Reaction chamber of ALD (Atomic Layer Deposition) equipment

By designing the ALD equipment reaction chamber of the square outer cavity, the rounded corner transition and reinforcement ribs dispersing stress are used to solve the problem of low space utilization in the existing ALD equipment reaction chamber, and the expansion of the inner reaction chamber and the improvement of production capacity are achieved.

CN119776803APending Publication Date: 2025-04-08S C NEW ENERGY TECH CORP
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Patent Information

Application Number
CN202411993592.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-31
Publication Date
2025-04-08

AI Technical Summary

Technical Problem

The reaction chambers of existing ALD equipment use cylindrical outer cavity, resulting in low space utilization inside the outer cavity, and cannot increase production capacity by increasing width and height.

Method used

A reaction chamber of ALD equipment for square outer cavity was designed. By using rounded corners at the four corners of the outer cavity, longitudinal and transverse reinforcement ribs were arranged on the outer side to disperse stress, and arc-shaped reinforcement ribs were arranged at the rounded corners to reduce stress concentration.

Benefits of technology

The internal space at the arc that cannot be used in the circular outer cavity is effectively utilized, the space utilization of the reaction chamber is improved, the width and height of the inner reaction chamber are greatly expanded, and the ALD process of widened and raised metal boats and larger heaters is met, thereby greatly improving the equipment production capacity.

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Abstract

The invention provides a reaction chamber of ALD (atomic layer deposition) equipment, which comprises an outer cavity, the cross section of the outer cavity is square, and four corners of the outer cavity adopt fillet transition; the front flange is connected to the peripheral side of one axial end of the outer cavity; the rear flange is connected to the peripheral side of the other axial end of the outer cavity; the longitudinal reinforcing ribs are arranged at the tangent positions of all the outer side faces of the outer cavity and the adjacent round corners and are connected between the front flange and the rear flange in the axial direction of the outer cavity; the transverse reinforcing ribs are arranged on the outer side faces of the outer cavity at intervals and connected between the adjacent longitudinal reinforcing ribs in the direction perpendicular to the axial direction of the outer cavity. The square outer cavity of the reaction chamber of the ALD equipment provided by the invention effectively utilizes the internal space, which cannot be utilized by the circular outer cavity, of the arc part, so that the space utilization rate of the reaction chamber is improved, the width and the height of the inner reaction chamber can meet the requirements of widened and heightened metal boats and larger heaters, and the productivity of the equipment is greatly improved; and the reaction chamber keeps adaptive to the rack layer height, the mounting position and the matching of the original circular outer cavity.
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Description

Technical Field

[0001] The present invention relates to the technical field of solar cell manufacturing, and in particular to a reaction chamber of an ALD device. Background Art

[0002] With the continuous development of the photovoltaic industry and the increasing demand for production capacity, the ALD equipment in the industry still has ample utilization of the space in the reaction chamber. Since the stress of the square cavity (i.e., the outer cavity with a square cross section) is far more concentrated than that of the circular cavity in the internal environment of vacuum negative pressure, it is easy to produce stress fatigue and cause cavity damage. Therefore, the reaction chamber of the traditional time-type ALD equipment adopts a cylindrical outer cavity (i.e., the outer cavity with a circular cross section). This type of reaction chamber using a cylindrical outer cavity produces many arc spaces inside the outer cavity that are difficult to use, resulting in limited effective space inside the outer cavity for arranging the inner cavity (inner reaction cavity) and the heater. In addition, when the metal boat softly lands in the inner cavity of the reaction chamber (inside the inner cavity), sufficient space margin must be reserved, which reduces the utilization rate of the internal space of the outer cavity; due to the low utilization rate of the internal space of the cylindrical outer cavity, the existing time-type ALD equipment can only increase the production capacity by increasing the length, and cannot increase the width and height.

[0003] Therefore, how to provide an ALD equipment reaction chamber with a square outer cavity that improves the utilization rate of the internal reaction space while reducing the concentrated stress is a technical problem that needs to be solved urgently in the field. Summary of the invention

[0004] The present invention provides a reaction chamber of an ALD device to solve the technical problem that the existing ALD device lacks a reaction chamber with a square outer cavity that has high internal reaction space utilization and reduces concentrated stress.

