Nanometer 3D printing device and method based on uniform large-area printing

Abstract

According to the nano 3D printing device and method based on uniform large-area printing, relative movement is generated between the substrate and the charged particle outlet, so that the staying time of the printing outlet above any position of the substrate is the same, and charged nano particles which are originally unevenly distributed at the position of the printing outlet are evenly scattered on the substrate; and the total amount of the charged nanoparticles printed at any position on the substrate within the same time is the same, so that uniform printing within a large-area range is realized. And a plurality of charged nano particle sources can be arranged, so that the printing speed is further improved, different materials can be printed at the same or different positions of the substrate, and the composite nano-structure array in which the materials are randomly mixed is realized.

Description

Technical Field

[0001] The present invention relates to the technical field of nano 3D printing, and in particular to a nano 3D printing device and method based on uniform large-area printing. Background Art

[0002] As a new type of metal nano 3D printing technology, Faraday 3D printing transports charged nanoparticles into the electric field space through the flow field, and then controls the movement of charged nanoparticles through the coupling of the electric field and the flow field, so that they migrate to specific locations and assemble into nano 3D structures. This technology has small printing feature sizes, a wide variety of printable materials, and can print thousands of nanostructures in a single array. It is expected to shine in the field of chip manufacturing and microelectronics. However, its unevenness in large-area printing limits its production applications. When the printing area exceeds 0.1cm 2 The extremely non-uniformity is shown when printing, which is mainly limited by the following effects of the flow field and electric field on the concentration of charged particles during printing:

[0003] 1. When charged particles move along the flow field, they will form an uneven distribution in the transport pipeline, resulting in uneven distribution over a large area of ​​the substrate.

[0004] 2. Under the action of the electric field, a large number of charged nanoparticles are captured by the electric field upstream for printing, resulting in a concentration difference in the upstream and downstream directions. Summary of the invention

[0005] In view of the shortcomings of the prior art mentioned above, the purpose of the present invention is to provide a nano 3D printing device and method based on uniform large-area printing, which is used to solve the technical problems in the prior art that charged particles will form an uneven distribution in the transport pipeline during the movement of the flow field, resulting in uneven distribution over a large area substrate, and a large number of charged nanoparticles will be captured by the electric field upstream for printing under the action of the electric field, resulting in concentration differences in the upstream and downstream directions.

[0006] To achieve the above-mentioned purpose and other related purposes, the present invention provides a nano 3D printing device based on uniform large-area printing, the device comprising: a charged nanoparticle source, a printing outlet opened in a charged nanoparticle delivery channel, an electrode plate arranged in the charged nanoparticle delivery channel and directly above the printing outlet, and a substrate arranged directly below the printing outlet; an electric field is applied between the electrode plate and the substrate, and the charged nanoparticles generated by the charged nanoparticle source are pulled out of the charged nanoparticle delivery channel from the printing outlet and printed at the corresponding position of the substrate; by relatively moving the substrate and the printing outlet, and making the printing outlet stay above each position on the substrate for the same time, the total amount of charged nanoparticles printed at any position on the substrate within the same time is correspondingly allocated, thereby achieving large-area uniform printing on the substrate.

[0007] In one embodiment of the present invention, there are multiple charged nanoparticle sources, and each charged nanoparticle source corresponds to a type of charged nanoparticle material.

[0008] In one embodiment of the present invention, the charged nanoparticle sources use different charged nanoparticle materials.

[0009] In one embodiment of the present invention, the substrate and the printing outlet are relatively moved and each charged nanoparticle source is controlled to print nanostructures composed of different materials at different positions or the same position of the substrate.

[0010] In one embodiment of the present invention, when the printing outlets are moved to different positions above the substrate, each charged nanoparticle source is switched on and off and concentration controlled differently at each position than at other positions, so that nanostructures composed of different materials can be printed at different positions on the substrate.

