Arc suppression method, device and storage medium for vacuum coating device

Abstract

The present application provides an arc suppression method, device and storage medium for a vacuum coating device, and relates to the field of power electronics technology; a plurality of different types of power supplies are arranged on the vacuum coating device, and the frequency parameters of each power supply of the same type are different from each other; the method comprises: in response to an arc suppression trigger signal output by at least one physical input channel in a high-speed input / output interface, sampling the arc suppression trigger signal to obtain an arc suppression pulse width value; when it is determined that the arc suppression pulse width value indicates that there is a power supply on the vacuum coating device that meets a preset arc suppression condition, within a target arc suppression period, arc suppression pulse signals are synchronously sent to each corresponding power supply through each physical output channel of the high-speed input / output interface; thereby, in a scenario where multiple different power supplies are used for coating, each power supply can be synchronously controlled to perform arc suppression operations, thereby ensuring the consistency of the coating operation and improving the yield rate of the finished coating of the workpiece.

Description

Technical Field

[0001] The present application relates to the field of power electronics technology, and in particular to an arc suppression method, device and storage medium for a vacuum coating device. Background Art

[0002] A vacuum coating device is a device that uses vacuum coating technology to coat workpieces. During the coating process using vacuum coating technology, charged particles will continue to accumulate on the surface of the workpiece, and a barrier layer with a high potential will slowly form. Once the barrier layer is broken down, the workpiece will be short-circuited, that is, arcing will occur. Arcing will instantly generate huge energy, so arc suppression control is required during the coating process. However, in actual applications, there are multiple power supplies required for workpiece coating, and the operating frequency of each power supply is different, so each power supply needs to be managed and controlled independently. Since each power supply is controlled independently of each other, after one of the power supplies has an arcing phenomenon, although the power supply can achieve arc suppression control, the remaining power supplies are still working normally, which leads to poor consistency in the quality of the coating on the workpiece and low quality of the workpiece product. Therefore, there is an urgent need for an arc suppression method for a vacuum coating device that can improve the yield rate of the finished product of the workpiece coating. Summary of the invention

[0003] The main purpose of the embodiments of the present application is to provide an arc suppression method, equipment and storage medium for a vacuum coating device, which can improve the yield rate of finished workpiece coating products.

[0004] To achieve the above-mentioned purpose, a first aspect of an embodiment of the present application provides an arc suppression method for a vacuum coating device, wherein the vacuum coating device is provided with a plurality of different types of power supplies, at least one power supply of each type is provided, and the frequency parameters of the power supplies of the same type are different from each other; the method comprises: In response to an arc suppression trigger signal output by at least one physical input channel in the high-speed input / output interface, the arc suppression trigger signal is sampled to obtain an arc suppression pulse width value; wherein the physical input channel is set in one-to-one correspondence with each of the power supplies; When it is determined that the arc suppression pulse width value indicates that there is a power supply on the vacuum coating device that meets a preset arc suppression condition, a target arc suppression period is obtained; During the target arc suppression period, arc suppression pulse signals are synchronously sent to each of the power supplies through each physical output channel of the high-speed input / output interface; wherein the high-speed input / output interface is provided with a physical output channel corresponding one-to-one to each of the power supplies.

[0005] To achieve the above-mentioned purpose, the second aspect of the embodiment of the present application proposes an arc suppression device for a vacuum coating device, wherein the vacuum coating device is provided with a plurality of different types of power supplies, at least one power supply of each type is provided, and the frequency parameters of the power supplies of the same type are different from each other; the arc suppression device comprises: A high-speed input / output interface, wherein the high-speed input / output interface is provided with a physical output channel and a physical input channel corresponding to each of the power supplies one by one, and the physical output channel and the physical input channel are isolated from each other; A control module, wherein the control module executes the arc suppression method of the vacuum coating device according to any one of the first aspects.

[0006] To achieve the above-mentioned purpose, the third aspect of an embodiment of the present application proposes an electronic device, which includes a memory and a processor, the memory stores a computer program, and when the processor executes the computer program, it implements the arc suppression method of the vacuum coating device described in any one of the first aspects.

[0007] To achieve the above-mentioned purpose, the fourth aspect of an embodiment of the present application proposes a computer-readable storage medium, which stores a computer program. When the computer program is executed by a processor, it implements the arc suppression method of the vacuum coating device described in any one of the first aspects.

[0008] The arc suppression method, device and storage medium of the vacuum coating device proposed in the present application monitor the arc suppression trigger signal of the high-speed input and output interface and sample the arc suppression trigger signal to obtain the arc suppression pulse width value of the corresponding power supply, so that it can judge whether to perform arc suppression control based on the collected arc suppression pulse width value. When it is determined that arc suppression control is required, an arc suppression pulse signal is generated within the target arc suppression period and the arc suppression pulse signal is synchronously sent to each power supply through the high-speed input and output interface. After receiving the arc suppression pulse signal, each power supply stops working. At this time, each power supply is in a stopped working state within the target arc suppression period. After the target arc suppression period, the high-speed input and output interface no longer outputs the arc suppression pulse signal, and each power supply resumes the working state, thereby realizing the synchronous control of each independent power supply. Therefore, compared with the related art, the embodiment of the present application can synchronously control each power supply to perform arc suppression operation in the scenario of using multiple different power supplies for coating when there is at least one power supply generating an arcing phenomenon, thereby ensuring that each power supply can be started and stopped synchronously, ensuring the consistency of the coating operation, at this time, the consistency of the coating thickness on the surface of the workpiece is higher, and therefore, the yield rate of the finished coating of the workpiece is higher. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 A schematic diagram of an embodiment of a vacuum coating device to which an arc suppression method for a vacuum coating device provided in the present application is applied; Figure 2 A schematic diagram of the structure of an arc suppression device for a vacuum coating device provided in the present application; Figure 3 A system schematic diagram of an application scenario of an arc suppression device for a vacuum coating device provided in the present application; Figure 4 A schematic diagram of the circuit structure of an arc suppression device for a vacuum coating device provided in the present application; Figure 5 A schematic flow chart of an arc suppression method for a vacuum coating device provided in the present application; Figure 6 This is a hardware structure diagram corresponding to the arc suppression method of a vacuum coating device provided in this application.

