A probe hot and cold stage and a probe adjustment method thereof

Abstract

The present invention discloses a probe thermal stage and a probe adjustment method thereof. The probe thermal stage includes a base, an end cover and a probe. A sample stage is provided in the middle of the test cavity of the base. The probe is installed on the probe stage of the test cavity and one end of the probe points to the sample stage. The end cover is detachably connected to the upper end of the base through a sealing strip. The probe thermal stage further includes a positioning assembly connected between the probe and the probe stage. The positioning assembly includes a counterweight ball, an outer positioning spherical shell and an inner positioning spherical shell. The outside of the outer positioning spherical shell is fixed on the probe stage, and the inner surface of the outer positioning spherical shell is provided with first resistance columns. The inner positioning spherical shell is rotationally connected to the inside of the outer positioning spherical shell through a longitudinal rotating shaft. The present invention cancels the transmission structure between the existing external manipulator and the base, and uses the magnetic force between the transverse permanent magnet and the longitudinal permanent magnet and the external electromagnetic controller to transmit torque through the base, solving the problem of reduced airtightness caused by the increase of transmission clearance due to the increase of service time or the increase of the number of uses.

Description

Technical Field

[0001] The present invention belongs to the field of hot and cold stages, and specifically, relates to a probe hot and cold stage and a probe adjustment method thereof. Background Art

[0002] A probe hot and cold stage is a product designed for variable-temperature electrical testing during material research, and can characterize the characteristics of the electrical properties of materials changing with temperature during the heating and cooling stages of materials. The fields applicable to the probe hot and cold stage mainly include the semiconductor industry (for testing the electrical properties of semiconductor chips, devices, etc. at different temperatures), the field of materials science research (such as the superconducting transition temperature of metal materials, the dielectric properties of ceramic materials, etc.), the optoelectronic field (such as studying the photoelectric conversion efficiency of solar cells at different temperatures, the change of the light-emitting characteristics of light-emitting diodes with temperature, etc.), etc. In addition, the probe hot and cold stage extends to biomedicine, for example, studying the structural changes of viruses at low temperatures, the electrical responses of biochips at different temperatures. For example, in cell electrophysiology research, by precisely controlling the temperature, the changes in the electrical characteristics of cells at different temperatures are studied. It can also simulate the temperature environment of unconventional cells such as diseased cells and cancer cells in physiological and pathological states, observe the morphological, structural and functional changes of cells, or their responses under cryopreservation or heat stress, as well as the effects of temperature on the metabolism, proliferation, differentiation and apoptosis of unconventional cells.

[0003] The existing structure of the probe hot and cold stage mainly includes a main body made of stainless steel (a detachable base and end cover), a sample stage, a probe system, a temperature control system, a manipulator, etc. Among them, the sample stage is located in the middle on top of the base, and it has good flatness and thermal uniformity to ensure that the samples placed on the sample stage have a uniform temperature distribution during the test. The temperature control system includes a temperature sensor and a temperature controller. The temperature sensor is fixed inside the base, and the temperature controller is an external device and is electrically connected to the terminal of the base through a wire. The temperature sensor monitors the temperature of the sample stage in real time and feeds the temperature signal back to the temperature controller. Usually, standard PID temperature control + self-tuning and other control methods are adopted, and the temperature resolution can reach 0.1°C. The probe system is associated with the manipulator. The probe system includes a probe, a probe arm and a probe base. The probe is generally made of materials such as tungsten needles and has high hardness and conductivity. The probe arm is installed on the base through the probe base and is adjacent to the sample stage. The probe arm is connected to an external manipulator, and the precise movement of the probe in a specified direction is realized through the manipulator. Among them, most of the external manipulators use slide rail components, lead screw components, etc. to achieve transmission connection, but at the same time, considering the sealing performance, some auxiliary components are also required. For example, bellows are used to maintain the sealing of the test chamber.

[0004] The common problems existing in current probe hot and cold stages include temperature uniformity issues, test space limitations, airtightness failures, etc. Among them, airtightness failure is closely related to the external manipulator. The base circuit part is completely sealed with sealant, while the vacuum control pipe connection and the atmosphere control pipe connection of the base are sealed with sealing rings. Since the circuit part and the pipe connection part are fixed and there is no gap at the connection, the possibility of air leakage is extremely small. However, the external manipulator needs to maintain a transmission relationship with the probe arm, and the external manipulator cannot be fixedly connected to the base. As the usage time or frequency increases, the moving gap between the manipulator and the base increases, which is one of the main reasons for the airtightness failure of the probe hot and cold stage. Since the biomedical field has extremely high requirements for the isolation (airtightness) of the probe hot and cold stage, such as the research on the activity of infectious viruses in hot and cold environments, the research on the metabolic proliferation of diseased cells, etc., if the probe hot and cold stage has an airtightness failure fault, the leakage of samples poses a threat to the researchers in the research room. Therefore, there is a need for a probe control structure and a probe adjustment method with higher safety, better airtightness, and capable of replacing the existing manipulator. Summary of the Invention

