Vacuum roll-to-roll plasma cleaning machine and automatic induction control method thereof

Abstract

The invention discloses a vacuum roll-to-roll plasma cleaning machine and an induction automatic control method thereof, and relates to the field of vacuum roll-to-roll plasma cleaning machines. According to the vacuum roll-to-roll plasma cleaning machine and the induction automatic control method thereof, the vacuum roll-to-roll plasma cleaning machine comprises a plasma cleaning machine body, a vacuum chamber, a transmission rod, a connecting frame, an adjusting unit and a transmission unit. According to the vacuum roll-to-roll plasma cleaning machine and the induction automatic control method thereof, the movable seat drives the first extrusion shaft to extrude a roll-shaped material attached to the surface of the first extrusion shaft, the roll-shaped material is tensioned, it is guaranteed that the roll-shaped material is in a tensioned state in the vacuum chamber, the situation that the roll-shaped material is loosened or folded in the vacuum chamber is avoided, and the service life of the roll-to-roll plasma cleaning machine is prolonged. And the displacement seat and the tensioning shaft move to adjust the length of the roll-shaped material in the vacuum chamber, so that the time length of the roll-shaped material in the vacuum chamber is changed, the cleaning effect is changed, and the cleaning effect is rapidly changed.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum roll-to-roll plasma cleaning machines, in particular to a vacuum roll-to-roll plasma cleaning machine and an induction automatic control method thereof. Background Art

[0002] Vacuum roll-to-roll plasma cleaning machine is a highly efficient and environmentally friendly surface treatment equipment.

[0003] The vacuum roll-to-roll plasma cleaning machine uses plasma technology to place the roll to be cleaned in a vacuum chamber, form plasma through heating and gas injection, and use the high-energy ions and active particles in the plasma to react physically and chemically with the material surface, thereby removing surface impurities, improving surface roughness and hydrophilicity, etc.

[0004] In the prior art, the roll material is transported to the plasma cleaning machine for cleaning by a transmission roller, and the roll material is cleaned by forming plasma through heating and gas injection, but in the process of conveying the roll material, it is impossible to effectively ensure that the roll material is in a taut state for a long time, which leads to relaxation or folding, affecting the cleaning effect. At the same time, when the roll material is not thoroughly cleaned, in the prior art, it is impossible to quickly and intuitively change the cleaning effect by changing the activity in the plasma cleaning machine, and a certain amount of time is required for processing and observation. Therefore, we propose a vacuum roll-to-roll plasma cleaning machine and its induction automatic control method. Summary of the invention

[0005] In view of the deficiencies in the prior art, the present invention provides a vacuum roll-to-roll plasma cleaning machine and an induction automatic control method thereof, which solves the problem that during the transmission of the roll material, it is impossible to effectively ensure that the roll material is in a taut state for a long time, thereby causing relaxation or folding, affecting the cleaning effect; at the same time, when the roll material is not thoroughly cleaned, the cleaning effect cannot be changed quickly and intuitively by changing the activity in the plasma cleaning machine.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions: a vacuum roll-to-roll plasma cleaning machine and an induction automatic control method thereof, comprising a machine body, characterized in that the machine body is provided with: The vacuum chamber is located in the middle of the machine body and creates a vacuum environment for the rolled material; A transmission rod, corresponding to the feed port of the vacuum chamber and connected to a driving mechanism in the plasma cleaning machine, is used to feed the roll material; A connecting frame, spanning the middle of the vacuum chamber, is used to transfer the roll material in the vacuum chamber; The vacuum chamber is provided with: An adjusting unit is arranged in the middle of the connecting frame and extends along the feeding port of the vacuum chamber, and is used to tighten the rolled material; The transmission unit is arranged on the adjusting unit and cooperates with the adjusting unit to realize the tightening of the rolled material and to reel the rolled material along the direction of the connecting frame.

[0007] Preferably, the vacuum chamber is fixedly connected to the plasma cleaning machine, and sealed doors are rotatably connected on both sides of the vacuum chamber. The sealed doors on both sides are respectively provided with a feed port and a discharge port for feeding and discharging packaged materials. The transmission rod is rotatably connected to the plasma cleaning machine, and the transmission rod is connected to a driving mechanism in the plasma cleaning machine.

