A three-sided target structure capable of both revolution and rotation

Abstract

The invention belongs to the technical field of vacuum coating, and provides a three-sided target structure capable of revolution and rotation, comprising a rotation motor, an output end of which is transmission-connected with a magnetic fluid inner shaft, the end of the magnetic fluid inner shaft is connected to a rotation extension sleeve, and the rotation extension sleeve extends into a rotating target shell; a rotation gear set is provided on the rotation extension sleeve extending into the rotating target shell, and the rotation gear set comprises a bevel gear 1 arranged at the end of the rotation extension sleeve, three sets of bevel gears 2 are meshed and connected to the bevel gear 1, and the bevel gear 2 is connected to a target material through a corresponding rotating target magnetic fluid to realize the rotation of the target material; a revolution motor is arranged at one end of the rotation motor, and the revolution motor is connected to a magnetic fluid intermediate shaft wrapped around the outside of the magnetic fluid inner shaft through a belt assembly, and the magnetic fluid intermediate shaft is connected to a revolution extension sleeve arranged outside the rotation extension sleeve, and the revolution extension sleeve is connected to the rotating target shell to realize the revolution of the target material, thereby improving the utilization rate of the target material.

Description

Technical Field

[0001] The invention mainly relates to the technical field of vacuum coating, and in particular to a three-sided target structure capable of both revolution and rotation. Background Art

[0002] At present, most of the rotating targets used in vacuum coating machines can only revolve, that is, when the target material needs to be switched, the rotating target revolves around the central axis, and switches to another target material after rotating a certain angle. However, since the ion source only revolves when bombarding the target surface, only an elliptical target material on the target surface is utilized, the target material utilization rate is low, and it is easy to cause target material waste. On this basis, and in order to meet the diversified development of the market, a three-sided target structure that can revolve and rotate is proposed. Summary of the invention

[0003] 1. Technical problem to be solved by the invention: The present invention provides a three-sided target structure capable of both revolution and rotation, so as to solve the technical problems existing in the above-mentioned background technology.

[0004] 2. Technical solution: In order to achieve the above object, the technical solution of the present invention is: A three-sided target structure capable of revolution and rotation, the three-sided target structure comprising The output end of the self-rotating motor is connected to the magnetic fluid inner shaft, and the end of the magnetic fluid inner shaft is connected to the self-rotating extension sleeve, and the self-rotating extension sleeve extends into the rotating target housing; A self-rotating gear set is provided on the self-rotating extension sleeve extending into the rotating target housing, and the self-rotating gear set includes a bevel gear 1 arranged at the end of the self-rotating extension sleeve, and three sets of bevel gears 2 are engaged and connected on the bevel gear 1. The bevel gears 2 are connected to the target material through the corresponding self-rotating rotating target magnetic fluid to realize the self-rotation of the target material; The revolving motor is arranged at one end of the rotating motor. The revolving motor is connected to the magnetic fluid intermediate shaft wrapped outside the magnetic fluid inner shaft through a belt assembly. The magnetic fluid intermediate shaft is connected to the revolving extension sleeve arranged outside the rotating extension sleeve. The revolving extension sleeve is connected to the rotating target shell to realize the revolution of the target material.

[0005] A further improvement is that the self-rotating gear set also includes a mounting shaft arranged in the rotating target housing, the mounting shaft is provided with a bevel gear three, and the bevel gear three cooperates with the bevel gear one to mesh with three sets of bevel gear two.

[0006] A further improvement is that magnetic fluid is provided outside the magnetic fluid intermediate shaft.

[0007] A further improvement is that the belt assembly includes a synchronous wheel 1 connected to the output end of the revolving motor, the synchronous wheel 1 is connected to a synchronous wheel 2 via a belt, and the synchronous wheel 2 is drivingly connected to the magnetic fluid intermediate shaft.

[0008] A further improvement is that it also includes a motor plate for supporting the revolution motor and the rotation motor.

[0009] A further improvement is that it also includes a mounting base plate for supporting the magnetic fluid.

[0010] A further improvement is that the revolution extension sleeve and the magnetic fluid intermediate shaft are installed by fasteners.

[0011] A further improvement is that a self-rotating target passing end plate is provided at the end of the self-rotating target magnetic fluid, and the self-rotating target passing end plate is connected to the target material.

[0012] A further improvement is that the target material includes, from the inside to the outside, a target back plate, a water-cooled target back plate and a silicon target.