[0005] In view of the deficiencies of the prior art, the present invention provides a probe hot and cold stage, comprising a base, an end cover and a probe; a sample stage is provided in the middle of the test cavity of the base, the probe is installed on the probe stage of the test cavity and one end of the probe points to the sample stage; the end cover is detachably connected to the upper end of the base through a sealing strip, thereby sealing the test cavity; further comprising a positioning assembly connected between the probe and the probe stage, the positioning assembly comprising a counterweight ball, an outer positioning spherical shell and an inner positioning spherical shell; the outside of the outer positioning spherical shell is fixed on the probe stage, and a first resistance column is provided on the inner surface of the outer positioning spherical shell; the inner positioning spherical shell is rotatably connected to the inside of the outer positioning spherical shell through a longitudinal rotating shaft, and a row of first damping needles are provided on the outer surface of the inner positioning spherical shell, which are equally spaced along the circumferential direction of the inner positioning spherical shell and increase in length in sequence; the first resistance column and all the first damping needles are parallel to the horizontal plane; the counterweight ball is rotatably connected to the inside of the inner positioning spherical shell through a transverse rotating shaft, and a row of second damping needles are provided on the inner surface of the counterweight ball, which are equally spaced along the circumferential direction of the counterweight ball and increase in length in sequence; a second resistance column is provided outside the inner positioning spherical shell, and the second resistance column and all the second damping needles are parallel to the vertical plane; further comprising a transverse permanent magnet and a longitudinal permanent magnet, the other end of the probe penetrates through the upper part of the counterweight ball and is respectively hinged to the transverse permanent magnet and the longitudinal permanent magnet; further comprising an external electromagnetic controller located outside the base, the external electromagnetic controller is respectively opposite to both ends of the transverse permanent magnet and both ends of the longitudinal permanent magnet one by one, by magnetically attracting one end of the transverse permanent magnet through the external electromagnetic controller, thereby enabling the probe to swing in the horizontal plane and controlling the swing angle of the probe in the plane by the friction between the first damping needle and the first resistance column; or by magnetically attracting one end of the longitudinal permanent magnet through the external electromagnetic controller, thereby enabling the probe to swing in the vertical plane and controlling the swing angle of the probe in the vertical plane by the friction between the second damping needle and the second resistance column.

[0006] The beneficial effects of a probe hot and cold stage in the present invention are as follows:

[0007] 1. The transmission structure between the existing external manipulator and the base is cancelled, and the magnetic force between the transverse permanent magnet and the longitudinal permanent magnet and the external electromagnetic controller is used to transmit the torque across the base, that is, the probe is driven to swing by magnetic force in the air, and there is no direct connection structure between the base and the external electromagnetic controller, completely solving the problem of reduced airtightness caused by the increase of transmission clearance with the increase of use time or the number of uses.

[0008] 2. The counterweight ball of the positioning component and the inner positioning ball shell achieve precise longitudinal positioning of the probe through the second resistance columns and all the second damping needles. The outer positioning ball shell and the inner positioning ball shell of the positioning component achieve precise lateral positioning of the probe through the first resistance columns and all the first damping needles. The angles between every two adjacent first damping needles and the angles between every two adjacent second damping needles can both be set according to the actual situation. For example, if the angle between every two adjacent first damping needles is 1°, then the unit swing angle of the probe in the horizontal plane is correspondingly 1°. If the angle between every two adjacent second damping needles is 1°, then the unit swing angle of the probe in the vertical plane is correspondingly 1°.

[0009] 3. The external electromagnetic controller is adjusted to an angle in an electric control manner and can cooperate with the online control system to achieve remote adjustment. Researchers can be outside the research room. Compared with the manual adjustment method in the research room, it can completely avoid the safety hazards caused by leakage.

[0010] The preferred solution in the present invention is that: both the first resistance column and the second resistance column are provided with U-shaped grooves, and wear-resistant layers are provided in the U-shaped grooves. By passing the first damping needles or the second damping needles with different lengths through the corresponding U-shaped grooves and rubbing against the wear-resistant layers, the swing angle of the probe is controlled. The frictional resistance between the unit length of each first damping needle and each second damping needle and the wear-resistant layer is the same. The wear-resistant layer specifies the number of friction times. After reaching the number of friction times, the wear-resistant layer can be replaced. The numerical change of the frictional resistance per unit length is within the allowable error range.

[0011] The preferred solution in the present invention is that: resistance pads are provided between the counterweight ball and the inner positioning ball shell and between the outer positioning ball shell and the inner positioning ball shell. The frictional resistance of the resistance pads is used to balance the self-rotation torque of the probe on the positioning component. In order to prevent the probe from swinging when not controlled by the external electromagnetic controller, the resistances of the two resistance pads just balance the self-rotation torques of the probe in the longitudinal and lateral directions, thereby reducing the output torque of the external electromagnetic controller, that is, reducing the load of the external electromagnetic controller.

[0012] The preferred solution in the present invention is as follows: Regarding the specific control method of the probe in the vertical direction, magnetic poles are respectively provided at both ends of the longitudinal permanent magnet. The middle part of the longitudinal permanent magnet is slidably connected to the end of the probe through a first telescopic rod, and the middle part of the longitudinal permanent magnet is hingedly connected to the first telescopic rod. The external electromagnetic controller includes a longitudinal upper electromagnet and a longitudinal rocker arm motor located above the end cover. The magnetic pole of the longitudinal upper electromagnet is opposite to the magnetic pole at the upper end of the longitudinal permanent magnet, and the longitudinal upper electromagnet is fixedly connected to the rocker arm of the longitudinal rocker arm motor. The longitudinal rocker arm motor drives the longitudinal upper electromagnet to swing synchronously with the probe in the vertical plane, so as to keep the magnetic pole of the longitudinal upper electromagnet always opposite to the magnetic pole at the upper end of the longitudinal permanent magnet. It includes a longitudinal lower electromagnet and another longitudinal rocker arm motor located below the base. The magnetic pole of the longitudinal lower electromagnet is opposite to the magnetic pole at the lower end of the longitudinal permanent magnet, and the longitudinal lower electromagnet is fixedly connected to the rocker arm of the corresponding longitudinal rocker arm motor. The corresponding longitudinal rocker arm motor drives the longitudinal lower electromagnet to swing synchronously with the probe in the vertical plane, so as to keep the magnetic pole of the longitudinal lower electromagnet always opposite to the magnetic pole at the lower end of the longitudinal permanent magnet.

