Casting single crystal furnace

Abstract

The invention discloses a casting single crystal furnace. The casting single crystal furnace comprises a furnace body, a crucible, a first heating piece and a first driving assembly, the first heating piece is arranged in the furnace body, is positioned above the crucible and is used for heating a silicon material in the crucible; the furnace body comprises a body, a top cover and a first annular disc, the first annular disc is arranged between the top cover and the body and surrounds the periphery of the top cover, one side of the first annular disc is slidably connected to the top cover, and the other side of the first annular disc is slidably connected to the body; the first driving assembly at least partially penetrates through the first annular disc, is connected with the first heating piece and is used for driving the first heating piece to rotate around the axis direction of the furnace body. The first annular disc is arranged around the periphery of the top cover, and the first driving assembly at least partially penetrates through the first annular disc and is connected with the first heating piece, so that the first driving assembly can drive the first heating piece to rotate around the axis direction of the furnace body, and the uniformity of a thermal field formed by the first heating piece is improved; therefore, the yield of monocrystalline silicon is improved.

Description

Technical Field

[0001] The present application belongs to the field of solar photovoltaic technology, and specifically relates to a single crystal casting furnace. Background Art

[0002] In the solar photovoltaic industry, silicon is an important material for producing solar cells. Silicon wafers of the desired size are usually obtained by low-cost casting, and silicon wafers are sliced ​​from silicon ingots.

[0003] In the related art, the casting single crystal furnace includes a crucible, a furnace body and a heater. The furnace body is provided with a containing cavity, and the crucible containing silicon material is placed in the containing cavity. The heater is arranged on the outer peripheral surface of the crucible to form a thermal field to melt the silicon material in the crucible, and then the thermal field and the temperature gradient created by the process are used to carry out directionally solidification to finally form a silicon ingot.

[0004] However, the position of the heater in the related art cannot be flexibly adjusted, resulting in uneven temperature distribution of the thermal field formed in the single crystal casting furnace, which will lead to a decrease in the yield of cast single crystal silicon. Summary of the invention

[0005] The present application aims to provide a single crystal casting furnace, which can solve the problem in the related art that the temperature distribution of the thermal field formed by the heater in the single crystal casting furnace is uneven, thus affecting the yield of the single crystal silicon casting.

[0006] In order to solve the above technical problems, this application is implemented as follows: In a first aspect, an embodiment of the present application provides a single crystal casting furnace, comprising: a furnace body, a crucible, a first heating element, and a first driving assembly; The crucible is disposed in the furnace body, and the crucible is used to contain silicon material; the first heating element is disposed in the furnace body and located above the crucible, and is used to heat the silicon material in the crucible; The furnace body comprises a main body, a top cover and a first annular disk, wherein a receiving cavity is provided in the main body, and a first cavity opening is provided on one side of the receiving cavity along the axial direction of the furnace body, the top cover and the first annular disk are both provided at the first cavity opening, the first annular disk is provided between the top cover and the main body, the first annular disk is provided around the outer circumference of the top cover, one side of the first annular disk is slidably connected to the top cover, and the other side of the first annular disk is slidably connected to the main body; The first driving assembly is at least partially disposed through the first annular disk and connected to the first heating element, and is used to drive the first heating element to rotate around the axis direction of the furnace body.

[0007] Optionally, the first driving assembly includes a first connecting member and a first driving mechanism, the first connecting member is inserted through the first annular disk, one end of the first connecting member is connected to the first heating member, and the other end of the first connecting member is connected to the first driving mechanism; the first driving mechanism is used to drive the first connecting member to drive the first heating member to rotate around the axial direction of the furnace body, and drive the first connecting member to move along the axial direction of the furnace body to adjust the relative position of the first heating member and the crucible.

[0008] Optionally, a first mounting hole is provided in the first annular disk, the first connecting member is movably connected to the first mounting hole, and the first driving mechanism is further used to drive the first connecting member to slide relative to the first mounting hole along the axial direction of the furnace body to adjust the distance between the first heating member and the crucible.

[0009] Optionally, the first driving mechanism comprises a base, a first rotating disc, a second rotating disc, a first transmission member, a second transmission member, a first driving member and a second driving member; the base is arranged on a side of the furnace body close to the top cover, the second rotating disc is rotatably connected to the base, the first rotating disc is arranged on a side of the second rotating disc close to the furnace body, the first rotating disc and the second rotating disc are telescopically connected, and an end of the first connecting member away from the first heating member is fixedly connected to the first rotating disc; The first transmission member is movably connected to the second rotating disk, one end of the first transmission member is in driving connection with the first rotating disk, and the other end of the first transmission member is in driving connection with the first driving member, and the first driving member is used to drive the first transmission member to move telescopically along the axis direction of the furnace body, so as to drive the first rotating disk to approach or move away from the second rotating disk; The second transmission member is rotatably connected to the second rotating disk, the second driving member is connected to the second transmission member, and the second driving member can drive the second transmission member to drive the second rotating disk to rotate, so that the second rotating disk drives the first rotating disk to rotate.

