Conveying device

Abstract

The invention provides a conveying device. A transport device for transporting a container having an opening is provided with a holding device for holding the container, and a restricting device for restricting a contained object from flying out of the opening of the container held by the holding device. The restricting device is provided with a closing member that changes in posture between a closed posture that overlaps the opening and an open posture that does not overlap the opening. The closing member is configured so as to change in posture in conjunction with a change in posture of a holding body provided in the holding device.

Description

Technical Field

[0001] The present invention relates to a delivery device. Background Art

[0002] For example, in semiconductor manufacturing plants, a conveying device for conveying containers is used, and the container contains objects such as wafers and reticles. There are various types of containers, but there are cases where a container having an opening on the side for taking out and putting in the objects is used. An example of a conveying device for conveying such a container having an opening on the side for taking out and putting in is disclosed in Japanese Patent Publication No. 2018-39656 (Patent Document 1).

[0003] The conveying device (conveying device 3) of Patent Document 1 is provided with a restricting device (falling prevention body 35S) for restricting the contained object (semiconductor tray T) from flying out of the opening (opening Wa) when the container (container W) is conveyed. The restricting device is composed of a pair of rod-shaped bodies that can slide and move in the width direction of the opening by the extension and contraction of the cylinder, and moves toward each other after the holding device (gripping part 31S) holds the container, thereby preventing the contained object from falling from the opening (Paragraph 0033 of Patent Document 1). Summary of the invention

[0004] The conveying device of Patent Document 1 is configured to restrict the device operation after the container holding operation by the holding device, so that separate driving mechanisms are required, and there is room for improvement in terms of miniaturization and simplification of the device.

[0005] Therefore, it is desired to realize a conveying device that can prevent the contained objects from flying out of the opening of the container during conveyance while achieving miniaturization and simplification of the device.

[0006] The conveying device disclosed in the present invention is a conveying device for conveying a container having an opening on the side for taking out and putting in contained objects; it comprises: a holding device, which comprises a plurality of holding bodies and a driving device that changes the postures of the plurality of the aforementioned holding bodies into a holding posture for holding the aforementioned container and a holding release posture for releasing the holding of the aforementioned container; and a limiting device, which limits the aforementioned contained objects from flying out of the aforementioned opening of the aforementioned container held by the aforementioned holding device; the direction in which the aforementioned contained objects are taken out and put in through the aforementioned opening is set as the taking out and putting in direction; the aforementioned limiting device comprises a closing component, the posture of the closing component changes into a closed posture overlapping with the aforementioned opening when observed in the taking out and putting in direction along the aforementioned taking out and putting in direction and an open posture not overlapping with the aforementioned opening when observed in the aforementioned taking out and putting in direction; the aforementioned closing component is constructed to be linked with the posture change of the aforementioned holding body, and the aforementioned closing component becomes the aforementioned closed posture as the aforementioned holding body becomes the aforementioned holding posture, and the aforementioned closing component becomes the aforementioned open posture as the aforementioned holding body becomes the aforementioned holding release posture.

[0007] According to this structure, by setting the closing part of the limiting device to the closing posture during transportation, it is possible to prevent the contained object from flying out of the opening of the container. In addition, since the posture change between the closing posture and the opening posture of the closing part is linked with the posture change between the holding posture and the holding release posture of the holding body, it is not necessary to provide a dedicated driving mechanism for changing the posture of the closing part. Thus, the device can be miniaturized and simplified.

[0008] Further features and advantages of the technology disclosed herein will become more apparent from the following description of illustrative and non-limiting embodiments with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 It is a front view of the transport vehicle according to the embodiment.

[0010] Figure 2 It is a three-dimensional image of the container.

[0011] Figure 3 This is a diagram showing a first posture when viewed from below the holding device and the restricting device.

[0012] Figure 4 It is a diagram showing a second posture viewed from below the holding device and the restricting device.

[0013] Figure 5 yes Figure 4 A partial enlarged view of .

[0014] Figure 6 It is a three-dimensional diagram of the conveying device.

[0015] Figure 7 is a side view of the conveying device.

[0016] Figure 8 This is a partial enlarged view of another form of the restraining device. DETAILED DESCRIPTION

[0017] The conveying device of the embodiment will be described with reference to the drawings. The conveying device 1 of the present embodiment is used, for example, in a semiconductor manufacturing plant to convey a container 8. Figure 1 As shown, the conveying device 1 includes a travel portion 2 that travels along a moving path and a transfer mechanism 3 connected to the travel portion 2. In the present embodiment, the moving path of the conveying device 1 is physically formed by a rail 99 suspended and supported from a ceiling 98. That is, the conveying device 1 of the present embodiment is a ceiling conveying vehicle that moves along the rail 99 formed along the ceiling 98.

