A magnetic levitation vacuum pump with a self-cleaning system

Abstract

The present invention relates to the field of self-cleaning technology, and discloses a magnetic levitation vacuum pump with a self-cleaning system, including a vacuum pump body and a filter plate installed on the vacuum pump body, a driving motor installed inside the vacuum pump body, a turbine blade installed on the driving motor, a compression cylinder for storing air installed inside the vacuum pump body, a piston block for compressing air installed inside the compression cylinder, a driving mechanism for driving the piston block to operate installed inside the vacuum pump body, a cleaning block installed inside the vacuum pump body, the cleaning block is used to clean the inside of the vacuum pump body, and the cleaning block is communicated with the inside of the compression cylinder. Therefore, while the turbine blades extract air from the outside, the inner wall of the vacuum pump body and the turbine blades can be cleaned, dust can be removed in time, the inside of the vacuum pump body can be kept clean, the possibility of dust accumulation can be reduced, and the use time of the equipment can be extended.

Description

Technical Field

[0001] The invention relates to the technical field of self-cleaning, in particular to a magnetic suspension vacuum pump with a self-cleaning system. Background Art

[0002] The magnetic levitation vacuum pump is an advanced device that combines magnetic levitation technology and vacuum pump technology. Through the magnetic levitation system, the pump rotor can run at high speed without contact and friction, significantly reducing the wear and vibration problems of traditional mechanical pumps, thereby improving the efficiency, stability and service life of the vacuum pump. The magnetic levitation vacuum pump is mainly used to extract gas. Its working principle is to extract the gas in the container through rotating blades or turbines to achieve the purpose of creating a vacuum. In addition, the magnetic levitation vacuum pump usually adopts an oil-free design to avoid oil pollution, and is suitable for industries with extremely high cleanliness requirements, such as semiconductor manufacturing, optical coating and aerospace technology.

[0003] At present, the vacuum pump will extract the external gas during use. In the process of extracting gas, dust may be carried into the vacuum pump. Although a filter plate is installed at the air inlet of the vacuum pump, a small amount of dust will still reach the inside of the vacuum pump. Therefore, when the vacuum pump is used for a long time, dust will accumulate inside the vacuum pump and affect the extraction of gas. At the same time, the vacuum pump body needs to be disassembled before cleaning. Therefore, it does not meet the existing needs. We propose a magnetic levitation vacuum pump with a self-cleaning system. Summary of the invention

[0004] The present invention provides a magnetic levitation vacuum pump with a self-cleaning system, which has the beneficial effect of cleaning the vacuum pump body during use, and solves the problem mentioned in the above background technology that the vacuum pump will extract external gas during use, and dust may be carried into the vacuum pump during the gas extraction process. Although a filter plate is installed at the air inlet of the vacuum pump, a small amount of dust will still reach the inside of the vacuum pump. Therefore, when the vacuum pump is used for a long time, dust will accumulate in the vacuum pump and affect the extraction of gas. At the same time, the vacuum pump body needs to be disassembled before cleaning.

[0005] The present invention provides the following technical solution: a magnetic levitation vacuum pump with a self-cleaning system, comprising a vacuum pump body and a filter plate installed on the vacuum pump body, a drive motor installed inside the vacuum pump body, and turbine blades installed on the drive motor, characterized in that a compression cylinder for storing air is installed inside the vacuum pump body, a piston block for compressing air is slidably installed inside the compression cylinder, a driving mechanism for driving the piston block to operate is installed inside the vacuum pump body, a cleaning block is installed inside the vacuum pump body, the cleaning block is used to clean the inside of the vacuum pump body, and the cleaning block is communicated with the inside of the compression cylinder.

[0006] As an optional solution of a magnetic levitation vacuum pump with a self-cleaning system described in the present invention, the driving mechanism includes a first gear installed on the rotating shaft of the driving motor, a second gear installed inside the vacuum pump body, and a first rotating shaft rotatably installed on the side of the compression cylinder, the first gear is meshed with the second gear, a support plate is installed inside the vacuum pump body, the second gear is rotatably installed on the side of the support plate, a second rotating shaft is installed on the side of the second gear, and a transmission belt group is installed between the first rotating shaft and the second rotating shaft.

