Multi-mode composite ultrasonic cleaning device and working method thereof

Abstract

The invention discloses a multi-mode composite ultrasonic cleaning device and a working method thereof. The multi-mode composite ultrasonic cleaning device comprises a cleaning bin, a traveling wave piezoelectric stator base body, a standing wave piezoelectric driving module, a first traveling wave piezoelectric driving module and a second traveling wave piezoelectric driving module. The traveling wave piezoelectric stator base body is located at the bottom of the cleaning bin or arranged on the side wall of the cleaning bin in a sleeving mode and corresponds to the first traveling wave piezoelectric driving module, and the second traveling wave piezoelectric driving module is located at the bottom or the outer surface of the traveling wave piezoelectric stator base body along the circumference. The standing wave piezoelectric driving module is installed in the center of the bottom of the cleaning bin, and the traveling wave piezoelectric stator base body generates traveling wave vibration in the circular ring direction by controlling an input electric signal of the piezoelectric driving module, so that acoustic radiation force generated by vibration is transmitted into a cavity of a cleaned element, and the cleaning effect is achieved. And the liquid generates rotary motion and ultrasonic vibration in the circular ring direction, so that the purpose of traveling wave, standing wave and liquid spinning composite cleaning is achieved. The device is high in reliability, high in cleaning efficiency, variable in vibration mode, controllable in frequency and good in universality.

Description

Technical Field

[0001] The invention belongs to the technical field of piezoelectric driving, and in particular relates to a multi-mode composite ultrasonic cleaning device and a working method thereof. Background Art

[0002] With the rapid development of the biomedical field, the requirements for medical device cleaning equipment have gradually increased, especially in the manufacturing and maintenance of precision components. How to achieve efficient and accurate cleaning has become a key technical challenge. Traditional cleaning methods, such as chemical cleaning and mechanical friction, are effective, but often have problems such as uneven cleaning, surface damage and low efficiency.

[0003] The ultrasonic cleaning device is an ultra-precision cleaning device based on the piezoelectric effect and ultrasonic vibration. Due to its characteristics of no surface damage and high cleaning rate, it is widely used in the cleaning of high-end biological experimental instruments, medical equipment, and especially in the production of electronic components.

[0004] Existing ultrasonic cleaning equipment mainly relies on a single vibration mode, such as standing wave vibration, which is difficult to meet the needs of multi-directional and multi-mode cleaning. Especially in the cleaning process of complex-shaped biomedical devices and precision electronic components, how to achieve more efficient and comprehensive cleaning is still a technical challenge. Summary of the invention

[0005] To solve the above problems, the present invention provides a multi-mode composite ultrasonic cleaning device and a working method thereof. The present invention has high reliability, high cleaning efficiency, variable vibration modes, controllable frequency, good versatility, easy promotion, and good economic benefits.

[0006] The present invention is achieved through the following technical solutions: The present invention provides a multi-mode composite ultrasonic cleaning device, comprising a cleaning chamber, a traveling wave piezoelectric stator matrix, a standing wave piezoelectric driving module, and a first traveling wave piezoelectric driving module and a second traveling wave piezoelectric driving module having the same structure and arranged alternately; The traveling wave piezoelectric stator matrix is ​​located at the bottom of the cleaning chamber or is sleeved on the side wall of the cleaning chamber, and the corresponding first traveling wave piezoelectric driving module and the second traveling wave piezoelectric driving module are located along the circumference at the bottom or outer surface of the traveling wave piezoelectric stator matrix; The standing wave piezoelectric drive module is installed at the center position of the bottom of the cleaning chamber. The standing wave piezoelectric drive module consists of a variable amplitude rod, a piezoelectric ceramic sheet, an electrode sheet, a rear end cover and a pre-tightening bolt. Several piezoelectric ceramic sheets are sleeved on the variable amplitude rod, and the electrode sheets are respectively arranged on both sides of the piezoelectric ceramic sheet. The rear end cover is sleeved on the tail of the variable amplitude rod and is tightened by the pre-tightening bolts.

[0007] Furthermore, the number of the first traveling wave piezoelectric driving modules and the second traveling wave piezoelectric driving modules are the same, and their specific number is the same as the order of the side length bending vibration mode of the selected traveling wave piezoelectric stator matrix, and the distance between the first traveling wave piezoelectric driving module and the second traveling wave piezoelectric driving module is the distance of the π / 2 spatial phase difference of the selected bending vibration mode.

