A 2.5MV silicon rectifier stack high voltage platform accelerator ion source power supply transmission system
By designing a power supply transmission system including a silicon rectifier stack high-voltage power supply, a high-voltage lead transmission device, a generator power supply device and an ion source device, the problem of the existing technology that the ion source equipment cannot be stably powered on the 2.5MV silicon rectifier stack high-voltage platform is solved, the stable operation and compact installation of the ion source equipment are achieved, and the equipment risk and cost are reduced.
Patent Information
- Application Number
- CN202411883271.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-19
- Publication Date
- 2025-10-10
- Estimated Expiration
- 2044-12-19
AI Technical Summary
There is no complete ion source and accelerator power supply transmission system in the existing technology that can provide stable isolated power supply for ion source equipment running on a 2.5MV silicon rectifier stack high-voltage platform.
A power supply transmission system was designed, which includes a silicon rectifier stack high-voltage power supply, a high-voltage lead transmission device, a generator power supply device, an ion source device, and an accelerator tube. Generators, motors, insulating shafts, and voltage stabilizers are used to achieve isolated power supply under a high potential difference of up to 2.5MV. Each device is placed in a discrete cavity in a sealed container, achieving compact installation and stable power supply.
The stable operation of the ion source equipment on the 2.5MV silicon rectifier stack high-voltage platform is achieved, the risk of equipment sparking and breakdown is reduced, a compact structure and low-cost power supply solution are provided, and the operation requirements of the ion source equipment are met.
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Figure CN119729989B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of accelerators, and in particular to an accelerator ion source power supply transmission system of a 2.5MV silicon rectifier stack high-voltage platform. Background Art
[0002] Accelerators that accelerate protons and strike targets to produce high-yield neutrons have widespread application in areas such as detection, medical imaging, cancer treatment, and radionuclide preparation. The 2.5 MV high voltage required by electrostatic accelerators can be achieved by converting high-frequency AC to high-voltage DC using a rectifier silicon stack. The ion source operates on the accelerator's high-voltage platform. To ensure compact installation, the high-voltage output of the horizontal silicon rectifier stack is connected to the top of the vertical accelerator tube, where the ion source is mounted. Charged particles generated by the ion source enter the accelerator tube under the influence of the extraction electrode electric field and receive acceleration energy. To ensure the proper operation of the ion source components at the top of the accelerator tube, the 2.5 MV DC high voltage output from the rectifier silicon stack serves as the ground potential. Therefore, the ion source components require a power supply system capable of operating on the high-voltage platform. This power supply system must withstand the 2.5 MV high-voltage isolation. Therefore, an electric motor drives an insulated shaft to transmit energy to a generator, which, through a voltage regulator and isolation transformer, provides the required voltage and power output to the ion source components. There is no complete ion source and accelerator power supply transmission system in the existing technology that can provide stable isolated power supply for ion source equipment running on a 2.5MV silicon rectifier stack high-voltage platform. Summary of the Invention
[0003] The main purpose of the present invention is to provide an accelerator ion source power supply system, and the ion source can stably operate on a 2.5MV silicon rectifier stack high-voltage platform.
[0004] The present invention provides the following technical solutions: an accelerator ion source power supply and transmission system for a 2.5MV silicon rectifier stack high-voltage platform, comprising a silicon rectifier stack high-voltage power supply, a high-voltage lead transmission device, a generator power supply device, an ion source device, an accelerating tube, and a target material;
[0005] The silicon rectifier stack high-voltage power supply includes a rectifier silicon stack, a silicon stack anode terminal, and a silicon stack cathode terminal;
[0006] The high-voltage lead transmission device includes a silicon stack cathode lead column and a high-voltage lead column;
[0007] The generator power supply device includes a generator, a stainless steel cover of the generator, a voltage stabilizer, an isolation transformer, an insulating shaft, a lead-out DC power supply, a suppressor DC power supply, and a motor;
[0008] The ion source device includes an ion source stainless steel cover, a radio frequency power supply, a matcher, and an extraction electrode.