[0007] As an optional solution of a magnetic levitation vacuum pump with a self-cleaning system described in the present invention, wherein: a first bevel gear is installed at the end of the first rotating shaft, a linkage rod is rotatably installed inside the compression cylinder, a second bevel gear is installed on the linkage rod, the second bevel gear is meshed with the first bevel gear, two rotating disks are installed on the linkage rod, a connecting column is eccentrically installed between the two rotating disks, a push rod is rotatably installed on the connecting column, and the push rod is connected to the piston block.

[0008] As an optional solution of a magnetic levitation vacuum pump with a self-cleaning system described in the present invention, an air inlet pipe and an air outlet pipe are symmetrically installed on the side of the compression cylinder, an air inlet valve is installed inside the air inlet pipe, and an air outlet valve is installed inside the air outlet pipe.

[0009] As an optional solution of a magnetic levitation vacuum pump with a self-cleaning system described in the present invention, wherein: a rotating cylinder is installed on the outside of the compression cylinder, a linkage gear is installed on the outside of the rotating cylinder, the rotating cylinder is fixedly connected to the first rotating shaft, a track groove is opened on the filter plate, a sliding rod is slidably installed inside the track groove, a driving gear is installed on the sliding rod, and the driving gear is meshed with the linkage gear.

[0010] As an optional solution of a magnetic levitation vacuum pump with a self-cleaning system described in the present invention, wherein: an annular block is installed on the outside of the compression cylinder, the annular block is gap-matched with the air inlet pipe, the annular block is connected to the air outlet pipe, a connecting ring is rotatably installed on the outside of the annular block, an air transfer cavity is opened inside the connecting ring, the air transfer cavity is communicated with the air outlet pipe, and a connecting pipe is installed on the side of the air transfer cavity.

[0011] As an optional solution of a magnetic levitation vacuum pump with a self-cleaning system described in the present invention, wherein: a groove is provided on the driving gear, a support rod is installed inside the groove, the cleaning block is rotatably installed on the support rod, a torsion spring is installed between the support rod and the cleaning block, an injection pipe is provided inside the cleaning block, the injection pipe is connected to the connecting pipe, a cleaning nozzle is installed on the cleaning block, and the cleaning nozzle is communicated with the injection pipe.

[0012] As an optional solution of a magnetic levitation vacuum pump with a self-cleaning system described in the present invention, a connecting ring is installed inside the vacuum pump body, and the connecting ring is divided into an arc groove and a protrusion.

[0013] As an optional solution of a magnetic levitation vacuum pump with a self-cleaning system described in the present invention, there are a plurality of arc-shaped grooves and a plurality of protrusions, and the plurality of protrusions and the plurality of arc-shaped grooves are in a ring array.

[0014] As an optional solution of the magnetic levitation vacuum pump with a self-cleaning system described in the present invention, wherein: the connecting pipe is configured as a bellows.

[0015] The present invention has the following beneficial effects:

[0016] 1. The magnetic levitation vacuum pump with a self-cleaning system, through the cooperation of the compression cylinder, the driving structure, the piston block, the push rod and the rotating disk, in the process of the rotation of the driving motor, utilizes the transmission between the first gear and the first rotating shaft to make the first rotating shaft rotate, and utilizes the meshing of the first bevel gear and the second bevel gear to drive the piston block to extend and retract by utilizing the push rod, and in the process of the piston block extending and retracting, the air is sucked and discharged, so that the air is compressed, so that the airflow discharged from the compression cylinder is greater than the airflow inside the vacuum pump body, so that the airflow cleans the dust on the turbine blades and the inner wall of the vacuum pump body;

[0017] Moreover, by installing the first gear on the rotating shaft of the driving motor, the inner wall of the vacuum pump body and the turbine blades can be cleaned while the turbine blades draw air from the outside, thereby removing dust in time, keeping the interior of the vacuum pump body clean, reducing the possibility of dust accumulation, and extending the service life of the equipment.

[0018] 2. The magnetic levitation vacuum pump with a self-cleaning system, through the cooperation of the driving gear, the cleaning block, the connecting ring, the annular block and the jet pipe, during the exhaust pipe gas discharge process, the gas reaches the inside of the gas transmission cavity through the cooperation of the annular block and the connecting ring, and is ejected through the jet pipe, thereby achieving the effect of concentrated airflow injection, minimizing the impact of the airflow on the normal use of the vacuum pump body, and can also blow off the dust adsorbed on the surface of the turbine blade; not only that, through the cooperation of the rotating cylinder, the linkage gear and the driving gear, the rotating cylinder is driven to rotate during the rotation of the first rotating shaft, and at the same time, the rotating cylinder utilizes the linkage gear provided on the body to mesh with the driving gear, and at the same time, the driving gear utilizes the limitation of the sliding rod and the track groove to make the driving gear rotate around the rotating cylinder, thereby realizing concentrated airflow injection cleaning with the rotating cylinder as the center, which can not only minimize the impact of the airflow on the normal use of the vacuum pump body, but also can blow off the dust adsorbed on the surface of the turbine blade.