[0008] Furthermore, when the traveling wave piezoelectric stator matrix is ​​located at the bottom of the cleaning chamber, the first traveling wave piezoelectric drive module, the second traveling wave piezoelectric drive module and the standing wave piezoelectric drive module have the same structure, and the first traveling wave piezoelectric drive module and the second traveling wave piezoelectric drive module are alternately arranged along the circumference at the bottom of the traveling wave piezoelectric stator matrix, and the lower surface of the traveling wave piezoelectric stator matrix is ​​connected to the front end of the amplitude rod of the first traveling wave piezoelectric drive module and the second traveling wave piezoelectric drive module through a stud, and the connection between the traveling wave piezoelectric stator matrix and the front end of the amplitude rod is respectively provided with threaded holes for threaded connection.

[0009] Furthermore, the number of piezoelectric ceramic sheets in the first traveling-wave piezoelectric driving module and the second traveling-wave piezoelectric driving module is an even number; the polarization directions of two adjacent piezoelectric ceramic sheets are placed in opposite directions to ensure that the electrodes on their connecting surfaces are the same; and the overall polarization directions of two adjacent groups of piezoelectric driving modules are opposite.

[0010] Furthermore, when the traveling wave piezoelectric stator matrix is ​​located on the side wall of the cleaning chamber, the circumferential shell of the cleaning chamber is fixedly connected to the inner surface of the traveling wave piezoelectric stator matrix, and the outer surface of the traveling wave piezoelectric stator matrix is ​​connected to the piezoelectric ceramics of the first traveling wave piezoelectric driving module and the second traveling wave piezoelectric driving module by adhesive.

[0011] Furthermore, the shape of the traveling wave piezoelectric stator matrix is ​​the same as that of the cleaning chamber. When the traveling wave piezoelectric stator matrix is ​​circular, the polarization directions of the piezoelectric units in the first traveling wave piezoelectric driving module are arranged alternately in positive and negative order, and the polarization directions of the piezoelectric units in the second traveling wave piezoelectric driving module are arranged alternately in positive and negative order.

[0012] Further, when the traveling wave piezoelectric stator matrix is ​​square, the polarization directions of the piezoelectric units in the first traveling wave piezoelectric driving module are arranged alternately in positive and negative order, and the polarization directions of the piezoelectric units in the second traveling wave piezoelectric driving module are arranged in the same order.

[0013] The present invention also provides a working method of a multi-mode composite ultrasonic cleaning device, which can selectively utilize a traveling wave piezoelectric stator matrix and a first and a second traveling wave piezoelectric driving module to realize traveling wave vibration in a rotational direction in a cleaning chamber, thereby driving the liquid in the cleaning chamber to generate rotational motion and traveling wave vibration; or utilize a standing wave piezoelectric driving module to realize longitudinal standing wave vibration at the bottom of the cleaning chamber; or use standing wave and traveling wave piezoelectric driving modules at the same time, utilize the water flow rotation and water area traveling wave sound field generated by the traveling wave sound field, and utilize the water area standing wave sound field generated by the standing wave sound field, so that the traveling wave sound field, rotation and standing wave sound field can perform a composite operation and clean the components in the water area at the same time.

[0014] Furthermore, the traveling wave drive includes the following processes: S1. Inject liquid into the top cleaning chamber and place the components to be cleaned; S2, applying a first simple harmonic signal of the bending vibration resonance frequency of the circular ring of the traveling wave piezoelectric stator matrix to the forward electrode piezoelectric ceramic in the first traveling wave piezoelectric driving module; applying a second simple harmonic signal with the same frequency and voltage as the first simple harmonic signal and a time phase difference of π / 2 to the forward electrode piezoelectric ceramic in the second traveling wave piezoelectric driving module; S3. The application of the first and second simple harmonic signals will generate two bending vibration modes of the same order on the upper surface of the traveling wave piezoelectric stator matrix, and after coupling, a bending vibration traveling wave rotation mode of the same order can be formed, thereby generating a traveling wave acoustic field in the water area. The traveling wave acoustic field can be used to drive the water flow to rotate, and the traveling wave acoustic field can be used to clean the components in the water area; The standing wave drive includes the following processes: A simple harmonic signal of the longitudinal vibration or bending vibration resonance frequency is applied to the forward electrode piezoelectric ceramic in the standing wave piezoelectric drive module to form the required longitudinal vibration or bending vibration, thereby generating a longitudinal vibration standing wave sound field in the water area. The standing wave sound field in the water area can be used to clean the components in the water area.

