Coating equipment and sheet coating system

Abstract

The present disclosure relates to the field of semiconductor and photovoltaic technology, and in particular to a coating device and a sheet coating system, which solves the problem of poor uniformity of film thickness when the sheet passes through multiple deposition chambers in the coating device in sequence for coating in the related technology. The coating device includes a loading and unloading container, a furnace body, a driving component, at least one air intake uniform flow component and at least one exhaust uniform flow component. The air intake uniform flow component is connected to the air inlet, and the air intake uniform flow component is provided with a plurality of dispersed uniform flow outlet holes, so that the gas entering from the air inlet is diffused from the plurality of uniform flow outlet holes to the process chamber. The air intake uniform flow component and the exhaust uniform flow component are arranged opposite to each other in the vertical direction, and the exhaust uniform flow component is provided with a plurality of dispersed uniform flow exhaust holes, so that the gas in the process chamber is first extracted through the plurality of uniform flow exhaust holes before being extracted from the outlet. The coating device and sheet coating system provided by the present disclosure can improve the uniformity of film thickness when the sheet is coated.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor and photovoltaic technology, and in particular to a coating device and a sheet coating system. Background Art

[0002] With the development of photovoltaic technology, solar cells are widely used in various fields. Atomic layer deposition (ALD) is a method that can deposit materials layer by layer on the surface of a sheet in the form of a single atomic film. Atomic layer deposition technology has wide application potential in fields such as micro-nano electronics and nanomaterials due to its high controllability of deposition parameters, excellent deposition uniformity and consistency.

[0003] In the prior art, when coating a sheet, a rotary ALD device is generally used to place the sheet to be processed on a rotating platform for rotation, so that it passes through each deposition chamber in turn. In this process, the sheet is exposed to various gases in turn, thereby achieving high-speed film formation. However, during the coating process, different reaction gases are fed into each deposition chamber, and during the process of reactant gas delivery, the gas flow rate near the gas delivery port is greater than that at other positions in the chamber, resulting in different thicknesses of the coating at different positions on the sheet surface, which in turn leads to poor uniformity of the coating thickness. Summary of the invention

[0004] In view of this, the embodiments of the present disclosure provide a coating device and a sheet coating system to solve the problem of poor film thickness uniformity when the sheet is coated in sequence through multiple deposition chambers in the coating device in the related art.

[0005] In a first aspect, an embodiment of the present disclosure provides a coating device, comprising: a loading and unloading accommodating body, having an accommodating chamber, the accommodating chamber is configured to accommodate a carrier, so that at least one unprocessed sheet can be loaded onto the carrier, or a processed sheet can be unloaded from the carrier, and the sheet carried by the carrier is parallel to the vertical direction; a furnace body is arranged on one side of the loading and unloading accommodating body along a first direction, the furnace body has a process chamber, the process chamber is configured to accommodate the carrier, the furnace body can process the unprocessed sheet carried by the carrier, the process chamber has an air inlet and an air outlet correspondingly arranged in the vertical direction, the air inlet is located above the air outlet, the air inlet is configured to introduce gas into the process chamber, and the air outlet is configured to extract the gas from the process chamber; a driving component is connected to the carrier, The driving component is configured to drive the carrier to move along a first direction, so as to drive the carrier carrying unprocessed sheets in the accommodating chamber to enter the process chamber, or to drive the carrier carrying processed sheets in the process chamber to enter the accommodating chamber; at least one air intake uniform flow component is arranged in the process chamber, the air intake uniform flow component is connected to the air inlet, and the air intake uniform flow component is provided with a plurality of dispersed uniform flow outlet holes, so that the gas entering from the air inlet can be diffused from the plurality of uniform flow outlet holes to the process chamber; at least one exhaust uniform flow component is arranged in the process chamber, the air intake uniform flow component and the exhaust uniform flow component are arranged opposite to each other in the vertical direction, and the exhaust uniform flow component is provided with a plurality of dispersed uniform flow exhaust holes, so that the gas in the process chamber can be exhausted through the plurality of uniform flow exhaust holes before being exhausted from the air outlet.

[0006] In some embodiments, the sheet carried by the carrier is parallel to the first direction. When the carrier is located in the process chamber, the carrier is provided with a first preset space on at least one side of the second direction. The air intake uniform flow component and the air exhaust uniform flow component are respectively located on both sides of the first preset space in the vertical direction. A plurality of uniform flow outlet holes are arranged on the side of the air intake uniform flow component facing the first preset space, and a plurality of uniform flow exhaust holes are arranged on the side of the air exhaust uniform flow component facing the first preset space, so that the gas ejected from the plurality of uniform flow outlet holes diffuses to the first preset space, and the gas in the first preset space is exhausted from the plurality of uniform flow outlet holes; wherein the first direction is perpendicular to the second direction.

[0007] In some embodiments, the air inlet uniform flow component is provided with a first uniform flow chamber which is respectively connected to the air inlet and the uniform flow outlet hole, the air inlet and the uniform flow outlet hole are respectively located on both sides of the first uniform flow chamber in the vertical direction, the uniform flow outlet hole faces the accommodated carrier, and the first uniform flow chamber is configured to allow the gas entering from the air inlet to first enter the first uniform flow chamber for buffering and then diffuse to the process chamber from multiple uniform flow outlet holes.

[0008] In some embodiments, the exhaust flow uniformity component is provided with a second flow uniformity chamber which is respectively connected to the gas outlet and the flow uniformity exhaust hole, the gas outlet and the flow uniformity exhaust hole are respectively located on both sides of the second flow uniformity chamber in the vertical direction, the flow uniformity exhaust hole faces the accommodated carrier, and the second flow uniformity chamber is configured to allow the gas in the process chamber to enter the second flow uniformity chamber through multiple flow uniformity exhaust holes before being exhausted from the gas outlet.

[0009] In some embodiments, when the air intake uniform flow assembly has a first uniform flow chamber, the air intake uniform flow assembly also includes: at least one spray pipe connected to the air inlet, the spray pipe is provided with a plurality of first air outlet holes arranged in a dispersed manner, the spray pipe at least partially extends into the first uniform flow chamber so that the first air outlet holes are located in the first uniform flow chamber; at least one diverter plate is provided with a plurality of second air outlet holes arranged in a dispersed manner, the diverter plate is arranged in the first uniform flow chamber, and the diverter plate is located between the first air outlet holes and the uniform flow outlet holes in a vertical direction; wherein, the orthographic projection of the uniform flow outlet holes onto the diverter plate in the vertical direction partially overlaps or does not overlap with the second air outlet holes, and / or the orthographic projection of the first air outlet holes onto the diverter plate in the vertical direction partially overlaps or does not overlap with the second air outlet holes.

[0010] In some embodiments, when the air pumping uniform flow component has a second uniform flow chamber, the air pumping uniform flow component also includes: at least one air pumping uniform flow plate, which is provided with a plurality of dispersed third air outlet holes, the air pumping uniform flow plate is arranged in the second uniform flow chamber, and the air pumping uniform flow plate is located between the uniform flow air pumping hole and the air outlet in the vertical direction, and the orthographic projection of the uniform flow air pumping hole to the air pumping uniform flow plate in the vertical direction partially overlaps or has no overlap with the third air outlet hole.

[0011] In some embodiments, it also includes: a temperature regulating furnace located between the loading and unloading container and the furnace body, the temperature regulating furnace having a temperature regulating chamber, configured to accommodate a carrier and heat the unprocessed sheet carried by the carrier, or cool the processed sheet carried by the carrier.

[0012] In some embodiments, the sheet carried by the carrier is parallel to the first direction. When the carrier is located in the temperature regulating chamber, the carrier is provided with a second preset space on at least one side of the second direction. The temperature regulating chamber is provided with a relative inlet and outlet in the vertical direction. The inlet is configured to fill the temperature regulating chamber with gas, and the outlet is configured to extract the gas from the temperature regulating chamber. The inlet is located above the outlet. The first direction is perpendicular to the second direction. The temperature regulating furnace includes: at least one spray component, which is connected to the inlet. The spray component is provided with a plurality of dispersed spray holes. The orthographic projection of the spray component to the temperature regulating chamber in the vertical direction is located in the second preset space, and the spray component is located above the second preset space in the vertical direction. The spray holes are facing the sheet in the vertical direction; a heating component, which is at least arranged on two opposite side walls of the temperature regulating chamber in the second direction. The heating component is configured to heat the sheet.