[0018] The travel unit 2 travels along a pair of rails 99. The travel unit 2 includes a vehicle body 21, a travel drive device 22, wheels 23, and guide wheels 24. The vehicle body 21 supports the travel drive device 22, the wheels 23, and the guide wheels 24. The travel drive device 22 includes an electric motor such as a servo motor, and drives at least one wheel 23. The wheel 23 rolls on the upper surface of the rail 99. The wheel 23 drivingly connected to the travel drive device 22 functions as a driving wheel. The guide wheel 24 rolls on the inner side of the rail 99. The travel unit 2 travels on the rail 99 along the rail 99 in a state where the guide wheel 24 contacts the inner side of the rail 99 and is guided.

[0019] In the following description, the direction along the direction in which the traveling unit 2 travels, i.e., the direction in which the rails 99 extend, is referred to as the front-rear direction X of the conveyor 1. In addition, the direction orthogonal to the front-rear direction X and along the arrangement direction of the pair of rails 99 is referred to as the left-right direction Y of the conveyor 1. In addition, the direction orthogonal to both the front-rear direction X and the left-right direction Y is referred to as the up-down direction Z. In addition, each of these directions is a direction based on the conveyor 1, and the front-rear direction X and the left-right direction Y may differ depending on the position of the conveyor 1 along the moving path when viewed from a fixed point in the device. The up-down direction Z coincides with the vertical direction.

[0020] The transfer mechanism 3 is arranged below the rail 99 and connected to the travel unit 2. The transfer mechanism 3 includes a holding device 30, a lifting device 40, and a cover 50. The holding device 30 is a device for holding the container 8. The lifting device 40 is a device for lifting the holding device 30. The lifting device 40 enables the holding device 30 to move upward and downward. Figure 1 The cover 50 is raised and lowered between the raised position shown and the lowered position not shown. The cover 50 accommodates the lifting device 40 and the holding device 30 in the raised position. The inner space of the cover 50 is shielded on both sides in the front-to-back direction X, and at least one side (in this example, both sides) in the left-right direction Y is open.

[0021] The conveying device 1, for example, has the travel section 2 travel to a destination while the holding device 30 holds the container 8, and the lifting device 40 lowers the holding device 30 to a lowered position, thereby conveying the container 8 to the destination. In addition, the conveying device 1 can transport the container 8 out of the location by performing the reverse operation.

[0022] The container 8, which is the object to be transported by the transport device 1 of this embodiment, is as follows: Figure 2 As shown, it is provided with a bottom plate 81, a side plate 82 and a top plate 83. The bottom plate 81 is a support plate arranged at the lower end of the container 8, and is formed into a rectangular shape (in this case, a rectangular shape). The side plate 82 extends upward from the outer edge of the bottom plate 81. In this embodiment, a pair of side plates 82 extends upward from the outer edges of the opposite side portions (in this case, a pair of long side portions) in the rectangular bottom plate 81. The side plate 82 is formed into a rectangular shape (in this case, a rectangular shape). The top plate 83 is arranged at the upper end of the side plate 82, is formed into the same shape as the bottom plate 81 (in this case, a rectangular shape), and is arranged parallel to the bottom plate 81.

[0023] The bottom plate 81, the pair of side plates 82 and the top plate 83 are integrally formed, and the container 8 is formed into a rectangular tube shape as a whole. The container 8 has a pair of openings 86 in the side portions where the pair of side plates 82 are not present. The openings 86 serve as openings 86 for taking out or putting in the contained object 9 contained in the container 8.

[0024] In the present embodiment, the direction of taking out and putting in the contained object 9 through the opening 86 of the container 8 is referred to as the "taking out and putting in direction S". The taking out and putting in direction S of the present embodiment is a direction along the long side direction of the container 8 when viewed in the vertical direction. In the present embodiment, the taking out and putting in direction S in the state where the holding device 30 holds the container 8 is consistent with the left-right direction Y of the conveying device 1.

[0025] In addition, in the present embodiment, the direction perpendicular to the vertical direction Z and the taking-in and taking-out direction S is defined as the width direction T. The width direction T is a direction along the horizontal direction and perpendicular to the taking-in and taking-out direction S, and in the present embodiment, it is a direction along the short side direction of the container 8 when viewed in the vertical direction. In the present embodiment, the width direction T in the state where the holding device 30 holds the container 8 coincides with the front-rear direction X of the conveying device 1.

[0026] The container 8 also includes a held body 84 and a groove 88. The held body 84 is a portion held by the holding device 30. The held body 84 of this embodiment is formed of a rectangular plate-like body that is slightly smaller than the top plate 83, and is fixed in a state slightly separated upward from the top plate 83.

[0027] The groove 88 is a portion where the stored object 9 can be placed. The groove 88 of this embodiment is configured as a groove portion formed on the inner surface side of the pair of side plates 82 along the insertion and removal direction S. The grooves 88 are arranged in the up-down direction Z in a plurality of stages.

[0028] In addition, the container 8 of this embodiment is provided with a wireless tag 89. The wireless tag 89 is a tag that can be read and written by wireless communication. In this embodiment, a passive RFID (Radio Frequency Identification) is used as the wireless tag 89. The wireless tag 89 records the inherent identification information (article ID) of the container 8 to which the wireless tag 89 is attached. The wireless tag 89 is attached to the upper surface of the bottom plate 81 near the opening 86.

