Insulating liquid flowability monitoring device and wafer testing device

Abstract

The application discloses an insulating liquid flowability monitoring device and a wafer testing device. The insulating liquid flowability monitoring device comprises a flow monitoring module and an alarm module; the flow monitoring module is electrically connected with the alarm module; the flow monitoring module is used for monitoring the actual flow of the insulating liquid in the insulating liquid pipeline of the wafer testing device, and the alarm module is controlled to send an alarm prompt when the actual flow is less than a first set threshold. The application provides an insulating liquid flowability monitoring device and a wafer testing device, which can reduce the economic loss of enterprises and indirectly increase the income of enterprises.

Description

Technical Field

[0001] This invention relates to the field of semiconductor testing technology, and in particular to an insulating liquid flow monitoring device and a wafer testing device. Background Technology

[0002] After a wafer is manufactured, it needs to undergo wafer testing to ensure its production quality. Currently, during wafer testing, excessive leakage current caused by surface arcing often leads to wafer breakage, resulting in significant economic losses for companies. Summary of the Invention

[0003] This invention provides an insulating liquid flow monitoring device and a wafer testing device, which can reduce economic losses for enterprises and indirectly increase their profits.

[0004] According to one aspect of the present invention, an insulating liquid flow monitoring device is provided, the insulating liquid flow monitoring device comprising: a flow monitoring module and an alarm module;

[0005] The flow monitoring module is electrically connected to the alarm module. The flow monitoring module is used to monitor the actual flow rate of the insulating liquid in the insulating liquid pipeline of the wafer testing device, and to control the alarm module to issue an alarm prompt when the actual flow rate is less than a first set threshold.

[0006] Optionally, the insulating liquid includes fluorinated oil.

[0007] Optionally, the first set threshold is determined based on the number of air bubbles in the insulating liquid pipe.

[0008] Optionally, the traffic monitoring module is further configured to issue a first prompt when the actual traffic is less than the first set threshold, issue a second prompt when the actual traffic is less than a second set threshold but greater than or equal to the first set threshold, and issue a third prompt when the actual traffic is greater than or equal to the second set threshold, wherein the second set threshold is greater than the first set threshold.

[0009] Optionally, the flow monitoring module includes a flow monitoring unit, a first light-emitting unit, a second light-emitting unit, and a third light-emitting unit;

[0010] The flow monitoring unit is electrically connected to the first light-emitting unit, the second light-emitting unit, the third light-emitting unit, and the alarm module. The flow monitoring unit is used to control the first light-emitting unit to issue the first prompt and the alarm module to issue an alarm prompt when the actual flow is less than the first set threshold; to control the second light-emitting unit to issue the second prompt when the actual flow is less than the second set threshold but greater than or equal to the first set threshold; and to control the third light-emitting unit to issue the third prompt when the actual flow is greater than or equal to the second set threshold.

[0011] Optionally, the alarm module includes a sound unit and a light unit;

[0012] The sound unit and the light unit are connected in series.

[0013] Optionally, the insulating liquid flow monitoring device provided in this embodiment also includes a power supply module;

[0014] The power module is electrically connected to the flow monitoring module and the alarm module, and the power module is used to supply power to the flow monitoring module and the alarm module.

[0015] Optionally, the flow monitoring module includes a monitoring sensor and a relay;

[0016] The common terminal of the relay is electrically connected to the first terminal of the alarm module, and the normally closed terminal of the relay is electrically connected to the positive terminal of the power supply module.

[0017] The second terminal of the alarm module is electrically connected to the negative terminal of the power supply module;

[0018] The monitoring sensor is used to control the common terminal of the relay to connect with the normally closed terminal of the relay when the actual flow rate is less than the first set threshold.

