A new type of single crystal furnace thermal field rapid cooling tooling and furnace shutdown method

Abstract

The invention discloses a novel single crystal furnace thermal field rapid cooling tool and a furnace shutdown method in the technical field of single crystal manufacturing equipment, comprising a furnace shell and a heat shield, wherein the heat shield is arranged inside the furnace shell, and the heat shield and the furnace shell are fixedly connected, an argon gas pipe interface is arranged on the top of the furnace shell, a tungsten wire rope is arranged inside the argon gas pipe interface, a cooling tool body is arranged at one end of the tungsten wire rope, and the cooling tool body and the tungsten wire rope are detachably connected, a sealing plate is arranged on one side of the heat shield, the sealing plate and the heat shield are fixedly connected, a connecting plate is arranged at the bottom of the sealing plate, a sealing gasket is arranged at the bottom of the connecting plate, a crucible is arranged inside the furnace shell, and a heat exhaust hole is arranged at the bottom of the furnace shell, and two heat exhaust holes are arranged, and the cooling speed of the device is effectively improved by the tungsten wire rope, the cooling tool with the groove is rotated to increase the flow speed of the argon gas, thereby quickly exhausting the heat from the heat exhaust hole, and effectively improving the work efficiency.

Description

Technical Field

[0001] The invention belongs to the technical field of single crystal manufacturing equipment, and in particular relates to a novel single crystal furnace thermal field rapid cooling tool and a furnace shutdown method. Background Art

[0002] With the continuous development of the world economy, the demand for efficient energy in modernization construction is growing. Photovoltaic power generation, as a green energy and a major energy source for sustainable development of mankind, is increasingly valued and developed by countries around the world. As a basic material for photovoltaic power generation, single crystal silicon wafers have a wide market demand. The Czochralski single crystal silicon growth method is a common single crystal growth method. Its growth process is to immerse the seed crystal into the melt in a single crystal furnace, and then carry out the seeding, shoulder release, shoulder rotation, equal diameter and finishing processes in sequence, and finally obtain a single crystal silicon rod.

[0003] After the single crystal furnace is completed, the furnace is stopped and the crucible is lowered to keep the quartz crucible away from the heat shield. Argon gas is then introduced from the top of the single crystal furnace and the hot argon gas is extracted from the bottom by the vacuum pump to achieve the purpose of thermal field cooling.

[0004] The existing single crystal furnace thermal field cooling still has some defects. At present, in order to save electricity, most of the thermal field insulation felts in the industry are made of viscose-based graphite soft felts. The advantage of this soft felt is that it has good thermal insulation performance and can reduce the crystal pulling power. However, while the thermal insulation performance is good, it leads to slow heat dissipation in the thermal field. According to the shutdown time set by the previous process, the graphite parts in the thermal field of the furnace are red and the temperature is high. If the shutdown time is extended, it will waste working hours and increase costs. If the furnace is dismantled according to the normal shutdown time, there may be a risk of burns to personnel and oxidation and scrapping of graphite parts. For this reason, we propose a new type of single crystal furnace thermal field rapid cooling tooling and shutdown method. Summary of the invention

[0005] The purpose of the present invention is to provide a novel single crystal furnace thermal field rapid cooling tool and a furnace shutdown method to solve the problem of slow heat dissipation of the thermal field and reduced production efficiency mentioned in the above background technology.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a novel single crystal furnace thermal field rapid cooling tooling and shutdown method, comprising a furnace shell and a heat shield, a heat shield is provided inside the furnace shell, the heat shield and the furnace shell are fixedly connected, an argon pipe interface is provided at the top of the furnace shell, a tungsten wire rope is provided inside the argon pipe interface, the tungsten wire rope and the inside of the argon pipe interface are fixedly connected, a cooling tooling body is provided at one end of the tungsten wire rope, the cooling tooling body and the tungsten wire rope are detachably connected, a sealing plate is provided on one side of the heat shield, the sealing plate and the heat shield are fixedly connected, a connecting plate is provided at the bottom of the sealing plate, a sealing gasket is provided at the bottom of the connecting plate, the sealing gasket and the connecting plate are fixed by bonding, a crucible is provided inside the furnace shell, a heat exhaust hole is provided at the bottom of the furnace shell, and two heat exhaust holes are provided.

