Double-sided electroplating hanger and loading method of square glass substrate or organic packaging carrier plate

Abstract

The invention provides a double-sided electroplating hanger and a loading method of a square glass substrate or an organic packaging carrier plate. The hanger comprises a main plate body, a concentric-square-shaped cover plate and a flexible flat cable plate. A first square opening is formed in a substrate carrying part of the main board body; a first concentric-square-shaped sealing ring, a positioning bulge, a first conducting strip and an outer concentric-square-shaped sealing ring are arranged at the peripheral edge part of the first square opening; the concentric-square-shaped cover plate is provided with a second square opening, and a second concentric-square-shaped sealing ring and a second conducting strip are arranged on the peripheral edge of the second square opening; the flexible flat cable board is used for conductive transmission between the main board body and the concentric-square-shaped cover plate. According to the hanger, the square opening suitable for the square substrate is adopted, so that the available area ratio of the square substrate is increased; the two surfaces of the square substrate are directly connected with a cathode plug through a direct contact type peripheral conducting strip via a lead, so that the conducting reliability is improved, and the current stability in the electroplating process is ensured; reliable electric conduction is achieved through the flexible flat cable plate, meanwhile, separation resistance generated when the concentric-square-shaped cover plate is opened is reduced, the service life of the hanging tool is prolonged, and reliability is improved.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor packaging wet process, in particular to a loading method of a double-sided electroplating hanger, a square glass substrate or an organic packaging carrier. Background Art

[0002] Current chips are usually cut into multiple pieces after being packaged by wafer electroplating. Since chips are usually square, a certain area of ​​the curved edge of the wafer becomes a waste area.

[0003] With the development of semiconductor packaging technology, glass substrates are expected to replace silicon interposers and carriers with their low power consumption and excellent heat dissipation performance. Glass substrates can be directly designed into a square shape, which will significantly improve the utilization rate of square substrates. At the same time, in order to produce high-precision metal circuits on glass substrates to achieve high-density interconnection, double-sided electroplating technology will be used. As the area increases, the electroplating current intensity will increase significantly. The contact or spring-type conductive method used in the existing wafer double-sided electroplating hanger will be unreliable. Summary of the invention

[0004] In order to overcome the above-mentioned deficiencies of the prior art, the object of the present invention is to provide a method for loading a double-sided electroplating rack, a square glass substrate or an organic packaging carrier.

[0005] In order to achieve the above-mentioned purpose, the technical solution adopted by the present invention to solve the technical problem is: a double-sided electroplating rack, comprising:

[0006] The main board body comprises a hanger holding part located at the upper part and a substrate holding part located below the hanger holding part; the hanger holding part is provided with a cathode plug for connecting to a power socket; the substrate holding part is provided with a first square opening, the substrate holding part is provided with a first round-shaped sealing groove at the outer edge of the first square opening, a first round-shaped sealing ring is embedded in the first round-shaped sealing groove, a plurality of positioning protrusions arranged at intervals are provided at the periphery of the first round-shaped sealing groove, a plurality of the positioning protrusions are used to position the outer contour of the square substrate, a first conductive sheet is respectively provided on each side length of the periphery of the first round-shaped sealing ring, a surface edge of the first conductive sheet is in contact with a surface edge of the square substrate, each of the first conductive sheets is respectively connected to the cathode plug via a wire, an outer round-shaped sealing groove is also provided on the substrate holding part at the periphery of the first conductive sheet, an outer round-shaped sealing ring is embedded in the outer round-shaped sealing groove;

[0007] A circular cover plate, which is provided with a second square opening, a second circular sealing groove is provided at the outer edge of the second square opening, a second circular sealing ring is embedded in the second circular sealing groove, a second conductive sheet is provided on each side length of the outer periphery of the second circular sealing ring, the surface edge of the second conductive sheet is in contact with the edge of the other surface of the square substrate, a plurality of cover wires are further provided in the circular cover plate, one end of the cover wire is connected to the second conductive sheet;

[0008] A flexible flat cable board comprises a plurality of flat thin conductive sheets and insulating films covering the two surfaces of the thin conductive sheets, wherein adjacent thin conductive sheets are arranged in parallel and spaced apart, one end of each thin conductive sheet is welded to a cover plate wire, and the other end of each thin conductive sheet is welded to a wire on a main board body, and the wire on the main board body is connected to the cathode plug.

