Mask plate code scanning identification method

Abstract

The invention relates to semiconductor processing equipment, in particular to a mask plate code scanning identification method which comprises the following steps: S10, transferring a mask plate to a detection preset position; s20, carrying out preliminary detection to ensure that a film exists; s30, the multi-dimensional adjusting platform adjusts the position of the bearing assembly; s40, turning on a backlight source, a code scanning camera and a positioning camera to carry out bar code scanning and image acquisition; s50, the mask plate is overturned by the overturning assembly, and the detection action in the step S40 is repeated; s60, waiting for carrying after the detection is finished; according to the method, the identification steps are improved, meanwhile, the configuration structure is further optimized, the space is reasonably utilized, the equipment space is saved, and mask plate placement position fine adjustment, quality identification, code scanning recording and plate body turnover are integrated in the preferential longitudinal space; on the whole, the code scanning recognition efficiency is improved, part of quality inspection work is integrated, space utilization is reasonably reduced, and the overall machining efficiency and quality of the mask plate are improved.

Description

Technical Field

[0001] The invention relates to semiconductor processing equipment, in particular to a mask plate scanning and recognition method. Background Art

[0002] The photomask is a key tool in semiconductor manufacturing, used to define the patterns and structures on integrated circuits and other microelectronic devices. It is a transparent glass or quartz substrate covered with a specific pattern. The desired pattern is projected onto the surface of the semiconductor wafer through photolithography. Therefore, the quality of the mask is also one of the concerns of semiconductor processing.

[0003] In the process of promoting semiconductor processing automation, mask plate related inspection and handling work must also meet the corresponding automation standards. Conventional inspection and scanning are pipeline transmission with corresponding workstations, or manual operation; the overall footprint is wide, the equipment occupies a large space, and human factors can easily cause uncontrollable quality problems. Therefore, there is an urgent need for a mask plate scanning and recognition method that is suitable for automated processing. Summary of the invention

[0004] The object of the present invention is to provide a method with simplified steps, capable of positioning, identifying and detecting, and integrating a flipping function.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] A mask plate scanning and identification method includes an adjustment frame, a multi-dimensional adjustment platform installed on the adjustment frame, and a bearing component installed on the multi-dimensional adjustment platform. The identification method includes the following steps:

[0007] S10, the transport component transfers the mask plate to the carrying component, and the mask plate reaches the predetermined detection position;

[0008] S20, the film detection component performs a preliminary detection of the mask plate to ensure that there is indeed a film on the mask plate;

[0009] S30, the multi-dimensional adjustment platform adjusts the position of the bearing component to ensure that the mask plate is placed in a correct position and matches the position of the flip component;

[0010] S40, turning on the backlight source, and the barcode scanning camera 843 and the positioning camera located above the carrying component scan the barcode of the mask plate and acquire an image;

[0011] S50, the flipping assembly flips the mask plate and repeats the detection action of S40;

[0012] S60 , after the inspection is completed, wait for the transport component to transport the mask plate 500 .

[0013] Furthermore, the film detection assembly includes a group of supporting vertical rods fixed at the diagonal of the adjustment frame; the supporting vertical rods are respectively provided with a reflection sensor and a reflection mirror; the installation height of the reflection sensor and the reflection mirror matches the height of the mask plate on the bearing assembly;

[0014] Furthermore, the multi-dimensional adjustment platform includes a translation adjustment component installed on an adjustment frame and a rotary motor mounted on the translation adjustment component; the backlight source is connected to the translation adjustment component through a central column; the bearing component is installed at the output end of the rotary motor; when the placement position of the mask plate needs to be calibrated and adjusted, the translation adjustment component drives the rotary motor to adjust the X-axis and Y-axis directions; the rotary motor drives the bearing component to rotate to ensure that the mask plate is in the correct position;

[0015] Furthermore, the translation adjustment assembly includes an adjustment lower seat fixed on the adjustment frame and an adjustment upper seat installed on the moving end of the adjustment lower seat; the rotary motor is installed on the adjustment upper seat, and the center column passes through the rotary motor and is fixed on the adjustment upper seat.

[0016] Furthermore, the adjusting lower seat includes a lower seat bottom plate and a lower seat movable plate; the adjusting upper seat includes an upper seat bottom plate and an upper seat movable plate; the adjusting lower seat and the adjusting upper seat both include auxiliary slide rails and an adjusting drive; the lower seat bottom plate and the lower seat movable plate, as well as the upper seat bottom plate and the upper seat movable plate are all slidably connected by auxiliary slide rails; the adjusting drive is used to drive the lower seat movable plate and the upper seat movable plate.

