the calibration algorithm, calculate the calibration coefficient according to the change of the humidity response value, and upload it to the server.

[0051] The calibration algorithm is as follows:

[0052] Let the humidity change value on the first day be Δh 1 That is the standard humidity change value Δh s , namely Δh 1 =Δh s , when the environmental humidity changes to the standard humidity change value, the standard response value of the gas sensor at this time is Rd Δhs , and at the same time, the standard response value of the gas sensor measuring a certain gas at a certain concentration on the first day is Rd gas-1 , the performance of the sensor changes after t days of use, that is, at this time, the responses of the sensor to humidity changes and gases are different from those on the first day. Use the humidity change value to automatically calibrate the response of the sensor; the humidity change value on the t-th day is represented by Δh t , the humidity response is represented by Rd Δht , the response of measuring a certain gas at a certain concentration on the t-th day is represented by Rd gas-t , define a calibration coefficient α, and the calculation process of α is as follows:

[0053] a. When the humidity change value on the t-th day is the same as the standard humidity change value, that is, Δh t =Δh 1 =Δh s ; ;

[0054] b. When the humidity change value Δh t on the t-th day is different from the standard humidity change value Δh s , that is, Δh t ≠Δh s, it is known that the response values generated by different humidity change values are different from those generated by the standard humidity change value. Therefore, it is necessary to map the response value Rd Δht of non-standard humidity change to the response value Rd Δht-标准 of standard humidity change. If the response value and the humidity change value conform to the functional relationship Rd = f(Δh), then Rd’ Δhs = f(Δh s ), Rd’ Δht = f(Δh t ), Rd’ Δhs and Rd’ Δht are the theoretical values obtained through function calculation;

[0055] Let β = Rd’ Δhs / Rd’ Δht , then the response value Rd Δht-标准 mapped to the standard humidity change can be given as Rd Δht = Rd

[0056] * β; ;

[0057] The response value of a certain concentration of gas after humidity change calibration is:

[0058] Rd gas-t-校准 = Rd gas-t * α.

[0059] A sensor device that uses the above method to achieve automatic calibration, including a sensor housing 1 and a gas sensor 11 disposed inside the sensor housing 1. A breathable gate 5 with an opening and closing function is embedded on the surface of the sensor housing 1. A closing blade is provided inside the breathable gate 5, and the breathable gate 5 can be closed by controlling the blade. The breathable gate 5 is in an open state under non-calibration conditions, and the gas sensor 11 detects the external gas through the breathable gate 5;

[0060] A temperature control module 2, a temperature sensor 6, and a humidity sensor 7 are disposed inside the sensor housing 1. The temperature control module 2 is used to heat the inside of the sensor housing 1, the temperature sensor 6 is used to detect the temperature inside the sensor housing 1, and the humidity sensor 7 is used to detect the humidity inside the sensor housing 1;

[0061] An external humidity control module 3 is connected to the outside of the sensor housing 1 through a pipeline. A channel valve 4 is installed on the pipeline between the humidity control module 3 and the sensor housing 1. When the channel valve 4 is closed, the connection between the humidity control module 3 and the sensor housing 1 can be cut off. Inside the humidity control module 3, a water storage bottle 9 is fixedly arranged. The water storage bottle 9 is filled with water. A heating wire 8 is arranged on the surface of the water storage bottle 9. The water storage bottle 9 can be heated through the heating wire 8. A ventilation hole 10 is penetrated and opened at the top of the water storage bottle 9, and the ventilation hole 10 is closed by a waterproof breathable membrane. The water storage bottle 9 is made of stainless steel. The waterproof breathable membrane can realize the diffusion of water vapor while ensuring that liquid water does not flow out. Since the intermolecular spacing of water vapor molecules is relatively large, they can pass through the ventilation holes of the waterproof breathable membrane during the diffusion movement. However, the intermolecular spacing of liquid water molecules is smaller than the spacing of the ventilation holes, and under the action of surface tension, the liquid water molecules cannot pass through the waterproof breathable membrane, thus playing a waterproof role.

[0062] A water delivery pipe 301 is connected to the upper part of the water storage bottle 9. A water pipe valve 302 for controlling the on-off of the water delivery pipe 301 is arranged on the water delivery pipe 301, and the water pipe valve 302 is electrically controlled to open and close.

[0063] A supply bin 303 is fixedly arranged on the upper part of the humidity control module 3. A diversion bottom groove 304 is opened on the lower surface inside the supply bin 303, and the lowest point of the diversion bottom groove 304 is connected to the upper end of the water delivery pipe 301.

[0064] An internal partition 305 is fixedly arranged inside the supply bin 303, and a semiconductor refrigeration sheet 306 is embedded and installed in the internal partition 305. The refrigerating surface of the semiconductor refrigeration sheet 306 faces downward, and a cold end fin 307 is thermally conducted on the lower refrigerating surface. The lower part of the cold end fin 307 is in a pointed shape, and a hot end fin 308 is thermally conducted on the upper heating surface of the semiconductor refrigeration sheet 306.

