Method for calculating the resistance value of adjustable metal film cap resistor

Abstract

This invention discloses a method for calculating the resistance value of an adjustable metal film cap resistor, comprising: pre-determining the size parameters of the adjustable metal film cap resistor; dividing the adjustable metal film cap resistor into four regions and calculating the resistance of the first region, the second region, and the third region respectively; calculating the resistance of the fourth region according to a pre-determined resistance correction parameter; and calculating the total resistance of the adjustable metal film cap resistor based on the resistances of the four regions. In this invention, the calculation of the partial resistance of the adjustable metal film cap resistor in a high-precision amplifier adopts a split-parallel approach, and a correction factor is added. The method, which combines segmentation and fabrication fitting, yields a calculation method for the adjustable metal film cap resistor. The calculated resistance error is within 5%, significantly improving the accuracy of the calculated resistance. This method can be used for the design of adjustable metal film cap resistors in high-precision amplifiers.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor technology, and in particular relates to a method for calculating the resistance value of an adjustable metal thin-film cap resistor. Background Technology

[0002] Adjustable metal film cap resistors are an indispensable part of analog integrated circuits for high-precision amplifiers. Conventional resistors (not used for in-line high-precision adjustment) are generally designed with a uniform width, and their accuracy is relatively high when calculated based on a normal aspect ratio. However, due to the high-precision requirements of applications such as high-precision operational amplifiers and instrumentation amplifiers in analog circuits, adjustable metal film cap resistors need to be designed for in-line laser adjustment to improve the accuracy of circuit parameters.

[0003] The calculated resistance of adjustable metal film cap resistors often differs significantly from the actual resistance, frequently exceeding 100%. This inaccurate calculations often result in the calculated resistance exceeding the adjustable range before any adjustments are made, leading to product defects. Therefore, it is necessary to improve the calculation accuracy of adjustable metal film cap resistors in high-precision amplifiers. Summary of the Invention

[0004] In view of the shortcomings of the prior art, the technical problem to be solved by the present invention is to provide a method for calculating the resistance value of an adjustable metal thin film cap resistor.

[0005] To solve the above-mentioned technical problems, the present invention provides the following technical solution:

[0006] A method for calculating the resistance value of an adjustable metal film cap-shaped resistor, wherein the adjustable metal film cap-shaped resistor includes a cap structure and a first cap brim structure and a second cap brim structure respectively disposed on both sides of the cap structure, wherein the width of the first cap brim structure and the width of the second cap brim structure are equal, and includes the following steps:

[0007] S100. Predetermine the dimensional parameters of the adjustable metal film cap-shaped resistor, wherein the dimensional parameters include the length of the first brim structure, the length of the second brim structure, the width of the first brim structure and the second brim structure, the length of the cap structure, and the width difference between the cap structure and the first brim structure.

[0008] S200. The adjustable metal film cap-shaped resistor is divided into four regions, wherein the region where the first cap brim structure is located is the first region, the region where the second cap brim structure is located is the second region, the region where the lower part of the cap structure is flush with the first cap brim structure and the second cap brim structure is the third region, and the remaining region of the cap structure is the fourth region.

[0009] S300. Calculate the resistance R1 of the first region based on the width and length of the first region of the adjustable metal film cap resistor; calculate the resistance R2 of the second region based on the width and length of the second region of the adjustable metal film cap resistor; calculate the resistance R3 of the third region based on the width and length of the third region of the adjustable metal film cap resistor.

[0010] S400. Calculate the resistance R4 of the fourth region of the adjustable metal film cap resistor based on the predetermined resistance correction parameters.

[0011] S500. Calculate the total resistance R of the adjustable metal film cap resistor based on the resistances of the first, second, third, and fourth regions of the adjustable metal film cap resistor.

[0012] Furthermore, using the width W1 of the first and second brim structures as the side length of the sheet resistor of the adjustable metal film hat-shaped resistor, the resistance value R of the adjustable metal film sheet resistor is determined. S ; Calculate the resistance of each part of the adjustable metal film cap resistor based on the number of sheet resistors.

[0013] Furthermore, the method for calculating the resistance of the first region includes the following sub-steps:

[0014] S311. Calculate the number of blocks S1 in the first region using the following formula.