[0009] The present invention has the following beneficial effects:
[0010] The present invention is an accelerator ion source device, and proposes a power supply transmission system with a compact installation structure. The ion source device and a 2.5MV silicon rectifier stack high-voltage power supply are installed inside a sealed container filled with sulfur hexafluoride insulating gas. This can increase the critical breakdown voltage between the various components of the accelerator relative to the atmospheric environment, reduce the risk of equipment ignition and breakdown, and thus provide environmental conditions for the compact structure of the accelerator system as a whole. The ion source device is encapsulated inside the sealed container and uses a generator power supply device that is also installed inside the sealed container. It combines the requirements of isolated power supply for the ion source device and compactness, realizing a horizontal silicon rectifier stack, a vertical generator power supply device, and an overall three-cavity square-shaped integrated installation structure of a vertical ion source and an accelerating tube.
[0011] Furthermore, the ion source power supply transmission system proposed in the present invention adopts a generator, an electric motor, an insulating shaft, and a voltage stabilizer device to achieve isolated power supply under a high potential difference of up to 2.5MV. It has the advantages of relatively simple design structure, convenient debugging and maintenance, and low cost. The power supply power is not less than 3kW, which can meet the power supply requirements of the ion source equipment using inductively coupled plasma generation technology.
[0012] The silicon stack cathode lead and high-voltage lead posts utilize a coaxial core wire mounting structure, transmitting a 2.5 MV high-voltage potential to the downstream stage and providing DC high voltage for accelerating the charged particles generated by the ion source. The extraction-stage DC power supply, suppression-stage DC power supply, and isolation transformer are housed on the generator platform in the center chamber of the sealed vessel. The RF power supply, matching element, and ion source electrode equipment are housed on the ion source platform in the side chamber of the sealed vessel. Power transmission lines passing through the thin-walled hollow high-voltage lead posts provide the required power or potential to the ion source platform. The placement of these devices in separate chambers within the sealed vessel significantly reduces the space and structural load requirements of the high-voltage platforms within the overall accelerator system. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.
[0014] Figure 1 This is a longitudinal cross-sectional view of the accelerator ion source power supply and transmission system for the 2.5MV silicon rectifier stack high-voltage platform;
[0015] Figure 2A longitudinal sectional view of the generator power supply device;
[0016] Figure 3 It is a longitudinal cross-sectional view of the ion source device and the accelerating tube;
[0017] Figure 4 It is a radial cross-sectional view of the high voltage lead column;
[0018] Figure 5 This is a diagram of the working mode of the accelerator ion source power supply and transmission system of the 2.5MV silicon rectifier stack high-voltage platform.
[0019] Description of Figure Numbers:
[0020] DETAILED DESCRIPTION
[0021] The technical solutions in the embodiments of the present invention will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present invention.
[0022] It should be noted that all directional indications in the embodiments of the present invention are only used to explain the relative position relationship and movement status of various components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.
[0023] In the present invention, unless otherwise specified or limited, the terms "connection" and "fixation" should be understood in a broad sense. For example, "fixation" can mean fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two elements or interaction between two elements, unless otherwise specified. Those skilled in the art will be able to understand the specific meanings of the above terms in the present invention based on specific circumstances.
[0024] In addition, the technical solutions between the various embodiments of the present invention can be combined with each other, but it must be based on the fact that ordinary technicians in this field can implement it. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.
[0025] Finally, it should be noted that the embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the scope of protection of the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the essence and scope of the technical solutions of the present invention.
