Rotating cathode magnetic bar capable of adjusting magnetic field on line and on-line adjusting method

Abstract

The invention discloses a rotating cathode magnetic bar capable of adjusting a magnetic field on line and an on-line adjusting method. By means of the rotating cathode magnetic bar, the uniformity of a target material deposition layer on the surface of a workpiece can be observed, when it is observed that the deposition layer at a certain position on the surface of the workpiece is not uniform, it is indicated that the magnetic field of the corresponding area of the rotating cathode magnetic bar is not uniform, and under the condition that magnetron sputtering equipment is not shut down, the target material deposition layer is not uniform. The micro motor in the corresponding area is controlled to work through a program, the micro motor drives the threaded sleeve to rotate and enables the threaded rod in threaded connection with the threaded sleeve to move along the central axis, so that the deformation mounting plate in the area is driven to deform, and the distance between the magnetic block on the deformation mounting plate in the area and the target material is adjusted; and finally, observing the uniformity of the target material deposition layer on the surface of the next workpiece so as to realize the purpose of on-line adjustment of the magnetic field. Compared with an existing rotating cathode magnetic bar product, the adjusting precision is higher, online adjustment can be achieved, waste of the target material is reduced, and the adjusting time is shortened.

Description

Technical Field

[0001] The invention relates to the technical field of magnetron sputtering, and in particular to a rotating cathode magnetic bar for online regulating magnetic field and an online regulating method. Background Art

[0002] Vacuum sputtering coating technology has been widely used in the fields of semiconductors, solar energy, optics, aerospace, etc. Among them, magnetron sputtering coating has the advantages of fast sputtering speed, simple equipment, and easy control, which is suitable for long-term mass production. Magnetron sputtering coating refers to a coating technology that uses the coating material as the target cathode, bombards the target material with argon ions, generates cathode sputtering, and sputters the target atoms onto the workpiece to form a deposition layer.

[0003] At present, the coating industry has higher and higher requirements for the uniformity of the film layer, as well as the long-term stability and repeatability accuracy of the magnetic field adjustment. Although the uniformity of thin film deposition is also affected by factors such as the uniformity of the process gas and the uniformity of the electric field of the coating equipment, the most critical factor is the uniformity of the magnetic field of the magnetic bar. Therefore, the rotating cathode magnetic bar is not only required to have very good magnetic field uniformity in the initial state of use, but also to continuously adjust the magnetic field strength during the continuous coating process to ensure the continuity and uniformity of thin film deposition.

[0004] Although the existing rotating cathode magnetic bar products have set adjustment points, the distance between the magnetic bar and the target material at this point is adjusted to achieve a change in the magnetic field strength on the target material surface; however, most of the adjustment methods are to adjust the distance by adding or reducing gaskets as disclosed in Patent No. CN115537748B. The disadvantages of this adjustment method are as follows: 1. The minimum adjustment distance each time is the thickness of a gasket. When the adjustment distance is less than the thickness, it is difficult to achieve effective and accurate adjustment; 2. Each adjustment requires the magnetic bar to be disassembled and the number of gaskets to be manually increased or decreased to make the adjustment, which leads to higher requirements for the operator; 3. Since this adjustment method is not an online adjustment, each time the gasket is increased or decreased, it needs to be installed in the magnetron sputtering equipment for testing to obtain the adjustment result. Therefore, this method not only makes the adjustment process time-consuming and costly, but also leads to a large amount of target material being wasted in the test, resulting in a high adjustment cost. Summary of the invention

[0005] The purpose of the present invention is to provide a rotating cathode magnetic bar for online adjustment of magnetic field and an online adjustment method, so as to solve the problem that the existing rotating cathode magnetic bar products cannot realize online adjustment of magnetic field.

[0006] In order to solve the above technical problems, the present invention provides a rotating cathode magnetic bar for online adjustment of magnetic field, comprising a shell component, a magnetic field component and a plurality of online adjustment components; The magnetic field assembly is disposed on one side of the housing assembly and arranged along the length direction thereof; A plurality of the online adjustment components are installed between the housing component and the magnetic field component at intervals along the length direction; and each of the online adjustment components is individually controlled and can individually adjust the magnetic field component of the area; The online adjustment component includes a micro motor and a linkage part; the micro motor is fixedly installed in the shell component through a motor bracket, one end of the linkage part is connected to the micro motor, and the other end is connected to the magnetic field component through a mounting block; under the action of the micro motor, the linkage part drives the magnetic field component to move, thereby adjusting the distance between the magnetic rod and the target material in this area.