[0009] By adopting the technical solution of the present invention, the hanger adopts a square opening suitable for the square substrate, thereby increasing the available area ratio of the square substrate; both sides of the square substrate are directly connected to the cathode plug through direct-contact conductive sheets around the perimeter via wires, thereby improving the conductivity reliability and ensuring the current stability of the electroplating process; the wires of the main board body are electrically connected to the circular cover plate through a flexible cable board, thereby achieving reliable conductivity while reducing the separation resistance when the circular cover plate is opened, thereby increasing the service life and reliability of the hanger.

[0010] Furthermore, the cathode plug includes a left plug-in portion located at the left end of the hanger holding portion and a right plug-in portion located at the right end of the hanger holding portion, and the cathode plug is provided with a total of 8 plug-ins, and the front and back sides of the left plug-in portion and the front and back sides of the right plug-in portion are each provided with two plug-ins arranged in parallel and spaced apart; 4 of the plug-ins are respectively connected to a first wire, each of which first extends on the back side of the main board body, then passes through the thickness direction of the main board body to the front side of the main board body, and finally extends along the length direction of a first conductive sheet and is pressed against the bottom of the first conductive sheet; a second wire is respectively led out from the other 4 plug-ins, and the flexible flat panel includes 4 thin conductive sheets, and each second wire extends from the front side of the main board body and is welded to a thin conductive sheet of the flexible flat panel.

[0011] Furthermore, there are four cover plate wires, each of which extends from the welding point with the thin conductive sheet on the front side of the circular cover plate, then passes through the thickness direction of the circular cover plate to the back side of the circular cover plate, and finally extends along the length direction of a second conductive sheet and is pressed against the bottom of the second conductive sheet.

[0012] By adopting the above preferred solution, it is ensured that both sides of the square substrate are electrically connected to the cathode of the power supply through independent conductive sheets and wires, ensuring the consistency of the electric potential around the square substrate. Each plug can be individually tested to see if it is electrically connected to the substrate, ensuring reliable current transmission during the electroplating process.

[0013] Furthermore, the left plug-in portion is mirror-symmetrical to the right plug-in portion, and the plugs installed on the left plug-in portion and the right plug-in portion include a first L-shaped plug-in, a second L-shaped plug-in, a third L-shaped plug-in and a fourth L-shaped plug-in, and the first L-shaped plug-in, the second L-shaped plug-in, the third L-shaped plug-in and the fourth L-shaped plug-in all include a transverse connecting portion for connecting to a wire and a longitudinal plug-in portion for mating with a power socket, and the lengths of the longitudinal plug-in portions of the first L-shaped plug-in, the second L-shaped plug-in, the third L-shaped plug-in and the fourth L-shaped plug-in are successively longer; the left plug-in portion and the right plug-in portion both include a middle spacing portion in the middle position in the thickness direction, and an upper and lower spacing parallel to each other are provided on one side of the back of the middle spacing portion A first transverse groove and a third transverse groove are provided, and a second transverse groove and a fourth transverse groove are provided on the front side of the middle spacing portion in parallel with each other at upper and lower intervals; the transverse connecting portion of the first L-shaped plug is located in the first transverse groove, the transverse connecting portion of the second L-shaped plug is located in the second transverse groove, the transverse connecting portion of the third L-shaped plug is located in the third transverse groove, and the transverse connecting portion of the fourth L-shaped plug is located in the fourth transverse groove; the longitudinal plug-in portions of the first L-shaped plug, the second L-shaped plug, the third L-shaped plug and the fourth L-shaped plug are isolated from each other, and the bottom of each longitudinal plug-in portion has an inclined portion which gradually shrinks downward, and the bottom end surfaces of each inclined portion are flush.

[0014] By adopting the above preferred solution, the compactness of the cathode plug structure layout is improved, the arrangement of the wires in the hanger is convenient, the structural stability is high, and the service life of the hanger and the reliability of current transmission are improved.