[0005] To solve the above problems, the technical solution adopted by the present invention is:

[0006] The present invention provides a reaction chamber of an ALD device, comprising:

[0007] The outer cavity has a square cross section, and the four corners of the outer cavity are rounded;

[0008] A front flange connected to a peripheral side of an axial end of the outer cavity;

[0009] A rear flange connected to the other axial end of the outer cavity;

[0010] Longitudinal reinforcing ribs are provided at the tangent points between each outer side surface of the outer cavity and the adjacent fillet, and are connected between the front flange and the rear flange along the axial direction of the outer cavity;

[0011] A plurality of transverse reinforcing ribs are arranged at intervals on each outer side surface of the outer cavity and are connected between adjacent longitudinal reinforcing ribs perpendicular to the axial direction of the outer cavity.

[0012] Furthermore, the reaction chamber of the ALD device further comprises:

[0013] Arc-shaped stiffeners are connected between adjacent longitudinal stiffeners that are tangent to the same fillet.

[0014] Preferably, the arc-shaped reinforcement rib is in an arc shape and is spaced apart from the rounded outer surface of the outer cavity.

[0015] Preferably, the radius of the fillet is 100 mm, and the distance between the arc-shaped reinforcing rib and the fillet outer surface of the outer cavity is 5 mm.

[0016] Preferably, the longitudinal reinforcing ribs and the transverse reinforcing ribs are both hollow structures.

[0017] Preferably, the transverse reinforcing ribs arranged on the outer side surface facing upwards are away from the top surface of the outer cavity and present an inclined surface with a high middle and low ends.

[0018] Preferably, the outer cavity is made of a stainless steel plate, and the wall thickness of the outer cavity is 8 mm.

[0019] Furthermore, the reaction chamber of the ALD device further comprises:

[0020] An inner cavity is arranged inside the outer cavity;

[0021] The heater is arranged inside the outer cavity and connected to the outer surface of the inner cavity.

[0022] Furthermore, the reaction chamber of the ALD device further comprises:

[0023] The supporting feet are arranged at the bottom of the outer cavity.

[0024] Furthermore, the reaction chamber of the ALD device further comprises:

[0025] The heat dissipation water pipe is connected to the outer side surface and passes through each transverse reinforcing rib.

[0026] Compared with the prior art, the present invention has the following beneficial effects:

[0027] The reaction chamber of the ALD device provided by the present invention has a square outer cavity that effectively utilizes the inner space of the arc that cannot be utilized by the circular outer cavity, thereby improving the space utilization rate of the reaction chamber and greatly expanding the width and height of the inner reaction chamber relative to the inner reaction chamber of the circular outer cavity, which can meet the ALD process of widened and heightened metal boats and larger heaters, thereby greatly improving the equipment production capacity; in addition, the reaction chamber of the ALD device is compatible with various specifications of heaters, metal boats and silicon wafer sizes on the market; at the same time, the reaction chamber of the ALD device maintains the rack layer height, installation position and original coordination of the original circular outer cavity adaptation design unchanged, so that the original ALD equipment is convenient to quickly replace the reaction chamber provided by the present invention; the reaction chamber of the ALD device also greatly reduces the total weight. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solution proposed by the present invention, the present invention is described in detail in combination with the embodiments and drawings. It should be understood that the embodiments and drawings described in the following specific implementation methods and the drawings in the specification are only some embodiments of the present invention, and for ordinary technicians in this field, these drawings can be changed under the concept of the present invention.

[0029] Figure 1 A schematic diagram of the three-dimensional structure of an embodiment of a reaction chamber of an ALD device provided by the present invention;

[0030] Figure 2 A schematic diagram of the main structure of an embodiment of a reaction chamber of an ALD device provided by the present invention;

[0031] Figure 3 for Figure 1 A schematic diagram of the longitudinal cross-sectional structure of the reaction chamber;

[0032] Figure 4 for Figure 1 Schematic diagram of the longitudinal section structure of the reaction chamber Figure 1 ;

[0033] Figure 5 for Figure 1 Schematic diagram of the longitudinal section structure of the reaction chamber Figure 2 .