[0010] Optionally, the single crystal casting furnace further comprises a second heating element and a second driving assembly, and the furnace body further comprises a second annular disk and a bottom cover; The second heating element is disposed in the furnace body and around the outer circumference of the crucible, and is used to heat the silicon material in the crucible; Along the axial direction of the furnace body, a second cavity opening is provided on a side of the accommodating cavity away from the first cavity opening, the second annular disk and the bottom cover are both provided at the second cavity opening, the second annular disk is provided between the bottom cover and the body, the second annular disk is provided around the outer circumference of the bottom cover, one side of the second annular disk is slidably connected to the bottom cover, and the other side of the second annular disk is slidably connected to the body; The second driving assembly is at least partially disposed through the second annular disk and connected to the second heating element, and is used to drive the second heating element to rotate around the axis direction of the furnace body.

[0011] Optionally, the second driving assembly includes a second connecting member and a second driving mechanism, the second connecting member is inserted into the second annular disk, one end of the second connecting member is connected to the second heating member, and the other end of the second connecting member is connected to the second driving mechanism; the second driving mechanism is used to drive the second connecting member to drive the second heating member to rotate around the axial direction of the furnace body, and drive the second connecting member to move along the axial direction of the furnace body to adjust the relative position of the second heating member and the crucible.

[0012] Optionally, the second driving assembly further includes a third connecting member, and the furnace body further includes a third annular disk, wherein the third annular disk is disposed between the first annular disk and the body; the third annular disk is disposed around the outer circumference of the first annular disk, one side of the third annular disk is slidably connected to the first annular disk, and the other side of the third annular disk is slidably connected to the body; One end of the third connecting member is connected to an end of the second heating member away from the second connecting member, and the other end of the third connecting member is penetrated through the third annular disk.

[0013] Optionally, the furnace body further comprises a slip ring, which is arranged between the first annular disk and the third annular disk, and is arranged around the outer circumference of the first annular disk, with one side of the slip ring being slidably connected to the first annular disk, and the other side of the slip ring being slidably connected to the third annular disk.

[0014] Optionally, the first heating element comprises a plurality of fan-shaped first heating portions, and the plurality of first heating portions are sequentially connected end to end to form a circular first heating element.

[0015] Optionally, the second heating element includes a plurality of second heating portions, and the plurality of second heating portions surround the outer circumference of the crucible and are sequentially connected end to end to form a cylindrical second heating element.

[0016] In an embodiment of the present application, a first annular disk is arranged around the outer periphery of the top cover in the furnace body, so that the first driving component is at least partially inserted into the first annular disk and connected to the first heating element. In this way, the first driving component can drive the first heating element to rotate around the axial direction of the furnace body to improve the temperature uniformity of the thermal field formed by the first heating element in the furnace body. The improvement of the temperature uniformity of the thermal field can make the heat radiation to the silicon material in the crucible more uniform, and correspondingly reduce the thermal stress inside the single crystal silicon crystal caused by the temperature difference, thereby improving the yield of the single crystal silicon.

[0017] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which: Figure 1 It is one of the structural schematic diagrams of a single furnace according to an embodiment of the present application; Figure 2 This is the second structural schematic diagram of a single furnace according to an embodiment of the present application; Figure 3 This is the third structural schematic diagram of a single furnace according to an embodiment of the present application; Figure 4 This is the fourth structural schematic diagram of the single furnace according to the embodiment of the present application; Figure 5 is a schematic structural diagram of a first transmission member according to an embodiment of the present application; Figure 6 is a schematic structural diagram of a first heating element according to an embodiment of the present application; Figure 7 is a schematic structural diagram of the second heating element according to an embodiment of the present application.

[0019] Reference numerals: 100: furnace body; 110: body; 111: accommodating cavity; 1111: first cavity opening; 1112: second cavity opening; 120: top cover; 130: first annular disk; 140: second annular disk; 150: bottom cover; 160: slip ring; 170: third annular disk; 200: crucible; 300: first heating element; 310: first heating portion; 311: arc segment; 3111: sub-arc segment; 312: straight segment; 400: first driving assembly; 410: first connecting member; 411: first mounting hole; 420: first driving mechanism; 421: first rotating disk; 422: second rotating disc; 4221: supporting part; 423: first transmission member; 4231: first bevel gear; 4232: second bevel gear; 4233: screw rod; 4234: telescopic sleeve; 424: second transmission member; 4241: third rotating disc; 4242: transmission belt; 425: first driving member, 426: second driving member; 427: adjusting member; 4271: first adjusting rod; 4272: second adjusting rod; 500: second heating member; 510: second heating part; 520: third heating member; 600: second driving assembly; 610: second connecting member; 620: second driving mechanism; 630: third connecting member; X: axis of furnace body. DETAILED DESCRIPTION

[0020] The embodiments of the present application will be described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and should not be construed as limitations on the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

[0021] The term "first" or "second" in the specification and claims of this application may include one or more of the features explicitly or implicitly. In the description of this application, unless otherwise specified, "plurality" means two or more. In addition, "and / or" in the specification and claims means at least one of the connected objects, and the character " / " generally means that the objects connected before and after are in an "or" relationship.

[0022] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0023] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0024] The single crystal casting furnace provided in the embodiment of the present application is described in detail below through specific embodiments and their application scenarios in conjunction with the accompanying drawings.

[0025] like Figure 1-Figure 4 As shown, a single crystal casting furnace according to some embodiments of the present application includes: a furnace body 100, a crucible 200, a first heating element 300 and a first driving assembly 400; the crucible 200 is arranged in the furnace body 100, and the crucible 200 is used to contain silicon material; the first heating element 300 is arranged in the furnace body 100 and is located above the crucible 200, and is used to heat the silicon material in the crucible 200.