[0007] Preferably, a heat exhaust pipe is provided at the bottom of the furnace shell, the heat exhaust pipe and the heat exhaust hole are interconnected, a vacuum pump is provided at the bottom of the furnace shell, and the vacuum pump and the furnace shell are fixed by screws.

[0008] Preferably, a threaded rod is provided at the bottom of the crucible, the threaded rod is fixedly connected to the crucible, a first gear is sleeved on the surface of the threaded rod, the first gear is connected to the threaded rod by threads, and the first gear is rotatably connected to the bottom of the furnace shell.

[0009] Preferably, a second gear is provided on one side of the first gear, the second gear is meshingly connected with the first gear, and a motor is provided on one side of the second gear.

[0010] Preferably, a mounting frame is provided at the bottom of the furnace shell, and the motor and the mounting frame are fixed by screws.

[0011] Preferably, a fixing plate is provided at the bottom of the heat shield, and the fixing plate is fixedly connected to the sealing plate.

[0012] Preferably, a heat-insulating layer is provided inside the furnace shell, and the heat-insulating layer and the furnace shell are fixedly connected.

[0013] Preferably, the bottom of the furnace shell is provided with supporting legs, four supporting legs are provided, and the supporting legs are fixedly connected to the furnace shell.

[0014] Preferably, an inspection door is provided on one side of the furnace shell, and the inspection door and the furnace shell are rotatably connected via a hinge.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] 1. The cooling speed of the device is effectively improved by means of the tungsten wire rope, cooling fixture, sealing plate, connecting plate, sealing pad and heat exhaust hole. It is only necessary to rotate the cooling fixture with grooves to increase the flow rate of argon gas, so as to quickly discharge the heat from the heat exhaust hole, effectively improving the working efficiency.

[0017] 2. The heat exhaust pipe and vacuum pump can further improve the speed of heat exhaust. When dissipating heat, start the vacuum pump to suck the hot argon gas into the heat exhaust pipe and then quickly discharge it, thereby improving production efficiency.

[0018] 3. The crucible is lifted and lowered by means of the threaded rod, the first gear, the second gear and the motor, so that it can work better with the heat shield. The motor is started to drive the second gear to rotate, thereby driving the first gear to rotate. When the first gear rotates, it will drive the threaded rod to slide inside the first gear, thereby driving the crucible to lift and lower. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the cross-sectional structure of the present invention;

[0020] Figure 2 It is a schematic diagram of the bottom structure of the present invention;

[0021] Figure 3 It is a schematic diagram of the internal structure of the present invention;

[0022] Figure 4 It is a side structural schematic diagram of the present invention;

[0023] Figure 5 It is a schematic diagram of the overall structure of the present invention.

[0024] In the figure: 1. furnace shell; 2. heat shield; 3. argon gas pipe interface; 4. tungsten wire rope; 5. cooling tool body; 6. sealing plate; 7. connecting plate; 8. sealing gasket; 9. crucible; 10. heat exhaust hole; 11. heat exhaust pipe; 12. vacuum pump; 13. threaded rod; 14. first gear; 15. second gear; 16. motor; 17. mounting frame; 18. fixing plate; 19. insulation layer; 20. supporting leg; 21. inspection door. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] See also Figure 1-5The present invention provides a technical solution: a novel single crystal furnace thermal field rapid cooling tool and a furnace shutdown method, comprising a furnace shell 1 and a heat shield 2, the furnace shell 1 is provided with a heat shield 2 inside, the heat shield 2 and the furnace shell 1 are fixedly connected, an argon pipe interface 3 is provided on the top of the furnace shell 1, a tungsten wire rope 4 is provided inside the argon pipe interface 3, the tungsten wire rope 4 and the inside of the argon pipe interface 3 are fixedly connected, a cooling tool body 5 is provided at one end of the tungsten wire rope 4, the cooling tool body 5 and the tungsten wire rope 4 are detachably connected, a sealing plate 6 is provided on one side of the heat shield 2, the sealing plate 6 and the heat shield 2 are fixedly connected, a connecting plate 7 is provided at the bottom of the sealing plate 6, a sealing gasket 8 is provided at the bottom of the connecting plate 7, the sealing gasket 8 and the connecting plate 7 are fixed by bonding, a crucible 9 is provided inside the furnace shell 1, a heat exhaust hole 10 is provided at the bottom of the furnace shell 1, and two heat exhaust holes 10 are provided.