[0013] In some embodiments, the temperature regulating furnace further includes: at least one induction sensor, which is arranged in the temperature regulating chamber, and the induction sensor is configured to detect whether there is a carrier in the temperature regulating chamber, wherein, when there are multiple induction sensors, the multiple induction sensors are also configured to detect whether the carrier enters from the process chamber or the receiving chamber; and a controller, which is arranged in the temperature regulating chamber, and the controller is communicatively connected with the induction sensor, the spray assembly and the heating assembly; wherein, when there are multiple induction sensors, one induction sensor generates a first induction signal when detecting that the carrier enters the temperature regulating chamber from the process chamber, and sends the first induction signal to the controller; after receiving the first induction signal, the controller sends a cooling signal to the spray assembly, so that the spray assembly sprays gas to the sheet material, so that the gas cools the sheet material; another induction sensor generates a second induction signal when detecting that the carrier enters the temperature regulating chamber from the receiving chamber, and sends the second induction signal to the controller; after receiving the second induction signal, the controller sends a heating signal to the heating assembly, so that the heating assembly heats the sheet material.

[0014] In some embodiments, the driving assembly includes: a driving member, which is respectively arranged on the loading and unloading accommodating body, the temperature regulating furnace and the furnace body, and the driving member is configured to drive the carrier to move along a first direction to reciprocate in sequence between the process chamber, the temperature regulating chamber and the accommodating chamber; a guide member, which is respectively arranged on the loading and unloading accommodating body, the temperature regulating furnace and the furnace body, and the driving member and the guide member are correspondingly arranged in the vertical direction, and the guide member is configured to guide the movement of the carrier along the first direction.

[0015] In some embodiments, the driving member includes: a driving motor, which is arranged in at least one of the loading and unloading accommodating body, the temperature regulating furnace and the furnace body; a plurality of rollers, which are respectively arranged at intervals on the bottom wall of the process chamber, the bottom wall of the temperature regulating chamber and the bottom wall of the accommodating chamber along a first direction, and are rotatably connected to the bottom wall of the process chamber, the bottom wall of the temperature regulating chamber and the bottom wall of the accommodating chamber, the rollers are provided with accommodating positions, and the accommodating positions are configured to accommodate carriers. The driving motor can drive the plurality of rollers to rotate so that the carriers can be placed in the accommodating positions of different rollers. Flows between positions; and / or, the guide member includes: two magnetic guide rails, which are respectively arranged on the top wall of the process chamber, the top wall of the temperature adjustment chamber and the top wall of the accommodating chamber, and the two magnetic guide rails arranged on each top wall are arranged at intervals along a second direction, the second direction is perpendicular to the first direction, and the magnetic guide rails extend along the first direction; a magnetic guide block is arranged between the two magnetic guide rails, the width of the magnetic guide block in the second direction is smaller than the gap between the two magnetic guide rails, the magnetic guide rails and the magnetic guide blocks are configured with opposite magnetic properties, and the carrier is fixedly connected to the magnetic guide block.

[0016] In some embodiments, the gas outlet is connected to a vacuum pump through an exhaust duct, and the coating equipment also includes: a particle capture component, which is arranged in the exhaust duct, and the particle capture component is configured to capture particles carried in the gas entering from the gas outlet, so that multiple gases can fully react before entering the vacuum pump.

[0017] In a second aspect, an embodiment of the present disclosure further provides a sheet coating system, comprising: the coating equipment described above, the coating equipment being configured to process the sheet; a conveying mechanism, disposed on one side of the coating equipment, the conveying mechanism being capable of conveying unprocessed sheets to the coating equipment for processing, and being capable of conveying processed sheets away from the coating equipment.

[0018] The embodiments of the present disclosure provide a coating device and a sheet coating system, which utilize an air intake uniform flow component and an air exhaust uniform flow component that are arranged relative to each other in the vertical direction to allow gas to form convection in a process chamber, thereby improving the uniformity and stability of gas diffusion in the process chamber, and thereby improving the uniformity of the coating thickness on the surface of the sheet to be coated in the process chamber.

[0019] In addition, the air intake uniform flow component and the air exhaust uniform flow component are arranged on both sides relative to each other in the vertical direction, which is conducive to the gas entering from the air inlet to diffuse quickly toward the air outlet, thereby increasing the gas diffusion rate; and the direction of gas outlet through the uniform flow outlet hole and the direction of gas exhaust through the uniform flow exhaust hole are parallel to the extension direction of the surface of the sheet to be coated, which is conducive to the gas to diffuse quickly and evenly to various positions on the surface to be coated, further improving the uniformity of the coating thickness and being able to improve the coating efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The above and other purposes, features and advantages of the present disclosure will become more apparent by describing the embodiments of the present disclosure in more detail in conjunction with the accompanying drawings. The accompanying drawings are used to provide a further understanding of the embodiments of the present disclosure and constitute a part of the specification. Together with the embodiments of the present disclosure, they are used to explain the present disclosure and do not constitute a limitation of the present disclosure. In the drawings, the same reference numerals generally represent the same components or steps.

[0021] Figure 1 Shown is a schematic diagram of a sheet coating system provided in one embodiment of the present disclosure.

[0022] Figure 2 Shown is a schematic diagram of a coating device provided in one embodiment of the present disclosure.

[0023] Figure 3 Shown is a cross-sectional front view of a coating device provided in one embodiment of the present disclosure.

[0024] Figure 4 Shown is a cross-sectional view of a furnace body provided by an embodiment of the present disclosure.

[0025] Figure 5 The figure is a simple schematic diagram of the carrier provided by one embodiment of the present disclosure cooperating with the air intake uniform flow component and the air exhaust uniform flow component in the process chamber.

[0026] Figure 6 Shown is a schematic diagram of an air intake uniform flow assembly provided in one embodiment of the present disclosure.

[0027] Figure 7 Shown is a partial exploded schematic diagram of an air intake uniform flow assembly provided in an embodiment of the present disclosure.

[0028] Figure 8 Shown Figure 7 A partial enlarged view of part A of the intake uniform flow assembly is shown.

[0029] Fig. 9 Shown is a schematic diagram of an air extraction and flow uniformization component provided in one embodiment of the present disclosure.

[0030] Fig.10 Shown is a front view of an air extraction and flow uniforming assembly provided in one embodiment of the present disclosure.

[0031] Fig.11 Shown Fig.10 A cross-sectional view along the BB direction of the air extraction uniform flow component is shown.

[0032] Fig.12 Shown is a top view of an air extraction and flow uniforming component provided in one embodiment of the present disclosure.

[0033] Fig.13 A cross-sectional view of a temperature regulating furnace provided by an embodiment of the present disclosure is shown.

[0034] Fig.14 Shown is a simple schematic diagram of the cooperation between a carrier and a spray assembly in a temperature regulating chamber according to an embodiment of the present disclosure.

[0035] Fig.15 Shown is a schematic diagram of a spray assembly provided in one embodiment of the present disclosure.

[0036] Fig.16 Shown is a rear view of a temperature regulating furnace provided in one embodiment of the present disclosure.

[0037] Fig.17 Shown is a schematic diagram of a loading and unloading container provided by an embodiment of the present disclosure.

[0038] Fig.18 A schematic diagram of a driving member provided according to an embodiment of the present disclosure is shown.

[0039] Fig.19 Shown is a schematic diagram of a guide member provided in one embodiment of the present disclosure.