[0026] The furnace body 100 includes a main body 110, a top cover 120 and a first annular disk 130. The main body 110 is provided with an accommodating cavity 111. Along the axis X direction of the furnace body 100, a first cavity opening 1111 is provided on one side of the accommodating cavity 111. The top cover 120 and the first annular disk 130 are both arranged at the first cavity opening 1111. The first annular disk 130 is arranged between the top cover 120 and the main body 110. The first annular disk 130 is arranged around the outer circumference of the top cover 120. One side of the first annular disk 130 is slidably connected to the top cover 120, and the other side of the first annular disk 130 is slidably connected to the main body 110. The first driving assembly 400 is at least partially penetrated through the first annular disk 130 and connected to the first heating element 300, and is used to drive the first heating element 300 to rotate around the axis X direction of the furnace body 100.

[0027] In an embodiment of the present application, a first annular disk 130 is arranged around the outer circumference of the top cover 120 in the furnace body 100, so that the first driving component 400 is at least partially inserted into the first annular disk 130 and connected to the first heating element 300, so that the first driving component 400 can drive the first heating element 300 to rotate around the axis X direction of the furnace body 100 to improve the temperature uniformity of the thermal field formed by the first heating element 300 in the furnace body 100. The improvement of the temperature uniformity of the thermal field can make the heat radiation received by the silicon material in the crucible 200 more uniform, and correspondingly reduce the thermal stress inside the single crystal silicon crystal caused by the temperature difference, thereby improving the yield of the single crystal silicon.

[0028] In addition, the rotation speed of the first heating element 300 is adjusted by the first driving assembly 400, so that the convection intensity of the silicon melt can be controlled, so that the impurities in the silicon melt can be fully discharged, thereby improving the yield of single crystal silicon.

[0029] Specifically, the single furnace can be a cylindrical single furnace, which includes a furnace body 100, a crucible 200, a first heating element 300 and a first driving assembly 400. The furnace body 100 includes a main body 110, a top cover 120 and a first annular disk 130. A receiving cavity 111 is provided in the main body 110. A first cavity opening 1111 is provided on one side of the receiving cavity 111 along the axis X direction of the main body 110 of the single furnace body 100. The top cover 120 and the first annular disk 130 are both provided at the position of the first cavity opening 1111 to form a cover for the first cavity opening 1111, so that the single furnace forms a closed space. The first annular disk 130 is provided between the top cover 120 and the main body 110, and the first annular disk 130 is provided around the outer circumference of the top cover 120. One side of the first annular disk 130 is slidably connected to the top cover 120, and the other side of the first annular disk 130 is slidably connected to the main body 110.

[0030] Among them, the sliding connection between the first annular disk 130 and the top cover 120 and the main body 110 can be adopted in the form of a sliding connection between a slide and a slide groove. A first slide is provided on the outer circumferential surface of the first annular disk 130 close to the top cover 120, and a first slide groove is provided on the outer circumferential surface of the top cover 120 close to the first annular disk 130. The first slide groove and the first slide are snap-fitted together, which can realize the connection between the top cover 120 and the first annular disk 130 on the one hand, and can also realize relative sliding between the two on the other hand; similarly, a second slide is provided on the outer circumferential surface of the first annular disk 130 close to the main body 110, and a second slide groove is provided on the outer circumferential surface of the main body 110 close to the first annular disk 130. The second slide groove and the second slide are snap-fitted together, which can realize the connection between the first annular disk 130 and the main body 110 on the one hand, and can also realize relative sliding between the two on the other hand.

[0031] It is understandable that the sliding connection between the first annular disk 130 and the top cover 120 and the body 110 may also be achieved by other means, which are not limited in this embodiment.

[0032] Alternatively, if Figure 1 and Figure 2 As shown, the first driving assembly 400 includes a first connecting member 410 and a first driving mechanism 420. The first connecting member 410 is inserted into the first annular disk 130. One end of the first connecting member 410 is connected to the first heating member 300, and the first driving mechanism 420 is connected to the other end of the first connecting member 410. The first driving mechanism 420 is used to drive the first connecting member 410 to drive the first heating member 300 to rotate around the axis X direction of the furnace body 100, and drive the first connecting member 410 to move along the axis X direction of the furnace body 100 to adjust the relative position of the first heating member 300 and the crucible 200.

[0033] In the embodiment of the present application, a first connecting member 410 is provided so that one end of the first connecting member 410 is connected to the first heating member 300, and the other end of the first connecting member 410 is connected to the first driving mechanism 420. The first connecting member 410 is passed through the first annular disk 130, so that the first connecting member 410 can be used to fix the first heating member 300; at the same time, the first connecting member 410 can drive the first heating member 300 to rotate around the axis X direction of the furnace body 100 and move along the axis X direction of the furnace body 100 under the drive of the first driving mechanism 420, so as to adjust the relative position of the first heating member 300 and the crucible 200.

[0034] Specifically, the first heating element 300 is provided with a first electrode, one end of the first connecting member 410 is connected to the first electrode, the other end of the first connecting member 410 is connected to the first driving mechanism 420, and the first connecting member 410 is inserted into the first annular disk 130. It can be understood that the first connecting member 410 includes a first connecting portion made of a conductive material and a second connecting portion made of an insulating material, the second connecting portion is sleeved on the first connecting portion, the first electrode is connected to an external power source through the first connecting portion to achieve a heating function, and the second connecting portion can avoid the risk of electric shock to the staff when the first heating element 300 is powered on. For example, the second connecting portion can be made of ceramic insulating materials, polymer insulating materials, etc. This embodiment does not limit the material of the second connecting portion, and can be flexibly selected according to actual needs.