[0034] Among them, the main marks of the drawings in the figure are as follows:

[0035] 1. Outer cavity; 10. Heat dissipation water pipe; 11. Outer side surface; 12. Fillet; 2. Front flange; 3. Rear flange; 4. Longitudinal reinforcement ribs; 5. Transverse reinforcement ribs; 51. Inclined surface; 6. Arc reinforcement ribs; 7. Inner cavity; 71. Inner reaction chamber; 8. Heater; 9. Support feet. DETAILED DESCRIPTION

[0036] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the following is a summary of the technical problems, technical solutions and beneficial effects to be solved by the present invention. Figure 1-5 The present invention is further described in detail with reference to the accompanying drawings and embodiments.

[0037] Please also read Figure 1-5 The reaction chamber of the ALD device provided by the present invention comprises:

[0038] The outer cavity 1 has a square cross-section, and the outer surface of the outer cavity 1 is composed of four outer side surfaces 11. The four corners of the outer cavity 1 (i.e., the connection between adjacent outer side surfaces 11) are transitioned by fillets 12; the front flange 2 is connected to the circumferential side of one axial end of the outer cavity 1, and the periphery of the front flange 2 protrudes outward relative to the outer surface of the outer cavity 1; the rear flange 3 is connected to the circumferential side of the other axial end of the outer cavity 1, and the periphery of the rear flange 3 protrudes outward relative to the outer surface of the outer cavity 1; the longitudinal reinforcement ribs 4 are arranged at the tangent point between each outer side surface 11 of the outer cavity 1 and the adjacent fillet 12, and are connected between the front flange 2 and the rear flange 3 along the axial direction of the outer cavity 1 (i.e., the length direction of the outer cavity 1); a plurality of transverse reinforcement ribs 5 are arranged at intervals on each outer side surface 11 of the outer cavity 1, and are connected between adjacent longitudinal reinforcement ribs 4 perpendicular to the axial direction of the outer cavity 1 (i.e., along the width direction of the outer cavity 1). The front flange 2 and the rear flange 3 are preferably welded to the outer cavity 1 .

[0039] The reaction chamber of the ALD device provided by the present invention is provided with longitudinal reinforcing ribs 4 connecting the front flange 2 and the rear flange 3 at the tangent line between the rounded corner 12 and the outer side surface 11 of the square outer cavity 1, so that the stress at the rounded corner 12 of the square outer cavity 1 is evenly distributed. At the same time, transverse reinforcing ribs 5 connecting adjacent longitudinal reinforcing ribs 4 are arranged on the outer side surface 11 of the square outer cavity 1 to further disperse the stress at the outer side surface 11 of the square outer cavity 1. The longitudinal reinforcing ribs 4 are preferably welded to the outer cavity 1, the front flange 2 and the rear flange 3.

[0040] Please also read Figure 1 , 2 5. In this embodiment, the outer cavity 1 is made of stainless steel plate, the wall thickness of the outer cavity 1 is 8 mm, and the radius of the fillet 12 is 100 mm. The reaction chamber of the ALD device provided by the present invention preferably uses 8 mm thick stainless steel plate as the cavity wall thickness, and fillets 12 with a radius of 100 mm are made at the four corners of the outer cavity 1 where the concentrated stress is large to reduce the concentrated stress.

[0041] Please also read Figure 1 , 3-5. In the present embodiment, a plurality of transverse reinforcing ribs 5 are evenly spaced along the axial direction of the outer cavity 1 (the length direction of the outer cavity 1) on each outer side surface 11 where the stress of the outer cavity 1 is relatively concentrated, and the transverse reinforcing ribs 5 arranged on the upward outer side surface 11 (the top of the outer cavity 1) are away from the top surface of the outer cavity 1 and form a pair of inclined surfaces 51 with a high middle and low ends.