[0015] Furthermore, a plurality of first pressing blocks are arranged at intervals above each of the first conductive sheets by screws, and a plurality of second pressing blocks are arranged at intervals above each of the second conductive sheets by screws.

[0016] By adopting the above preferred solution, the flatness of the conductive sheet is ensured, and sufficient contact with the edge of the square substrate is ensured.

[0017] Furthermore, the first pressing block and the second pressing block are staggered in the installation position along the length direction of the conductive sheet.

[0018] The above preferred solution is adopted to improve the compactness of the structure.

[0019] Furthermore, the circular cover plate is provided with a plurality of spaced-apart making way grooves at the periphery of the second circular sealing groove, and the positions of the making way grooves match the positioning protrusions.

[0020] The above preferred solution is adopted to ensure that the positioning protrusion has high strength, improve the position stability, and achieve accurate positioning of the square substrate.

[0021] Furthermore, the flexible flat cable board is bent in a U shape, and both ends of the flexible flat cable board can move up and down.

[0022] By adopting the above preferred solution, the automated cover opening mechanism can conveniently lift the circular cover plate to a set height, so as to help the robot to load and unload the square substrate from the side of the space.

[0023] Furthermore, the main board body is also provided with an air passage for air tightness testing, an air nozzle is provided at the outer end of the air passage, and the end of the air passage is connected to the space between the first circular sealing ring and the outer circular sealing ring.

[0024] By adopting the above preferred solution, the installation tightness of the square substrate on the hanger can be detected through the air path to ensure that the cavity is in a completely sealed state and prevent the electroplating solution from penetrating into the hanger.

[0025] The method for loading a square glass substrate or an organic packaging carrier uses the above-mentioned double-sided electroplating rack, and comprises the following steps:

[0026] Step 1, insert the double-sided electroplating rack into a flip rack with a slot, and flip the flip rack to a horizontal state;

[0027] Step 2: Loosen the locking screws of the circular cover with an electric screwdriver and move the circular cover vertically upward by a set distance through the lifting suction cup;

[0028] Step 3, using a suction cup robot to move the square glass substrate or organic packaging carrier to be loaded laterally from the gap between the circular cover and the main body to the first square opening of the main body;

[0029] Step 4: Lift the suction cup to put the circular cover back vertically onto the main board, and tighten the screws with an electric screwdriver.

[0030] Step 5, the flip frame flips over, the double-sided electroplating rack is turned to a vertical state, and the mechanical gripper moves the double-sided electroplating rack to the wet process treatment equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0032] Figure 1 It is a structural schematic diagram of an implementation manner of the present invention.

[0033] Figure 2 is a cross-sectional view of an embodiment of the present invention.

[0034] Figure 3 yes Figure 2 A partial enlarged view of point A in the middle.

[0035] Figure 4 It is a schematic diagram of the circular cover of the present invention in an open state.

[0036] Figure 5 It is a schematic diagram of the front structure of the main board.

[0037] Figure 6 yes Figure 5 A partial enlarged view of point B in the middle.

[0038] Figure 7 yes Figure 5 A partial enlarged view of point C in the middle.

[0039] Figure 8 It is a schematic diagram of the back structure of the main board.

[0040] Fig. 9 yes Figure 8 A partial enlarged view of point D in the middle.

[0041] Fig.10 It is a partial cross-sectional view of the gas path on the main board.

[0042] Fig.11 It is a schematic diagram of the back structure of the circular cover.

[0043] Fig.12 yes Fig.11 A partial enlarged view of point E in the middle.

[0044] Fig.13 It is a schematic diagram of the front structure of the circular cover.