[0029] The stored object 9 can be arranged in each of the plurality of grooves 88. The stored object 9 of this embodiment includes a tray 91 arranged in the groove 88 and a plurality of articles 92 placed on the tray 91. The tray 91 is formed in a rectangular shape (in this example, a rectangular shape) corresponding to the shape of the container 8 when viewed in the vertical direction. The tray 91 is stored in the container 8 in a state where the ends of both sides in the width direction T are arranged in the grooves 88 of the same height in the pair of side plates 82.

[0030] As the article 92, semiconductor devices such as IC chips and transistors are exemplified. The articles 92 are placed on the tray 91 in a state where a plurality of articles 92 are arranged in a longitudinal and transverse direction (input and output direction S and width direction T). In the present embodiment, the length of the articles 92 arranged in a predetermined initial position along the width direction T is referred to as the width direction dimension Wa, and the length along the input and output direction S is referred to as the input and output direction dimension Wb.

[0031] like Figure 3 and Figure 4 As shown, the holding device 30 includes a holding body 31, a holding body 32 and a holding drive device 33 (see Figure 7 The holding body 31 is a part that serves as a base of the holding device 30. The holding body 31 supports the holding body 32 slidably in the front-rear direction X (width direction T). In addition, the holding body 31 supports the holding drive device 33 in a fixed manner.

[0032] The retaining body 32 retains the retained body 84 of the container 8. In the present embodiment, a plurality of retaining bodies 32 are provided so that different parts of the retained body 84 can be supported simultaneously. More specifically, a pair of retaining bodies 32 are provided so that parts of the rectangular retained body 84 located on opposite sides can be supported simultaneously. The pair of retaining bodies 32 are arranged in the front-to-back direction X (width direction T) while being spaced apart by a predetermined interval. Moreover, the pair of retaining bodies 32 are respectively configured to slide freely in the front-to-back direction X (width direction T), and move toward each other or away from each other along the front-to-back direction X (width direction T).

[0033] The holding drive device 33 moves the pair of holding bodies 32 in the front-to-back direction X (width direction T). The holding drive device 33 includes, for example, a holding electric motor and a mechanism (for example, a ball screw mechanism) that converts the rotation of the holding electric motor into a propulsion force in the front-to-back direction X. The holding drive device 33 moves the pair of holding bodies 32 in opposite directions to each other so that they move toward each other or away from each other along the front-to-back direction X (width direction T).

[0034] By moving the pair of holding bodies 32 toward each other in the front-rear direction X (width direction T), the pair of holding bodies 32 overlap with the held body 84 at the lower side of the held body 84 when viewed in the vertical direction (see Figure 4 In the present embodiment, this posture is referred to as the "holding posture" of the holding container 8. On the other hand, by moving the pair of holding bodies 32 away from each other in the front-rear direction X (width direction T), the pair of holding bodies 32 are in a state where they do not overlap with the held body 84 when viewed in the vertical direction (see Figure 3 ). In the present embodiment, this posture is referred to as a "holding release posture" in which the holding of the container 8 is released. The holding drive device 33 changes the posture of the pair of holding bodies 32 into a holding posture and a holding release posture by the approaching and separating movements of the pair of holding bodies 32. In the present embodiment, the holding drive device 33 is equivalent to a "drive device".

[0035] like Figure 7 As shown, the lifting device 40 includes a lifting main body 41 and a lifting drive device 42. The lifting main body 41 fixedly supports the lifting drive device 42. The lifting drive device 42 is composed of, for example, an electric motor for lifting and a winding part that rotates integrally with the electric motor for lifting. The winding part and the holding device 30 are connected by a cable body (such as a wire, a rope, etc.). The lifting device 40 drives the lifting drive device 42 to wind up or release the cable body, so that the holding device 30 is raised and lowered between the rising position and the falling position.

[0036] like Figure 7As shown, the cover body 50 covers the container 8 held by the holding device 30 in the ascending position from above and laterally. The cover body 50 has an upper cover portion 51 and a side cover portion 52. The upper cover portion 51 covers the container 8 from above. The side cover portion 52 covers the container 8 from the side. A pair of side cover portions 52 are provided in a manner of covering the container 8 from both sides in the front-to-back direction X (width direction T). The upper cover portion 51 and the pair of side cover portions 52 are formed integrally. In addition, the cover body 50 is open in the left-right direction Y (taking-out and putting-in direction S). The opening 86 of the container 8 held by the holding device 30 in the ascending position is located on the open side.

[0037] like Figure 3 to Figure 7 As shown, the conveying device 1 (transfer mechanism 3) of this embodiment is provided with a limiting device 60 in addition to the holding device 30, the lifting device 40 and the cover body 50. The limiting device 60 is a device for limiting the flying out of the contained object 9 from the opening 86 of the container 8 held by the holding device 30. The limiting device 60 is provided with a closing (locking) member 61, and the flying out of the contained object 9 from the opening 86 of the container 8 is limited by making the closing member 61 overlap with the opening 86 when viewed in the direction of taking out and putting in (when viewed along the direction of taking out and putting in S).

