Mask transfer device and photolithography machine

Abstract

The application belongs to the technical field of mask production and manufacturing, and discloses a mask conveying device and a photoetching machine. The mask conveying device comprises a support frame, a support arm, vertical driving mechanisms and a grabbing mechanism. The first driving element is installed on the support frame. The output end of the first driving element is in transmission connection with the support arm. The first driving element is configured to drive the support arm to rotate. Two vertical driving mechanisms are symmetrically arranged at the two ends of the support arm. The grabbing mechanism comprises a support plate, two jaw assemblies and a driving assembly. The output end of the vertical driving mechanism is in transmission connection with the support plate. The vertical driving mechanism is configured to drive the support plate to ascend and descend. The driving assembly is configured to drive the two jaw assemblies to move close to or away from each other. The mask conveying device effectively improves the transfer efficiency.

Description

Technical Field

[0001] This invention relates to the field of photomask manufacturing technology, and in particular to a photomask conveying device and a photolithography machine. Background Technology

[0002] A photomask, also known as a photomask, photomask plate, or photolithography photomask, is a mold composed of a thin metal layer or a thin photoresist layer with patterns, text, or other information recorded on its surface, and a glass substrate made of high-purity fused silica or other materials. It is the pattern master used in the photolithography process in microelectronics and integrated optoelectronics manufacturing. In use, an opaque light-blocking film is first used to form the mask pattern on a transparent substrate, and then exposure transfers the pattern onto the wafer. Therefore, the photomask is an indispensable component of the photolithography process.

[0003] As precision components, photomasks are highly sensitive to particles and contaminants. Therefore, they are stored in specialized photomask cassettes and only removed from the cassettes and placed onto the photomask stage by a robotic arm during the exposure process. Due to the high value of the photomasks, they require robust protection during transport to prevent drops. Simultaneously, transport accuracy must be maximized to meet the exposure precision requirements of subsequent steps, while also improving transport efficiency to reduce time and enhance overall machine productivity.

[0004] During the transfer of photomasks, robotic arms are generally used for automatic transfer. However, there is a certain distance between the photomask storage unit and the exposure stage. The photomasks also need to be aligned during the transfer process. Existing robotic arms are generally multi-arm robotic arms, which occupy a large space and have a large rotation radius. This not only occupies a lot of internal space in the lithography machine, but also cannot achieve precise and efficient transfer. Summary of the Invention

[0005] The purpose of this invention is to provide a mask conveying device and a lithography machine, which aims to solve the problems of low transfer efficiency, large rotation radius, and large space occupation of existing multi-arm robotic arms. The mask conveying device and lithography machine have a smaller rotation radius, occupy less space, and have higher transfer efficiency.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] A mask conveying device, comprising:

[0008] A support frame on which a first driving component is mounted;

[0009] A support arm, wherein the output end of the first driving member is connected to the support arm in a transmission manner, and the first driving member is configured to drive the support arm to rotate;

[0010] A vertical drive mechanism, with two vertical drive mechanisms symmetrically arranged at both ends of the support arm;

[0011] The gripping mechanism is provided in two parts, with each gripping mechanism corresponding to one of the two vertical drive mechanisms. Each gripping mechanism includes a support plate, two gripper assemblies, and a drive assembly mounted on the support plate. The output end of each vertical drive mechanism is connected to the support plate in a transmission manner. Each vertical drive mechanism is configured to drive the support plate to move up and down. The two gripper assemblies are symmetrically arranged on the support plate and are slidably connected to the support plate. The drive assembly is configured to drive the two gripper assemblies to move closer to or further away from each other.

[0012] In some possible implementations, the first drive member is connected to the support frame via a drop arm, and the drop arm is connected to the support frame via a slide rail structure, the slide rail structure including a slider, a connecting plate and a locking assembly, the slider being slidably connected to a guide rail at the bottom of the support frame, the connecting plate being mounted on the bottom of the slider, the drop arm being fixedly connected to the connecting plate, and the connecting plate and the support frame being locked and fixed by the locking assembly.