[0011] In one embodiment of the present invention, when the printing outlet moves to a position above the substrate, each charged nanoparticle source is switched on and off and concentration controlled differently at the current position, so that nanostructures composed of different materials can be printed at the same position on the substrate.

[0012] In one embodiment of the present invention, when the printing outlet moves to different positions on the substrate, the printing outlet is controlled to stay for different times above different positions on the substrate according to uneven printing requirements, so that nanostructures with different structures are printed at different positions on the substrate.

[0013] In one embodiment of the present invention, a screening sheath flow is applied to control the size of the printed nanoparticles and ensure that uncharged nanoparticles cannot escape from the nozzle.

[0014] In one embodiment of the present invention, the air pressure outside the charged nanoparticle delivery channel is consistent with the air pressure inside the charged nanoparticle delivery channel to ensure that uncharged nanoparticles cannot escape from the nozzle.

[0015] In one embodiment of the present invention, the electrode plate and the substrate are connected to an external power source to apply an electric field.

[0016] To achieve the above-mentioned purpose and other related purposes, the present invention provides a metal nano 3D printing method based on uniform large-area printing, which is applied to the nano 3D printing device based on uniform large-area printing. The method comprises: applying an electric field between the electrode plate and the substrate, pulling the charged nanoparticles generated by the charged nanoparticle source from the printing outlet out of the charged nanoparticle transport channel, and printing at the corresponding position of the substrate; by relatively moving the substrate and the printing outlet, and making the printing outlet stay above each position on the substrate for the same time, so that the total amount of charged nanoparticles printed at any position on the substrate in the same time is the same, thereby achieving large-area uniform printing on the substrate.

[0017] As described above, the present invention is a nano 3D printing device and method based on uniform large-area printing, which has the following beneficial effects: the present invention generates relative movement between the substrate and the charged particle outlet, so that the printing outlet stays at any position of the substrate for the same time, so that the charged nanoparticles originally unevenly distributed at the printing outlet are evenly scattered on the substrate, so that the total amount of charged nanoparticles printed at any position on the substrate in the same time is the same, thereby achieving uniform printing over a large area. In addition, the printing speed can be further increased by setting multiple charged nanoparticle sources, and different materials can be printed at the same or different positions on the substrate and a composite nanostructure array with any mixture thereof can be achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 Shown is a schematic structural diagram of a nano 3D printing device based on uniform large-area printing in one embodiment of the present invention.

[0019] Figure 2 Shown is a schematic structural diagram of a nano 3D printing device based on uniform large-area printing in one embodiment of the present invention.

[0020] Figure 3 Shown is a cross-sectional view of a nano 3D printing device based on uniform large-area printing in one embodiment of the present invention.

[0021] Figure 4 Shown is a top view of a nano 3D printing device based on uniform large-area printing in one embodiment of the present invention. DETAILED DESCRIPTION

[0022] The following describes the embodiments of the present invention by specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0023] It should be noted that in the following description, reference is made to the accompanying drawings, which describe several embodiments of the present invention. It should be understood that other embodiments may also be used, and that mechanical composition, structure, electrical and operational changes may be made without departing from the spirit and scope of the present invention. The following detailed description should not be considered restrictive, and the scope of the embodiments of the present invention is limited only by the claims of the published patents. The terms used herein are only for describing specific embodiments and are not intended to limit the present invention. Spatially related terms, such as "upper", "lower", "left", "right", "below", "below", "lower", "above", "upper", etc., may be used in the text to facilitate the description of the relationship between an element or feature shown in the figure and another element or feature.

[0024] Throughout the specification, when a part is said to be "connected" to another part, this includes not only the case of "direct connection" but also the case of "indirect connection" by placing other elements therebetween. In addition, when a part is said to "include" a certain constituent element, unless otherwise stated, it does not exclude other constituent elements, but means that other constituent elements may be included.