[0008] Preferably, the connecting frame is transmission-connected with an upper rotating shaft and a lower rotating shaft, and the upper rotating shaft and the lower rotating shaft are connected to a driving mechanism in the plasma cleaning machine, and the roll material is conveyed by rotating the upper rotating shaft and the lower rotating shaft.

[0009] Preferably, the adjustment unit comprises: A connecting seat is arranged on both sides of the vacuum chamber; A bidirectional screw rod is rotatably connected to the inner wall of the connecting seat; The moving seat is slidably connected to the inner wall of the connecting seat, and the moving seat is driven to move by a bidirectional screw rod; The first extrusion shaft is rotatably connected between the corresponding moving seats and moves on the connecting seat following the moving seat, so as to tighten the rolled material and ensure a better cleaning effect in the vacuum chamber.

[0010] Preferably, two adjustment seats are slidably connected to the inner wall of the connecting seat, and the two adjustment seats are threadedly connected to a bidirectional screw rod. The bidirectional screw rod is used to adjust the positions of the two adjustment seats. A spring is arranged between the adjustment seat and the movable seat. Through the adjustment seat and the spring, a thrust is generated on the movable seat to cooperate with the first extrusion shaft to extrude the rolled material.

[0011] Preferably, the adjustment unit is connected to a transmission unit, and the transmission unit comprises: A second extrusion shaft, the second extrusion shaft is used for extruding the roll material; The push rod is rotatably connected to the corresponding first extrusion shaft and is used for moving in coordination with the movement of the first extrusion shaft.

[0012] Preferably, one end of the push rod away from the first extrusion shaft is rotatably connected to the second extrusion shaft, and is used to adjust the position of the second extrusion shaft when adjusting the position of the first extrusion shaft, so as to quickly tighten the rolled material.

[0013] Preferably, the connecting frame is provided with a positioning unit, the positioning unit is used to adjust the length of the roll material in the vacuum chamber, and the positioning unit includes: Displacement seat; A tensioning shaft is rotatably connected to the displacement seat and is used to adjust the length of the rolled material in the vacuum chamber; The adjusting screw rod is rotatably connected in the connecting frame and is used to adjust the height of the displacement seat and the tensioning shaft; The threaded sleeve is slidably connected to the inner wall of the connecting frame, and the threaded sleeve is threadedly connected to the adjusting screw rod, and cooperates with the adjusting screw rod to adjust the position of the displacement seat and the tensioning shaft.

[0014] Preferably, a sliding rod is fixedly connected to the bottom end surface of the displacement seat, a fixed sleeve is slidably connected to the inner wall of the sliding rod, and the fixed sleeve is fixedly connected to the inner wall of the connecting frame.

[0015] The induction automatic control method of a vacuum roll-to-roll plasma cleaning machine includes the following control methods: S1: The control system of vacuum roll-to-roll plasma cleaning machine usually adopts PLC as the core. PLC automatic control has perfect control and protection functions, which can ensure the stable operation of the equipment. Combined with the touch screen operation interface on the plasma cleaning machine, through the preset program and logic, PLC can realize the precise control of the cleaning process, including plasma generation, gas injection, temperature adjustment and vacuum maintenance, etc. S2: The vacuum roll-to-roll plasma cleaning machine uses a variety of sensors to detect whether the vacuum door is closed. The sensors include inductive proximity sensors, micro switches and photoelectric sensors. The above sensors detect the position and status of the vacuum door in real time and transmit the signal to the control system. The control system determines whether the vacuum door is closed based on the sensor signal and issues an alarm or stops the cleaning process when necessary. S3: Use proportional, integral and differential control algorithms to precisely control the vacuum degree. The function of the proportional link is to adjust the output proportionally according to the current error. When the error is large, the proportional link will produce a large adjustment amount to quickly reduce the error. When the error is small, the adjustment amount will be reduced accordingly. The function of the integral link is to eliminate the steady-state error caused by pure proportional regulation. By integrating the error, accumulating past error information, and adjusting the output accordingly, the error can be gradually eliminated. The role of the differential link is to reflect the changing trend of the error and adjust the error in advance according to the changing trend. By calculating the rate of change of the error and adjusting the output accordingly, the further change of the error can be suppressed. When the vacuum degree of the cavity differs from the set value and is outside the set range, the PID controller automatically adjusts the speed of the vacuum pump motor according to the size and change rate of the deviation, so that the vacuum degree quickly returns to the set value range; S4: In the vacuum roll-to-roll plasma cleaning machine, the injection of process gas adopts high-precision electronic mass flow meter and advanced gas pipeline and valve. Through the preset program and logic, the control system can adjust the flow and proportion of process gas in real time to ensure the stability and consistency of the cleaning process; S5: Use sensors to monitor the state of plasma, monitor plasma density and temperature, etc. When the plasma state changes, the control system will automatically adjust the gas injection and heating parameters to maintain the stability of the plasma.