[0045] The numbers and letters in the figure represent the names of the corresponding parts:

[0046] 10-main body; 11-hanging part; 12-cathode plug; 121-left plug-in part; 1211-middle spacing part; 1212-first transverse groove; 1213-second transverse groove; 1214-third transverse groove; 1215-fourth transverse groove; 122-right plug-in part; 131-first L-shaped plug; 1311-transverse connecting part; 1312-longitudinal plug-in part; 132-second L-shaped plug; 133-third L-shaped plug; 134-fourth L-shaped plug; 14-first wire; 15- The second conductor; 21-substrate holding portion; 22-first square opening; 23-first circular sealing ring; 24-positioning protrusion; 25-first conductive sheet; 26-outer circular sealing ring; 27-first pressing block; 28-air path; 29-air nozzle; 30-circular cover; 31-second square opening; 32-second circular sealing ring; 33-second conductive sheet; 34-cover conductor; 35-second pressing block; 36-gap groove; 50-flexible flat panel; 51-thin conductive sheet; 52-insulating film; 60-square substrate. DETAILED DESCRIPTION

[0047] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0048] like Figure 1-13 As shown, one embodiment of the present invention is: a double-sided electroplating rack, comprising:

[0049] The main board body 10 comprises a hanger holding part 11 located at the upper part and a substrate holding part 21 located below the hanger holding part; the hanger holding part 11 is provided with a cathode plug 12 for connecting to a power socket; the substrate holding part 21 is provided with a first square opening 22, and a first round-shaped sealing groove is provided on the substrate holding part 21 at the outer edge of the first square opening 22, and a first round-shaped sealing ring 23 is embedded in the first round-shaped sealing groove, and a plurality of positioning protrusions 24 arranged at intervals are provided on the periphery of the first round-shaped sealing groove, and the plurality of positioning protrusions 24 are used to position the outer contour of the square substrate 60, and a first conductive sheet 25 is respectively provided on each side length of the periphery of the first round-shaped sealing ring 23, and the surface edge of the first conductive sheet 25 is in contact with a surface edge of the square substrate 60, and each first conductive sheet 25 is respectively connected to the cathode plug 12 via a wire, and an outer round-shaped sealing groove is also provided on the substrate holding part 21 at the periphery of the first conductive sheet 25, and an outer round-shaped sealing ring 26 is embedded in the outer round-shaped sealing groove;

[0050] The circular cover plate 30 is provided with a second square opening 31, and a second circular sealing groove is provided at the outer edge of the second square opening 31, and a second circular sealing ring 32 is embedded in the second circular sealing groove. A second conductive sheet 33 is provided on each side length of the outer periphery of the second circular sealing ring 32, and the surface edge of the second conductive sheet 33 is in contact with the edge of the other surface of the square substrate 60. A plurality of cover wires 34 are also provided in the circular cover plate 30, and one end of the cover wire 34 is connected to the second conductive sheet 33;

[0051] The flexible cable board 50 includes a plurality of flat thin conductive sheets 51 and an insulating film 52 covering both surfaces of the thin conductive sheets 51. Adjacent thin conductive sheets 51 are arranged in parallel and spaced apart. One end of each thin conductive sheet 51 is welded to a cover plate wire 34, and the other end of each thin conductive sheet 51 is welded to a wire on the main board body 10. The wire on the main board body 10 is connected to the cathode plug 12.

[0052] The beneficial effects of adopting the above technical solution are: the hanger adopts a square opening suitable for square substrates, which increases the proportion of available area of ​​the square substrates; both sides of the square substrates are directly connected to the cathode plug through direct contact conductive sheets around them via wires, which improves the conductivity reliability and ensures the current stability of the electroplating process; the wires of the main board are electrically connected to the circular cover through a flexible cable board, which achieves reliable conductivity while reducing the separation resistance when the circular cover is opened, thereby improving the service life and reliability of the hanger.

[0053] like Figure 1-13 As shown, in some other embodiments of the present invention, the cathode plug 12 includes a left plug-in portion 121 located at the left end of the hanger holding portion and a right plug-in portion 122 located at the right end of the hanger holding portion, and the cathode plug 12 is provided with 8 plug-ins in total, and the front and back sides of the left plug-in portion 121 and the front and back sides of the right plug-in portion 122 are respectively provided with two plug-ins arranged in parallel and spaced apart; 4 of the plug-ins are respectively connected to a first wire 14, each of which first wire 14 first extends on the back side of the main board body, then passes through the thickness direction of the main board body to the front side of the main board body, and finally extends along the length direction of a first conductive sheet 25 and is pressed against the bottom of the first conductive sheet 25; a second wire 15 is respectively led out from the other 4 plug-ins, and the flexible flat panel 50 includes 4 thin conductive sheets 51, and each second wire 15 extends from the front side of the main board body and is welded to a thin conductive sheet 51 of the flexible flat panel 50. There are four cover plate wires 34, each of which extends from the welding point with the thin conductive sheet 51 on the front of the circular cover plate 30, then passes through the thickness direction of the circular cover plate to the back side of the circular cover plate, and finally extends along the length direction of a second conductive sheet 33 and presses against the bottom of the second conductive sheet 33. The beneficial effect of adopting the above technical solution is to ensure that both sides of the square substrate are electrically connected to the power cathode through independent conductive sheets and wires, ensuring the consistency of the electric potential around the square substrate.