[0026] like Figure 1-5As shown, the accelerator ion source power supply transmission system of the 2.5MV silicon rectifier stack high-voltage platform of the present invention includes a silicon rectifier stack high-voltage power supply, a high-voltage lead transmission device, a generator power supply device 9, an ion source device 10, an accelerating tube 6, and a target material 7;
[0027] The silicon rectifier stack high voltage power supply includes a rectifier silicon stack 2, a silicon stack anode terminal 1, and a silicon stack cathode terminal 3;
[0028] The high-voltage lead transmission device includes a silicon stack cathode lead column 4 and a high-voltage lead column 5;
[0029] The generator power supply device 9 includes a generator 16, a generator stainless steel cover 11, a voltage stabilizer 12, an isolation transformer 14, an insulating shaft 17, an output DC power supply 13, a suppressor DC power supply 15, and a motor 18;
[0030] The ion source device 10 includes an ion source stainless steel cover 20 , a radio frequency power supply 19 , a matching device 21 , and an extraction electrode 22 .
[0031] The main purpose of the present invention is to provide an accelerator ion source power supply system, and the ion source can stably operate on a 2.5MV silicon rectifier stack high-voltage platform.
[0032] The motor 18 is installed and fixed at the bottom position of the middle cylinder of the sealed container 8; the rotating shaft of the motor 16 is coaxially connected to the insulating rotating shaft 17, and extends to the rotating shaft of the generator 16; the generator 16 is supported by an insulating panel, and the outer casing of the generator 16 is connected to the silicon stack cathode lead column 4 and the high-voltage lead column 5 respectively through the generator stainless steel cover 11; the output end of the generator 16 is connected to the input end of the voltage regulator 12; the output end of the voltage regulator 12 is respectively connected to the lead-out DC power supply 13, the suppression DC power supply 15 and the input end of the isolation transformer 14; the ground end of the voltage regulator 12 is connected to the generator stainless steel cover 11; the high-voltage output end of the lead-out DC power supply 13 is connected to the lead-out power supply high-voltage transmission line 26; the high-voltage output end of the suppression DC power supply 15 is connected to the suppression power supply high-voltage transmission line 26.
[0033] The high-voltage lead column 5 described in the present invention includes an isolation transformer output neutral wire 24, an isolation transformer output live wire 25, an output power supply high-voltage transmission line 26, and a suppression power supply high-voltage transmission line 27; the high-voltage lead column 5 is an aluminum conductive column with a thin wall and a hollow center; both ends of the high-voltage lead column 5 have holes for the power supply transmission line to pass through; the isolation transformer output neutral wire 24, the isolation transformer output live wire 25, the output power supply high-voltage transmission line 26, and the suppression power supply high-voltage transmission line 27 pass through the holes at both ends of the high-voltage lead column 5, thereby realizing a conductive transmission connection to the devices at both ends of the high-voltage lead column 5.
[0034] The ion source device 10 of the present invention includes a radio frequency power supply 19, an ion source stainless steel cover 20, a matching box 21, an extraction electrode 22, and a suppression electrode 23. The output end of the radio frequency power supply 19 is connected to the input end of the matching box 21. The extraction electrode 22 is connected to the extraction power supply high-voltage transmission line 26 and the housing of the radio frequency power supply 19 by a metal wire. The suppression electrode 23 is connected to the suppression power supply high-voltage transmission line 26 by a metal wire. The radio frequency power supply 19, the ion source stainless steel cover 20, the matching box 21, the extraction electrode 22, and the suppression electrode 23 are supported by an accelerating tube 6 and an insulating panel. The sealed container 8 is filled with sulfur hexafluoride insulating gas with a pressure of not less than 0.65 MPa. The silicon stack anode terminal 1 is connected to an external high-frequency high-voltage power supply, and after being rectified by a rectifier silicon stack by double voltage, a maximum high-voltage direct current of 2.5 MV is output at the silicon stack cathode terminal 3. The input end of the rectifier silicon stack 2 is the silicon stack anode terminal 3, which is connected to a high-voltage transmission line that feeds into the sealed container and receives a high-frequency high-voltage input of up to 200 kV (120 kHz).