[0040] Reference numerals:

[0041] 100. Sheet coating system; 10. Coating equipment; 1. Furnace body; 1a. Process chamber; 1b. Air outlet; 1c. Third inlet and outlet; 1d. Air inlet; 11. Special gas component; 111. Air inlet pipeline; 12. Air inlet uniform flow component; 12a. First uniform flow chamber; 12b. Uniform flow outlet; 121. Spray pipe; 121a. First air outlet; 122. First uniform flow box; 123. First box cover; 124, flow divider; 124a, second air outlet; 125, flow guide cover; 13, exhaust flow equalization component; 13a, second flow equalization chamber; 13b, flow equalization exhaust hole; 13c, through hole; 131, second flow equalization box; 132, second box cover; 133, flow guide plate; 134, exhaust flow equalization plate; 134a, third air outlet; 14, flow divider component; 2, temperature regulating furnace; 2a, temperature regulating chamber; 2b, outlet; 2c, fourth inlet and outlet; 2d, fifth inlet and outlet; 2e, inlet; 21, spray assembly; 21a, spray hole; 22, heating assembly; 23, induction sensor; 3, loading and unloading container; 3a, accommodating chamber; 3b, first inlet and outlet; 3c, second inlet and outlet; 4, carrier; 4a, sheet; 4b, first preset space; 4c, second preset space; 5, driving assembly; 51, driving member; 511, driving motor; 512, roller; 512a, accommodating position; 513, synchronous belt group; 52, guide member; 521, magnetic guide rail; 522, magnetic guide block; 6, vacuum pump; 7, particle capture assembly; 8, cooling assembly; 9, rack; 20, conveying mechanism; 201, loading conveyor line; 202, unloading conveyor line; 30, robot; X, first direction; Y, second direction; Z, vertical direction. DETAILED DESCRIPTION

[0042] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0043] Figure 1 Shown is a schematic diagram of a sheet coating system provided in one embodiment of the present disclosure. Figure 2 Shown is a schematic diagram of a coating device provided in one embodiment of the present disclosure. Figure 3 Shown is a cross-sectional front view of a coating device provided in one embodiment of the present disclosure. Figure 4 The figure is a simple schematic diagram of the carrier provided by one embodiment of the present disclosure cooperating with the air intake uniform flow component and the air exhaust uniform flow component in the process chamber. Figure 5The figure shows a simple schematic diagram of the carrier provided by an embodiment of the present disclosure in the process chamber in cooperation with the air intake uniform flow component and the exhaust uniform flow component. The direction indicated by the arrow X is the first direction, the direction indicated by the arrow Y is the second direction, the first direction X and the second direction Y are perpendicular to each other in the horizontal plane, the direction indicated by the arrow Z is the vertical direction, the first direction X, the second direction Y and the vertical direction Z are perpendicular to each other, and will not be emphasized separately in the following.

[0044] The present disclosure provides a coating device, such as Figures 1 to 5 , applied to a sheet coating system 100, the coating device 10 comprises a loading and unloading accommodating body 3 and a furnace body 1 arranged along a first direction X, the loading and unloading accommodating body 3 has an accommodating chamber 3a, the furnace body 1 has a process chamber 1a, the accommodating chamber 3a and the process chamber 1a can be used to accommodate a carrier 4, and the carrier 4 is configured to carry at least one sheet 4a. The coating device 10 also includes a driving component 5, the driving component 5 is connected to the carrier 4, and the driving component 5 is configured to drive the carrier 4 to move along the first direction X, so as to at least allow the carrier 4 to enter the process chamber 1a or the accommodating chamber 3a.

[0045] Optionally, the sheet 4a may include an unprocessed sheet and a processed sheet. When the carrier 4 is located in the accommodating chamber 3a, the unprocessed sheet can be loaded onto the carrier 4, or the processed sheet can be unloaded from the carrier 4; when the carrier 4 is located in the process chamber 1a, the unprocessed sheet carried by the carrier 4 can be processed; the driving component 5 can drive the carrier 4 carrying the unprocessed sheet in the accommodating chamber 3a into the process chamber 1a, or drive the carrier 4 carrying the processed sheet in the process chamber 1a into the accommodating chamber 3a.

[0046] In one embodiment, the coating equipment 10 has only one loading and unloading accommodating body 3, and the carrier 4 loaded with unprocessed sheets enters the process chamber 1a from the accommodating chamber 3a of the loading and unloading accommodating body 3. After the process is completed, the carrier 4 returns from the process chamber 1a to the accommodating chamber 3a, thereby completing the loading and unloading in the same loading and unloading accommodating body 3.

[0047] In one embodiment, the coating device 10 has two loading and unloading accommodating bodies 3, one loading and unloading accommodating body 3 is located on one side of the furnace body 1, and the other loading and unloading accommodating body 3 is located on the other side of the furnace body 1. Loading is performed at one loading and unloading accommodating body 3, and a carrier 4 loaded with unprocessed sheets enters the process chamber 1a from the accommodating chamber 3a of one loading and unloading accommodating body 3, and after the process is completed, it flows from the process chamber 1a to the accommodating chamber 3a of the other loading and unloading accommodating body 3, so that unloading is completed at the other loading and unloading accommodating body 3.

[0048] It is understandable that the sheet 4a can be, for example, a silicon wafer or a silicon carbide wafer for making a battery cell, and the surface of the sheet 4a on at least one side in the thickness direction is a surface to be coated. The process chamber 1a can be a coating chamber, and the coating of the surface to be coated of the sheet 4a can be completed in the coating chamber. It should be emphasized that when the surfaces on both sides of the thickness direction of the sheet 4a are the surfaces to be coated and exposed to the process chamber 1a, the sheet 4a can be coated on both sides in the process chamber 1a. When only one side of the surface of the sheet 4a in the thickness direction is the surface to be coated and exposed to the process chamber 1a, the sheet 4a can be coated on one side in the process chamber 1a. It can be adaptively adjusted according to different coating requirements without specific limitation.

[0049] In an optional embodiment, the carrier 4 can be configured as a carrier extending in the vertical direction Z, and at least one bearing area is provided on the carrier, and the bearing area is provided on at least one side of the carrier in the thickness direction of the carrier, so that each sheet 4a is loaded into the bearing area in a vertical state, so as to avoid deformation of the carrier and the sheet 4a due to gravity, so as to be able to be used for coating of large-sized sheets 4a. It can be understood that, in the case where the sheet 4a needs to be coated on one side, multiple bearing areas are provided on both sides of the carrier, so that more sheets 4a can be loaded on the same carrier, increasing the number of sheets 4a coated in a single time, thereby improving the coating capacity; in the case where the sheet 4a needs to be coated on both sides, a through hole can be provided at the position of the carrier corresponding to the bearing area, so that the two opposite surfaces of the loaded sheet 4a can be exposed in the process chamber 1a through the through hole, so as to facilitate the double-sided coating of the sheet 4a.

[0050] Optionally, the shape and size of the through holes arranged in the bearing area of ​​the carrier can be matched according to the shape and size of the surface to be coated of the sheet 4a, and the sheet 4a can be detachably connected to the carrier by means of clamps, fixings, etc., and multiple sheets 4a can be arranged on the carrier in an array of multiple rows and columns, which can be adaptively adjusted according to actual needs without specific limitation.

[0051] It should be emphasized that the sheet coating system 100 may include a conveying mechanism 20 and a manipulator 30, and the conveying mechanism 20 is arranged on a side of the coating device 10 close to the loading and unloading accommodating body 3. Specifically, the transmission mechanism may include a loading conveyor line 201 and a unloading conveyor line 202 with opposite conveying directions, the loading conveyor line 201 is configured to input unprocessed sheets toward the accommodating chamber 3a, and the unloading conveyor line 202 is configured to output processed sheets in a direction away from the accommodating chamber 3a. The specific working process includes: when the carrier 4 without carrying the sheet 4a is located in the accommodating chamber 3a, the loading conveyor line 201 inputs the unprocessed sheet toward the accommodating chamber 3a, and the robot 30 can load the unprocessed sheets on the loading and unloading conveyor lines 202 into the carrying area of ​​the carrier 4 in sequence. After loading, the driving component 5 can drive the carrier 4 carrying the unprocessed sheet to move out of the accommodating chamber 3a along the first direction X; the driving component 5 can drive the carrier 4 carrying the unprocessed sheet to move along the first direction X to move into the process chamber 1a to coat the sheet 4a; thereafter, the driving component 5 can drive the carrier 4 carrying the processed sheet in the process chamber 1a to move out along the first direction X, and move the carrier 4 carrying the processed sheet into the accommodating chamber 3a, the robot 30 can unload the processed sheet from the carrier 4 and put it into the unloading conveyor line 202, and the unloading conveyor line 202 transports the processed sheet away.

[0052] Optionally, the sheet coating system 100 may not be provided with the robot 30 , and the sheet 4 a may be manually loaded or unloaded into or from the carrier 4 in the accommodating chamber 3 a , without any specific limitation.