[0015] Furthermore, the above-mentioned traveling wave piezoelectric driving modules can simultaneously apply the third simple harmonic signal of the bending vibration resonance frequency of the circular ring of the traveling wave piezoelectric stator matrix used, and the excitation signals of all traveling wave piezoelectric stator driving modules have the same frequency, voltage and phase difference, thereby exciting a certain order standing wave vibration mode of the traveling wave piezoelectric stator; The same third simple harmonic signal is applied to the standing wave piezoelectric drive module. At this time, under the excitation of the same signal on all piezoelectric drive modules, the required standing wave vibration can be formed, thereby generating a stronger standing wave sound field in the water area, and the standing wave sound field in the water area is used to clean the components.

[0016] The beneficial effects of the present invention are: 1. The present invention provides a traveling wave piezoelectric drive module, and under the effect of the traveling wave vibration generated by it, non-contact water area rotation and traveling wave sound field can be realized, and multi-directional rotating cleaning operations can be realized. When the multi-layer traveling wave piezoelectric stator matrix is ​​located on the side wall of the cleaning chamber, uniform traveling wave vibration can be generated in the height direction of the cleaning chamber, thereby improving the cleaning efficiency; 2. The present invention adopts an integrated design of traveling wave and standing wave piezoelectric drive modules, so that traveling waves, water area rotation and standing waves can be used together to further improve the cleaning rate and cleaning efficiency of the components; 3. The present invention is provided with multiple groups of independent piezoelectric drive modules, which can enable the device to achieve standing wave excitation with a larger sound field at the same time, thereby improving the efficiency of standing wave cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic diagram of the overall structure of Embodiment 1 of the present invention; Figure 2 is a bottom view of embodiment 1 of the present invention; Figure 3 is a schematic structural diagram of a piezoelectric driving module according to Embodiment 1 of the present invention; Figure 4 Schematic diagram of a circular ring-shaped traveling wave piezoelectric stator matrix according to Example 1 of the present invention; Figure 5 Schematic diagram of a cleaning chamber according to Embodiment 1 of the present invention; Figure 6 a, 6b, and 6c are schematic diagrams of polarization directions of the positively polarized piezoelectric unit, the reversely polarized piezoelectric unit, and the piezoelectric ceramic group of the traveling wave piezoelectric driving module of Example 1 of the present invention, respectively; Figure 7 is a schematic diagram of the overall structure of Embodiment 2 of the present invention; Figure 8 is a bottom view of Embodiment 2 of the present invention; Fig. 9 Schematic diagram of the polarization direction of piezoelectric ceramics of the first traveling wave piezoelectric driving module of Example 2 of the present invention; Fig.10 Schematic diagram of the polarization direction of piezoelectric ceramics of the second traveling wave piezoelectric driving module of Example 2 of the present invention; Fig.11 Schematic diagram of a ring-type traveling wave piezoelectric stator matrix according to Embodiment 2 of the present invention; Fig.12 2 is a schematic diagram of the cleaning chamber structure of embodiment 2 of the present invention; Fig.13 is a schematic diagram of a standing wave piezoelectric driving module according to Embodiment 2 of the present invention; Fig.14 is the asymmetric vibration mode of the quadrilateral piezoelectric stator in the side length direction of embodiment 2 of the present invention; Fig.15 is a symmetrical vibration mode in the length direction of the quadrilateral piezoelectric stator of Example 2 of the present invention; Figure markings: 1-cleaning chamber, 2-traveling wave piezoelectric stator matrix, 3-amplitude transformer, 4-piezoelectric ceramic sheet, 5-electrode sheet, 6-rear end cover, 7-pre-tightening bolt, 8-first traveling wave piezoelectric drive module, 9-second traveling wave piezoelectric drive module, 10-standing wave piezoelectric drive module. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solution and advantages of the embodiments of the present invention more clear, the technical solution in the embodiments of the present invention will be clearly and completely described below according to the accompanying drawings.

