Vibration type ultrasonic cleaning device and working method thereof

Abstract

The invention discloses a vibration type ultrasonic cleaning device and a working method thereof. The vibration type ultrasonic cleaning device comprises a cleaned cavity, a hollow traveling wave piezoelectric stator base body, a first traveling wave piezoelectric driving module, a second traveling wave piezoelectric driving module and a standing wave piezoelectric driving module. The first traveling wave piezoelectric driving module and the second traveling wave piezoelectric driving module are arranged on the inner side surface of a hollow traveling wave piezoelectric stator in a cavity of a cleaned element and used for exciting traveling wave vibration of a piezoelectric stator base body. The standing wave piezoelectric driving module is arranged at the hollow structure in the traveling wave piezoelectric stator base body and used for generating standing wave vibration needed by cleaning. By controlling an input electric signal of the piezoelectric driving module, the traveling wave piezoelectric stator base body generates traveling wave vibration in the circular ring direction, so that acoustic radiation force generated by vibration is transmitted into a cavity of a cleaned element, liquid generates rotary motion and ultrasonic vibration in the circular ring direction, and the purpose of traveling wave, standing wave and liquid spinning composite cleaning is achieved. The device is high in reliability, high in cleaning efficiency, variable in vibration mode, controllable in frequency and good in universality.

Description

Technical Field

[0001] The invention belongs to the technical field of piezoelectric driving, and in particular relates to a vibration type ultrasonic cleaning device and a working method thereof. Background Art

[0002] With the widespread application of complex cavity structural components in biomedical experiments and testing equipment, efficient, uniform and non-destructive cleaning of their inner surfaces has become a key technical problem. Traditional chemical or mechanical cleaning methods are inefficient and easy to damage when dealing with complex cavities, and the existing ultrasonic cleaning devices have a single vibration mode and it is difficult to achieve a uniform distribution of the sound field inside the cavity, resulting in limited cleaning effects. Therefore, it is urgent to develop a multi-mode composite ultrasonic cleaning device to meet the requirements for efficiency, accuracy and reliability in cleaning the interior of complex cavities. Summary of the invention

[0003] In order to solve the above problems, the present invention provides a vibration type ultrasonic cleaning device and a working method thereof, which can meet the requirements of high efficiency, accuracy and reliability for cleaning inside complex cavities.

[0004] The present invention is achieved through the following technical solutions: A vibration type ultrasonic cleaning device comprises a cavity to be cleaned and a hollow traveling wave piezoelectric stator matrix located inside the cavity to be cleaned, a first traveling wave piezoelectric driving module, a second traveling wave piezoelectric driving module and a standing wave piezoelectric driving module; The hollow traveling wave piezoelectric stator matrix is ​​a circumferentially symmetrical polygon, and the first traveling wave piezoelectric driving module and the second traveling wave piezoelectric driving module are alternately arranged on the inner surface of the hollow traveling wave piezoelectric stator matrix; An upper elastic constraint flange and a lower elastic constraint flange for clamping are respectively attached to the upper and lower surfaces of the hollow piezoelectric stator matrix, and the standing wave piezoelectric driving module is nested inside the center of the hollow piezoelectric stator matrix.

[0005] Furthermore, the cavity to be cleaned is a circular or square hollow structure, and its internal cavity is used to place the cleaning liquid.

[0006] Furthermore, the number of sides of the hollow traveling wave piezoelectric stator matrix is ​​a multiple of 2, and the inner surface of the hollow traveling wave piezoelectric stator matrix is ​​connected to the piezoelectric ceramics of the first traveling wave piezoelectric driving module 5 and the second traveling wave piezoelectric driving module by adhesive.

[0007] Furthermore, the upper elastic constraint flange and the lower elastic constraint flange are both in the shape of an annulus, one side of the annulus is glued and fixedly connected to the hollow piezoelectric stator matrix, and a plurality of elastic beams are provided to be connected to the fixing holes in the middle of the corresponding elastic constraint flanges; and a plurality of connecting rods for connecting or clamping with external equipment are vertically arranged on the central fixing hole of the upper elastic constraint flange, and the standing wave piezoelectric drive module is connected to the fixing holes in the middle of the upper and lower elastic constraint flanges by means of glue.

[0008] Furthermore, the first traveling-wave piezoelectric driving module and the second traveling-wave piezoelectric driving module have the same structure.