[0013] 3. Beneficial effects: Compared with the prior art, the technical solution provided by the present invention has the following beneficial effects: The three-sided target structure provided by the present invention controls the revolution and rotation of the rotating target respectively through two groups of motors. During vacuum coating, since the target material continuously rotates while the ion source bombards the target material surface, the high-energy particle beam generated by the ion source can bombard the target material surface more evenly, thereby improving the utilization rate of the target material. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 For the present invention Figure 1 Schematic diagram of the cross-sectional state; Figure 3 For the present invention Figure 1 Schematic diagram of some structures; Figure 4 For the present invention Figure 3 A schematic diagram of the enlarged structure at point A; Figure 5 For the present invention Figure 3 Schematic diagram of the enlarged structure at B.

[0015] Reference numerals: 1-self-rotating motor; 2-magnetic fluid inner shaft; 3-self-rotating extension sleeve; 4-target housing; 5-self-rotating gear set; 51-bevel gear one; 52-bevel gear two; 53-bevel gear three; 6-self-rotating target magnetic fluid; 7-target material; 8-revolution motor; 9-belt assembly; 91-synchronous wheel one; 92-belt; 93-synchronous wheel two; 10-magnetic fluid intermediate shaft; 11-revolution extension sleeve; 12-installation shaft; 13-magnetic fluid; 14-motor plate; 15-installation base plate; 16-self-rotating target end plate. DETAILED DESCRIPTION

[0016] To facilitate understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings. Several embodiments of the present invention are shown in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0017] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed", "provided with", etc. should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be internal communication between two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0018] It should be noted that the structures not introduced in the present invention all adopt the existing technology because they do not involve the design points and improvement directions of the present invention.

[0019] Reference Figure 1-4 The present invention provides a three-sided target structure capable of both revolution and rotation, comprising a rotating motor 1, the output end of which is transmission-connected to a magnetic fluid inner shaft 2, the end of which is connected to a rotating extension sleeve 3, and the rotating extension sleeve 3 extends into a rotating target housing 4; A self-rotating gear set 5 is provided on the self-rotating extension sleeve 3 extending into the rotating target housing 4, and the self-rotating gear set 5 includes a bevel gear 1 51 arranged at the end of the self-rotating extension sleeve 3, and three sets of bevel gears 2 52 are engaged and connected to the bevel gear 1 51. The bevel gear 2 52 is connected to the target material 7 through the corresponding self-rotating rotating target magnetic fluid 6 to realize the self-rotation of the target material 7; The revolving motor 8 is arranged at one end of the rotating motor 1. The revolving motor 8 is connected to a magnetic fluid intermediate shaft 10 wrapped around the outside of the magnetic fluid inner shaft 2 through a belt assembly 9. The magnetic fluid intermediate shaft 10 is connected to a revolving extension sleeve 11 arranged outside the rotating extension sleeve 3. The revolving extension sleeve 11 is connected to the rotating target shell 4 to realize the revolution of the target material 7.

[0020] When the three-sided target structure revolution motor 8 provided by the present invention rotates, the magnetic fluid intermediate shaft 10 is driven to rotate through the synchronous belt, and the magnetic fluid intermediate shaft 10 is connected to the rotating target shell 4. Since the target material 7 is installed on the rotating target shell 4, the magnetic fluid intermediate shaft 10 drives the rotating target shell 4 to rotate to produce a revolution motion; when the self-rotating motor 1 rotates, it is connected through a coupling to drive the magnetic fluid inner shaft 2 to rotate, and all the target materials 7 are controlled by the self-rotating gear set 5 to rotate. When the magnetic fluid inner shaft 2 rotates, all the target materials 7 start to rotate. During vacuum coating, since the ion source is bombarding the target surface, the target continuously rotates, so that the high-energy particle beam generated by the ion source can bombard the target surface more evenly, thereby improving the utilization rate of the target.

[0021] In a preferred embodiment, the self-rotating gear set 5 also includes an installation shaft 12 arranged in the rotating target housing 4, and a bevel gear three 53 is provided on the installation shaft 12. The bevel gear three 53 cooperates with the bevel gear one 51 to be meshed and connected with three sets of bevel gear twos 52. The purpose of this setting is to improve the structural stability of the self-rotating gear set 5 and ensure that the vertical self-rotating transmission force is transmitted to the horizontal self-rotating target magnetic fluid 6.

[0022] In a preferred embodiment, a magnetic fluid 13 is disposed outside the magnetic fluid intermediate shaft 10 .

[0023] In a preferred embodiment, the belt assembly 9 includes a synchronous wheel 91 connected to the output end of the revolving motor 8, the synchronous wheel 91 is connected to the synchronous wheel 93 through a belt 92, the synchronous wheel 93 is connected to the magnetic fluid intermediate shaft 10, and the revolving motor 8 drives the magnetic fluid intermediate shaft 10 to rotate through the belt assembly 9, and finally drives the rotating target shell 4 to revolve.