[0019] Embodiment 1: like Figure 1 , Figure 2 As shown, a multi-mode composite ultrasonic cleaning device comprises a cleaning chamber 1, a traveling wave piezoelectric stator matrix 2, a first traveling wave piezoelectric driving module 8, a second traveling wave piezoelectric driving module 9 and a standing wave piezoelectric driving module 10; the first and second traveling wave piezoelectric driving modules are arranged on the traveling wave piezoelectric stator matrix 2 arranged at the bottom of the cleaning chamber 1, and are used to excite the traveling wave vibration of the piezoelectric stator matrix; the standing wave piezoelectric driving module 10 is arranged at the center of the bottom of the cleaning chamber 1, and is used to generate the standing wave vibration required for cleaning. By controlling the input electrical signal of the piezoelectric driving module, the traveling wave piezoelectric stator matrix 2 generates traveling wave vibration along the annular direction, thereby transmitting the acoustic radiation force generated by the vibration to the liquid in the cleaning chamber 1, so that the liquid generates a rotational motion and ultrasonic vibration along the annular direction, thereby achieving the purpose of traveling wave, standing wave, and liquid spin composite cleaning.

[0020] like Figure 5 As shown, the cleaning chamber 1 in this embodiment is a cylindrical hollow groove structure, and can also be a square structure, etc., which is used to place the cleaning liquid; the bottom surface of the cleaning chamber 1 is fixedly connected to the upper surface of the traveling wave piezoelectric stator matrix 2, and the connection method can be selected from epoxy resin glue bonding or bolt connection; like Figure 4 As shown, the traveling wave piezoelectric stator matrix 2 is annular, and its lower surface is connected to the horn of the first traveling wave piezoelectric driving module 8 and the second traveling wave piezoelectric driving module 9 through a stud; the connection between the traveling wave piezoelectric stator matrix 2 and the front end of the horn is respectively provided with a threaded hole for threaded connection; The traveling wave piezoelectric stator matrix 2 is not limited to one. A plurality of circular traveling wave piezoelectric stator matrices of different sizes can be installed on the same surface according to the size of the cleaning chamber, and the traveling wave piezoelectric drive modules thereof can be installed on each of them. The first traveling wave piezoelectric drive module 8, the second traveling wave piezoelectric drive module 9 and the standing wave piezoelectric drive module 10 have the same structure; the standing wave piezoelectric drive module 10 is vertically installed at the center of the bottom of the cleaning chamber and can be connected by means of glue or threaded holes; like Figure 3 As shown, the piezoelectric drive module is composed of a horn 3, a piezoelectric ceramic sheet 4, an electrode sheet 5, a rear end cover 6 and a pre-tightening bolt 7; the installation sequence is horn 3-electrode sheet 5-ceramic sheet 4-electrode sheet 5-...-electrode sheet 5-rear end cover 6-pre-tightening bolt 7; after all are installed, the pre-tightening bolt 7 should be pre-tightened to ensure that the piezoelectric ceramic sheet 4 is subjected to a certain pre-pressure; The ceramic sheets in the piezoelectric drive module are not limited to 4 sheets, and can be selected according to the actual power, but should be an even number of sheets; the electrode sheets 5 are arranged on both sides of the piezoelectric ceramic sheet 4; the polarization directions of the two adjacent ceramic sheets should be placed in opposite directions to ensure that the electrodes on their connecting surfaces are the same; the overall polarization directions of the two adjacent groups of piezoelectric drive modules should be opposite; The number of the first and second piezoelectric driving modules is the same, and the number of each is not limited to 4. The specific number is the same as the order of the selected bending vibration mode; the first and second piezoelectric driving modules are arranged alternately, and the distance between the two piezoelectric driving modules is the distance of π / 2 spatial phase difference of the selected bending vibration mode.