[0009] Furthermore, the number of piezoelectric ceramic sheets in the first and second rows of piezoelectric driving modules is the same, and the specific number is the same as the order of the side length bending vibration mode of the selected hollow traveling wave piezoelectric stator matrix, and the total number is the same as the number of polygon sides; the polarization directions of the piezoelectric units in the first and second rows of piezoelectric driving modules are arranged alternately in positive and negative order respectively; the polarization directions of the piezoelectric units in the first and second rows of piezoelectric driving modules are the same.

[0010] Furthermore, the standing wave piezoelectric drive module is a longitudinal vibration sandwich piezoelectric transducer with a T-shaped amplitude transformer; the longitudinal vibration sandwich piezoelectric transducer is composed of a T-shaped amplitude transformer, a piezoelectric ceramic sheet, an electrode sheet, a rear end cover and a pre-tightening bolt, the rod portion of the T-shaped amplitude transformer passes through the fixing holes of the upper and lower elastic constraint flanges, and the piezoelectric ceramic sheet is sleeved on the rod portion of the T-shaped amplitude transformer, the electrode sheets are respectively arranged on both sides of the piezoelectric ceramic sheet, and the rear end cover is sleeved on the tail of the T-shaped amplitude transformer and is tightened by the pre-tightening bolts.

[0011] A working method of a vibration type ultrasonic cleaning device, which comprises the following steps: according to the need, a hollow traveling wave piezoelectric stator matrix and a first and a second traveling wave piezoelectric driving module are selected to realize the traveling wave vibration in the rotation direction inside the cavity to be cleaned, thereby driving the liquid in the cavity to be cleaned to generate rotational motion and traveling wave vibration; or a standing wave piezoelectric driving module is used to realize the longitudinal standing wave vibration at the bottom of the cavity to be cleaned 1; or standing wave and traveling wave piezoelectric driving modules are used simultaneously, and the water flow rotation and the water area traveling wave sound field generated by the traveling wave sound field are utilized, and the water area standing wave sound field generated by the standing wave sound field is utilized, so that the traveling wave sound field, rotation and standing wave sound field are combined to perform a composite operation, and the components in the water area are cleaned simultaneously.

[0012] Furthermore, the traveling wave drive includes the following processes: S1, injecting liquid into the top of the cavity to be cleaned, and hanging the traveling wave vibration type ultrasonic cleaning device inside it; S2, applying a first simple harmonic signal of the bending resonance frequency of the hollow traveling wave piezoelectric stator matrix to the piezoelectric ceramics in the first traveling wave piezoelectric driving module; applying a second simple harmonic signal with the same frequency and voltage as the first simple harmonic signal and a time phase difference of π / 2 to the piezoelectric ceramics in the second traveling wave piezoelectric driving module; S3. The application of the first and second simple harmonic signals will cause two bending vibration modes of the same order to be generated on the outer ring surface of the hollow traveling wave piezoelectric stator matrix. After coupling, a bending vibration traveling wave rotation mode of the same order can be formed, thereby generating a traveling wave acoustic field in the water area. The traveling wave acoustic field can be used to drive the water flow to rotate, and the traveling wave acoustic field can be used to clean the components in the water area; The standing wave drive includes the following processes: A simple harmonic signal of the longitudinal vibration or bending vibration resonance frequency is applied to the piezoelectric ceramics in the standing wave piezoelectric drive module to form the required longitudinal vibration or bending vibration, thereby generating a longitudinal vibration standing wave sound field in the water area. The standing wave sound field in the water area can be used to clean the components in the water area.

[0013] Furthermore, the above-mentioned traveling wave piezoelectric driving modules can simultaneously apply the third simple harmonic signal of the bending vibration resonance frequency of the hollow traveling wave piezoelectric stator matrix circular ring used, and the excitation signal frequency, voltage and phase difference of all hollow traveling wave piezoelectric stator driving modules are the same, thereby exciting a certain order standing wave vibration mode of the traveling wave piezoelectric stator; The same third simple harmonic signal is applied to the standing wave piezoelectric drive module. At this time, under the excitation of the same signal on all piezoelectric drive modules, the required standing wave vibration can be formed, thereby generating a stronger standing wave sound field in the water area, and the standing wave sound field in the water area is used to clean the components.