[0027] In this embodiment, when using the new single crystal furnace thermal field rapid cooling tooling, the crystal rod is taken out after the furnace is stopped, and the cooling tooling body 5 with spiral grooves is hung, and the cooling tooling body 5 is lowered to the lower edge of the heat screen 2, and the crystal rotation is set to 15rpm / min, so that the cooling tooling body 5 starts to rotate. Since the crystal rotates counterclockwise, the argon gas entering the argon pipe interface 3 will flow downward along the threaded groove of the cooling tooling body 5. Under the same argon flow rate, the flow rate of the argon gas is accelerated by rotating the cooling tooling body 5, so that more heat inside the thermal field is taken away, thereby achieving the purpose of rapid cooling of the thermal field. The sealing plate 6, connecting plate 7 and sealing gasket 8 are provided, so that the single crystal has a better sealed space during growth. When the crucible 9 rises, the top of the crucible 9 will squeeze the sealing gasket 8, thereby improving the sealing of the space, and the heat is quickly discharged from the heat exhaust hole 10 through the heat exhaust hole 10, thereby achieving the purpose of rapid cooling.

[0028] Specifically, a heat exhaust pipe 11 is provided at the bottom of the furnace shell 1, and the heat exhaust pipe 11 and the heat exhaust hole 10 are interconnected. A vacuum pump 12 is provided at the bottom of the furnace shell 1, and the vacuum pump 12 and the furnace shell 1 are fixed by screws. A threaded rod 13 is provided at the bottom of the crucible 9, and the threaded rod 13 is fixedly connected to the crucible 9. A first gear 14 is sleeved on the surface of the threaded rod 13, and the first gear 14 and the threaded rod 13 are connected by threads. The first gear 14 is rotatably connected to the bottom of the furnace shell 1, and a second gear 15 is provided on one side of the first gear 14, and the second gear 15 and the first gear 14 are connected. A motor 16 is provided on one side of the second gear 15 in meshing connection, a mounting frame 17 is provided on the bottom of the furnace shell 1, the motor 16 and the mounting frame 17 are fixed by screws, a fixing plate 18 is provided on the bottom of the heat screen 2, the fixing plate 18 and the sealing plate 6 are fixedly connected, an insulating layer 19 is provided inside the furnace shell 1, the insulating layer 19 and the furnace shell 1 are fixedly connected, a supporting leg 20 is provided on the bottom of the furnace shell 1, four supporting legs 20 are provided, the supporting leg 20 and the furnace shell 1 are fixedly connected, an inspection door 21 is provided on one side of the furnace shell 1, and the inspection door 21 and the furnace shell 1 are rotatably connected by hinges.

[0029] In this embodiment, the heat exhaust pipe 11 and the vacuum pump 12 are provided to further improve the speed of heat exhaust. When heat is dissipated, the vacuum pump 12 is started to suck the hot argon gas into the interior of the heat exhaust pipe 11 and then quickly exhaust it, thereby improving production efficiency. The crucible 9 is lifted and lowered by the threaded rod 13, the first gear 14, the second gear 15 and the motor 16, so that it can better cooperate with the heat shield 2. The motor 16 is started to drive the second gear 15 to rotate, thereby driving the first gear 14 to rotate. When the first gear 14 rotates, it will drive the threaded rod 13 to slide inside the first gear 14, so as to drive the crucible 9 to be lifted and lowered. The thermal insulation layer 19 is provided to improve the thermal insulation performance of the furnace shell 1. The support legs 20 are provided to improve the stability of the device. The inspection door 21 is provided to facilitate the inspection of the device.