[0021] A working method of a multi-mode composite ultrasonic cleaning device is: A) The traveling wave piezoelectric stator matrix 2 and the first and second traveling wave piezoelectric drive modules can realize the traveling wave vibration in the rotation direction at the bottom of the cleaning chamber, thereby driving the liquid in the cleaning chamber 1 to generate rotational motion and traveling wave vibration. The traveling wave drive includes the following process: Inject liquid into the top cleaning chamber 1 and place the components to be cleaned; A first simple harmonic signal of the ring bending vibration resonance frequency of the traveling wave piezoelectric stator matrix is ​​applied to the forward electrode piezoelectric ceramic in the first traveling wave piezoelectric driving module 8; a second simple harmonic signal having the same frequency and voltage as the first simple harmonic signal and a time phase difference of π / 2 is applied to the forward electrode piezoelectric ceramic in the second traveling wave piezoelectric driving module 9; The application of the first and second simple harmonic signals will cause two bending vibration modes of the same order to be generated on the upper surface of the traveling wave piezoelectric stator matrix 2, and after coupling, a bending vibration traveling wave rotation mode of the same order can be formed, thereby generating a traveling wave acoustic field in the water area, and the traveling wave acoustic field can be used to drive the water flow to rotate, and the traveling wave acoustic field can be used to clean the components in the water area; B) The standing wave piezoelectric drive module 10 can be used to generate longitudinal standing wave vibration at the bottom of the cleaning chamber. The standing wave drive includes the following process: A simple harmonic signal of the longitudinal resonance frequency is applied to the forward electrode piezoelectric ceramic in the standing wave piezoelectric driving module 10 to form the required longitudinal vibration, thereby generating a longitudinal standing wave sound field in the water area, and the components in the water area can be cleaned by using the standing wave sound field in the water area; C) The above-mentioned standing wave and traveling wave piezoelectric drive modules can be used simultaneously, using the water flow rotation and water area traveling wave sound field generated by the traveling wave sound field, and the water area standing wave sound field generated by the standing wave sound field; the traveling wave sound field, rotation and standing wave sound field can perform composite operations to clean components in the water area at the same time.

[0022] D) The above-mentioned traveling wave piezoelectric driving modules can simultaneously apply the third simple harmonic signal of the bending vibration resonance frequency of the circular ring of the traveling wave piezoelectric stator matrix used, and the excitation signals of all traveling wave piezoelectric stator driving modules have the same frequency, voltage and phase difference, thereby exciting a certain order standing wave vibration mode of the traveling wave piezoelectric stator; The same third simple harmonic signal is applied to the standing wave piezoelectric drive module. At this time, under the excitation of the same signal in all piezoelectric drive modules, the required standing wave vibration can be formed, thereby generating a stronger standing wave sound field in the water area, and the standing wave sound field in the water area is used to clean the components.

[0023] Example 2 like Figure 7 As shown, a multi-mode composite ultrasonic cleaning device comprises a cleaning chamber 1, a traveling wave piezoelectric stator matrix 2, a first traveling wave piezoelectric driving module 8, a second traveling wave piezoelectric driving module 9 and a standing wave piezoelectric driving module 10; the first and second traveling wave piezoelectric driving modules are arranged on the annular traveling wave piezoelectric stator matrix 2 arranged in the circumferential direction of the cleaning chamber 1, and are used to excite the traveling wave vibration of the annular traveling wave piezoelectric stator matrix; the standing wave piezoelectric driving module 10 is arranged at the bottom center of the cleaning chamber 1, and is used to generate the standing wave vibration required for cleaning. By controlling the input electrical signal of the piezoelectric driving module, the traveling wave piezoelectric stator matrix 2 generates traveling wave vibration along the annular direction, thereby transmitting the acoustic radiation force generated by the vibration to the circumferential direction in the cleaning chamber, so that the liquid generates rotational motion and ultrasonic vibration along the annular direction, thereby achieving the purpose of traveling wave, standing wave, and liquid spin composite cleaning.

