Magnetic shielding shell structure and optimization method
By adopting a low-power magnetic shielded housing structure in the MEMS sensor, using the permolaloy material and multiple storage wall design, the problem that the sensor is difficult to suppress electromagnetic interference in complex electromagnetic environments is solved, and higher sensitivity, accuracy and lower power consumption are achieved.
Patent Information
- Application Number
- CN202411619892.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-13
- Publication Date
- 2025-04-08
AI Technical Summary
Existing MEMS sensors are difficult to effectively suppress external electromagnetic interference in complex electromagnetic environments, resulting in unstable performance and the accuracy of measurement results.
Using a low-power magnetic shielded shell structure, a shielded shell is constructed by a peroxo alloy material with good conductivity, a multiple storage walls are used to form a storage space to place the sensor, and the thickness of the shielded shell is preferred to improve the magnetic field shielding effect.
It effectively reduces the impact of external electromagnetic interference on the sensor, improves the sensitivity and accuracy of the sensor, and significantly reduces power consumption and maintains good performance in harsh environments.
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Figure CN119789397A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of MEMS sensors, in particular to a magnetic shielding shell structure and an optimization method. Background Art
[0002] In practical applications, sensors are often affected by external electromagnetic interference, especially the interference signals in complex electromagnetic environments cannot be effectively suppressed, which may lead to unstable sensor performance and the accuracy of measurement results. The low-power magnetic shielding shell structure based on Permalloy proposed in the present invention is an important auxiliary device that can absorb and reflect electromagnetic waves and isolate external interference. At the same time, the thickness of the preferred shielding shell can improve the stability of the sensor, thereby improving the sensitivity and working performance, and effectively reducing the power consumption of the entire device. Summary of the invention
[0003] The present invention is proposed in view of the problems existing in the above-mentioned magnetic shielding case structure.
[0004] Therefore, the problem to be solved by the present invention is how to provide a low-power housing structure.
[0005] In order to solve the above technical problems, the present invention provides the following technical solutions: a magnetic shielding shell structure, comprising: a shielding shell, comprising a storage wall, wherein at least a plurality of the storage walls are provided, and the plurality of the storage walls are sequentially connected at the end;
[0006] A storage space is formed between the plurality of storage walls, and the storage space is used to place the sensor;
[0007] Wherein, the thickness of the plurality of storage walls is between 0.5 and 5 mm; the thickness of the plurality of storage walls are the same or different.
[0008] As a preferred solution of the magnetic shielding shell structure of the present invention, the shielding shell is provided with four storage walls, the four storage walls are connected in sequence, and the accommodating space between the four storage walls is rectangular.
[0009] As a preferred solution of the magnetic shielding shell structure of the present invention, the material of the shielding shell is a conductive material with good conductive properties.
[0010] As a preferred method of the magnetic shielding shell structure described in the present invention, the thickness of the shielding shell is 5 mm.
[0011] As a preferred method of the magnetic shielding shell structure of the present invention, the projection of the accommodating space of the shielding shell on the horizontal plane coincides with the projection of the sensor on the horizontal plane.
[0012] As a preferred method of the magnetic shielding shell structure of the present invention, the thicknesses of the four receiving walls of the shielding shell are the same.
[0013] As a preferred method of the magnetic shielding shell structure of the present invention, the thickness of two corresponding walls of the shielding shell is the same, and the thickness of two adjacent walls is different.
[0014] Another object of the present invention is to provide a method for optimizing the thickness of a magnetic shielding shell structure, comprising: selecting multiple shielding shells with different thicknesses and the same inner diameter; simulating the selected shielding shells; comparing multiple simulation results generated by the selected shielding shells; and outputting a set of thickness data of shielding shells with the best shielding performance.