[0030] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A novel single crystal furnace thermal field rapid cooling tool and furnace shutdown method, comprising a furnace shell (1) and a heat shield (2), characterized in that: A heat shield (2) is provided inside the furnace shell (1), and the heat shield (2) and the furnace shell (1) are fixedly connected. An argon pipe interface (3) is provided on the top of the furnace shell (1), and a tungsten wire rope (4) is provided inside the argon pipe interface (3), and the tungsten wire rope (4) is fixedly connected to the inside of the argon pipe interface (3). A cooling tool body (5) is provided at one end of the tungsten wire rope (4), and the cooling tool body (5) and the tungsten wire rope (4) are detachably connected. A sealing plate (6) is provided on one side of the heat shield (2), and the sealing plate (6) and the heat shield (2) are fixedly connected. A connecting plate (7) is provided at the bottom of the sealing plate (6), and a sealing gasket (8) is provided at the bottom of the connecting plate (7), and the sealing gasket (8) and the connecting plate (7) are fixed by bonding. A crucible (9) is provided inside the furnace shell (1), and a heat exhaust hole (10) is provided at the bottom of the furnace shell (1), and two heat exhaust holes (10) are provided.

2. A novel single crystal furnace thermal field rapid cooling tooling and furnace shutdown method according to claim 1, characterized in that: A heat exhaust pipe (11) is provided at the bottom of the furnace shell (1), and the heat exhaust pipe (11) and the heat exhaust hole (10) are interconnected. A vacuum pump (12) is provided at the bottom of the furnace shell (1), and the vacuum pump (12) and the furnace shell (1) are fixed by screws.

3. A novel single crystal furnace thermal field rapid cooling tooling and furnace shutdown method according to claim 1, characterized in that: A threaded rod (13) is provided at the bottom of the crucible (9), the threaded rod (13) and the crucible (9) are fixedly connected, a first gear (14) is sleeved on the surface of the threaded rod (13), the first gear (14) and the threaded rod (13) are connected by threads, and the first gear (14) is rotatably connected to the bottom of the furnace shell (1).

4. A novel single crystal furnace thermal field rapid cooling tool and furnace shutdown method according to claim 3, characterized in that: A second gear (15) is provided on one side of the first gear (14), the second gear (15) is meshingly connected with the first gear (14), and a motor (16) is provided on one side of the second gear (15).

5. A novel single crystal furnace thermal field rapid cooling tool and furnace shutdown method according to claim 4, characterized in that: A mounting frame (17) is provided at the bottom of the furnace shell (1), and the motor (16) and the mounting frame (17) are fixed by screws.

6. A novel single crystal furnace thermal field rapid cooling tooling and furnace shutdown method according to claim 1, characterized in that: A fixing plate (18) is provided at the bottom of the heat shield (2), and the fixing plate (18) and the sealing plate (6) are fixedly connected.

7. The novel single crystal furnace thermal field rapid cooling tooling and furnace shutdown method according to claim 1 is characterized by: A heat-insulating layer (19) is provided inside the furnace shell (1), and the heat-insulating layer (19) and the furnace shell (1) are fixedly connected.

8. The novel single crystal furnace thermal field rapid cooling tooling and furnace shutdown method according to claim 1 is characterized by: The bottom of the furnace shell (1) is provided with supporting legs (20), four supporting legs (20) are provided, and the supporting legs (20) are fixedly connected to the furnace shell (1).

9. The novel single crystal furnace thermal field rapid cooling tooling and furnace shutdown method according to claim 1 is characterized by: An inspection door (21) is provided on one side of the furnace shell (1), and the inspection door (21) and the furnace shell (1) are rotatably connected via a hinge.

10. A novel single crystal furnace thermal field rapid cooling tooling and furnace shutdown method, characterized in that: The following steps are involved: After stopping the furnace, the crystal rod is taken out, and the cooling fixture body (5) with spiral grooves is hung on it. The cooling fixture body (5) is lowered to the lower edge of the heat shield (2), and the crystal rotation is set to 15 rpm / min, so that the cooling fixture body (5) starts to rotate. Since the crystal rotates counterclockwise, the argon gas entering the argon pipe interface (3) will flow downward along the spiral grooves of the cooling fixture body (5). Under the same argon flow rate, the flow speed of the argon gas is accelerated by rotating the cooling fixture body (5), so that more heat inside the thermal field is taken away, thereby achieving the purpose of rapid cooling of the thermal field.

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