Tool suitable for laser interferometer light beam collimation and laser interferometer light beam collimation method

Abstract

The invention discloses a tool suitable for laser interferometer light beam collimation and a laser interferometer light beam collimation method. The tool comprises a workbench, a workpiece table, a vacuum cavity, a laser interference measuring device and a debugging device. The vacuum cavity is arranged on the working table, the workpiece table is arranged in the vacuum cavity, and the laser interference measuring device is fixedly arranged on the working table and is used for performing high-precision displacement measurement on the workpiece table in the vacuum cavity; the debugging device is movably arranged on the workbench and used for light path collimation. According to the invention, collimation of all optical paths is completed by using a universal installation and adjustment tool, so that the cost is greatly reduced, the universality and operability of the collimation method are improved, and the method is easy to popularize.

Description

Technical Field

[0001] The invention belongs to the technical field of instruments and meters, and in particular relates to a tool suitable for laser interferometer beam collimation and a laser interferometer beam collimation method. Background Art

[0002] As a high-precision measuring instrument, laser interferometer is widely used in precision detection, metrology, precision machining, microelectronics and other fields. As the supporting component of the electron beam equipment process device, the workpiece stage has the characteristics of large motion range, high precision, special working environment (vacuum clean, non-magnetic, thermally stable, low vibration), etc. At the same time, the workpiece stage needs to be monitored with ultra-high precision during the whole process of equipment process operation. Based on this, a dual-frequency laser interferometer outside the vacuum cavity is usually used to monitor the position of the workpiece stage inside the vacuum cavity.

[0003] Establishing the relative posture relationship between the laser and the end of the workpiece stage helps to align the measurement beam. There are usually two methods: Method 1 is to rely on the processing positioning reference to determine the relative position; Method 2 is to design and debug tooling for auxiliary positioning. Although both methods are feasible in theory, in practice, due to the series connection of multiple components between the end of the workpiece stage and the laser and the large number of corresponding mirror groups, debugging is difficult and reliability is poor. Method 1 is difficult to establish a reference system, the processing cost of each component involved in the reference transfer is high, and the errors in the processing and assembly links cannot be eliminated and continue to accumulate, resulting in the inability to guarantee the collimation effect of the measurement beam; Method 2 is difficult to unify the debugging reference, the tooling design is difficult, the cost is high, and the debugging is difficult. In addition, the special tooling has poor versatility. In addition, the plane reflector is set on the workpiece stage to directly participate in the measurement. The quality of its reflective surface directly affects the accuracy of the measurement system. The traditional contact debugging method is prone to scratches and damage to its reflective surface, further increasing the difficulty of adjusting the laser interferometer measurement system. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a tooling and a laser interferometer beam alignment method suitable for laser interferometer beam alignment which has a compact structure, simple operation, stable operation and high debugging accuracy, in view of the shortcomings of the existing laser interferometer measurement system, such as great difficulty in assembly and adjustment, high cost, poor versatility and limited accuracy.

[0005] To achieve the above object, the present invention can adopt the following technical solutions:

[0006] A tool for laser interferometer beam collimation comprises: a workbench, a workpiece table, a vacuum chamber, a laser interferometer measuring device and a debugging device; the vacuum chamber is arranged on the workbench, the workpiece table is arranged in the vacuum chamber, the laser interferometer measuring device is fixedly arranged on the workbench to measure the displacement of the workpiece table in the vacuum chamber; the debugging tool can be movably arranged on the workbench to be used for optical path collimation.

[0007] As a further improvement of the present invention, the laser interferometer measurement device includes an interferometer assembly, a plane reflector, a laser, a first right-angle reflector, a second right-angle reflector, a 33% beam splitter and a 50% beam splitter, the interferometer assembly includes a first interferometer, a second interferometer and a third interferometer; the laser is arranged outside the vacuum cavity, orthogonally distributed plane reflectors are arranged on both sides of the workpiece table, the first interferometer, the second interferometer and the third interferometer are arranged on both sides of the vacuum cavity along an orthogonal direction, and the second interferometer and the third interferometer are located on the same side of the vacuum cavity; the first right-angle reflector, the second right-angle reflector, the 33% beam splitter The optical mirror and the 50% beam splitter are arranged on the same side of the vacuum cavity, the first right-angle reflector, the 33% beam splitter, the 50% beam splitter and the second interferometer are arranged side by side in sequence, and the second right-angle reflector and the third interferometer are arranged side by side; the laser emits a light beam, which is transmitted to the 33% beam splitter through the first right-angle reflector and is divided into two beams, one of which is introduced into the first interferometer, and the other is divided into two beams through the 50% beam splitter, one of which is introduced into the second interferometer, and the other is introduced into the third interferometer through the second right-angle reflector, and the measurement light reflected by the interferometer component is reflected back to the interferometer component by the plane reflector, so as to measure the displacement of the workpiece stage along the optical path direction.