[0035] The motor 18 is connected to the generator 16 through the insulating shaft 17, and the power output by the generator 16 is transmitted to the generator 16 through mechanical transmission. The insulating shaft 17 provides 2.5MV insulation between the generator 16 and the equipment connected to the rear end and the ground. The 2.5MV high-voltage DC output from the cathode terminal 3 of the silicon stack provides a working potential for the generator 16 through the cathode lead column 4 of the silicon stack. At this time, the ground potential of the equipment connected to the voltage regulator 12 and the output DC power supply 13, the suppressor DC power supply 15, and the isolation transformer 14 at the output end of the generator 16 is the MV-level high-voltage potential output by the rectifier silicon stack 2. The output end of the voltage regulator 12 is connected to the emitter through the isolation transformer 14. The RF power supply 19 and the matcher 21 provide power supply; the outer shell of the RF power supply 19 is connected to the extraction electrode 22 through a metal wire; the output end of the matcher 21 is connected to the metal wire wrapped around the outer wall of the hollow cylindrical glass tube in the middle, and the gas entering the glass tube can be ionized through high-frequency output; the extraction electrode DC power supply 13 is connected to the extraction electrode 22 through a metal wire, and provides an extraction potential for the extraction electrode 22; the suppression electrode DC power supply 15 is connected to the suppression electrode 23 through a metal wire, and provides a suppression potential for the suppression electrode 23; the charged particles enter the accelerator tube 6 under the action of the extraction potential and the suppression potential, and are accelerated by the 2.5MV electric field, and finally bombard the target material 7.
[0036] More specifically, by Figure 1-Figure 3It can be seen that the sealed container 8 of the embodiment of the present invention is a square-shaped structure, and the entire sealed container 8 can be divided into three cavities. The first cavity is a horizontal structure, and a silicon rectifier stack high-voltage power supply is arranged inside. The silicon rectifier stack high-voltage power supply includes a silicon stack anode terminal 1, a rectifier silicon stack 2 and a silicon stack cathode terminal 3; the second cavity is a vertical structure, and a generator power supply device 9 is arranged inside. The generator power supply device 9 includes a generator 16, a generator stainless steel cover 11, a voltage stabilizer 12, an isolation transformer 14, an insulating shaft 17, an extraction pole DC power supply 13, a suppression pole DC power supply 15, and a motor 18; the third cavity is also a vertical structure, and an ion source device and an accelerator tube 6 are arranged inside.
[0037] The silicon rectifier stack high-voltage power supply described in this example uses symmetrical voltage doubling technology and consists of two cascade voltage doubling circuits. The secondary side of the internal transformer is a double winding, so it can effectively reduce ripple and prevent excessive voltage drops. The silicon stack anode terminal 1 is connected to a high-frequency voltage of 120kHz / 200kV, and can output a maximum DC parameter of 2.5MV / 20mA at the silicon stack cathode terminal 3.
[0038] In this example, the 2.5 MV high voltage output from the rectifier silicon stack 2 is connected to a groove on one end of the outer surface of the generator stainless steel cover 11 through the silicon stack cathode lead post 4, so that the generator stainless steel cover 11 obtains the same potential as the output of the rectifier silicon stack 2. The other end of the outer surface of the generator stainless steel cover 11 is connected to the ion source stainless steel cover 20 through an aluminum high-voltage lead post 5, which is embedded in the surface groove to achieve mutual connection, and transmit the 2.5 MV high voltage potential to the ion source stainless steel cover 20.
[0039] In this embodiment, the ion source device 10 adopts inductively coupled plasma generation technology, which utilizes the high-frequency discharge of gas entering the hollow glass tube to ionize the gas and generate plasma.
[0040] Specifically, in this embodiment, a radio frequency power supply 19 with a rated output power of 300W and a frequency of 13.56MHz is used. The metal wire wound around the hollow glass tube via the matcher 21 outputs high-frequency power, which can enable the ion source device 10 to generate plasma and maintain stability.