[0019] According to another aspect of the present invention, a wafer testing apparatus is provided, which includes an insulating liquid pipeline, a nozzle, an insulating liquid storage module, a test bench module, and an insulating liquid flow monitoring device provided in any embodiment of the present invention;

[0020] The insulating liquid pipeline is used to transport the insulating liquid;

[0021] The nozzle is used to spray the insulating liquid onto the wafer surface;

[0022] The insulating liquid storage module is connected to the insulating liquid pipeline, and the insulating liquid storage module is used to store the insulating liquid;

[0023] The test bench module is used to support the wafer.

[0024] Optionally, the wafer testing apparatus provided in this embodiment also includes a flow regulating valve;

[0025] The flow regulating valve is located in the insulating liquid pipeline, and the flow regulating valve is used to regulate the actual flow rate of the insulating liquid in the insulating liquid pipeline.

[0026] This example provides an insulating liquid flow monitoring device, which includes a flow monitoring module and an alarm module. The flow monitoring module is electrically connected to the alarm module. The flow monitoring module monitors the actual flow rate of the insulating liquid in the insulating liquid pipeline of the wafer testing equipment, and controls the alarm module to issue an alarm when the actual flow rate is less than a first set threshold. The insulating liquid flow monitoring device provided in this embodiment can issue alarms when the actual flow rate of the insulating liquid is uneven or unstable, reminding personnel to promptly check for wafers with potentially substandard insulation and to adjust the actual flow rate of the insulating liquid in the pipeline. This avoids economic losses and personnel injuries caused by personnel directly igniting substandard wafers, and also prevents subsequent economic losses due to a large number of substandard wafers caused by unstable insulating liquid flow during wafer fabrication. In summary, the insulating liquid flow monitoring device provided in this embodiment can reduce economic losses for enterprises and indirectly increase enterprise profits.

[0027] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of the present invention, nor is it intended to limit the scope of the invention. Other features of the invention will become readily apparent from the following description. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 This is a schematic diagram of the structure of an insulating liquid flow monitoring device according to an embodiment of the present invention;

[0030] Figure 2 This is a schematic diagram of the structure of a wafer testing device according to an embodiment of the present invention;

[0031] Figure 3 This is a schematic diagram of the structure of another insulating liquid flow monitoring device provided in an embodiment of the present invention;

[0032] Figure 4This is a schematic diagram of the structure of another insulating liquid flow monitoring device provided in an embodiment of the present invention;

[0033] Figure 5 This is a schematic diagram of the structure of another insulating liquid flow monitoring device provided in an embodiment of the present invention;

[0034] Figure 6 This is a schematic diagram of a wafer testing device provided according to an embodiment of the present invention. Detailed Implementation

[0035] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0036] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0037] Figure 1 This is a schematic diagram of the structure of an insulating liquid flow monitoring device according to an embodiment of the present invention. (Refer to...) Figure 1 The insulating liquid flow monitoring device 100 provided in this embodiment includes: a flow monitoring module 110 and an alarm module 120; the flow monitoring module 110 is electrically connected to the alarm module 120, the flow monitoring module 110 is used to monitor the actual flow rate of the insulating liquid in the insulating liquid pipeline in the wafer testing device, and controls the alarm module 120 to issue an alarm prompt when the actual flow rate is less than a first set threshold.

[0038] Specifically, the flow monitoring module 110 includes a probe installed inside an insulated liquid pipeline. After monitoring the actual flow rate, the flow monitoring module 110 determines the difference between the actual flow rate and a first preset threshold. When the actual flow rate is determined to be less than the first preset threshold, it controls the alarm module 120 to issue an alarm. The alarm module 120 may include an audible alarm unit and / or a visual alarm unit. The alarm notification can be received by personnel. The first preset threshold can be set according to actual needs.