[0054] like Figure 7 , 9 As shown, in some other embodiments of the present invention, the left plug-in portion 121 is mirror-symmetrical to the right plug-in portion 122, and the plugs installed on the left plug-in portion 121 and the right plug-in portion 122 include a first L-shaped plug-in portion 131, a second L-shaped plug-in portion 132, a third L-shaped plug-in portion 133 and a fourth L-shaped plug-in portion 134. The first L-shaped plug-in portion 131, the second L-shaped plug-in portion 132, the third L-shaped plug-in portion 133 and the fourth L-shaped plug-in portion 134 all include a transverse connecting portion 1311 for connecting to a wire and a longitudinal plug-in portion 1312 for mating with a power socket, and the lengths of the longitudinal plug-in portions 1312 of the first L-shaped plug-in portion 131, the second L-shaped plug-in portion 132, the third L-shaped plug-in portion 133 and the fourth L-shaped plug-in portion 134 are successively longer; the left plug-in portion 121 and the right plug-in portion 122 both include a middle spacing portion 1211 located in the middle in the thickness direction, and the middle spacing portion 1211 is provided at a position in the middle of the thickness direction. A first transverse groove 1212 and a third transverse groove 1214 are arranged in parallel with each other at upper and lower intervals on one side of the back side of the intermediate spacer 1211, and a second transverse groove 1213 and a fourth transverse groove 1215 are arranged in parallel with each other at upper and lower intervals on one side of the front side of the intermediate spacer 1211. The transverse connecting portion of the first L-shaped plug 131 is located in the first transverse groove 1212, the transverse connecting portion of the second L-shaped plug 132 is located in the second transverse groove 1213, the transverse connecting portion of the third L-shaped plug 133 is located in the third transverse groove 1214, and the transverse connecting portion of the fourth L-shaped plug 134 is located in the fourth transverse groove 1215; the longitudinal plug-in portions 1312 of the first L-shaped plug 131, the second L-shaped plug 132, the third L-shaped plug 133 and the fourth L-shaped plug 134 are isolated from each other, and the bottom of each longitudinal plug-in portion has an inclined portion that gradually shrinks downward, and the bottom end surfaces of each inclined portion are flush. The beneficial effects of adopting the above technical solution are: improving the compactness of the cathode plug structure layout, facilitating the arrangement of wires in the hanger, having high structural stability, and improving the service life of the hanger and the reliability of current transmission.

[0055] like Figure 6 , 12 As shown, in some other embodiments of the present invention, a plurality of first pressing blocks 27 are arranged at intervals on each first conductive sheet 25 by screws, and a plurality of second pressing blocks 35 are arranged at intervals on each second conductive sheet 33 by screws. The beneficial effect of adopting the above technical solution is: ensuring the flatness of the conductive sheet and ensuring full contact with the edge of the square substrate.

[0056] In some other embodiments of the present invention, the first pressing block 27 and the second pressing block 35 are arranged staggered at the installation position along the length direction of the conductive sheet. The beneficial effect of adopting the above technical solution is: improving the compactness of the structure.

[0057] In other embodiments of the present invention, a plurality of spaced-apart recesses 36 are provided on the circular cover plate 30 at the periphery of the second circular sealing groove, and the positions of the recesses 36 match the positioning protrusions 24. The beneficial effects of the above technical solution are: ensuring that the positioning protrusions have high strength, improving position stability, and realizing accurate positioning of the square substrate.