[0007] Preferably, the linkage member comprises a threaded sleeve and a threaded rod, one end of the threaded rod is fixedly connected to the magnetic field assembly via a mounting block, and the other end is inserted into the threaded sleeve and threadedly connected thereto.

[0008] Preferably, the threaded sleeve is connected to the micro motor via a transmission gear set, and the micro motor drives the threaded sleeve to rotate, so that the threaded rod threadably connected thereto drives the magnetic field assembly to move along the central axis.

[0009] Preferably, the transmission gear set includes a bevel gear and a bevel gear disc that are meshingly connected; the bevel gear disc is sleeved and installed on the threaded sleeve, and the bevel gear is sleeved and installed on the output shaft of the micro motor, and the micro motor drives the bevel gear, the bevel gear disc and the threaded sleeve connected to the bevel gear disc to rotate.

[0010] Preferably, the threaded rod is movably inserted into the mounting block, and the two are connected by a penetrating pin; and the mounting block is fixedly connected to the magnetic field assembly by a plurality of locking bolts.

[0011] Preferably, the magnetic field assembly comprises a deformable mounting plate, and a plurality of groups of magnetic strips are mounted on a side of the deformable mounting plate away from the online adjustment assembly.

[0012] Preferably, three groups of magnetic strips are installed on the deformable mounting plate, two of which are N-pole magnetic strips, which are installed on both sides of the deformable mounting plate respectively; and the other group is S-pole magnetic strips, which is installed between the two groups of N-pole magnetic strips. Each group of magnetic strips is composed of a number of magnetic blocks arranged in sequence along the length direction of the deformable mounting plate; Magnetic shoes are arranged outside the N-pole magnetic strip and the S-pole magnetic strip.

[0013] Preferably, a plurality of first deformation grooves are spaced apart on the mounting surface of the online adjustment component of the deformable mounting plate, and the plurality of first deformation grooves and the plurality of online adjustment components are arranged in an alternating manner; A plurality of second deformation grooves are arranged at intervals on the magnetic strip installation surface of the deformation installation plate. The plurality of second deformation grooves are arranged in groups of two and are arranged in groups on both sides of the online adjustment component.

[0014] Preferably, the shell assembly includes a top cover and side panels movably mounted on both sides of the top cover, and each of the side panels is rotatably connected to the top cover via a plurality of buckles.

[0015] The present invention also provides an online adjustment method for the magnetic field of a rotating cathode magnetic bar, and the specific steps are: first, by observing the uniformity of the target material deposition layer on the surface of the workpiece, when it is observed that the deposition layer at a certain place on the surface of the workpiece is uneven, it means that the magnetic field in the corresponding area of ​​the rotating cathode magnetic bar is uneven. At this time, when the magnetron sputtering equipment is not stopped, the micro-motor in the corresponding area is controlled by the program to work, and the micro-motor drives the threaded sleeve to rotate, and makes the threaded rod threadedly connected to it move along the central axis, thereby driving the deformation mounting plate in the area to deform, so as to adjust the distance between the magnetic block on the deformation mounting plate in the area and the target material; finally, the uniformity of the target material deposition layer on the next workpiece surface is observed to achieve the purpose of online adjustment of the magnetic field.