[0016] The present invention discloses a vacuum roll-to-roll plasma cleaning machine and an induction automatic control method thereof, which have the following beneficial effects: 1. The vacuum roll-to-roll plasma cleaning machine and its induction automatic control method drive the adjustment seat to move in opposite directions or opposite directions by rotating the bidirectional screw rod. When the adjustment seat moves in opposite directions, the adjustment seat squeezes the spring, so that a thrust is generated on the moving seat under the rebound of the spring. At this time, the moving seat drives the first extrusion shaft to squeeze the roll material attached to its surface, tightens the roll material, ensures that the roll material is in a tightened state in the vacuum chamber, avoids the roll material from being loosened or folded in the vacuum chamber during a long period of transmission, and improves its cleaning effect.

[0017] 2. The vacuum roll-to-roll plasma cleaning machine and its induction automatic control method, after the roll material passes through the upper rotating shaft, the roll material passes through the tensioning shaft and fits with the lower end of the tensioning shaft. When the driving mechanism in the connecting frame drives the adjusting screw to rotate, the threaded sleeve slides along the inner wall of the connecting frame, driving the displacement seat and the tensioning shaft to move, changing the position of the tensioning shaft, and then adjusting the length of the roll material in the vacuum chamber, thereby changing the length of time the roll material is in the vacuum chamber, and then changing its cleaning effect, so as to quickly change the cleaning effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the structure of the connecting frame of the present invention; Figure 3 It is a structural schematic diagram of another viewing angle of the present invention; Figure 4This is a schematic diagram of the connection structure between the adjustment unit and the transmission unit of the present invention; Figure 5 It is a schematic diagram of the structure of the adjustment unit and the transmission unit of the present invention; Figure 6 It is a schematic diagram of the structure of the regulating unit of the present invention.

[0020] In the figure: 1. plasma cleaning machine; 2. vacuum chamber; 201. sealing door; 3. transmission rod; 4. connecting frame; 401. upper rotating shaft; 402. lower rotating shaft; 5. adjusting unit; 501. connecting seat; 502. bidirectional screw; 503. moving seat; 504. first extrusion shaft; 505. adjusting seat; 506. spring; 6. transmission unit; 601. second extrusion shaft; 602. pushing rod; 7. positioning unit; 701. displacement seat; 702. tensioning shaft; 703. adjusting screw; 704. threaded sleeve; 705. fixed sleeve; 706. sliding rod. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] The embodiment of the present application provides a vacuum roll-to-roll plasma cleaning machine and an induction automatic control method thereof, which solves the problem that during the transmission of the roll material, it is impossible to effectively ensure that the roll material is in a taut state for a long time, thereby causing relaxation or folding, affecting the cleaning effect. At the same time, when the roll material is not thoroughly cleaned, the cleaning effect cannot be quickly and intuitively changed by changing the activity in the plasma cleaning machine 1. The invention realizes that the adjusting seat 505 is driven to move in opposite directions or in opposite directions by rotating the bidirectional screw rod 502. When the adjusting seat 505 moves in opposite directions, the adjusting seat 505 squeezes the spring 506, so that a thrust is generated on the moving seat 503 under the rebound of the spring 506. At this time, the moving seat 503 drives the first extrusion shaft 504 to squeeze the roll material attached to its surface, and tightens the roll material; ensuring that the roll material is in a taut state in the vacuum chamber 2, avoiding the roll material from being slack or folded in the vacuum chamber 2 during a long transmission process, and improving its cleaning effect.

[0023] After the rolled material passes through the upper rotating shaft 401, the rolled material passes through the tensioning shaft 702 and fits with the lower end of the tensioning shaft 702. When the driving mechanism in the connecting frame 4 drives the adjusting screw 703 to rotate, the threaded sleeve 704 slides along the inner wall of the connecting frame 4, driving the displacement seat 701 and the tensioning shaft 702 to move, changing the position of the tensioning shaft 702, and then adjusting the length of the rolled material in the vacuum chamber 2, thereby changing the length of time the rolled material stays in the vacuum chamber 2, and then changing its cleaning effect, thereby achieving a rapid change in the cleaning effect.