[0053] Specifically, the loading and unloading accommodating body 3 can be provided with a first inlet and outlet port 3b and a second inlet and outlet port 3c connected to the accommodating chamber 3a at both ends of the first direction X, and the second inlet and outlet port 3c faces the furnace body 1. The accommodating chamber 3a can be set as an open chamber connected to the external environment. The driving component 5 can drive the carrier 4 to directly enter and exit the second inlet and outlet port 3c, and can directly load or unload the sheet 4a from the first inlet and outlet port 3b; the accommodating chamber 3a can also be set as a closed chamber separated from the external environment, that is, the first inlet and outlet port 3b and the second inlet and outlet port 3c can be provided with material doors, and the corresponding operations can be performed by opening or closing the material doors of the corresponding inlet and outlet ports. Adaptive adjustments can be made according to actual needs without specific limitations.

[0054] In addition, the furnace body 1 is provided with a third inlet and outlet 1c at a position corresponding to the second inlet and outlet 3c in the first direction X, and the third inlet and outlet 1c is connected to the process chamber 1a. The process chamber 1a is configured as a vacuum chamber, and the third inlet and outlet 1c is provided with an openable and closable furnace door, so that the driving assembly 5 can drive the carrier 4 to enter and exit from the third inlet and outlet 1c.

[0055] It can be understood that the shapes and sizes of the first inlet and outlet port 3b, the second inlet and outlet port 3c and the third inlet and outlet port 1c can be matched according to the shape and size of the carrier plate moved by the driving component 5 along the first direction X to meet the needs of the carrier plate carrying the sheet 4a entering and exiting different chambers, without specific limitation.

[0056] Among them, the process chamber 1a has an air inlet 1d and an air outlet 1b arranged correspondingly in the vertical direction Z. The air inlet 1d is located above the air outlet 1b. The air inlet 1d is configured to introduce reaction gas into the process chamber 1a, and the air outlet 1b is configured to extract the gas from the process chamber 1a. The coating equipment 10 also includes at least one air intake uniform flow component 12 and at least one air exhaust uniform flow component 13 arranged in the process chamber 1a. The air intake uniform flow component 12 is connected to the air inlet 1d, and the air intake uniform flow component 12 is provided with a plurality of dispersed uniform flow outlet holes 12b, so that the gas entering from the air inlet 1d can diffuse from the plurality of uniform flow outlet holes 12b to the process chamber 1a; the air intake uniform flow component 12 and the air exhaust uniform flow component 13 are arranged relative to each other in the vertical direction Z, and the air exhaust uniform flow component 13 is provided with a plurality of dispersed uniform flow exhaust holes 13b, so that the gas in the process chamber 1a can be exhausted through the plurality of uniform flow exhaust holes 13b before being exhausted from the air outlet 1b.

[0057] The coating equipment 10 provided in the embodiment of the present disclosure utilizes an air intake uniform flow component 12 and an air exhaust uniform flow component 13 that are relatively arranged in the vertical direction Z to enable the gas to form convection in the process chamber 1a, thereby improving the uniformity and stability of the gas diffusion in the process chamber 1a, and further improving the uniformity of the coating thickness on the surface to be coated of the sheet 4a in the process chamber 1a.

[0058] In addition, the air intake uniform flow component 12 and the air exhaust uniform flow component 13 are arranged on both sides relative to each other in the vertical direction Z, which is beneficial for the gas entering from the air inlet 1d to diffuse quickly toward the air outlet 1b, thereby improving the gas diffusion rate; and the direction of gas outlet through the uniform flow outlet hole 12b and the direction of gas exhaust through the uniform flow exhaust hole 13b are parallel to the extension direction of the surface to be coated on the sheet 4a, which is beneficial for the reaction gas to diffuse quickly and evenly to various positions on the surface to be coated, further improving the uniformity of the coating thickness and improving the coating efficiency.

[0059] Optionally, the coating equipment 10 may further include a special gas component 11, the special gas component 11 is connected to the furnace body 1, the special gas outlet of the special gas component 11 is connected to the air inlet 1d, and the special gas component 11 is configured to provide a variety of different reaction gases for coating to the air inlet 1d, wherein the special gas component 11 may include a plurality of air inlet pipes 111 connected to different external reaction gas pipelines, and the plurality of air inlet pipes 111 are respectively connected to the air inlet 1d. It should be emphasized that the special gas component 11 can also be configured to provide a purge gas, such as nitrogen, to the air inlet 1d. A purge pipe group connected to the air inlet 1d may be provided in the process chamber 1a for purging the surface to be coated of the sheet 4a, and the purge pipe group and the air inlet uniform flow component 12 are independent of each other, and the specific matching structure of the purge pipe group and the special gas component 11 will not be repeated.

[0060] Optionally, the coating device 10 may further include a vacuum pump 6, which is connected to the gas outlet 1b through an exhaust pipeline, and the vacuum pump 6 is configured to extract the gas in the process chamber 1a through the gas outlet 1b. It is understandable that the coating device 10 may also include a particle capture component 7, which is arranged in the exhaust pipeline, and the particle capture component 7 is configured to capture particles carried in the gas entering from the gas outlet 1b, so that the multiple gases can fully react before entering the vacuum pump 6.

[0061] It should be emphasized that heating elements may be provided on two opposite side walls of the process chamber 1a in the second direction Y, and are configured to heat the sheet 4a in the process chamber 1a. The specific structure and arrangement of the heating elements are not specifically limited.

[0062] In some embodiments, the sheet 4a carried by the carrier 4 is parallel to the first direction X. When the carrier 4 is located in the process chamber 1a, the carrier 4 is provided with a first preset space 4b on at least one side of the second direction Y. The air intake uniform flow component 12 and the air exhaust uniform flow component 13 are respectively located on both sides of the first preset space 4b in the vertical direction Z, and at least a plurality of uniform flow outlet holes 12b and a plurality of uniform flow exhaust holes 13b are located in the first preset space 4b in the vertical direction Z as their orthographic projections toward the process chamber 1a. The plurality of uniform flow outlet holes 12b are arranged on the side of the air intake uniform flow component 12 facing the first preset space 4b, and the plurality of uniform flow exhaust holes 13b are arranged on the side of the air exhaust uniform flow component 13 facing the first preset space 4b, so that the gas ejected from the plurality of uniform flow outlet holes 12b can diffuse into the first preset space 4b, and the gas in the first preset space 4b can be exhausted from the plurality of uniform flow outlet holes 12b. The uniform flow outlet hole 12b and the uniform flow exhaust hole 13 are relatively arranged on both sides of the first preset space 4b, so that the gas can better form convection in the first preset space 4b and avoid gas turbulence. The gas can diffuse more evenly and quickly from top to bottom to various positions of the first preset space 4b, which is beneficial to further improve the uniformity and stability of the coating on the surface to be coated.

[0063] It is understandable that, when the carrier 4 is loaded with the sheet 4a, the first preset space 4b is located on the side of the sheet 4a having the surface to be coated in the second direction Y, and the gas flowing in the first preset space 4b can form a film on the surface to be coated after reaction. The specific limited range of the first preset space 4b can be adaptively adjusted according to actual needs and is not specifically limited.

[0064] In some embodiments, the air intake uniform flow component 12 has a first uniform flow chamber 12a connected to the air inlet 1d, and the air intake uniform flow component 12 is provided with a plurality of uniform flow outlet holes 12b dispersedly arranged and connected to the first uniform flow chamber 12a on the side away from the air inlet 1d in the vertical direction Z, so that the gas entering from the air inlet 1d first enters the first uniform flow chamber 12a for buffering and then diffuses to the process chamber 1a from the plurality of uniform flow outlet holes 12b; the exhaust uniform flow component 13 has a second uniform flow chamber 13a connected to the air outlet 1b, and each air intake uniform flow component 12 and an exhaust uniform flow component 13 are arranged opposite to each other in the vertical direction Z, and the exhaust uniform flow component 13 is provided with a plurality of uniform flow exhaust holes 13b dispersedly arranged and connected to the second uniform flow chamber 13a on the side away from the air outlet 1b in the vertical direction Z, so that the gas in the process chamber 1a enters the second uniform flow chamber 13a through the plurality of uniform flow exhaust holes 13b before being exhausted from the air outlet 1b.