[0013] In some possible implementations, the locking assembly includes a locking plate and a threaded component. The locking plate is configured as an L-shaped structure, which includes a first support plate and a second support plate that are perpendicular to each other. The first support plate is connected to the connecting plate. The support frame is provided with an elongated groove, and the second support plate is locked into the elongated groove by the threaded component.

[0014] In some possible implementations, the vertical arm includes a cylinder, a first guide plate disposed at a first end of the cylinder, and a second guide plate disposed at a second end of the cylinder. The first guide plate is connected to the connecting plate, and the second guide plate is connected to the first driving member. The cylinder, the first guide plate, and the second guide plate are all provided with weight reduction holes.

[0015] In some possible implementations, the vertical drive mechanism includes a third drive member and a guide assembly. The third drive member is mounted on the support arm and its output end is drively connected to the support plate. The guide assembly includes a guide cylinder mounted on the support arm and a guide post slidably connected to the guide cylinder. The first end of the guide post passes through the support arm and is connected to the support plate.

[0016] In some possible implementations, the output end of the drive component is connected to the gripper assembly via a connector, one end of which is connected to the drive component and the other end of which is connected to the middle portion of the gripper assembly.

[0017] In some possible implementations, the gripper assembly includes a connecting arm, two connecting feet respectively disposed at both ends of the connecting arm, and grippers mounted on the connecting feet. The grippers face inward, the connecting arm is located above the support plate, the grippers are located below the support plate, the support plate is provided with an elongated hole for the connecting feet to slide through, and the connector is connected to the midpoint of the connecting arm.

[0018] In some possible implementations, the gripping mechanism further includes a cover plate that covers the support plate and surrounds the support plate to form a receiving cavity, such that the drive assembly, the connecting arm, and part of the connecting foot are received within the receiving cavity.

[0019] In some possible implementations, the support arm includes a horizontal plate and two vertical plates respectively disposed perpendicularly at both ends of the horizontal plate, with extension plates disposed on the opposite outer sides of the two vertical plates, the output end of the first driving member being connected to the horizontal plate, and the vertical driving mechanism being mounted on the extension plates.

[0020] The present invention provides a photolithography machine, including a mask conveying device as described in any of the above embodiments.

[0021] The beneficial effects of the present invention: The mask conveying device provided by the present invention, by setting a first driving member, a support arm and two gripping mechanisms, initially, the line connecting the two gripping mechanisms is consistent with the horizontal projection direction of the support frame. In use, the first driving member drives the support arm to rotate 90 degrees, so that one gripping mechanism is aligned with the pre-alignment position and the other gripping mechanism is aligned with the mask stage receiving position. Then, the vertical driving mechanism drives the support plate to descend, and the driving component drives the two gripper assemblies to move closer to each other, so that the two gripping mechanisms respectively grip the mask at the pre-alignment position and the mask at the mask stage receiving position. Then, the vertical driving mechanism drives the support plate to rise, the first driving member drives the support arm to rotate 180 degrees, and the vertical driving mechanism drives the support plate to descend. Then, the driving component drives the two gripper assemblies to move away from each other, and the mask at the pre-alignment position and the mask at the mask stage receiving position are swapped, thus accurately realizing the transfer of the mask at the two stations. After exposure is completed, the first driving member can drive the support arm to rotate 90 degrees, so that the two gripping mechanisms return to their original positions for easy operation again. Compared to existing multi-arm robotic structures, this mask transfer device, through the use of two symmetrical gripping mechanisms, can not only transfer masks at the pre-aligned position and those at the mask stage receiving position, but also interchange masks at the pre-aligned position and those at the mask stage receiving position, effectively improving transfer efficiency. Secondly, because the two gripping mechanisms are symmetrically arranged, the space occupied during transfer is only the line connecting the two gripping mechanisms, and both gripping mechanisms are within the same transfer radius, thus requiring less space during transfer.