[0008] As a further improvement of the present invention, the plane reflector is perpendicular or parallel to the movement axis of the workpiece stage, and the measuring light beam is perpendicular to the plane reflector.

[0009] As a further improvement of the present invention, the debugging device includes a laser head, a spectrometer, a slide rail target and a square gauge; the laser head is installed on a tripod and located on the side of the workbench, and the slide rail target includes a magnetic table base, a target and a guide rail slider; the spectrometer and the guide rail slider are both set on the workbench, the magnetic table base is slidably set on the guide rail slider, and the target is detachably set on the magnetic table base; the square gauge is set on the workbench.

[0010] As a further improvement of the present invention, supporting feet are provided around the bottom of the workpiece platform for adjusting the height of the workpiece platform.

[0011] As a further improvement of the present invention, the workbench is made of marble.

[0012] As a general technical concept, the present invention also provides a laser interferometer beam collimation method based on the above-mentioned tooling, comprising the following steps:

[0013] Step S1, adjusting the workpiece table and the workbench to be parallel;

[0014] Step S2, adjusting the reflection plane to be perpendicular to the movement axis;

[0015] Step S3: adjust the measuring beam to be parallel to the motion axis to complete the alignment of the measuring beam.

[0016] As a further improvement of the present invention, the step S1 further comprises:

[0017] Step S11, fix the slide rail target on the workbench so that the light spot emitted by the laser head falls on the target, move the target back and forth along the guide rail slider, and adjust the position of the laser head until the light spot position is stable so that the laser head emits light parallel to the workbench;

[0018] Step S12, placing the workpiece table in the vacuum chamber, placing the vacuum chamber on the worktable, fixing the target on the workpiece table, and adjusting the height of the laser head so that the light spot emitted by the laser head falls on the target;

[0019] Step S13, move the target back and forth along the X-axis of the workpiece stage. If the light spot moves up and down, adjust the height of the support feet at the bottom of the workpiece stage. If the light spot moves left and right, adjust the position of the laser head until the light spot position is stable.

[0020] Step S14, move the target back and forth along the Y axis of the workpiece stage. If the light spot moves up and down, adjust the height of the support feet at the bottom of the workpiece stage. If the light spot moves left and right, adjust the position of the laser head until the light spot position is stable.

[0021] Step S15, looping steps S13 and S14 to achieve parallelism between the workpiece platform and the working table.

[0022] As a further improvement of the present invention, the step S2 further comprises:

[0023] Step S21, placing a plane reflector on the workpiece table, adjusting the height of the laser head so that the light spot falls on the plane reflector, and fixing the laser head;

[0024] Step S22, fix the beam splitter between the laser head and the plane reflector, place the slide rail target on the workbench, and make the reference light spot of the interferometer fall on the target;

[0025] Step S23, moving the target back and forth along the guide rail slider, adjusting the guide rail slider posture, making the reference light spot position stable, and fixing the slide rail target;

[0026] Step S24, adjusting the posture of the plane reflector until the distance between the reflected light spot and the reference light spot is stable, so that the reflecting surface of the plane reflector is perpendicular to the movement axis.

[0027] As a further improvement of the present invention, the step S3 further comprises:

[0028] Step S31, fix the laser head, place the slide rail target on the workbench, make the light spot emitted by the laser head fall on the target, move the target back and forth along the guide rail slider, adjust the guide rail slider posture until the light spot position is stable, so that the output light of the laser head is parallel to the guide rail slider;

[0029] Step S32, aligning the square gauge with the guide rail slider, and fixing the square gauge;

[0030] Step S33, fix the guide rail slider along the direction of the light emitted by the collimated component;

[0031] Step S34, using a magnetic table base to change the target posture, so that the light spot emitted by the collimated component falls on the target, the target moves back and forth along the guide slider, and the posture of the collimated component is adjusted until the light spot position is stable, so that the measurement beam can be parallel to the motion axis;

[0032] Step S35: repeat step S33 and step S34 to achieve collimation of all measurement beams.