[0035] Optionally, a first mounting hole 411 is provided in the first annular disk 130, and the first connecting member 410 is movably connected to the first mounting hole 411. The first driving mechanism 420 is also used to drive the first connecting member 410 to slide relative to the first mounting hole 411 along the axis X direction of the furnace body 100 to adjust the distance between the first heating member 300 and the crucible 200.

[0036] In the embodiment of the present application, the first driving mechanism 420 can also drive the first connecting member 410 to move along the axis X direction of the furnace body 100, so as to flexibly adjust the distance between the first heating element 300 and the crucible 200, thereby reducing the difference in convection intensity between the position close to the top cover 120 and the position far away from the top cover 120 in the silicon melt, so that the impurities in the silicon melt can be fully discharged, thereby improving the yield of single crystal silicon; in addition, by adjusting the distance between the first heating element 300 and the crucible 200 through the first driving mechanism 420, a micro-convex thermal field can be formed, thereby improving the efficiency of single crystal silicon growth molding.

[0037] In some embodiments, the casting single crystal furnace further includes: an air inlet pipe, a water cooling channel, a first bracket, an insulation layer and a lifting platform; the air inlet pipe is arranged in the accommodating chamber 111 of the casting single crystal furnace and is arranged at the axis X position of the casting single crystal furnace, for introducing gas into the accommodating chamber 111; the water cooling channel is arranged around the outer peripheral surface of the body 110, for reducing the temperature of the casting single crystal furnace body 100; the insulation layer is arranged around the outer peripheral surface of the crucible 200, and surrounds the crucible 200 to insulate the crucible 200. There is a gap between the insulation layer and the crucible 200, the first heating element 300 is arranged at the gap position between the insulation layer and the crucible 200, and the first driving mechanism 420 drives the first heating element 300 to move in the gap between the insulation layer and the crucible 200 along the axis X direction of the furnace body 100; one end of the first bracket is connected to the insulation layer, and the other end of the first bracket is connected to the body 110, for fixing the insulation layer.

[0038] Among them, a notch is provided on the side of the insulation layer facing the second cavity opening 1112, and a lifting platform is provided at the notch, and the lifting platform can move along the X direction of the axis of the furnace body 100 to make the notch position in a closed or open state; when the silicon material in the crucible 200 is in the melting process, the lifting platform moves in the direction away from the second cavity opening 1112 to dock with the insulation layer, thereby closing the notch and achieving the insulation effect on the crucible 200; when the silicon material in the crucible 200 is in the solidification process, the lifting platform moves in the direction toward the second cavity opening 1112 to open the notch position and achieve the heat dissipation effect on the crucible 200, thereby controlling the crystal growth rate of single crystal silicon.

[0039] In some embodiments, reference Figure 1 and Figure 5As shown, the first driving mechanism 420 includes a base (not shown in the figure), a first rotating disk 421, a second rotating disk 422, a first transmission member 423, a second transmission member 424, a first driving member 425 and a second driving member 426; the base is arranged on a side of the furnace body 100 close to the top cover 120, the second rotating disk 422 is rotatably connected to the base, the first rotating disk 421 is arranged on a side of the second rotating disk 422 close to the furnace body 100, the first rotating disk 421 and the second rotating disk 422 are telescopically connected, and the end of the first connecting member 410 away from the first heating member 300 is fixedly connected to the first rotating disk 421.

[0040] Among them, the first transmission member 423 is movably connected to the second rotating disk 422, one end of the first transmission member 423 is transmission-connected to the first rotating disk 421, and the other end of the first transmission member 423 is transmission-connected to the first driving member 425, and the first driving member 425 is used to drive the first transmission member 423 to telescopically move along the axis X direction of the furnace body 100 to drive the first rotating disk 421 to approach or move away from the second rotating disk 422.

[0041] Among them, the second transmission member 424 is rotatably connected to the second rotating disk 422, and the second driving member 426 is connected to the second transmission member 424. The second driving member 426 can drive the second transmission member 424 to drive the second rotating disk 422 to rotate, so that the second rotating disk 422 drives the first rotating disk 421 to rotate, and then drives the first connecting member 410 and the first heating member 300 to rotate through the first rotating disk 421. In the embodiment of the present application, by providing a first rotating disk 421, a second rotating disk 422, a first transmission member 423, a second transmission member 424, a first driving member 425 and a second driving member 426, the first driving member 425 can be used to drive the first rotating disk 421 to approach or move away from the second rotating disk 422 through the first transmission member 423, and then the first rotating disk 421 drives the first heating member 300 to move through the first connecting member 410 to adjust the distance between the first heating member 300 and the crucible 200; and the second driving member 426 can be used to drive the second rotating disk 422 to rotate through the second transmission member 424, so that the second rotating disk 422 drives the first rotating disk 421 to rotate, and then the first rotating disk 421 drives the first connecting member 410 and the first heating member 300 to rotate. This driving mechanism has a simple structure and is easy to install and process.