[0025] The terms first, second and third mentioned herein are used to describe various parts, components, regions, layers and / or segments, but are not limited thereto. These terms are only used to distinguish a certain part, component, region, layer or segment from other parts, components, regions, layers or segments. Therefore, the first part, component, region, layer or segment described below may refer to the second part, component, region, layer or segment within the scope of the present invention.

[0026] Furthermore, as used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless there is an indication to the contrary in the context. It should be further understood that the terms "comprise", "include" indicate the presence of the described features, operations, elements, components, items, kinds, and / or groups, but do not exclude the presence, occurrence or addition of one or more other features, operations, elements, components, items, kinds, and / or groups. The terms "or" and "and / or" used herein are interpreted as inclusive, or mean any one or any combination. Therefore, "A, B or C" or "A, B and / or C" means "any of the following: A; B; C; A and B; A and C; B and C; A, B and C". Exceptions to this definition will only occur when the combination of elements, functions or operations is inherently mutually exclusive in some way.

[0027] The present invention provides a nano 3D printing device based on uniform large-area printing, which makes the printing outlet stay for the same time above any position of the substrate by relative movement between the substrate and the charged particle outlet, so that the charged nanoparticles originally unevenly distributed at the printing outlet position are evenly scattered on the substrate, so that the total amount of charged nanoparticles printed at any position on the substrate in the same time is the same, thereby achieving uniform printing over a large area. In addition, multiple charged nanoparticle sources can be set to further increase the printing speed and realize the printing of different materials at the same or different positions of the substrate and realize the composite nanostructure array of arbitrary mixing thereof.

[0028] The following is a detailed description of the embodiments of the present invention with reference to the accompanying drawings so that those skilled in the art can easily implement the present invention. The present invention can be embodied in many different forms and is not limited to the embodiments described herein.

[0029] like Figure 1 A schematic structural diagram of a nano 3D printing device based on uniform large-area printing in an embodiment of the present invention is shown.

[0030] The device comprises: a printing outlet 1, a plate 2, a substrate 3 and a charged nanoparticle source (not shown in the figure). The inner wall 4 of the device cavity forms a charged nanoparticle transport channel, providing necessary space and path for the transport of charged nanoparticles.

[0031] The printing outlet 1 is opened in the charged nanoparticle delivery channel, and is the outlet where the charged nanoparticles are guided out of the delivery channel and deposited on the substrate 3. The size of the printing outlet 1 can be flexibly set according to specific needs. For example, its area range is 0.1mm 2 Up to 10cm 2This range covers printing needs from small fine structures to large patterns or coatings. By adjusting the size of the print outlet, the number and distribution of nanoparticles deposited on the substrate can be precisely controlled to achieve the desired printing effect. The shape of the print outlet 1 can also be customized according to needs. For example, common shapes include circular, square, etc., which can meet the needs of most printing tasks. In addition, other shapes such as ellipses, rectangles, polygons, etc. can be designed according to specific application scenarios to optimize the deposition effect of nanoparticles and the accuracy of printed patterns.

[0032] The electrode plate 2 is arranged in the charged nanoparticle delivery channel and is located directly above the printing outlet 1. The electrode plate 2 is used to form an electric field together with the substrate 3, which is the key to guiding the charged nanoparticles to be pulled out from the printing outlet 1 and deposited on the substrate 3. The action of the electric field force ensures that the nanoparticles can be accurately deposited along a predetermined path. According to application requirements, the specific material of the electrode plate 2 can be selected from materials with excellent conductive properties such as metal. Metal materials not only have good conductivity and stability, but are also easy to process and form, and can meet design requirements of different shapes and sizes. The shape and size of the electrode plate 2 can be customized according to the requirements of the electric field distribution.

[0033] The substrate 3 is located directly below the printing outlet 1 and is the target surface for the charged nanoparticles to be deposited. The material and size of the substrate 3 can be selected according to the printing requirements to ensure that the nanoparticles can be stably deposited thereon and form the desired pattern or coating. The substrate 3 is used to apply an electric potential together with the electrode 2, thereby forming an electric field between the electrode 2 and the substrate 3. Preferably, as Figure 1 The electrode plate 2 and the substrate 3 are connected to an external power source 5 to apply an electric field.