[0033] Compared with the prior art, the advantages of the present invention are:

[0034] The tooling suitable for laser interferometer beam collimation and the laser interferometer beam collimation method of the present invention complete the collimation of all optical paths by setting a universal debugging tooling, thereby greatly reducing the cost and improving the versatility and operability of the collimation method. There is no need to design a special debugging tooling, nor is there any need to rely on the installation reference to establish the relative posture relationship between the workpiece stage and the measurement system, thereby reducing the difficulty of developing the workpiece stage. The installation reference conversion is achieved only through a universal debugging tooling, which simplifies the structure while avoiding error accumulation and ensuring the beam collimation accuracy. The traditional contact-type reference transmission method is changed, the spatial conversion of the installation reference is achieved, and the purpose of lossless high-precision collimation of the plane reflector is achieved. The laser collimation and reference system conversion principles are utilized, the operation method is simple and easy to learn, the required knowledge reserve and threshold are low, and it is easy to promote. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 It is a schematic diagram of the structural principle of a tooling applicable to laser interferometer beam collimation in a specific embodiment of the present invention;

[0036] Figure 2 It is a schematic diagram of the arrangement of the intermediate mirror group in a specific embodiment of the present invention;

[0037] Figure 3 It is a schematic diagram of the process of laser head leveling in a specific embodiment of the present invention;

[0038] Figure 4 It is a schematic diagram of the process of leveling the workpiece platform in a specific embodiment of the present invention; wherein n is used to measure the number of leveling times;

[0039] Figure 5 It is a schematic diagram of the process of leveling a plane mirror in a specific embodiment of the present invention;

[0040] Figure 6 A schematic diagram of a process for measuring light beam collimation in a specific embodiment of the present invention;

[0041] Figure 7 It is a schematic diagram of the principle of laser alignment and reference frame conversion in a specific embodiment of the present invention;

[0042] Figure 8 It is a schematic diagram of the principle of adjusting the posture of a plane reflector by using a beam splitter in a specific embodiment of the present invention;

[0043] Legend: 1. Workbench; 2. Laser head; 3. Spectrometer; 4. Interferometer assembly; 41. First interferometer; 42. Second interferometer; 43. Third interferometer; 5. Worktable; 6. Plane mirror; 7. Vacuum chamber; 8. Laser; 9. Support foot; 10. Magnetic base; 11. Target; 12. Guide rail slider; 13. Square gauge; 14. Tripod; 151. First right-angle mirror; 152. Second right-angle mirror; 161. 33% spectrometer; 162. 50% spectrometer. DETAILED DESCRIPTION

[0044] The present invention is further described below in conjunction with the accompanying drawings and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

[0045] In the description of the present invention, it should be understood that the terms "side", "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0046] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0047] Example

[0048] like Figure 1 and Figure 2 As shown, the tooling suitable for laser interferometer beam alignment of the present invention comprises: a workbench 1, a workpiece table 5, a vacuum chamber 7, a laser interferometer measuring device and a debugging device. Among them, the workbench 1 is made of marble material, has good flatness, and is easy to adjust the level. The vacuum chamber 7 is arranged on the workbench 1, the workpiece table 5 is arranged in the vacuum chamber 7, and the laser interferometer measuring device is fixedly arranged on the workbench 1 for measuring the displacement of the workpiece table 5 in the vacuum chamber 7; the debugging tooling can be movably arranged on the workbench 1 for optical path alignment. In this embodiment, the relative position of the laser interferometer measuring device is fixed, and the relative position of the debugging device is not fixed.