[0017] Furthermore, the code scanning camera and the positioning camera are installed on the top of the bearing assembly by using a camera mounting frame; the camera mounting frame is connected to the side of the adjustment frame through a camera bracket;

[0018] Furthermore, the positioning camera is provided with at least four for identifying the four corner tracking points of the mask plate; the installation position of the code scanning camera is inside the positioning camera, and the image acquisition area can cover the entire mask plate;

[0019] Furthermore, the flip assembly is used to flip the mask plate, including an anti-dust clamp for clamping the mask plate, a clamping unit for driving the anti-dust clamp to open and close, and a flip unit for driving the clamping unit to flip; the anti-dust clamp is connected to an external clean air source;

[0020] The flip unit is installed at the telescopic end of the lifting unit; during the flipping operation, the lifting unit changes the height of the flip unit, thereby driving the clamping unit to complete the reciprocating lifting action, and the clamping unit drives the dust-proof clamping claw to complete the opening and closing action. The dust-proof clamping claw continuously blows air during the clamping action to prevent dust from falling during the flipping process;

[0021] Furthermore, the dustproof clamping claw comprises a group of clamping arms connected to the clamping unit, the clamping arms have built-in soot blowing holes, the soot blowing holes are connected and connected to an external air source through an air blowing pipeline;

[0022] Furthermore, an anti-slip pad is movably installed on the inner side of the end of the clamping arm;

[0023] Furthermore, the flip unit includes a flip housing, a flip shaft rotatably mounted on the flip housing for connecting the clamping unit, and a flip drive for driving the flip shaft to rotate; the flip shaft is also provided with a flip trigger sheet; the flip housing is also provided with a flip sensor for sensing the flip trigger sheet;

[0024] Compared with the prior art, the present invention has the following beneficial effects:

[0025] In actual use, the adjustment frame is the integral base part, and the multi-dimensional adjustment platform is installed on the adjustment frame. The multi-dimensional adjustment platform is used to adjust the position of the bearing component. During the inspection, the transport component places the mask plate on the bearing component, and a film detection component is arranged on the side of the bearing component to ensure that there is a film on the placed mask plate. At this time, the multi-dimensional adjustment platform fine-tunes the position of the bearing component and turns on the corresponding backlight source. The scanning camera and the positioning camera are used for inspection, and the positioning camera is used for tracking point positioning to assist in the adjustment of the multi-dimensional adjustment platform. After the single-sided image recognition inspection is completed, the flipping component flips the mask plate, and the positioning camera and the scanning camera perform another inspection operation on the flipped mask plate. Rapid double-sided inspection in a limited space is realized.

[0026] The present invention improves the identification steps while further optimizing the configuration structure, reasonably utilizing space, and saving equipment space. In the preferred longitudinal space, the fine adjustment of the mask plate placement position, quality identification, code scanning record, and plate turning are integrated. Overall, the code scanning recognition efficiency is improved, part of the quality inspection work is integrated, the space utilization is reasonably reduced, and the overall processing efficiency and quality of the mask plate are improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0028] Figure 2 It is a partial structural schematic diagram of the present invention;

[0029] Figure 3 It is a partial structural side view of the present invention;

[0030] Figure 4 It is a schematic diagram of the internal structure of the multi-dimensional adjustment platform of the present invention;

[0031] Figure 5 This is a schematic diagram of the external structure of the multi-dimensional adjustment platform of the present invention;

[0032] Figure 6 This is a schematic diagram of the structure of the translation adjustment component of the present invention;

[0033] Figure 7 It is a schematic diagram of the driving part of the translation adjustment assembly of the present invention;

[0034] Figure 8 This is a schematic diagram of the structure of the flip assembly of the present invention;

[0035] Fig. 9 It is a schematic diagram of the internal structure of the clamping unit and the flipping unit of the present invention;

[0036] Fig.10 This is a partial enlarged schematic diagram of point A of the present invention;

[0037] Fig.11 It is a schematic diagram of the lifting unit structure of the present invention. DETAILED DESCRIPTION

[0038] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0039] refer to Figure 1-11 As shown, a mask plate scanning and identification method includes an adjustment frame 610, a multi-dimensional adjustment platform 600 installed on the adjustment frame 610, and a bearing assembly 650 installed on the multi-dimensional adjustment platform 600. The identification method includes the following steps:

[0040] S10, the transport component transfers the mask plate 500 to the carrying component 650, and the mask plate 500 reaches the predetermined detection position;

[0041] S20, the film detection component 830 performs a preliminary detection on the mask plate 500 to ensure that there is indeed a film on the mask plate 500;

[0042] S30, the multi-dimensional adjustment platform 600 adjusts the position of the carrying component 650 to ensure that the placement position of the mask plate 500 is correct and matches the position of the flip component 700;

[0043] S40, turning on the backlight source 820, and the barcode scanning camera 843 and the positioning camera 842 located above the supporting component 650 perform barcode scanning and image acquisition on the mask plate 500;

[0044] S50, the flipping assembly 700 flips the mask plate 500, and repeats the detection action of S40;

[0045] S60, after the detection is completed, wait for the transport component to transport the mask plate 500;

[0046] In actual use, the adjustment frame 610 is the integral base part, and the multi-dimensional adjustment platform 600 is installed on the adjustment frame 610. The multi-dimensional adjustment platform 600 is used to adjust the position of the bearing component 650. During the detection work, the transport component places the mask plate 500 on the bearing component 650, and a thin film detection component 830 is arranged on the side of the bearing component 650 to ensure that there is a thin film on the placed mask plate 500. At this time, the multi-dimensional adjustment platform 600 fine-tunes the position of the bearing component 650, and turns on the corresponding backlight source 820, and the code scanning camera 843 and the positioning camera 842 are used to detect, and the positioning camera 842 is used to locate the tracking point to assist the adjustment of the multi-dimensional adjustment platform 600. After the single-sided image recognition detection is completed, the flipping component 700 flips the mask plate 500, and the positioning camera 842 and the code scanning camera 843 perform another detection operation on the flipped mask plate 500, so as to realize rapid double-sided detection in a limited space.

[0047] The present mask plate code scanning and identification method improves the identification steps while further optimizing the configuration structure, rationally utilizing space, and saving equipment space. In the preferred longitudinal space, the mask plate placement fine-tuning, quality identification, code scanning records, and plate flipping are integrated. Overall, the code scanning and identification efficiency is improved, part of the quality inspection work is integrated, space utilization is rationally reduced, and the overall processing efficiency and quality of the mask plate are improved.

[0048] In this embodiment, the film detection component 830 includes a group of supporting vertical rods 831 fixed at the diagonals of the adjustment frame 610; the supporting vertical rods 831 are respectively provided with reflection sensors 832 and reflection mirrors 833; the installation heights of the reflection sensors 832 and the reflection mirrors 833 match the height of the mask plate 500 on the supporting component 650; the reflection sensor 832 in the film detection component 830 is a photoelectric sensor, and by adjusting the installation angles of the reflection sensor 832 and the reflection mirror 833 on the supporting vertical rods 831, it is ensured that the reflection mirror 833 can reflect the signal light of the reflection sensor 832, and when there is a film on the mask plate 500, the reflection sensor 832 will be triggered.

[0049] In this embodiment, the multi-dimensional adjustment platform 600 includes a translation adjustment component 620 installed on an adjustment frame 610 and a rotary motor 630 mounted on the translation adjustment component 620; the backlight source 820 is connected to the translation adjustment component 620 through a central column 640; the bearing component 650 is installed at the output end of the rotary motor 630; when the placement position of the mask plate 500 needs to be calibrated and adjusted, the translation adjustment component 620 drives the rotary motor 630 to adjust the X-axis and Y-axis directions; the rotary motor 630 drives the bearing component 650 Rotate to ensure that the mask plate 500 is in the correct position; the bearing assembly 650 is used to bear the mask plate 500, the adjustment frame 610 is the bottom frame of the overall multi-dimensional adjustment platform 600, and the translation adjustment assembly 620 is fixed on the adjustment frame 610, and is used to adjust the rotation motor 630 in both directions of the XY axis; the bearing assembly 650 is installed at the output end of the rotation motor 630 to realize the overall rotation of the bearing assembly 650; as a whole, the mask plate 500 can be adjusted in three directions as needed, in the XY axis and with the center of the bearing assembly 650 as the axis;

[0050] In this embodiment, the translation adjustment assembly 620 includes an adjustment lower seat 622 fixed on the adjustment frame 610 and an adjustment upper seat 623 installed on the moving end of the adjustment lower seat 622; the rotation motor 630 is installed on the adjustment upper seat 623, and the center column 640 passes through the rotation motor 630 and is fixed on the adjustment upper seat 623; the adjustment lower seat 622 is used to realize X-axis adjustment, and the adjustment upper seat 623 is used to realize Y-axis adjustment; the rotation motor 630 is installed on the adjustment upper seat 623; the overall planar and rotational adjustment is realized.