[0014] The beneficial effects of the present invention are: 1. The present invention combines traveling wave and standing wave driving modules. The traveling wave acoustic field drives the liquid to rotate, and the standing wave acoustic field forms local high-intensity vibration, thereby achieving efficient cleaning of the inner surface of a complex cavity. 2. The present invention adopts a circumferentially symmetrical polygonal stator matrix to optimize vibration mode coupling and acoustic field distribution, and supports modular adjustment to meet different cavity cleaning requirements; 3. The present invention is provided with multiple groups of independent piezoelectric drive modules, which can enable the device to achieve a stronger standing wave excitation and still maintain the basic ultrasonic standing wave or traveling wave cleaning function after a single component is damaged. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the internal structure of the cleaned cavity of the present invention; Figure 2 is an external schematic diagram of the present invention; Figure 3It is a structural schematic diagram of the connection between the hollow traveling wave piezoelectric stator matrix and the traveling wave piezoelectric driving module and the standing wave piezoelectric driving module of the present invention; Figure 4 Schematic diagram of the hollow traveling wave piezoelectric stator matrix of the present invention; Figure 5 5a and 5b are schematic diagrams of the piezoelectric ceramic polarization direction bodies of the first and second traveling-wave piezoelectric driving modules of the present invention, respectively; Figure 6 is a schematic diagram of a standing wave piezoelectric drive module of the present invention; Figure 7 a and 7b are two same-order symmetrical and asymmetrical vibration modes of the octagonal piezoelectric stator of the present invention, respectively; Figure 8 is a schematic diagram of the lower elastic restraint flange of the present invention; Fig. 9 is a schematic diagram of the upper elastic restraint flange of the present invention; Fig.10 is a schematic diagram of a cleaned cavity element of the present invention; Figure markings: 1-cleaned cavity, 2-hollow traveling wave piezoelectric stator matrix, 3-upper elastic constraint flange, 4-lower elastic constraint flange, 5-first traveling wave piezoelectric drive module, 6-second traveling wave piezoelectric drive module, 7-T-type amplitude transformer, 8-electrode sheet, 9-piezoelectric ceramic sheet, 10-rear end cover, 11-pre-tightening bolts. DETAILED DESCRIPTION

[0016] In order to make the purpose, technical solution and advantages of the embodiments of the present invention more clear, the technical solution in the embodiments of the present invention will be clearly and completely described below according to the accompanying drawings.

[0017] Embodiment 1: As shown in the figure, a vibration type ultrasonic cleaning device comprises a cavity 1 to be cleaned, and a hollow traveling wave piezoelectric stator substrate 2, a first traveling wave piezoelectric driving module 5, a second traveling wave piezoelectric driving module 6 and a standing wave piezoelectric driving module located inside the cavity 1 to be cleaned; The cavity 1 to be cleaned is not limited to a circular shape, but may also be a square shape or other hollow structure, and the internal cavity is used to place the cleaning liquid; The hollow traveling wave piezoelectric stator matrix 2 is a circularly symmetrical polygon, and the number of its sides should be a multiple of 2. In this embodiment, the number of sides of the hollow traveling wave piezoelectric stator matrix 2 is 8. The first traveling wave piezoelectric driving module 5 and the second traveling wave piezoelectric driving module 6 are alternately arranged on the inner surface of the hollow traveling wave piezoelectric stator matrix 2; they are used to excite the traveling wave vibration of the piezoelectric stator matrix; and the inner surface of the hollow traveling wave piezoelectric stator matrix 2 is connected to the piezoelectric ceramics of the first traveling wave piezoelectric driving module 5 and the second traveling wave piezoelectric driving module 6 by adhesive.

[0018] The hollow traveling wave piezoelectric stator matrix is ​​not limited to one. Multiple hollow traveling wave piezoelectric stator matrixes of the same size can be installed at the central fixed connecting rod according to the height of the cleaning chamber, and the first and second traveling wave piezoelectric drive modules can be installed respectively.