[0016] Compared with the prior art, the present invention has the following beneficial effects: The rotating cathode magnetic bar of the present invention can be used to observe the uniformity of the target material deposition layer on the surface of the workpiece. When the deposition layer is observed to be uneven somewhere on the surface of the workpiece, it means that the magnetic field in the corresponding area of ​​the rotating cathode magnetic bar is uneven. At this time, when the magnetron sputtering equipment is not stopped, the micro motor in the corresponding area is controlled by the program to work. The micro motor drives the threaded sleeve to rotate, and the threaded rod threadedly connected to it moves along the central axis, thereby driving the deformation mounting plate in the area to deform, so as to adjust the distance between the magnetic block on the deformation mounting plate in the area and the target material; finally, the uniformity of the target material deposition layer on the next workpiece surface is observed to achieve the purpose of online magnetic field adjustment. Compared with the existing rotating cathode magnetic bar products, the adjustment accuracy is higher, and online adjustment can be achieved, reducing the waste of target materials and reducing the adjustment time. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of a rotating cathode magnetic bar for online adjusting magnetic field provided by the present invention; Figure 2 It is a schematic diagram of the internal structure of the rotating cathode magnetic bar provided by the present invention; Figure 3 It is a side view of the internal structure of the rotating cathode magnetic bar provided by the present invention; Figure 4 It is a structural schematic diagram of the online adjustment component provided by the present invention; Figure 5 is a cross-sectional view of an online adjustment assembly provided by the present invention; Figure 6 It is a structural schematic diagram of the magnetic field assembly provided by the present invention.

[0018] In the figure: 1, housing assembly; 101, top cover; 102, side panel; 2. Magnetic field assembly; 21. Deformation mounting plate; 22. N-pole magnetic strip; 23. S-pole magnetic strip; 24. Magnetic shoe; 211. First deformation slot; 212. Second deformation slot; 3. Online adjustment assembly; 31. Micro motor; 32. Linkage; 33. Motor bracket; 34. Mounting block; 35. Transmission gear set; 36. Latch; 37. Locking bolt; 321. Threaded sleeve; 322. Threaded rod; 351. Bevel gear; 352. Bevel gear disc; 4. Buckle. DETAILED DESCRIPTION

[0019] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description and claims. It should be noted that the drawings are in very simplified form and in non-precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.

[0020] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and the like are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", and the like may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0021] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0022] In addition, the features, operations, and characteristics described in the specification can be combined in any appropriate manner to form various embodiments. Similarly, the steps or actions described in the method can also be adjusted in order in a manner that can be easily seen by those skilled in the art. Therefore, the various sequences in the specification and drawings are only for the purpose of describing a certain embodiment, and are not necessarily such sequences, unless otherwise stated that a certain sequence must be followed.

[0023] Embodiment 1 The present invention provides a rotating cathode magnetic bar for adjusting the magnetic field online. Figure 1-3 , including a shell component 1, a magnetic field component 2 and a plurality of online adjustment components 3; the magnetic field component 2 is arranged on one side of the shell component 1 and along its length direction; a plurality of online adjustment components 3 are installed between the shell component 1 and the magnetic field component 2 at intervals along the length direction; and each of the online adjustment components 3 is individually controlled and can individually adjust the magnetic field component 2 in the area.

[0024] Please also refer to Figure 4 and Figure 5 The online adjustment component 3 includes a micro motor 31 and a linkage 32; the micro motor 31 is fixedly installed in the housing component 1 through a motor bracket 33, one end of the linkage 32 is connected to the micro motor 31, and the other end is connected to the magnetic field component 2 through a mounting block 34; under the action of the micro motor 31, the linkage 32 drives the magnetic field component 2 to move, thereby adjusting the distance between the magnetic rod and the target material in this area.

[0025] Furthermore, the linkage member 32 includes a threaded sleeve 321 and a threaded rod 322 , one end of the threaded rod 322 is fixedly connected to the magnetic field assembly 2 via a mounting block 34 , and the other end is inserted into the threaded sleeve 321 and threadedly connected thereto.

[0026] Furthermore, the threaded sleeve 321 is connected to the micro motor 31 via a transmission gear set 35. Driven by the micro motor 31, the threaded sleeve 321 is driven to rotate, so that the threaded rod 322 threadedly connected thereto drives the magnetic field assembly 2 to move along the central axis.

[0027] In this embodiment, the transmission gear set 35 includes a bevel gear 351 and a bevel gear disc 352 that are meshed and connected; the bevel gear disc 352 is sleeved and installed on the threaded sleeve 321, and the bevel gear 351 is sleeved and installed on the output shaft of the micro motor 31, and the micro motor 31 drives the bevel gear 351, the bevel gear disc 352 and the threaded sleeve 321 connected to the bevel gear disc 352 to rotate.