[0039] The insulating liquid flow monitoring device 100 provided in this embodiment is applied in a wafer testing device. Figure 2 This is a schematic diagram of a wafer testing device according to an embodiment of the present invention, with reference to... Figure 2 The wafer testing apparatus is used to fabricate wafers 300. This apparatus includes an insulating liquid pipe 210 and a nozzle 220. The insulating liquid pipe 210 is used to transport the insulating liquid, which is then sprayed onto the surface of the wafer 300 through the nozzle 220. During the wafer 300 fabrication process, the insulating liquid needs to be sprayed onto designated areas of the wafer 300. The flow rate of the insulating liquid in the insulating liquid pipe 210 during wafer 300 fabrication is the actual flow rate. When the actual flow rate is less than a first set threshold, uneven flow and unstable flow velocity will occur in the insulating liquid within the pipe 210. This causes air bubbles to be present in the insulating liquid sprayed from the nozzle 220, resulting in the insulating liquid being sprayed indiscriminately. Consequently, some areas of the wafer 300 surface that should be insulated will not be insulated, leading to problems such as the wafer 300 being prone to explosion during arcing, causing losses to the company. In this embodiment, a flow monitoring module 110 monitors the actual flow rate of the insulating liquid in the insulating liquid pipeline 210. When the actual flow rate is less than a first set threshold, the alarm module 120 is controlled to issue an alarm prompt to remind the staff to check for wafers 300 that may have unqualified insulation. This prevents the staff from directly igniting unqualified wafers and causing explosions or other hazards. The alarm prompt issued by the alarm module 120 also reminds the staff to adjust the flow rate of the insulating liquid in the insulating liquid pipeline 210 in time to prevent a large number of unqualified wafers 300 from being produced during the subsequent wafer 300 manufacturing process due to the unstable actual flow rate of the insulating liquid.

[0040] This example provides an insulating liquid flow monitoring device, which includes a flow monitoring module and an alarm module. The flow monitoring module is electrically connected to the alarm module. The flow monitoring module monitors the actual flow rate of the insulating liquid in the insulating liquid pipeline of the wafer testing equipment, and controls the alarm module to issue an alarm when the actual flow rate is less than a first set threshold. The insulating liquid flow monitoring device provided in this embodiment can issue alarms when the actual flow rate of the insulating liquid is uneven or unstable, reminding personnel to promptly check for wafers with potentially substandard insulation and to adjust the actual flow rate of the insulating liquid in the pipeline. This avoids economic losses and personnel injuries caused by personnel directly igniting substandard wafers, and also prevents subsequent economic losses due to a large number of substandard wafers caused by unstable insulating liquid flow during wafer fabrication. In summary, the insulating liquid flow monitoring device provided in this embodiment can reduce economic losses for enterprises and indirectly increase enterprise profits.

[0041] Optional, the insulating liquid includes fluorinated oil.

[0042] Specifically, fluorinated oil, also known as electronic fluorinated liquid, has the chemical formula C9H5F. 15O Fluorinated oil is a colorless, transparent, low-viscosity, non-flammable, and highly safe liquid. Furthermore, it possesses low surface tension, good material compatibility, moderate solubility, excellent electrical insulation properties, excellent thermal conductivity, thermal stability, and chemical stability, good chemical inertness, and does not corrode electronic components upon contact. Applying fluorinated oil in wafer fabrication provides effective high-voltage protection, significantly reducing the probability of arcing and discharge under high voltage during wafer testing and improving wafer yield. The insulating liquid flow monitoring device provided in this embodiment can monitor the actual flow rate of fluorinated oil during wafer fabrication when it is coated. An alarm is triggered when the actual flow rate falls below a first set threshold, prompting personnel to promptly inspect wafers with substandard insulation and adjust the actual flow rate of fluorinated oil in the insulating liquid pipeline.

[0043] Optionally, the first set threshold is determined based on the number of air bubbles in the insulating liquid pipe.

[0044] Specifically, when air bubbles are present in the insulating liquid pipeline, the actual flow rate of the insulating liquid will fluctuate. The more air bubbles there are, the more unstable the actual flow rate of the insulating liquid becomes, resulting in significant fluctuations in the actual flow rate. This causes the insulating liquid sprayed from the nozzle to splash everywhere, easily leading to wafer insulation defects. This embodiment determines a first set threshold based on the number of air bubbles in the insulating liquid pipeline. This allows the first set threshold to better measure the stability of the actual flow rate of the insulating liquid, improving the accuracy of monitoring the stability of the actual flow rate of the insulating liquid and reducing the number of false alarms.