[0024] In order to better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0025] The embodiment of the invention discloses a vacuum roll-to-roll plasma cleaning machine and an induction automatic control method thereof.

[0026] Embodiment 1: According to the attached Figure 1-6 As shown, it includes a body 1, characterized in that the body 1 is provided with: The vacuum chamber 2 is located in the middle of the machine body 1 and creates a vacuum environment for the rolled material; The transmission rod 3 corresponds to the feed port of the vacuum chamber 2 and is connected to the driving mechanism in the plasma cleaning machine 1 for feeding the roll material; A connecting frame 4 spans across the middle of the vacuum chamber 2 and is used to transfer the roll material in the vacuum chamber 2; The vacuum chamber 2 is equipped with: The adjusting unit 5 is arranged in the middle of the connecting frame 4 and extends along the feeding port of the vacuum chamber 2, and is used to tighten the rolled material; The transmission unit 6 is disposed on the adjustment unit 5 , and cooperates with the adjustment unit 5 to achieve the tightening of the rolled material, and to reel the rolled material along the direction of the connecting frame 4 .

[0027] The vacuum chamber 2 is fixedly connected to the plasma cleaning machine 1, and sealed doors 201 are rotatably connected on both sides of the vacuum chamber 2. The sealed doors 201 on both sides are respectively provided with a feed port and a discharge port for feeding and discharging the rolled material. The transmission rod 3 is rotatably connected to the plasma cleaning machine 1. The transmission rod 3 is connected to the driving mechanism in the plasma cleaning machine 1, and the transmission rod 3 is driven to rotate by the driving mechanism. Under the rotation of the transmission rod 3, the transmission rod 3 drives the rolled material to rotate, and the rolled material is fed through the feed port, and the upper rotating shaft 401 and the lower rotating shaft 402 in the connecting frame 4 are cooperated to be transmitted, and the rolled material is cleaned in the connecting frame 4.

[0028] The connecting frame 4 is transmission-connected with an upper rotating shaft 401 and a lower rotating shaft 402, which are connected to a driving mechanism in the plasma cleaning machine 1, and the upper rotating shaft 401 and the lower rotating shaft 402 are rotated to drive the rolled material for transmission. In particular, the rolled material is sent into the vacuum chamber 2, at which time the rolled material first contacts the first extrusion shaft 504 in the side adjustment unit 5, and then the rolled material passes downward through the lower rotating shaft 402 and fits with the bottom of the lower rotating shaft 402, and then passes upward through the upper rotating shaft 401 and fits with the surface of the upper rotating shaft 401. Under the action of the adjustment unit 5, the rolled material is tightly attached to the surfaces of the upper rotating shaft 401 and the lower rotating shaft 402, so that the upper rotating shaft 401 and the lower rotating shaft 402 can drive the rolled material for transmission.

[0029] The adjustment unit 5 comprises: The connecting seat 501 is arranged on both sides of the vacuum chamber 2; A bidirectional screw rod 502 is rotatably connected to the inner wall of the connecting seat 501; The movable seat 503 is slidably connected to the inner wall of the connecting seat 501, and is driven to move by the bidirectional screw rod 502; The first extrusion shaft 504 is rotatably connected between the corresponding moving seats 503 and moves on the connecting seat 501 following the moving seat 503 to tighten the rolled material to ensure a better cleaning effect in the vacuum chamber 2 .

[0030] Two adjustment seats 505 are slidably connected to the inner wall of the connecting seat 501. The two adjustment seats 505 are threadedly connected to the bidirectional screw rod 502. The bidirectional screw rod 502 is used to adjust the positions of the two adjustment seats 505. A spring 506 is arranged between the adjustment seat 505 and the moving seat 503. The two ends of the spring 506 are respectively fixedly connected to the moving seat 503 and the adjustment seat 505. The spring 506 is sleeved on the outer peripheral wall of the bidirectional screw rod 502. Through the adjustment seat 505 and the spring 506, a thrust is generated on the moving seat 503 to cooperate with the first extrusion shaft 504 to extrude the rolled material. It should be particularly emphasized that the adjusting seat 505 is driven to move in opposite directions by rotating the bidirectional screw rod 502. When the adjusting seat 505 moves in the opposite direction, the adjusting seat 505 squeezes the spring 506, so that the spring 506 generates a thrust force on the moving seat 503 under the rebound of the spring 506. At this time, the moving seat 503 drives the first extrusion shaft 504 to squeeze the roll material attached to its surface, and tighten the roll material. Furthermore, it is ensured that the rolled material is in a tensioned state in the vacuum chamber 2, so as to avoid the rolled material from becoming loose or folded in the vacuum chamber 2 during a long period of transportation, thereby improving the cleaning effect.