[0019] 3. The magnetic levitation vacuum pump with a self-cleaning system cooperates with the protrusion, the arc groove and the cleaning block. In the process of driving the gear to rotate, the end of the cleaning block cooperates with the connecting ring. When the cleaning block slides to the arc groove, the cleaning block is not restricted, so the end of the cleaning block is close to the inner wall of the vacuum pump body. When the cleaning block slides to the end of the protrusion, the protrusion will push the cleaning block to rotate on the support rod, thereby changing the direction of the cleaning nozzle, so that the cleaning nozzle can spray and clean the inner wall of the vacuum pump body from multiple angles, ensuring that the cleaning effect is more thorough and uniform. Moreover, the cleaning block can flexibly adjust its position and direction according to the changes of the protrusion and the arc groove during the sliding process, adapt to inner walls of different shapes and structures, and improve the flexibility and applicability of cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the three-dimensional structure of the vacuum pump body of the present invention.

[0021] Figure 2 It is a schematic diagram of the cross-sectional structure of the vacuum pump body of the present invention.

[0022] Figure 3 It is a schematic diagram of the driving mechanism structure of the present invention.

[0023] Figure 4 For the present invention Figure 2 A in the figure is an enlarged structural diagram.

[0024] Figure 5 It is a schematic diagram of the meshing structure of the linkage gear and the driving gear of the present invention.

[0025] Figure 6 It is a schematic diagram of the half-section structure of the vacuum pump body of the present invention.

[0026] Figure 7It is a schematic diagram of the structure of the driving gear and the cleaning block of the present invention.

[0027] Figure 8 It is a schematic diagram of the connecting ring structure of the present invention.

[0028] Fig. 9 For the present invention Figure 6 The enlarged structural diagram at B in FIG.

[0029] In the figure: 110, vacuum pump body; 111, filter plate; 112, drive motor; 113, turbine blade; 114, compression cylinder; 115, piston block; 120, drive mechanism; 121, first gear; 122, second gear; 123, first rotating shaft; 124, support plate; 125, second rotating shaft; 130, cleaning block; 131, transmission belt group; 140, first bevel gear; 141, linkage rod; 142, second bevel gear; 143, rotating disk; 144, connecting column; 14 5. Push rod; 150. Air inlet pipe; 151. Air outlet pipe; 152. Air inlet valve; 153. Air outlet valve; 160. Rotating cylinder; 161. Linking gear; 162. Track groove; 163. Sliding rod; 164. Driving gear; 165. Ring block; 170. Connecting ring; 171. Air transfer cavity; 172. Connecting pipe; 173. Groove; 174. Support rod; 175. Torsion spring; 180. Jet pipe; 181. Cleaning nozzle; 190. Connecting ring; 191. Bump; 192. Arc groove. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] Embodiment 1: This embodiment is intended to promote the solution of the problem that the vacuum pump will extract external gas during use. During the process of extracting gas, dust may be carried into the vacuum pump. Although a filter plate is installed at the air inlet of the vacuum pump, a small amount of dust will still reach the inside of the vacuum pump. Therefore, after using the vacuum pump for a long time, dust will accumulate inside the vacuum pump, affecting the extraction of gas. At the same time, the vacuum pump body needs to be disassembled before cleaning. Please refer to Figure 1-Figure 9A magnetic levitation vacuum pump with a self-cleaning system comprises a vacuum pump body 110 and a filter plate 111 mounted on the vacuum pump body 110, a driving motor 112 is mounted inside the vacuum pump body 110, a turbine blade 113 is mounted on the driving motor 112, a compression cylinder 114 for storing air is mounted inside the vacuum pump body 110, a piston block 115 for compressing air is slidably mounted inside the compression cylinder 114, a driving mechanism 120 for driving the piston block 115 to operate is mounted inside the vacuum pump body 110, a cleaning block 130 is mounted inside the vacuum pump body 110, the cleaning block 130 is used to clean the inside of the vacuum pump body 110, and the cleaning block 130 is communicated with the inside of the compression cylinder 114;

[0032] The driving mechanism 120 includes a first gear 121 mounted on the rotating shaft of the driving motor 112, a second gear 122 mounted inside the vacuum pump body 110, and a first rotating shaft 123 rotatably mounted on the side of the compression cylinder 114, and the first gear 121 is meshed with the second gear 122.