[0065] An air intake side window 309 and an air outlet 311 are penetrated and opened on the supply bin 303. The air intake side window 309 is located below the internal partition 305, and a gas filter membrane 310 is arranged in the air intake side window 309. The air outlet 311 is located above the internal partition 305.

[0066] An internal fan 312 is arranged inside the supply bin 303. An air intake bottom window 313 with a dust filtering function is penetrated and opened on the lower surface of the supply bin 303. When the internal fan 312 rotates, air flows in through the air intake side window 309 and the air intake bottom window 313 and flows out through the air outlet 311.

[0067] An external environment humidity probe 314 is fixedly installed on the surface of the supply bin 303, and the external environment humidity probe 314 is used to detect the environmental humidity outside the supply bin 303.

[0068] During the daily operation of the sensor device in the present invention, the channel valve 4 is closed, the humidity control module 3 is in a closed state, the air permeable gate 5 is opened, and the gas sensor 11 communicates with the external gas through the air permeable gate 5, enabling the gas sensor 11 to detect the external gas.

[0069] When the calibration function is started, the air permeable gate 5 is closed, and at the same time, the temperature control module 2 is started to heat the inside of the sensor housing 1. In cooperation with the feedback of the temperature sensor 6, the temperature inside the sensor housing 1 is raised to 45 degrees Celsius and maintained at a constant temperature. The humidity inside the sensor housing 1 is monitored in real time through the humidity sensor 7. At this time, the channel valve 4 is opened, and at the same time, the heating wire 8 is energized, so that the heating wire 8 heats the water storage bottle 9. The water in the water storage bottle 9 is heated to generate water vapor, which escapes through the air permeable holes 10 and then diffuses into the sensor housing 1 through the pipeline between the sensor housing 1 and the humidity control module 3, slowly increasing the humidity inside the sensor housing 1.

[0070] When the humidity sensor 7 detects that the humidity inside the sensor housing 1 reaches 65%, the channel valve 4 is closed, the temperature inside the sensor housing 1 is kept constant, and it is stabilized for 5 minutes to measure the first calibration point, and the resistance value of the gas sensor 11 at the current temperature and humidity is recorded.

[0071] After completion, the channel valve 4 is opened again, and the humidity inside the sensor housing 1 is continuously increased. When the humidity reaches 85%, the channel valve 4 is closed again, the temperature inside the sensor housing 1 is kept constant, and it is stabilized for 5 minutes to measure the second calibration point, and the resistance value of the gas sensor 11 under the same temperature but different humidity conditions is recorded. Finally, the response value and calibration coefficient are calculated through the calibration algorithm.

[0072] After the calibration is completed, the air permeable gate 5 is reopened, and the heating wire 8 and the temperature control module 2 are closed.

[0073] The environmental humidity is detected by the external environment humidity probe 314. When the environmental humidity is high, the semiconductor refrigeration sheet 306 is energized. After the semiconductor refrigeration sheet 306 is energized, it cools on one side and heats on the other side. The cooling surface cools the cold end fin 307, and the heating surface dissipates heat through the hot end fin 308. At the same time, the built-in fan 312 operates to drive the air flow to flow in from the intake side window 309 and the intake bottom window 313 and is discharged through the air outlet 311. When the gas flowing in through the intake side window 309 passes through the cold end fin 307, the water vapor in the gas will condense on the cold end fin 307 and drip through the bottom tip of the cold end fin 307. The water pipe valve 302 is opened, and the water converged in the diversion bottom groove 304 enters the water storage bottle 9 through the water delivery pipe 301 to supplement the water storage bottle 9.

[0074] When the gas flows through the hot-end fin 308, it dissipates heat from the hot-end fin 308 and takes away the heat of the hot-end fin 308. Since there are two air inlets, namely the air inlet side window 309 and the air inlet bottom window 313, the air intake flow rate at the air inlet side window 309 can be reduced, avoiding excessive gas flow velocity through the cold-end fin 307 and affecting the condensation effect.