[0013] Similarly, regarding the specific control method of the probe in the horizontal direction, magnetic poles are respectively provided at both ends of the transverse permanent magnet. The middle part of the transverse permanent magnet is slidably connected to the end of the first telescopic rod through a second telescopic rod, and the middle part of the transverse permanent magnet is hingedly connected to the second telescopic rod. The external electromagnetic controller includes a left electromagnet and a left rocker arm motor located on the left side of the base. The magnetic pole of the left electromagnet is opposite to the magnetic pole at the left end of the transverse permanent magnet, and the left electromagnet is fixedly connected to the rocker arm of the left rocker arm motor. The left rocker arm motor drives the left electromagnet to swing synchronously with the probe in the horizontal plane, so as to keep the magnetic pole of the left electromagnet always opposite to the magnetic pole at the left end of the transverse permanent magnet. It includes a right electromagnet and a right rocker arm motor located on the right side of the base. The magnetic pole of the right electromagnet is opposite to the magnetic pole at the right end of the transverse permanent magnet, and the right electromagnet is fixedly connected to the rocker arm of the right rocker arm motor. The right rocker arm motor drives the right electromagnet to swing synchronously with the probe in the horizontal plane, so as to keep the magnetic pole of the right electromagnet always opposite to the magnetic pole at the right end of the transverse permanent magnet.

[0014] The preferred solution in the present invention is as follows: Notches for the swing of the first damping needle are provided on both the outer surface of the counterweight ball and the inner surface of the inner positioning spherical shell, and notches for the swing of the second damping needle are provided on both the outer surface of the inner positioning spherical shell and the inner surface of the outer positioning spherical shell. The first damping needle will not collide when swinging with the inner positioning spherical shell, and the second damping needle will not collide when swinging with the counterweight ball. All the first damping needles only rub against the first resistance column, and all the second damping needles only rub against the second resistance column.

[0015] The preferred solution in the present invention is that any one of the first damping needles is longer or shorter than an adjacent first damping needle by L, and any one of the second damping needles is longer or shorter than an adjacent second damping needle by L. The lengths of all the first damping needles increase in sequence, and the increased lengths are all equal. From the shortest first damping needle to the longest first damping needle, the frictional resistance it receives from the first resistance column also increases equally, which is convenient for the external electromagnetic controller to adjust the corresponding electromagnetic force. For example, if the force required for the shortest first damping needle to pass through the first resistance column is f, then the force required for the adjacent first damping needle to pass through the first resistance column is 2f, and so on. The force required for the Nth first damping needle to pass through the first resistance column is Nf. The magnitude of the output magnetic force of the external electromagnetic controller can be adjusted. After the output magnetic force passes through the base, it is F. If 2f > F > f, then the second shortest first damping needle cannot pass through the first resistance column, that is, the second shortest first damping needle will get stuck in the first resistance column, thus realizing the positioning control of the probe in the horizontal direction. The positioning control of the probe in the vertical direction is achieved through the second damping needle and the second resistance column, and the control method is the same as that of the positioning control in the horizontal direction.

[0016] The present invention also provides a method for adjusting the probe of a probe hot and cold stage. Based on the above-mentioned probe hot and cold stage, the external electromagnetic controller includes a controller body, and the controller body is electrically connected to two longitudinal swing arm motors, a left swing arm motor, a right swing arm motor, a longitudinal upper electromagnet, a longitudinal lower electromagnet, a left electromagnet, and a right electromagnet respectively.

[0017] The steps are as follows: S1. Place the sample on the sample stage, and press the end cover tightly on the base through bolts to seal the test chamber;

[0018] S2. Adjust the probe to the leftmost end and the highest point. The leftmost end corresponds to the shortest first damping needle, and the highest point corresponds to the shortest second damping needle. The controller body drives the two longitudinal swing arm motors to make the longitudinal upper electromagnet and the longitudinal lower electromagnet face the upper end and the lower end of the longitudinal permanent magnet respectively, and drives the left swing arm motor and the right swing arm motor to make the left electromagnet and the right electromagnet face the left end and the right end of the transverse permanent magnet respectively;

[0019] S3. Swing the front end of the probe to position A according to the test requirements. Position A corresponds to the Ath first damping needle and the Ath second damping needle;

[0020] S301. The controller body energizes the left electromagnet. The magnetic force generated by the left electromagnet is less than the frictional force between the Ath first damping needle and the first resistance column, and greater than the frictional force between the (A - 1)th first damping needle and the first resistance column; the left electromagnet attracts the left end of the transverse permanent magnet through the magnetic force, and the probe swings towards the right end until the Ath first damping needle gets stuck at the first resistance column due to the frictional resistance being greater than the magnetic force, and then the left electromagnet is powered off;