[0065] It can be understood that, by utilizing the first uniform flow chamber 12a connected to the air inlet 1d provided in the process chamber 1a, the gas sprayed from the air inlet 1d is first buffered in the first uniform flow chamber 12a before entering the process chamber 1a, and then dispersed into the process chamber 1a through the multiple uniform flow outlet holes 12b provided in a dispersed manner; and by utilizing the second uniform flow chamber 13a connected to the air outlet 1b provided in the process chamber 1a, before the gas in the process chamber 1a is extracted from the air outlet 1b, the suction force is first buffered by the second uniform flow chamber 13a and then diffused to the process chamber 1a through the dispersed uniform flow exhaust holes 13b, so that the gas in the process chamber 1a is uniformly drawn into the uniform flow exhaust holes 13b and then extracted from the air outlet 1b. Thereby, the gas can enter the process chamber 1a uniformly, smoothly and dispersedly, and the gas in the process chamber 1a can be extracted uniformly, smoothly and dispersedly, further improving the uniformity of the coating thickness on the surface to be coated of the sheet 4a in the process chamber 1a.

[0066] In some embodiments, the air intake uniform flow assembly 12 further includes: at least one spray pipe 121, which is connected to the air intake port 1d, and the spray pipe 121 is provided with a plurality of dispersedly arranged first air outlet holes 121a, and the spray pipe 121 at least partially extends into the first uniform flow chamber 12a so that the first air outlet holes 121a are located in the first uniform flow chamber 12a.

[0067] It can be understood that the air intake uniform flow component 12 can also include a diverter component 14, which connects the air intake port 1d and multiple spray pipes 121. The diverter component 14 is configured to disperse the gas entering from the air intake port 1d into multiple streams, and allow each stream to enter the spray pipe 121. The spray pipe 121 is provided with multiple first air outlet holes 121a arranged at intervals on the side of the vertical direction Z away from the air intake port 1d.

[0068] Figure 6 Shown is a schematic diagram of an air intake uniform flow assembly provided in one embodiment of the present disclosure. Figure 7 Shown is a partial exploded schematic diagram of an air intake uniform flow assembly provided in an embodiment of the present disclosure. Figure 8 Shown Figure 7 A partial enlarged view of part A of the intake uniform flow assembly is shown.

[0069] like Figures 6 to 8 Each air intake uniform flow assembly 12 includes a first uniform flow box 122 and a first box cover 123, and the two enclose a first uniform flow chamber 12a. The first uniform flow box 122 can extend along the first direction X, and the first uniform flow box 122 is provided with an opening on the side of the vertical direction Z facing the air inlet 1d, and the spray pipe 121 enters the first uniform flow chamber 12a through the opening, so that the first air outlet 121a extends into the first uniform flow chamber 12a. The first box cover 123 is detachably connected to the first uniform flow box 122 and can close the opening. The first uniform flow box 122 is provided with a plurality of uniform flow outlet holes 12b on the side of the vertical direction Z away from the air inlet 1d, and the plurality of uniform flow outlet holes 12b are provided in the vertical direction Z toward the first preset space 4b, and each uniform flow outlet hole 12b is connected to the first uniform flow chamber 12a. The gas divided into multiple streams by the flow splitting component 14 can enter the first uniform flow chamber 12a through the spray pipe 121 respectively, and after filling the first uniform flow chamber 12a, flow evenly to the process chamber 1a through multiple uniform flow outlet holes 12b.

[0070] Optionally, the number of the first air outlet holes 121 a in each air intake uniform flow component 12 is less than the number of the uniform flow outlet holes 12 b .

[0071] It can be understood that the flow splitter assembly 14 and the spray pipe 121 can split the gas connected from the air inlet 1d into multiple streams and enter the first uniform flow chamber 12a. The inner wall of the first uniform flow chamber 12a can block the gas to reduce the flow rate of the gas. After filling the first uniform flow chamber 12a, the gas automatically diffuses to the process chamber 1a through the uniform flow outlet 12b. The air intake uniform flow assembly 12 realizes the uniform flow of the gas, improves the uniformity of the gas flow in the process chamber 1a, and is beneficial to the uniformity of the coating.

[0072] Optionally, the first flow equalizing box 122 and the first box cover 123 may be sealed so that gas can only enter the first flow equalizing chamber 12a from the first air outlet 121a and diffuse out of the first flow equalizing chamber 12a from the air outlet after being filled.

[0073] In addition, the air intake uniform flow assembly 12 may further include at least one diverter plate 124, which is fixedly mounted in the first uniform flow chamber 12a of the first uniform flow box 122, and the diverter plate 124 is provided with a plurality of second air outlet holes 124a extending along the vertical direction Z, and the diverter plate 124 is located between the first air outlet hole 121a and the uniform flow air outlet hole 12b in the vertical direction Z. The orthographic projection of the uniform flow air outlet hole 12b in the vertical direction Z to the diverter plate 124 partially overlaps or does not overlap with the second air outlet hole 124a, and the orthographic projection of the first air outlet hole 121a in the vertical direction Z to the diverter plate 124 partially overlaps or does not overlap with the second air outlet hole 124a. In the disclosed embodiment, the orthographic projection of the uniform flow outlet hole 12b in the vertical direction Z-direction splitter plate 124 does not overlap with the second outlet hole 124a, and the orthographic projection of the first outlet hole 121a in the vertical direction Z-direction splitter plate 124 does not overlap with the second outlet hole 124a.

[0074] Optionally, the aperture of the second air outlet hole 124a may be equal to or smaller than the aperture of the first air outlet hole 121a, and the aperture of the uniform flow air outlet hole 12b may be equal to or smaller than the aperture of the second air outlet hole 124a.

[0075] It can be understood that the gas entering the first uniform flow chamber 12a from the spray pipe 121 is slowed down by the obstruction of the diverter plate 124, and the low-speed flowing gas can automatically flow and fill the first uniform flow chamber 12a in the upper part of the diverter plate 124, and then enter the first uniform flow chamber 12a in the lower part of the diverter plate 124 through the second outlet hole 124a. After filling, the gas can freely diffuse from the uniform flow outlet hole 12b to the process chamber 1a to further improve the uniformity of gas diffusion.

[0076] Optionally, each air intake flow equalizer assembly 12 may further include a flow guide cover 125, which may be disposed on the corresponding first flow equalizer box 122 and fixedly connected to the first flow equalizer box 122. The flow guide cover 125 may be close to one side of the air intake port 1d from the vertical direction Z.

[0077] Fig. 9 Shown is a schematic diagram of an air extraction and flow uniformization component provided in one embodiment of the present disclosure. Fig.10 Shown is a front view of an air extraction and flow uniforming assembly provided in one embodiment of the present disclosure. Fig.11 Shown Fig.10 A cross-sectional view along the BB direction of the exhaust uniform flow component shown. Fig.12 Shown is a top view of an air extraction and flow uniforming component provided in one embodiment of the present disclosure.

[0078] like Figures 9 to 12 Each exhaust flow equalization component 13 includes a second flow equalization box 131 and a second box cover 132, and the two enclose a second flow equalization chamber 13a. The second flow equalization box 131 is provided with a through hole 13c on the side facing the air outlet 1b in the vertical direction Z, so that the air outlet 1b is connected with the second flow equalization chamber 13a. The first box cover 123 is detachably connected to the first flow equalization box 122, and the first box cover 123 is arranged on the side away from the air outlet 1b in the vertical direction Z, and a plurality of flow equalization exhaust holes 13b are arranged on the first box cover 123, so that the plurality of flow equalization exhaust holes 13b are arranged in the vertical direction Z toward the first preset space 4b, and each flow equalization exhaust hole 13b is connected with the second flow equalization chamber 13a.

[0079] Among them, each air extraction uniform flow component 13 can also include at least one air extraction uniform flow plate 134, the air extraction uniform flow plate 134 is provided with a plurality of third air outlet holes 134a which are dispersedly arranged and pass through in the vertical direction Z, the air extraction uniform flow plate 134 is arranged in the second uniform flow chamber 13a, and the air extraction uniform flow plate 134 is located between the uniform flow air extraction hole 13b and the air outlet 1b in the vertical direction Z, and the orthographic projection of the uniform flow air extraction hole 13b in the vertical direction Z to the air extraction uniform flow plate 134 partially overlaps or has no overlap with the third air outlet hole 134a.

[0080] Optionally, the number of the plurality of uniform flow exhaust holes 13b arranged in each exhaust uniform flow component 13 may be smaller than the number of the plurality of third air outlet holes 134a, and the aperture of the uniform flow exhaust hole 13b may be larger than the aperture of the third air outlet holes 134a.