[0075] Although the embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A method for automatically calibrating a sensor by humidity changes, characterized in that: The method comprises the following steps: Step 1: The temperature sensor and humidity sensor measure the temperature and humidity data of the environment where the gas sensor is currently located; Step 2: Record the gas sensor resistance value Ra under the current temperature and humidity; Step 3: Find the gas sensor resistance value Rg under the same temperature and different humidity conditions according to the temperature and humidity data; Step 4: Calculate the humidity response value through the calibration algorithm, calculate the calibration coefficient according to the change of the humidity response value, and upload it to the server; The calibration algorithm is as follows: Let the humidity change value on the first day be Δh1, which is the standard humidity change value Δh s , that is, Δh1=Δh s When the ambient humidity changes to the standard humidity change value, the standard response value of the gas sensor is Rd Δhs At the same time, the standard response value of the gas sensor when measuring a certain concentration of a certain gas on the first day is Rd gas-1 , the performance of the sensor changes after t days of use, that is, the sensor's response to humidity changes and gas is different from that on the first day. The humidity change value is used to automatically calibrate the sensor's response; the humidity change value on the tth day is expressed as Δh t Indicated by humidity response Rd Δht Indicates that the response of a certain concentration of a certain gas measured on the tth day is expressed by Rd gas-t Indicates that a calibration coefficient α is defined, and the calculation process of α is as follows: a. When the humidity change value on day t is the same as the standard humidity change value, that is, Δh t =Δh1=Δh s hour, ; b. Humidity change value Δh on day t t And standard humidity change value Δh s Different, that is, Δh t ≠Δh s It is known that the response values ​​generated by different humidity change values ​​are different from the response values ​​generated by standard humidity change values, so it is necessary to convert the response value Rd of non-standard humidity change into Δht Mapping to the response value Rd of the standard humidity change Δht-标准 , the response value and humidity change value conform to the functional relationship Rd=f(Δh), then Rd' Δhs =f(Δh s ), Rd' Δht =f(Δh t ), Rd' Δhs , Rd' Δht is the theoretical value obtained by function calculation; Let β = Rd' Δhs / Rd' Δht , the response value Rd mapped to the standard humidity change can be given Δht-标准 = Rd Δht *β; but, ; The response value of a certain concentration of gas after humidity change calibration is: Rd gas-t-校准 = Rd gas-t *α。 2. A sensor device, which uses the method as claimed in claim 1 to achieve automatic calibration, characterized in that: The invention comprises a sensor housing (1) and a gas sensor (11) arranged inside the sensor housing (1); a gas gate (5) having an opening and closing function is embedded and installed on the surface of the sensor housing (1); the gas gate (5) is in a normally open state in a non-calibrated state; and the gas sensor (11) detects external gas through the gas gate (5); A temperature control module (2), a temperature sensor (6) and a humidity sensor (7) are arranged inside the sensor housing (1); the temperature control module (2) is used to heat the interior of the sensor housing (1); the temperature sensor (6) is used to detect the temperature inside the sensor housing (1); and the humidity sensor (7) is used to detect the humidity inside the sensor housing (1); The outside of the sensor housing (1) is connected to a humidity control module (3) via a pipeline, and a channel valve (4) is installed on the pipeline between the humidity control module (3) and the sensor housing (1). When the channel valve (4) is closed, the connection between the humidity control module (3) and the sensor housing (1) can be cut off. A water storage bottle (9) is fixedly arranged inside the humidity control module (3), and the water storage bottle (9) is filled with water. A heating wire (8) is arranged on the surface of the water storage bottle (9), and the water storage bottle (9) can be heated by the heating wire (8). A ventilation hole (10) is opened through the top of the water storage bottle (9), and the ventilation hole (10) is sealed by a waterproof and breathable membrane.

3. The sensor device according to claim 2, characterized in that: The upper part of the water storage bottle (9) is connected to a water pipe (301), and the water pipe (301) is provided with a water pipe valve (302) for controlling the on and off of the water pipe (301).

4. The sensor device according to claim 3, characterized in that: A supply bin (303) is fixedly arranged on the upper part of the humidity control module (3), a flow guiding bottom groove (304) is provided on the inner lower surface of the supply bin (303), and the lowest point of the flow guiding bottom groove (304) is connected to the upper end of the water delivery pipe (301).

5. The sensor device according to claim 4, characterized in that: An internal partition (305) is fixedly arranged inside the supply bin (303), and a semiconductor cooling plate (306) is embedded and installed in the internal partition (305).

6. The sensor device according to claim 5, characterized in that: The cooling surface of the semiconductor cooling plate (306) faces downward, and a cold end fin (307) is provided on the lower cooling surface for cooling, the lower portion of the cold end fin (307) is pointed, and a hot end fin (308) is provided on the upper heating surface of the semiconductor cooling plate (306) for heat conduction.

7. The sensor device according to claim 6, characterized in that: The supply bin (303) is provided with an air inlet side window (309) and an air outlet (311), wherein the air inlet side window (309) is located below the internal partition (305), a gas filter membrane (310) is provided in the air inlet side window (309), and the air outlet (311) is located above the internal partition (305).

8. The sensor device according to claim 7, characterized in that: The supply bin (303) is provided with a built-in fan (312) inside, and an air intake bottom window (313) having a dust filtering function is provided through the lower surface of the supply bin (303); when the built-in fan (312) rotates, air flows in through the air intake side windows (309) and the air intake bottom window (313), and flows out through the air outlet (311).

9. The sensor device according to claim 8, characterized in that: An external environment humidity probe (314) is fixedly mounted on the surface of the supply bin (303), and the external environment humidity probe (314) is used to detect the environmental humidity outside the supply bin (303).

Images