[0022] The present invention also provides a lithography machine including the above-mentioned mask conveying device, which enables precise and efficient transfer of masks on the pre-aligned and mask stage receiving positions. Attached Figure Description

[0023] Figure 1 This is a three-dimensional view of the mask conveying device from one perspective provided in an embodiment of the present invention;

[0024] Figure 2 This is a side view of the mask conveying device provided in an embodiment of the present invention;

[0025] Figure 3 This is an assembly diagram of the vertical arm and slide rail structure provided in an embodiment of the present invention;

[0026] Figure 4 This is a schematic diagram of the gripping mechanism from one perspective provided in an embodiment of the present invention;

[0027] Figure 5 This is a three-dimensional view of the mask conveying device from another perspective provided in an embodiment of the present invention;

[0028] Figure 6 This is a schematic diagram of the slide rail structure and vertical drive mechanism provided in an embodiment of the present invention;

[0029] Figure 7 This is a partial structural schematic diagram of the mask conveying device (support frame not shown) provided in an embodiment of the present invention;

[0030] Figure 8 This is a schematic diagram of the gripping mechanism from another perspective provided in an embodiment of the present invention;

[0031] Figure 9 This is a schematic diagram of the support arm provided in an embodiment of the present invention;

[0032] Figure 10 This is a schematic diagram of the structure of the connector provided in an embodiment of the present invention;

[0033] Figure 11 This is a schematic diagram of the working process of the mask conveying device provided in an embodiment of the present invention.

[0034] In the picture:

[0035] 10. Mask conveying device; 20. Mask; 30. Pre-alignment position; 40. Mask stage receiving position;

[0036] 100. Support frame; 110. Crossbeam; 120. Longitudinal beam; 130. Support leg; 200. Vertical arm; 210. Cylinder body; 220. First guide plate; 230. Second guide plate; 240. Weight reduction hole; 300. First driving component; 400. Support arm; 410. Horizontal plate; 420. Vertical plate; 430. Extension plate; 500. Vertical driving mechanism; 510. Third driving component; 520. Guide assembly; 521. Guide cylinder; 522. Guide post; 600, gripping mechanism; 610, support plate; 611, elongated hole; 621, connecting arm; 622, connecting foot; 623, gripper; 624, vacuum nozzle; 630, drive assembly; 631, second drive component; 640, connector; 650, cover plate; 700, slide rail structure; 710, slider; 720, guide rail; 730, connecting plate; 741, locking plate; 7411, first support plate; 7412, second support plate. Detailed Implementation

[0037] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0038] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0039] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0040] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0041] This embodiment provides a mask conveying device and a lithography machine, which aims to solve the problems of low transfer efficiency, large rotation radius, and large space occupation of existing multi-arm robotic arms. The mask conveying device and lithography machine have a smaller rotation radius, occupy less space, and have higher transfer efficiency.

[0042] like Figures 1 to 10 As shown, the mask conveying device 10 includes a support frame 100, a support arm 400, a vertical drive mechanism 500, and a gripping mechanism 600. A first driving member 300 is mounted on the support frame 100; the output end of the first driving member 300 is connected to the support arm 400 in a transmission manner, and the first driving member 300 is configured to drive the support arm 400 to rotate; two vertical driving mechanisms 500 are symmetrically arranged at both ends of the support arm 400; two gripping mechanisms 600 are provided, and the two gripping mechanisms 600 are arranged one-to-one with the two vertical driving mechanisms 500. The gripping mechanism 600 includes a support plate 610, two gripper assemblies and a driving assembly 630 mounted on the support plate 610. The output end of the vertical driving mechanism 500 is connected to the support plate 610 in a transmission manner, and the vertical driving mechanism 500 is configured to drive the support plate 610 to rise and fall. The two gripper assemblies are symmetrically arranged on the support plate 610 and are slidably connected to the support plate 610. The driving assembly 630 is configured to drive the two gripper assemblies to move closer to or further away from each other.