[0024] like Fig.12 As shown, in this embodiment, the cleaning chamber is square, and may also be other shapes with a circularly symmetrical structure such as a cylinder, and the internal groove chamber is used to place the cleaning liquid; In this embodiment, the traveling wave piezoelectric stator matrix 2 is sleeved on the circumferential outer surface of the traveling wave piezoelectric stator matrix 2, and the circumferential shell of the cleaning chamber 1 is fixedly connected to the annular inner surface of the traveling wave piezoelectric stator matrix 2, and the connection method can be selected by epoxy resin bonding or bolt connection; the shape of the traveling wave piezoelectric stator matrix 2 should be the same as that of the cleaning chamber 1; the outer surface of the traveling wave piezoelectric stator matrix 2 is connected to the piezoelectric ceramics of the first traveling wave piezoelectric driving module 8 and the second traveling wave piezoelectric driving module 9 by adhesive; The traveling wave piezoelectric stator matrix 2 is not limited to one, and multiple traveling wave piezoelectric stator matrices of the same size can be installed at the circumferential height of the shell of the cleaning chamber 1 according to the height of the cleaning chamber 1, and the first and second traveling wave piezoelectric drive modules respectively installed; The first traveling-wave piezoelectric driving module and the second traveling-wave piezoelectric driving module have the same structure; The piezoelectric unit in the piezoelectric drive module is not limited to piezoelectric ceramic sheets, and piezoelectric devices such as sandwich piezoelectric transducers and piezoelectric stacks can also be selected according to power requirements; The number of the first and second piezoelectric driving modules is the same, and the number of each is not fixed. The specific number is the same as the order of the bending vibration mode of the side length of the selected annular piezoelectric stator matrix, and the total number should be n times the number of sides of the symmetrical polygon; the first and second piezoelectric driving modules are arranged alternately, and the distance between the two piezoelectric driving modules is the distance of π / 2 spatial phase difference of the bending vibration mode at the side length of the selected polygon; When a circular annular traveling wave piezoelectric stator matrix 2 is selected, two resonance modes with similar frequencies, same vibration modes, and orthogonal vibration directions should be selected as design references; when a circumferentially symmetrical annular piezoelectric stator matrix similar to a quadrilateral is selected, bending vibration modes that are symmetrical along the circumferential direction, symmetrical along the length direction of a single side, and antisymmetrical should be selected as design references; The standing wave piezoelectric drive module 10 is installed at the bottom center of the cleaning chamber 1 and can be connected by means of glue or threaded holes; the standing wave piezoelectric drive module 10 can select piezoelectric devices such as patch piezoelectric transducers, sandwich piezoelectric transducers, piezoelectric stacks, etc. according to power requirements.

[0025] The working method of the multi-mode composite ultrasonic cleaning device is: A) The ring-shaped traveling wave piezoelectric stator matrix 2 and the first and second traveling wave piezoelectric drive modules can realize the traveling wave vibration of the cleaning shell along the circumference in the rotation direction, thereby driving the liquid in the cleaning chamber to generate rotational motion and traveling wave vibration. The traveling wave drive includes the following process: Inject liquid into the top cleaning chamber 1 and place the components to be cleaned; A first simple harmonic signal of the bending resonance frequency of the ring-type traveling wave piezoelectric stator matrix 2 is applied to the forward electrode piezoelectric ceramic in the first traveling wave piezoelectric driving module 8; a second simple harmonic signal having the same frequency and voltage as the first simple harmonic signal and a time phase difference of π / 2 is applied to the forward electrode piezoelectric ceramic in the second traveling wave piezoelectric driving module 10; The application of the first and second simple harmonic signals will cause two bending vibration modes of the same order to be generated on the inner ring surface of the ring-type traveling wave piezoelectric stator matrix 2, and after coupling, a bending vibration traveling wave rotation mode of the same order can be formed, thereby generating a traveling wave acoustic field in the water area, and the traveling wave acoustic field can be used to drive the water flow to rotate, and the traveling wave acoustic field can be used to clean the components in the water area; B) The standing wave piezoelectric drive module 10 can be used to generate longitudinal standing wave vibration at the bottom of the cleaning chamber. The standing wave drive includes the following process: A simple harmonic signal of the longitudinal vibration or bending vibration resonance frequency is applied to the forward electrode piezoelectric ceramic in the standing wave piezoelectric driving module 10 to form the required longitudinal vibration or bending vibration, thereby generating a standing wave sound field in the water area, and the components in the water area can be cleaned by using the standing wave sound field in the water area; C) The above-mentioned standing wave and traveling wave piezoelectric drive modules can be used simultaneously, using the water flow rotation and water area traveling wave sound field generated by the traveling wave sound field, and the water area standing wave sound field generated by the standing wave sound field; the traveling wave sound field, rotation and standing wave sound field can perform composite operations to clean components in the water area at the same time.