[0034] The charged nanoparticle source generates charged nanoparticles and forms a charged nanoparticle flow 6 , which flows into the charged nanoparticle transport channel.

[0035] The printing process of the device includes: first, applying an electric field between the electrode 2 and the substrate 3, and the charged nanoparticles generated by the charged nanoparticle source flow into the charged nanoparticle transport channel. Under the action of the electric field, the charged nanoparticles flow into the charged nanoparticle transport channel. The charged nanoparticles are pulled out from the printing outlet 1 and deposited on the substrate 3 along the direction of the electric field lines to form the desired printing pattern or coating.

[0036] In order to achieve uniform printing over a large area, the substrate 3 and the print outlet 1 are relatively moved, and the print outlet 1 can stay for the same time above each position on the substrate. Since the stay time is the same and each movement is at a uniform speed, the total amount of charged nanoparticles received by each position in the same time is also the same, thereby achieving uniform printing over a large area. The speed of the relative movement of the substrate 3 and the print outlet 1 can be set according to demand; preferably, the speed of the relative movement of the substrate 3 and the print outlet 1 is 0.1 mm / min to 1 m / min.

[0037] It should be noted that the relative movement of the substrate 3 and the print outlet 1 can be flexible: the first way is that the print outlet 1 is stationary and the substrate 3 moves. In this configuration, the print outlet 1 is fixed at a certain position, and the substrate 3 is moved by a mechanical device (such as a conveyor belt, a motor-driven slide, etc.). The second way is that the print outlet 1 moves and the substrate 3 is stationary. In this configuration, the substrate 3 remains fixed, and the print outlet 1 is moved by a mechanical device. The third way is that both the print outlet 1 and the substrate 3 move, but relative movement occurs. In this configuration, both the print outlet 1 and the substrate 3 move by a mechanical device, but they maintain a fixed distance of relative movement between them.

[0038] In addition, the relative movement path between the substrate 3 and the print outlet 1 is designed according to requirements to ensure that the print outlet 1 covers all target positions of the substrate 3. For example, the print outlet 1 moves in a serpentine uniform scanning manner, and its scanning range covers the entire substrate 3.

[0039] In one embodiment, the charged nanoparticle source can generate charged nanoparticles by spark pulse discharge, flame method and electrospray. Specifically, spark pulse discharge uses high voltage to generate a strong electric field in a short time, causing the atoms or molecules in the gas or liquid to ionize, thereby forming charged particles. When these charged particles collide with the surrounding atoms or molecules, they will also be ionized, forming a chain reaction, and ultimately generating a large number of charged nanoparticles. The flame method is to use a high-temperature flame to rapidly decompose, oxidize or reduce the precursor material (such as metal salts, metal organic compounds, etc.) to generate charged nanoparticles. Electrospray uses a high-voltage electric field to atomize the liquid precursor into tiny charged droplets, and then these droplets further split and evaporate under the action of the electric field force, and ultimately generate charged nanoparticles.

[0040] In one embodiment, the relative movement area between the substrate 3 and the printing outlet 1 can reach 1 mm. 2 ~100m 2 The achievable uniform printing area range is 0 to 100 m 2The specific area depends on the size and precision of the printing device and the relative movement of the substrate and the printing outlet during the printing process. This range means that the scheme of the present invention can be applied to printing tasks of various sizes and shapes, from small micro-nano structures to large planar structures.

[0041] In one embodiment, since a single charged nanoparticle source can achieve uniform large-area printing, the distribution of charged nanoparticles at the printing outlet 1 no longer affects the printing uniformity, and increasing the number of charged nanoparticle sources will not destroy this uniformity. Therefore, this solution can further increase the printing speed by increasing the number of charged nanoparticle sources, that is, in order to increase the printing speed, the charged nanoparticle sources are multiple. The number of the charged nanoparticle sources can be set according to demand, for example, 1 to 100.