[0015]

[0016] Where L1 represents the length of the first brim structure;

[0017] S312. Calculate the resistance R1 of the first region. The calculation formula is as follows:

[0018] R1=S1×R S

[0019] The method for calculating the resistance of the second region includes the following sub-steps:

[0020] S321. Calculate the number of blocks S2 in the first region using the following formula.

[0021]

[0022] Where L2 represents the length of the second brim structure;

[0023] S322. Calculate the resistance R2 of the second region. The calculation formula is as follows:

[0024] R² = S² × R S

[0025] The method for calculating the resistance of the third region includes the following sub-steps:

[0026] S331. Calculate the number of blocks S3 in the third region. The calculation formula is as follows:

[0027]

[0028] Where L3 represents the length of the cap structure;

[0029] S332. Calculate the resistance R3 of the third region. The calculation formula is as follows:

[0030] R3 = S3 × R S .

[0031] Furthermore, the predetermined resistance correction parameters include the equivalent width of the fourth region, the first correction factor, and the second correction factor. Step S400 includes the following sub-steps:

[0032] S410. Calculate the equivalent resistance R of the fourth region based on the equivalent width of the fourth region. 41 The calculation formula is as follows:

[0033]

[0034] Where L3 represents the length of the cap structure;

[0035] S420. Calculate the first correction resistance R of the fourth region based on the first correction factor Q1. 42 The calculation formula is as follows:

[0036] R 42 =R S ×Q1×L3

[0037] S430. Calculate the second correction resistance R of the fourth region based on the second correction factor Q2. 43 The calculation formula is as follows:

[0038] R 43 =R s ×(-Q2×L3 2 -4Q2×L3+0.224)

[0039] S440. Calculate the resistance R4 of the fourth region using the following formula.

[0040] R4 = R 41 +R 42 +R 43

[0041] Furthermore, the calculation formulas for the equivalent width of the fourth region, the value range of the first correction factor, the calculation formula for the first correction resistance, the value range of the second correction factor, and the calculation formula for the second correction resistance are all obtained by fitting experimental data.

[0042] Furthermore, in step S100, the predetermined width difference W2 between the cap structure and the first brim structure should be greater than or equal to the equivalent width W of the fourth region. d .

[0043] Furthermore, the formula for calculating the equivalent width of the fourth region obtained by fitting is as follows:

[0044]

[0045] Furthermore, the first correction factor Q1 obtained from the fitting has a value range of 0.03 to 0.04.

[0046] Furthermore, the value range of the second correction factor Q2 obtained from the fitting is 0.00008 to 0.00012.

[0047] Furthermore, in step S500, the formula for calculating the total resistance R of the adjustable metal film cap resistor is as follows:

[0048]

[0049] In this invention, the adjustable metal film cap resistor is divided into multiple regions that can be equivalent to series and parallel resistors. Extensive experiments are conducted to summarize the calculation formulas for the equivalent width of the fourth region of the adjustable metal film cap resistor in a high-precision amplifier, the value range of the first correction factor, the calculation formula for the first correction resistor, the value range of the second correction factor, and the calculation formula for the second correction resistor. An approximate calculation formula for the equivalent resistance of the adjustable metal film cap resistor in a high-precision amplifier is then derived. Finally, the resistance value of the entire adjustable metal film cap resistor in the high-precision amplifier is calculated. The calculated resistance error is within 5%, and the accuracy of the calculated resistance is significantly improved. This invention can be used for the design of adjustable metal film cap resistors in high-precision amplifiers. Attached Figure Description

[0050] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0051] Figure 1 This is a schematic diagram of an adjustable metal thin-film cap resistor.

[0052] Figure 2This is a flowchart of an embodiment of the method for calculating the resistance value of the adjustable metal thin film cap resistor of the present invention.

[0053] Figure 3 This is a schematic diagram of the partitions of an adjustable metal film cap resistor.