[0015] As a preferred scheme of the preferred method described in the present invention, the shielding shell with the storage wall thickness of 0.5 mm and 5 mm is selected for simulation respectively; when the thickness of the storage wall is 0.5 mm, the shielding of the magnetic field y component is reduced by 3 orders of magnitude, and the electric field amplitude is increased by 1 to 2 orders of magnitude; when the thickness of the storage wall is 5 mm, the magnetic field shielding of the shielding shell is reduced by 3 orders of magnitude.
[0016] As a preferred solution of the preferred method of the present invention, the shielding performance of the shielding shell is output when the thickness of the storage wall is 5 mm.
[0017] The beneficial effects of the present invention are:
[0018] 1. Permalloy is used as the material of the shielding shell, and electromagnetic shielding technology is used to reduce electromagnetic interference and protect sensor equipment, thereby reducing measurement errors;
[0019] 2. The shielding shell reduces the influence of the external magnetic field on the sensor, improves the sensitivity and accuracy of the sensor, and greatly reduces the power consumption of the sensor;
[0020] 3. At the same time, the thickness of the sensor shielding shell is optimized to improve the magnetic field shielding effect of the sensor, so that the sensor can provide accurate and reliable measurement results in various complex environments.
[0021] 4. Permalloy material has good corrosion resistance and heat resistance, allowing the shielding shell to work in harsh environments, such as high temperature, high humidity or chemical corrosion environments.
[0022] 5. Since the shielding shell can be customized according to the size and measurement requirements of the sensor, this structure is highly adaptable and can be applied to many types of sensors. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. Among them:
[0024] Figure 1 This is a scene diagram of the magnetic shielding shell structure.
[0025] Figure 2 Schematic diagram of the magnetic field of a 0.5mm-5mm thick shielding shell of a magnetic shielding shell structure.
[0026] Figure 3 Schematic diagram of magnetic field shielding and electric field amplification of the shielding shell with a thickness of 5mm in the magnetic shielding shell structure. DETAILED DESCRIPTION
[0027] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings.
[0028] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.
[0029] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The term "in one embodiment" that appears in different places in this specification does not necessarily refer to the same embodiment, nor is it an embodiment that is mutually exclusive with other embodiments, either individually or selectively.
[0030] Example 1
[0031] Reference Figure 1 , which is the first embodiment of the present invention, and provides a magnetic shielding shell structure, the magnetic shielding shell structure includes a shielding shell 100, which includes a storage wall, at least a plurality of storage walls are provided, and the plurality of storage walls are sequentially connected at the end;
[0032] A receiving space is formed between the multiple receiving walls, and the receiving space is used to place the sensor;
[0033] Among them, the thickness of multiple storage walls is between 0.5 and 5 mm; the thickness of multiple storage walls is the same or different, and the shielding shell 100 with a thickness of 5 mm has the best magnetic field shielding performance, which can better shield the influence of the magnetic field on the sensor and also improve the electric field strength.
[0034] When in use, a square window is provided on the top of the shielding shell 100. The size of the window is set according to the size of the sensor, and the sensor is mainly used to sense electric field signals. At the same time, a device for protecting and fixing the sensor is designed inside the shell to reduce the influence of external stress on the sensor.
[0035] Example 2
[0036] Reference Figure 2-Figure 3 , which is the second embodiment of the present invention, and this embodiment is based on the previous embodiment.
[0037] Specifically, the shielding shell 100 is provided with four storage walls, the four storage walls are connected in sequence, and the accommodation space between the four storage walls is rectangular.
[0038] Preferably, the shielding shell 100 is made of a conductive material with good conductivity. The Permalloy material has good corrosion resistance and heat resistance, so that the shielding shell 100 can work in harsh environments, such as high temperature, high humidity or chemical corrosion environments.
[0039] Preferably, the thickness of the storage wall is 5 mm.
[0040] Preferably, the projection of the accommodating space of the shielding shell 100 on the horizontal plane coincides with the projection of the sensor on the horizontal plane. Since the shielding shell 100 can be customized according to the size and measurement requirements of the sensor, this structure has high adaptability and can be applied to various types of sensors.