[0042] Each charged nanoparticle source corresponds to a charged nanoparticle material. This means that different types of materials can be selected according to printing requirements and the particle sources can be configured accordingly. In addition, the charged nanoparticle materials of each charged nanoparticle source can be the same or different, which makes it possible to print multiple materials or composite materials.

[0043] As can be seen from the above, by setting up multiple charged nanoparticle sources and performing relative movement between the substrate 3 and the printing outlet 1, it is possible to print nanostructures composed of the same material at the same position or different positions on the substrate 3, and it is also possible to print nanostructures composed of different materials at the same position or different positions on the substrate.

[0044] First, the following embodiments are used to illustrate the printing of nanostructures composed of different materials at different positions or the same position of a substrate. In this case, the charged nanoparticles used by the charged nanoparticle sources are different in material.

[0045] In one embodiment, the substrate 3 and the print outlet 1 are relatively moved and the charged nanoparticle sources of different charged nanoparticle materials are controlled to print nanostructures composed of different materials at different positions or the same position of the substrate 3. The relative movement of the substrate 3 and the print outlet 1 is the basis for realizing multi-position printing, which can ensure that the print outlet 1 can accurately reach each target position above the substrate 3. Controlling the charged nanoparticle source can include switching different types of charged nanoparticle sources, which allows different types of nanoparticles to be flexibly switched during the printing process, thereby forming a complex nanostructure composed of different materials on the substrate 3. In addition to the switch control, the number and density of nanoparticles deposited on the substrate 3 can also be affected by adjusting the concentration of the charged nanoparticle source. This helps to fine-tune the physical and chemical properties of the nanostructure.

[0046] In a specific embodiment, in order to print nanostructures composed of different materials at different positions on the substrate 3, when the printing outlet 1 moves to different positions above the substrate 3, each charged nanoparticle source is switched on and off and concentration controlled differently from other positions at each position, so that nanostructures composed of different materials can be printed at different positions on the substrate 3.

[0047] Specifically, when the printing outlet 1 moves to each position above the substrate 3, each charged nanoparticle source can be switched on and off differently from other positions. This means that specific charged nanoparticle sources can be turned on or off at different positions as needed, and different switching durations of charged nanoparticle sources can also be controlled. For example, at position A, the charged nanoparticle source of material 1 can be turned on, and at position B, the charged nanoparticle source of material 2 can be turned on. In addition to switch control, each charged nanoparticle source can also be controlled at a concentration different from other positions. This allows the charged nanoparticle source to be controlled at a concentration different from other positions at each printing position. For example, at position A, the charged nanoparticle source 1 is controlled to be at a concentration of 1, and at position B, the charged nanoparticle source 1 is controlled to be at a concentration of 2. Thus, at each position, each charged nanoparticle source is switched on and off differently from other positions, and concentration control can be performed, so that nanostructures composed of different materials can be printed at different positions of the substrate 3. This method allows different types of nanoparticles to be flexibly switched during the printing process, and their concentrations to be adjusted to suit different printing tasks and application scenarios.

[0048] In a specific embodiment, in order to print nanostructures composed of different materials at the same position on the substrate 3, when the printing outlet 1 moves to a position above the substrate 3, different switches and concentration controls are performed on each charged nanoparticle source at the current position, so that nanostructures composed of different materials can be printed at the same position on the substrate 3.