[0081] Optionally, each exhaust flow uniformization component 13 further includes a guide plate 133, which is disposed on the first box cover 123 and is configured to provide guidance for the gas entering the uniform flow exhaust hole 13b.

[0082] Optionally, the second flow homogenizing box 131 may be configured as a conical or trapezoidal structure with a cross-sectional area gradually increasing from the air outlet 1b in the vertical direction Z toward the first preset space 4b, without specific limitation.

[0083] Fig.13 A cross-sectional view of a temperature regulating furnace provided by an embodiment of the present disclosure is shown. Fig.14 Shown is a simple schematic diagram of the cooperation between a carrier and a spray assembly in a temperature regulating chamber according to an embodiment of the present disclosure.

[0084] Fig.15 Shown is a schematic diagram of a spray assembly provided in one embodiment of the present disclosure. Fig.16 Shown is a rear view of a temperature regulating furnace provided in one embodiment of the present disclosure.

[0085] In some embodiments, continuing as Figure 2 , Figure 3 and Figures 13 to 16 The coating equipment 10 also includes a temperature regulating furnace 2, which is located between the loading and unloading container 3 and the furnace body 1. The temperature regulating furnace 2 has a temperature regulating chamber 2a, which is configured to accommodate the carrier 4 and heat the unprocessed sheet carried by the carrier 4, or cool the processed sheet carried by the carrier 4.

[0086] Optionally, the temperature regulating furnace 2 is provided with a fourth inlet and outlet 2c and a fifth inlet and outlet 2d communicating with the temperature regulating chamber 2a at both ends of the first direction X, the fourth inlet and outlet 2c is opposite to the third inlet and outlet 1c, and the fifth inlet and outlet 2d is opposite to the second inlet and outlet 3c. The shape and size of the fourth inlet and outlet 2c and the fifth inlet and outlet 2d can be adaptively adjusted according to actual needs and are not specifically limited.

[0087] Optionally, the temperature regulating furnace 2 may be configured as a vacuum regulating furnace, and the fourth material inlet and outlet 2c and the fifth material inlet and outlet 2d may be provided with material doors that can be opened and closed.

[0088] It can be understood that after the carrier 4 located in the accommodating chamber 3a is loaded with unprocessed sheets, the driving component 5 can drive the carrier 4 to move along the first direction X to enter the temperature adjustment chamber 2a from the second inlet and outlet 3c and the fifth inlet and outlet 2d in sequence. After preheating the unprocessed sheets, the driving component 5 drives the carrier 4 to continue to move along the first direction X to enter the process chamber 1a from the fourth inlet and outlet 2c and the third inlet and outlet 1c in sequence to coat the surface to be coated of the preheated sheet 4a. After the coating is completed, the driving component 5 drives the processed sheet to move in the opposite direction along the first direction X, and enters the temperature adjustment chamber 2a through the third inlet and outlet 1c and the fourth inlet and outlet 2c in turn. After the processed sheet is cooled in the chamber, the driving component 5 drives the carrier 4 carrying the processed sheet to return to the accommodating chamber 3a through the fifth inlet and outlet 2d and the second inlet and outlet 3c in turn to unload the processed sheet. The coating of the sheet 4a can be completed by only three chambers, which saves the space occupied by the coating equipment 10.

[0089] In which, when the carrier 4 is located in the temperature regulating chamber 2a, the carrier 4 is provided with a second preset space 4c on at least one side of the second direction Y, and the temperature regulating chamber 2a is provided with a corresponding inlet 2e and outlet 2b in the vertical direction Z, the inlet 2e is configured to fill gas into the temperature regulating chamber 2a, and the outlet 2b is configured to extract gas from the temperature regulating chamber 2a, and the inlet 2e is located above the outlet 2b, and the temperature regulating furnace 2 includes at least one spray component 21 and a heating component 22, the spray component 21 is connected to the inlet 2e, and the spray component 21 is provided with a plurality of dispersed spray holes 21a, the orthographic projection of the spray component 21 to the temperature regulating chamber 2a in the vertical direction Z is located in the second preset space 4c, and the spray component 21 is located above the second preset space 4c in the vertical direction Z, and the spray hole 21a faces the sheet 4a in the vertical direction Z; the heating component 22 is at least arranged on the two side walls of the temperature regulating chamber 2a opposite to each other in the second direction Y, and the heating component 22 is configured to heat the sheet 4a.

[0090] Optionally, the spray assembly 21 includes a plurality of spray pipelines, and the plurality of spray pipelines may be arranged at intervals along the first direction X and / or the second direction Y. An air inlet spray port is provided on the side of the spray pipeline facing the inlet 2e, and the air inlet spray ports of the plurality of spray pipelines may be connected to the inlet 2e through a shunt pipeline, so that the gas entering from the inlet 2e can be shunted into multiple streams through the shunt pipeline and then enter different spray pipelines respectively. The spray pipeline is provided with a plurality of spray holes 21a arranged at intervals along the first direction X and / or the second direction Y on the side of the spray pipeline facing the second preset space 4c in the vertical direction Z, so that the gas sprayed from the spray hole 21a can be more evenly diffused to various areas of the second preset space 4c, which is conducive to uniformly and quickly cooling the sheet 4a.

[0091] Optionally, the gas that can be used for cooling and enters from the inlet 2e may be nitrogen, for example, so as to cool the sheet 4a and purge the surface to be coated at the same time.

[0092] It is understandable that the specific matching structure of the spray assembly 21 can refer to the matching structure of the flow dividing assembly 14 and the spray pipe in the process chamber 1a, which will not be described in detail. In addition, the spray assembly 21 can also be provided with a uniform flow structure that is the same as or similar to the intake uniform flow assembly 12, so that the gas sprayed from the spray assembly 21 is first buffered by the uniform flow structure before entering the temperature adjustment chamber 2a, which will not be described in detail.

[0093] Optionally, the outlet 2b may be connected to a vacuum pump 6 through a pipeline, and the vacuum pump 6 is used to provide suction force so that the gas in the temperature regulating chamber 2a is extracted from the outlet 2b.

[0094] Optionally, the heating assembly 22 may include a plurality of heating tubes, which are respectively arranged on two side walls of the temperature regulating chamber 2a that are opposite to each other in the second direction Y. The heating tubes may be, for example, hot wires arranged on the side walls.

[0095] In an optional embodiment, the temperature regulating furnace 2 further includes: at least one induction sensor 23, which is arranged in the temperature regulating chamber 2a, and the induction sensor 23 is configured to detect whether there is a carrier 4 in the temperature regulating chamber 2a, wherein, when there are multiple induction sensors 23, the multiple induction sensors 23 are also configured to detect whether the carrier 4 enters from the process chamber 1a or the accommodating chamber 3a; and a controller, which is arranged in the temperature regulating chamber 2a, and the controller is communicatively connected with the induction sensor 23, the spray component 21 and the heating component 22; wherein, when there are multiple induction sensors 23, one induction sensor 23 is configured to detect whether the carrier 4 enters from the process chamber 1a or the accommodating chamber 3a. The induction sensor 23 generates a first induction signal when detecting that the carrier 4 enters the temperature regulating chamber 2a from the process chamber, and sends the first induction signal to the controller; after receiving the first induction signal, the controller sends a cooling signal to the spray component 21, so that the spray component 21 sprays gas to the sheet 4a, so that the gas cools the sheet 4a; another induction sensor 23 generates a second induction signal when detecting that the carrier 4 enters the temperature regulating chamber 2a from the accommodating chamber 3a, and sends the second induction signal to the controller; after receiving the second induction signal, the controller sends a heating signal to the heating component 22, so that the heating component 22 heats the sheet 4a.

[0096] Optionally, the process chamber 1a and the accommodating chamber 3a may be respectively provided with an induction sensor 23 configured to detect the presence or absence of the carrier 4 so as to monitor in real time which chamber the carrier 4 is located in, thereby facilitating work in the corresponding chamber.