[0041] The ion source device 10 is installed and fixed inside the ion source stainless steel cover 20. The bottom of the ion source stainless steel cover 20 is fixed to the flange at the top inlet of the accelerating tube 6 by bolts, so that a high voltage of 2.5MV is applied to the flange at the top inlet of the accelerating tube 6. The charged protons drawn out by the ion source device 10 enter the accelerating tube 6 and are accelerated by the DC high-voltage electrostatic field, bombarding the target material 7 installed at the bottom of the accelerating tube 6 vertically downward.
[0042] Depend on Figure 1-3It can be seen that the power supply of the ion source device 10 described in this example is provided by the generator power supply device 9. Since the working platform of the ion source device 10 is at a high voltage potential of 2.5MV, the RF power supply 19, the extraction stage DC power supply 13, and the suppression stage DC power supply 15 require industrial frequency 220V power supply.
[0043] Specifically, the generator power supply device 9 in this example uses an external 220V industrial frequency power supply, and its motor 18 is installed at the bottom of the second cavity in the middle of the sealed container 8. The motor 18 is installed vertically, with the rotating shaft upright. It is coaxially fixed and linked to the rotating shaft of the generator 16 via a 2.5-meter-long insulating shaft 17. When the device is in operation, the movement of the motor 18 at the bottom drives the insulating shaft 17 to rotate, which in turn drives the generator 16 to operate and generate electricity. Because the voltage generated by the operation of the generator 16 is not stable, a voltage regulator 12 is connected to the output end of the generator 16. After voltage stabilization, it is output to the downstream equipment, thereby realizing isolated power supply for the high-voltage platform of the silicon rectifier stack. The maximum power output of the generator 16 during stable operation is not less than 3kW.
[0044] The power frequency output of the voltage regulator 12 in this example can power the output-stage DC power supply 13 and the suppression-stage DC power supply 15. The output terminals of the output-stage DC power supply 13 and the suppression-stage DC power supply 15 are connected to the output-power high-voltage transmission line 26 and the suppression-power high-voltage transmission line 27, respectively. Furthermore, the output terminal of the voltage regulator 12 is connected to the isolation transformer 14 via a cable. Through the isolation transformer output neutral line 24 and the isolation transformer output live line 25, the output terminal of the voltage regulator 12 continues to provide power frequency 220V AC power to downstream devices.
[0045] In this example, the insulating shaft 17 is made of composite insulating material and can withstand motor startup and a long-term operating speed of 1400r / min. Both ends need to be able to withstand a DC voltage of not less than 2.5MV in a sulfur hexafluoride gas environment of not less than 0.65Mpa without breakdown flashover.
[0046] It needs to be further explained that in this example, two insulating support panels with a thickness of not less than 2 cm are installed in the middle cavity of the sealed container 8. They are vertically installed and fixed. On the one hand, they play a supporting role for the stainless steel cover on the top of the generator power supply device and the internal equipment. On the other hand, the insulating rotating shaft 17 can obtain a certain limiting alignment effect from the horizontal support fixing device arranged between the insulating support panels.
[0047] Depend on Figure 3 , Figure 4It can be seen that in this example, the radio frequency power supply 19 of the ion source device 10 obtains a power frequency 220V power supply through the isolation transformer output neutral line 24 and the isolation transformer output live line 25. The extraction power high-voltage transmission line 26 is connected to the extraction electrode 22, and provides the extraction electrode 22 with a positive high-voltage potential output by the extraction electrode DC power supply 13. The extraction electrode 22 is installed near the hollow glass tube outlet of the ion source device 10, and can extract the positively charged particles of the ionized plasma. The suppression power high-voltage transmission line 27 is connected to the suppression electrode 23, and provides the suppression electrode 23 with a negative high-voltage potential output by the suppression electrode DC power supply 15. The suppression electrode 23 is installed at the lower part of the particle beam outlet of the extraction electrode 22, which can play a role in suppressing the reverse electron bombardment of the extraction electrode 22 caused by the secondary collision of the charged particles.