[0049] Specifically, when the print outlet 1 moves to the current position above the substrate 3, a charged nanoparticle source of different charged nanoparticle material types is selected to be turned on. In addition to selecting a specific charged nanoparticle source, the duration of its opening can also be controlled. By accurately controlling the switch duration, the deposition amount of each material on the substrate 3 can be adjusted, thereby affecting the morphology and composition of the final nanostructure. For the turned-on charged nanoparticle source, concentration control can be further performed, which means that even if multiple charged nanoparticle sources are turned on at the same time, the material concentration of each charged nanoparticle source can be independently adjusted. The difference in concentration can affect the deposition rate, uniformity and characteristics of the final nanostructure of the material. Thus, different switches and concentration controls are performed on each charged nanoparticle source at the current position, so that nanostructures of different materials can be printed at the same position of the substrate 3. This method can construct nanostructures with complex composition and morphology at the same position, providing the possibility for developing new materials and devices with multifunctionality.

[0050] Next, the following embodiments are used to illustrate how nanostructures made of the same material can be printed at the same position or different positions on a substrate.

[0051] In one embodiment, the substrate 3 and the printing outlet 1 are relatively moved and each charged nanoparticle source is controlled so as to print nanostructures composed of the same material at different positions or the same position of the substrate 3 .

[0052] In one embodiment, in order to print a nanostructure of the same material at the same position on the substrate 3, when the print outlet 1 moves to a position above the substrate 3, if all the charged nanoparticle sources use the same type of charged nanoparticle material, multiple particle sources are simultaneously turned on and their concentrations are controlled to be the same, so as to ensure that the nanostructure composed of the same material is printed at this position. If the charged nanoparticle sources use different types of materials, only the charged nanoparticle sources of the same material are turned on, and their concentrations are also controlled to be the same, so as to print the nanostructure composed of the same material at the same position on the substrate 3.

[0053] In order to print nanostructures of the same material at different positions on the substrate 3, when the printing outlet 1 is moved to different positions above the substrate 3, the same charged nanoparticle source control method as other positions is adopted at each position, that is, the same charged nanoparticle source as other positions is turned on and its concentration is controlled to remain consistent, so as to ensure that nanostructures composed of the same material are printed at different positions.

[0054] In one embodiment, the present invention can also perform uneven printing according to requirements; specifically, when the printing outlet 1 moves to different positions above the substrate 3, the printing outlet 1 is controlled to stay at different times above different positions on the substrate 3 according to the uneven printing requirements, so that nanostructures with different structures are printed at different positions on the substrate 3. By using different residence times to accurately deposit the amount, it is ensured that nanostructures with different structures can be accurately and stably printed at different positions on the substrate, so as to fully meet the diversified and complex printing requirements, and greatly expand the application scenarios and adaptation scope of the present invention in the field of nanomanufacturing.

[0055] In one embodiment, a screening sheath flow is applied, which can be parallel to the spark gas flow and perpendicular to the electric field;

[0056] Applying screening sheath flow has two key functions: first, it makes full use of the antagonistic mechanical properties between the carefully constructed flow field and the electric field. When the uncharged nanoparticles are affected by various factors inside the nozzle and are about to escape from the nozzle, the force applied by the flow field can just offset the escape momentum of the particles, just like building a solid "barrier" on the particle escape path, effectively preventing the uncharged nanoparticles from leaving the nozzle, and effectively ensuring the orderly progress of the printing operation; second, by finely adjusting the flow rate, flow direction and other related physical quantities of the screening sheath flow, the size of the nanoparticles involved in the printing can be accurately screened and dynamically controlled according to the printing requirements, so that the nanoparticles that finally participate in the construction of the printing structure meet the preset size standards, providing a solid guarantee for achieving high-quality and high-precision printing results.

[0057] In one embodiment, the relative distance between the printing outlet 1 and the substrate 3 can be designed to be 0-10 cm, which is conducive to the stability of the flow field and the structure of the entire printing device can be designed to be more compact. The shorter printing distance reduces the space required for the printing device, making the entire device more compact and lightweight.