[0051] In this embodiment, the adjusting lower seat 622 includes a lower seat bottom plate 6221 and a lower seat movable plate 6222; the adjusting upper seat 623 includes an upper seat bottom plate 6231 and an upper seat movable plate 6232; in this embodiment, the adjusting lower seat 622 and the adjusting upper seat 623 also include an auxiliary slide rail 624 and an adjustment drive 625; the lower seat bottom plate 6221 and the lower seat movable plate 6222, as well as the upper seat bottom plate 6231 and the upper seat movable plate 6232 are all slidably connected by an auxiliary slide rail 624; the adjusting The whole drive 625 is used to drive the lower seat movable plate 6222 and the upper seat movable plate 6232; the lower seat bottom plate 6221 and the upper seat bottom plate 6231 are both provided with auxiliary slide rails 624, and the auxiliary slide rails 624 are used to ensure the sliding of the lower seat movable plate 6222 and the upper seat movable plate 6232, and the upper seat bottom plate 6231 is installed on the lower seat movable plate 6222, so that the independent adjustment of the X axis and the Y axis can be realized; and the lower seat bottom plate 6221 and the upper seat bottom plate 6231 are both provided with an adjustment drive 625 as a power source for adjustment;

[0052] In this embodiment, the upper seat movable plate 6232 is connected to the rotation adjustment assembly 630 .

[0053] In this embodiment, the adjustment driver 625 is an iron-coreless flat motor; the output end of the adjustment driver 625 is connected to the corresponding movable component.

[0054] In this embodiment, the central column 640 is used to fix and connect the detection light source.

[0055] In this embodiment, the upper seat bottom plate 6231 is fixed to the upper end surface of the lower seat movable plate 6222; and the movement directions of the two groups of adjustment drives 625 are perpendicular.

[0056] In this embodiment, further, the barcode scanning camera 843 and the positioning camera 842 are installed above the bearing assembly 650 using a camera mounting frame 841; the camera mounting frame 841 is connected to the side of the adjustment frame 610 through a camera bracket 844. In this embodiment, the positioning camera 842 is provided with at least four, which are used to identify the four corner tracking points of the mask plate 500; the installation position of the barcode scanning camera 843 is inside the positioning camera 842, and the image acquisition area can cover the entire mask plate 500; a fixed slider is provided on the camera mounting frame 841, and the positioning camera 842 can be adjusted accordingly with the lens clamp; ensure that the positioning camera 842 can identify the positioning tracking (notch) point on the mask plate 500 to complete the change-finding function; ensure that the shooting range of the barcode scanning camera 843 located at the center of the camera mounting frame 841 can correctly cover the mask plate 500, and complete the barcode scanner and related image acquisition work.

[0057] In this embodiment, the flip assembly 700 is used to flip the mask plate 500, including an anti-dust clamp 740 for clamping the mask plate 500, a clamping unit 730 for driving the anti-dust clamp 740 to open and close, and a flip unit 720 for driving the clamping unit 730 to flip; the anti-dust clamp 740 is connected to an external clean air source; the flip unit 720 is installed at the telescopic end of the lifting unit 710; during the flipping operation, the lifting unit 710 changes the height of the flip unit 720, thereby driving the clamping unit 730 to complete a reciprocating lifting action, and the clamping unit 730 drives the anti-dust clamp 740 to complete an opening and closing action. During the clamping action, the dust-proof clamp 740 continuously blows air to prevent dust from falling during the flipping process;

[0058] The flipping assembly is used in conjunction with the adjustment platform, and the overall flipping action is as follows: the lifting unit 710 drives the flipping unit 720 to descend to the specified position, at which time the clamping unit 730 drives the anti-dust clamping claw 740 to clamp the mask plate 500; during this process, the anti-dust clamping claw 740 is connected to the external air source, and the external clean air source continuously blows air to the mask plate 500 to prevent dust from falling; after clamping the mask plate 500, the lifting unit 710 drives the flipping unit 720 to rise as a whole, and the clamping unit 730 and the anti-dust clamping claw 740 rise together and rise to a safe position, and the flipping unit 720 works to flip the clamping unit 730 and the anti-dust clamping claw 740 together, and the mask plate 500 is flipped over. After the flipping is completed, the lifting unit 710 drives the whole to descend, and the clamping unit 730 drives the anti-dust clamping claw 740 to release the mask plate 500; the overall flipping action is completed; the flipping assembly completes the assistance to the back-end detection work.