[0010] Reference numerals: Vacuum coating device 100, chamber 110, cathode power supply 120, ion source power supply 130, bias power supply 140, Arc suppression device 200, high-speed input and output interface 210, control module 220, arc suppression pulse enabling circuit 221, pulse width sampling circuit 222, pulse forming circuit 223, comparison circuit 224, pulse width sampling unit 230, pulse width comparator 240, arc suppression pulse width acquisition circuit 250, power supply pulse frequency unit 251, divider 252, arc suppression pulse width register 253, arc suppression pulse width comparator 254, arc suppression pulse width unit 255, Host computer 300. DETAILED DESCRIPTION

[0011] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0012] In the description of the present application, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0013] In the description of this application, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0014] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.

[0015] The vacuum coating device is a device that uses vacuum coating technology to coat the workpiece. Among them, the vacuum coating technology converts the coating material into gaseous ions through a physical process, and then deposits the vaporized ions on the surface of the substrate to form a high-quality film. The coating formed by the vacuum coating technology has good adhesion performance, and the diffusion layer formed during ion deposition can enhance the bonding strength between the film layer and the substrate. It has the characteristics of strong wrapping ability and is particularly suitable for workpieces with structures such as inner holes and grooves that are difficult to plate by traditional methods. At the same time, the finished workpiece formed by the vacuum coating technology has excellent characteristics such as good coating quality, dense structure, no pinholes, no bubbles, and uniform thickness. The ion plating process of the vacuum coating technology uses its own ion bombardment cleaning function to simplify the workpiece cleaning process. Therefore, vacuum coating technology plays an increasingly important role in modern industry due to its high efficiency, environmental protection and versatility. However, in the coating process using vacuum coating technology, charged particles will continue to accumulate on the surface of the workpiece, slowly forming a potential barrier layer with a high potential. Once the potential barrier layer is broken down, it will cause the workpiece to short-circuit, that is, arcing will occur. Arcing will instantly generate huge energy. Therefore, arc suppression control is required during the coating process. However, in actual applications, the operating frequencies of multiple power supplies required for workpiece coating are different, and each power supply needs to be independently controlled. After one of the power supplies has an arcing phenomenon, even if the power supply can achieve arc suppression control, since the other power supplies are still working normally, this will cause the coating thickness on the surface of the workpiece to be inconsistent, thereby affecting the coating quality of the workpiece. Therefore, there is an urgent need for an arc suppression method for a vacuum coating device that can improve the yield rate of workpiece coating products. Based on this, the embodiment of the present application proposes an arc suppression method, device and storage medium for a vacuum coating device that can improve the yield rate of workpiece coating products.

[0016] It is understandable that the vacuum coating device 100 used in the embodiment of the present application is provided with a plurality of different types of power supplies, at least one power supply of each type is provided, and the frequency parameters of the same type of power supplies are different from each other.

[0017] The embodiment of the present application does not limit the type of power supply on the vacuum coating device 100, the number of power supplies of the same type, or the frequency parameters of each power supply. Those skilled in the art can selectively set the parameters according to actual needs. The frequency parameters include the operating frequency, that is, the frequency of the pulses used by each power supply for coating.

[0018] For example, refer to Figure 1 As shown, the cavity 110 of the vacuum coating device 100 is provided with electrodes of three types of power supplies, namely, a cathode power supply 120, an ion source power supply 130 and a bias power supply 140; the vacuum coating device 100 is connected to the cathode power supply 120, the ion source power supply 130 and the bias power supply 140 through each electrode, wherein the cathode power supply 120 acts on the coating target material to make the atoms or molecules on the surface of the target material detach and deposit on the surface of the workpiece to form a thin film, and different targets need to be equipped with power supplies with different process parameters (such as voltage and current); the ion source power supply 130 is used in the etching stage of the coating, and different voltages and currents also need to be set. The bias power supply 140 provides a bias electric field during the coating process to ensure the stability and reliability of the coating process, wherein the number of cathode power supplies can be arranged in multiple according to the coating process and coating efficiency, and the cathode power supplies 120 in this embodiment are arranged in four.

[0019] Understandably, referring to Figure 2 As shown, the arc suppression device 200 for the vacuum coating device 100 provided in the embodiment of the present application includes: A high-speed input / output interface 210, wherein the high-speed input / output interface 210 is provided with physical output channels and physical input channels corresponding to each power supply one by one, and the physical output channels and the physical input channels are isolated from each other; The control module 220 executes: In response to an arc suppression trigger signal output by at least one physical input channel in the high-speed input / output interface 210, sampling the arc suppression trigger signal to obtain an arc suppression pulse width value; When it is determined that the arc suppression pulse width value indicates that there is a power supply on the vacuum coating device 100 that meets the preset arc suppression condition, a target arc suppression period is obtained; In the target arc suppression period, arc suppression pulse signals are synchronously sent to each power supply through each physical output channel of the high-speed input and output interface 210 .

[0020] The arc suppression pulse signal is a predefined pulse signal for arc suppression. The embodiment of the present application does not limit the period and frequency of the arc suppression pulse signal, and those skilled in the art can limit it according to actual needs. The sending and stopping of the arc suppression pulse signal are controlled by the target arc suppression period. The arc suppression pulse signal can be generated by a pulse generating circuit. The embodiment of the present application does not limit the specific structure of the pulse generating circuit, and those skilled in the art can selectively set it according to actual needs.

[0021] It is understandable that in the vacuum coating device 100, each power supply has its own power management module, which can be used to identify whether arcing occurs and generate a pulse signal for coating. When the power management module determines that arcing occurs, it will output an arc suppression trigger signal to the control module 220 through the corresponding physical input channel in the high-speed input and output interface 210. This application does not involve improvements to the power management modules of the power supplies in the vacuum coating device 100, so no further details will be given here.

[0022] In some embodiments, the control module 220 responds to the arc suppression trigger signal based on periodic monitoring of the level signal state of the high-speed input and output interface 210, such as when the high-speed input and output interface 210 presents a high level (that is, at least one power source generates an arc and triggers an arc suppression trigger signal); at this time, the control module 220 samples the arc suppression trigger signal of each physical input channel to obtain the arc suppression pulse width value corresponding to each power source. In other embodiments, the control module 220 directly responds based on the arc suppression trigger signal of each physical input channel, that is, when the control module 220 detects the presence of an arc suppression pulse signal in a physical input channel, it samples the detected arc suppression pulse signal to obtain the arc suppression pulse width value of the corresponding power source.

