Collision air flow state monitoring device

Abstract

The invention relates to the technical field of ion source collision gas flow monitoring, in particular to a collision gas flow state monitoring device which comprises a mounting seat and a gas flow sensor, a guide rail is fixedly mounted at the top of the mounting seat, and a linkage mechanism is movably mounted in the guide rail. In the using process, the connecting flange at the outer end of the armored conveying hose is communicated with a gas conveying pipeline of the ion source equipment, connection between the gas flow sensor and the ion source equipment is completed, the gas flow sensor only needs to be independently detached from the inner sides of the two sealing sleeves in the using process, dismounting and mounting are convenient and fast in the whole using period, and the using cost is reduced. And by arranging the adjusting mechanism, the device can quickly disassemble and assemble the gas flow sensor, frequent overhaul and maintenance are facilitated, the overall use convenience and adaptability of the device are improved, great convenience is brought to practical application, and it is ensured that the device plays a stable and reliable role in gas flow monitoring of ion source equipment.

Description

Technical Field

[0001] The present application relates to the technical field of ion source collision gas flow monitoring, and in particular to a collision gas flow state monitoring device. Background Art

[0002] The electrospray ion source collision gas flow state monitoring device is a professional device used to monitor the collision gas flow in the electrospray ion source. In terms of working principle, the electrospray ion source is a key component in instruments such as mass spectrometry. It ionizes the sample through the electrospray process, and the collision gas plays a role in auxiliary ionization and ion transmission in the ion source. This monitoring device is mainly used to accurately measure and record the flow state of the collision gas. In terms of structure, it usually includes a flow sensor part for sensing the flow size of the collision gas. The sensor will convert the flow signal into an electrical signal or other identifiable signal form and transmit it to the main controller of the equipment to facilitate the control of the spray gas flow state; It can be seen that the state monitoring of the collision gas flow of the electrospray ion source mainly relies on the gas flow sensor to assist in monitoring. However, when the existing gas flow sensor is used in the ion source equipment, since the ion source equipment usually requires high precision, it is usually necessary to frequently inspect and clean each sensor during daily use and maintenance to ensure its accuracy. The Chinese patent with the announcement number "CN220960190U" in the prior art discloses a thermal gas flow sensor, which includes a main pipeline, a fixed component is arranged at the bottom of the main pipeline, and an auxiliary component is embedded at the top of the main pipeline. The utility model sets the auxiliary component to slide and limit between the slider and the slide groove, and the baffle will drive the moving block to move under the blowing of the airflow. By observing the position relationship between the moving block and the middle block, the flow direction of the airflow inside the main pipeline can be known, so that the function of this thermal gas flow sensor is more comprehensive and the use effect is better; the utility model sets the fixed component, and the rotating control rod is engaged with the control rod and the bottom block, and the sliding limit is set between the connecting rod and the installation box, so that the bottom block can drive the pressure block to limit downward movement, and the two pressure blocks press the cover plate from both sides respectively, so that the connection between the cover plate and the installation box can be more firmly connected, and the control rod is rotated in the opposite direction to move the pressure block upward to remove the cover plate; The gas flow sensor mentioned above is installed in an integrated manner with the main pipeline. This installation method does have significant advantages to a certain extent. For example, it can provide strong installation stability to ensure that the sensor will not be easily displaced due to external factors during operation. It also has excellent sealing ability to effectively prevent gas leakage and ensure the safe operation of the entire system. However, this installation method also has disadvantages that cannot be ignored. It abandons the function of easy disassembly and assembly, which means that during daily maintenance and inspection, the gas flow sensor cannot be easily separated from the main pipeline. If the gas flow sensor needs to be disassembled, more extreme measures may need to be taken, such as disassembling the entire pipeline, which will undoubtedly consume a lot of time and manpower and may affect the stability of the entire system; or cutting the main pipeline, but such an operation is not only complicated, but may also cause irreparable damage to the main pipeline; Even if bolts are used for installation, it is necessary to use tools such as screwdrivers to assist in disassembly and assembly. Moreover, frequent disassembly and assembly can easily cause thread slippage or deformation damage at the screw holes. As time goes by, after a period of frequent disassembly and assembly, the bolts or screw holes may become difficult to disassemble, further increasing the difficulty of maintenance. It can be seen that this traditional installation method is obviously inconvenient in terms of inspection and maintenance, especially when frequent maintenance and cleaning are required to improve the inspection accuracy. The application of the above-mentioned sensor becomes extremely cumbersome and inconvenient. Therefore, in order to meet the needs in actual applications and improve the ease of use and maintenance efficiency of the gas flow sensor, it is urgently necessary to improve its design. Summary of the invention

[0003] In order to improve the convenience of overhaul and maintenance of ion source equipment and improve its use accuracy, the present application provides a collision gas flow state monitoring device.