[0045] Optionally, the traffic monitoring module is also used to issue a first prompt when the actual traffic is less than a first set threshold, issue a second prompt when the actual traffic is less than a second set threshold but greater than or equal to the first set threshold, and issue a third prompt when the actual traffic is greater than or equal to the second set threshold, wherein the second set threshold is greater than the first set threshold.

[0046] Specifically, the first, second, and third alerts are distinct. The flow monitoring module issues a first alert indicating that the actual flow rate of the insulating liquid in the pipeline is unstable, resulting in a high defect rate for the produced wafers. The first alert and alarm alerts can be issued simultaneously. The flow monitoring module issues a third alert indicating that the actual flow rate of the insulating liquid in the pipeline is stable and the flow velocity is uniform, resulting in a high yield rate for the produced wafers. The flow monitoring module issues a second alert indicating that the actual flow rate of the insulating liquid in the pipeline fluctuates, but this has minimal impact on wafer production. This second alert reminds workers to monitor the actual flow rate of the insulating liquid in the pipeline so that they can adjust the flow rate promptly when it falls below a first set threshold, thereby reducing the number of defective wafers. The second set threshold can be determined based on the number of air bubbles in the insulating liquid pipeline.

[0047] Optional, Figure 3 This is a schematic diagram of the structure of another insulating liquid flow monitoring device according to an embodiment of the present invention, with reference to... Figure 3 The flow monitoring module 110 includes a flow monitoring unit 111, a first light-emitting unit 112, a second light-emitting unit 113, and a third light-emitting unit 114. The flow monitoring unit 111 is electrically connected to the first light-emitting unit 112, the second light-emitting unit 113, the third light-emitting unit 114, and the alarm module 120. The flow monitoring unit 111 is used to control the first light-emitting unit 112 to issue a first prompt and the alarm module 120 to issue an alarm prompt when the actual flow is less than a first set threshold. When the actual flow is less than a second set threshold but greater than or equal to the first set threshold, the flow monitoring unit 111 controls the second light-emitting unit 113 to issue a second prompt. When the actual flow is greater than or equal to the second set threshold, the flow monitoring unit 111 controls the third light-emitting unit 114 to issue a third prompt.

[0048] Specifically, the first light-emitting unit 112 can be a red light-emitting unit, and the first prompt is red light. The second light-emitting unit 113 can be a yellow light-emitting unit, and the second prompt is yellow light. The third light-emitting unit 114 can be a green light-emitting unit, and the second prompt is green light.

[0049] Optionally, the alarm module includes a sound unit and a light unit; the sound unit and the light unit are connected in series.

[0050] Specifically, when the actual flow rate is less than a first set threshold, the alarm module will issue both visual and audible alerts. By incorporating both a sound unit and a light unit within the alarm module, and connecting the sound and light units in series, the system allows staff to receive alarm information more quickly and promptly check the actual flow rate of the unstable insulating liquid. This further reduces the number of defective wafers, minimizes company losses, and indirectly increases company profits.

[0051] Optional, Figure 4 This is a schematic diagram of the structure of another insulating liquid flow monitoring device according to an embodiment of the present invention, with reference to... Figure 4 The insulating liquid flow monitoring device provided in this embodiment also includes a power module 130; the power module 130 is electrically connected to the flow monitoring module 110 and the alarm module 120, and the power module 130 is used to supply power to the flow monitoring module 110 and the alarm module 120.

[0052] Specifically, the power supply module 130 outputs DC power. The output voltage of the power supply module 130 matches the voltage that the flow monitoring module 110 and the alarm module 120 can receive. For example, the rated voltage of the power supply module 130 is 24V, and the rated current can be 1.5A. The flow monitoring module 110 can be a 24V relay-type flow sensor. In this embodiment, the power supply module 130 is provided in the insulating liquid flow monitoring device, which can ensure that the insulating liquid flow monitoring device continues to work in the event of a mains power failure, enabling the insulating liquid flow monitoring device to work normally in various scenarios.