[0023] The high-speed input-output interface 210 is a physical interface, and its physical input channel and physical output channel can be set to be isolated from each other, thereby reducing the mutual interference between the input and output. The mutual isolation of the physical input channel and the physical output channel can be physical isolation or isolation through a bidirectional isolation circuit. The high-speed input-output interface 210 can be used to realize the signal interaction between the control module 220 and the vacuum coating device 100. Those skilled in the art can select different models of high-speed input-output interfaces 210 according to the timeliness of the response.

[0024] The arc suppression pulse width value is the duration of an arc suppression trigger signal for arc suppression control generated when the corresponding power supply detects the generation of an arc.

[0025] The arc suppression condition represents the setting condition of the arc suppression pulse width value when each power supply in the vacuum coating device 100 needs to synchronously suppress arc to meet the coating requirements. Those skilled in the art can selectively set it according to actual needs. For example, the arc suppression condition is set to an arc suppression pulse width value greater than a preset minimum pulse width value; the minimum pulse width value can be set as needed.

[0026] The embodiment of the present application does not limit how to set the target arc suppression period, and those skilled in the art can selectively set it according to actual needs. For example, it can be set to the largest pulse period among multiple power supplies, or the largest pulse period can be selected from the power supply that generates the arc suppression trigger signal as the target arc suppression period, or it can be designed based on a proportional multiple of the largest pulse period.

[0027] The embodiment of the present application samples the arc suppression trigger signal output by the physical input channel in the high-speed input and output interface 210 to obtain the corresponding arc suppression pulse width value of each power supply, and then the arc suppression pulse width value of each power supply can be centrally managed and synchronous arc suppression can be performed. When the duration of sending the arc suppression pulse signal reaches the duration corresponding to the target arc suppression period, each power supply resumes normal operation, so that each power supply in the same vacuum coating device 100 can achieve synchronous arc suppression and synchronous operation, further ensuring the consistency of the coating.

[0028] For example, Figure 4 As shown, the high-speed input and output interface 210 is provided with a plurality of physical input channels and physical output channels, and the first end of each physical input channel is respectively connected one-to-one with the magnetron sputtering power supply 1 to the magnetron sputtering power supply n (n is a positive integer greater than or equal to 1) and the ion source power supply 1 to the ion source power supply m (m is a positive integer greater than or equal to 1) in the vacuum coating device 100; the first end of each physical output channel is respectively connected one-to-one with the magnetron sputtering power supply 1 to the magnetron sputtering power supply n and the ion source power supply 1 to the ion source power supply m, wherein the magnetron sputtering power supply 1 to the magnetron sputtering power supply n is the cathode power supply 120, and the control module 220 is connected with the second end of each physical input channel and each physical output channel.

[0029] Understandably, referring to Figure 4 As shown, the control module 220 includes an arc suppression pulse enabling circuit 221, a pulse width sampling circuit 222, a pulse forming circuit 223 and a comparison circuit 224; wherein, The arc suppression pulse enabling circuit 221 is configured to send an enabling signal or a disabling signal to the pulse width sampling circuit 222 , the pulse forming circuit 223 and the comparison circuit 224 ; The pulse width sampling circuit 222 is configured to, in response to the arc suppression trigger signal output by at least one physical input channel in the high-speed input / output interface 210, sample the arc suppression trigger signal to obtain the arc suppression pulse width value when receiving the enable signal; The comparison circuit 224 is configured to obtain a target arc suppression period when it is determined that the arc suppression pulse width value indicates that there is a power supply on the vacuum coating device 100 that meets the preset arc suppression condition; The pulse forming circuit 223 is configured to synchronously send arc suppression pulse signals to each power supply through each physical output channel of the high-speed input and output interface 210 within a target arc suppression period when receiving the enable signal.

[0030] The arc suppression pulse enabling circuit 221 can send an enabling signal or a disabling signal to the pulse width sampling circuit 222 , the pulse forming circuit 223 and the comparison circuit 224 according to a pre-designed timing sequence.

[0031] The embodiment of the present application does not limit the specific circuit structure of the pulse width sampling circuit 222, the pulse forming circuit 223 and the comparison circuit 224. Those skilled in the art can selectively set them according to actual needs, wherein the arc suppression pulse enabling circuit 221, the pulse width sampling circuit 222 and the pulse forming circuit 223 can be composed of existing chips or discrete components. The pulse width sampling circuit 222 is used to sample the arc suppression trigger signal output by each physical input channel to obtain a one-to-one corresponding arc suppression pulse width value. The pulse forming circuit 223 is used to generate a pulse signal to synchronously send an arc suppression pulse signal to each power supply through each physical output channel of the high-speed input and output interface 210. The comparison circuit 224 can use comparators, registers and other circuits to realize the judgment of arc suppression conditions and the extraction of target arc suppression period.

[0032] The pulse width sampling circuit 222 can convert the arc suppression pulse width value into an arc suppression pulse width value and send it to the comparison circuit 224 .

[0033] Understandably, referring to Figure 4 As shown, the comparison circuit 224 includes: A pulse width sampling unit 230, wherein a first data terminal of the pulse width sampling unit 230 is connected to the pulse width sampling circuit 222, and an enable terminal of the pulse width sampling unit 230 is connected to the arc suppression pulse enable circuit 221; A pulse width comparator 240, the pulse width comparator 240 is connected to the second data terminal of the pulse width sampling unit 230; the pulse width comparator 240 is configured to determine whether there is a power supply on the vacuum coating device 100 that meets the preset arc suppression condition; The arc suppression pulse width acquisition circuit 250 is connected to the output end of the pulse width comparator 240 to obtain the target arc suppression period when the pulse width comparator 240 determines that the arc suppression pulse width value represents that there is a power supply on the vacuum coating device 100 that meets the preset arc suppression condition.

[0034] The pulse width comparator 240 can compare the data input by the pulse width sampling unit 230 with a preset minimum pulse width value, and further determine whether there is a power supply on the vacuum coating device 100 that meets the preset arc suppression condition.