[0019] An upper elastic constraint flange 3 and a lower elastic constraint flange 4 for clamping are respectively attached to the upper and lower surfaces of the hollow piezoelectric stator matrix 2. The elastic constraint flanges need to be made of elastic materials such as rubber to avoid fixed constraints on the stator matrix. The upper elastic constraint flange 3 and the lower elastic constraint flange 4 are both annular, one side of the annular ring is glued and fixedly connected to the hollow piezoelectric stator matrix 2, and a number of elastic beams are provided to connect to the fixed holes in the middle of the corresponding elastic constraint flanges; and a number of connecting rods for connecting or clamping with external instruments are vertically provided on the central fixed hole of the upper elastic constraint flange 3, and the standing wave piezoelectric drive module is nested in the center of the hollow piezoelectric stator matrix 2 to generate the standing wave vibration required for cleaning. And the standing wave piezoelectric drive module is connected to the fixed holes in the middle of the upper and lower elastic constraint flanges by means of glue. By controlling the input electrical signal of the piezoelectric drive module, the traveling wave piezoelectric stator matrix generates traveling wave vibration along the annular direction, thereby transmitting the acoustic radiation force generated by the vibration to the cavity of the cleaned component, so that the liquid generates rotational motion and ultrasonic vibration along the annular direction, thereby achieving the purpose of traveling wave, standing wave, and liquid spin composite cleaning.

[0020] Furthermore, the first traveling wave piezoelectric driving module 5 and the second traveling wave piezoelectric driving module 6 have the same structure. The number of piezoelectric ceramic sheets in the first and second traveling wave piezoelectric driving modules is the same, and the number of each is not fixed. The specific number is the same as the order of the side length bending vibration mode of the selected hollow traveling wave piezoelectric stator matrix, and the total number is the same as the number of polygon sides; Figure 5 As shown, the polarization directions of the piezoelectric units in the first and second rows of piezoelectric drive modules are arranged alternately in positive and negative order respectively; and the polarization directions of the piezoelectric units in the first and second rows of piezoelectric drive modules are the same. When selecting an octagonal circularly symmetrical hollow traveling wave piezoelectric stator matrix, two same-order vibration modes that are symmetrical along the circumferential direction, have similar frequencies, and have different vibration directions should be selected.

[0021] Furthermore, if Figure 6 As shown, the standing wave piezoelectric drive module is a longitudinal vibration sandwich piezoelectric transducer with a T-shaped amplitude rod; the longitudinal vibration sandwich piezoelectric transducer consists of a T-shaped amplitude rod 7, a piezoelectric ceramic sheet 9, an electrode sheet 8, a rear end cover 10 and a pre-tightening bolt 11, the rod portion of the T-shaped amplitude rod 7 passes through the fixing holes of the upper and lower elastic constraint flanges, and the piezoelectric ceramic sheet 9 is sleeved on the rod portion of the T-shaped amplitude rod 7, the electrode sheet 8 is respectively arranged on both sides of the piezoelectric ceramic sheet 9, and the rear end cover 10 is sleeved on the tail of the T-shaped amplitude rod 7 and is tightened by the pre-tightening bolt 11.

[0022] A working method of a vibration type ultrasonic cleaning device, which uses a hollow traveling wave piezoelectric stator matrix 2 and a first and a second traveling wave piezoelectric driving module to realize the traveling wave vibration in the rotation direction inside the cavity 1 to be cleaned, thereby driving the liquid in the cavity 1 to be cleaned to generate rotational motion and traveling wave vibration; the traveling wave driving includes the following process: S1, injecting liquid into the top of the cavity 1 to be cleaned, and hanging the traveling wave vibration type ultrasonic cleaning device inside it; S2, applying a first simple harmonic signal of the bending resonance frequency of the hollow traveling wave piezoelectric stator matrix 2 to the piezoelectric ceramics in the first traveling wave piezoelectric driving module 5; applying a second simple harmonic signal with the same frequency and voltage as the first simple harmonic signal and a time phase difference of π / 2 to the piezoelectric ceramics in the second traveling wave piezoelectric driving module 6; S3. The application of the first and second simple harmonic signals will cause two bending vibration modes of the same order to be generated on the outer ring surface of the hollow traveling wave piezoelectric stator matrix 2. After coupling, a bending vibration traveling wave rotation mode of the same order can be formed, thereby generating a traveling wave acoustic field in the water area. The traveling wave acoustic field can be used to drive the water flow to rotate, and the traveling wave acoustic field can be used to clean the components in the water area; Alternatively, a standing wave piezoelectric drive module can be used to generate longitudinal standing wave vibration at the bottom of the cleaned cavity 1; the standing wave drive includes the following process: A simple harmonic signal of the longitudinal vibration or bending vibration resonance frequency is applied to the piezoelectric ceramics in the standing wave piezoelectric drive module to form the required longitudinal vibration or bending vibration, thereby generating a longitudinal vibration standing wave sound field in the water area. The standing wave sound field in the water area can be used to clean the components in the water area.