[0049] like Figure 1 and Figure 2 As shown, the laser interferometer measurement device includes an interferometer assembly 4, a plane reflector 6, a laser 8, a first right-angle reflector 151, a second right-angle reflector 152, a 33% beam splitter 161 and a 50% beam splitter 162. The interferometer assembly 4 includes a first interferometer 41, a second interferometer 42 and a third interferometer 43. The laser 8 is arranged outside the vacuum chamber 7; orthogonally distributed plane reflectors 6 are arranged on both sides of the workpiece stage 5, the plane reflectors 6 are perpendicular or parallel to the movement axis of the workpiece stage 5, and the measuring beam is perpendicular to the plane reflectors 6; the first interferometer 41, the second interferometer 42 and the third interferometer 43 are arranged on both sides of the vacuum chamber 7 along the orthogonal direction, and the second interferometer 42 and the third interferometer 43 are located on the same side of the vacuum chamber 7. The first right-angle reflector 151, the second right-angle reflector 152, the 33% beam splitter 161 and the 50% beam splitter 162 are arranged on the same side of the vacuum chamber 7. The first right-angle reflector 151, the 33% beam splitter 161, the 50% beam splitter 162 and the second interferometer 42 are arranged side by side in sequence, and the second right-angle reflector 152 and the third interferometer 43 are arranged side by side. The laser 8 emits a light beam, which is transmitted to the 33% beam splitter 161 through the first right-angle reflector 151 and is divided into two beams, one of which is introduced into the first interferometer 41, and the other is divided into two beams through the 50% beam splitter 162, one of which is introduced into the second interferometer 42, and the other is introduced into the third interferometer 43 through the second right-angle reflector 152. The measuring light reflected by the interferometer component 4 is reflected back to the interferometer component 4 by the plane reflector 6, and then the displacement of the workpiece stage 5 along the optical path is measured. Figure 1As shown, the debugging device includes a laser head 2, a spectroscope 3, a slide rail target and a square gauge 13. Furthermore, the laser head 2 is mounted on a tripod 14 and is located on the side of the workbench 1, and the slide rail target includes a magnetic table base 10, a target 11 and a guide rail slider 12. The spectroscope 3 and the guide rail slider 12 are both arranged on the workbench 1, the magnetic table base 10 is slidably arranged on the guide rail slider 12, and the target 11 is detachably arranged on the magnetic table base 10. The magnetic table base 10 has a universal adjustment function to facilitate the adjustment of the position and posture of the target 11. The principle of using the target 11 for spot observation is simple and intuitive. The guide rail slider 12 has good straightness, which is conducive to improving the accuracy of the movement of the target 11. The square gauge 13 is arranged on the workbench 1 and is located on the side of the guide rail slider 12. The square gauge 13 has good verticality to facilitate beam collimation.

[0050] In this embodiment, supporting feet 9 are provided around the bottom of the workpiece platform 5 to adjust the height of the workpiece platform 5 .

[0051] In this embodiment, the conversion of the installation reference is achieved only through a universal debugging optical device, which shortens the reference transmission chain, simplifies the system structure, reduces the introduction of errors, and ensures the installation accuracy; the installation reference uses a non-contact spatial conversion method to make it easy for the plane reflector to achieve lossless and high-precision alignment, and finally establishes an accurate relative posture relationship between the laser head 2 and the workpiece table 5.

[0052] In this embodiment, a laser interferometer beam collimation method based on the above-mentioned tooling is also provided, comprising the following steps:

[0053] Step S1, adjust the workpiece platform 5 and the workbench 1 to be parallel. Figure 4 As shown, the specific leveling operation is as follows: Step S11, fix the slide rail target on the workbench 1 so that the light spot emitted by the laser head 2 falls on the target 11, move the target 11 back and forth along the guide rail slider 12, and adjust the position of the laser head 2 until the light spot position is stable, so that the light emitted by the laser head 2 is parallel to the workbench 1, as shown in FIG. Figure 3 as shown in .

[0054] Step S12, placing the workpiece table 5 in the vacuum chamber 7, placing the vacuum chamber 7 on the workbench 1, fixing the target 11 on the workpiece table 5, and adjusting the height of the laser head 2 so that the light spot emitted by the laser head 2 falls on the target 11.

[0055] Step S13, move the target 11 back and forth along the X-axis of the workpiece stage 5. If the light spot moves up and down, adjust the height of the supporting feet at the bottom of the workpiece stage 5. If the light spot moves left and right, adjust the position of the laser head 2 until the light spot position is stable.