[0031] The adjustment unit 5 is connected to the transmission unit 6, and the transmission unit 6 includes: A second extrusion shaft 601, the second extrusion shaft 601 is used for extruding the roll material; The push rod 602 is rotatably connected to the corresponding first extrusion shaft 504 and is used to move in coordination with the movement of the first extrusion shaft 504 .

[0032] One end of the push rod 602 away from the first extrusion shaft 504 is rotatably connected to the second extrusion shaft 601, and is used to adjust the position of the second extrusion shaft 601 when adjusting the position of the first extrusion shaft 504, so as to quickly tighten the rolled material; It should be particularly emphasized that when the roll material is attached to the outer wall of the first extrusion shaft 504, the first extrusion shaft 504 moves under the extrusion of the roll material, so that the first extrusion shaft 504 compresses the spring 506, and at the same time, the movement of the first extrusion shaft 504 drives the push rod 602 to rotate, pushing the second extrusion shaft 601 to move upward, thereby causing the push rod 602 to push the roll material upward, and the roll material is quickly straightened; Furthermore, the push rod 602 moves to move the first extrusion shaft 504 on the other side, so that the two first extrusion shafts 504 move toward each other, both compressing the spring 506, thereby ensuring the pressure of the two first extrusion shafts 504 on the rolled material and tightening the rolled material.

[0033] Embodiment 2: The connecting frame 4 is provided with a positioning unit 7, which is used to adjust the length of the roll material in the vacuum chamber 2. The positioning unit 7 includes: Displacement seat 701; The tension shaft 702 is rotatably connected to the displacement seat 701 and is used to adjust the length of the roll material in the vacuum chamber 2; The adjusting screw rod 703 is rotatably connected to the connecting frame 4 and is used to adjust the height of the displacement seat 701 and the tensioning shaft 702; The threaded sleeve 704 is slidably connected to the inner wall of the connecting frame 4. The threaded sleeve 704 is threadedly connected to the adjusting screw 703, and cooperates with the adjusting screw 703 to adjust the position of the displacement seat 701 and the tensioning shaft 702; It is particularly disclosed that after the rolled material passes through the upper rotating shaft 401, the rolled material passes through the tensioning shaft 702 and fits with the lower end of the tensioning shaft 702. When the driving mechanism in the connecting frame 4 drives the adjusting screw 703 to rotate, the threaded sleeve 704 slides along the inner wall of the connecting frame 4, driving the displacement seat 701 and the tensioning shaft 702 to move, changing the position of the tensioning shaft 702, and then adjusting the length of the rolled material in the vacuum chamber 2, thereby changing the length of time the rolled material is in the vacuum chamber 2, and then changing its cleaning effect, thereby achieving a rapid change in the cleaning effect.

[0034] The bottom end face of the displacement seat 701 is fixedly connected with a sliding rod 706, and the inner wall of the sliding rod 706 is slidably connected with a fixed sleeve 705, and the fixed sleeve 705 is fixedly connected to the inner wall of the connecting frame 4. Furthermore, when the displacement seat 701 moves, the sliding rod 706 slides on the inner wall of the fixed sleeve 705, so that the movement of the displacement seat 701 is more stable.