[0035] Taking the arc suppression condition as being set to an arc suppression pulse width greater than or equal to a minimum pulse width value as an example, the preset minimum pulse width value is input into the pulse width comparator 240 for storage, and by comparing the actual arc suppression pulse width values ​​of each power supply stored in the pulse width sampling unit 230 with the minimum pulse width value, it can be determined whether there is a power supply on the vacuum coating device 100 that meets the preset arc suppression condition.

[0036] It is understandable that the frequency parameter includes the pulse operating frequency; the arc suppression pulse width acquisition circuit 250 includes: A power supply pulse frequency unit 251, the power supply pulse frequency unit 251 is configured to store the pulse operating frequency of each power supply; the power supply pulse frequency unit 251 is connected to the output end of the pulse width comparator 240, and the power supply pulse frequency unit 251 is synchronized with the transmission source register address configured by the pulse width sampling unit 230, so that the power supply corresponding to the pulse operating frequency obtained from the power supply pulse frequency unit 251 and the power supply used for arc suppression condition judgment in the pulse width comparator 240 are the same; A divider 252, wherein an enable terminal of the divider 252 is connected to the arc suppression pulse enable circuit 221, and the divider 252 is connected to the output terminal of the power supply pulse frequency unit 251, so as to convert the pulse operating frequency output by the power supply pulse frequency unit 251 into a candidate period after receiving an enable signal from the arc suppression pulse enable circuit 221; The arc suppression pulse width register 253, the enable end of the arc suppression pulse width register 253 is connected to the arc suppression pulse enable circuit 221, and the arc suppression pulse width register 253 is connected to the divider 252 to store the candidate period calculated by the divider 252 after receiving the enable signal of the arc suppression pulse enable circuit 221; The arc suppression pulse width comparator 254, the enable end of the arc suppression pulse width comparator 254 is connected to the arc suppression pulse enable circuit 221, and the arc suppression pulse width comparator 254 is connected to the arc suppression pulse width register 253, so as to determine the target arc suppression period according to the candidate period after receiving the enable signal of the arc suppression pulse enable circuit 221.

[0037] Among them, the embodiments of the present application do not limit the specific composition of the power pulse frequency unit 251 and the pulse width sampling unit 230, and electronic devices with reading functions can be selected. For example, in some embodiments, the pulse width sampling unit 230 and the power pulse frequency unit 251 can both use DMA transmission to process and transmit data, and the pulse width sampling unit 230 and the power pulse frequency unit 251 are both set as DMA memories. Among them, the embodiments of the present application do not limit the model of the DMA memory, and those skilled in the art can selectively set it according to actual needs.

[0038] The embodiment of the present application does not limit the specific models of the arc suppression pulse width comparator 254 and the pulse width comparator 240, and those skilled in the art can selectively set them according to actual needs.

[0039] The embodiment of the present application does not limit how to determine the target arc suppression period according to the candidate periods. For example, the largest candidate period may be selected as the target arc suppression period, or the smallest candidate period may be selected as the target arc suppression period.

[0040] Understandably, referring to Figure 5 As shown, according to an arc suppression method of a vacuum coating device 100 provided in the present application, a plurality of different types of power supplies are provided on the vacuum coating device 100, at least one power supply of each type is provided, and the frequency parameters of the power supplies of the same type are different from each other; the method comprises: Step S100, in response to an arc suppression trigger signal output by at least one physical input channel in the high-speed input / output interface 210, sampling the arc suppression trigger signal to obtain an arc suppression pulse width value; wherein the physical input channel and each power supply are set in one-to-one correspondence; Step S200, obtaining a target arc suppression period when it is determined that the arc suppression pulse width value indicates that there is a power supply on the vacuum coating device 100 that meets a preset arc suppression condition; Step S300: within the target arc suppression period, arc suppression pulse signals are synchronously sent to each power supply through each physical output channel of the high-speed input / output interface 210; wherein the high-speed input / output interface 210 is provided with a physical output channel corresponding to each power supply one by one.

[0041] Therefore, by monitoring the arc suppression trigger signal of the high-speed input and output interface 210 and sampling the arc suppression trigger signal to obtain the arc suppression pulse width value of the corresponding power supply, it is possible to determine whether to perform arc suppression control based on the collected arc suppression pulse width value. When it is determined that arc suppression control is required, an arc suppression pulse signal is generated within the target arc suppression period and the arc suppression pulse signal is synchronously sent to each power supply through the high-speed input and output interface 210. Each power supply stops working after receiving the arc suppression pulse signal. At this time, each power supply is in a stopped working state within the target arc suppression period. After the target arc suppression period, the high-speed input and output interface 210 no longer outputs the arc suppression pulse signal, and each power supply resumes working state, thereby realizing synchronous control of each independent power supply. Therefore, compared with the related art, the embodiment of the present application can perform synchronous arc suppression management on each power supply in the scenario of using multiple different power supplies for coating, ensure the consistency of the coating operation, and make the degree of consistency of the coating thickness on the surface of the workpiece higher, thereby improving the yield rate of the finished coating of the workpiece.

[0042] The arc suppression trigger signal is a signal generated by the power management module corresponding to each power supply when an arcing phenomenon is identified.

[0043] The embodiment of the present application does not limit the physical input channels that generate the arc suppression trigger signal at the same time. The embodiment of the present application can sample each physical input channel after detecting the arc suppression trigger signal, so as to monitor the entire port status of the high-speed input and output interface, and the response efficiency is higher. The embodiment of the present application can also monitor each physical input channel.

[0044] The arc suppression condition represents the setting condition of the arc suppression pulse width value when each power supply needs to be triggered to suppress arc synchronously to meet the coating requirements. The setting condition can be set to the number of times the arc suppression pulse width value lasts or whether the value is greater than a preset threshold value to perform anti-shake settings to avoid too frequent arc suppression of each power supply. The arc suppression condition can be set dynamically through the host computer 300, or written through a configuration file or in the program code.

[0045] After receiving the arc suppression pulse signal, the power management module of each power supply will stop working. When the duration of continuously sending the arc suppression pulse signal is greater than or equal to the duration corresponding to the target arc suppression period, the power management module of each power supply will no longer receive the arc suppression pulse signal, and each power supply will recover synchronously.