[0038] In addition, the closing member 61 can also be in an open position in which it does not overlap with the opening 86 when viewed in the insertion and removal direction. The restricting device 60 is configured so that the closing member 61 can change its position between a closed position and an open position.

[0039] In the present embodiment, the container 8 has openings 86 on both sides in the taking-in and taking-out direction S, and correspondingly, the limiting devices 60 are also arranged on both sides in the taking-in and taking-out direction S, respectively.

[0040] like Figure 3 and Figure 4 As shown, the limiting device 60 of this embodiment is provided with a pair of closing components 61. On both sides in the insertion and removal direction S, the pair of closing components 61 are linked to each other and are configured such that, in the open position, the two closing components 61 are arranged at positions that do not overlap with the opening 86 when viewed in the insertion and removal direction, and in the closed position, the two closing components 61 are arranged at positions that overlap with the opening 86 when viewed in the insertion and removal direction. In addition, the limiting devices 60 on both sides in the insertion and removal direction S are also linked to each other and are configured such that the two sets (four in total) of closing components 61 are simultaneously in the closed position or simultaneously in the open position.

[0041] As per Figure 6As can be well understood, the closing member 61 includes a support portion 61A and a plate-like portion 61B connected to the support portion 61A. The support portion 61A is slidably arranged along the lower surface side of the holding body portion 31. The plate-like portion 61B is formed into a flat plate having a predetermined width and extending along the up-down direction Z. The plate-like portion 61B extends to a position corresponding to the lowest groove 88. In addition, in the present embodiment, in the up-down direction Z, the lower end portion of the plate-like portion 61B extends to a position below the lower end portion of the container 8. Thus, the plate-like portion 61B is configured in a manner that overlaps all of the plurality of grooves 88 when viewed in the direction of taking out and putting in in the closed posture.

[0042] like Figure 3 to Figure 5 As shown in FIG. 1 , the limiting device 60 of the present embodiment includes a link mechanism 62. The link mechanism 62 links the posture change of the holding body 32 with the posture change of the closing member 61. More specifically, the closing member 61 links the posture change of the holding body 32. As the holding body 32 is in the holding posture, the closing member 61 is in the closing posture ( Figure 3 → Figure 4 ). In addition, the closing member 61 and the holding body 32 change their postures in tandem, and as the holding body 32 changes to the release posture, the closing member 61 changes to the open posture ( Figure 4 → Figure 3 ).

[0043] like Figure 5 As shown, the link mechanism 62 includes a driving arm 63 and a driven arm 64 that are connected so as to be relatively displaceable. The driving arm 63 is fixedly connected to the holding body 32 of the holding device 30 via a connecting bracket 69. A connecting shaft 63A is provided at the front end portion of the driving arm 63 (the end portion on the opposite side to the connecting bracket 69). The connecting shaft 63A is inserted through a long hole 64a formed in the driven arm 64. One end portion of the driven arm 64 is rotatably connected to the holding body 31 via a rotating shaft 65, and the other end portion is rotatably connected to the closing member 61 (supporting portion 61A) via a supporting shaft 66.

[0044] In addition, the rotating shaft 65, the connecting shaft 63A, and the supporting shaft 66 all have a rotation axis along the up-down direction Z. The driving arm 63 and the driven arm 64 are relatively displaceable when viewed in the up-down direction.

[0045] In the present embodiment, when the holding body 32 slides in the front-rear direction X (width direction T), the driving arm 63 and the connecting shaft 63A also slide in the front-rear direction X (width direction T). With this sliding movement, the driven arm 64 pushed by the connecting shaft 63A in the long hole 64a rotates around the rotating shaft 65. Then, the closing member 61 rotatably supported by the supporting shaft 66 at the swing end of the driven arm 64 is guided by the arc-shaped sliding guide 31A provided on the holding body 31, and moves while changing the direction of the plate-shaped portion 61B little by little.

[0046] In this way, the closing member 61 is supported rotatably around a virtual rotation axis located near the rotation shaft 65 and extending along the up-down direction Z. In the present embodiment, the position of the rotation axis is the virtual center position of the arc-shaped slide guide portion 31A.

[0047] In this embodiment, the connection portion between the connecting shaft 63A and the driven arm 64 is between the rotating shaft 65 and the supporting shaft 66, so when the pair of retaining bodies 32 move toward each other, the plate-like portions 61B of the pair of closing members 61 rotate toward the sides approaching each other in conjunction therewith ( Figure 3 → Figure 4 Then, the plate-like portions 61B of the pair of closing members 61 are in a closed position in a state where they are close to each other. On the other hand, when the pair of retaining bodies 32 separate, the plate-like portions 61B of the pair of closing members 61 rotate toward the side away from each other in conjunction with the pair of retaining bodies 32 ( Figure 4 → Figure 3 ). Then, the plate-like portions 61B of the pair of closing members 61 are spaced apart from each other to form an open posture.