[0004] The present application provides a collision gas flow state monitoring device, which adopts the following technical solution: comprising a mounting seat and a gas flow sensor, wherein a guide rail is fixedly mounted on the top of the mounting seat, a linkage mechanism is movably mounted inside the guide rail, side pipes are fixedly mounted on both sides of the top of the linkage mechanism, a sealing sleeve pipe is fixedly connected to the inner end of the side pipe, an adjustment mechanism is fixedly mounted on one side of the back of the guide rail, the adjustment mechanism and the linkage mechanism are transmission-connected, plug-in pipes are fixedly mounted on both ends of the gas flow sensor, and the ends of the plug-in pipes are inserted into the inside of the sealing sleeve pipe; The linkage mechanism includes a slider and a first gear, the slider is slidably connected to the two ends of the guide rail, the inner front end of one slider and the inner rear end of the other slider are fixedly installed with a first rack, the first gear is rotatably connected to the middle of the guide rail, the first gear and the first rack are meshed with each other, and the side pipe is fixedly installed in the middle of a slider and the bottom passes through the slider.

[0005] Optionally, the bottom of the side pipe passes through the linkage mechanism and the mounting seat, and an armored delivery hose is fixedly installed on the bottom of the side pipe.

[0006] Optionally, a connecting flange is fixedly connected to the outer end of the armored delivery hose, and mounting holes are arranged in a ring shape at equal intervals on the outer side of the connecting flange.

[0007] Optionally, sealing gaskets are sleeved on both sides of the gas flow sensor, the sealing gaskets cover the outside of the plug-in tube, and the outer ends of the sealing gaskets are inserted into the interior of the sealing sleeve tube.

[0008] Optionally, fixing seats are fixedly installed on both sides of the fixing seat, and mounting holes are also opened on the front and rear sides of the fixing seat, and the mounting holes are configured as countersunk holes.

[0009] Optionally, the adjustment mechanism includes a second gear, an adjustment assembly and a limit assembly, the second gear is fixedly connected to the top of the first gear, the adjustment assembly is fixedly installed on the back end of the guide rail, and the limit assembly is fixedly installed on the rear side of the adjustment assembly.

[0010] Optionally, the adjustment assembly includes a rail frame, which is fixedly mounted on one end of the back side of the guide rail, the rail frame is internally rotatably connected to a screw rod, the rear end of the screw rod passes through the rail frame and is connected to the limit assembly, the inner side of the rail frame is slidably connected to a sliding block, the top of the sliding block is fixedly mounted with a second rack, and the second rack is meshingly connected to a second gear.

[0011] Optionally, the overall front view shape of the sliding block is set to a cross shape, and the internal cavity cross-sectional shape of the rail frame is also set to a cross shape. Support seats are fixedly installed on both sides of the top of the guide rail, and the upper end of the support seat is fixedly installed on the receiving arc plate. The top of the receiving arc plate and the bottom of the sealing sleeve are fit-connected.

[0012] Optionally, the limit assembly includes a fixed plate and an adjusting handle, the fixed plate is fixedly installed on the rear end of the rail frame, the rear end of the screw rod passes through the fixed plate, the adjusting handle is fixedly installed on one end of the screw rod passing through the rail frame, a movable groove is opened on the inner side of the adjusting handle, the inner side of the movable groove is fixedly connected to a limit spring, the end of the limit spring is fixedly connected to a limit member, a limit pin is fixedly installed on the side of the limit member close to the fixed plate, the end of the limit pin passes through the limit member and is clamped with the fixed plate, and the outer end of the limit member is fixedly connected to a push plate.

[0013] Optionally, the outer side of the fixing plate is provided with limit holes at equal intervals, the end of the limit pin passes through the adjustment handle and is inserted into the inner side of the limit hole, and the side surface of the adjustment handle is L-shaped.