[0046] In some embodiments, a bidirectional isolation circuit is provided in the high-speed input / output interface 210 to isolate the input signal from the output signal and improve the quality of the transmitted signal.

[0047] It is understood that the frequency parameter includes the pulse operating frequency; the target arc suppression period is determined by the following steps: Receive the pulse operating frequency of each power supply sent from the host computer 300; The target arc suppression period is determined according to the operating frequency of each pulse.

[0048] By determining the target arc suppression period in real time through each pulse working frequency, the arc suppression duration can be controlled more accurately, ensuring work efficiency while meeting arc suppression requirements.

[0049] It is understandable that the target arc suppression period is determined according to each pulse operating frequency, including: According to the arc suppression trigger signal, a candidate pulse operating frequency is determined from each pulse operating frequency; The candidate pulse operating frequencies are converted into pulse widths to obtain candidate periods corresponding to the candidate pulse operating frequencies; The largest candidate cycle among the candidate cycles is used as the target arc suppression cycle to reduce the frequency of shutting down the power supply.

[0050] Since the physical input channels in the high-speed input-output interface 210 correspond one-to-one to each power supply, after the arc suppression trigger signal is generated, the power supply that meets the arc suppression condition can be determined based on the arc suppression pulse width value of each physical input channel, thereby determining the pulse operating frequency corresponding to the power supply that meets the arc suppression condition as a candidate pulse operating frequency.

[0051] Exemplarily, taking a total of pulse operating frequencies 1 to n as an example, where the power supplies corresponding to pulse operating frequencies 1 and 3 have triggered arc suppression trigger signals and the corresponding arc suppression pulse width values ​​meet the arc suppression conditions, the pulse operating frequencies 1 and 3 are respectively converted into candidate cycles 1 and 3. When candidate cycle 1 is greater than candidate cycle 3, candidate cycle 1 is selected as the target arc suppression cycle, and when candidate cycle 1 is less than candidate cycle 3, candidate cycle 3 is selected as the target arc suppression cycle.

[0052] It is understood that the method further comprises: When an arc suppression pulse signal is generated, power supply information of a power supply corresponding to the arc suppression trigger signal is saved in a preset log file to update the arc suppression record in the log file; wherein the power supply information includes at least a frequency parameter; In response to the query request, the log file is queried according to the query request to obtain the target arc suppression record.

[0053] By saving the power supply information of the power supply corresponding to the arc suppression trigger signal into the log file, the target arc suppression record can be queried, and then the problems existing in the production process of the current product can be determined based on the arc suppression record, and then the process can be optimized. For example, if it is determined that the target material is the cause of frequent arcing, the target material can be replaced, etc.

[0054] For example, refer to Figures 3 to 5 The vacuum coating system of the embodiment of the present application is described as follows: Figure 3 As shown, the vacuum coating system includes a vacuum coating device 100, a host computer 300, and an arc suppression device 200 for the vacuum coating device 100; wherein the host computer 300 is communicatively connected with the vacuum coating device 100 and the arc suppression device 200, and a vacuum coating chamber 110 is provided with multiple plasma loads and multiple power supplies, and the multiple power supplies include multiple magnetron sputtering power supplies (cathode power supplies 120) and multiple ion source power supplies 130. Each magnetron sputtering power supply and each ion source power supply 130 are connected to a plasma load one by one. Figure 3 As shown, the vacuum coating device 100 is connected to the high-speed input and output interface 210 of the arc suppression device 200 through the communication interface inside each power supply; taking the pulse width sampling unit 230, the power pulse frequency unit 251 and the arc suppression pulse width unit 255 as an example, the working principle of the vacuum coating system is as follows: Figure 4 and Figure 5 As shown, the details are as follows: Step 1: Power on initialization: Reference Figure 4 As shown, after power-on, each unit inside the arc suppression device 200 is initialized by the driver program (such as the pulse width sampling unit 230 and the power pulse frequency unit 251 inside the arc suppression device 200 are initialized respectively, the transmission register in the pulse width sampling unit 230 points to the power arc suppression pulse width sampling register of the first path inside the pulse width sampling circuit 222; the power pulse frequency unit 251 transmission register points to the power pulse working frequency setting value register of the first path inside the transceiver circuit), and after 50ms, the arc suppression pulse enable circuit 221 inside the arc suppression device 200 outputs the enable signal EN1 of high level, and the transceiver circuit of the arc suppression device 200 starts to work and communicate with the host computer 300; Reference Figure 4 As shown, before the host computer 300 controls the system to work, the host computer 300 sends the pulse operating frequency of each power supply to multiple power supplies such as magnetron sputtering power supply 1~magnetron sputtering power supply n and ion source power supply 1~ion source power supply m via the communication bus, and the host computer 300 sends the pulse operating frequency of each power supply to the transceiver circuit of the arc suppression device 200 via the network interface.

[0055] Reference Figure 4 As shown, multiple power supplies including magnetron sputtering power supply 1 to magnetron sputtering power supply n, ion source power supply 1 to ion source power supply m receive pulse output frequency data from the host computer 300 via the communication bus; the arc suppression device 200 receives the pulse output frequency setting values ​​of each power supply sent by the host computer 300 through the transceiver circuit and the transceiver isolation circuit.

[0056] Reference Figure 4As shown, the internal driver of the arc suppression device 200 stores the pulse output frequency of each power supply into the internal register of the transceiver circuit; and stores the minimum pulse width value into the pulse width comparator 240 as the A channel preset value of the pulse width comparator 240, so as to determine whether the arc suppression pulse width value stored in the pulse width sampling unit 230 is greater than the minimum pulse width value.

[0057] Reference Figure 4 As shown, each power supply on the vacuum coating device 100 receives a power-on command and outputs pulses to plasma load 1 to plasma load n+m according to the pulse operating frequency set by the host computer 300.

[0058] Step 2: Synchronous arc suppression control: When an arc is generated in a load connected to one of the power supplies during operation, a detection circuit (ie, a power management module) inside the corresponding power supply outputs an arc suppression trigger signal to the arc suppression device 200 through a physical input channel on the corresponding high-speed input / output interface 210 .