[0042] In other embodiments, Figure 5As shown, the first transmission member 423 includes a first bevel gear 4231, a second bevel gear 4232, a screw rod 4233 and a telescopic sleeve 4234. A support portion 4221 is provided on the side of the second rotating disk 422 facing the first rotating disk 421. The telescopic sleeve 4234 is penetrated by the support portion 4221. One end of the telescopic sleeve 4234 is connected to the first rotating disk 421, and the other end of the telescopic sleeve 4234 is telescopically connected to the screw rod 4233. The telescopic sleeve 4234 is sleeved on the outside of the screw rod 4233, and the telescopic sleeve 4234 is threadedly connected to the screw rod 4233. The first bevel gear 4231 is connected to one end of the screw rod 4233 away from the telescopic sleeve 4234. The second bevel gear 4232 is connected to the output end of the first driving member 425, and the second bevel gear 4232 is meshed with the first bevel gear 4231. Furthermore, the first driving member 425 drives the second bevel gear 4232 to rotate, and the second bevel gear 4232 drives the first bevel gear 4231 and the screw rod 4233 to rotate, thereby driving the telescopic sleeve 4234 to telescopically move along the axis X direction of the furnace body 100, thereby driving the first rotating disk 421 to telescopically move.

[0043] In other embodiments, the second transmission member 424 includes a third rotating disk 4241 and a transmission belt 4242, wherein the third rotating disk 4241 is connected to the output end of the second driving member 426, and the transmission belt 4242 is respectively rotatably connected to the third rotating disk 4241 and the second rotating disk 422. Furthermore, the second driving member 426 drives the third rotating disk 4241 to rotate, so as to drive the second rotating disk 422 to rotate through the transmission belt 4242.

[0044] Furthermore, the first driving mechanism 420 also includes an adjusting member 427, which includes a first adjusting rod 4271 and a second adjusting rod 4272. One end of the first adjusting rod 4271 is connected to the second rotating disk 422, the other end of the first adjusting rod 4271 is slidably connected to the second adjusting rod 4272, and one end of the second adjusting rod 4272 that is away from the first adjusting rod 4271 is connected to the first rotating disk 421. The second adjusting rod 4272 can be telescopically moved relative to the first adjusting rod 4271 along the axis X direction of the furnace body 100.

[0045] The first driving member 425 and the second driving member 426 can be a servo motor or a cylinder. The servo motor has high precision, small size and high efficiency, and the cylinder has low cost. Of course, the specific types of the first driving member 425 and the second driving member 426 can be flexibly selected according to the actual process, and this embodiment does not limit them.

[0046] Alternatively, if Figure 1 and Figure 2As shown, the casting single crystal furnace also includes a second heating element 500 and a second driving assembly 600, and the furnace body 100 also includes a second annular disk 140 and a bottom cover 150; the second heating element 500 is arranged in the furnace body 100 and is arranged around the outer periphery of the crucible 200, and is used to heat the silicon material in the crucible 200; along the axis X direction of the furnace body 100, a second cavity opening 1112 is provided on one side of the accommodating cavity 111 away from the first cavity opening 1111, and the second annular disk 140 and the bottom cover 150 are both arranged at the second cavity opening At 1112, the second annular disk 140 is arranged between the bottom cover 150 and the main body 110, and the second annular disk 140 is arranged around the outer circumference of the bottom cover 150. One side of the second annular disk 140 is slidably connected to the bottom cover 150, and the other side of the second annular disk 140 is slidably connected to the main body 110; the second driving assembly 600 is at least partially penetrated through the second annular disk 140 and connected to the second heating element 500, and is used to drive the second heating element 500 to rotate around the axis X direction of the furnace body 100.

[0047] In the embodiment of the present application, by arranging a second heating element 500, heating together with the first heating element 300 can not only improve the heating efficiency, but also optimize the temperature distribution of the thermal field in the single furnace; in addition, by arranging a second annular disk 140 around the outer circumference of the bottom cover 150, the second driving assembly 600 is at least partially penetrated through the second annular disk 140 and connected to the second heating element 500, so that the second driving assembly 600 can drive the second heating element 500 to rotate around the axis X direction of the furnace body 100, thereby further improving the uniformity of the thermal field formed by the second heating element 500. The further improvement of the uniformity of the thermal field can make the heat radiation to the silicon material in the crucible 200 more uniform, and correspondingly reduce the thermal stress inside the crystal caused by the temperature difference, thereby improving the yield of single crystal silicon.

[0048] Specifically, the casting single crystal furnace includes a second heating element 500 and a second driving assembly 600, the second heating element 500 is arranged in the furnace body 100, and the second heating element 500 is arranged around the outer periphery of the crucible 200; along the axis X direction of the furnace body 100, a second cavity opening 1112 is provided on the side of the accommodating cavity 111 away from the first cavity opening 1111, the second cavity opening 1112 is opposite to the first cavity opening 1111, the second annular disk 140 and the bottom cover 150 are both arranged at the second cavity opening 1112, the second annular disk 140 is arranged between the bottom cover 150 and the main body 110, the second annular disk 140 is arranged around the outer periphery of the bottom cover 150, one side of the second annular disk 140 is slidably connected to the bottom cover 150, and the other side of the second annular disk 140 is slidably connected to the main body 110, and the second driving assembly 600 is at least partially penetrated through the second annular disk 140 and connected to the second heating element 500.

