A method for detecting the warping stability of a glass substrate and a glass grinding device

Abstract

The application discloses a kind of glass substrate warping stability detection method and a kind of glass grinding equipment, it is related to the detection field of glass substrate, glass substrate warping stability detection method includes to glass is pretreated processing, and the high-temperature baking and cooling of pretreated processing glass are carried out;The warping value of the glass after cooling is detected and high-temperature baking is carried out again, and repeated execution is carried out multiple times;The warping value after multiple detections is data summarized, and the data after summarizing is arranged to select the glass of warping degree qualified and the glass of warping degree unqualified;The glass of warping degree unqualified is corrected, and the glass after warping correction is detected, to detect the warping value of glass, and select qualified product and unqualified product, the method is simulated glass in different temperature conditions by multiple high-temperature baking and detection, to predict and prevent the warping phenomenon that may appear in actual use.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of glass substrate detection, in particular to a glass substrate warping stability detection method and a glass grinding device. BACKGROUND

[0002] With the vigorous development of display panel industry at home and abroad, domestic display panel technology has also developed rapidly. Glass substrate is a key glass material of thin film transistor, and as an important part of panel, it has become particularly important. In the process of liquid crystal display, the warping of glass substrate is particularly important. Once the glass substrate warping is unstable and changes during the process, it will greatly damage the probe and other precision devices of the process equipment, causing irreparable loss. Therefore, in the production of glass substrate, it is necessary to strictly control the warping of glass substrate. However, at present, glass substrate manufacturers mainly control the warping quality of glass substrate itself. When other quality parameters meet the control standard and the warping also meets the control standard, packaging is carried out. Almost no warping evaluation and detection are carried out for the process of multiple high-temperature baking required by liquid crystal display. Therefore, in the process of liquid crystal display, it is difficult to ensure that the warping of glass substrate will not change due to multiple high-temperature baking. SUMMARY

[0003] In order to solve the problems in the prior art, the present application provides a glass substrate warping stability detection method, comprising:

[0004] Step 1: pretreating and processing the glass, and high-temperature baking the pretreated and processed glass;

[0005] Step 2: cooling the glass after high-temperature baking;

[0006] Step 3: detecting the warping value of the cooled glass;

[0007] Step 4: high-temperature baking the detected glass again, and repeating steps 1-3 multiple times;

[0008] Step 5: data summarizing the warping values detected multiple times, and arranging the summarized data to select glass with qualified warping degree and glass with unqualified warping degree;

[0009] Step 6: warping correction of the glass with unqualified warping degree, and executing steps 1-3 on the glass after warping correction to detect the warping value of the glass, and selecting qualified products and unqualified products, storing the qualified products, and discarding the unqualified products;

[0010] In step 1, the temperature range of high-temperature baking is 200-250℃;

[0011] The step 6, the warping correction includes:

[0012] Step 601: rotating grinding the glass by a glass grinding device;

[0013] Step 602: wet etching the ground glass;

[0014] Step 603: detecting the warping degree of the glass after wet etching, when the glass is qualified glass, storing the qualified glass, and when the glass is unqualified glass, discarding the unqualified glass;

[0015] In the step 601, the glass grinding device is provided with grinding pressure, grinding speed and grinding particle size, the grinding pressure includes 100g-500g, the grinding speed includes 10r / min-40r / min, and the grinding particle size includes 3μm-4μm.

[0016] Optionally, in some embodiments of the present application, the step 1, the glass includes pre-stabilized glass and post-stabilized glass, the pre-stabilized glass includes glass before heating in pre-processing, and the post-stabilized glass includes glass after heating in pre-processing.

[0017] The pre-processing of the glass includes cutting the glass, and the size of the cutting is 500mm 500mm.

[0018] Optionally, in some embodiments of the present application, the step 3, the warping value includes a warping maximum deviation and a warping average deviation.

[0019] Optionally, in some embodiments of the present application, the step 5, when the warping maximum deviation is ≤0.01mm and the warping average deviation is ≤0.005mm, the glass is qualified glass.

[0020] Optionally, in some embodiments of the present application, the step 602, the wet etching includes an etching liquid, and the etching liquid is mixed by hydrochloric acid and phosphoric acid.

[0021] Optionally, in some embodiments of the present application, the volume ratio of the hydrochloric acid to the phosphoric acid is 1:3.