[0059] After the arc suppression device 200 detects the presence of an arc suppression trigger signal, the EN7 enable terminal of the internal arc suppression pulse enable circuit 221 outputs a high-level enable signal to the pulse width sampling circuit 222, and the pulse width sampling circuit 222 starts to work, and collects arc suppression trigger signals from multiple power supplies through each physical input channel of the high-speed input and output interface 210. Specifically, the arc suppression trigger signal is converted into a pulse level signal by the bidirectional isolation circuit inside the high-speed input and output interface 210, and then transmitted to the pulse width sampling circuit 222; the pulse width sampling circuit 222 samples the pulse level signal to form an arc suppression pulse width value of 100-10000us, and writes the sampled arc suppression pulse width value into the register of the pulse width sampling circuit 222. At this time, Figure 5 The arc suppression pulse width value is obtained as shown in step S100.

[0060] After the EN7 enable terminal of the arc suppression pulse enable circuit 221 continuously outputs the enable signal for 10us, the driver of the arc suppression device 200 synchronizes the transfer source register addresses of the pulse width sampling unit 230 and the power supply pulse frequency unit 251, two DMA memories, so that the pulse width sampling unit 230 and the power supply pulse frequency unit 251 can respectively select the arc suppression pulse width value and the power supply pulse frequency value of the same power supply; after a delay of 10ns, the EN6 enable terminal of the arc suppression pulse enable circuit 221 outputs a high-level enable signal to the pulse width sampling unit 230 with a duty cycle of 50% at 1us as a working cycle, and the pulse width sampling unit 230 transmits the arc suppression pulse width values ​​of each power supply recorded in the internal pulse width sampling register of the pulse width sampling circuit 222 to the B channel of the pulse width comparator 240 in a time-sharing manner; the EN6 enable terminal of the arc suppression pulse enable circuit 221 outputs the arc suppression pulse width value of each power supply recorded in the internal pulse width sampling register of the pulse width sampling circuit 222 to the B channel of the pulse width comparator 240; the EN6 enable terminal of the arc suppression pulse enable circuit 221 outputs the arc suppression pulse width value of each power supply recorded in the internal pulse width sampling register of the pulse width sampling circuit 222 to the B channel of the pulse width comparator 240 The high-level enable signal output is delayed for 10ns and then converted to a low-level enable reset; then the EN5 enable terminal of the arc suppression pulse enable circuit 221 outputs an enable signal to the pulse width comparator 240 to make it work, and compares the preset minimum pulse width value in the A channel of the pulse width comparator 240 with the arc suppression pulse width value of a power supply from the pulse width sampling unit 230 in the B channel; when the B channel register value of the pulse width comparator 240 is greater than the A channel register value, the EN10 enable terminal of the pulse width comparator 240 outputs a high-level enable signal to the power pulse frequency unit 251, otherwise the EN10 enable terminal of the pulse width comparator 240 does not output a high-level enable signal to the power pulse frequency unit 251, wherein the power pulse frequency unit 251 does not work when the EN10 enable terminal outputs a low level, that is, by judging whether the arc suppression pulse width value is greater than the minimum pulse width value, with reference to the example Figure 5 The step S200 shown is to determine whether there is a power source that meets the preset arc suppression condition.

[0061] Since the transmission source register addresses configured in the pulse width sampling unit 230 and the power supply pulse frequency unit 251 have been synchronized, the two DMAs of the pulse width sampling unit 230 and the power supply pulse frequency unit 251 can respectively select the arc suppression pulse width value and the power supply pulse frequency value storage register of the same power supply; that is, when the power supply pulse frequency unit 251 is enabled, the power supply pulse frequency unit 251 can transmit the pulse frequency value of the corresponding power supply to the divider 252. After the EN5 enable terminal continuously outputs a high-level enable signal for 30ns, the EN5 enable terminal and the EN10 enable terminal both output a low-level enable reset; the EN4 enable terminal of the arc suppression pulse enable circuit 221 outputs a high-level enable signal to the divider 252 to enable it to work, and the received pulse frequency value is inverted by the divider 252 to obtain the corresponding first pulse width value.

[0062] The first pulse width value calculated by the divider 252 is written into the arc suppression pulse width register 253; the EN4 enable terminal of the arc suppression pulse enable circuit 221 continuously outputs a high-level enable signal for 10ns and then turns to a low-level enable reset, and at the same time, its EN3 enable terminal outputs an enable signal to the arc suppression width register 253, and the internal driver of the arc suppression device 200 writes the value in the arc suppression width register 253 into the A channel of the arc suppression pulse width comparator 254.

[0063] The EN3 enable terminal of the arc suppression pulse enable circuit 221 continuously outputs the enable signal for 10ns and then resets, and its EN2 enable terminal outputs the enable signal to the arc suppression pulse width comparator 254, and the arc suppression pulse width comparator 254 compares the pulse width values ​​of its own A and B channels; wherein, the initial value of the B channel in the arc suppression pulse width comparator 254 is 0, when the pulse width value in its A channel is greater than the pulse width value in B, the EN9 enable terminal of the arc suppression pulse width comparator 254 outputs the enable signal to the arc suppression pulse width unit 255, and the arc suppression pulse width unit 255 transmits the pulse width value in the A channel of the arc suppression pulse width comparator 254 to the register of the B channel, and cancels the original pulse width value in the register of its B channel, that is, the B channel of the arc suppression pulse width comparator 254 will retain the largest pulse width value after comparison. Then the DMA selection channels of the pulse width sampling unit 230 and the power pulse frequency unit 251 are incremented by +1, so that the pulse width sampling unit 230 polls the pulse widths of each power source recorded in the arc suppression pulse width register 253 in the pulse width sampling circuit 222. After each power source has been compared by the arc suppression pulse width comparator 254 (i.e., after one polling is completed), the E11 enable terminal of the arc suppression pulse enable circuit 221 outputs an enable signal to the arc suppression pulse width unit 255, and resets the enable signal of the EN2 enable terminal. The arc suppression pulse width unit 255 switches the transmission target and source registers, and successively transmits the pulse width values ​​in the B channel register of the arc suppression pulse width comparator 254 to the PWM pulse counting register of the PWM pulse forming circuit 223 as the arc suppression pulse setting value (i.e., the target arc suppression period).