[0043] See Figure 11 A represents one gripping mechanism 600, and B represents the other gripping mechanism 600. In the initial state, the line connecting the two gripping mechanisms 600 of the aforementioned mask conveying device 10 is aligned with the horizontal projection direction of the support frame 100. At this time, the two gripping mechanisms 600 are located within the frame area of ​​the support frame 100. The support frame 100 can protect the two gripping mechanisms 600 from the sides and top, preventing damage or impact on accuracy caused by other mechanisms touching them. This position is the default initial position. Figure 11 As shown in Figure a. In use, the first driving component 300 first drives the support arm 400 to rotate 90 degrees in the opposite (or forward) direction, as shown in Figure a. Figure 11As shown in Figure b, one gripping mechanism 600 is aligned with the pre-alignment position 30, and the other gripping mechanism 600 is aligned with the mask stage receiving position 40. The alignment of the two gripping mechanisms 600 with the pre-alignment position 30 and the mask stage receiving position 40 is completed during assembly and can be used directly without recalibration, greatly saving adjustment time. Next, the vertical drive mechanism 500 drives the support plate 610 to descend, and the drive assembly 630 drives the two gripper assemblies to move closer together, so that the two gripping mechanisms 600 respectively grip the mask 20 on the pre-alignment position 30 and the mask 20 on the mask stage receiving position 40. Then, the vertical drive mechanism 500 drives the support plate 610 to rise, and the first drive component 300 drives the support arm 400 to rotate 180 degrees forward or backward. Figure 11 As shown in Figure c, the vertical drive mechanism 500 drives the support plate 610 to descend, and the drive assembly 630 drives the two gripper assemblies to move away from each other, swapping the mask 20 on the pre-alignment position 30 and the mask 20 on the mask stage receiving position 40, thus accurately transferring the mask 20 between the two stations. After exposure, the first drive component 300 can drive the support arm 400 to rotate 90 degrees in the opposite (or forward) direction, causing the two gripping mechanisms 600 to return to their original positions. Figure 11 As shown in Figure d, this facilitates repeated operations. Compared to existing multi-arm robotic structures, this mask transfer device 10, through the use of two mutually symmetrical gripping mechanisms 600, can not only transfer the mask 20 on the pre-alignment position 30 and the mask 20 on the mask stage receiving position 40, but also exchange the mask 20 on the pre-alignment position 30 and the mask 20 on the mask stage receiving position 40, effectively improving transfer efficiency. Secondly, since the two gripping mechanisms 600 are symmetrically arranged, the space occupied during transfer is only the line connecting the two gripping mechanisms 600. Both gripping mechanisms 600 are within the same transfer radius, thus requiring less space during transfer. Furthermore, since this solution adjusts each gripping mechanism 600 to its corresponding gripping position during the assembly stage, the rotation angle of the gripping mechanism 600 only needs to be set to ±90° and ±180° to meet the requirements of the entire transfer process and initial position adjustment. The control program is relatively simple, and the control stability and operational stability of the equipment are both high. Compared with the traditional transfer solution using expensive multi-arm robotic arms, it is not only easier to operate but also saves a significant amount of cost.

[0044] Optionally, the first driving component 300 is connected to the support frame 100 via a drop arm 200, and the drop arm 200 is connected to the support frame 100 via a slide rail structure 700. The slide rail structure 700 includes a slider 710, a connecting plate 730, and a locking assembly. The slider 710 is slidably connected to a guide rail 720 at the bottom of the support frame 100. The connecting plate 730 is installed at the bottom of the slider 710, and the drop arm 200 is fixedly connected to the connecting plate 730. The connecting plate 730 and the support frame 100 are locked and fixed by the locking assembly. With this configuration, the installation position of the drop arm 200 on the support frame 100 can be set as needed. After the position of the drop arm 200 is determined, it is locked and fixed to the support frame 100 by the locking assembly. In this embodiment, two guide rails 720 are provided, and the two guide rails 720 are arranged parallel to each other. Multiple sliders 710 are slidably arranged on each guide rail 720 to improve the stability of the drop arm 200 during the sliding process.