[0021] S302. The controller body energizes the upper longitudinal electromagnet. The magnetic force of the upper longitudinal electromagnet is less than the frictional force between the A-th second damping pin and the second resistance column, and greater than the frictional force between the (A - 1)-th second damping pin and the second resistance column. The upper longitudinal electromagnet attracts the upper end of the longitudinal permanent magnet through magnetic force, and the probe swings downward until the A-th second damping pin gets stuck at the second resistance column due to the frictional resistance being greater than the magnetic force. Then the upper longitudinal electromagnet is de-energized, so that the front end of the probe swings to position A. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings described below are only some embodiments recorded in the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0023] Figure 1 Structural schematic diagram of the probe hot and cold stage in the present invention;

[0024] Figure 2 is Figure 1 Top view after hiding the controller body and the end cover in

[0025] Figure 3 is Figure 2 isometric view of

[0026] Figure 4 is Figure 2 Cross-sectional view taken along the A - A direction in

[0027] Figure 5 is Figure 4 partial enlarged view of

[0028] Figure 6 is Figure 5 enlarged view at position B in

[0029] Figure 7 is Figure 5 enlarged view at position C in

[0030] Reference numerals: base 1, end cap 2, probe 3, sample stage 4, probe stage 5, terminal post 6, pipe joint 7, sealing strip 8, counterweight ball 9, outer positioning spherical shell 10, inner positioning spherical shell 11, first resistance column 12, longitudinal rotating shaft 13, first damping needle 14, wear-resistant layer 15, transverse rotating shaft 16, second damping needle 17, second resistance column 18, notch 19, transverse permanent magnet 20, longitudinal permanent magnet 21, first telescopic rod 22, second telescopic rod 23, upper longitudinal electromagnet 24, longitudinal rocker motor 25, rocker 26, lower longitudinal electromagnet 27, left electromagnet 28, left rocker motor 29, right electromagnet 30, right rocker motor 31, resistance pad 32, controller body 33. Detailed implementation manners

[0031] In view of the deficiencies in the prior art, the inventors of this case have proposed the technical solution of the present invention through long-term research and a large number of practices. The following will further explain the technical solution, its implementation process and principle in combination with the drawings in the embodiments of this application and specific implementation cases.

[0032] It should be noted that the embodiments described below by referring to the drawings are exemplary and are only used to explain the present invention, and cannot be understood as a limitation to the present invention. The described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, the present invention covers any substitutions, modifications, equivalent methods and solutions made within the spirit, principle and scope of the present invention defined by the claims. All other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention.

[0033] In the description of this application, unless otherwise clearly specified and limited, the technical terms or scientific terms used should have the ordinary meaning understood by those with ordinary skills in the field to which this application belongs. Terms such as "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or a contact connection or an integral connection; for those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific situations.

[0034] Embodiment 1;

[0035] As Figure 1 、 Figure 2 And Figure 3As shown in the figure, Embodiment 1 provides a probe hot and cold stage, which includes a base 1, an end cover 2 and a probe 3. A sample stage 4 is provided in the middle of the test cavity of the base 1, and the probe 3 is installed on the probe stage 5 of the test cavity and one end of the probe 3 points to the sample stage 4; the end cover 2 is detachably connected to the upper end of the base 1 through a sealing strip 8, thereby sealing the test cavity. In addition, a wiring post 6 electrically connected to the heating element of the probe stage 5 and a pipe joint 7 communicating with an external refrigeration pipeline are further provided on the side of the base 1.

[0036] As Figure 4 , Figure 5 and Figure 6 As shown in the figure, in order to achieve precise horizontal positioning of the probe 3, a positioning component connected between the probe 3 and the probe stage 5 is further included in this embodiment. The positioning component includes a counterweight ball 9, an outer positioning ball shell 10 and an inner positioning ball shell 11. The outside of the outer positioning ball shell 10 is fixed on the probe stage 5, and a first resistance column 12 is provided on the inner surface of the outer positioning ball shell 10; the inner positioning ball shell 11 is rotatably connected to the inside of the outer positioning ball shell 10 through a longitudinal rotating shaft 13, and a row of first damping needles 14 evenly distributed at equal intervals along the circumferential direction of the inner positioning ball shell 11 and with increasing lengths in turn are provided on the outer surface of the inner positioning ball shell 11. The length increased each time is a unit length L, that is, any first damping needle 14 is longer or shorter than an adjacent first damping needle 14 by L. The first resistance column 12 and all the first damping needles 14 are parallel to the horizontal plane, and the longitudinal rotating shaft 13 forms a 90° angle with the first resistance column 12. The first resistance column 12 is provided with a U-shaped groove, and a wear-resistant layer 15 is provided in the U-shaped groove. By passing the first damping needles 14 with different lengths through the corresponding U-shaped grooves and rubbing against the wear-resistant layer 15, the swing angle of the probe 3 is controlled. The frictional resistance between the unit length L of each first damping needle 14 and the wear-resistant layer 15 is the same. The wear-resistant layer 15 stipulates the number of friction times. After reaching the number of friction times, the wear-resistant layer 15 can be replaced. The numerical change of the frictional resistance per unit length is within the allowable error range. That is, the lengths of all the first damping needles 14 increase in turn, and the increased lengths are equal. From the shortest first damping needle 14 to the longest first damping needle 14, the frictional resistance it receives from the first resistance column 12 also increases equally. For example, if the force required for the shortest first damping needle 14 to pass through the first resistance column 12 is f, then the force required for the adjacent first damping needle 14 to pass through the first resistance column 12 is 2f, and so on. The force required for the Nth first damping needle 14 to pass through the first resistance column 12 is Nf.