[0054] Adjustable metal film cap-shaped resistor - 100; First cap brim structure - 101; Second cap brim structure - 102; Cap structure - 103; First solder joint - 104; Second solder joint - 105; First region - 111; Second region - 112; Third region - 113; Fourth region - 114; Solder pad - 200. Detailed Implementation

[0055] The following specific examples illustrate the implementation of the present invention. The illustrations provided in the following embodiments are only schematic representations of the basic concept of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0056] Please see Figure 1 The adjustable metal film cap resistor is generally made of CrSi material and includes a cap structure 103 with a wider central portion and a first brim structure 101 and a second brim structure 102 respectively disposed on both sides of the cap structure 103. The width of the first brim structure 101 and the width of the second brim structure 102 are equal, and the lengths of the first brim structure 101 and the second brim structure 102 may be equal or unequal. To facilitate soldering of the adjustable metal film cap resistor 100 to the pad 200, the first brim structure 101 extends outward to form a first soldering portion 104, and the second brim structure 102 extends outward to form a second soldering portion 105. When connecting the adjustable metal film cap resistor 100, the first soldering portion 104 and the second soldering portion 105 are soldered and fixed onto the pad 200 respectively.

[0057] Please see Figure 2 , Figure 2 This is a flowchart illustrating an embodiment of the method for calculating the resistance value of the adjustable metal film cap resistor according to the present invention. The method for calculating the resistance value of the adjustable metal film cap resistor in this embodiment includes the following steps:

[0058] S100. The dimensional parameters of the adjustable metal film cap-shaped resistor are predetermined. These parameters include the length L1 of the first brim structure 101, the length L2 of the second brim structure 102, the width W1 of the first and second brim structures 101 and 102, the length L3 of the cap structure 103, and the width difference W2 between the cap structure 103 and the first brim structure 101. These dimensional parameters of the adjustable metal film cap-shaped resistor 100 are determined in advance during the design process and serve as the basis for calculating its resistance value. The width W1 of the first and second brim structures 101 and 102 generally satisfies W1 ≥ 10 μm, and the length L3 of the cap structure 103 generally satisfies 160 μm ≥ L3 ≥ 40 μm.

[0059] S200. The adjustable metal film cap resistor 100 is divided into four regions. The region containing the first brim structure 101 is designated as the first region 111, the region containing the second brim structure 102 is designated as the second region 112, the lower part of the cap structure 103, flush with the first and second brim structures 101 (i.e., the region with a lower width of W1), is designated as the third region 113, and the remaining area of ​​the cap structure 103 is designated as the fourth region 114. Since the first welded part 104 and the second welded part 105 are both welded and fixed to the pad 200 after the adjustable metal film cap resistor 100 is connected, they generate almost no resistance. Therefore, the first welded part 104 and the second welded part 105 are not considered when dividing the regions. By dividing the adjustable metal film cap resistor 100 into the above four regions, a new model for calculating the resistance value of the adjustable metal film cap resistor 100 is constructed.

[0060] S300: Calculate the resistance R1 of the first region 111 of the adjustable metal film cap-shaped resistor 100 based on the width and length of the first region 111; calculate the resistance R2 of the second region 112 based on the width and length of the second region 112 of the adjustable metal film cap-shaped resistor 100; calculate the resistance R3 of the third region 113 based on the width and length of the third region 113 of the adjustable metal film cap-shaped resistor 100. For ease of calculation, this embodiment calculates the resistance of each region by counting the square resistors. In this embodiment, the width W1 of the first brim structure 101 and the second brim structure 102 is used as the side length of the square resistor of the adjustable metal film cap-shaped resistor 100, thereby determining the resistance value R of the square resistor of the adjustable metal film. S Then, based on the number of sheet resistors, the resistance of each part of the adjustable metal film cap resistor 100 can be calculated.

[0061] Specifically, the method for calculating the resistance of the first region 111 includes the following sub-steps:

[0062] S311. Calculate the number of blocks S1 in the first region 111 using the following formula:

[0063]

[0064] S312. Calculate the resistance R1 of the first region 111 using the following formula:

[0065]

[0066] The method for calculating the resistance of the second region 112 includes the following sub-steps:

[0067] S321. Calculate the number of blocks S2 in the first region 111 using the following formula:

[0068]

[0069] S322. Calculate the resistance R2 of the second region 112 using the following formula:

[0070]

[0071] The method for calculating the resistance of the third region 113 includes the following sub-steps:

[0072] S331. Calculate the number of blocks S3 in the third region 113 using the following formula:

[0073]

[0074] S332. Calculate the resistance R3 of the third region 113 using the following formula:

[0075]

[0076] S400, Calculate the resistance R4 of the fourth region 114 of the adjustable metal film cap resistor 100 according to predetermined resistance correction parameters. The predetermined resistance correction parameters include the equivalent width W of the fourth region 114. d The first correction factor Q1 and the second correction factor Q2, and the equivalent width W of the fourth region 114 d The calculation formulas, the value range of the first correction factor Q1, and the value range of the second correction factor Q2 were all obtained through fitting experimental data. In this embodiment, experimental data are obtained through tape-out, which refers to the production of a small number of physical devices after the device design is completed for testing. Simply put, tape-out is the process of converting digital design into actual device.