[0064] After the pulse width value of channel B in the arc suppression pulse width register 253 is transmitted through the arc suppression pulse width unit 255, the arc suppression pulse enable circuit 221 resets the EN2 and EN11 enable signals, and then outputs the EN8 enable signal. After receiving the EN8 enable signal, the PWM pulse forming circuit 223 updates the PWM pulse count value according to the target arc suppression cycle, that is, changes the output pulse width of the PWM unit. The arc suppression pulse enable circuit 221 resets the EN8 enable signal after a 10ns delay. The PWM pulse forming circuit 223 outputs an arc suppression pulse signal based on the updated PWM pulse count value.

[0065] Since the PWM pulse forming circuit 223 corresponds one-to-one with the channels and physical output channels of the output isolation circuit of the bidirectional isolation circuit, the arc suppression function can be achieved after the arc suppression pulse signal output by the bidirectional isolation circuit is synchronously loaded to each power supply.

[0066] Among them, Figure 4 Each channel interface of the bidirectional isolation circuit shown is directly connected to the ARC interface circuit of the power supply. The bidirectional isolation circuit can isolate the output and serve as the input interface of each channel at the same time. After the arc suppression device 200 is turned on, since the high-speed input and output interface 210 is integrated with a bidirectional isolation circuit, when each physical input channel does not receive the arc suppression pulse trigger of the power supply, the high-speed input and output interface 210 presents a low level. When any one of the power supplies triggers the arc suppression pulse signal, the high-speed input and output interface 210 presents a high level, and is transmitted to the pulse width sampling circuit 222 after isolation and conversion by the bidirectional isolation circuit. It can be understood that the ARC interface level described in this example can be set to high level valid or low level valid according to actual needs, and it is not fixed that the high level is triggered valid.

[0067] Among them, the embodiment of the present application does not limit the models of the pulse width sampling unit 230, the power pulse frequency unit 251 and the arc suppression pulse width unit 255 when they are all set to DMA. The pulse width sampling unit 230, the power pulse frequency unit 251 and the arc suppression pulse width unit 255 can use the same model or different models.

[0068] It is understandable that the delays corresponding to EN1~EN11 can be selectively set according to actual needs, and the above is an example in this application.

[0069] Understandably, referring to Figure 6 As shown, an embodiment of the present application further provides an electronic device, including: at least one processor 601; At least one memory 602 is used to store at least one program, and when the at least one program is executed by at least one processor 601, the above method is implemented.

[0070] The memory 602 is a non-transient network system that can be used to store non-transient software programs and non-transient computer executable programs. In addition, the memory 602 may include a high-speed random access memory, and may also include a non-transient memory, such as at least one disk storage device, a flash memory device, or other non-transient solid-state storage device. In some embodiments, the memory 602 may optionally include a memory 602 remotely arranged relative to the processor 601, and these remote memories 602 may be connected to the processor 601 via a network. Examples of the above-mentioned network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0071] The memory 602 can be implemented in the form of a read-only memory (ROM), a static storage device, a dynamic storage device, or a random access memory (RAM). The memory 602 can store an operating system and other application programs. When the technical solution provided in the embodiment of this specification is implemented by software or firmware, the relevant program code is stored in the memory 602, and the processor 601 is called to execute the method of the embodiment of this application.

[0072] The processor 601 can be implemented by a general-purpose CPU (Central Processing Unit), a microprocessor, a DSP, or an FPGA, etc., an application-specific integrated circuit (Application Specific Integrated Circuit, ASIC), or one or more integrated circuits, etc., and is used to execute related programs to implement the technical solutions provided in the embodiments of the present application.

[0073] In some embodiments, the electronic device further comprises: Input / output interface, used to realize information input and output; Communication interface, used to realize communication interaction between this device and other devices. Communication can be realized through wired methods (such as USB, network cable, etc.) or wireless methods (such as mobile network, WIFI, Bluetooth, etc.); A bus that transmits information between various components of the device (e.g., processor 601, memory 602, input / output interfaces, and communication interfaces); The processor 601 , the memory 602 , the input / output interface and the communication interface can be connected to each other in communication within the device via a bus.

[0074] It is understandable that an embodiment of the present application further provides a computer-readable storage medium storing computer-executable instructions for executing the above method.

[0075] It is understandable that an embodiment of the present application also provides a computer program product, including a computer program or computer instructions, which are stored in a computer-readable storage medium. The processor of the arc suppression device reads the computer program or computer instructions from the computer-readable storage medium, and the processor executes the computer program or computer instructions, so that the computer device executes the above method.

[0076] The system architecture and application scenarios described in the embodiments of the present application are intended to more clearly illustrate the technical solutions of the embodiments of the present application, and do not constitute a limitation on the technical solutions provided in the embodiments of the present application. Those skilled in the art will appreciate that with the evolution of the system architecture and the emergence of new application scenarios, the technical solutions provided in the embodiments of the present application are equally applicable to similar technical problems.

[0077] It will be appreciated by those skilled in the art that all or some of the steps and systems in the methods disclosed above may be implemented as software, firmware, hardware, and appropriate combinations thereof. Some or all physical components may be implemented as software executed by a processor, such as a central processing unit, a digital signal processor, or a microprocessor, or as hardware, or as an integrated circuit, such as an application-specific integrated circuit. Such software may be distributed on a computer-readable medium, which may include a computer storage medium (or non-transitory medium) and a communication medium (or transient medium). As known to those skilled in the art, the term computer storage medium includes volatile and non-volatile, removable and non-removable media implemented in any method or technology for storing information (such as computer-readable instructions, data structures, program modules, or other data). Computer storage media include, but are not limited to, RAM, ROM, EEPROM, flash memory or other memory technology, CD-ROM, digital versatile disk (DVD) or other optical disk storage, magnetic cassettes, magnetic tapes, disk storage or other magnetic storage devices, or any other medium that can be used to store desired information and can be accessed by a computer. Furthermore, it is well known to those skilled in the art that communication media typically embodies computer readable instructions, data structures, program modules, or other data in a modulated data signal such as a carrier wave or other transport mechanism, and may include any information delivery media.

[0078] The above describes some embodiments of the present application with reference to the accompanying drawings, but does not limit the scope of the present invention. Any modification, equivalent substitution and improvement made by those skilled in the art without departing from the scope and essence of the present invention shall be within the scope of the present application.