[0045] Furthermore, the locking assembly includes a locking plate 741 and a threaded component. The locking plate 741 is configured with an L-shaped structure, which includes a first support plate 7411 and a second support plate 7412 that are perpendicular to each other. The first support plate 7411 is connected to the connecting plate 730, and the support frame 100 is provided with an elongated groove. The second support plate 7412 is locked into the elongated groove by the threaded component. This configuration is simple to operate and provides a reliable connection.

[0046] Optionally, the drop arm 200 includes a cylindrical body 210, a first guide plate 220 disposed at a first end of the cylindrical body 210, and a second guide plate 230 disposed at a second end of the cylindrical body 210. The first guide plate 220 is connected to the connecting plate 730, and the second guide plate 230 is connected to the first driving member 300. The cylindrical body 210, the first guide plate 220, and the second guide plate 230 are all provided with weight-reducing holes 240. The cylindrical body 210 can be used to run cables, improving the overall structural regularity and facilitating wiring. The first guide plate 220 and the second guide plate 230 facilitate the connection between the drop arm 200 and the connecting plate 730, and between the drop arm 200 and the first driving member 300. Preferably, the cylindrical body 210, the first guide plate 220, and the second guide plate 230 are coaxially arranged, and the dimensions of both the first guide plate 220 and the second guide plate 230 are larger than the dimensions of the cylindrical body 210, providing a larger operating space for assembly and disassembly. Furthermore, the weight-reduction hole 240 can be circular, square, or irregularly shaped, as long as it achieves weight reduction. In other embodiments, the hanging arm 200 can be configured in other shapes, such as having a square, triangular, or polygonal cross-section, and can be a hollow or solid structure, as long as it serves a connecting function. When the hanging arm 200 is configured as a hollow structure other than a cylindrical shape, it also facilitates wiring and weight reduction. When the hanging arm 200 is configured as a solid structure, the relevant cables can be arranged along the outer wall of the hanging arm 200, as needed.

[0047] Preferably, the support arm 400 includes a horizontal plate 410 and two vertical plates 420 respectively vertically disposed at both ends of the horizontal plate 410. Extension plates 430 are provided on the opposite outer sides of each of the two vertical plates 420. The output end of the first driving member 300 is connected to the horizontal plate 410, and the vertical driving mechanism 500 is mounted on the extension plates 430. The horizontal plate 410 and the two vertical plates 420 together form a receiving groove, which can be used to install other components, such as cable entry / exit slip rings, to facilitate cable routing and improve overall aesthetics.

[0048] In this embodiment, the vertical drive mechanism 500 includes a third drive member 510 and a guide assembly 520. The third drive member 510 is mounted on the support arm 400, and its output end is connected to the support plate 610. The guide assembly 520 includes a guide cylinder 521 mounted on the support arm 400 and a guide post 522 slidably connected to the guide cylinder 521. The first end of the guide post 522 passes through the support arm 400 and connects to the support plate 610. When the output end of the third drive member 510 retracts upward or pushes downward, the guide assembly 520 ensures that the support plate 610 moves stably and reliably.

[0049] Optionally, the output end of the drive assembly 630 is connected to the gripper assembly via a connector 640. One end of the connector 640 is connected to the drive assembly 630, and the other end is connected to the middle portion of the gripper assembly. During actual assembly, to ensure that the drive assembly 630 can stably push the two gripper assemblies closer or further apart when it ejects, one end of the connector 640 is connected to the drive assembly 630, and the other end is connected to the middle portion of the gripper assembly. This places the driving force on the gripper assembly in the middle, maintaining driving stability. In this embodiment, the drive assembly 630 includes two symmetrically spaced second drive members 631 and two connectors 640. The two second drive members 631 and the two connectors 640 are arranged in a one-to-one correspondence. The output end of the second drive member 631 is connected to the gripper assembly through the connector 640. The connector 640 is L-shaped. One end of the connector 640 is connected to the second drive member 631, and the other end of the connector 640 is connected to the middle part of the gripper assembly. The output end of the second drive member 631 and the L-shaped connector 640 can form a Z-shaped structure. Sufficient space can be reserved between the two second drive members 631 for the installation of the third drive member 510 and the guide post 522.