[0056] Step S14, move the target 11 back and forth along the Y axis of the workpiece stage 5. If the light spot moves up and down, adjust the height of the support feet 9 at the bottom of the workpiece stage 5. If the light spot moves left and right, adjust the position of the laser head 2 until the light spot position is stable.

[0057] Step S15, looping steps S13 and S14 twice to achieve that the workpiece table 5 is parallel to the working table 1.

[0058] Step S2: Adjust the reflection plane to be perpendicular to the motion axis. Figure 5 As shown, the specific operation process is: step S21, placing the plane reflector 6 on the workpiece table 5, adjusting the height of the laser head 2 so that the light spot falls on the plane reflector 6, and fixing the laser head 2.

[0059] Step S22 , fix the beam splitter 3 between the laser head 2 and the plane reflector 6 , place the slide rail target on the workbench 1 , and make the reference light spot of the interferometer 4 fall on the target 11 .

[0060] Step S23, move the target 11 back and forth along the guide rail slider 12, adjust the position of the guide rail slider 12, make the reference light spot position stable, and fix the slide rail target.

[0061] Step S24, adjusting the position of the plane reflector 6 until the distance between the reflected light spot and the reference light spot is stable, so that the reflecting surface of the plane reflector 6 is perpendicular to the movement axis.

[0062] Step S3: adjust the measuring beam to be parallel to the motion axis to complete the alignment of the measuring beam. Figure 6 As shown, the specific operation process is: step S31, fix the laser head 2, place the slide rail target on the workbench 1, make the light spot emitted by the laser head 2 fall on the target 11, move the target 11 back and forth along the guide rail slider 12, adjust the position of the guide rail slider 12 until the light spot position is stable, so that the output light of the laser head 2 is parallel to the guide rail slider 12.

[0063] Step S32, align the square gauge 13 with the guide rail slider 12, and fix the square gauge 13.

[0064] Step S33, fix the guide rail slider 12 along the direction of the light emitted by the collimated component. The collimated component can be either a laser or a beam splitter 3.

[0065] Step S34, using the magnetic stand 10 to change the position of the target 11, so that the light spot emitted by the collimated component falls on the target 11, the target 11 moves back and forth along the guide slider 12, and the position of the collimated component is adjusted until the light spot position is stable, so that the measurement beam can be parallel to the motion axis.

[0066] Step S35: repeat step S33 and step S34 to achieve collimation of all measurement beams.

[0067] like Figure 7 As shown, in this embodiment, the principles of laser alignment and reference frame conversion are:

[0068] The light beam propagates along a straight line, and by capturing the position of the light spot, the object propagates along the light beam. When the light beam propagates along a solid line, the light spot moves up and down as the target moves. At this time, the target is fixed to adjust the posture of the emitted light (or the emitted light is fixed to adjust the target's moving direction) so that the position of the light spot does not change as the target moves, and the light beam is parallel to the target's moving direction. Since the light beam is not a concrete object, the target guide is used as an intermediate conversion to establish the relationship between the light beam and other reference systems.

[0069] like Figure 8 As shown, in this embodiment, the principle of using a beam splitter to adjust the position of the plane reflector is:

[0070] The laser beam (incident light) propagates from bottom to top, and the beam splitter splits the laser beam into two. One beam of light is reflected by the cone and emitted from the right side of the beam splitter to become the reference beam, and the other beam of light is reflected by the plane reflector and emitted from the right side of the beam splitter to become the reflected light (after the beam splitter is fixed, the direction of the reference beam is fixed). When the plane reflector is at (90°-α) with the incident light, the reflected light and the reference light are at an angle of 2α, and the light spots of the two are captured by the target, and the distance between the light spots will change with the target position; when the plane reflector is perpendicular to the incident light, the reference light and the reflected light are parallel, and the light spots of the two are captured by the target, and the distance between the light spots does not change with the target position.