[0077] The equivalent width W of region 114 in the fourth regiond This refers to the actual effective width of the fourth region 114. Experimental data shows that once the width of the fourth region 114 exceeds a certain value, its influence on the resistance becomes negligible. Therefore, in this embodiment, the aforementioned width value is used as the equivalent width of the fourth region 114. Through experiments using multiple adjustable metal film cap resistors 100 of different sizes, the equivalent width W of the fourth region 114 is finally obtained by fitting the data. d The calculation formula is as follows:

[0078]

[0079] Of course, since the width of the fourth region 114 exceeds the equivalent width W d The resistance value is almost unaffected only after this. Therefore, in step S100, the width difference W2 between the pre-determined cap structure 103 and the first brim structure 101 should not be less than the equivalent width W of the fourth region 114. d .

[0080] This step may include the following sub-steps:

[0081] S410. Calculate the equivalent resistance R of the fourth region 114 based on the equivalent width of the fourth region 114. 41 The equivalent resistance refers to the actual resistance value that is effective. However, due to the special location of the fourth region 114, there is no accurate method to calculate its resistance value. Therefore, the equivalent resistance R of the fourth region 114 is... 41 This is an approximation calculated based on experimental data and needs further correction. The calculation formula is as follows:

[0082]

[0083] S420. Calculate the first correction resistance R of the fourth region 114 based on the first correction factor Q1. 42 The first correction factor Q1 obtained from the fitting has a value range of 0.03 to 0.04. The first correction resistor R... 42 The calculation formula was also obtained by fitting experimental data, and the specific calculation formula is as follows:

[0084] R 42 =R S ×Q1×L3

[0085] S430. Calculate the second correction resistance R of the fourth region 114 based on the second correction factor Q2. 43 The second correction factor Q2 obtained from the fitting process ranges from 0.00008 to 0.00012. The second correction resistor R... 43 The calculation formula was also obtained by fitting experimental data, and the specific calculation formula is as follows:

[0086] R 43 =R s ×(-Q2×L3 2 -4Q2×L3+0.224)

[0087] S440. Calculate the resistance R4 of the fourth region 114 using the following formula:

[0088]

[0089] S500, Calculate the total resistance R of the adjustable metal film cap resistor 100 based on the resistances of the first region 111, the second region 112, the third region 113, and the fourth region 114. This step may include the following sub-steps:

[0090] S510. Calculate the resistance R5 of the cap structure 103 (i.e., the third region 113 and the fourth region 114). Structurally, the third region 113 and the fourth region 114 are connected in parallel to the circuit. Therefore, the parallel resistance of the third region 113 and the fourth region 114 is used as the resistance R5 of the cap structure 103. The formula for calculating the resistance R5 of the cap structure 103 is as follows:

[0091]

[0092] S520. Calculate the total resistance R of the adjustable metal film cap resistor 100. Structurally, the first region 111, the cap structure 103, and the second region 112 are connected in series in the circuit. Therefore, using the series resistance of the first region 111, the cap structure 103, and the second region 112 as the resistance R5 of the cap structure 103, the formula for calculating the total resistance R of the adjustable metal film cap resistor 100 is as follows:

[0093]

[0094] The calculation method of this embodiment is illustrated below with several specific examples:

[0095] Example 1

[0096] Design an adjustable metal film cap resistor 100 for a high-precision metal film amplifier. Its dimensions are: L1 = L2 = 30 μm, W1 = 10 μm, L3 = 40 μm, W2 = 30 μm. The sheet resistance of the adjustable metal film cap resistor 100 is 1 KΩ / sheet. Q1 is 0.035 and Q2 is 0.0001.