[0048] In this example, the accelerating tube 6 is installed inside the third cavity on the side of the sealed container 8. The bottom of the accelerating tube 6 is fixed to the cavity base of the sealed container 8 by a flange and bolts, and the top is connected to the ion source stainless steel cover 20 by metal to obtain the 2.5MV high-voltage DC potential output by the silicon rectifier stack high-voltage power supply. Therefore, the accelerating tube 6 has a 2.5MV DC high-voltage electrostatic field from top to bottom. The positively charged particles generated by the ion source device 10 enter the top of the accelerating tube 6, are accelerated by the DC high-voltage electrostatic field, and bombard the target material 7 installed at the bottom of the accelerating tube 6. Different neutron yields can be obtained according to different experimental conditions such as the beam intensity extracted by the ion source device 10, the target material, and the acceleration energy.
[0049] It should be further explained that in this example, the bottom of the accelerating tube 6 is equipped with a molecular pump and a pre-stage mechanical pump, which require continuous vacuum pumping during the experiment. The vacuum level at the bottom of the accelerating tube 6 is required to be less than 5.0E-5 Pa. The top of the accelerating tube 6 is fixedly connected to the ion source device 10 via a flange, ensuring a tight seal to prevent the high-pressure sulfur hexafluoride gas in the sealed container 8 from leaking into the accelerating tube.
[0050] like Figure 4 As shown, in this example, a hollow aluminum cylinder with a thin wall in the middle is used as the high-voltage lead column 5. On the one hand, its function is to connect the generator power supply device 9 and the stainless steel cover of the ion source device 10, and provide a 2.5MV high-voltage working potential. On the other hand, its internal hollow design enables the lead-out power supply high-voltage transmission line 26, the suppression power supply high-voltage transmission line 27, the isolation transformer output neutral line 24 and the isolation transformer output live line 25 to pass through the inner center of the high-voltage lead column 5, which greatly increases the space utilization and reduces the spatial capacitance interference between the transmission cables, provides industrial frequency power supply for the cable-connected ion source device 10, and provides lead-out potential and suppression potential for the lead-out electrode 22 and the suppression electrode 23.
[0051] like Figure 5The working principle of the accelerator ion source power transmission system of the 2.5 MV silicon rectifier stack high voltage platform is shown in the figure, wherein the voltage stabilizer 12, the generator 16, the extraction electrode DC power supply 13, the suppression electrode DC power supply 15, and the ground cable of the barrier transformer 14 are connected with the output end of the rectifier silicon stack and work at a 2.5 MV DC high voltage potential platform. The radio frequency power supply 19 and the matcher 21 are powered through the isolation transformer 14. The charged particle motion path sequentially passes through the extraction electrode 22 and the suppression electrode 23 downwards, and enters the top entrance of the acceleration tube which is at the same potential as the output end of the rectifier silicon stack 2, and is accelerated by the electrostatic field to bombard the target material 7 downwards. The acceleration tube 6 is installed by welding a plurality of ceramic rings in series, and a plurality of voltage division resistors are uniformly connected in series on the outer electrode sheet of each ceramic ring of the acceleration tube. The top end of the voltage division resistor is connected with the output end of the rectifier silicon stack through the top entrance flange of the acceleration tube, and the bottom end of the voltage division resistor is connected with the inner cavity metal base of the sealed container 8.