[0059] In this embodiment, the dust-proof clamping claw 740 includes a group of clamping arms 741 connected to the clamping unit 730, and the clamping arms 741 have built-in soot blowing holes 742. The soot blowing holes 742 are connected and connected to an external air source through an air blowing pipeline 743; the soot blowing holes 742 are air path holes built into the clamping arms 741, and several soot blowing holes 742 are connected and connected to an external air source through an air blowing pipeline 743. The external air source is a clean gas, and the blowing action can reduce and prevent dust from falling on the mask plate 500.

[0060] In this embodiment, an anti-skid pad 744 is movably installed on the inner side of the end of the clamping arm 741; the anti-skid pad 744 is movably assembled on the inner side of the clamping arm 741 by bolts, and the anti-skid pad 744 is made of anti-skid rubber, which can prevent the mask plate 500 from being bumped and play an anti-skid role. The movable installation facilitates the subsequent replacement of vulnerable parts.

[0061] In this embodiment, the flip unit 720 includes a flip housing 725, a flip shaft 722 rotatably mounted on the flip housing 725 for connecting the clamping unit 730, and a flip drive 721 for driving the flip shaft 722 to rotate; the flip drive 721 drives the flip shaft 722 to rotate, thereby driving the clamping unit 730 to rotate as a whole.

[0062] In this embodiment, the flip shaft 722 is also provided with a flip trigger piece 723; a flip sensor 724 for sensing the flip trigger piece 723 is also provided in the flip housing 725; the flip sensor 724 is a photoelectric sensor, which can sense the rotation of the flip trigger piece 723 following the flip shaft 722, and determine whether the flip shaft 722 has completely completed the flipping action.

[0063] In this embodiment, the clamping unit 730 includes a double-claw drive cylinder 731 installed in a clamping housing 733 , and the clamping arm 741 extends into the clamping housing 733 and is connected to the output end of the double-claw drive cylinder 731 .

[0064] In this embodiment, the lifting unit 710 includes a lifting screw module 712 installed inside the lifting housing 716, a lifting connecting plate 713 extending into the lifting housing 716 and installed at the moving end of the lifting screw module 712, and a lifting drive 711 installed in the lifting housing 716 to drive the lifting screw module 712; the lifting unit 710 is used to realize the overall lifting action of the clamping unit 730 and the anti-dust clamp 740, wherein the lifting drive 711 is an encoding motor, which is used to provide power for the lifting screw module 712, and the moving end of the lifting screw module 712 drives the lifting connecting plate 713 to perform lifting action, and the lifting connecting plate 713 is fixedly connected to the flipping unit 720. In this embodiment, a lifting trigger piece 714 is provided on the lifting connecting plate 713, and a lifting sensor 715 for sensing the lifting trigger piece 714 is also provided inside the lifting shell 716; the lifting sensor 715 is a photoelectric sensor, which is used to sense the lifting and lowering action of the lifting trigger piece 714 following the lifting connecting plate 713 to determine whether it is lifted into place.

[0065] The specific embodiments described herein are merely examples of the spirit of the present invention. Those skilled in the art may make various modifications or additions to the specific embodiments described or replace them in similar ways without departing from the scope defined by the spirit of the present invention.

Claims

1. A mask plate scanning and recognition method, characterized in that: The invention comprises an adjustment frame (610), a multi-dimensional adjustment platform (600) installed on the adjustment frame (610), and a bearing assembly (650) installed on the multi-dimensional adjustment platform (600). The identification method comprises the following steps: S10, the transport component transfers the mask plate (500) to the carrying component (650), and the mask plate (500) reaches a predetermined detection position; S20, the thin film detection component (830) performs a preliminary detection on the mask plate (500) to ensure that a thin film is indeed present on the mask plate (500); S30, the multi-dimensional adjustment platform (600) adjusts the position of the carrying component (650) to ensure that the placement position of the mask plate (500) is correct and matches the position of the flip component (700); S40, turning on the backlight source (820), and the barcode scanning camera (843) and the positioning camera (842) located above the supporting component (650) perform barcode scanning and image acquisition on the mask plate (500); S50, the flipping assembly (700) flips the mask plate (500) and repeats the detection action of S40; S60, after the detection is completed, wait for the transport component to transport the mask plate (500).