[0035] The induction automatic control method of the vacuum roll-to-roll plasma cleaning machine includes the following control methods: S1: The control system of the vacuum roll-to-roll plasma cleaning machine usually uses PLC as the core. The PLC automatic control has perfect control and protection functions, which can ensure the stable operation of the equipment. Combined with the touch screen operation interface on the plasma cleaning machine 1, through the preset program and logic, the PLC can realize the precise control of the cleaning process, including the generation of plasma, the injection of gas, the adjustment of temperature and the maintenance of vacuum degree, etc.; S2: The vacuum roll-to-roll plasma cleaning machine uses a variety of sensors to detect whether the vacuum door is closed. The sensors include inductive proximity sensors, micro switches and photoelectric sensors. The above sensors detect the position and status of the vacuum door in real time and transmit the signal to the control system. The control system determines whether the vacuum door is closed based on the sensor signal and issues an alarm or stops the cleaning process when necessary. S3: Use proportional, integral and differential control algorithms to precisely control the vacuum degree. The function of the proportional link is to adjust the output proportionally according to the current error. When the error is large, the proportional link will produce a large adjustment amount to quickly reduce the error. When the error is small, the adjustment amount will be reduced accordingly. The function of the integral link is to eliminate the steady-state error caused by pure proportional regulation. By integrating the error, accumulating past error information, and adjusting the output accordingly, the error can be gradually eliminated. The role of the differential link is to reflect the changing trend of the error and adjust the error in advance according to the changing trend. By calculating the rate of change of the error and adjusting the output accordingly, the further change of the error can be suppressed. When the vacuum degree of the cavity differs from the set value and is outside the set range, the PID controller automatically adjusts the speed of the vacuum pump motor according to the size and change rate of the deviation, so that the vacuum degree quickly returns to the set value range; S4: In the vacuum roll-to-roll plasma cleaning machine, the injection of process gas adopts high-precision electronic mass flow meter and advanced gas pipeline and valve. Through the preset program and logic, the control system can adjust the flow and proportion of process gas in real time to ensure the stability and consistency of the cleaning process; S5: Use sensors to monitor the state of plasma, monitor plasma density and temperature, etc. When the plasma state changes, the control system will automatically adjust the gas injection and heating parameters to maintain the stability of the plasma.

[0036] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A vacuum roll-to-roll plasma cleaning machine, comprising a machine body (1), characterized in that: The machine body (1) is provided with: A vacuum chamber (2) is located in the middle of the machine body (1) and creates a vacuum environment for the rolled material; A transmission rod (3) corresponding to the feed port of the vacuum chamber (2) and connected to a driving mechanism in the plasma cleaning machine (1) for feeding the roll material; A connecting frame (4) spans across the middle of the vacuum chamber (2) and is used to transfer the rolled material in the vacuum chamber (2); The vacuum chamber (2) is provided with: An adjustment unit (5) is arranged in the middle of the connecting frame (4) and extends along the feed inlet of the vacuum chamber (2), and is used to tighten the rolled material; The transmission unit (6) is arranged on the adjustment unit (5) and cooperates with the adjustment unit (5) to achieve the tightening of the rolled material and to reel the rolled material along the direction of the connecting frame (4).

2. The vacuum roll-to-roll plasma cleaning machine according to claim 1, characterized in that: Sealed doors (201) are rotatably connected to both sides of the vacuum chamber (2), and a material inlet and a material outlet are respectively provided on the sealed doors (201).

3. The vacuum roll-to-roll plasma cleaning machine according to claim 1, characterized in that: An upper rotating shaft (401) and a lower rotating shaft (402) are transmission-connected in the connecting frame (4); the upper rotating shaft (401) and the lower rotating shaft (402) are connected to a driving mechanism in the plasma cleaning machine (1); and the roll material is conveyed by rotating the upper rotating shaft (401) and the lower rotating shaft (402).

4. The vacuum roll-to-roll plasma cleaning machine according to claim 1, characterized in that: The regulating unit (5) comprises: A connecting seat (501) is arranged on both sides of the vacuum chamber (2); A bidirectional screw rod (502) is rotatably connected to the inner wall of the connecting seat (501); The movable seat (503) is slidably connected to the inner wall of the connecting seat (501), and the movable seat (503) is driven to move by the bidirectional screw rod (502); The first extrusion shaft (504) is rotatably connected between the corresponding moving seats (503) and moves on the connecting seat (501) following the moving seat (503), and is used to tighten the rolled material to ensure a better cleaning effect in the vacuum chamber (2).

5. The vacuum roll-to-roll plasma cleaning machine according to claim 4, characterized in that: Two adjustment seats (505) are slidably connected to the inner wall of the connecting seat (501); the two adjustment seats (505) are threadedly connected to a bidirectional screw rod (502); the bidirectional screw rod (502) is used to adjust the positions of the two adjustment seats (505); a spring (506) is provided between the adjustment seat (505) and the movable seat (503); a thrust is generated on the movable seat (503) through the adjustment seat (505) and the spring (506), and the movable seat (503) is extruded in cooperation with the first extrusion shaft (504) and the rolled material.