Claims

1. An arc suppression method for a vacuum coating device, wherein the vacuum coating device is provided with a plurality of different types of power supplies, at least one power supply of each type is provided, and the frequency parameters of the power supplies of the same type are different from each other; characterized in that: The method comprises: In response to an arc suppression trigger signal output by at least one physical input channel in the high-speed input / output interface, the arc suppression trigger signal is sampled to obtain an arc suppression pulse width value; wherein the physical input channel is set in one-to-one correspondence with each of the power supplies; When it is determined that the arc suppression pulse width value indicates that there is a power supply on the vacuum coating device that meets a preset arc suppression condition, a target arc suppression period is obtained; During the target arc suppression period, arc suppression pulse signals are synchronously sent to each of the power supplies through each physical output channel of the high-speed input / output interface; wherein the high-speed input / output interface is provided with a physical output channel corresponding one-to-one to each of the power supplies.

2. The arc suppression method of the vacuum coating device according to claim 1, characterized in that: The frequency parameter includes the pulse operating frequency; the target arc suppression period is determined by the following steps: Receiving the pulse operating frequency of each of the power supplies sent from the host computer; The target arc suppression period is determined according to each of the pulse operating frequencies.

3. The arc suppression method of the vacuum coating device according to claim 2, characterized in that: Determining the target arc suppression period according to each of the pulse operating frequencies includes: Determining a candidate pulse operating frequency from each of the pulse operating frequencies according to the arc suppression trigger signal; Performing pulse width conversion on the candidate pulse operating frequencies to obtain candidate periods corresponding to the candidate pulse operating frequencies; The largest candidate cycle among the candidate cycles is used as the target arc suppression cycle.

4. The arc suppression method of the vacuum coating device according to claim 1, characterized in that: The method further comprises: When the arc suppression pulse signal is generated, the power supply information of the power supply corresponding to the arc suppression trigger signal is saved in a preset log file to update the arc suppression record in the log file; wherein the power supply information at least includes a frequency parameter; In response to the query request, the log file is queried according to the query request to obtain a target arc suppression record.

5. An arc suppression device for a vacuum coating device, wherein the vacuum coating device is provided with a plurality of different types of power supplies, at least one power supply of each type is provided, and the frequency parameters of the power supplies of the same type are different from each other; characterized in that: The device comprises: A high-speed input / output interface, wherein the high-speed input / output interface is provided with physical output channels and physical input channels corresponding to each of the power supplies one by one, and the physical output channels and the physical input channels are isolated from each other; A control module, wherein the control module executes the method according to any one of claims 1 to 4.

6. The arc suppression device for vacuum coating equipment according to claim 5, characterized in that: The control module includes an arc suppression pulse enabling circuit, a pulse width sampling circuit, a pulse forming circuit and a comparison circuit; wherein, The arc suppression pulse enabling circuit is configured to send an enabling signal or a disabling signal to the pulse width sampling circuit, the pulse forming circuit and the comparison circuit; The pulse width sampling circuit is configured to, in response to the arc suppression trigger signal output by at least one physical input channel in the high-speed input and output interface, sample the arc suppression trigger signal to obtain an arc suppression pulse width value when the enable signal is received; The comparison circuit is configured to obtain a target arc suppression period when it is determined that the arc suppression pulse width value indicates that there is a power supply on the vacuum coating device that meets a preset arc suppression condition; The pulse forming circuit is configured to synchronously send arc suppression pulse signals to each of the power supplies through each physical output channel of the high-speed input and output interface within the target arc suppression period when the enable signal is received.

7. The arc suppression device for vacuum coating equipment according to claim 6, characterized in that: The comparison circuit comprises: A pulse width sampling unit, wherein a first data terminal of the pulse width sampling unit is connected to the pulse width sampling circuit, and an enable terminal of the pulse width sampling unit is connected to the arc suppression pulse enable circuit; A pulse width comparator, the pulse width comparator being connected to the second data terminal of the pulse width sampling unit; the pulse width comparator being configured to determine whether there is a power supply on the vacuum coating device that satisfies a preset arc suppression condition based on the arc suppression pulse width value; An arc suppression pulse width acquisition circuit is connected to the output end of the pulse width comparator to obtain a target arc suppression period when the pulse width comparator determines that the arc suppression pulse width value indicates that there is a power supply on the vacuum coating device that meets a preset arc suppression condition.

8. The arc suppression device for vacuum coating equipment according to claim 7, characterized in that: The frequency parameter includes the pulse operating frequency; the arc suppression pulse width acquisition circuit includes: A power supply pulse frequency unit, the power supply pulse frequency unit is configured to store the pulse operating frequency of each power supply; the power supply pulse frequency unit is connected to the output end of the pulse width comparator, and the power supply pulse frequency unit is synchronized with the transmission source register address configured by the pulse width sampling unit, so that the power supply corresponding to the pulse operating frequency obtained from the power supply pulse frequency unit and the power supply used for arc suppression condition judgment in the pulse width comparator are the same; A divider, wherein an enable terminal of the divider is connected to the arc suppression pulse enable circuit, and the divider is connected to an output terminal of the power supply pulse frequency unit, so as to convert the pulse operating frequency output by the power supply pulse frequency unit into a candidate period after receiving an enable signal of the arc suppression pulse enable circuit; An arc suppression pulse width register, wherein an enable terminal of the arc suppression pulse width register is connected to the arc suppression pulse enable circuit, and the arc suppression pulse width register is connected to the divider to store the candidate period calculated by the divider after receiving an enable signal from the arc suppression pulse enable circuit; An arc suppression pulse width comparator, wherein the enable end of the arc suppression pulse width comparator is connected to the arc suppression pulse enable circuit, and the arc suppression pulse width comparator is connected to the arc suppression pulse width register, so as to determine the target arc suppression period according to the candidate period after receiving the enable signal of the arc suppression pulse enable circuit.

9. An electronic device, characterized in that: The electronic device comprises a memory and a processor, wherein the memory stores a computer program, and the processor implements the arc suppression method of the vacuum coating device according to any one of claims 1 to 4 when executing the computer program.

10. A computer-readable storage medium storing a computer program, characterized in that: When the computer program is executed by a processor, the arc suppression method of the vacuum coating device according to any one of claims 1 to 4 is implemented.

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