[0097] Exemplarily, the induction sensor 23 is used to detect whether the carrier 4 enters from the process chamber 1a or the accommodating chamber 3a. The number of induction sensors 23 arranged in the temperature adjustment chamber 2a is two, and the two induction sensors 23 are arranged at intervals in the first direction X. The first induction sensor is arranged near the fourth inlet and outlet 2c, and the second induction sensor is arranged near the fifth inlet and outlet 2d. When the carrier 4 enters the temperature adjustment chamber 2a from the accommodating chamber 3a, the second induction sensor generates a second induction signal, while the first induction sensor does not generate an induction signal, indicating that the carrier 4 is located in the accommodating chamber 3a and the sheet 4a carried is an unprocessed sheet. The controller sends a heating signal to the heating component 22 according to the second induction signal to preheat the unprocessed sheet. After preheating is completed, during the process of the carrier 4 entering the process chamber 1a from the temperature adjustment chamber 2a, the first induction sensor generates a first induction signal, but the controller comprehensively judges that there is no carrier 4 in the temperature adjustment chamber 2a at this time, based on the heating signal just sent and the set order of the drive component 5 driving the carrier 4 to circulate in each chamber, and therefore does not start the spray component 21. After the sheet 4a is coated in the process chamber 1a, the drive component 5 drives the carrier 4 to enter the temperature adjustment chamber 2a from the fourth inlet and outlet 2c, the first induction sensor generates a first induction signal, and the second induction sensor does not generate an induction signal. Combined with the set order of the drive component 5 driving the carrier 4 to circulate in each chamber, the controller sends a cooling signal to the spray component 21 according to the first induction signal to cool down the processed sheet spray gas.

[0098] It can be understood that the loading and unloading container 3, the temperature regulating furnace 2 and the furnace body 1 can be fixedly connected to the frame 9 respectively, and the frame 9 can be provided with a cooling component 8 extending to the loading and unloading container 3, the temperature regulating furnace 2 and the furnace body 1. The cooling component 8 is configured to cool down some components that are easily to generate heat and are arranged outside the loading and unloading container 3, the temperature regulating furnace 2 and the furnace body 1, which will not be elaborated.

[0099] Fig.17 Shown is a schematic diagram of a loading and unloading container provided by an embodiment of the present disclosure. Fig.18 A schematic diagram of a driving member provided according to an embodiment of the present disclosure is shown. Fig.19 Shown is a schematic diagram of a guide member provided in one embodiment of the present disclosure.

[0100] like Figure 3 , Figures 17 to 19The driving assembly 5 includes a driving member 51 and a guiding member 52, which are respectively arranged on the loading and unloading accommodating body 3, the temperature regulating furnace 2 and the furnace body 1. The driving member 51 is configured to drive the carrier 4 to move along the first direction X so as to reciprocate in sequence between the process chamber 1a, the temperature regulating chamber 2a and the accommodating chamber 3a; the guiding member 52 is respectively arranged on the loading and unloading accommodating body 3, the temperature regulating furnace 2 and the furnace body 1. The driving member 51 and the guiding member 52 are correspondingly arranged in the vertical direction Z, and the guiding member 52 is configured to guide the movement of the carrier 4 along the first direction X.

[0101] Specifically, take the driving member 51 and the guide member 52 arranged in the loading and unloading accommodating body 3 as an example. The driving member 51 includes: a driving motor 511, which is arranged in the loading and unloading accommodating body 3; a plurality of rollers 512, which are arranged at intervals along the first direction X on the bottom wall of the accommodating chamber 3a, and are rotatably connected to the bottom wall of the accommodating chamber 3a, and the rollers 512 are provided with accommodating positions 512a, and the accommodating positions 512a are configured to accommodate the carrier 4, and the driving motor 511 can drive the plurality of rollers 512 to rotate, so that the carrier 4 can flow between the accommodating positions 512a of different rollers 512. The driving motor 511 drives the direction of the rollers 512 to rotate, so as to drive the carrier 4 to move along the first direction X, thereby reducing the friction of the carrier 4 during movement and reducing dust.

[0102] Optionally, the multiple rollers 512 may be connected by a synchronous belt set 513 , and the synchronous belt set 513 is connected to the conveying end of the driving motor 511 , so that the driving motor 511 can drive the multiple rollers 512 to rotate synchronously.

[0103] It is understandable that the accommodating position 512a can be a recess set along the circumference of the roller 512, and the width of the recess in the second direction Y can be used to accommodate the carrier 4, so that the carrier 4 is limited in the second direction Y to prevent the carrier 4 from falling off the roller 512. The size and shape of the recess can be adaptively adjusted according to actual needs and are not specifically limited.

[0104] like Fig.19 The guide member 52 includes two magnetic guide rails 521, which are respectively arranged on the top wall of the accommodating chamber 3a, and the two magnetic guide rails 521 arranged on the top wall are arranged at intervals along the second direction Y, and the magnetic guide rails 521 extend along the first direction X; the magnetic guide block 522 is arranged between the two magnetic guide rails 521, and the width of the magnetic guide block 522 in the second direction Y is smaller than the gap between the two magnetic guide rails 521, the magnetic guide rails 521 and the magnetic guide block 522 are configured to have opposite magnetic properties, and the carrier 4 is fixedly connected to the magnetic guide block 522. The cooperation between the magnetic guide rails 521 and the magnetic guide block 522 further reduces the friction of the carrier 4 when it moves along the first direction X, and reduces the generation of dust.

[0105] It is understandable that the specific structure of the driving assembly 5 disposed in the process chamber 1a and the temperature adjustment chamber 2a may be the same as the structure of the driving assembly 5 disposed in the accommodating chamber 3a, and will not be described in detail.

[0106] The present disclosure also provides a sheet coating system, such as Figure 1 , including a coating device 10 and a conveying mechanism 20. The coating device 10 is configured to process the sheet 4a. The conveying mechanism 20 is arranged on one side of the coating device 10. The conveying mechanism 20 can convey unprocessed sheets to the coating device 10 for processing, and can convey processed sheets in the coating device 10 away.

[0107] Optionally, the coating device 10 and the cooperation between the coating device 10 and the conveying mechanism 20 can refer to the relevant descriptions of the above embodiments, and will not be repeated here.

[0108] In the embodiments of the present disclosure, if not clearly defined, the connection form may be a detachable connection by means of bolts and nuts, screws, buckles, magnetic attraction, etc. In some connections, if there is no special requirement for the detachable form, a non-detachable connection may be made by means of welding, bonding, etc.

[0109] The basic principles of the present disclosure are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present disclosure are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present disclosure. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, and are not limitations. The above details do not limit the present disclosure to the necessity of adopting the above specific details to be implemented.

[0110] The block diagrams of the devices, apparatuses, equipment, and systems involved in this disclosure are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including," "comprising," "having," and the like are open words, referring to "including but not limited to," and can be used interchangeably therewith. The words "or" and "and" used herein refer to the words "and / or," and can be used interchangeably therewith, unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to," and can be used interchangeably therewith.

[0111] It should also be noted that in the apparatus, device and method of the present disclosure, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present disclosure.

[0112] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present disclosure. Therefore, the present disclosure is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0113] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present disclosure to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A coating device, characterized in that: include: A loading and unloading accommodating body, having an accommodating chamber, wherein the accommodating chamber is configured to accommodate a carrier, so that at least one unprocessed sheet is loaded onto the carrier, or the processed sheet is unloaded from the carrier, and the sheet carried by the carrier is parallel to the vertical direction; A furnace body is arranged at one side of the loading and unloading accommodating body along a first direction, the furnace body has a process chamber, the process chamber is configured to accommodate the carrier, the furnace body can process the unprocessed sheet carried by the carrier, the process chamber has an air inlet and an air outlet correspondingly arranged in a vertical direction, the air inlet is located above the air outlet, the air inlet is configured to introduce gas into the process chamber, and the air outlet is configured to extract the gas from the process chamber; a driving assembly connected to the carrier, the driving assembly being configured to drive the carrier to move along the first direction, so as to drive the carrier carrying the unprocessed sheet in the accommodating chamber into the process chamber, or to drive the carrier carrying the processed sheet in the process chamber into the accommodating chamber; At least one gas inlet uniform flow component is disposed in the process chamber, the gas inlet uniform flow component is communicated with the gas inlet, and the gas inlet uniform flow component is provided with a plurality of dispersed uniform flow outlet holes, so that the gas entering from the gas inlet is diffused from the plurality of uniform flow outlet holes to the process chamber; At least one exhaust flow equalizing component is arranged in the process chamber, the air inlet equalizing component and the exhaust flow equalizing component are arranged opposite to each other in the vertical direction, and the exhaust flow equalizing component is provided with a plurality of dispersedly arranged equalizing exhaust holes, so that the gas in the process chamber is first exhausted through the plurality of equalizing exhaust holes before being exhausted from the outlet.