[0058] In one embodiment, during the printing process, there may be uncharged microparticles, dust or other pollutants. If these pollutants enter the printing area, they may adhere to the substrate and have an adverse effect on the printing quality. Therefore, a protective airflow is introduced at the printing outlet 1 in the charged nanoparticle delivery channel, and a barrier can be formed at the printing outlet 1 to effectively prevent these uncharged substances from entering the printing area, prevent the uncharged substances from contaminating the substrate, and ensure the printing quality. Among them, the protective airflow can use an inert gas (such as nitrogen, argon, etc.) or dry air as a gas source. These gases have the characteristics of stable chemical properties and are not easy to react with charged nanoparticles, and are therefore suitable as protective airflow.

[0059] In order to better describe the nano 3D printing device based on uniform large-area printing, a specific embodiment is now described.

[0060] Embodiment: A nano 3D printing device based on uniform large-area printing. Figures 2 to 4 Schematic diagram of the structure of the nano 3D printing device based on uniform large-area printing in this embodiment.

[0061] like Figure 2 as well as Figure 3 The nano 3D printing device comprises: five spark plugs 7, five metal connecting tubes 8 respectively connected to the spark plugs 7, a structural body 9, a metal upper plate 2, a substrate 3 and a printing outlet 1. Figure 4 As shown, the printing outlet 1 is cleverly opened at the bottom of the structural body 9, so that the charged nanoparticles can be smoothly pulled out from here and accurately printed on the substrate 3. The size of the printing outlet 1 is 10mm×30mm. This size design allows the charged nanoparticles generated by the five sparks to be smoothly output. An electric field is applied between the metal upper plate 2 and the substrate 3 through an external power supply. The function of this electric field is to pull out the charged nanoparticles in the printing channel and guide them to form the required printing pattern on the substrate 3. The field strength is precisely controlled within the range of 0.1 to 10kV / cm to ensure the stability and accuracy of the printing process. Each spark plug 6 produces charged nanoparticles by loading a metal electrode and connecting an external circuit. The value of the spark capacitor C used is 0.1 to 10nF, the spark breakdown voltage is also set within the range of 0.1 to 10kV / cm, and the frequency of the spark reaches 10 to 1000Hz. These charged nanoparticles are transported to the printing outlet 1 by inert gas at a gas velocity of 0.1 to 10 L / min. At the printing outlet 1, a protective gas flow is also provided, and its gas velocity is also in the range of 0.1 to 10 L / min. This design is intended to prevent the contamination of the substrate by non-charged substances and ensure the printing quality. The substrate 3 is a silicon wafer with patterned photoresist. The area of ​​the silicon wafer substrate can be 1 cm 2 ~1000cm 2 The print outlet 1 is moved by the precise control of the XYZ three-axis motor to ensure that the distance between the print outlet 1 and the substrate 3 is kept within the range of 0.1mm to 5mm during the printing process. The print outlet 1 moves in a serpentine uniform scanning manner, and its scanning range not only covers the entire substrate 3, but also exceeds the substrate area by the length and width of a print nozzle to ensure the integrity and accuracy of the printing.

[0062] Similar to the principle of the above embodiment, the present invention provides a metal nano 3D printing control method based on uniform large-area printing. The method is applied to the above-mentioned nano 3D printing device based on uniform large-area printing, and the method includes:

[0063] Applying an electric field between the electrode plate and the substrate to pull the charged nanoparticles generated by the charged nanoparticle source from the printing outlet out of the charged nanoparticle transport channel and print at a corresponding position of the substrate;

[0064] By moving the substrate and the printing outlet relative to each other and making the printing outlet 1 stay above each position on the substrate for the same time, the total amount of charged nanoparticles printed at any position on the substrate in the same time is made the same, thereby achieving large-area uniform printing on the substrate.

[0065] Since the implementation principle of the metal nano 3D printing method based on uniform large-area printing has been described in the aforementioned embodiments, it will not be repeated here.