[0071] In this embodiment, by setting up a universal debugging tool, the alignment of all optical paths is completed, which greatly reduces the cost and improves the versatility and operability of the alignment method. There is no need to design a special debugging tool, nor to rely on the installation reference to establish the relative posture relationship between the workpiece stage and the measurement system, which reduces the difficulty of developing the workpiece stage; the conversion of the installation reference is achieved only through a universal debugging tool, which simplifies the structure while avoiding error accumulation and ensuring the accuracy of light beam alignment; the traditional contact-type reference transfer method is changed, the spatial conversion of the installation reference is realized, and the purpose of lossless high-precision collimation of the plane reflector is achieved; by utilizing the principles of laser collimation and reference frame conversion, the operation method is simple and easy to learn, the required knowledge reserve and threshold are low, and it is easy to promote.

[0072] Although the present invention is disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any technician familiar with the art can use the above disclosed methods and technical contents to make many possible changes and modifications to the technical solutions of the present invention without departing from the spirit and technical solutions of the present invention, or modify them into equivalent embodiments of equivalent changes. Therefore, any simple modification, equivalent replacement, equivalent change and modification made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solutions of the present invention still fall within the scope of protection of the technical solutions of the present invention.

Claims

1. A tool suitable for laser interferometer beam collimation, characterized in that: include: A workbench (1), a workpiece table (5), a vacuum chamber (7), a laser interferometer measuring device and a debugging device; the vacuum chamber (7) is arranged on the workbench (1), the workpiece table (5) is arranged in the vacuum chamber (7), the laser interferometer measuring device is fixedly arranged on the workbench (1) to measure the displacement of the workpiece table (5) in the vacuum chamber (7); the debugging tool is movably arranged on the workbench (1) to align the optical path.

2. The tooling for laser interferometer beam collimation according to claim 1, characterized in that: The laser interferometer measuring device comprises an interferometer assembly (4), a plane reflector (6), a laser (8), a first right-angle reflector (151), a second right-angle reflector (152), a 33% beam splitter (161) and a 50% beam splitter (162); the interferometer assembly (4) comprises a first interferometer (41), a second interferometer (42) and a third interferometer (43); the laser (8) is arranged outside a vacuum cavity (7); orthogonally distributed plane reflectors (6) are arranged on both sides of the workpiece stage (5); the first interferometer (41), the second interferometer (42) and the third interferometer (43) are arranged on both sides of the vacuum cavity (7) along an orthogonal direction, and the second interferometer (42) and the third interferometer (43) are located on the same side of the vacuum cavity (7); the first right-angle reflector (151), the second right-angle reflector (152), the 33% beam splitter (161) and the 50% beam splitter (162) are arranged outside a vacuum cavity (7); the laser (8) is arranged outside a vacuum cavity (7); orthogonally distributed plane reflectors (6) are arranged on both sides of the workpiece stage (5); the first interferometer (41), the second interferometer (42) and the third interferometer (43) are arranged on both sides of the vacuum cavity (7) along an orthogonal direction; and the second interferometer (42) and the third interferometer (43) are located on the same side of the vacuum cavity (7); the first right-angle reflector (151), the second right-angle reflector (152), the 33% beam splitter (161) and the 50% beam splitter (162) are arranged on the same side of the vacuum cavity (7); and the first right-angle reflector (151), the second right-angle reflector (152), the 33% beam splitter The first right-angle reflector (151), the 33% reflector (161), the 50% reflector (162) and the second interferometer (42) are arranged side by side in sequence, and the second right-angle reflector (152) and the third interferometer (43) are arranged side by side; the laser (8) emits a light beam, which is transmitted to the 33% reflector (161) via the first right-angle reflector (151) and is divided into two beams, one of which is introduced into the first interferometer (41), and the other is divided into two beams via the 50% reflector (162), one of which is introduced into the second interferometer (42), and the other is introduced into the third interferometer (43) via the second right-angle reflector (152); the measurement light reflected by the interferometer component (4) is reflected back to the interferometer component (4) by the plane reflector (6), and the displacement of the workpiece stage (5) along the optical path direction is measured.

3. The tooling for laser interferometer beam collimation according to claim 2, characterized in that: The plane reflector (6) is perpendicular or parallel to the movement axis of the workpiece stage (5), and the measuring light beam is perpendicular to the plane reflector (6).