[0014] In summary, this application includes the following beneficial technical effects: 1. The coordination of the linkage mechanism and the adjustment mechanism enables the device to be linked through the adjustment mechanism and the linkage mechanism during use, thereby driving the first gear to drive the first racks meshing on both sides to slide, causing the sliders at both ends of the guide rail to slide back and forth, thereby driving the side pipe and the sealing sleeve to move. When installing the gas flow sensor, place it inside the two sealing sleeves, and the sealing sleeve is sleeved on the outside of the plug-in pipe and is sealed through the sealing gasket. The stability is strong. When disassembling, the first gear is reversed by reverse adjustment, driving the first rack to move outward, pushing the side pipe and the sealing sleeve out of the plug-in pipe, and realizing easy removal, and the overall disassembly and assembly are more convenient; 2. The setting of the adjustment mechanism enables the adjustment push plate to move the limit piece outward when disassembly is required during use, driving the limit spring to extend and the limit pin to disengage from the limit hole. At this time, the adjustment handle can be rotated to drive the screw rod to rotate in the rail frame, so that the sliding block slides and drives the second rack to move linearly. Since the second rack is meshed with the second gear, the second gear is driven to rotate, and the first gear and the second rack are driven to move synchronously, so as to realize rapid adjustment and disassembly. After disassembly and assembly are completed, the push plate is released, the limit spring is reset, and the limit pin is inserted into the limit hole, the fixing plate is clamped and the screw rod is locked, and the gas flow sensor is stably clamped and installed, which is convenient for frequent inspection and maintenance, and improves the convenience of use and adaptability of the device. 3. During use, the connection flange at the outer end of the armored delivery hose is connected to the gas delivery pipeline of the ion source equipment to complete the connection between the gas flow sensor and the ion source equipment. When in use, you only need to remove the gas flow sensor independently from the inside of the two sealing sleeves. The overall disassembly and assembly during use is convenient, which improves the ease of use. The setting of the adjustment mechanism enables the device to quickly disassemble and assemble the gas flow sensor, which is convenient for frequent inspection and maintenance, improves the overall ease of use and adaptability of the device, brings many conveniences to practical applications, and ensures that the device plays a stable and reliable role in the gas flow monitoring of the ion source equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure in the embodiment of the present application; Figure 2 It is a schematic diagram of the rear view structure in the embodiment of the present application; Figure 3 It is a schematic diagram of a top view structure in an embodiment of the present application; Figure 4 This is a schematic diagram of the structure of the gas flow sensor in the disassembled state in the embodiment of the present application; Figure 5 This is a schematic diagram of the linkage mechanism structure in the embodiment of the present application; Figure 6 This is a schematic diagram of the structure viewed from above in an embodiment of the present application; Figure 7 It is a schematic diagram of the structure of the adjustment mechanism in the embodiment of the present application; Figure 8 It is a schematic diagram of the structure of the limiting component in the embodiment of the present application.

[0016] 1. Mounting seat; 2. Gas flow sensor; 3. Guide rail; 4. Linkage mechanism; 41. Slider; 42. First gear; 43. First rack; 5. Side pipe; 6. Sealing sleeve; 7. Adjustment mechanism; 71. Second gear; 72. Limiting assembly; 721. Fixed plate; 722. Adjusting handle; 723. Movable groove; 724. Limiting spring; 725. Limiting member; 726. Limiting pin; 727. Limiting hole; 728. Push plate; 73. Adjusting assembly; 731. Rail frame; 732. Screw rod; 733. Second rack; 734. Sliding block; 8. Plug-in pipe; 9. Armored delivery hose; 10. Connecting flange; 11. Mounting hole; 12. Sealing gasket; 13. Fixed seat; 14. Support seat; 15. Receiving arc plate. DETAILED DESCRIPTION

[0017] The following is combined with Figure 1-8 This application is described in further detail.

[0018] The present application embodiment discloses a collision gas flow state monitoring device. Figure 1-8 As shown, it includes a mounting base 1 and a gas flow sensor 2, a guide rail 3 is fixedly installed on the top of the mounting base 1, a linkage mechanism 4 is movably installed inside the guide rail 3, side pipes 5 are fixedly installed on both sides of the top of the linkage mechanism 4, the inner end of the side pipe 5 is fixedly connected with a sealing sleeve pipe, an adjustment mechanism 7 is fixedly installed on one side of the back of the guide rail 3, the adjustment mechanism 7 and the linkage mechanism 4 are drivingly connected, and plug-in pipes 8 are fixedly installed on both ends of the gas flow sensor 2, and the ends of the plug-in pipes 8 are inserted into the inside of the sealing sleeve pipe;