[0053] Optional, Figure 5 This is a schematic diagram of the structure of another insulating liquid flow monitoring device according to an embodiment of the present invention, with reference to... Figure 5 The flow monitoring module 110 includes a monitoring sensor 117 and a relay 116; the common terminal COM of the relay 116 is electrically connected to the first terminal of the alarm module 120, and the normally closed terminal NC of the relay 116 is electrically connected to the positive terminal of the power supply module 130; the second terminal of the alarm module 120 is electrically connected to the negative terminal of the power supply module 130; the monitoring sensor 117 is used to control the common terminal COM of the relay 116 to connect to the normally closed terminal NC of the relay 116 when the actual flow rate is less than a first set threshold.

[0054] Specifically, the monitoring sensor 117 can be a resistive detector. When the common terminal COM of relay 116 is connected to the normally closed terminal NC of relay 116, the alarm module 120 will be powered on and issue an alarm. The monitoring sensor 117 is used to control the connection between the common terminal COM of relay 116 and the normally open terminal NO of relay 116 when the actual flow rate is not less than a first set threshold, thereby preventing the alarm module 120 from issuing an alarm. Relay 116 features a simple structure, long service life, and low power consumption. By incorporating relay 116 into the flow monitoring module 110 and controlling the alarm module 120 to issue an alarm, the service life and reliability of the insulating liquid flow monitoring device can be improved. The monitoring sensor 117 and relay 116 can be housed within the flow monitoring unit.

[0055] Figure 6 This is a schematic diagram of a wafer testing device according to an embodiment of the present invention, with reference to... Figure 6 The wafer testing apparatus provided in this embodiment includes an insulating liquid pipeline 210, a nozzle 220, an insulating liquid storage module 230, a test platform module 240, and an insulating liquid flow monitoring device 100 provided in any embodiment of the present invention. The insulating liquid pipeline 210 is used to transport the insulating liquid, and the nozzle 220 is used to spray the insulating liquid onto the surface of the wafer 300; the insulating liquid storage module 230 is connected to the insulating liquid pipeline 210 and is used to store the insulating liquid; the test platform module 240 is used to support the wafer 300.

[0056] Specifically, the insulating liquid conduit 210 can be a flexible hose. The insulating liquid storage module 230 includes a storage container 231 and a storage cap 232. The test bench module 240 can also be used to move the wafer 300 relative to the nozzle 220. The probe 115 of the flow monitoring module 110 in the insulating liquid flow monitoring device 100 is disposed within the insulating liquid conduit 210.

[0057] This embodiment provides a wafer testing device that can issue an alarm when the flow rate or velocity of the insulating liquid in the insulating liquid pipeline is uneven or unstable. This alerts staff to check for wafers that may have insulation defects and to adjust the actual flow rate of the insulating liquid in the pipeline. This prevents economic losses and personnel injuries caused by staff directly igniting wafers with poor insulation, and also avoids economic losses to the company caused by unstable insulating liquid flow during subsequent wafer manufacturing processes, which could result in a large number of defective wafers.

[0058] Optional, continue to refer to Figure 6The wafer testing device provided in this embodiment also includes a flow regulating valve 250; the flow regulating valve 250 is located in the insulating liquid pipeline 210, and the flow regulating valve 250 is used to regulate the actual flow rate of the insulating liquid in the insulating liquid pipeline 210.

[0059] Specifically, in this embodiment, a flow regulating valve 250 is set in the wafer testing device, which can adjust the actual flow rate of the insulating liquid according to actual needs, thereby improving the wafer fabrication qualification rate.

[0060] This embodiment also provides a method for manufacturing an insulating liquid flow monitoring device, which includes the following steps:

[0061] S110. Determine the relevant circuit diagram for setting up an insulating liquid flow monitoring device.