[0097] The calculation process for the adjustable metal film cap resistor 100Ω in this high-precision amplifier is as follows:

[0098]

[0099] R1 = R S ×S1=3R S

[0100]

[0101] R² = S² × R S =3R S

[0102]

[0103] R3 = S3 × R S =4R S

[0104]

[0105] R 42 =R S ×Q1×L3=1.4R S

[0106] R 43 =R s ×(-Q2×L3 2 -4Q²×L³+0.224)=0.048R S

[0107] R4 = R 41 +R 42 +R 43 =5.448R S

[0108]

[0109] R = R1 + R2 + R5 = 8.3065R S

[0110] R S Substituting 1K / block into the above formula, we get:

[0111] R = 8.3065 kΩ

[0112] Example 2

[0113] Design an adjustable metal film cap resistor 100 for a high-precision metal film amplifier. Its dimensions are: L1 = L2 = 0 μm, W1 = 10 μm, L3 = 120 μm, W2 = 110 μm. The sheet resistance of the adjustable metal film cap resistor 100 is 1 KΩ / sheet. Q1 is 0.035 and Q2 is 0.0001.

[0114] The calculation process for the adjustable metal film cap resistor 100Ω in this high-precision amplifier is as follows:

[0115]

[0116] R1 = R S ×S1=0

[0117]

[0118] R² = S² × R S =0

[0119]

[0120] R3 = S3 × R S =12R S

[0121]

[0122] R 42 =R S ×Q1×L3=4.2R S

[0123] R 43 =R s ×(-Q2×L3 2 -4Q²×L³+0.224)=-1.264R S

[0124] R4 = R 41 +R 42 +R 43 =5.336R S

[0125]

[0126] R = R1 + R2 + R5 = 3.69R S

[0127] R S Substituting 1K / block into the above formula, we get:

[0128] R = 3.69 kΩ

[0129] Please refer to Table 1 for experimental data of adjustable metal thin film cap resistors 100 with multiple different size parameters when L1=L2=0μm.

[0130] Table 1

[0131]

[0132] In Table 1, S 41Represents the equivalent resistance R of region 114 in the fourth region. 41 The quantity when converted to sheet resistance, S 42 Indicates the first correction resistor R 42 The quantity when converted to sheet resistance, S 43 Indicates the second correction resistor R 43 The quantity converted to sheet resistance, S4 represents the quantity of resistor R4 in the fourth region 114 converted to sheet resistance, thus representing the resistance value by the quantity of sheet resistance. As can be seen from Table 1, the error between the resistance calculated using the method of this embodiment and the actual resistance value is within 5%, and in most cases the error is within 2%, indicating that the error between the calculated resistance value and the actual resistance value is very small.

[0133] In this embodiment, the adjustable metal film cap resistor 100 is divided into multiple regions that can be equivalent to series and parallel resistors. Extensive experiments were conducted to summarize the calculation formulas for the equivalent width of the fourth region 114 of the adjustable metal film cap resistor 100 in the high-precision amplifier, the value range of the first correction factor, the calculation formula for the first correction resistor, the value range of the second correction factor, and the calculation formula for the second correction resistor. An approximate calculation formula for the equivalent resistance of the adjustable metal film cap resistor 100 in the high-precision amplifier was then derived. The resistance value of the entire adjustable metal film cap resistor 100 in the high-precision amplifier was then calculated. The calculated resistance error is within 5%, and the accuracy of the calculated resistance is significantly improved. This method can be used in the design of the adjustable metal film cap resistor 100 in the high-precision amplifier.

[0134] The above embodiments merely illustrate preferred implementations of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention should be determined by the appended claims.