[0019] The linkage mechanism 4 includes a slider 41 and a first gear 42. The slider 41 is slidably connected to the two ends of the guide rail 3. The inner front end of one slider 41 and the inner rear end of the other slider 41 are fixedly installed with a first rack 43. The first gear 42 is rotatably connected to the middle of the guide rail 3. The first gear 42 and the first rack 43 are meshed with each other. The side pipe 5 is fixedly installed in the middle of a slider 41 and the bottom passes through the slider 41. The linkage mechanism 4 is carefully installed inside the guide rail 3. The slider 41 in the linkage mechanism 4 can slide smoothly inside the guide rail 3, and the two sliders 41 are respectively installed with first racks 43. These first racks 43 is tightly meshed with the first gear 42 located in the middle of the guide rail 3. When the first gear 42 starts to rotate, its strong driving force can drive the two first racks 43 to move. Since the first racks 43 are connected to the slider 41, the movement of the two first racks 43 will cause the sliders 41 at both ends of the guide rail 3 to slide accurately inside the guide rail 3. A side pipe 5 is fixed to the middle of the slider 41, and the bottom of the side pipe 5 passes through the slider 41. As the slider 41 slides, the side pipe 5 will also move. The inner end of the side pipe 5 is connected to a sealing sleeve pipe, which can perfectly cooperate with the plug-in pipes 8 at both ends of the gas flow sensor 2. Such a design has many significant advantages in actual use. First, the position of the side pipe 5 can be controlled very accurately through the transmission mode of the gear rack. When the gas flow sensor 2 needs to be installed, the linkage mechanism 4 can play a key role, so that the sealing sleeve pipe is accurately sleeved on the outside of the plug-in pipe 8, thereby effectively ensuring the sealing of the connection. This sealing performance is crucial for the accurate measurement of the gas flow sensor 2, which can prevent gas leakage and ensure the accuracy of the measurement results. When the sensor needs to be disassembled, the sealing sleeve pipe can also be easily separated from the plug-in pipe 8 through the action of the linkage mechanism 4. The whole operation process is convenient and fast, which greatly improves the work efficiency. From the perspective of the overall structural design, it is simple and efficient, and the various components work together and cooperate with each other tacitly. This design provides an extremely reliable solution for the installation and maintenance of the gas flow sensor 2. Whether it is the precise positioning and sealed connection during the installation process or the convenient operation during the disassembly process, it reflects the superiority of the design and brings great convenience to practical applications.

[0020] Please refer to Figure 1-Figure 6The bottom of the side pipe 5 passes through the linkage mechanism 4 and the mounting seat 1. An armored delivery hose 9 is fixedly installed at the bottom of the side pipe 5. A connecting flange 10 is fixedly connected to the outer end of the armored delivery hose 9. The outer side of the connecting flange 10 is provided with mounting holes 11 arranged in a ring at equal intervals. The armored delivery hose 9 has certain flexibility and protection and can adapt to different installation environments and layout requirements. The connecting flange 10 at the outer end provides a convenient interface for connecting with other equipment. The mounting holes 11 arranged in a ring at equal intervals on the outer side of the connecting flange 10 make it possible to make a firm and stable connection with other equipment through bolts and other connectors during the connection process, thereby ensuring the reliability and sealing of gas transmission. This design enables the device to be easily connected to different gas delivery pipelines or equipment, enhances the versatility and practicality of the device, and provides a stable connection guarantee for accurate monitoring of gas flow.

[0021] Please refer to Figure 1-Figure 6 , both sides of the gas flow sensor 2 are sleeved with sealing gaskets 12, which cover the outer side of the plug-in tube 8, and the outer end of the sealing gasket 12 is inserted into the interior of the sealing sleeve tube. Both sides of the mounting seat 1 are fixedly installed with fixing seats 13, and the front and rear sides of the fixing seat 13 are also provided with mounting holes 11, which are set as countersunk holes. The sealing gaskets 12 sleeved on both sides of the gas flow sensor 2 cover the outer side of the plug-in tube 8 and the outer ends are inserted into the interior of the sealing sleeve tube, which enhances the sealing of the connection parts, prevents gas leakage, and ensures the accuracy of gas flow monitoring. The fixing seats 13 on both sides of the mounting seat 1 are provided with mounting holes 11 on the front and rear sides, which provide multiple fixing points for the overall installation of the device, so that the device can be more stably fixed in the desired position during use. The mounting holes 11 are set as countersunk holes, and the heads of connecting parts such as bolts can be sunk into the holes during installation, making the surface of the device smoother, reducing the impact of external collisions on the connecting parts, and also making the appearance of the device neater and more beautiful, thereby improving the installation convenience and overall stability of the device.