6. The vacuum roll-to-roll plasma cleaning machine according to claim 1, characterized in that: The regulating unit (5) is connected to a transmission unit (6), and the transmission unit (6) comprises: A second extrusion shaft (601), the second extrusion shaft (601) is used to extrude the rolled material; The push rod (602) is rotatably connected to the corresponding first extrusion shaft (504) and is used to move in coordination with the movement of the first extrusion shaft (504).

7. The vacuum roll-to-roll plasma cleaning machine according to claim 6, characterized in that: One end of the push rod (602) away from the first extrusion shaft (504) is rotatably connected to the second extrusion shaft (601) and is used to adjust the position of the second extrusion shaft (601) when adjusting the position of the first extrusion shaft (504) so ​​as to quickly tighten the rolled material.

8. The vacuum roll-to-roll plasma cleaning machine according to claim 1, characterized in that: The connecting frame (4) is provided with a positioning unit (7), the positioning unit (7) being used to adjust the length of the rolled material in the vacuum chamber (2), the positioning unit (7) comprising: Displacement seat (701); A tensioning shaft (702) is rotatably connected to the displacement seat (701) and is used to adjust the length of the rolled material in the vacuum chamber (2); An adjusting screw rod (703) is rotatably connected to the connecting frame (4) and is used to adjust the height of the displacement seat (701) and the tensioning shaft (702); The threaded sleeve (704) is slidably connected to the inner wall of the connecting frame (4); the threaded sleeve (704) is threadedly connected to the adjusting screw rod (703) and cooperates with the adjusting screw rod (703) to adjust the positions of the displacement seat (701) and the tensioning shaft (702).

9. The vacuum roll-to-roll plasma cleaning machine according to claim 8, characterized in that: The bottom end surface of the displacement seat (701) is fixedly connected to a sliding rod (706), the inner wall of the sliding rod (706) is slidably connected to a fixed sleeve (705), and the fixed sleeve (705) is fixedly connected to the inner wall of the connecting frame (4).

10. An induction automatic control method for a vacuum roll-to-roll plasma cleaning machine, based on the vacuum roll-to-roll plasma cleaning machine according to any one of claims 1 to 9, characterized in that: The following control methods are included: S1: The control system of a vacuum roll-to-roll plasma cleaning machine usually uses PLC as the core. PLC automatic control has perfect control and protection functions, which can ensure the stable operation of the equipment. Combined with the touch screen operation interface on the plasma cleaning machine (1), through the preset program and logic, PLC can achieve precise control of the cleaning process, including plasma generation, gas injection, temperature adjustment and vacuum maintenance, etc.; S2: The vacuum roll-to-roll plasma cleaning machine uses a variety of sensors to detect whether the vacuum door is closed. The sensors include inductive proximity sensors, micro switches and photoelectric sensors. The above sensors detect the position and status of the vacuum door in real time and transmit the signal to the control system. The control system determines whether the vacuum door is closed based on the sensor signal and issues an alarm or stops the cleaning process when necessary. S3: Use proportional, integral and differential control algorithms to precisely control the vacuum degree. The function of the proportional link is to adjust the output proportionally according to the current error. When the error is large, the proportional link will produce a large adjustment amount to quickly reduce the error. When the error is small, the adjustment amount will be reduced accordingly. The function of the integral link is to eliminate the steady-state error caused by pure proportional regulation. By integrating the error, accumulating past error information, and adjusting the output accordingly, the error can be gradually eliminated. The role of the differential link is to reflect the changing trend of the error and adjust the error in advance according to the changing trend. By calculating the rate of change of the error and adjusting the output accordingly, the further change of the error can be suppressed. When the vacuum degree of the cavity differs from the set value and is outside the set range, the PID controller automatically adjusts the speed of the vacuum pump motor according to the size and change rate of the deviation, so that the vacuum degree quickly returns to the set value range; S4: In the vacuum roll-to-roll plasma cleaning machine, the injection of process gas adopts high-precision electronic mass flow meter and advanced gas pipeline and valve. Through the preset program and logic, the control system can adjust the flow and proportion of process gas in real time to ensure the stability and consistency of the cleaning process; S5: Use sensors to monitor the state of plasma, monitor plasma density and temperature, etc. When the plasma state changes, the control system will automatically adjust the gas injection and heating parameters to maintain the stability of the plasma.

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