[0023] Standing wave and traveling wave piezoelectric drive modules can also be used at the same time, utilizing the water flow rotation and water area traveling wave sound field generated by the traveling wave sound field, and utilizing the water area standing wave sound field generated by the standing wave sound field, so that the traveling wave sound field, rotation and standing wave sound field can perform composite operations and clean the components in the water area at the same time.

[0024] The above-mentioned traveling wave piezoelectric driving modules can simultaneously apply the third simple harmonic signal of the ring bending vibration resonance frequency of the hollow traveling wave piezoelectric stator matrix 2 used, and the excitation signal frequency, voltage and phase difference of all hollow traveling wave piezoelectric stator driving modules are the same, thereby exciting a certain order standing wave vibration mode of the traveling wave piezoelectric stator; The same third simple harmonic signal is applied to the standing wave piezoelectric drive module. At this time, under the excitation of the same signal on all piezoelectric drive modules, the required standing wave vibration can be formed, thereby generating a stronger standing wave sound field in the water area, and the standing wave sound field in the water area is used to clean the components.

[0025] It should be noted that although the present invention is described by the above embodiments, the present invention may also have other various embodiments. Without departing from the spirit and scope of the present invention, it is obvious that those skilled in the art may make various corresponding changes and deformations to the present invention, but these changes and deformations should all fall within the scope of protection of the appended claims of the present invention and their equivalents.

Claims

1. A vibration type ultrasonic cleaning device, characterized in that: It comprises a cavity to be cleaned (1), and a hollow traveling wave piezoelectric stator matrix (2) located inside the cavity to be cleaned (1), a first traveling wave piezoelectric driving module (5), a second traveling wave piezoelectric driving module (6), and a standing wave piezoelectric driving module; The hollow traveling wave piezoelectric stator matrix (2) is a circumferentially symmetrical polygon, and the first traveling wave piezoelectric driving module (5) and the second traveling wave piezoelectric driving module (6) are alternately arranged on the inner surface of the hollow traveling wave piezoelectric stator matrix (2); An upper elastic constraint flange (3) and a lower elastic constraint flange (4) for clamping are respectively adhered to the upper and lower surfaces of the hollow piezoelectric stator matrix (2), and the standing wave piezoelectric drive module is nested in the center of the hollow piezoelectric stator matrix (2).

2. A vibration type ultrasonic cleaning device according to claim 1, characterized in that: The cavity to be cleaned (1) is a circular or square hollow structure, and its internal cavity is used to place cleaning liquid.

3. A vibration type ultrasonic cleaning device according to claim 1, characterized in that: The number of sides of the hollow traveling wave piezoelectric stator matrix (2) is a multiple of 2, and the inner surface of the hollow traveling wave piezoelectric stator matrix (2) is connected to the piezoelectric ceramics of the first traveling wave piezoelectric drive module (5) and the second traveling wave piezoelectric drive module (6) by adhesive.

4. A vibration type ultrasonic cleaning device according to claim 1, characterized in that: The upper elastic constraint flange (3) and the lower elastic constraint flange (4) are both in the shape of an annulus, one side of the annulus is glued and fixedly connected to the hollow piezoelectric stator matrix (2), and a plurality of elastic beams are provided to be connected to the fixing holes in the middle of the corresponding elastic constraint flanges; and a plurality of connecting rods for connecting or clamping with external equipment are vertically provided on the central fixing hole of the upper elastic constraint flange (3), and the standing wave piezoelectric drive module is connected to the fixing holes in the middle of the upper and lower elastic constraint flanges by means of glue.

5. A vibration type ultrasonic cleaning device according to claim 1, characterized in that: The first traveling-wave piezoelectric driving module (5) and the second traveling-wave piezoelectric driving module (6) have the same structure.

6. A vibration type ultrasonic cleaning device according to claim 1 or 5, characterized in that: The number of piezoelectric ceramic sheets in the first and second rows of piezoelectric driving modules is the same, and the specific number is the same as the order of the side length bending vibration mode of the selected hollow traveling wave piezoelectric stator matrix, and the total number is the same as the number of polygon sides; the polarization directions of the piezoelectric units in the first and second rows of piezoelectric driving modules are arranged alternately in positive and negative order respectively; the polarization directions of the piezoelectric units in the first and second rows of piezoelectric driving modules are the same.