[0041] Preferably, the thickness of the four storage walls of the shielding shell 100 are the same;
[0042] The thickness of two corresponding walls of the shielding shell 100 is the same, and the thickness of two adjacent walls is different.
[0043] First determine that Figure 1 For the cubic structure on the right with an inner diameter of 11*20mm, simulation results show that when the thickness is 0.5mm, the shielding of the main magnetic field y component is reduced by 3 orders of magnitude, and the electric field increase is increased by 1-2 orders of magnitude.
[0044] After determining this structure, the thickness is simulated again. The simulated magnetic field shielding results are as follows: Figure 2 As shown by Figure 2 It can be seen that the shielding shell with a thickness of 5mm has the best magnetic field shielding performance.
[0045] Next, we simulated the shielding shell based on a thickness of 5 mm to confirm its magnetic field shielding ability and electric field amplification ability.
[0046] like Figure 3As shown in the figure, the magnetic field shielding of the shielding shell with a thickness of 5 mm is reduced by 3 orders of magnitude, and the electric field increase is a linear increase:
[0047] y = -99.458x + 3755290;
[0048] The slope is -99.458, so the electric field increases by two orders of magnitude and changes linearly, which will have a significant effect on improving the performance of the sensor.
[0049] Shielding effectiveness is broken down into two parts: reflection loss and absorption loss. For electromagnetic waves, reflection loss refers to the ability to reflect electromagnetic waves, and absorption loss refers to the ability to absorb electromagnetic waves that have entered the material. The 5mm shielding shell is thicker, so it has stronger reflection and absorption capabilities for electromagnetic waves.
[0050] From the simulation results, under the action of the shielding shell 100, the magnetic field is shielded by three orders of magnitude and the electric field is increased by two orders of magnitude. Therefore, compared with the sensor itself, adding the shielding shell 100 greatly reduces the sensor operating voltage without reducing the sensor performance, thereby reducing the power consumption of the entire device;
[0051] The reason why the 5 mm thick shielding shell 100 exhibits a better effect is that it utilizes the characteristics of high magnetic permeability materials, increases absorption loss, improves reflection and absorption capabilities, and provides effective shielding over a wider frequency band.
[0052] After determining the thickness of the storage wall, design the appropriate shell size and window size based on the sensor size and measurement requirements.
[0053] A device for protecting and fixing the sensor is arranged inside the shielding shell 100, mainly to reduce the influence of mechanical stress on the performance of the sensor and to improve the stability of the sensor measurement.
[0054] When in use, under the same external electric field environment, after adding the shielding shell 100, under the effect of shielding the magnetic field and amplifying the electric field, during the operation of the sensor, the number of charged carrier drifts increases, the magnetic field loss carriers are less, and the output induced current of the collector is significantly increased. At the same time, the voltage of the sensor lead-out electrode is reduced, so that the collector output current returns to its original value. Therefore, this shielding layer can reduce its operating voltage while ensuring that the performance of the sensor remains unchanged, thereby reducing power consumption.
[0055] Example 3
[0056] Reference Figure 2-Figure 3 , which is the third embodiment of the present invention, and is based on the first two embodiments.
[0057] Specifically, a plurality of shielding shells 100 having different thicknesses and the same inner diameter are selected;
[0058] Performing simulation on the selected shielding shell 100;
[0059] Comparing multiple simulation results generated by the selected multiple shielding shells 100;
[0060] The thickness data of a group of shielding shells 100 with the best shielding performance are output.
[0061] Preferably, shielding shells 100 with storage wall thicknesses of 0.5 mm and 5 mm are selected for simulation respectively;
[0062] When the thickness of the storage wall is 0.5 mm, the shielding is reduced by 3 orders of magnitude in the y component of the magnetic field, and the increase in the electric field is increased by 1 to 2 orders of magnitude;
[0063] When the thickness of the storage wall is 5 mm, the magnetic field shielding of the shield case 100 is reduced by three orders of magnitude.