[0022] Compared with the prior art, the beneficial effects in the present application are:

[0023] 1. By detecting the warping stability of the glass in depth, potential warping problems can be found and solved in time, thereby ensuring the quality and stability of the final product. This helps to improve the market competitiveness of the product and meet more stringent quality requirements.

[0024] 2. The method can simulate the changes of glass under different temperature conditions through multiple high-temperature baking and detection, thereby predicting and preventing the warping phenomenon that may occur in actual use, which helps to reduce product scrap and rework caused by warping, and reduce production cost.

[0025] 3. By analyzing the detection data, the warping changes of glass at different processing stages can be understood, and the production process can be optimized, for example, adjusting the baking temperature, time or grinding parameters, etc., to improve the warping stability of glass.

[0026] 4. For unqualified products found in detection, the method provides effective correction measures such as grinding correction and wet etching treatment, which helps to reduce product scrap rate and improve resource utilization. BRIEF DESCRIPTION OF DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0028] Figure 1 The overall flowchart of the detection method for evaluating the warping stability of the glass substrate provided by the embodiments of the present application is shown.

[0029] Figure 2 The overall structure diagram of the glass grinding equipment provided by the embodiments of the present application is shown.

[0030] Explanation of reference signs:

[0031] 100, grinding disc; 200, driving device; 300, pressurizing device; 310, pressurizing groove; 320, pressurizing piece. DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, not all. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor are within the protection scope of the present application. It can be understood that the drawings are only provided for reference and illustration, and are not used to limit the present application. The connection relationship shown in the drawings is only for clear description, and does not limit the connection mode.

[0033] Specifically, as Figure 1As shown, the embodiment of the present application provides a glass substrate warping stability detection method, which mainly detects the warping stability of the glass. The purpose is to avoid the warping of the glass in the later stage. In order to avoid this situation, the glass needs to be detected for warping multiple times in the embodiment of the present application. First, the glass to be detected needs to be processed and pre-processed. The glass that needs to be pre-processed includes the glass before stabilization and the glass after stabilization. The glass before stabilization is the glass that needs to be preliminarily heated after being produced. This glass rarely occurs warping phenomenon and can be used as a control test for test detection. The glass after stabilization is the glass that is preliminarily heated after being produced. Since the occurrence of the glass warping phenomenon is affected by the temperature, the glass after preliminary heating has a probability of occurrence of the warping phenomenon, but it is not obvious. In order to highlight the warping phenomenon, multiple baking detections need to be performed on the two kinds of glass to make a comparison effect.

[0034] In the embodiment of the present application, the pre-processing mainly includes: cutting the glass, and the cutting size is 500 500mm, and the cut glass is cleaned by ultrapure water.

[0035] In the above, the cut glass is divided into 8 pieces, which are 4 pieces of glass before stabilization and are labeled as Q1, Q2, Q3 and Q4, and 4 pieces of glass after stabilization and are labeled as H1, H2, H3 and H4.

[0036] After the glass is pre-processed, the glass before stabilization and the glass after stabilization are subjected to high-temperature baking. The high-temperature baking is performed by an electric heating oven. First, the electric heating oven is heated from room temperature to 230℃ for 50min, and then is kept at 230℃.

[0037] Preferably, the temperature range in the high-temperature baking in the embodiment of the present application can be selected as 200℃-250℃. In this range, the glass can have a good warping catalysis effect and does not affect other properties of the glass.

[0038] In the electric heating oven, the glass to be detected is placed obliquely in the oven, and each glass to be detected is arranged in sequence and interval, so that each glass does not contact each other, avoiding the influence between each glass.

[0039] In the above, the glass is continuously baked in the electric heating oven for 30min. After 30min, the glass to be detected is taken out from the electric heating oven and placed in the external environment for cooling, so that the glass is cooled to the ambient room temperature.

[0040] The glass after cooling is detected by a warping detector. The detection process is as follows:

[0041] The glass substrate samples Q1, Q2, Q3, Q4 and H1, H2, H3, H4 after the high-temperature treatment in the above step are detected for warping by using a warping measuring instrument, and the maximum warping value and the average warping value of the glass substrate samples Q1, Q2, Q3, Q4 and H1, H2, H3, H4 are recorded;

[0042] In the embodiments of the present application, the data of the maximum warping value and the average warping value are the changed values after the first high-temperature treatment.