7. A vibration type ultrasonic cleaning device according to claim 1, characterized in that: The standing wave piezoelectric drive module is a longitudinal vibration sandwich piezoelectric transducer with a T-shaped amplitude rod; the longitudinal vibration sandwich piezoelectric transducer is composed of a T-shaped amplitude rod (7), a piezoelectric ceramic sheet (9), an electrode sheet (8), a rear end cover (10) and a pre-tightening bolt (11); the rod portion of the T-shaped amplitude rod (7) passes through the fixing holes of the upper and lower elastic constraint flanges, and the piezoelectric ceramic sheet (9) is sleeved on the rod portion of the T-shaped amplitude rod (7); the electrode sheet (8) is respectively arranged on both sides of the piezoelectric ceramic sheet (9); the rear end cover (10) is sleeved on the tail of the T-shaped amplitude rod (7) and is tightened by the pre-tightening bolt (11).

8. A working method of a vibration type ultrasonic cleaning device according to any one of claims 1 to 7, characterized in that: According to the needs, the hollow traveling wave piezoelectric stator matrix (2) and the first and second traveling wave piezoelectric drive modules are selected to realize the generation of traveling wave vibration in the rotation direction inside the cleaned cavity (1), thereby driving the liquid in the cleaned cavity (1) to generate rotational motion and traveling wave vibration; or the standing wave piezoelectric drive module can be used to realize the generation of longitudinal standing wave vibration at the bottom of the cleaned cavity (1); or the standing wave and traveling wave piezoelectric drive modules are used simultaneously, and the water flow rotation and water area traveling wave sound field generated by the traveling wave sound field are utilized, and the water area standing wave sound field generated by the standing wave sound field is utilized, so that the traveling wave sound field, rotation and standing wave sound field perform a composite operation, and the components in the water area are cleaned at the same time.

9. The working method of a vibration type ultrasonic cleaning device according to claim 8, characterized in that: Traveling wave drive includes the following processes: S1, injecting liquid into the top of the cavity (1) to be cleaned, and suspending the traveling wave vibration type ultrasonic cleaning device inside it; S2, applying a first simple harmonic signal of the bending resonance frequency of the hollow traveling wave piezoelectric stator matrix (2) to the piezoelectric ceramic in the first traveling wave piezoelectric driving module (5); applying a second simple harmonic signal having the same frequency and voltage as the first simple harmonic signal and a time phase difference of π / 2 to the piezoelectric ceramic in the second traveling wave piezoelectric driving module (6); S3. The application of the first and second simple harmonic signals will cause two bending vibration modes of the same order to be generated on the outer ring surface of the hollow traveling wave piezoelectric stator matrix (2). After coupling, a bending vibration traveling wave rotation mode of the same order can be formed, thereby generating a traveling wave acoustic field in the water area. The traveling wave acoustic field can be used to drive the water flow to rotate, and the traveling wave acoustic field can be used to clean the components in the water area; The standing wave drive includes the following processes: A simple harmonic signal of the longitudinal vibration or bending vibration resonance frequency is applied to the piezoelectric ceramics in the standing wave piezoelectric drive module to form the required longitudinal vibration or bending vibration, thereby generating a longitudinal vibration standing wave sound field in the water area. The standing wave sound field in the water area can be used to clean the components in the water area.

10. The working method of a vibration type ultrasonic cleaning device according to claim 9, characterized in that: The above-mentioned traveling wave piezoelectric driving modules can simultaneously apply the third simple harmonic signal of the ring bending vibration resonance frequency of the hollow traveling wave piezoelectric stator matrix (2) used, and the excitation signal frequency, voltage and phase difference of all hollow traveling wave piezoelectric stator driving modules are the same, thereby exciting a certain order standing wave vibration mode of the traveling wave piezoelectric stator; The same third simple harmonic signal is applied to the standing wave piezoelectric drive module. At this time, under the excitation of the same signal on all piezoelectric drive modules, the required standing wave vibration can be formed, thereby generating a stronger standing wave sound field in the water area, and the standing wave sound field in the water area is used to clean the components.

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