[0037] As Figures 4 to 7As shown in the figure, in order to achieve precise vertical positioning of the probe 3, in this embodiment, the counterweight ball 9 is rotationally connected to the inside of the inner positioning ball shell 11 through a transverse rotating shaft 16, and a row of second damping pins 17 are arranged on the inner surface of the counterweight ball 9 at equal intervals along the circumferential direction of the counterweight ball 9 and with increasing lengths in sequence; a second resistance column 18 is arranged outside the inner positioning ball shell 11, and both the second resistance column 18 and all the second damping pins 17 are parallel to the vertical plane. The structures of the second resistance column 18 and the first resistance column 12 are the same, and both are provided with wear-resistant layers. The lengths of all the second damping pins 17 and all the first damping pins 14 are the same, and the unit increased length is also L. The numbers of the second damping pins 17 and the first damping pins 14 are the same, and the angles between adjacent two second damping pins 17 or between adjacent two first damping pins 14 are also the same. It can also be set that the angles between every adjacent two first damping pins 14 and between every adjacent two second damping pins 17 can be set according to actual situations. For example, if the angle between every adjacent two first damping pins 14 is 1°, then the unit swing angle of the probe 3 in the horizontal plane is correspondingly 1°. If the angle between every adjacent two second damping pins 17 is 1°, then the unit swing angle of the probe 3 in the vertical plane is correspondingly 1°. It can also be set to 0.5°. The smaller the angle, the smaller the unit deflection angle of the probe 3 and the higher the control accuracy. The specific angle is not limited in this embodiment. In addition, notches 19 for the swing of the first damping pins 14 are provided on the outer surface of the counterweight ball 9 and the inner surface of the inner positioning ball shell 11, and notches 19 for the swing of the second damping pins 17 are provided on the outer surface of the inner positioning ball shell 11 and the inner surface of the outer positioning ball shell 10. The first damping pins 14 will not collide when swinging with the inner positioning ball shell 11, and the second damping pins 17 will not collide when swinging with the counterweight ball 9. All the first damping pins 14 only rub against the first resistance column 12, and all the second damping pins 17 only rub against the second resistance column 18.

[0038] In order to achieve remote control of the swing angle of the probe 3, this embodiment is realized through an external electromagnetic controller, a transverse permanent magnet 20 and a longitudinal permanent magnet 21. The specific connection structure is as follows:

[0039] As Figures 4 to 7As shown, the other end of the probe 3 penetrates through the upper part of the counterweight ball 9 and is respectively hinged to the transverse permanent magnet 20 and the longitudinal permanent magnet 21. Magnetic poles are respectively arranged at both ends of the longitudinal permanent magnet 21. The middle part of the longitudinal permanent magnet 21 is slidably connected to the end of the probe 3 through the first telescopic rod 22, and the middle part of the longitudinal permanent magnet 21 is hinged to the first telescopic rod 22. Similarly, magnetic poles are respectively arranged at both ends of the transverse permanent magnet 20. The middle part of the transverse permanent magnet 20 is slidably connected to the end of the first telescopic rod 22 through the second telescopic rod 23, and the middle part of the transverse permanent magnet 20 is hinged to the second telescopic rod 23. The first telescopic rod 22 and the second telescopic rod 23 are for automatically adapting to the axial displacement that occurs during the swinging process of the probe 3. The external electromagnetic controller is located outside the base 1. The external electromagnetic controller is respectively opposite to both ends of the transverse permanent magnet 20 and both ends of the longitudinal permanent magnet 21. By magnetically attracting one end of the transverse permanent magnet 20 through the external electromagnetic controller, the probe 3 swings in the horizontal plane and the swinging angle of the probe 3 in the plane is controlled by the friction between the first damping needle 14 and the first resistance column 12; or by magnetically attracting one end of the longitudinal permanent magnet 21 through the external electromagnetic controller, the probe 3 swings in the vertical plane and the swinging angle of the probe 3 in the vertical plane is controlled by the friction between the second damping needle 17 and the second resistance column 18. The magnetic pole of the transverse permanent magnet 20 facing the external electromagnetic controller is opposite in magnetism, and opposite poles attract each other. Similarly, the longitudinal permanent magnet 21 is the same.