[0048] In the closed position, the plate-like portion 61B is arranged so as to face the opening 86 of the container 8. Here, the plate-like portion 61B faces the opening 86 of the container 8, which means that the direction perpendicular to the plate surface of the plate-like portion 61B faces the opening 86 side of the container 8 (in other words, the plate surface of the plate-like portion 61B is parallel to or close to the end of the container 8 in the insertion and removal direction S). In the present embodiment, the plate-like portion 61B is arranged in the closed position so that the plate surface of the plate-like portion 61B is inclined toward the outside of the width direction T by 5° to 15° (about 10° in the example shown in the figure) relative to the end of the container 8 in the insertion and removal direction S.

[0049] In this embodiment, the dimension of the area in the opening 86 of the container 8 that is not covered by the sealing member 61 in the closed position in the width direction T (the width direction dimension Wc of the non-covered area, see Figure 7 ) is set to be smaller than the dimension of the article 92 in the width direction T (width dimension Wa, see Figure 2Here, in this embodiment, a pair of sealing members 61 cover the opening 86 of the container 8 at positions separated from each other in the width direction T. Figure 5 As shown in FIG. 1 , there are three areas not covered by the closing member 61 in the closed posture. If the dimensions of each of these three areas in the width direction T are Wc1, Wc2, and Wc3, then in this embodiment, the maximum value among them is set as the width direction dimension Wc of the non-covered area. In this example, the dimension Wc2 between a pair of closing members 61 in the width direction T is the width direction dimension Wc of the non-covered area.

[0050] In addition, in the present embodiment, the gap between the sealing member 61 in the closed position and the opening 86 of the container 8 in the insertion and removal direction S (the insertion and removal direction gap Wd, see Figure 5 ) is set to be smaller than the size of the object 92 in the direction of taking out and putting in (the size Wb in the direction of taking out and putting in, see Figure 2 Here, in the present embodiment, the sealing member 61 is arranged in a closed position with the plate surface of the plate-shaped portion 61B tilted relative to the end of the container 8 in the insertion and removal direction S. In the present embodiment, the gap in the insertion and removal direction S at the portion of the sealing member 61 (plate-shaped portion 61B) farthest from the opening 86 of the container 8 is set as the insertion and removal direction gap Wd.

[0051] In addition, the article 92 is merely placed on the tray 91, and may be moved and rotated on the tray 91. Therefore, the width dimension Wc of the non-covered area is preferably smaller than the shorter of the width dimension Wa of the article 92 and the dimension Wb of the taking-out and putting-in direction (in this example, the dimension Wb of the taking-out and putting-in direction). Similarly, the gap Wd in the taking-out and putting-in direction is also preferably smaller than the shorter of the width dimension Wa of the article 92 and the dimension Wb of the taking-out and putting-in direction (in this example, the dimension Wb of the taking-out and putting-in direction). In short, the width dimension Wc of the non-covered area and the gap Wd in the taking-out and putting-in direction are preferably smaller than the minimum width dimension of the article 92 on both sides when viewed in the up-down direction.

[0052] like Figure 6 As shown in FIG. 1 , a wireless tag reader 70 is installed on one of the pair of sealing members 61 on one side in the left-right direction Y (the direction of taking out and putting in S). The wireless tag reader 70 is installed near the lower end of one of the pair of plate-like parts 61B and on the surface on the container 8 side. When the pair of sealing members 61 are in the closed position, they communicate with the wireless tag 89 (see FIG. 1 ) attached to the bottom plate 81 of the container 8. Figure 2 ) approach. Then, in this closed posture, the wireless tag reader 70 reads the wireless tag 89 attached to the bottom plate 81. In this embodiment, the wireless tag reader 70 is an antenna that reads the RFID that is the wireless tag 89.

[0053] The plate-shaped portion 61B is preferably formed of a non-metal material from the viewpoint of appropriately performing reading of the wireless tag 89 by the wireless tag reader 70. The plate-shaped portion 61B may be formed of a resin material, for example.

[0054] [Other implementation methods]

[0055] (1) In the above-mentioned embodiment, the structure in which the holding device 30 includes a pair of holding bodies 32 that are slidable in the front-rear direction X (width direction T) is described as an example. However, the holding device 30 is not limited to such a structure, and the holding device 30 may include three or more holding bodies 32. For example, the three or more holding bodies 32 may also hold the held body 84 by sliding radially around the held body 84 as the center.

[0056] (2) In the above-mentioned embodiment, the structure in which the holding device 30 holds the container 8 by the approaching action of the pair of holding bodies 32 and releases the holding of the container 8 by the separation action of the pair of holding bodies 32 is described as an example. However, it is not limited to such a structure, and the holding device 30 can also be configured to hold the container 8 by the separation action of the pair of holding bodies 32 and release the holding of the container 8 by the approaching action of the pair of holding bodies 32. In this case, the pair of closing parts 61 are preferably configured to be in a closed posture in conjunction with the separation action of the pair of holding bodies 32 and in an open posture in conjunction with the approach action. Such a structure can be achieved, for example, by setting the connection portion of the connecting shaft 63A and the driven arm 64 to the opposite side of the support shaft 66 relative to the rotating shaft 65.