[0022] Please refer to Figure 1-Figure 3 and Figure 6-Figure 8The adjusting mechanism 7 includes a second gear 71, an adjusting assembly 73 and a limiting assembly 72. The second gear 71 is fixedly connected to the top of the first gear 42. The adjusting assembly 73 is fixedly installed on the back end of the guide rail 3. The limiting assembly 72 is fixedly installed on the rear side of the adjusting assembly 73. The adjusting assembly 73 includes a rail frame 731. The rail frame 731 is fixedly installed on the back end of the guide rail 3. The inner rotation of the rail frame 731 is connected with a screw rod 732. The rear end of the screw rod 732 passes through the rail frame 731 and the limiting assembly 7 2 are connected, the inner side of the rail frame 731 is slidably connected with a sliding block 734, the top of the sliding block 734 is fixedly installed with a second rack 733, the second rack 733 is meshed with the second gear 71, the overall front view shape of the sliding block 734 is set to a cross shape, the internal cavity cross-sectional shape of the rail frame 731 is also set to a cross shape, the top of the guide rail 3 is fixedly installed with a support seat 14 on both sides, the upper end of the support seat 14 is fixedly installed on the receiving arc plate 15, the top of the receiving arc plate 15 and the sealing sleeve pipe The bottom is fitted and connected, and the adjustment mechanism 7 is composed of a second gear 71, an adjustment component 73 and a limit assembly 72. The second gear 71 is fixed on the top of the first gear 42 to realize linkage. The rail frame 731 in the adjustment component 73 is fixed to one end of the back side of the guide rail 3. The rear end of the screw rod 732 rotatably connected in the rail frame 731 is provided with an adjustment handle 722, which is convenient for operation. The second rack 733 is fixed on the top of the cross-shaped sliding block 734 inside the rail frame 731 and meshes with the second gear 71. The sliding block 734 is driven to slide by rotating the screw rod 732, thereby driving the second rack 733 to linearly displace, thereby realizing transmission control of the first gear 42. The cross-shaped internal cavity of the rail frame 731 cooperates with the sliding block 734 to ensure stable and accurate sliding. The support seats 14 on both sides of the top of the guide rail 3 and the receiving arc plate 15 at the upper end support the bottom of the sealing sleeve pipe, enhance the overall structural stability of the device, ensure that each component can operate accurately and reliably during the adjustment process, and provide a stable adjustment mechanism for the installation and removal of the gas flow sensor 2.

[0023] Please refer to Figure 8The limiting assembly 72 includes a fixed plate 721 and an adjusting handle 722. The fixed plate 721 is fixedly installed on the rear end of the rail frame 731. The rear end of the screw rod 732 passes through the fixed plate 721. The adjusting handle 722 is fixedly installed on one end of the screw rod 732 passing through the rail frame 731. A movable groove 723 is provided on the inner side of the adjusting handle 722. A limiting spring 724 is fixedly connected to the inner side of the movable groove 723. The end of the limiting spring 724 is fixedly connected to a limiting member 725. A limiting pin 726 is fixedly installed on one side of the limiting member 725 close to the fixed plate 721. The end of the limiting pin 726 passes through the limiting member 725 and is clamped with the fixed plate 721. A push plate 728 is fixedly connected to the outer end of the limiting member 725. Limiting The end of the limiting pin 726 passes through the adjusting handle 722 and is inserted into the inner side of the limiting hole 727. The side shape of the adjusting handle 722 is L-shaped. The limiting assembly 72 is composed of a fixed disk 721 and an adjusting handle 722. The fixed disk 721 is fixed to the rear end of the rail frame 731. The screw rod 732 passes through the fixed disk 721. A movable groove 723 is provided on the inner side of the adjusting handle 722. A limiting spring 724 is connected to the limiting member 725. A limiting pin 726 is provided on one side of the limiting member 725, and a push plate 728 is provided at the outer end. The limiting pin 726 can pass through the limiting member 725 and be clamped with the fixed disk 721. Limiting holes 727 are provided at equal intervals on the outer side of the fixed disk 721. The end of the limiting pin 726 can be inserted into the limiting hole 727. The side shape of the adjusting handle 722 is L-shaped. During operation, the push plate 728 can control the movement of the limit member 725, so that the limit pin 726 is disengaged from or inserted into the limit hole 727, thereby locking or unlocking the screw rod 732. This design can accurately control the position of the screw rod 732 during the adjustment process to ensure the accuracy and stability of the adjustment. At the same time, the structural design of the limit assembly 72 is compact and reasonable, and the various components cooperate with each other to provide a reliable limit function for the adjustment operation of the device, thereby ensuring the safety and controllability of the gas flow sensor 2 during installation and disassembly.