[0040] As Figure 2 and Figure 3As shown in the figure, the specific structure of the external electromagnetic controller includes a vertically upper electromagnet 24 and a longitudinal rocker arm motor 25 located above the end cover 2. The magnetic pole of the vertically upper electromagnet 24 faces the magnetic pole at the upper end of the longitudinal permanent magnet 21, and the vertically upper electromagnet 24 is fixedly connected to the rocker arm 26 of the longitudinal rocker arm motor 25. The longitudinal rocker arm motor 25 drives the vertically upper electromagnet 24 to swing synchronously with the probe 3 in the vertical plane, so as to keep the magnetic pole of the vertically upper electromagnet 24 always facing the magnetic pole at the upper end of the longitudinal permanent magnet 21. The external electromagnetic controller further includes a vertically lower electromagnet 27 and another longitudinal rocker arm motor 25 located below the base 1. The magnetic pole of the vertically lower electromagnet 27 faces the magnetic pole at the lower end of the longitudinal permanent magnet 21, and the vertically lower electromagnet 27 is fixedly connected to the rocker arm 26 of the corresponding longitudinal rocker arm motor 25. The corresponding longitudinal rocker arm motor 25 drives the vertically lower electromagnet 27 to swing synchronously with the probe 3 in the vertical plane, so as to keep the magnetic pole of the vertically lower electromagnet 27 always facing the magnetic pole at the lower end of the longitudinal permanent magnet 21. The external electromagnetic controller further includes a left-side electromagnet 28 and a left-side rocker arm motor 29 located on the left side of the base 1. The magnetic pole of the left-side electromagnet 28 faces the magnetic pole at the left end of the transverse permanent magnet 20, and the left-side electromagnet 28 is fixedly connected to the rocker arm 26 of the left-side rocker arm motor 29. The left-side rocker arm motor 29 drives the left-side electromagnet 28 to swing synchronously with the probe 3 in the horizontal plane, so as to keep the magnetic pole of the left-side electromagnet 28 always facing the magnetic pole at the left end of the transverse permanent magnet 20. The external electromagnetic controller further includes a right-side electromagnet 30 and a right-side rocker arm motor 31 located on the right side of the base 1. The magnetic pole of the right-side electromagnet 30 faces the magnetic pole at the right end of the transverse permanent magnet 20, and the right-side electromagnet 30 is fixedly connected to the rocker arm 26 of the right-side rocker arm motor 31. The right-side rocker arm motor 31 drives the right-side electromagnet 30 to swing synchronously with the probe 3 in the horizontal plane, so as to keep the magnetic pole of the right-side electromagnet 30 always facing the magnetic pole at the right end of the transverse permanent magnet 20.

[0041] As Figure 5 shown, in this embodiment, the inner positioning spherical shell 11 rotates within the outer positioning spherical shell 10 through the longitudinal rotating shaft 13, and the inner positioning spherical shell 11 also rotates within the outer positioning spherical shell 10 through two symmetrical transverse rotating shafts 16. In order to prevent the probe 3 from rotating due to the gravity of the transverse permanent magnet 20 and the longitudinal permanent magnet 21, in this embodiment, resistance pads 32 are provided between the counterweight ball 9 and the inner positioning spherical shell 11 and between the outer positioning spherical shell 10 and the inner positioning spherical shell 11. The frictional resistance of the resistance pads 32 is used to balance the self-rotation torque of the probe 3 on the positioning assembly. In order to prevent the probe 3 from swinging when not controlled by the external electromagnetic controller, the resistance of the two resistance pads 32 just balances the self-rotation torque of the probe 3 in the longitudinal and transverse directions, thereby reducing the output torque of the external electromagnetic controller, that is, reducing the load of the external electromagnetic controller.

[0042] This embodiment eliminates the transmission structure between the existing external manipulator and the base 1, and utilizes the magnetic force between the transverse permanent magnet 20 and the longitudinal permanent magnet 21 and the external electromagnetic controller to transmit torque through the base 1, that is, utilizes the magnetic force to drive the probe 3 to swing through the air. There is no direct connection structure between the base 1 and the external electromagnetic controller, which completely solves the problem of reduced air tightness due to the increase of transmission gap as the use time increases or the number of uses increases.

[0043] In addition, in order to meet the experimental requirements, the probes 3 in this embodiment can be set to two, three, etc., and each probe 3 corresponds to a positioning component, an external electromagnetic controller, a transverse permanent magnet 20, and a longitudinal permanent magnet 21. The specific number of probes 3 depends on the actual situation and is not limited in this embodiment.

[0044] Embodiment 2:

[0045] Embodiment 2 provides a probe adjustment method for a probe hot and cold stage, based on a probe hot and cold stage of embodiment 1, the external electromagnetic controller includes a controller body 33, and the controller body 33 is electrically connected to two longitudinal rocker motors 25, a left rocker motor 29, a right rocker motor 31, a longitudinal upper electromagnet 24, a longitudinal lower electromagnet 27, a left electromagnet 28, and a right electromagnet 30. The two longitudinal rocker motors 25, the left rocker motor 29, the right rocker motor 31, the longitudinal upper electromagnet 24, the longitudinal lower electromagnet 27, the left electromagnet 28, and the right electromagnet 30 are all installed on the outside of the base 1 through an external fixing frame, and the specific structure of the external fixing frame is not claimed for protection in this embodiment and is not drawn in the figure.

[0046] Adjustment method: First, adjust the probe 3 to the leftmost end and the highest point. The leftmost end corresponds to the shortest first damping needle 14, and the highest point corresponds to the shortest second damping needle 17. The controller body 33 drives the two longitudinal rocker arm motors 25 to make the upper longitudinal electromagnet 24 and the lower longitudinal electromagnet 27 face the upper end and the lower end of the longitudinal permanent magnet 21 respectively, and drives the left rocker arm motor 29 and the right rocker arm motor 31 to make the left electromagnet 28 and the right electromagnet 30 face the left end and the right end of the transverse permanent magnet 20 respectively.

[0047] Then, according to the test requirements, the front end of the probe 3 is swung to position A, and position A corresponds to the Ath first damping needle 14 and the Ath second damping needle 17 .