[0026] D) The above-mentioned traveling wave piezoelectric driving modules can simultaneously apply the third simple harmonic signal of the bending vibration resonance frequency of the circular ring of the traveling wave piezoelectric stator matrix used, and the excitation signals of all traveling wave piezoelectric stator driving modules have the same frequency, voltage and phase difference, thereby exciting a certain order standing wave vibration mode of the traveling wave piezoelectric stator; The same third simple harmonic signal is applied to the standing wave piezoelectric drive module. At this time, under the excitation of the same signal in all piezoelectric drive modules, the required standing wave vibration can be formed, thereby generating a stronger standing wave sound field in the water area, and the standing wave sound field in the water area is used to clean the components.

[0027] It should be noted that although the present invention is described by the above embodiments, the present invention may also have other various embodiments. Without departing from the spirit and scope of the present invention, it is obvious that those skilled in the art may make various corresponding changes and deformations to the present invention, but these changes and deformations should all fall within the scope of protection of the appended claims of the present invention and their equivalents.

Claims

1. A multi-mode composite ultrasonic cleaning device, characterized in that: It comprises a cleaning chamber (1), a traveling wave piezoelectric stator matrix (2), a standing wave piezoelectric drive module (10), and a first traveling wave piezoelectric drive module (8) and a second traveling wave piezoelectric drive module (9) having the same structure and arranged alternately; The traveling wave piezoelectric stator matrix (2) is located at the bottom of the cleaning chamber (1) or is sleeved on the side wall of the cleaning chamber (1), and the corresponding first traveling wave piezoelectric drive module (8) and the second traveling wave piezoelectric drive module (9) are located along the circumference at the bottom or outer surface of the traveling wave piezoelectric stator matrix (2); The standing wave piezoelectric drive module (10) is installed at the center of the bottom of the cleaning chamber. The standing wave piezoelectric drive module (10) is composed of a variable amplitude rod (3), a piezoelectric ceramic sheet (4), an electrode sheet (5), a rear end cover (6) and a pre-tightening bolt (7). A plurality of piezoelectric ceramic sheets (4) are sleeved on the variable amplitude rod (3), the electrode sheets (5) are respectively arranged on both sides of the piezoelectric ceramic sheet (4), and the rear end cover (6) is sleeved on the tail of the variable amplitude rod (3) and is tightened by the pre-tightening bolt (7).

2. A multi-mode composite ultrasonic cleaning device according to claim 1, characterized in that: The number of the first traveling wave piezoelectric drive modules (8) and the number of the second traveling wave piezoelectric drive modules (9) are the same, and their specific number is the same as the order of the side length bending vibration mode of the selected traveling wave piezoelectric stator matrix (2), and the distance between the first traveling wave piezoelectric drive module (8) and the second traveling wave piezoelectric drive module (9) is the distance of π / 2 spatial phase difference of the selected bending vibration mode.

3. A multi-mode composite ultrasonic cleaning device according to claim 1, characterized in that: When the traveling wave piezoelectric stator matrix (2) is located at the bottom of the cleaning chamber (1), the first traveling wave piezoelectric drive module (8), the second traveling wave piezoelectric drive module (9) and the standing wave piezoelectric drive module (10) have the same structure, and the first traveling wave piezoelectric drive module (8) and the second traveling wave piezoelectric drive module (9) are alternately arranged along the circumference at the bottom of the traveling wave piezoelectric stator matrix (2), and the lower surface of the traveling wave piezoelectric stator matrix (2) is connected to the front ends of the amplitude rods of the first traveling wave piezoelectric drive module and the second traveling wave piezoelectric drive module via studs, and threaded holes for threaded connection are respectively arranged at the connection between the traveling wave piezoelectric stator matrix (2) and the front ends of the amplitude rods (3).

4. A multi-mode composite ultrasonic cleaning device according to claim 3, characterized in that: The number of piezoelectric ceramic sheets in the first traveling wave piezoelectric drive module (8) and the second traveling wave piezoelectric drive module (9) is an even number; the polarization directions of two adjacent piezoelectric ceramic sheets are opposite to each other, ensuring that the electrodes of their connecting surfaces are the same; and the overall polarization directions of two adjacent groups of piezoelectric drive modules are opposite to each other.