[0057] (3) In the above embodiment, the holding device 30 is described as a chuck type. However, the holding device 30 is not limited to such a structure, and the specific structure of the holding device 30 is arbitrary as long as it can at least hold the container 8, and may be a fork type, for example.

[0058] (4) In the above-mentioned embodiment, the limiting device 60 is described by taking the structure having a pair of closing members 61 as an example. However, the limiting device 60 is not limited to such a structure, and may also have a single closing member 61 or three or more closing members 61. The number of closing members 61 is preferably the same as or less than the number of retaining bodies 32.

[0059] (5) In the above-mentioned embodiment, an example is described in which the link mechanism 62 includes the rotation shaft 65, the drive arm 63, the connecting shaft 63A, the driven arm 64 and the support shaft 66. However, the present invention is not limited to such a structure, and the specific structure of the link mechanism 62 is arbitrary as long as the linear motion of the pair of retaining bodies 32 can be converted into the rotational motion of the pair of closing members 61.

[0060] (6) In the above-mentioned embodiment, the structure in which the posture change of the holding body 32 and the posture change of the closing member 61 are linked by the link mechanism 62 is described as an example. However, the present invention is not limited to such a structure, and the posture change of the holding body 32 and the posture change of the closing member 61 may be linked by other mechanisms such as a gear mechanism, a pulley mechanism, etc.

[0061] (7) In the above embodiment, the pair of closing members 61 are described as an example of a structure in which the posture changes by rotating. However, the present invention is not limited to such a structure, and the pair of closing members 61 may also change their posture by linear movement along the front-rear direction X (width direction T).

[0062] (8) In the above-mentioned embodiment, the width dimension Wc of the non-covered area of ​​the opening 86 of the container 8 by the closing member 61 in the closed posture is smaller than the width dimension Wa of the article 92. However, the present invention is not limited to such a structure, and the width dimension Wc of the non-covered area may be slightly larger than the width dimension Wa of the article 92. The width dimension Wc of the non-covered area may be larger than the width dimension Wa of the article 92 and smaller than the diagonal dimension of the article 92.

[0063] (9) In the above-mentioned embodiment, the structure in which the closing component 61 (plate-like portion 61B) in the closed posture is arranged to be inclined relative to the end of the container 8 in the removal and insertion direction S is described as an example. However, it is not limited to such a structure, and the closing component 61 (plate-like portion 61B) in the closed posture may be arranged parallel to the end of the container 8 in the removal and insertion direction S. In this case, the closing component 61 (plate-like portion 61B) may be arranged in a manner of abutting against the container 8 without leaving the container 8 in the removal and insertion direction S. Such a structure may be structurally set so that it is arranged in such a manner in the closed posture, or it may be capable of being adjusted afterwards. In the latter case, for example Figure 8 As shown in FIG. 1 , the adjusting mechanism 75 may be provided to change the angle of the plate-like portion 61B in the vertical direction in the closed posture and the position of the plate-like portion 61B in the insertion and removal direction S. The adjusting mechanism 75 may be capable of changing only the angle of the plate-like portion 61B or only the position of the plate-like portion 61B. Alternatively, the adjusting mechanism 75 may also be capable of changing the position of the plate-like portion 61B in the vertical direction Z.

[0064] (10) In the above-mentioned embodiment, the structure of the plate-like portion 61B formed of a resin material is mainly assumed to be used as it is. However, it is not limited to such a structure, and for example, the plate-like portion 61B subjected to surface treatment may be used. Examples of the surface treatment include anti-slip treatment by coating treatment, roughening treatment, etc., and anti-static treatment by coating treatment, etc.

[0065] (11) In the above-mentioned embodiment, the structure in which the wireless tag reader 70 is installed on the sealing member 61 (plate-shaped portion 61B) is described as an example. However, the present invention is not limited to such a structure, and for example, the wireless tag reader 70 may be provided on the cover body 50 (side cover portion 52) in a state that it can be extended to the position of the wireless tag 89 attached to the container 8.

[0066] (12) In the above-mentioned embodiment, the structure in which the object 9 to be contained in the container 8 includes the tray 91 and the plurality of articles 92 placed thereon is described as an example. However, the present invention is not limited to such a structure, and any object that can be contained in the container 8, such as a semiconductor substrate or a semiconductor wafer, may be used as the object 9 to be contained.

[0067] (13) In the above embodiment, the transport device 1 is described as a ceiling transport vehicle. However, the transport device 1 is not limited to such a structure, and may be a device that travels on the floor, such as an unmanned transport vehicle or an autonomous transport robot.

[0068] (14) The structures disclosed in the above-mentioned embodiments (including the above-mentioned embodiments and other embodiments; the same applies below) can also be combined with structures disclosed in other embodiments and applied as long as there is no contradiction. Regarding other structures, the embodiments disclosed in this specification are also illustrative in all aspects and can be appropriately changed within the scope of the present disclosure.

[0069] [Summary of implementation methods]

[0070] To summarize the above, the transport device according to the present disclosure preferably includes the following structures.