[0048] Finally, the controller body 33 energizes the left electromagnet 28. The magnetic force generated by the left electromagnet 28 is less than the frictional force between the A-th first damping pin 14 and the first resistance column 12, and greater than the frictional force between the (A - 1)-th first damping pin 14 and the first resistance column 12. The left electromagnet 28 attracts the left end of the transverse permanent magnet 20 through magnetic force, and the probe 3 swings towards the right end until the A-th first damping pin 14 gets stuck at the first resistance column 12 due to the frictional resistance being greater than the magnetic force, and then the left electromagnet 28 is de-energized. The controller body 33 energizes the upper longitudinal electromagnet 24. The magnetic force of the upper longitudinal electromagnet 24 is less than the frictional force between the A-th second damping pin 17 and the second resistance column 18, and greater than the frictional force between the (A - 1)-th second damping pin 17 and the second resistance column 18; the upper longitudinal electromagnet 24 attracts the upper end of the longitudinal permanent magnet 21 through magnetic force, and the probe 3 swings towards the lower end until the A-th second damping pin 17 gets stuck at the second resistance column 18 due to the frictional resistance being greater than the magnetic force, and then the upper longitudinal electromagnet 24 is de-energized, so that the front end of the probe 3 swings to the A position. For the convenience of adjustment by the controller body 33, in this embodiment, the output magnetic force of the external electromagnetic controller is set to an adjustable stepped value. For example, the first unit stepped magnetic force value is F, the second stepped magnetic force value is 2F, the third stepped magnetic force value is 3F, and so on. However, the magnetic force value F here is the magnetic force value after being blocked and attenuated by the base 1. Although both the base 1 and the end cover 2 are made of stainless steel, when the magnetic field encounters materials such as stainless steel, the magnetic field will induce magnetic moments inside the material. For magnetic stainless steel, the magnetic field can penetrate well because the magnetic domains inside the material can interact with the externally applied magnetic field, enabling the magnetic force lines to pass through smoothly. For weakly magnetic or non-magnetic austenitic stainless steel, although the magnetic force can penetrate, due to its shielding effect on the magnetic field, the magnetic force will be attenuated to a certain extent. Therefore, the value of F here is the magnitude of the magnetic force after passing through the base 1, and the magnetic force outside the base 1 may be greater than F, depending on the materials of the base 1 and the end cover 2.

[0049] Compared with the existing manual adjustment method in the laboratory, the probe 3 adjustment method provided in this embodiment uses an electric control method to adjust the angle of the external electromagnetic controller, which can cooperate with the online control system to achieve remote adjustment, and can completely avoid the safety hazards caused by leakage.

[0050] It should be understood that the above embodiments are only used to illustrate the technical concept and features of the present invention, and their purpose is to enable those skilled in the art to understand the content of the present invention and implement it accordingly. It cannot be determined that the specific implementation of the present invention is only limited to these descriptions. For those of ordinary skill in the technical field to which the present invention belongs, without departing from the concept of the present invention, several simple deductions or substitutions can still be made. All equivalent changes or modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.

Claims

1. A probe hot and cold stage, comprising a base, an end cover and a probe; a sample stage is provided in the middle of a test cavity of the base, the probe is mounted on the probe stage of the test cavity and one end of the probe points to the sample stage; the end cover is detachably connected to the upper end of the base through a sealing strip, thereby sealing the test cavity; Features: Also included is a positioning assembly connected between the probe and the probe station, the positioning assembly comprising a weighted ball, an outer positioning spherical shell and an inner positioning spherical shell; The outside of the outer positioning spherical shell is fixed on the probe platform, and the inner surface of the outer positioning spherical shell is provided with a first resistance column; the inner positioning spherical shell is rotatably connected to the inside of the outer positioning spherical shell through a longitudinal rotating shaft, and the outer surface of the inner positioning spherical shell is provided with a row of first damping needles that are evenly spaced and increase in length along the circumference of the inner positioning spherical shell; the first resistance column and all the first damping needles are parallel to the horizontal plane; The weighted ball is rotatably connected to the inside of the inner positioning ball shell through a transverse rotating shaft, and the inner surface of the weighted ball is provided with a row of second damping needles which are evenly spaced and increase in length along the circumference of the weighted ball; the outside of the inner positioning ball shell is provided with a second resistance column, and the second resistance column and all the second damping needles are parallel to the vertical plane; It also includes a transverse permanent magnet and a longitudinal permanent magnet, and the other end of the probe penetrates the upper part of the counterweight ball and is hingedly connected to the transverse permanent magnet and the longitudinal permanent magnet respectively; It also includes an external electromagnetic controller located outside the base, the external electromagnetic controller is respectively opposite to the two ends of the transverse permanent magnet and the two ends of the longitudinal permanent magnet, and the external electromagnetic controller magnetically attracts one end of the transverse permanent magnet, so that the probe swings in the horizontal plane, and the first damping needle and the first resistance column rub to control the swing angle of the probe in the plane; or the external electromagnetic controller magnetically attracts one end of the longitudinal permanent magnet, so that the probe swings in the vertical plane, and the second damping needle and the second resistance column rub to control the swing angle of the probe in the vertical plane; The two ends of the longitudinal permanent magnet are respectively provided with magnetic poles, the middle part of the longitudinal permanent magnet is slidably connected to the end of the probe through the first telescopic rod, and the middle part of the longitudinal permanent magnet is hingedly connected to the first telescopic rod; The two ends of the transverse permanent magnet are respectively provided with magnetic poles, the middle part of the transverse permanent magnet is slidably connected to the end of the first telescopic rod through the second telescopic rod, and the middle part of the transverse permanent magnet is hingedly connected to the second telescopic rod.

2. A probe hot and cold stage according to claim 1, characterized in that: The first resistance column and the second resistance column are both provided with a U-shaped groove, and a wear-resistant layer is provided in the U-shaped groove. The first damping needle or the second damping needle of different lengths passes through the corresponding U-shaped groove and rubs against the wear-resistant layer, thereby controlling the swing angle of the probe.