[0028] The threaded rod 322 is movably inserted into the mounting block 34 , and the two are connected by a penetrating pin 36 ; and the mounting block 34 is fixedly connected to the magnetic field assembly 2 by a plurality of locking bolts 37 .

[0029] Specifically, Figure 6 As shown, the magnetic field component 2 includes a deformable mounting plate 21 , and a plurality of groups of magnetic strips are installed on a side of the deformable mounting plate 21 away from the online adjustment component 3 .

[0030] Furthermore, three groups of magnetic strips are installed on the deformable mounting plate 21 , two of which are N-pole magnetic strips 22 , respectively installed on both sides of the deformable mounting plate 21 ; and the other group is S-pole magnetic strips 23 , installed between the two groups of N-pole magnetic strips 22 .

[0031] In this embodiment, each group of magnetic strips is formed by a plurality of magnetic blocks arranged in sequence along the length direction of the deformable mounting plate 21 .

[0032] In this embodiment, magnetic shoes 24 are disposed outside the N-pole magnetic strip 22 and the S-pole magnetic strip 23 .

[0033] Furthermore, a plurality of first deformation grooves 211 are spaced apart on the mounting surface of the online adjustment component 3 of the deformable mounting plate 21, and the plurality of first deformation grooves 211 are staggered with the plurality of online adjustment components 3, so that the deformable mounting plates 21 on both sides of the online adjustment component 3 are more easily deformed; a plurality of second deformation grooves 212 are spaced apart on the magnetic strip mounting surface of the deformable mounting plate 21, and the plurality of second deformation grooves 212 are grouped in pairs and opened in groups on both sides of the online adjustment component 3, so that the deformable mounting plates 21 on both sides of the online adjustment component 3 are more easily deformed.

[0034] For details, please continue to refer to Figure 1 The shell assembly 1 includes a top cover 101 and side panels 102 movably mounted on both sides of the top cover 101. Each of the side panels 102 is rotatably connected to the top cover 101 through a plurality of buckles 4, so that both side panels 102 can be opened to both sides to inspect the internal components of the magnetic rod.

[0035] Embodiment 2 The present invention also provides an online adjustment method for the magnetic field of the rotating cathode magnetic bar, please refer to Figure 1-6The specific steps are as follows: first, by observing the uniformity of the target material deposition layer on the surface of the workpiece, when it is observed that the deposition layer at a certain place on the surface of the workpiece is uneven, it means that the magnetic field in the corresponding area of ​​the rotating cathode magnetic rod is uneven. At this time, when the magnetron sputtering equipment is not stopped, the micro motor 31 in the corresponding area is controlled by the program to work, and the micro motor 31 drives the threaded sleeve 321 to rotate, and makes the threaded rod 322 threadedly connected to it move along the central axis, thereby driving the deformation mounting plate 21 in the area to deform, so as to adjust the distance between the magnetic block on the deformation mounting plate 21 in the area and the target material; finally, the uniformity of the target material deposition layer on the next workpiece surface is observed to achieve the purpose of online magnetic field adjustment.

[0036] The above description is only a description of the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention. Any changes or modifications made by a person skilled in the art in the field of the present invention based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A rotating cathode magnetic bar for adjusting magnetic field online, characterized in that: It comprises a housing component (1), a magnetic field component (2), and a plurality of online adjustment components (3); The magnetic field component (2) is disposed on one side of the housing component (1) and arranged along the length direction thereof; A plurality of the online adjustment components (3) are installed at intervals along the length direction between the housing component (1) and the magnetic field component (2); and each of the online adjustment components (3) is individually controlled and is capable of individually adjusting the magnetic field component (2) in the region; The online adjustment component (3) comprises a micro motor (31) and a linkage member (32); the micro motor (31) is fixedly mounted in the housing component (1) via a motor bracket (33); one end of the linkage member (32) is connected to the micro motor (31), and the other end is connected to the magnetic field component (2) via a mounting block (34); under the action of the micro motor (31), the linkage member (32) drives the magnetic field component (2) to move, thereby adjusting the distance between the magnetic rod and the target material in the region.