5. The multi-mode composite ultrasonic cleaning device according to claim 1, characterized in that: When the traveling wave piezoelectric stator matrix (2) is located on the side wall of the cleaning chamber (1), the circumferential shell of the cleaning chamber (1) is fixedly connected to the inner surface of the traveling wave piezoelectric stator matrix (2), and the outer surface of the traveling wave piezoelectric stator matrix (2) is connected to the piezoelectric ceramics of the first traveling wave piezoelectric drive module (8) and the second traveling wave piezoelectric drive module (9) by adhesive.

6. A multi-mode composite ultrasonic cleaning device according to claim 5, characterized in that: The shape of the traveling wave piezoelectric stator matrix (2) is the same as that of the cleaning chamber (1). When the traveling wave piezoelectric stator matrix (2) is circular, the polarization directions of the piezoelectric units in the first traveling wave piezoelectric driving module (8) are arranged alternately in positive and negative order, and the polarization directions of the piezoelectric units in the second traveling wave piezoelectric driving module (9) are arranged alternately in positive and negative order.

7. A multi-mode composite ultrasonic cleaning device according to claim 6, characterized in that: When the traveling wave piezoelectric stator matrix (2) is square, the polarization directions of the piezoelectric units in the first traveling wave piezoelectric driving module (8) are arranged alternately in positive and negative order, and the polarization directions of the piezoelectric units in the second traveling wave piezoelectric driving module (9) are arranged in the same order.

8. A working method of a multi-mode composite ultrasonic cleaning device according to any one of claims 1 to 7, characterized in that: According to the needs, the traveling wave piezoelectric stator matrix (2) and the first and second traveling wave piezoelectric drive modules are selected to realize the traveling wave vibration in the rotation direction of the cleaning chamber, thereby driving the liquid in the cleaning chamber to generate rotational motion and traveling wave vibration; or the standing wave piezoelectric drive module (10) can be used to realize the longitudinal standing wave vibration at the bottom of the cleaning chamber; or the standing wave and traveling wave piezoelectric drive modules are used simultaneously, and the water flow rotation and water area traveling wave sound field generated by the traveling wave sound field are utilized, and the water area standing wave sound field generated by the standing wave sound field is utilized, so that the traveling wave sound field, rotation and standing wave sound field perform a composite operation, and the components in the water area are cleaned at the same time.

9. The working method of a multi-mode composite ultrasonic cleaning device according to claim 8, characterized in that: Traveling wave drive includes the following processes: S1. Inject liquid into the top cleaning chamber (1) and place the components to be cleaned; S2, applying a first simple harmonic signal of the ring bending vibration resonance frequency of the traveling wave piezoelectric stator matrix to the forward electrode piezoelectric ceramic in the first traveling wave piezoelectric driving module (8); applying a second simple harmonic signal having the same frequency and voltage as the first simple harmonic signal and a time phase difference of π / 2 to the forward electrode piezoelectric ceramic in the second traveling wave piezoelectric driving module (9); S3, the application of the first and second simple harmonic signals will cause two bending vibration modes of the same order to be generated on the upper surface of the traveling wave piezoelectric stator matrix (2), and after coupling, a bending vibration traveling wave rotation mode of the same order can be formed, thereby generating a traveling wave acoustic field in the water area, and the traveling wave acoustic field can be used to drive the water flow to rotate, and the traveling wave acoustic field can be used to clean the components in the water area; The standing wave drive includes the following processes: A simple harmonic signal of the longitudinal vibration or bending vibration resonance frequency is applied to the forward electrode piezoelectric ceramic in the standing wave piezoelectric drive module (10) to generate the required longitudinal vibration or bending vibration, thereby generating a longitudinal vibration standing wave sound field in the water area. The standing wave sound field in the water area can be used to clean the components in the water area.

10. The working method of a multi-mode composite ultrasonic cleaning device according to claim 9, characterized in that: The above-mentioned traveling wave piezoelectric driving modules can simultaneously apply the third simple harmonic signal of the ring bending vibration resonance frequency of the traveling wave piezoelectric stator matrix (2) used, and the excitation signals of all traveling wave piezoelectric stator driving modules have the same frequency, voltage and phase difference, thereby exciting a certain order standing wave vibration mode of the traveling wave piezoelectric stator; The same third simple harmonic signal is applied to the standing wave piezoelectric drive module (10). At this time, under the excitation of the same signal to all piezoelectric drive modules, the required standing wave vibration can be formed, thereby generating a stronger standing wave sound field in the water area, and the standing wave sound field in the water area is used to clean the components.

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