[0033] A support plate 124 is installed inside the vacuum pump body 110, the second gear 122 is rotatably installed on the side of the support plate 124, a second rotating shaft 125 is installed on the side of the second gear 122, a transmission belt group 131 is installed between the first rotating shaft 123 and the second rotating shaft 125, and the compression cylinder 114 is installed on the side of the filter plate 111 and is inside the vacuum pump body 110.

[0034] It should be noted that the transmission belt set 131 is usually composed of key components such as gears, hubs and keys, and these components work together to achieve effective power transmission and mechanical connection.

[0035] See Figure 1 , Figure 2 , Figure 3 and Figure 6 In a specific implementation, when the driving motor 112 drives the turbine blades 113 to rotate, the first gear 121 is also driven to rotate. At the same time, when the first gear 121 rotates, the second gear 122 meshing therewith is driven to rotate. Therefore, when the second gear 122 rotates, the second rotating shaft 125 is driven to rotate. At the same time, the first rotating shaft 123 is rotated at the same time through the cooperation of the pulley group.

[0036] It should be noted that see Figure 3 , the diameter of the first gear 121 is greater than the diameter of the second gear 122 , so the rotation speed of the first rotating shaft 123 is faster than the speed of the turbine blade 113 .

[0037] A first bevel gear 140 is installed at the end of the first rotating shaft 123, a linkage rod 141 is rotatably installed inside the compression cylinder 114, a second bevel gear 142 is installed on the linkage rod 141, the second bevel gear 142 is meshed with the first bevel gear 140, two rotating disks 143 are installed on the linkage rod 141, a connecting column 144 is eccentrically installed between the two rotating disks 143, a push rod 145 is rotatably installed on the connecting column 144, and the push rod 145 is connected to the piston block 115.

[0038] See Figure 1 , Figure 2 , Figure 3 and Figure 6 In a specific implementation, during the rotation of the first rotating shaft 123, the first bevel gear 140 and the second bevel gear 142 are used to cooperate to drive the linkage rod 141 to rotate, so that the rotating disk 143 is driven to rotate during the rotation of the linkage rod 141. Since a connecting column 144 is eccentrically installed between the rotating disks 143, and a push rod 145 is rotatably installed on the connecting column 144, the push rod 145 is driven to extend and retract during the rotation of the rotating disk 143. At the same time, the piston block 115 is installed on the push rod 145, so the piston block 115 moves inside the compression cylinder 114.

[0039] An air inlet pipe 150 and an air outlet pipe 151 are symmetrically installed on the side of the compression cylinder 114 . An air inlet valve 152 is installed inside the air inlet pipe 150 , and an air outlet valve 153 is installed inside the air outlet pipe 151 .

[0040] It should be noted that the air inlet valve 152 and the air outlet valve 153 are configured as one-way valves, so the air inlet valve 152 can take in air but cannot let out air, while the air outlet valve 153 can let out air but cannot take in air.

[0041] See Figure 1 , Figure 2 , Figure 3 and Figure 4 During specific implementation, when the piston block 115 moves from one end to the other end of the compression cylinder 114, the volume inside the compression cylinder 114 increases and the internal pressure decreases, so air enters from the air inlet pipe 150; when the piston starts to move in the opposite direction, the volume inside the compression cylinder 114 decreases, and the air is compressed. As the piston block 115 continues to move, the pressure inside the compression cylinder 114 increases, so the air flows out from the air outlet pipe 151, blowing off the dust remaining on the surface of the vacuum pump body 110, reducing the possibility of dust adhering to the turbine blades 113, and at the same time allowing the dust originally agglomerated on the surface of the turbine blades 113 to fall off and be discharged to the outside along with the gas of the vacuum pump body.

[0042] It should be noted that the filter plate 111 is also installed inside the air intake pipe 150 , and the air intake pipe 150 is arranged inside the vacuum pump body 110 , so the air inside the compression cylinder 114 is cleaner than the air inside the vacuum pump body 110 .