2. The rotating cathode magnetic bar for online magnetic field adjustment according to claim 1, characterized in that: The linkage member (32) comprises a threaded sleeve (321) and a threaded rod (322); one end of the threaded rod (322) is fixedly connected to the magnetic field assembly (2) via a mounting block (34), and the other end is inserted into the threaded sleeve (321) and threadedly connected thereto.

3. The rotating cathode magnetic bar for online magnetic field adjustment according to claim 2, characterized in that: The threaded sleeve (321) is connected to the micro motor (31) via a transmission gear set (35). Driven by the micro motor (31), the threaded sleeve (321) is driven to rotate, thereby causing the threaded rod (322) threadedly connected thereto to drive the magnetic field assembly (2) to move along the central axis.

4. The rotating cathode magnetic bar for online magnetic field adjustment according to claim 3, characterized in that: The transmission gear set (35) comprises a bevel gear (351) and a bevel gear disc (352) which are meshed and connected; the bevel gear disc (352) is sleeved and mounted on the threaded sleeve (321), and the bevel gear (351) is sleeved and mounted on the output shaft of the micro motor (31); the micro motor (31) drives the bevel gear (351), the bevel gear disc (352), and the threaded sleeve (321) connected to the bevel gear disc (352) to rotate.

5. The rotating cathode magnetic bar for online adjustment of magnetic field as claimed in claim 2, characterized in that: The threaded rod (322) is movably inserted into the mounting block (34), and the two are connected via a through-penetrating latch (36); and the mounting block (34) is fixedly connected to the magnetic field assembly (2) via a plurality of locking bolts (37).

6. The rotating cathode magnetic bar for adjusting the magnetic field online as claimed in claim 1, characterized in that: The magnetic field component (2) comprises a deformable mounting plate (21), and a plurality of groups of magnetic strips are mounted on a side of the deformable mounting plate (21) away from the online adjustment component (3).

7. The rotating cathode magnetic bar for adjusting the magnetic field online as claimed in claim 6, characterized in that: Three groups of magnetic strips are installed on the deformable mounting plate (21), two of which are N-pole magnetic strips (22) respectively installed on both sides of the deformable mounting plate (21); and the other group is S-pole magnetic strips (23) installed between the two groups of N-pole magnetic strips (22); Each group of magnetic strips is composed of a plurality of magnetic blocks arranged in sequence along the length direction of the deformable mounting plate (21); Magnetic shoes (24) are provided outside the N-pole magnetic strip (22) and the S-pole magnetic strip (23).

8. The rotating cathode magnetic bar for online adjusting magnetic field as claimed in claim 6, characterized in that: A plurality of first deformation grooves (211) are arranged at intervals on the mounting surface of the online adjustment component (3) of the deformable mounting plate (21), and the plurality of first deformation grooves (211) and the plurality of online adjustment components (3) are arranged in a staggered manner; a plurality of second deformation grooves (212) are arranged at intervals on the magnetic strip mounting surface of the deformable mounting plate (21), and the plurality of second deformation grooves (212) are arranged in groups of two and are arranged on both sides of the online adjustment component (3).

9. The rotating cathode magnetic bar for online magnetic field adjustment according to claim 1, characterized in that: The housing assembly (1) comprises a top cover (101) and side panels (102) movably mounted on both sides of the top cover (101), and each of the side panels (102) is rotatably connected to the top cover (101) via a plurality of buckles (4).

10. An online adjustment method for the magnetic field of a rotating cathode magnetic bar according to any one of claims 1 to 9, characterized in that: The specific steps are as follows: first, the uniformity of the target material deposition layer on the surface of the workpiece is observed. When the deposition layer at a certain place on the surface of the workpiece is observed to be uneven, it means that the magnetic field in the corresponding area of ​​the rotating cathode magnetic rod is uneven. At this time, when the magnetron sputtering equipment is not stopped, the micro motor (31) in the corresponding area is controlled by a program to work. The micro motor (31) drives the threaded sleeve (321) to rotate, and causes the threaded rod (322) threadedly connected to it to move along the central axis, thereby driving the deformation mounting plate (21) in the area to deform, so as to adjust the distance between the magnetic block on the deformation mounting plate (21) in the area and the target material; finally, the uniformity of the target material deposition layer on the next workpiece surface is observed to achieve the purpose of online magnetic field adjustment.

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