[0049] Among them, the sliding connection between the second annular disk 140 and the bottom cover 150 and the main body 110 can be achieved by a snap-in method. A third slide is provided on the outer circumferential surface of the second annular disk 140 on the side close to the bottom cover 150, and a third slide groove is provided on the outer circumferential surface of the bottom cover 150 on the side close to the second annular disk 140. The third slide groove and the third slide are snap-fitted together, which can realize the connection between the bottom cover 150 and the second annular disk 140 on the one hand, and can also realize relative sliding between the two on the other hand; similarly, a fourth slide is provided on the outer circumferential surface of the second annular disk 140 on the side close to the main body 110, and a fourth slide groove is provided on the outer circumferential surface of the main body 110 on the side close to the second annular disk 140. The fourth slide groove and the fourth slide are snap-fitted together, which can realize the connection between the second annular disk 140 and the main body 110 on the one hand, and can also realize relative sliding between the two on the other hand.

[0050] It is understandable that the sliding connection between the second annular disk 140 and the bottom cover 150 and the body 110 may also be achieved by other means, which are not limited in this embodiment.

[0051] Alternatively, if Figure 1 and Figure 4 As shown, the second driving assembly 600 includes a second connecting member 610 and a second driving mechanism 620. The second connecting member 610 is inserted into the second annular disk 140. One end of the second connecting member 610 is connected to the second heating member 500, and the other end of the second connecting member 610 is connected to the second driving mechanism 620. The second driving mechanism 620 is used to drive the second connecting member 610 to drive the second heating member 500 to rotate around the axis X direction of the furnace body 100, and drive the second connecting member 610 to move along the axis X direction of the furnace body 100 to adjust the relative position of the second heating member 500 and the crucible 200.

[0052] In the embodiment of the present application, a second connecting member 610 is provided so that one end of the second connecting member 610 is connected to the second heating member 500, and the other end of the second connecting member 610 is connected to the second driving mechanism 620. The second connecting member 610 is passed through the second annular disk 140, so that the second connecting member 610 can be used to fix the second heating member 500; at the same time, the second connecting member 610 can drive the second heating member 500 to rotate around the axis X direction of the furnace body 100 under the drive of the second driving mechanism 620, and drive the second connecting member 610 to move along the axis X direction of the furnace body 100, so as to adjust the relative position of the second heating member 500 and the crucible 200, thereby improving the temperature uniformity of the thermal field formed by the second heating member 500.

[0053] Specifically, the second heating element 500 is provided with a second electrode, one end of the second connecting member 610 is connected to the second electrode, the other end of the second connecting member 610 is connected to the second driving mechanism 620, and the second connecting member 610 is inserted into the second annular disk 140. It can be understood that the second connecting member 610 includes a third connecting portion made of a conductive material and a fourth connecting portion made of an insulating material, the fourth connecting portion is sleeved on the third connecting portion, the second electrode is connected to an external power supply through the third connecting portion to achieve a heating function, and the fourth connecting portion can avoid the risk of electric shock to the staff when the second heating element 500 is powered on. For example, the fourth connecting portion can be made of ceramic insulating materials, polymer insulating materials, etc. This embodiment does not limit the material of the fourth connecting portion, and can be flexibly selected according to actual needs.

[0054] It should be noted that the specific implementation of the second driving mechanism 620 driving the second heating element 500 to rotate around the axis X direction of the furnace body 100 and adjusting the relative position of the second heating element 500 and the crucible 200 is the same as that of the first driving mechanism 420, which can be implemented by reference and will not be repeated here.

[0055] Alternatively, if Figure 2 As shown, the second driving assembly 600 also includes a third connecting member 630, and the furnace body 100 also includes a third annular disk 170, which is arranged between the first annular disk 130 and the main body 110; the third annular disk 170 is arranged around the outer circumference of the first annular disk 130, one side of the third annular disk 170 is slidably connected to the first annular disk 130, and the other side of the third annular disk 170 is slidably connected to the main body 110; one end of the third connecting member 630 is connected to one end of the second heating element 500 away from the second connecting member 610, and the other end of the third connecting member 630 is penetrated through the third annular disk 170.

[0056] In the embodiment of the present application, a third connecting member 630 and a third annular disk 170 are provided, one end of the third connecting member 630 is connected to the second heating member 500, and the other end of the third connecting member 630 is connected to the third annular disk 170. This can improve the stability of the second heating member 500 during the rotation around the axis X direction of the furnace body 100 and the movement along the axis X direction of the furnace body 100.

[0057] Specifically, the second driving assembly 600 includes a third connecting piece 630, and the furnace body 100 includes a third annular disk 170. The third annular disk 170 is arranged between the first annular disk 130 and the body 110. The third annular disk 170 is arranged around the outer circumference of the first annular disk 130. A fifth slide groove is arranged on the outer circumferential surface of the third annular disk 170 close to the first annular disk 130. A second slide is arranged on the outer circumferential surface of the first annular disk 130 close to the third annular disk 170. The fifth slide groove and the second slide are snap-fitted, which can realize the connection between the third annular disk 170 and the first annular disk 130 on the one hand, and the connection between the third annular disk 170 and the first annular disk 130 on the other hand. On the one hand, relative sliding between the two can also be achieved; similarly, a fifth slide is provided on the outer circumferential surface of the third annular disk 170 close to the main body 110, and a second slide is provided on the outer circumferential surface of the main body 110 close to the third annular disk 170. The fifth slide and the second slide are snap-fitted together, which can realize the connection between the third annular disk 170 and the main body 110 on the one hand, and can also realize relative sliding between the two on the other hand. One end of the third connecting member 630 is connected to the end of the second heating member 500 away from the second connecting member 610, and the other end of the third connecting member 630 is passed through the third annular disk 170.