[0042] See also Figure 1 , 4 As a preferred implementation of this embodiment, a pair of inclined surfaces 51 are symmetrical to each other, and the higher ends of the pair of inclined surfaces 51 are connected to one point, and the height difference between the lower end and the higher end of the pair of inclined surfaces 51 is 10 mm. The reaction chamber of the ALD device provided by the present invention reduces the influence of gravity on the transverse reinforcing ribs 5 at the top of the outer cavity 1 by making the transverse reinforcing ribs 5 at the top of the outer cavity 1 affected by gravity into a top surface with an angle.

[0043] See also Figure 1 , 5 In this embodiment, the reaction chamber of the ALD device further includes:

[0044] The arc-shaped reinforcing ribs 6 are connected between adjacent longitudinal reinforcing ribs 4 that are tangent to the same fillet 12 .

[0045] See also Figure 1 , 5 As a preferred implementation of this embodiment, multiple arc-shaped reinforcing ribs 6 are evenly spaced along the axial direction of the outer cavity 1 (the length direction of the outer cavity 1), and the arc-shaped reinforcing ribs 6 are arc-shaped and are spaced apart from the outer surface of the fillet 12 of the outer cavity 1.

[0046] See also Figure 1 , 5 As a more preferred implementation of this embodiment, the distance between the arc-shaped reinforcing rib 6 and the outer surface of the fillet 12 of the outer cavity 1 is 5 mm, and the arc-shaped reinforcing rib 6 is preferably welded to the longitudinal reinforcing rib 4. The reaction chamber of the ALD device provided by the present invention welds a solid arc-shaped reinforcing rib 6 at the fillet 12 of the square outer cavity 1, but is not connected to the outer surface of the fillet 12 of the square outer cavity 1, so that a 5 mm wide gap is left between the arc-shaped reinforcing rib 6 and the fillet 12 of the square outer cavity 1, avoiding stress from spreading to the fillet 12 of the square outer cavity 1, and at the same time supporting the two longitudinal reinforcing ribs 4 at the adjacent cut edges of the fillet 12, so that it is not easy to be deformed by force.

[0047] See also Figure 3In this embodiment, the longitudinal reinforcing ribs 4 and the transverse reinforcing ribs 5 are both hollow structures. The reaction chamber of the ALD device provided by the present invention is provided with longitudinal reinforcing ribs 4 and transverse reinforcing ribs 5 to reduce concentrated stress, and the stress condition is simulated and analyzed by finite element analysis software. Under the premise of the allowable stress plus the safety factor being qualified, the weight of the outer cavity 1 is reduced as much as possible, and the force stability and structural strength of the outer cavity 1 are ensured not to be affected.

[0048] See also Figure 2 , 3 In this embodiment, the reaction chamber of the ALD device further includes:

[0049] The inner cavity 7 is arranged inside the outer cavity 1, and the internal accommodation space of the inner cavity 7 serves as the inner reaction chamber 71 of the ALD equipment, which is used to accommodate a metal boat (not shown in the figure) carrying a silicon wafer (not shown in the figure); the heater 8 is arranged inside the outer cavity 1 and connected to the outer surface of the inner cavity 7, and is used to heat the inner reaction chamber 71 of the inner cavity 7 to perform atomic layer deposition (ALD) operations on the silicon wafer in the metal boat accommodated in the inner reaction chamber 71.

[0050] See also Figure 2 , 3 As a preferred implementation of this embodiment, the cross-section of the inner cavity 7 is square.

[0051] Please also read Figure 1-3 In this embodiment, the reaction chamber of the ALD device further includes:

[0052] The supporting legs 9 are arranged at the bottom of the outer cavity 1, and preferably a plurality of supporting legs are arranged at intervals along the axial direction of the outer cavity 1, so as to assist in supporting the reaction chamber and the metal boat and silicon wafer contained therein.

[0053] See also Figure 1 , 4 In this embodiment, the reaction chamber of the ALD device further includes:

[0054] The heat dissipation water pipe 10 is connected to the outer side surface 11 and is passed through each transverse reinforcing rib 5 to dissipate heat and cool the outer cavity 1 .