Claims
1. A 2.5MV silicon rectifier stack high voltage platform accelerator ion source power supply transmission system, characterized by: Including silicon rectifier stack high-voltage power supply, high-voltage lead transmission device, generator power supply device, ion source device, acceleration tube, and target material; The silicon rectifier stack high-voltage power supply includes a rectifier silicon stack, a silicon stack anode terminal, and a silicon stack cathode terminal; The high-voltage lead transmission device includes a silicon stack cathode lead column and a high-voltage lead column; The generator power supply device includes a generator, a stainless steel cover of the generator, a voltage stabilizer, an isolation transformer, an insulating shaft, a lead-out DC power supply, a suppressor DC power supply, and a motor; The ion source device includes an ion source stainless steel cover, a radio frequency power supply, a matching device, and an extraction electrode; The silicon rectifier stack high-voltage power supply is a horizontal structure, the generator power supply device is a vertical installation structure, and the generator power supply device is located in the middle of the silicon rectifier stack high-voltage power supply and the ion source device. The two ends of the silicon stack cathode lead column are respectively connected to the silicon stack cathode terminal and the outside of the generator stainless steel cover. The two ends of the high-voltage lead column are respectively overlapped and installed on the outside of the generator stainless steel cover and the ion source stainless steel cover. The ion source device and the ion source and the acceleration tube adopt a vertical installation structure.
2. The accelerator ion source power supply transmission system for the 2.5MV silicon rectifier stack high-voltage platform according to claim 1, characterized in that: The silicon rectifier stack high-voltage power supply, high-voltage lead transmission device, generator power supply device, ion source device, acceleration tube and target material are installed inside a sealed container, and the sealed container is filled with sulfur hexafluoride insulating gas at a pressure of not less than 0.65Mpa.
3. The accelerator ion source power supply transmission system for the 2.5MV silicon rectifier stack high voltage platform according to claim 1, characterized in that: The rectifier silicon stack adopts a cascade voltage-doubling rectifier circuit, which rectifies the 120kHz / 200kV high-frequency AC input input to the anode terminal of the silicon stack and outputs 2.5MV DC from the cathode terminal of the silicon stack through voltage doubling.
4. The accelerator ion source power supply transmission system for the 2.5MV silicon rectifier stack high voltage platform according to claim 1, characterized in that: The high-voltage lead column is an aluminum rod-shaped hollow cylinder.
5. The accelerator ion source power supply transmission system for the 2.5MV silicon rectifier stack high voltage platform as claimed in claim 1, characterized in that: The ion source device adopts inductively coupled plasma generation technology and introduces charged particles into an accelerating tube for acceleration.
6. The accelerator ion source power supply transmission system for the 2.5MV silicon rectifier stack high voltage platform according to claim 1, characterized in that: The generator, voltage stabilizer, isolation transformer, lead-out DC power supply, and suppressor DC power supply are installed inside the generator stainless steel cover through a supporting structure.
7. The accelerator ion source power supply transmission system for the 2.5MV silicon rectifier stack high voltage platform according to claim 1, characterized in that: The radio frequency power supply and the matcher are installed inside the stainless steel cover of the ion source through a supporting structure.
8. The accelerator ion source power supply transmission system for the 2.5MV silicon rectifier stack high voltage platform according to claim 1, characterized in that: The generator stainless steel cover is placed at a 2.5MV DC high voltage potential output by the silicon rectifier stack high voltage power supply.
9. The accelerator ion source power supply transmission system for the 2.5MV silicon rectifier stack high voltage platform according to claim 1, characterized in that: The ion source stainless steel cover is placed at a 2.5 MV DC high voltage potential output by the silicon rectifier stack high voltage power supply.
10. The accelerator ion source power supply transmission system for the 2.5MV silicon rectifier stack high voltage platform according to claim 1, characterized in that: The generator power supply device is provided with an electric motor at the bottom and a generator at the top. The rotating shafts of the electric motor and the generator are connected by an insulating rotating shaft to achieve rotational cooperation.
11. The accelerator ion source power supply transmission system for the 2.5MV silicon rectifier stack high voltage platform according to claim 10, characterized in that: The insulating shaft needs to withstand a maximum DC withstand voltage of 2.5 MV at both ends during operation.
12. The accelerator ion source power supply transmission system for the 2.5MV silicon rectifier stack high voltage platform according to claim 10, characterized in that: The power output of the generator during operation is not less than 3kW.
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