[0058] like Figure 1 , 4 As shown, in some other embodiments of the present invention, the flexible flat panel 50 is bent in a U shape. The beneficial effect of adopting the above technical solution is that it is convenient for the automated cover opening mechanism to lift the circular cover to a set height, so as to help the robot to load and unload the square substrate from the side of the space.

[0059] like Fig.10 As shown, in other embodiments of the present invention, the main body 10 is further provided with an air passage 28 for air tightness testing, an air nozzle 29 is provided at the outer end of the air passage 28, and the end of the air passage 28 is connected to the space between the first round-shaped sealing ring 23 and the outer round-shaped sealing ring 26. The beneficial effect of adopting the above technical solution is that the installation tightness of the square substrate on the hanger can be tested through the air passage to prevent the electroplating solution from penetrating into the hanger.

[0060] The method for loading a square glass substrate or an organic packaging carrier uses the above-mentioned double-sided electroplating rack, and comprises the following steps:

[0061] Step 1, insert the double-sided electroplating rack into a flip rack with a slot, and flip the flip rack to a horizontal state;

[0062] Step 2: Loosen the locking screws of the circular cover with an electric screwdriver and move the circular cover vertically upward by a set distance through the lifting suction cup;

[0063] Step 3, using a suction cup robot to move the square glass substrate or organic packaging carrier to be loaded laterally from the gap between the circular cover and the main body to the first square opening of the main body;

[0064] Step 4: Lift the suction cup to put the circular cover back vertically onto the main board, and tighten the screws with an electric screwdriver.

[0065] Step 5, the flip frame flips over, the double-sided electroplating rack is turned to a vertical state, and the mechanical gripper moves the double-sided electroplating rack to the wet process treatment equipment.

[0066] The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable ordinary technicians in the field to understand the content of the present invention and implement it. They cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. Double-sided electroplating rack, characterized in that: include: The main board body comprises a hanger holding part located at the upper part and a substrate holding part located below the hanger holding part; the hanger holding part is provided with a cathode plug for connecting to a power socket; the substrate holding part is provided with a first square opening, the substrate holding part is provided with a first round-shaped sealing groove at the outer edge of the first square opening, a first round-shaped sealing ring is embedded in the first round-shaped sealing groove, a plurality of positioning protrusions arranged at intervals are provided at the periphery of the first round-shaped sealing groove, a plurality of the positioning protrusions are used to position the outer contour of the square substrate, a first conductive sheet is respectively provided on each side length of the periphery of the first round-shaped sealing ring, a surface edge of the first conductive sheet is in contact with a surface edge of the square substrate, each of the first conductive sheets is respectively connected to the cathode plug via a wire, an outer round-shaped sealing groove is also provided on the substrate holding part at the periphery of the first conductive sheet, an outer round-shaped sealing ring is embedded in the outer round-shaped sealing groove; A circular cover plate, which is provided with a second square opening, a second circular sealing groove is provided at the outer edge of the second square opening, a second circular sealing ring is embedded in the second circular sealing groove, a second conductive sheet is provided on each side length of the outer periphery of the second circular sealing ring, the surface edge of the second conductive sheet is in contact with the edge of the other surface of the square substrate, a plurality of cover wires are further provided in the circular cover plate, one end of the cover wire is connected to the second conductive sheet; A flexible flat cable board comprises a plurality of flat thin conductive sheets and insulating films covering the two surfaces of the thin conductive sheets, wherein adjacent thin conductive sheets are arranged in parallel and spaced apart, one end of each thin conductive sheet is welded to a cover plate wire, and the other end of each thin conductive sheet is welded to a wire on a main board body, and the wire on the main board body is connected to the cathode plug.

2. The double-sided electroplating rack according to claim 1, characterized in that: The cathode plug includes a left plug-in portion located at the left end of the hanger holding portion and a right plug-in portion located at the right end of the hanger holding portion. The cathode plug is provided with 8 plug-ins in total. The front and back sides of the left plug-in portion and the front and back sides of the right plug-in portion are each provided with two plug-ins arranged in parallel and spaced apart. A first wire is respectively led out from four of the plug-ins, and each first wire first extends on the back side of the main board body, then passes through the thickness direction of the main board body to the front side of the main board body, and finally extends along the length direction of a first conductive sheet and is pressed against the bottom of the first conductive sheet. A second wire is respectively led out from the other four plug-ins, and the flexible flat panel includes 4 thin conductive sheets, and each second wire extends from the front side of the main board body and is welded to a thin conductive sheet of the flexible flat panel.