[0064] Preferably, the shielding performance of the shield case 100 when the thickness of the storage wall is 5 mm is output.
[0065] When in use, for general metals, a thickness of 0.5mm can produce a good shielding effect for 1MHz electromagnetic waves, and a very good shielding effect for 100MHz. However, for electromagnetic waves of lower frequencies, thicker shielding materials are required to achieve effective shielding. The 5mm shielding shell, due to its greater thickness, can provide effective shielding for electromagnetic waves of a wider frequency band. Skin depth is a phenomenon in which the current is unevenly distributed in a conductor and the current is concentrated on the surface of the conductor. For shielding, a shallow skin depth is desired, so that more electromagnetic frequency bands can be shielded with thinner metal. The 5mm shielding shell provides a greater skin depth, and has a better shielding effect for low-frequency electromagnetic waves;
[0066] The magnetic shielding shell structure based on Permalloy can strengthen the external electric field strength entering the voltage probe while weakening the magnetic field. The shielding shell 100 can reduce the influence of the external magnetic field, improve the sensitivity and accuracy of the sensor, and greatly reduce the power consumption of the sensor.
[0067] At the same time, due to the protection of the shielding shell 100, the sensor is not susceptible to physical damage, thereby improving its durability and service life. In complex electromagnetic environments, such as industrial sites or near high-voltage power equipment, this shielding shell 100 can significantly improve the anti-interference ability of the sensor and ensure the accuracy of the measurement data.
[0068] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present invention, which should all be included in the scope of the claims of the present invention.
Claims
1. A magnetic shielding shell structure, characterized in that: include, A shielding shell (100) comprising a storage wall, wherein at least a plurality of the storage walls are provided, and the plurality of the storage walls are sequentially connected at the ends; A storage space is formed between the plurality of storage walls, and the storage space is used to place the sensor; Wherein, the thickness of the plurality of storage walls is between 0.5 and 5 mm; the thickness of the plurality of storage walls are the same or different.
2. The magnetic shielding shell structure according to claim 1, characterized in that: The shielding shell (100) is provided with four storage walls, the four storage walls are connected in sequence, and the accommodation space between the four storage walls is rectangular.
3. The magnetic shielding shell structure according to claim 1 or 2, characterized in that: The shielding shell (100) is made of a conductive material with good conductive properties.
4. The magnetic shielding shell structure according to claim 3, characterized in that: The thickness of the shielding shell (100) is 5 mm.
5. The magnetic shielding shell structure according to claim 4, characterized in that: The projection of the accommodating space of the shielding shell (100) on the horizontal plane coincides with the projection of the sensor on the horizontal plane.
6. The magnetic shielding shell structure according to claim 5, characterized in that: The thicknesses of the four storage walls of the shielding shell (100) are all the same.
7. The magnetic shielding shell structure according to claim 5, characterized in that: The thicknesses of two corresponding walls of the shielding shell (100) are the same, and the thicknesses of two adjacent walls are different.
8. A preferred method, comprising the magnetic shielding shell structure according to claims 1 to 7, the preferred method comprising: Selecting a plurality of shielding shells (100) having different thicknesses and the same inner diameter; Performing simulation on the selected shielding shell (100); Comparing a plurality of simulation results generated by a plurality of selected shielding shells (100); Output a set of thickness data of a shielding shell (100) with the best shielding performance.
9. The preferred method according to claim 6, characterized in that: The shielding shell (100) with the storage wall thickness of 0.5 mm and 5 mm is selected for simulation respectively; When the thickness of the storage wall is 0.5 mm, the shielding of the magnetic field y component is reduced by 3 orders of magnitude, and the increase of the electric field is increased by 1 to 2 orders of magnitude; When the thickness of the storage wall is 5 mm, the magnetic field shielding of the shielding shell (100) is reduced by 3 orders of magnitude.
10. The preferred method according to claim 9, characterized in that: The shielding performance of the shielding case (100) is output when the thickness of the storage wall is 5 mm.