[0043] In this embodiment: through the cooperation of the compression cylinder 114, the driving structure, the piston block 115, the push rod 145 and the rotating disk 143, during the rotation of the driving motor 112, the first rotating shaft 123 is rotated by utilizing the transmission between the first gear 121 and the first rotating shaft 123, and the piston block 115 is driven to extend and retract by utilizing the engagement of the first bevel gear 140 and the second bevel gear 142, and air is sucked and discharged during the extension and retraction of the piston block 115, so that the air is compressed, so that the airflow discharged from the compression cylinder 114 is greater than the airflow inside the vacuum pump body 110, so that the airflow cleans the dust on the turbine blades 113 and the inner wall of the vacuum pump body 110;

[0044] Moreover, by installing the first gear 121 on the rotating shaft of the driving motor 112, the inner wall of the vacuum pump body 110 and the turbine blades 113 can be cleaned while the turbine blades 113 draw air from the outside, thereby removing dust in time, keeping the interior of the vacuum pump body 110 clean, reducing the possibility of dust accumulation, and extending the use time of the equipment.

[0045] Embodiment 2: This embodiment is intended to solve the problem that dust may accumulate and adhere to the inner wall of the vacuum pump body due to long-term use, but the cleaning gas is relatively dispersed, so the cleaning effect is not good. This embodiment is an improvement made on the basis of embodiment 1. For details, please refer to Figure 1-Figure 9 In a specific implementation, an annular block 165 is installed on the outer side of the compression cylinder 114, and an air inlet and an air outlet are provided on the annular block 165. The air inlet is communicated with the air inlet pipe 150, and the air outlet is communicated with the air outlet pipe 151. A connecting ring 170 is rotatably installed on the outer side of the annular block 165, and an air transfer cavity 171 is provided inside the connecting ring 170. The air transfer cavity 171 is communicated with the air outlet pipe 151 through the air outlet hole, so that the gas discharged from the air outlet pipe 151 reaches the inside of the air transfer cavity 171 through the connecting ring 170, and is connected to the jet pipe 180 through a connecting pipe 172 installed on the side of the air transfer cavity 171. Therefore, in the process of the compression cylinder 114 discharging the gas, the gas can be ejected through the jet pipe 180, so as to achieve the effect of concentrating the airflow discharged from the compression cylinder 114, minimize the impact of the airflow on the normal use of the vacuum pump body 110, and blow off the dust adsorbed on the surface of the turbine blade 113.

[0046] A rotating cylinder 160 is installed on the outside of the compression cylinder 114, and a linkage gear 161 is provided on the outside of the rotating cylinder 160. The rotating cylinder 160 is fixedly connected to the first rotating shaft 123. A track groove 162 is provided on the filter plate 111, and the track groove 162 is set as an annular groove. A sliding rod 163 is slidably installed inside the track groove 162, and a driving gear 164 is fixedly installed on the sliding rod 163. The driving gear 164 is meshed with the linkage gear 161. A groove 173 is provided on the driving gear 164, and a support rod 174 is installed inside the groove 173. The cleaning block 130 is rotatably installed on the support rod 174.

[0047] See Figure 2 , Figure 3 , Figure 4 and Figure 5 In a specific implementation, the rotating cylinder 160 is driven to rotate during the rotation of the first rotating shaft 123. During the rotation of the rotating cylinder 160, the linkage gear 161 is used to drive the driving gear 164 meshing therewith to rotate. At the same time, the driving gear 164 is cooperated with the sliding rod 163 and the track groove 162, so that the driving gear 164 rotates around the rotating cylinder 160, so that the concentrated airflow is used to clean a large area of ​​the vacuum pump body 110 with the rotating cylinder 160 as the center, so that the cleaning effect is more uniform and comprehensive. At the same time, the concentrated airflow can quickly blow away dust and impurities from the inner wall of the vacuum pump body 110 and the turbine blades 113, thereby shortening the cleaning time and improving work efficiency.