3. The double-sided electroplating rack according to claim 2, characterized in that: There are four cover plate wires, each of which extends from the welding point with the thin conductive sheet on the front side of the circular cover plate, then passes through the thickness direction of the circular cover plate to the back side of the circular cover plate, and finally extends along the length direction of a second conductive sheet and is pressed against the bottom of the second conductive sheet.

4. The double-sided electroplating rack according to claim 2, characterized in that: The left plug-in portion is mirror-symmetrical to the right plug-in portion, and the plugs installed on the left plug-in portion and the right plug-in portion include a first L-shaped plug-in, a second L-shaped plug-in, a third L-shaped plug-in and a fourth L-shaped plug-in. The first L-shaped plug-in, the second L-shaped plug-in, the third L-shaped plug-in and the fourth L-shaped plug-in all include a transverse connecting portion for connecting to a wire and a longitudinal plug-in portion for mating with a power socket. The lengths of the longitudinal plug-in portions of the first L-shaped plug-in, the second L-shaped plug-in, the third L-shaped plug-in and the fourth L-shaped plug-in are successively longer; the left plug-in portion and the right plug-in portion both include a middle spacing portion in the middle position in the thickness direction, and upper and lower spacing portions are arranged in parallel on one side of the back of the middle spacing portion. A first transverse groove and a third transverse groove, a second transverse groove and a fourth transverse groove are arranged in parallel with each other at upper and lower intervals on the front side of the middle spacing part, the transverse connecting part of the first L-shaped plug is located in the first transverse groove, the transverse connecting part of the second L-shaped plug is located in the second transverse groove, the transverse connecting part of the third L-shaped plug is located in the third transverse groove, and the transverse connecting part of the fourth L-shaped plug is located in the fourth transverse groove; the longitudinal plug-in parts of the first L-shaped plug, the second L-shaped plug, the third L-shaped plug and the fourth L-shaped plug are isolated from each other, and the bottom of each longitudinal plug-in part has an inclined portion that gradually shrinks downward, and the bottom end surfaces of each inclined portion are flush.

5. The double-sided electroplating rack according to claim 1, characterized in that: A plurality of first pressing blocks are arranged at intervals on each of the first conductive sheets by screws, and a plurality of second pressing blocks are arranged at intervals on each of the second conductive sheets by screws.

6. The double-sided electroplating rack according to claim 5, characterized in that: The first pressing blocks and the second pressing blocks are staggered at installation positions along the length direction of the conductive sheet.

7. The double-sided electroplating rack according to claim 1, characterized in that: The circular cover plate is provided with a plurality of spaced-apart making way grooves at the periphery of the second circular sealing groove, and the positions of the making way grooves match the positioning protrusions.

8. The double-sided electroplating rack according to claim 1, characterized in that: The flexible flat panel is bent in a U shape.

9. The double-sided electroplating rack according to claim 1, characterized in that: The main body is also provided with an air passage for air tightness testing, an air nozzle is provided at the outer end of the air passage, and the end of the air passage is communicated with the space between the first circular sealing ring and the outer circular sealing ring.

10. A method for loading a square glass substrate or an organic packaging carrier, characterized in that: The double-sided electroplating rack as claimed in claim 1 comprises the following steps: Step 1, insert the double-sided electroplating rack into a flip rack with a slot, and flip the flip rack to a horizontal state; Step 2: Loosen the locking screws of the circular cover with an electric screwdriver and move the circular cover vertically upward by a set distance through the lifting suction cup; Step 3, using a suction cup robot to move the square glass substrate or organic packaging carrier to be loaded laterally from the gap between the circular cover and the main body to the first square opening of the main body; Step 4: Lift the suction cup to put the circular cover back vertically onto the main board, and tighten the screws with an electric screwdriver. Step 5, the flip frame flips over, the double-sided electroplating rack is turned to a vertical state, and the mechanical gripper moves the double-sided electroplating rack to the wet process treatment equipment.

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