2. A mask plate scanning and recognition method according to claim 1, characterized in that: The thin film detection assembly (830) comprises a group of supporting vertical rods (831) fixed at the diagonals of the adjustment frame (610); the supporting vertical rods (831) are respectively provided with reflection sensors (832) and reflection mirrors (833); the installation heights of the reflection sensors (832) and the reflection mirrors (833) match the height of the mask plate (500) on the bearing assembly (650).

3. The method for scanning and identifying a mask code according to claim 1, characterized in that: The multi-dimensional adjustment platform (600) comprises a translation adjustment component (620) mounted on an adjustment frame (610) and a rotary motor (630) mounted on the translation adjustment component (620); the backlight source (820) is connected to the translation adjustment component (620) via a central column (640); the bearing component (650) is mounted on the output end of the rotary motor (630); when the placement position of the mask plate (500) needs to be calibrated and adjusted, the translation adjustment component (620) drives the rotary motor (630) to adjust the X-axis and Y-axis directions; the rotary motor (630) drives the bearing component (650) to rotate to ensure that the mask plate (500) is in the correct position.

4. The method for scanning and identifying a mask code according to claim 3, characterized in that: The translation adjustment assembly (620) includes an adjustment lower seat (622) fixed on the adjustment frame (610) and an adjustment upper seat (623) installed at the moving end of the adjustment lower seat (622); the rotation motor (630) is installed on the adjustment upper seat (623), and the central column (640) passes through the rotation motor (630) and is fixed on the adjustment upper seat (623); the adjustment lower seat (622) includes a lower seat bottom plate (6221) and a lower seat movable plate (6222); the adjustment upper seat (623) includes an upper The seat bottom plate (6231) and the upper seat movable plate (6232) are provided; the adjusting lower seat (622) and the adjusting upper seat (623) both include auxiliary slide rails (624) and an adjusting drive (625); the lower seat bottom plate (6221) and the lower seat movable plate (6222), as well as the upper seat bottom plate (6231) and the upper seat movable plate (6232) are slidably connected by auxiliary slide rails (624); the adjusting drive (625) is used to drive the lower seat movable plate (6222) and the upper seat movable plate (6232).

5. The method for scanning and identifying a mask plate according to claim 1, characterized in that: The code scanning camera (843) and the positioning camera (842) are installed above the bearing assembly (650) using a camera mounting frame (841); the camera mounting frame (841) is connected to the side of the adjustment frame (610) through a camera bracket (844).

6. The method for scanning and identifying a mask code according to claim 5, characterized in that: The positioning cameras (842) are provided with at least four for identifying the four corner tracking points of the mask plate (500); the scanning camera (843) is installed inside the positioning camera (842), and the image acquisition area can cover the entire mask plate (500).

7. The method for scanning and identifying a mask code according to claim 1, characterized in that: The flip assembly (700) is used to flip the mask plate (500), and comprises an anti-dust clamp (740) for clamping the mask plate (500), a clamping unit (730) for driving the anti-dust clamp (740) to open and close, and a flip unit (720) for driving the clamping unit (730) to flip; the anti-dust clamp (740) is connected to an external clean air source; The flipping unit (720) is installed at the telescopic end of the lifting unit (710); during the flipping operation, the lifting unit (710) changes the height of the flipping unit (720), thereby driving the clamping unit (730) to complete a reciprocating lifting action, and the clamping unit (730) drives the dust-proof clamping claw (740) to complete an opening and closing action. During the clamping action, the dust-proof clamping claw (740) continuously blows air to prevent dust from being attached during the flipping process.

8. The method for scanning and identifying a mask plate according to claim 1, characterized in that: The dustproof clamping claw (740) comprises a group of clamping arms (741) connected to the clamping unit (730), the clamping arms (741) have built-in soot blowing holes (742), and the soot blowing holes (742) are connected to each other and connected to an external air source through an air blowing pipeline (743).

9. The method for scanning and identifying a mask code according to claim 1, characterized in that: An anti-slip pad (744) is also movably mounted on the inner side of the end of the clamping arm (741).

10. The method for scanning and identifying a mask code according to claim 1, characterized in that: The flip unit (720) comprises a flip housing (725), a flip shaft (722) rotatably mounted on the flip housing (725) for connecting to a clamping unit (730), and a flip drive (721) for driving the flip shaft (722) to rotate; the flip shaft (722) is also provided with a flip trigger sheet (723); and a flip sensor (724) for sensing the flip trigger sheet (723) is also provided in the flip housing (725).

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