[0043] After the first detection, the glass after the preliminary detection is again placed into an electric heating oven, and the glass substrate samples Q1, Q2, Q3, Q4 and H1, H2, H3, H4 after the high-temperature treatment in the above step are again heated in the electric heating device, and after the heating, the warping is again detected by using the warping measuring instrument, and the maximum warping value and the average warping value of the glass substrate samples Q1, Q2, Q3, Q4 and H1, H2, H3, H4 are recorded.

[0044] After the corresponding probabilities are recorded, the glass substrate is again placed into the electric heating oven, and the two batches of glass substrates are heated three times in the electric heating oven, and are again detected to obtain the corresponding data.

[0045] The above operation is cycled, and in the embodiments of the present application, the cycle is performed 5 times, and each cycle includes heating and detection.

[0046] After the five cycles, the data recorded five times are arranged and summarized, and the summarized data results are as follows:

[0047]

[0048] Table 1: Glass substrate sample data before stabilization

[0049]

[0050] Table 2: Glass substrate sample data after stabilization

[0051] In the above table, the glass substrate sample is judged by the maximum warping value deviation and the average warping deviation, when the maximum warping value deviation is ≤0.01 nm, and the average deviation is ≤0.005 nm, it can be determined that the warping stability of the glass substrate sample is good, and the quality is better, which can be used as a subsequent product.

[0052] When the warping deviation value in the present application is not in the above range, it is determined that the warping stability of the glass substrate sample is poor, and the quality is poor, and it is not recommended to be directly used as a subsequent product.

[0053] In order to better verify the determination result of the above experiment, and further verify the feasibility and accuracy of the technical scheme of the method of the application, the glass substrates before and after warping stabilization are respectively processed, and the accuracy is further verified through the results after processing.

[0054] Specifically, 10 pieces of glass substrates before and after warping stabilization are respectively selected for processing, and the processing completion rate of the final 10 pieces and the film integrity of the glass substrate are counted to verify the accuracy of the result.

[0055] (1) The warping of the glass substrates before and after warping stabilization is respectively determined, and the warping value is determined:

[0056]

[0057] (2) 10 pieces of glass substrates before and after warping stabilization are respectively combined with the process flow of the front stage of liquid crystal display to manufacture glass substrates: ITO glass input-glass cleaning and drying-coating photoresist-previous baking-exposure development-etching-film removal-inspection-cleaning and drying-TOP coating-baking-curing-cleaning-orientation agent coating-curing-cleaning screen printing-baking-spraying gasket material-alignment and pressing-curing, etc.

[0058] (3) The processing completion rate of the 10 pieces of glass substrates before and after warping stabilization and the film integrity of the glass substrate are respectively counted:

[0059]

[0060] The glass film is placed on the glass substrate, and when the glass substrate is repeatedly subjected to high temperature and detection, the stability of the glass film on the glass substrate is checked to determine the degree of glass warping surface, and the performance result is the warping value in the above table. From the content of the above table, it can be understood that:

[0061] The maximum value of the warping value of the glass substrate after stabilization is about 0.1, and the average value is about 0.05, which is much smaller than the data of the warping degree of the glass substrate before stabilization, further verifying the operability and accuracy of the technical scheme of the method of the application.

[0062] After verifying the feasibility in the present application, the unqualified products need to be corrected for warping, and the glass substrate samples are processed and detected again to further determine the warping stability of the glass substrate samples.

[0063] Among them, the warping correction includes:

[0064] The glass is rotated and ground by a glass grinding device, and the glass is the glass that does not meet the corresponding requirements after the above detection.

[0065] In the rotary grinding, the glass grinding device is provided mainly including a grinding disc 100 and a pressing device 300, the grinding disc 100 is provided with a rotary driving device, the rotary driving device drives the grinding disc 100 to continuously rotate, the rotary driving device is arranged to process the rotary grinding in the application, and the rotary grinding is convenient for processing the glass substrate sample.

[0066] The original film of the glass substrate is provided with the warpage correction in the application, the pressing device 300 is provided with a pressing piece 320 and a pressing groove 310, the pressing piece 320 is located in the pressing groove 310, and the opening of the pressing groove 310 faces the direction of the grinding disc 100, so that when the glass substrate sample is located in the pressing groove 310, the pressing piece 320 pushes the glass substrate sample to move in the direction of the grinding disc 100, so that the grinding disc 100 grinds the glass substrate sample, and the glass substrate grinding processes the glass substrate.