[0050] In this embodiment, the gripper assembly includes a connecting arm 621, two connecting feet 622 respectively disposed at both ends of the connecting arm 621, and grippers 623 mounted on the connecting feet 622. The grippers 623 face inward. The connecting arm 621 is located above the support plate 610, and the grippers 623 are located below the support plate 610. The support plate 610 is provided with an elongated hole 611 for the connecting feet 622 to slide through. The connector 640 is connected to the midpoint of the connecting arm 621. When the mask 20 is gripped, the output ends of the two second driving members 631 simultaneously push out to both sides, driving the two gripper assemblies to move away from each other. In order to leave sufficient gripping space when gripping the mask 20, after the mask 20 is located between the two gripper assemblies, the output ends of the two second driving members 631 simultaneously retract, and the grippers 623 on both sides move towards each other. The grippers 623 move to below the mask 20. Then, the third driving member 510 drives the support plate 610 to rise, and the grippers 623 support the mask 20 and move it upward a preset distance. Preferably, in order to prevent the mask 20 from moving, the lifting surface of the grippers 623 is provided with a vacuum nozzle 624. The vacuum nozzle 624 is connected to the negative pressure device pipeline and fixes the mask 20 by vacuum adsorption.

[0051] The gripping mechanism 600 also includes a cover plate 650, which covers the support plate 610 and forms a receiving cavity with the support plate 610, so that the drive component 630, the connecting arm 621 and part of the connecting foot 622 are housed in the receiving cavity to avoid being affected by the external environment. The cover plate 650 is provided with through holes for the output end of the drive component 630 and the guide post 522 to pass through.

[0052] In this embodiment, the first drive unit 300 is configured as a direct drive motor, and the second drive unit 631 and the third drive unit 510 are both configured as electric cylinders.

[0053] Optionally, the support frame 100 includes a crossbeam 110 and two longitudinal beams 120. The two longitudinal beams 120 are disposed at both ends of the crossbeam 110 and are perpendicular to the crossbeam 110. Support feet 130 are installed at the ends of the longitudinal beams 120 away from the crossbeam 110 for contacting or fixing to the ground or the lithography machine frame. Two guide rails 720 are installed on the bottom surface of the crossbeam 110. It is understood that when the mask conveying device 10 is not in operation, the two gripping mechanisms 600 are located between the two longitudinal beams 120, and the line connecting the two gripping mechanisms 600 is parallel to the crossbeam 110, thus avoiding the mask conveying device 10 occupying unnecessary space.

[0054] This embodiment also provides a lithography machine, including the above-mentioned mask conveying device 10, which can realize efficient transfer of the mask 20 on the pre-alignment 30 and the mask stage receiving position 40.

[0055] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A mask conveying device, characterized in that, include: A support frame (100) on which a first driving member (300) is mounted; A support arm (400) is provided, wherein the output end of the first drive member (300) is connected to the support arm (400) in a transmission manner, and the first drive member (300) is configured to drive the support arm (400) to rotate. Vertical drive mechanism (500), two vertical drive mechanisms (500) are symmetrically arranged at both ends of the support arm (400); Two gripping mechanisms (600) are provided, and the two gripping mechanisms (600) are arranged one-to-one with the two vertical drive mechanisms (500). Each gripping mechanism (600) includes a support plate (610), two gripper assemblies, and a drive assembly (630) mounted on the support plate (610). The output end of the vertical drive mechanism (500) is connected to the support plate (610) in a transmission manner. The vertical drive mechanism (500) is configured to drive the support plate (610) to rise and fall. The two gripper assemblies are symmetrically arranged on the support plate (610), and the gripper assemblies are slidably connected to the support plate (610). The drive assembly (630) is configured to drive the two gripper assemblies to move closer to or further away from each other. The first driving member (300) can drive the support arm (400) to rotate 90 degrees, so that the two gripping mechanisms (600) are respectively aligned with the pre-alignment position and the mask stage receiving position, and drive the support arm (400) to rotate 180 degrees, so as to realize the exchange of the mask at the pre-alignment position and the mask stage receiving position.