[0024] This embodiment further includes a motor plate 14 for supporting the revolution motor 8 and the rotation motor 1 .

[0025] This embodiment further includes a mounting base plate 15 for supporting the magnetic fluid 13 .

[0026] In a preferred embodiment, the revolution extension sleeve 11 and the magnetic fluid intermediate shaft 10 are installed via fasteners.

[0027] In a preferred embodiment, a self-rotating target passing end plate 16 is provided at the end of the self-rotating target magnetic fluid 6, and the self-rotating target passing end plate is connected to the target material.

[0028] In a preferred embodiment, the target material 7 includes a target back plate, a water-cooled target back plate and a silicon target in sequence from the inside to the outside.

[0029] When the rotating motor 1 drives the magnetic fluid inner shaft 2 to rotate and the magnetic fluid intermediate shaft 10 is stationary, the rotating target rotates around the center of the target material 7; when the revolving motor 8 drives the magnetic fluid intermediate shaft 10 to rotate and the magnetic fluid inner shaft 2 is stationary, the rotating target is switched. At this time, the rotating target revolves and rotates in the opposite direction. When the two sets of motors drive the magnetic fluid inner shaft 2 to rotate and the magnetic fluid intermediate shaft 10 rotates at the same time at a certain speed ratio, it can be achieved that the rotating target revolves around the center axis while the target material 7 does not rotate.

[0030] The above-described embodiments only express a certain implementation mode of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the patent scope of the present invention. It should be pointed out that, for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be based on the attached claims.

Claims

1. A three-sided target structure capable of both revolution and rotation, characterized in that: The three-sided target structure includes A self-rotating motor (1), the output end of which is drivingly connected to a magnetic fluid inner shaft (2), the end of which is connected to a self-rotating extension sleeve (3), and the self-rotating extension sleeve (3) extends into a rotating target housing (4); A self-rotating gear set (5) is provided on the self-rotating extension sleeve extending into the rotating target housing (4), the self-rotating gear set (5) comprising a bevel gear 1 (51) arranged at the end of the self-rotating extension sleeve (3), three sets of bevel gear 2 (52) being meshedly connected to the bevel gear 1 (51), and the bevel gear 2 (52) is connected to the target material (7) through the corresponding self-rotating rotating target magnetic fluid (6), so as to realize the self-rotation of the target material (7); The revolving motor (8) is arranged at one end of the rotating motor (1); the revolving motor (8) is connected to a magnetic fluid intermediate shaft (10) wrapped outside the magnetic fluid inner shaft (2) via a belt assembly (9); the magnetic fluid intermediate shaft (10) is connected to a revolving extension sleeve (11) arranged outside the rotating extension sleeve (3); the revolving extension sleeve (11) is connected to a rotating target housing (4), thereby realizing the revolving of the target material (7).

2. The three-sided target structure capable of revolution and rotation according to claim 1, characterized in that: The self-rotating gear set (5) further comprises a mounting shaft (12) arranged in the rotating target housing (4), the mounting shaft (12) being provided with a bevel gear three (53), the bevel gear three (53) cooperating with the bevel gear one (51) to be meshedly connected with three sets of bevel gear twos (52).

3. The three-sided target structure capable of revolution and rotation according to claim 1, characterized in that: A magnetic fluid (13) is provided outside the magnetic fluid intermediate shaft (10).

4. The three-sided target structure capable of revolution and rotation according to claim 1, characterized in that: The belt assembly (9) comprises a synchronous wheel 1 (91) connected to the output end of the revolving motor (8); the synchronous wheel 1 (91) is connected to a synchronous wheel 2 (93) via a belt (92); and the synchronous wheel 2 (93) is drivingly connected to the magnetic fluid intermediate shaft (10).

5. The three-sided target structure capable of revolution and rotation according to claim 1, characterized in that: It also includes a motor plate (14) for supporting the revolution motor (8) and the rotation motor (1).

6. The three-sided target structure capable of revolution and rotation according to claim 3, characterized in that: It also includes a mounting base plate (15) for supporting the magnetic fluid (13).

7. The three-sided target structure capable of revolution and rotation according to claim 1, characterized in that: The revolution extension sleeve (11) and the magnetic fluid intermediate shaft (10) are mounted via fasteners.

8. The three-sided target structure capable of revolution and rotation according to claim 1, characterized in that: A self-rotating target passing end plate (16) is provided at the end of the self-rotating target magnetic fluid (6), and the self-rotating target passing end plate (16) is connected to the target material (7).

9. The three-sided target structure capable of revolution and rotation according to claim 1, characterized in that: The target material (7) comprises, from the inside to the outside, a target back plate, a water-cooled target back plate and a silicon material target.

Images