[0048] In this embodiment: by driving the gear 164, the cleaning block 130, the connecting ring 170, the annular block 165 and the jet pipe 180, during the exhaust pipe exhaust process, the gas reaches the inside of the gas transmission chamber 171 through the cooperation of the annular block 165 and the connecting ring 170, and is ejected through the jet pipe 180, achieving the effect of concentrated airflow injection, minimizing the impact of the airflow on the normal use of the vacuum pump body 110, and can also blow off the dust adsorbed on the surface of the turbine blade 113; not only that, by rotating the cylinder 160, the linkage gear 161, the driving gear 164, the cleaning block 130, the connecting ring 170, the annular block 165 and the jet pipe 180, the gas reaches the inside of the gas transmission chamber 171 through the cooperation of the annular block 165 and the connecting ring 170, and is ejected through the jet pipe 180, achieving the effect of concentrated airflow injection, minimizing the impact of the airflow on the normal use of the vacuum pump body 110, and can also blow off the dust adsorbed on the surface of the turbine blade 113; The cooperation of gear 164 drives the rotating cylinder 160 to rotate during the rotation of the first rotating shaft 123. At the same time, the rotating cylinder 160 utilizes the linkage gear 161 provided on the main body to engage with the driving gear 164. At the same time, the driving gear 164 utilizes the restrictions of the sliding rod 163 and the track groove 162 to make the driving gear 164 rotate around the rotating cylinder 160, thereby realizing concentrated airflow jet cleaning with the rotating cylinder 160 as the center. This can not only minimize the impact of airflow on the normal use of the vacuum pump body 110, but also blow off the dust adsorbed on the surface of the turbine blade 113.

[0049] Embodiment 3: This embodiment is intended to solve the problem that although the gas can rotate with the driving gear 164, the sweeping range of the airflow is limited, resulting in reduced cleaning effect. This embodiment is an improvement made on the basis of embodiment 2. For details, please refer to Figure 1-Figure 9 A torsion spring 175 is installed between the support rod 174 and the cleaning block 130, and a connecting ring 190 is installed inside the vacuum pump body 110. The connecting ring 190 includes an arc groove 192 and a protrusion 191. There are a plurality of arc grooves 192 and protrusions 191, and the plurality of protrusions 191 and the plurality of arc grooves 192 are arranged in a ring array. In the process of driving the gear 164 to rotate, the cleaning block 130 and the connecting ring 190 are slidably matched, and the connecting pipe 172 is configured as a bellows.

[0050] It should be noted that the cleaning block 130 is affected by the torsion spring 175 . When the cleaning block 130 is not restricted, the cleaning block 130 is reset, and the end thereof is oriented close to the inner wall of the vacuum pump body 110 .

[0051] See Figure 7 and Figure 8 In a specific implementation, in the process of driving the gear 164 to rotate, the end of the cleaning block 130 contacts the connecting ring 190. When the cleaning block 130 slides to the arc groove 192, the cleaning block 130 is not restricted, so the end of the cleaning block 130 is close to the inner wall of the vacuum pump body 110. When the cleaning block 130 slides to the protrusion 191, it is restricted by the protrusion 191. Therefore, the protrusion 191 pushes the cleaning block 130, so that the cleaning block 130 rotates on the support rod 174. Therefore, the direction of the cleaning block 130 ejecting the airflow is restricted, thereby realizing the swinging effect of the cleaning block 130 in the process of ejecting the airflow, further improving the cleaning effect.

[0052] In this embodiment: through the cooperation of the protrusion 191, the arc groove 192 and the cleaning block 130, in the process of driving the gear 164 to rotate, the end of the cleaning block 130 cooperates with the connecting ring 190, and when the cleaning block 130 slides to the arc groove 192, the cleaning block 130 is not restricted, so the end of the cleaning block 130 is close to the inner wall of the vacuum pump body 110, and when the cleaning block 130 slides to the end of the protrusion 191, the protrusion 191 will push the cleaning block 130 to rotate on the support rod 174, thereby changing the direction of the cleaning nozzle 181, so that the cleaning nozzle 181 can spray and clean the inner wall of the vacuum pump body 110 from multiple angles, ensuring that the cleaning effect is more thorough and uniform. In addition, the cleaning block 130 can flexibly adjust its position and direction according to the changes of the protrusion 191 and the arc groove 192 during the sliding process, adapt to inner walls of different shapes and structures, and improve the flexibility and applicability of cleaning.