2. The mask conveying device according to claim 1, characterized in that, The output end of the drive assembly (630) is connected to the gripper assembly via a connector (640). One end of the connector (640) is connected to the drive assembly (630), and the other end of the connector (640) is connected to the middle part of the gripper assembly.

3. The mask conveying device according to claim 2, characterized in that, The gripper assembly includes a connecting arm (621), two connecting feet (622) respectively disposed at both ends of the connecting arm (621), and grippers (623) mounted on the connecting feet (622). The grippers (623) face inward. The connecting arm (621) is located above the support plate (610), and the grippers (623) are located below the support plate (610). The support plate (610) is provided with an elongated hole (611) through which the connecting feet (622) slide. The connector (640) is connected to the midpoint of the connecting arm (621).

4. The mask conveying device according to claim 3, characterized in that, The gripping mechanism (600) further includes a cover plate (650), which covers the support plate (610) and together with the support plate (610) forms a receiving cavity, such that the drive assembly (630), the connecting arm (621) and part of the connecting foot (622) are received in the receiving cavity.

5. The mask conveying device according to claim 1, characterized in that, The support arm (400) includes a horizontal plate (410) and two vertical plates (420) respectively vertically disposed at both ends of the horizontal plate (410). An extension plate (430) is provided on the opposite outer side of each of the two vertical plates (420). The output end of the first driving member (300) is connected to the horizontal plate (410), and the vertical driving mechanism (500) is mounted on the extension plate (430).

6. The mask conveying device according to claim 1, characterized in that, The first driving member (300) is connected to the support frame (100) via a vertical arm (200), and the vertical arm (200) is connected to the support frame (100) via a slide rail structure (700). The slide rail structure (700) includes a slider (710), a connecting plate (730), and a locking assembly. The slider (710) is slidably connected to the guide rail (720) at the bottom of the support frame (100). The connecting plate (730) is installed at the bottom of the slider (710). The vertical arm (200) is fixedly connected to the connecting plate (730). The connecting plate (730) and the support frame (100) are locked and fixed by the locking assembly.

7. The mask conveying device according to claim 6, characterized in that, The locking assembly includes a locking plate (741) and a threaded component. The locking plate (741) is configured as an L-shaped structure. The L-shaped structure includes a first support plate (7411) and a second support plate (7412) that are perpendicular to each other. The first support plate (7411) is connected to the connecting plate (730). The support frame (100) is provided with a long strip groove. The second support plate (7412) is locked in the long strip groove by the threaded component.

8. The mask conveying device according to claim 6, characterized in that, The vertical arm (200) includes a cylindrical body (210), a first guide plate (220) disposed at a first end of the cylindrical body (210), and a second guide plate (230) disposed at a second end of the cylindrical body (210). The first guide plate (220) is connected to the connecting plate (730), and the second guide plate (230) is connected to the first driving member (300). The cylindrical body (210), the first guide plate (220), and the second guide plate (230) are all provided with weight reduction holes (240).

9. The mask conveying device according to claim 1, characterized in that, The vertical drive mechanism (500) includes a third drive member (510) and a guide assembly (520). The third drive member (510) is mounted on the support arm (400), and the output end of the third drive member (510) is connected to the support plate (610) in a transmission connection. The guide assembly (520) includes a guide cylinder (521) mounted on the support arm (400) and a guide post (522) slidably connected to the guide cylinder (521). The first end of the guide post (522) passes through the support arm (400) and is connected to the support plate (610).

10. A lithography machine, characterized in that, Includes the mask conveying device as described in any one of claims 1-9.

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