[0058] Alternatively, if Figure 2 and Figure 3 As shown, the furnace body 100 also includes a slip ring 160, which is arranged between the first annular disk 130 and the third annular disk 170. The slip ring 160 is arranged around the outer circumference of the first annular disk 130, one side of the slip ring 160 is slidably connected to the first annular disk 130, and the other side of the slip ring 160 is slidably connected to the third annular disk 170.

[0059] In the embodiment of the present application, a slip ring 160 is provided between the first annular disk 130 and the third annular disk 170, one side of the slip ring 160 is slidably connected to the first annular disk 130, and the other side of the slip ring 160 is slidably connected to the third annular disk 170. This can reduce the friction between the first annular disk 130 and the third annular disk 170 during relative rotation, improve the smoothness of rotation between the first annular disk 130 and the third annular disk 170, thereby reducing the wear of the first annular disk 130 and the third annular disk 170 during rotation; in addition, it can also facilitate the staff to replace the worn slip ring 160.

[0060] Alternatively, if Figure 6 As shown, the first heating element 300 includes a plurality of fan-shaped first heating portions 310 , and the plurality of first heating portions 310 are sequentially connected end to end to form a circular first heating element 300 .

[0061] In the embodiment of the present application, a plurality of fan-shaped first heating sections 310 are provided, and the plurality of first heating sections 310 are connected end to end in sequence to form a circular first heating element 300. Such a circular first heating element 300 can form a cylindrical heat field to adapt to the cylindrical crucible 200, reduce the uneven heating at the edge of the crucible 200, and further reduce the thermal stress during the growth of the single crystal silicon, thereby improving the yield of the single crystal silicon. In addition, a plurality of first heating sections 310 are provided, so that when one of the first heating sections 310 fails, the other first heating sections 310 can still continue to work, thereby ensuring the stable operation of the casting single crystal furnace.

[0062] In some embodiments, Figure 6 As shown, the first heating portion 310 includes an arc segment 311 and a straight segment 312, the arc segment 311 includes a plurality of sub-arc segments 3111 arranged at intervals, the plurality of sub-arc segments 3111 are connected end to end to form the arc segment 311, and the arc segment 311 is connected with the straight segment 312 to form the first heating portion 310. By configuring the first heating portion 310 as a combination of the arc segment 311 and the straight segment 312, and the arc segment 311 is formed by connecting the plurality of sub-arc segments 3111 arranged at intervals end to end, not only can a cylindrical heat field with more uniform heat distribution be formed to adapt to the columnar crucible 200, but also the production cost of the first heating portion 310 can be reduced.

[0063] Among them, the spacing distance between two adjacent sub-arc segments 3111 can be equal or unequal. When the spacing distance between two adjacent sub-arc segments 3111 is equal, the uniformity of the thermal field formed by the first heating element 300 can be further improved, thereby improving the yield of single crystal silicon.

[0064] Specifically, the first heating portion 310 includes an arc segment 311 and a straight segment 312. The arc segment 311 includes a plurality of sub-arc segments 3111 arranged radially at intervals. The plurality of sub-arc segments 3111 are connected in sequence to form the arc segment 311. The sub-arc segment 3111 close to the innermost side of the arc segment 311 is connected to the straight segment 312, thereby forming the first heating portion 310.

[0065] Exemplarily, the first heating element 300 includes three first heating parts 310, namely: a first heating part 310A, a first heating part 310B and a third heating part 310C, the straight line segment 312 of the first heating part 310A is connected to the arc segment of the first heating part 310B, the straight line segment of the first heating part 310B is connected to the arc segment of the first heating part 310C, and the straight line segment of the first heating part 310C is connected to the arc segment 311 of the first heating part 310A, finally forming a circular first heating element 300.

[0066] Alternatively, if Figure 7As shown, the second heating element 500 includes a plurality of second heating portions 510 , and the plurality of second heating portions 510 surround the outer circumference of the crucible 200 and are sequentially connected end to end to form a cylindrical second heating element 500 .

[0067] In an embodiment of the present application, a plurality of second heating portions 510 are provided, and the plurality of second heating portions 510 are sequentially connected end to end along the outer peripheral surface of the crucible 200 to form a cylindrical second heating element 500. Such a cylindrical second heating element 500 can surround the outer periphery of the crucible 200 to provide a uniform heat field for the silicon material in the crucible 200, thereby reducing the uneven heating at the edge of the crucible 200, thereby reducing the thermal stress during the growth process of the single crystal silicon, thereby improving the yield of the single crystal silicon.

[0068] Specifically, the second heating element 500 includes a plurality of U-shaped second heating portions 510. Two adjacent U-shaped second heating portions 510 are connected end to end to form a cylindrical second heating element 500. The U-shaped second heating portion 510 has a simple structure and is easy to install and subsequently disassemble and repair.

[0069] In some other embodiments, a third heating element 520 is provided at the connection position of two adjacent U-shaped second heating parts 510. The third heating element 520 can supplement the heat of the connection position of two adjacent second heating parts 510 to improve the uniformity of the thermal field formed by the second heating element 500, thereby improving the yield of single crystal silicon.

[0070] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0071] Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the claims and their equivalents.