[0071] A conveying device for conveying a container having an opening on the side for taking out and putting in contained objects; comprising: a holding device, comprising a plurality of holding bodies and a driving device that changes the postures of the plurality of the aforementioned holding bodies into a holding posture for holding the aforementioned container and a holding release posture for releasing the holding of the aforementioned container; and a limiting device, which limits the aforementioned contained objects from flying out of the aforementioned opening of the aforementioned container held by the aforementioned holding device; the direction of taking out and putting in the aforementioned contained objects through the aforementioned opening is set as the taking out and putting in direction; the aforementioned limiting device comprises a closing component, the posture of the closing component changes into a closing posture that overlaps with the aforementioned opening when viewed in the taking out and putting in direction along the aforementioned taking out and putting in direction and an open posture that does not overlap with the aforementioned opening when viewed in the aforementioned taking out and putting in direction; the aforementioned closing component is constructed to be linked with the posture change of the aforementioned holding body, and the aforementioned closing component becomes the aforementioned closing posture as the aforementioned holding body becomes the aforementioned holding posture, and the aforementioned closing component becomes the aforementioned open posture as the aforementioned holding body becomes the aforementioned holding release posture.

[0072] According to this structure, by setting the closing part of the limiting device to the closing posture during transportation, it is possible to prevent the contained object from flying out of the opening of the container. In addition, since the posture change between the closing posture and the opening posture of the closing part is linked with the posture change between the holding posture and the holding release posture of the holding body, it is not necessary to provide a dedicated driving mechanism for changing the posture of the closing part. Thus, the device can be miniaturized and simplified.

[0073] As one form, it is preferred that the container has a plurality of grooves arranged in the up-down direction; the objects to be contained include a tray arranged in the grooves and a plurality of articles placed on the tray; a direction perpendicular to the up-down direction and the taking-out and putting-in direction is set as a width direction; when observed in the taking-out and putting-in direction, a region in the opening that is not covered by the closing component in the closed posture has a size in the width direction that is smaller than a size of the articles in the width direction.

[0074] According to this configuration, when the closing member is in the closed position, it is possible to effectively prevent the stored objects from flying out of the opening of the container.

[0075] As one form, it is preferred that the container has a plurality of grooves arranged in the up-down direction; the objects to be contained can be arranged in each of the plurality of grooves; and the closing member has a plate-like portion, which is arranged so as to overlap with all of the plurality of grooves when viewed in the taking-out and putting-in direction in the closing posture and to face the opening.

[0076] According to this structure, since the plate-shaped portion of the sealing member overlaps all of the plurality of grooves when viewed in the direction of taking out and putting in in the closed position, it is possible to appropriately prevent all of the contained objects from flying out. Since the plate-shaped portion is arranged in a manner facing the opening of the container in the closed position, it is possible to cover a relatively large range of the opening, and it is possible to effectively prevent the contained objects from flying out.

[0077] As one form, it is preferred that the aforementioned limiting device comprises a pair of aforementioned closing components; each of the pair of aforementioned closing components is supported to rotate freely around a rotation axis along the aforementioned up-down direction; the aforementioned plate-like portions of the pair of aforementioned closing components rotate toward sides approaching each other and the pair of aforementioned closing components are in the aforementioned closed posture, and the aforementioned plate-like portions of the pair of aforementioned closing components rotate toward sides away from each other and the pair of aforementioned closing components are in the aforementioned open posture.

[0078] According to this configuration, it is possible to simplify the restricting device including a pair of closing members whose postures can be changed between a closed posture and an open posture.

[0079] As one form, it is preferred that the aforementioned holding device includes a pair of aforementioned holding bodies, and the aforementioned driving device is configured to change the posture of the pair of aforementioned holding bodies into the aforementioned holding posture and the aforementioned holding release posture through the approaching movement and separation movement of the pair of aforementioned holding bodies; the aforementioned limiting device includes a connecting rod mechanism, and the connecting rod mechanism links the pair of aforementioned holding bodies with the pair of aforementioned closing parts, so that the aforementioned plate-like portions of the pair of aforementioned closing parts rotate toward the side of separation from each other in conjunction with the aforementioned separation movement of the pair of aforementioned holding bodies, and rotate toward the side of approaching each other in conjunction with the aforementioned approaching movement of the pair of aforementioned holding bodies.

[0080] According to this structure, the linear motion of a pair of holding bodies accompanied by approaching and separating motions is converted into the rotary motion of a pair of closing parts by means of a connecting rod mechanism. Thus, a mechanism that links the posture change of the closing posture and the opening posture of a pair of closing parts with the posture change of the holding posture and the holding release posture of a pair of holding bodies can be realized by means of a relatively simple structure.

[0081] As one aspect, it is preferred that the limiting device has an adjustment mechanism capable of changing at least one of an angle of the plate-like portion in the closed posture when viewed in the up-down direction and a position of the plate-like portion in the removal and insertion direction.