[0062] Specifically, before determining the circuit diagram, one should be familiar with the characteristics of fluorinated oil and select appropriate electronic components, such as a DC24V relay-type flow sensor, an audible and visual alarm, and a DC 24V two-wire power supply.

[0063] S120. Install electronic components according to the circuit diagram.

[0064] S130. Adjust the flowability of the fluorinated oil in the insulating pipe and determine the first set threshold based on the flowability of the fluorinated oil.

[0065] S140, Perform standby test.

[0066] Specifically, a successful standby test indicates that the insulating liquid flow monitoring device has been manufactured and can be applied to wafer testing equipment.

[0067] It should be understood that the various forms of processes shown above can be used, with steps reordered, added, or deleted. For example, the steps described in this invention can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution of this invention can be achieved, and this is not limited herein.

[0068] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A wafer testing device, characterized in that, This includes insulating liquid pipelines, nozzles, insulating liquid storage modules, test bench modules, and insulating liquid flow monitoring devices; The insulating liquid pipeline is used to transport the insulating liquid; The nozzle is used to spray the insulating liquid onto the wafer surface; The insulating liquid storage module is connected to the insulating liquid pipeline, and the insulating liquid storage module is used to store the insulating liquid; The test bench module is used to support the wafer; The insulating liquid flow monitoring device includes: a flow monitoring module and an alarm module; The flow monitoring module is electrically connected to the alarm module. The flow monitoring module is used to monitor the actual flow rate of the insulating liquid in the insulating liquid pipeline in the wafer testing device, and to control the alarm module to issue an alarm prompt when the actual flow rate is less than a first set threshold. The first set threshold is determined based on the number of air bubbles in the insulating liquid pipe.

2. The wafer testing apparatus according to claim 1, characterized in that, The insulating liquid includes fluorinated oil.

3. The wafer testing apparatus according to claim 1, characterized in that, The traffic monitoring module is further configured to issue a first prompt when the actual traffic is less than the first set threshold, issue a second prompt when the actual traffic is less than the second set threshold but greater than or equal to the first set threshold, and issue a third prompt when the actual traffic is greater than or equal to the second set threshold, wherein the second set threshold is greater than the first set threshold.

4. The wafer testing apparatus according to claim 3, characterized in that, The flow monitoring module includes a flow monitoring unit, a first light-emitting unit, a second light-emitting unit, and a third light-emitting unit; The flow monitoring unit is electrically connected to the first light-emitting unit, the second light-emitting unit, the third light-emitting unit, and the alarm module. The flow monitoring unit is used to control the first light-emitting unit to issue the first prompt and the alarm module to issue an alarm prompt when the actual flow is less than the first set threshold; to control the second light-emitting unit to issue the second prompt when the actual flow is less than the second set threshold but greater than or equal to the first set threshold; and to control the third light-emitting unit to issue the third prompt when the actual flow is greater than or equal to the second set threshold.

5. The wafer testing apparatus according to claim 1, characterized in that, The alarm module includes a sound unit and a light unit; The sound unit and the light unit are connected in series.

6. The wafer testing apparatus according to claim 1, characterized in that, It also includes a power module; The power module is electrically connected to the flow monitoring module and the alarm module, and the power module is used to supply power to the flow monitoring module and the alarm module.

7. The wafer testing apparatus according to claim 6, characterized in that, The flow monitoring module includes monitoring sensors and relays; The common terminal of the relay is electrically connected to the first terminal of the alarm module, and the normally closed terminal of the relay is electrically connected to the positive terminal of the power supply module. The second terminal of the alarm module is electrically connected to the negative terminal of the power supply module; The monitoring sensor is used to control the common terminal of the relay to connect with the normally closed terminal of the relay when the actual flow rate is less than the first set threshold.

8. The wafer testing apparatus according to claim 1, characterized in that, It also includes flow control valves; The flow regulating valve is located in the insulating liquid pipeline, and the flow regulating valve is used to regulate the actual flow rate of the insulating liquid in the insulating liquid pipeline.

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