[0066] In summary, the nano 3D printing device and method based on uniform large-area printing of the present invention, through the relative movement of the substrate and the charged particle outlet, makes the printing outlet stay above any position of the substrate for the same time, so that the charged nanoparticles originally unevenly distributed at the printing outlet position are evenly spread on the substrate, so that the total amount of charged nanoparticles printed at any position on the substrate in the same time is the same, thereby achieving uniform printing over a large area. In addition, the printing speed can be further increased by setting multiple charged nanoparticle sources, and different materials can be printed at the same or different positions of the substrate and a composite nanostructure array can be achieved with any mixture thereof. Therefore, the present invention effectively overcomes various shortcomings in the prior art and has a high industrial utilization value.

[0067] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or change the above embodiments without violating the spirit and scope of the present invention. Therefore, all equivalent modifications or changes made by a person of ordinary skill in the art without departing from the spirit and technical ideas disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. A nano 3D printing device based on uniform large-area printing, characterized in that: The device comprises: A charged nanoparticle source, a printing outlet opened in the charged nanoparticle delivery channel, an electrode plate arranged in the charged nanoparticle delivery channel and directly above the printing outlet, and a substrate arranged directly below the printing outlet; Applying an electric field between the electrode plate and the substrate to pull the charged nanoparticles generated by the charged nanoparticle source from the printing outlet out of the charged nanoparticle transport channel and print at a corresponding position of the substrate; By moving the substrate and the printing outlet relative to each other and making the printing outlet stay above each position on the substrate for the same time, the total amount of charged nanoparticles printed at any position on the substrate in the same time is adjusted accordingly, thereby achieving large-area uniform printing on the substrate.

2. The nano 3D printing device based on uniform large-area printing according to claim 1, characterized in that: There are multiple charged nanoparticle sources, and each charged nanoparticle source corresponds to a charged nanoparticle material.

3. The nano 3D printing device based on uniform large-area printing according to claim 2, characterized in that: The charged nanoparticle materials used in each charged nanoparticle source are different.

4. The nano 3D printing device based on uniform large-area printing according to claim 3, characterized in that: By relatively moving the substrate and the printing outlet and controlling each charged nanoparticle source, nanostructures composed of different materials can be printed at different positions or the same position of the substrate.

5. The nano 3D printing device based on uniform large-area printing according to claim 4, characterized in that: When the printing outlets are moved to different positions above the substrate, each charged nanoparticle source is switched on and off and concentration controlled differently at each position than at other positions, so that nanostructures composed of different materials can be printed at different positions on the substrate.

6. The nano 3D printing device based on uniform large-area printing according to claim 4, characterized in that: When the printing outlet moves to a position above the substrate, each charged nanoparticle source is switched on and off differently and concentration controlled at the current position, so that nanostructures composed of different materials can be printed at the same position on the substrate.

7. The nano 3D printing device based on uniform large-area printing according to claim 1, characterized in that: When the printing outlet is moved to different positions on the substrate, the printing outlet is controlled to stay for different times above different positions on the substrate according to the uneven printing requirements, so that nanostructures with different structures are printed at different positions on the substrate.

8. The nano 3D printing device based on uniform large-area printing according to claim 1, characterized in that: By applying a screening sheath flow, the printed nanoparticle size is controlled and uncharged nanoparticles cannot escape from the printhead.

9. The nano 3D printing device based on uniform large-area printing according to claim 1, characterized in that: The electrode plate and the substrate are connected to an external power source to apply an electric field.

10. A metal nano 3D printing method based on uniform large-area printing, characterized in that: A nano 3D printing device based on uniform large-area printing according to any one of claims 1 to 9, wherein the method comprises: Applying an electric field between the electrode plate and the substrate to pull the charged nanoparticles generated by the charged nanoparticle source from the printing outlet out of the charged nanoparticle transport channel and print at a corresponding position of the substrate; By moving the substrate and the printing outlet relative to each other and making the printing outlet stay above each position on the substrate for the same time, the total amount of charged nanoparticles printed at any position on the substrate in the same time is made the same, thereby achieving large-area uniform printing on the substrate.

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