3. The probe hot and cold stage according to claim 1, characterized in that: Resistance pads are arranged between the weighted ball and the inner positioning spherical shell, and between the outer positioning spherical shell and the inner positioning spherical shell, and the rotation torque of the probe on the positioning assembly is balanced by the friction resistance of the resistance pads.

4. The probe hot and cold stage according to claim 1, characterized in that: The external electromagnetic controller includes an upper longitudinal electromagnet and a longitudinal rocker motor located above the end cover, the magnetic poles of the upper longitudinal electromagnet are directly opposite to the magnetic poles of the upper end of the longitudinal permanent magnet, and the upper longitudinal electromagnet is fixedly connected to the rocker arm of the longitudinal rocker motor, and the upper longitudinal electromagnet is driven by the longitudinal rocker motor to swing synchronously with the probe in the vertical plane, thereby keeping the magnetic poles of the upper longitudinal electromagnet always directly opposite to the magnetic poles of the upper end of the longitudinal permanent magnet; It includes a longitudinal electromagnet located below the base and another longitudinal rocker arm motor. The magnetic poles of the longitudinal electromagnet are directly opposite to the magnetic poles of the lower end of the longitudinal permanent magnet, and the longitudinal electromagnet is fixedly connected to the rocker arm of the corresponding longitudinal rocker arm motor. The longitudinal electromagnet is driven by the corresponding longitudinal rocker arm motor to swing synchronously with the probe in the vertical plane, thereby keeping the magnetic poles of the longitudinal electromagnet always directly opposite to the magnetic poles of the lower end of the longitudinal permanent magnet.

5. The probe hot and cold stage according to claim 4, characterized in that: The external electromagnetic controller includes a left electromagnet and a left rocker motor located on the left side of the base, the magnetic pole of the left electromagnet is directly opposite to the magnetic pole of the left end of the transverse permanent magnet, and the left electromagnet is fixedly connected to the rocker arm of the left rocker motor, and the left electromagnet is driven by the left rocker motor to swing synchronously with the probe in the horizontal plane, thereby keeping the magnetic pole of the left electromagnet always directly opposite to the magnetic pole of the left end of the transverse permanent magnet; It includes a right electromagnet and a right rocker motor located on the right side of the base, the magnetic pole of the right electromagnet is directly opposite to the magnetic pole of the right end of the transverse permanent magnet, and the right electromagnet is fixedly connected to the rocker arm of the right rocker motor, and the right rocker motor drives the right electromagnet to swing synchronously with the probe in the horizontal plane, thereby keeping the magnetic pole of the right electromagnet always directly opposite to the magnetic pole of the right end of the transverse permanent magnet.

6. The probe hot and cold stage according to claim 1, characterized in that: The outer surface of the weighted ball and the inner surface of the inner positioning spherical shell are both provided with a notch for the first damping needle to swing, and the outer surface of the inner positioning spherical shell and the inner surface of the outer positioning spherical shell are both provided with a notch for the second damping needle to swing.

7. The probe hot and cold stage according to claim 5, characterized in that: Any first damping needle is longer or shorter than another adjacent first damping needle by L, and any second damping needle is longer or shorter than another adjacent second damping needle by L.

8. A probe adjustment method for a probe hot and cold stage, characterized in that: Based on the probe hot and cold stage described in claim 7, the external electromagnetic controller includes a controller body, and the controller body is electrically connected to two longitudinal rocker motors, a left rocker motor, a right rocker motor, a longitudinal upper electromagnet, a longitudinal lower electromagnet, a left electromagnet and a right electromagnet respectively; Here are the steps: S1. Place the sample on the sample table and tighten the end cover onto the base with bolts to seal the test chamber. S2, adjust the probe to the leftmost end and the highest point, the leftmost end corresponds to the shortest first damping needle, the highest point corresponds to the shortest second damping needle, the controller body drives the two longitudinal rocker motors to make the longitudinal upper electromagnet and the longitudinal lower electromagnet face the upper end and the lower end of the longitudinal permanent magnet respectively, and drives the left rocker motor and the right rocker motor to make the left electromagnet and the right electromagnet face the left end and the right end of the transverse permanent magnet respectively; S3, according to the test requirements, swing the front end of the probe to position A, and position A corresponds to the Ath first damping needle and the Ath second damping needle; S301, the controller body energizes the left electromagnet, and the magnetic force generated by the left electromagnet is smaller than the friction force between the Ath first damping needle and the first resistance column, and larger than the friction force between the A-1th first damping needle and the first resistance column; the left electromagnet attracts the left end of the transverse permanent magnet through magnetic force, and the probe swings toward the right end until the Ath first damping needle is stuck at the first resistance column because the friction resistance is larger than the magnetic force, and the left electromagnet is de-energized; S302, the controller body energizes the upper longitudinal electromagnet, and the magnetic force of the upper longitudinal electromagnet is smaller than the friction force between the Ath second damping needle and the second resistance column, and larger than the friction force between the A-1th second damping needle and the second resistance column; the upper longitudinal electromagnet attracts the upper end of the longitudinal permanent magnet through magnetic force, and the probe swings toward the lower end until the Ath second damping needle is stuck at the second resistance column because the friction resistance is greater than the magnetic force, and the upper longitudinal electromagnet is de-energized, so that the front end of the probe swings to the A position.

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