Claims

1. A single crystal casting furnace, characterized in that: include: A furnace body, a crucible, a first heating element and a first driving assembly; The crucible is disposed in the furnace body, and the crucible is used to contain silicon material; the first heating element is disposed in the furnace body and located above the crucible, and is used to heat the silicon material in the crucible; The furnace body comprises a main body, a top cover and a first annular disk, wherein a receiving cavity is provided in the main body, and a first cavity opening is provided on one side of the receiving cavity along the axial direction of the furnace body, the top cover and the first annular disk are both provided at the first cavity opening, the first annular disk is provided between the top cover and the main body, the first annular disk is provided around the outer circumference of the top cover, one side of the first annular disk is slidably connected to the top cover, and the other side of the first annular disk is slidably connected to the main body; The first driving assembly is at least partially disposed through the first annular disk and connected to the first heating element, and is used to drive the first heating element to rotate around the axis direction of the furnace body.

2. The single crystal casting furnace according to claim 1, characterized in that: The first driving assembly includes a first connecting member and a first driving mechanism, the first connecting member is inserted into the first annular disk, one end of the first connecting member is connected to the first heating member, and the other end of the first connecting member is connected to the first driving mechanism; the first driving mechanism is used to drive the first connecting member to drive the first heating member to rotate around the axial direction of the furnace body, and drive the first connecting member to move along the axial direction of the furnace body to adjust the relative position of the first heating member and the crucible.

3. The single crystal casting furnace according to claim 2, characterized in that: A first mounting hole is provided in the first annular disk, the first connecting member is movably connected to the first mounting hole, and the first driving mechanism is further used to drive the first connecting member to slide relative to the first mounting hole along the axial direction of the furnace body to adjust the distance between the first heating member and the crucible.

4. The single crystal casting furnace according to claim 2, characterized in that: The first driving mechanism comprises a base, a first rotating disc, a second rotating disc, a first transmission member, a second transmission member, a first driving member and a second driving member; the base is arranged on a side of the furnace body close to the top cover, the second rotating disc is rotatably connected to the base, the first rotating disc is arranged on a side of the second rotating disc close to the furnace body, the first rotating disc and the second rotating disc are telescopically connected, and an end of the first connecting member away from the first heating member is fixedly connected to the first rotating disc; The first transmission member is movably connected to the second rotating disk, one end of the first transmission member is in driving connection with the first rotating disk, and the other end of the first transmission member is in driving connection with the first driving member, and the first driving member is used to drive the first transmission member to move telescopically along the axis direction of the furnace body, so as to drive the first rotating disk to approach or move away from the second rotating disk; The second transmission member is rotatably connected to the second rotating disk, the second driving member is connected to the second transmission member, and the second driving member can drive the second transmission member to drive the second rotating disk to rotate, so that the second rotating disk drives the first rotating disk to rotate.

5. The single crystal casting furnace according to claim 1, characterized in that: The single crystal casting furnace further comprises a second heating element and a second driving assembly, and the furnace body further comprises a second annular disk and a bottom cover; The second heating element is disposed in the furnace body and around the outer circumference of the crucible, and is used to heat the silicon material in the crucible; Along the axial direction of the furnace body, a second cavity opening is provided on a side of the accommodating cavity away from the first cavity opening, the second annular disk and the bottom cover are both provided at the second cavity opening, the second annular disk is provided between the bottom cover and the body, the second annular disk is provided around the outer circumference of the bottom cover, one side of the second annular disk is slidably connected to the bottom cover, and the other side of the second annular disk is slidably connected to the body; The second driving assembly is at least partially disposed through the second annular disk and connected to the second heating element, and is used to drive the second heating element to rotate around the axis direction of the furnace body.

6. The single crystal casting furnace according to claim 5, characterized in that: The second driving assembly includes a second connecting member and a second driving mechanism, the second connecting member is inserted into the second annular disk, one end of the second connecting member is connected to the second heating member, and the other end of the second connecting member is connected to the second driving mechanism; the second driving mechanism is used to drive the second connecting member to drive the second heating member to rotate around the axial direction of the furnace body, and drive the second connecting member to move along the axial direction of the furnace body to adjust the relative position of the second heating member and the crucible.

7. The single crystal casting furnace according to claim 6, characterized in that: The second driving assembly further includes a third connecting member, and the furnace body further includes a third annular disk, which is disposed between the first annular disk and the body; the third annular disk is disposed around the outer circumference of the first annular disk, one side of the third annular disk is slidably connected to the first annular disk, and the other side of the third annular disk is slidably connected to the body; One end of the third connecting member is connected to an end of the second heating member away from the second connecting member, and the other end of the third connecting member is penetrated through the third annular disk.

8. The single crystal casting furnace according to claim 7, characterized in that: The furnace body also includes a slip ring, which is arranged between the first annular disk and the third annular disk, and is arranged around the outer circumference of the first annular disk. One side of the slip ring is slidably connected to the first annular disk, and the other side of the slip ring is slidably connected to the third annular disk.

9. The single crystal casting furnace according to any one of claims 1 to 8, characterized in that: The first heating element includes a plurality of fan-shaped first heating portions, and the plurality of first heating portions are sequentially connected end to end to form a circular first heating element.

10. The single crystal casting furnace according to claim 5, characterized in that: The second heating element includes a plurality of second heating parts, and the plurality of second heating parts surround the outer circumference of the crucible and are connected end to end in sequence to form a cylindrical second heating element.

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