2. The coating device according to claim 1, characterized in that: The sheet carried by the carrier is parallel to the first direction. When the carrier is located in the process chamber, the carrier is provided with a first preset space on at least one side of the second direction. The air inlet uniform flow component and the air exhaust uniform flow component are respectively located on both sides of the first preset space in the vertical direction. A plurality of uniform flow outlet holes are arranged on the side of the air inlet uniform flow component facing the first preset space, and a plurality of uniform flow exhaust holes are arranged on the side of the air exhaust uniform flow component facing the first preset space, so that the gas ejected from the plurality of uniform flow outlet holes diffuses to the first preset space, and the gas in the first preset space is exhausted from the plurality of uniform flow outlet holes; wherein, the first direction is perpendicular to the second direction.

3. The coating device according to claim 1, characterized in that: The air inlet uniform flow assembly is provided with a first uniform flow chamber which is respectively connected with the air inlet and the uniform flow outlet hole, the air inlet and the uniform flow outlet hole are respectively located on both sides of the first uniform flow chamber in the vertical direction, the uniform flow outlet hole faces the accommodated carrier, and the first uniform flow chamber is configured to allow the gas entering from the air inlet to first enter the first uniform flow chamber for buffering and then diffuse from the plurality of uniform flow outlet holes to the process chamber; and / or, The exhaust flow uniformity component is provided with a second flow uniformity chamber which is connected to the gas outlet and the flow uniformity exhaust hole respectively, the gas outlet and the flow uniformity exhaust hole are respectively located on both sides of the second flow uniformity chamber in the vertical direction, the flow uniformity exhaust hole faces the accommodated carrier, and the second flow uniformity chamber is configured to allow the gas in the process chamber to enter the second flow uniformity chamber through the plurality of flow uniformity exhaust holes before being exhausted from the gas outlet.

4. The coating device according to claim 3, characterized in that: In the case where the air intake uniform flow component has the first uniform flow chamber, the air intake uniform flow component further includes: at least one spray pipe connected to the air inlet, the spray pipe being provided with a plurality of first air outlets which are dispersedly arranged, and the spray pipe at least partially extending into the first flow-uniform chamber so that the first air outlets are located in the first flow-uniform chamber; at least one splitter plate, provided with a plurality of second air outlet holes arranged in a dispersed manner, the splitter plate being arranged in the first uniform flow chamber, and the splitter plate being located between the first air outlet hole and the uniform flow outlet hole in a vertical direction; The orthographic projection of the uniform flow outlet on the diverter plate in the vertical direction partially overlaps or does not overlap with the second outlet, and / or the orthographic projection of the first outlet on the diverter plate in the vertical direction partially overlaps or does not overlap with the second outlet; In the case where the air extraction and flow uniformization component has the second flow uniformization chamber, the air extraction and flow uniformization component further includes: At least one exhaust flow equalizer is provided with a plurality of dispersed third air outlet holes, the exhaust flow equalizer is arranged in the second flow equalizer chamber, and the exhaust flow equalizer is located between the flow equalizer holes and the air outlet in the vertical direction, and the orthographic projection of the flow equalizer holes to the exhaust flow equalizer in the vertical direction partially overlaps or has no overlap with the third air outlet holes.

5. The coating device according to any one of claims 1 to 4, characterized in that: Also includes: The temperature regulating furnace is located between the loading and unloading container and the furnace body. The temperature regulating furnace has a temperature regulating chamber, which is configured to accommodate the carrier and heat the unprocessed sheet carried by the carrier, or cool the processed sheet carried by the carrier.

6. The coating device according to claim 5, characterized in that: The sheet carried by the carrier is parallel to the first direction. When the carrier is located in the temperature regulating chamber, the carrier is provided with a second preset space on at least one side of the second direction. The temperature regulating chamber is provided with an inlet and an outlet relative to each other in the vertical direction. The inlet is configured to fill the temperature regulating chamber with gas, and the outlet is configured to extract the gas from the temperature regulating chamber. The inlet is located above the outlet. The first direction is perpendicular to the second direction. The temperature regulating furnace comprises: at least one spray assembly, connected to the inlet, the spray assembly being provided with a plurality of dispersedly arranged spray holes, the orthographic projection of the spray assembly to the temperature regulating chamber in the vertical direction being located in the second preset space, and the spray assembly being located above the second preset space in the vertical direction, and the spray holes being oriented toward the sheet in the vertical direction; A heating component is at least disposed on two side walls of the temperature regulating chamber that are opposite to each other in the second direction, and the heating component is configured to heat the sheet.

7. The coating device according to claim 6, characterized in that: The temperature regulating furnace also includes: at least one inductive sensor disposed in the temperature regulating chamber, the inductive sensor being configured to detect whether the carrier is in the temperature regulating chamber, wherein, when there are multiple inductive sensors, the multiple inductive sensors are further configured to detect whether the carrier enters from the process chamber or the accommodating chamber; and A controller, disposed in the temperature regulating chamber, wherein the controller is in communication with the induction sensor, the spray assembly and the heating assembly; Among them, in the case where there are multiple sensing sensors, one of the sensing sensors generates a first sensing signal when detecting that the carrier enters the temperature regulating chamber from the process chamber, and sends the first sensing signal to the controller; after receiving the first sensing signal, the controller sends a cooling signal to the spray component, so that the spray component sprays gas to the sheet material, so that the gas cools the sheet material; another of the sensing sensors generates a second sensing signal when detecting that the carrier enters the temperature regulating chamber from the accommodating chamber, and sends the second sensing signal to the controller; after receiving the second sensing signal, the controller sends a heating signal to the heating component, so that the heating component heats the sheet material.

8. The coating device according to claim 5, characterized in that: The drive assembly comprises: A driving member, respectively disposed on the loading and unloading accommodating body, the temperature regulating furnace and the furnace body, the driving member is configured to drive the carrier to move along the first direction so as to reciprocate between the process chamber, the temperature regulating chamber and the accommodating chamber in sequence; The guide members are respectively arranged on the loading and unloading accommodating body, the temperature regulating furnace and the furnace body. The driving member and the guide member are correspondingly arranged in the vertical direction. The guide member is configured to guide the movement of the carrier along the first direction.

9. The coating device according to claim 8, characterized in that: The driving member comprises: A driving motor is provided in at least one of the loading and unloading container, the temperature regulating furnace and the furnace body; A plurality of rollers are arranged at intervals along the first direction on the bottom wall of the process chamber, the bottom wall of the temperature regulating chamber and the bottom wall of the accommodating chamber, and are rotatably connected to the bottom wall of the process chamber, the bottom wall of the temperature regulating chamber and the bottom wall of the accommodating chamber, the rollers are provided with accommodating positions, the accommodating positions are configured to accommodate the carrier, and the driving motor can drive the plurality of rollers to rotate so that the carrier flows between the accommodating positions of different rollers; and / or, The guide member comprises: Two magnetic guide rails are respectively arranged on the top wall of the process chamber, the top wall of the temperature adjustment chamber and the top wall of the accommodating chamber, and the two magnetic guide rails arranged on each top wall are spaced apart along a second direction, the second direction is perpendicular to the first direction, and the magnetic guide rails extend along the first direction; The magnetic guide block is arranged between the two magnetic guide rails, the width of the magnetic guide block in the second direction is smaller than the gap between the two magnetic guide rails, the magnetic guide rails and the magnetic guide block are configured with opposite magnetic properties, and the carrier is fixedly connected to the magnetic guide block.

10. The coating device according to any one of claims 1 to 4, characterized in that: The gas outlet is connected to a vacuum pump through an exhaust pipe, and the coating equipment further includes: The particle capture component is arranged in the exhaust pipe, and is configured to capture particles carried by the various gases entering from the gas outlet, so that the gases can fully react before entering the vacuum pump.

11. A sheet coating system, characterized in that: include: The coating device according to any one of claims 1 to 10, wherein the coating device is configured to process a sheet material; The conveying mechanism is arranged at one side of the coating device, and the conveying mechanism can convey the unprocessed sheet to the coating device for processing, and can convey the processed sheet in the coating device away.

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