[0053] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0054] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A magnetic levitation vacuum pump with a self-cleaning system, comprising a vacuum pump body (110) and a filter plate (111) mounted on the vacuum pump body (110), a drive motor (112) being mounted inside the vacuum pump body (110), and a turbine blade (113) being mounted on the drive motor (112), characterized in that: A compression cylinder (114) for storing air is installed inside the vacuum pump body (110), a piston block (115) for compressing air is slidably installed inside the compression cylinder (114), a driving mechanism (120) for driving the piston block (115) to operate is installed inside the vacuum pump body (110), a cleaning block (130) is installed inside the vacuum pump body (110), the cleaning block (130) is used to clean the inside of the vacuum pump body (110), and the cleaning block (130) is communicated with the inside of the compression cylinder (114).

2. A magnetic levitation vacuum pump with a self-cleaning system according to claim 1, characterized in that: The driving mechanism (120) comprises a first gear (121) mounted on the rotating shaft of the driving motor (112), a second gear (122) mounted inside the vacuum pump body (110), and a first rotating shaft (123) rotatably mounted on the side of the compression cylinder (114), the first gear (121) meshing with the second gear (122), a support plate (124) mounted inside the vacuum pump body (110), the second gear (122) rotatably mounted on the side of the support plate (124), a second rotating shaft (125) mounted on the side of the second gear (122), and a transmission belt group (131) mounted between the first rotating shaft (123) and the second rotating shaft (125).

3. The magnetic levitation vacuum pump with a self-cleaning system according to claim 2, characterized in that: A first bevel gear (140) is installed at the end of the first rotating shaft (123); a linkage rod (141) is rotatably installed inside the compression cylinder (114); a second bevel gear (142) is installed on the linkage rod (141); the second bevel gear (142) is meshed with the first bevel gear (140); two rotating disks (143) are installed on the linkage rod (141); a connecting column (144) is eccentrically installed between the two rotating disks (143); a push rod (145) is rotatably installed on the connecting column (144); and the push rod (145) is connected to the piston block (115).

4. The magnetic levitation vacuum pump with a self-cleaning system according to claim 2, characterized in that: An air inlet pipe (150) and an air outlet pipe (151) are symmetrically mounted on the side of the compression cylinder (114); an air inlet valve (152) is mounted inside the air inlet pipe (150); and an air outlet valve (153) is mounted inside the air outlet pipe (151).

5. The magnetic levitation vacuum pump with a self-cleaning system according to claim 4, characterized in that: A rotating cylinder (160) is installed on the outside of the compression cylinder (114), and a linkage gear (161) is installed on the outside of the rotating cylinder (160). The rotating cylinder (160) is fixedly connected to the first rotating shaft (123). A track groove (162) is provided on the filter plate (111), and a sliding rod (163) is slidably installed inside the track groove (162). A driving gear (164) is installed on the sliding rod (163), and the driving gear (164) is meshed with the linkage gear (161).

6. The magnetic levitation vacuum pump with a self-cleaning system according to claim 5, characterized in that: An annular block (165) is mounted on the outside of the compression cylinder (114); the annular block (165) is in clearance fit with the air inlet pipe (150); the annular block (165) is connected to the air outlet pipe (151); a connecting ring (170) is rotatably mounted on the outside of the annular block (165); an air transfer cavity (171) is provided inside the connecting ring (170); the air transfer cavity (171) is in communication with the air outlet pipe (151); and a connecting pipe (172) is mounted on the side of the air transfer cavity (171).

7. The magnetic levitation vacuum pump with a self-cleaning system according to claim 6, characterized in that: The driving gear (164) is provided with a groove (173), a support rod (174) is installed inside the groove (173), the cleaning block (130) is rotatably installed on the support rod (174), a torsion spring (175) is installed between the support rod (174) and the cleaning block (130), an air jet pipe (180) is provided inside the cleaning block (130), the air jet pipe (180) is connected to the connecting pipe (172), a cleaning nozzle (181) is installed on the cleaning block (130), and the cleaning nozzle (181) is communicated with the air jet pipe (180).

8. The magnetic levitation vacuum pump with a self-cleaning system according to claim 5, characterized in that: A connecting ring (190) is installed inside the vacuum pump body (110), and the connecting ring (190) is divided into an arc groove (192) and a protrusion (191).

9. The magnetic levitation vacuum pump with a self-cleaning system according to claim 8, characterized in that: A plurality of the arc-shaped grooves (192) and the protrusions (191) are distributed, and the plurality of the protrusions (191) and the plurality of the arc-shaped grooves (192) form a ring array.

10. The magnetic levitation vacuum pump with a self-cleaning system according to claim 6, characterized in that: The connecting pipe (172) is configured as a corrugated pipe.

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