[0055] The reaction chamber of the ALD device provided by the present invention, whose square outer cavity 1 and diameter are the same as the side length of its cross section, effectively utilizes the internal space of the arc that cannot be utilized by the circular outer cavity 1, thereby improving the space utilization rate of the reaction chamber, so that the width and height of the inner reaction chamber 71 of the square reaction chamber can be expanded to 1.5 times that of the circular inner reaction chamber 71. The enlarged inner reaction chamber 71 can meet the ALD process of widened and heightened metal boats and larger heaters 8, thereby greatly improving the production capacity of the ALD device. In addition, the reaction chamber of the ALD device can be adapted to be compatible with various specifications of heaters 8, metal boats and silicon wafer sizes on the market. For example, for 182×182 silicon wafers, the inner reaction chamber 71 can realize double boat stacking of 180 wafers / slot and provide 9 slots; for 210×210 silicon wafers, the inner reaction chamber 71 can realize double boat stacking of 156 wafers / slot and provide 8 slots.

[0056] At the same time, the reaction chamber of the ALD equipment provided by the present invention maintains the rack height, installation position and original coordination with the outer cavity 1 adapted to the original circular outer cavity 1, which facilitates the rapid replacement of the original ALD equipment with the reaction chamber provided by the present invention; and also greatly reduces the total weight of the reaction chamber (to less than 800 kg).

[0057] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Those skilled in the art should understand that any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A reaction chamber of an ALD device, characterized in that: include: An outer cavity (1), wherein the cross section of the outer cavity (1) is square, and the four corners of the outer cavity (1) are transitioned by rounded corners (12); A front flange (2) connected to a peripheral side of an axial end of the outer cavity (1); A rear flange (3) connected to the circumferential side of the other axial end of the outer cavity (1); A longitudinal reinforcing rib (4) is provided at the tangent point between each outer side surface (11) of the outer cavity (1) and the adjacent fillet (12), and is connected between the front flange (2) and the rear flange (3) along the axial direction of the outer cavity (1); A plurality of transverse reinforcing ribs (5) are arranged at intervals on each outer side surface (11) of the outer cavity (1), and are connected between adjacent longitudinal reinforcing ribs (4) perpendicular to the axial direction of the outer cavity (1).

2. The reaction chamber of the ALD device according to claim 1, characterized in that: Also includes: The arc-shaped reinforcing ribs (6) are connected between adjacent longitudinal reinforcing ribs (4) that are tangent to the same fillet (12).

3. The reaction chamber of the ALD device according to claim 2, characterized in that: The arc-shaped reinforcing rib (6) is in an arc shape and is spaced apart from the outer surface of the fillet (12) of the outer cavity (1).

4. The reaction chamber of the ALD device according to claim 3, characterized in that: The radius of the fillet (12) is 100 mm, and the distance between the arc-shaped reinforcing rib (6) and the outer surface of the fillet (12) of the outer cavity (1) is 5 mm.

5. The reaction chamber of the ALD device according to any one of claims 1 to 4, characterized in that: The longitudinal reinforcing ribs (4) and the transverse reinforcing ribs (5) are both hollow structures.

6. The reaction chamber of the ALD device according to any one of claims 1 to 4, characterized in that: The transverse reinforcing rib (5) disposed on the upward outer side surface (11) is away from the top surface of the outer cavity (1) and presents an inclined surface with a high middle and low ends.

7. The reaction chamber of the ALD device according to any one of claims 1 to 4, characterized in that: The outer cavity (1) is made of a stainless steel plate, and the wall thickness of the outer cavity (1) is 8 mm.

8. The reaction chamber of the ALD device according to any one of claims 1 to 4, characterized in that: Also includes: An inner cavity (7) is arranged inside the outer cavity (1); A heater (8) is arranged inside the outer cavity (1) and connected to the outer surface of the inner cavity (7).

9. The reaction chamber of the ALD device according to any one of claims 1 to 4, characterized in that: Also includes: Support legs (9) are arranged at the bottom of the outer cavity (1).

10. The reaction chamber of the ALD device according to any one of claims 1 to 4, characterized in that: Also includes: A heat dissipation water pipe (10) is connected to the outer side surface (11) and is passed through each of the transverse reinforcing ribs (5).