Claims

1. A method for calculating the resistance value of an adjustable metal film cap-shaped resistor, wherein the adjustable metal film cap-shaped resistor includes a cap structure and a first cap brim structure and a second cap brim structure respectively disposed on both sides of the cap structure, wherein the width of the first cap brim structure and the width of the second cap brim structure are equal, characterized in that, Includes the following steps: S100. Predetermine the dimensional parameters of the adjustable metal film cap-shaped resistor, wherein the dimensional parameters include the length of the first brim structure, the length of the second brim structure, the width of the first brim structure and the second brim structure, the length of the cap structure, and the width difference between the cap structure and the first brim structure. S200. The adjustable metal film cap-shaped resistor is divided into four regions, wherein the region where the first cap brim structure is located is the first region, the region where the second cap brim structure is located is the second region, the region where the lower part of the cap structure is flush with the first cap brim structure and the second cap brim structure is the third region, and the remaining region of the cap structure is the fourth region. S300. Calculate the resistance of the first region based on the width and length of the first region of the adjustable metal film cap resistor. R 1; Calculate the resistance of the second region based on the width and length of the second region of the adjustable metal film cap resistor. R 2; Calculate the resistance of the third region based on the width and length of the third region of the adjustable metal film cap resistor. R 3; S400. Calculate the resistance of the fourth region of the adjustable metal film cap resistor based on the predetermined resistance correction parameters. R 4; S500, Calculate the total resistance of the adjustable metal film cap resistor based on the resistances of the first, second, third, and fourth regions. R .

2. The method for calculating the resistance value of the adjustable metal film cap resistor as described in claim 1, characterized in that: The width of the first brim structure and the second brim structure W 1. Determine the resistance value of the adjustable metal film sheet resistor by using the side length of the sheet resistor as the adjustable metal film cap resistor. R S ; Calculate the resistance of each part of the adjustable metal film cap resistor based on the number of sheet resistors.

3. The method for calculating the resistance value of the adjustable metal film cap resistor as described in claim 2, characterized in that, The method for calculating the resistance of the first region includes the following sub-steps: S311, Calculate the number of blocks in the first region. S 1. The calculation formula is as follows: in, L 1 indicates the length of the first brim structure; S312, Calculate the resistance of the first region. R 1. The calculation formula is as follows: The method for calculating the resistance of the second region includes the following sub-steps: S321. Calculate the number of blocks in the first region. S 2. The calculation formula is as follows: in, L 2 indicates the length of the second brim structure; S322, Calculate the resistance of the second region. R 2. The calculation formula is as follows: The method for calculating the resistance of the third region includes the following sub-steps: S331, Calculate the number of blocks in the third region. S 3. The calculation formula is as follows: in, L 3 indicates the length of the cap structure; S332, Calculate the resistance of the third region. R 3. The calculation formula is as follows:

4. The method for calculating the resistance value of the adjustable metal film cap resistor as described in claim 2, characterized in that, The predetermined resistance correction parameters include the equivalent width of the fourth region, the first correction factor, and the second correction factor. Step S400 includes the following sub-steps: S410, Based on the equivalent width of the fourth region W d Calculate the equivalent resistance of the fourth region. R 41 The calculation formula is as follows: in, L 3 indicates the length of the cap structure; S420. Calculate the first correction resistance of the fourth region based on the first correction factor Q1. R 42 The calculation formula is as follows: S430. Calculate the second correction resistance of the fourth region based on the second correction factor Q2. R 43 The calculation formula is as follows: S440, Calculate the resistance of the fourth region. R 4. The calculation formula is as follows: 。 5. The method for calculating the resistance value of the adjustable metal film cap resistor as described in claim 4, characterized in that, The calculation formulas for the equivalent width of the fourth region, the value range of the first correction factor, the calculation formula for the first correction resistance, the value range of the second correction factor, and the calculation formula for the second correction resistance were all obtained by fitting experimental data.

6. The method for calculating the resistance value of the adjustable metal thin-film cap resistor as described in claim 5, characterized in that, In step S100, the predetermined width difference between the cap structure and the first brim structure W 2 should be greater than or equal to the equivalent width of the fourth region. W d .

7. The method for calculating the resistance value of the adjustable metal film cap resistor as described in claim 5, characterized in that, The formula for calculating the equivalent width of the fourth region obtained by fitting is as follows:

8. The method for calculating the resistance value of the adjustable metal thin-film cap resistor as described in claim 5, characterized in that, The first correction factor Q1 obtained from the fitting has a value range of 0.03 to 0.

04.

9. The method for calculating the resistance value of the adjustable metal thin-film cap resistor as described in claim 5, characterized in that, The value range of the second correction factor Q2 obtained by fitting is 0.00008 to 0.00012.

10. The method for calculating the resistance value of an adjustable metal film cap resistor as described in any one of claims 1 to 9, characterized in that, In step S500, the total resistance of the adjustable metal film cap resistor is... R The calculation formula is as follows:

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