4. The tooling for laser interferometer beam collimation according to claim 3, characterized in that: The debugging device comprises a laser head (2), a spectroscope (3), a slide rail target and a square gauge (13); the laser head (2) is mounted on a tripod (14) and is located on the side of a workbench (1); the slide rail target comprises a magnetic table base (10), a target (11) and a guide rail slider (12); the spectroscope (3) and the guide rail slider (12) are both arranged on the workbench (1), the magnetic table base (10) is slidably arranged on the guide rail slider (12), and the target (11) is detachably arranged on the magnetic table base (10); the square gauge (13) is arranged on the workbench (1).

5. The tooling for laser interferometer beam collimation according to any one of claims 1 to 4, characterized in that: Support legs (9) are provided around the bottom of the workpiece platform (5) for adjusting the height of the workpiece platform (5).

6. The tooling for laser interferometer beam collimation according to any one of claims 1 to 4, characterized in that: The workbench (1) is made of marble.

7. A laser interferometer beam collimation method based on the tooling according to any one of claims 1 to 6, characterized in that: The following steps are involved: Step S1, adjusting the workpiece platform (5) and the workbench (1) to be parallel; Step S2, adjusting the reflection plane to be perpendicular to the movement axis; Step S3: adjust the measuring beam to be parallel to the motion axis to complete the alignment of the measuring beam.

8. The laser interferometer beam collimation method according to claim 7, characterized in that: The step S1 further comprises: Step S11, fix the slide rail target on the workbench (1) so that the light spot emitted by the laser head (2) falls on the target (11), move the target (11) back and forth along the guide rail slider (12), and adjust the position of the laser head (2) until the light spot position is stable, so that the light emitted by the laser head (2) is parallel to the workbench (1); Step S12, placing the workpiece table (5) in the vacuum chamber (7), placing the vacuum chamber (7) on the worktable (1), fixing the target (11) on the workpiece table (5), and adjusting the height of the laser head (2) so that the light spot emitted by the laser head (2) falls on the target (11); Step S13, move the target (11) back and forth along the X-axis of the workpiece stage (5); if the light spot moves up and down, adjust the height of the support foot (9) at the bottom of the workpiece stage (5); if the light spot moves left and right, adjust the position of the laser head (2) until the light spot position is stable; Step S14, move the target (11) back and forth along the Y axis of the workpiece stage (5); if the light spot moves up and down, adjust the height of the support foot (9) at the bottom of the workpiece stage (5); if the light spot moves left and right, adjust the position of the laser head (2) until the light spot position is stable; Step S15, looping steps S13 and S14, to achieve parallelism between the workpiece platform (5) and the working platform (1).

9. The laser interferometer beam collimation method according to claim 8, characterized in that: The step S2 further comprises: Step S21, placing the plane reflector (6) on the workpiece table (5), adjusting the height of the laser head (2) so that the light spot falls on the plane reflector (6), and fixing the laser head (2); Step S22, fixing the beam splitter (3) between the laser head (2) and the plane reflector (6), placing the slide rail target on the workbench (1), and making the reference light spot of the interferometer component (4) fall on the target (11); Step S23, moving the target (11) back and forth along the guide rail slider (12), adjusting the position of the guide rail slider (12), making the reference light spot position stable, and fixing the guide rail target; Step S24, adjusting the position of the plane reflector (6) until the distance between the reflected light spot and the reference light spot is stable, so that the reflective surface of the plane reflector (6) is perpendicular to the movement axis.

10. The laser interferometer beam collimation method according to claim 9, characterized in that: The step S3 further comprises: Step S31, fix the laser head (2), place the slide rail target on the workbench (1), make the light spot emitted by the laser head (2) fall on the target (11), move the target (11) back and forth along the guide rail slider (12), and adjust the position of the guide rail slider (12) until the light spot position is stable, so that the output light of the laser head (2) is parallel to the guide rail slider (12); Step S32, aligning the square gauge (13) with the guide rail slider (12), and fixing the square gauge (13); Step S33, fix the guide rail slider (12) along the direction of the light emitted by the collimated component; Step S34, using the magnetic table base (10) to change the position of the target (11) so that the light spot emitted by the collimated component falls on the target (11), and the target (11) moves back and forth along the guide slider (12) to adjust the position of the collimated component until the light spot position is stable, so that the measurement beam can be parallel to the movement axis; Step S35: repeat step S33 and step S34 to achieve collimation of all measurement beams.

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