[0067] In the grinding process, the pressing piece 320 is located in the pressing groove 310, so that the pressing piece 320 can move in the pressing groove 310 and push the glass substrate sample until the side of the glass substrate sample close to the grinding disc 100 abuts against the grinding disc 100, and the grinding disc 100 grinds and polishes the glass substrate sample.

[0068] The grinding parameters of the grinding disc 100 on the glass substrate include that the grinding pressure is 100g-500g, the grinding rotation speed is 10-40r / min, and the grinding particle size is 3-4μm.

[0069] In the above, the grinding disc 100 can preliminarily process the glass substrate sample, in order to ensure better grinding effect, the grinding duration is about 2-3 minutes, and after the grinding is completed, the glass substrate sample after grinding is subjected to wet etching, and the wet etching process is mainly processed by an etching liquid, and the etching liquid includes hydrochloric acid and phosphoric acid.

[0070] In order to achieve better effect, the volume ratio of hydrochloric acid and phosphoric acid in the embodiment of the application is 1:3. In the grinding process, the hydrochloric acid mainly etches the glass substrate, and the phosphoric acid mainly serves as a dilute corrosion inhibitor for adjusting the viscosity.

[0071] The above grinding process needs to be soaked in an acidic solution.

[0072] The pickling solution etches the glass substrate, and the glass substrate needs to be rinsed after etching, the glass substrate sample is subjected to multiple high-temperature baking and warpage detection after rinsing, the qualified glass substrate sample is stored when the final detection is qualified, and the unqualified glass is discarded when the final detection glass is unqualified.

[0073] The above embodiments are only used to illustrate the technical methods of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical methods of the present invention without departing from the spirit and scope of the technical methods of the present invention.

Claims

1. A method of detecting warpage stability of a glass substrate, characterized by, The application relates to a glass warping correction method. Step 1: pre-treatment of glass and high-temperature baking of the pre-treated glass; Step 2: cooling of the high-temperature baked glass; Step 3: detection of the warping value of the cooled glass; Step 4: high-temperature baking of the detected glass again, and repeated execution of steps 1-3 for multiple times; Step 5: data collection of the warping values detected for multiple times, and arrangement of the collected data to select qualified glass and unqualified glass; Step 6: warping correction of the unqualified glass, execution of steps 1-3 on the warping corrected glass to detect the warping value of the glass, selection of qualified products and unqualified products, storage of the qualified products, and abandonment of the unqualified products. In step 1, the temperature range of the high-temperature baking is 200-250 DEG C. In step 6, the warping correction comprises the following steps: Step 601: rotating grinding of the glass by a glass grinding device; Step 602: wet etching of the ground glass; Step 603: detection of the warping value of the wet etched glass, storage of the qualified glass when the glass is qualified, and abandonment of the unqualified glass when the glass is unqualified. In step 601, the glass grinding device is provided with grinding pressure, grinding rotating speed and grinding particle size, the grinding pressure comprises 100-500g, the grinding rotating speed comprises 10-40r / min, and the grinding particle size comprises 3-4um.

2. The method of claim 1, wherein the glass substrate is a glass sheet. In step 1, the glass comprises pre-stabilized glass and post-stabilized glass, the pre-stabilized glass comprises glass before heating in the pre-treatment, and the post-stabilized glass comprises glass after heating in the pre-treatment. The pre-processing of the glass includes cutting the glass to a size of 500 mm 500 mm.

3. The method of claim 1, wherein the glass substrate is a glass sheet. In step 3, the warping value comprises warping maximum deviation and warping average deviation.

4. The method of claim 1, wherein the glass substrate is a glass sheet. In step 5, when the warping maximum deviation is less than or equal to 0.01mm and the warping average deviation is less than or equal to 0.005mm, the glass is qualified.

5. The method of claim 1, wherein the glass substrate is a glass sheet. In step 602, the wet etching comprises an etching liquid, and the etching liquid is prepared by mixing hydrochloric acid and phosphoric acid.

6. The method of claim 5, wherein the glass substrate is a glass sheet. The volume ratio of the hydrochloric acid to the phosphoric acid is 1:3.

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