[0082] According to this structure, at least one of the angle and position of the plate-shaped portion can be adjusted according to the size and shape of the container actually transported. Thus, the range of the opening covered by the plate-shaped portion and the interval between the container and the plate-shaped portion in the direction of taking out and putting in can be adjusted, and the flying out of the contained objects can be appropriately prevented regardless of the size and shape of the container.

[0083] As one aspect, it is preferable that a wireless tag reader for reading a wireless tag provided on the container is mounted on the sealing member.

[0084] According to this structure, when the sealing member is in a closed position close to the container and covers the opening of the container, the wireless tag set on the container can be read by the wireless tag reader installed in the sealing member. Thus, it can be confirmed during transportation whether the container actually transported is the intended container.

[0085] The conveying device according to the present disclosure only needs to be able to achieve at least one of the above-mentioned effects.

[0086] Description of Reference Numerals

[0087] 1 Conveying device

[0088] 8 Container

[0089] 9 Contained Objects

[0090] 30 Holding device

[0091] 32 Keep body

[0092] 33 Maintain drive device (drive device)

[0093] 60 Restraining device

[0094] 61 Closure parts

[0095] 61B Plate-shaped part

[0096] 62 connecting rod mechanism

[0097] 70 Wireless Tag Reader

[0098] 75 Adjustment mechanism

[0099] 86 Opening

[0100] 88 slots

[0101] 89 Wireless Tags

[0102] 91 Pallets

[0103] 92 Items

[0104] Z Up and Down Direction

[0105] S Take out and put in direction

[0106] T Width direction

[0107] Wa is the width dimension of the item

[0108] Wb Dimensions of items in the direction of taking out and putting in

[0109] Wc The width dimension of the uncovered area

[0110] Wd Clearance between the closing part and the container opening in the direction of taking out and putting in

Claims

1. A conveying device for conveying a container having an opening on the side for taking out and putting in the contained objects, characterized in that: have: A holding device including a plurality of holding bodies and a driving device for changing the postures of the plurality of holding bodies into a holding posture for holding the container and a holding release posture for releasing the holding of the container; as well as a limiting device for limiting the ejection of the contained object from the opening of the container held by the holding device; The direction of taking out and putting in the aforementioned contained object through the aforementioned opening is defined as the taking out and putting in direction; The restricting device includes a closing member, the closing member changing its posture to a closing posture overlapping with the opening when viewed in the direction of taking out and putting in along the direction of taking out and putting in, and an opening posture not overlapping with the opening when viewed in the direction of taking out and putting in; The sealing member is configured to be linked with the change in the posture of the holding body, and the sealing member is in the closing posture as the holding body is in the holding posture, and is in the opening posture as the holding body is in the holding release posture.

2. The conveying device according to claim 1, characterized in that The container has multiple levels of grooves arranged in the vertical direction; The aforementioned stored objects include a tray arranged in the aforementioned slot and a plurality of articles placed on the aforementioned tray; The direction perpendicular to the up-down direction and the taking-in and taking-out direction is defined as the width direction; When observed in the aforementioned taking-out and putting-in direction, the dimension of the area in the aforementioned opening that is not covered by the aforementioned closing component in the aforementioned closing posture in the aforementioned width direction is smaller than the dimension of the aforementioned article in the aforementioned width direction.

3. The conveying device according to claim 1, characterized in that The container has multiple levels of grooves arranged in the vertical direction; The aforementioned stored objects can be arranged in each of the plurality of aforementioned slots; The closing member includes a plate-shaped portion that is arranged so as to overlap with all of the plurality of grooves when viewed in the insertion and removal direction in the closing posture and to face the opening.

4. The conveying device according to claim 3, characterized in that The aforementioned restriction device comprises a pair of aforementioned closing members; The pair of the aforementioned closing members are each supported to be rotatable about a rotation axis along the aforementioned vertical direction; The plate-like portions of the pair of the above-mentioned closing members rotate toward each other so that the pair of the above-mentioned closing members are in the above-mentioned closing posture, and the plate-like portions of the pair of the above-mentioned closing members rotate toward each other so that the pair of the above-mentioned closing members are in the above-mentioned opening posture.

5. The conveying device according to claim 4, characterized in that The holding device comprises a pair of holding bodies, and the driving device is configured to change the postures of the pair of holding bodies into the holding posture and the holding release posture through the approaching and separating movements of the pair of holding bodies; The aforementioned limiting device is provided with a link mechanism, which links the pair of aforementioned retaining bodies and the pair of aforementioned closing parts, so that the aforementioned plate-like parts of the pair of aforementioned closing parts rotate toward the sides away from each other in conjunction with the aforementioned separation movement of the pair of aforementioned retaining bodies, and rotate toward the sides approaching each other in conjunction with the aforementioned approach movement of the pair of aforementioned retaining bodies.

6. The conveying device according to claim 3, characterized in that: The restricting device includes an adjusting mechanism capable of changing at least one of an angle of the plate-like portion when viewed in the up-down direction and a position of the plate-like portion in the insertion and removal direction in the closed posture.

7. The conveying device according to any one of claims 1 to 6, characterized in that: The sealing member is provided with a wireless tag reader for reading the wireless tag provided on the container.

Images