[0024] The implementation principle of a collision gas flow state monitoring device in an embodiment of the present application is as follows: by setting a linkage mechanism 4 and cooperating with an adjustment mechanism 7, the device can assist in the linkage of the first gear 42 by adjusting the adjustment mechanism 7 during actual use. When the first gear 42 is driven to rotate, the first rack 43 meshed with the first gear 42 can be driven to slide. Since the two first racks 43 are respectively meshed and connected with the two sides of the first gear 42, the two first racks 43 will be driven to further cause the sliders 41 at both ends of the guide rail 3 to slide back and forth. The two sliders 41 slide back and forth on the inner side of the guide rail 3, and can drive the two side pipes 5 to slide inwardly. When the two side pipes 5 move inwardly, the sealing sleeve 6 will also be driven to move inwardly. During this period, the gas flow sensor 2 can be placed between the two sealing Between the inner sides of the sealing sleeve tube 6, at this time, the sealing sleeve 6 can be sleeved on the outer sides of the two plug-in tubes 8, and the sealing sleeve 6 and the sealing gasket 12 fit each other, thereby assisting in the sealing and installation of the two gas flow sensors 2. This design enables the device to have excellent stability during use. Moreover, if it needs to be disassembled during use, it is only necessary to reversely adjust the adjustment mechanism 7 to cause the first gear 42 of the linkage mechanism 4 to reverse. After the first gear 42 reverses, it can drive the first rack 43 to move outward, and the first rack 43 pushes the slider 41 outward, thereby pushing the two side tubes 5 to move outward. In this way, the sealing sleeve 6 will be separated from the outer surface of the plug-in tube 8, and the gas flow sensor 2 can be easily removed at this time. It can be seen that the device as a whole is more convenient during the disassembly and assembly process; The arrangement of the adjustment mechanism 7 greatly facilitates the assembly and disassembly process of the device. During the assembly and disassembly process, if disassembly is required, the limit member 725 can be pushed outward by adjusting the push plate 728. When the limit member 725 moves outward, the limit spring 724 will be extended. At this time, the limit pin 726 can be separated from the inside of the limit hole 727. When the limit pin 726 and the limit hole 727 are separated, the adjustment handle 722 can be adjusted to rotate. The adjustment handle 722 can rotate to drive the screw rod 732 to be located at the rail frame 731. The inner side of the screw rod 732 rotates, and after the screw rod 732 rotates, it can drive the sliding block 734 inside the rail frame 731 to slide. As the sliding block 734 slides, the second rack 733 can be driven to move linearly. Since the second rack 733 is meshed with the second gear 71, as the second rack 733 drives the second gear 71 to rotate, the first gear 42 and the second rack 733 can be driven to move in a synchronous manner. In this way, adjustment and disassembly can be quickly achieved. After the adjustment and disassembly are completed, the push plate 728 is released, and the limit spring 724 will return to the original position. The stop pin 726 is positioned and drives the stop pin 726 to be inserted into the inner side of the stop hole 727. The stop pin 726 and the stop hole 727 limit each other, and then the fixing plate 721 can be assisted to be clamped and installed. After the fixing plate 721 is clamped, the screw rod 732 can be assisted to be locked, thereby locking and fixing the first gear 42, the first rack 43, the second gear 71 and the second rack 733. The gas flow sensor 2 can be clamped and installed more stably as a whole. By adjusting the adjustment mechanism 7, the gas flow sensor 2 can be quickly and conveniently disassembled and assembled as a whole, which is convenient for frequent inspection and maintenance. This greatly improves the overall convenience and adaptability of the device. During use, the connecting flange 10 at the outer end of the armored delivery hose 9 can be connected to the gas delivery pipeline of the ion source device, so that the connection between the gas flow sensor 2 and the ion source device can be completed. During use, the gas flow sensor 2 only needs to be removed independently from the inner side of the two sealing sleeves 6. The overall use period can be conveniently disassembled and assembled, which greatly improves the convenience of use.

[0025] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A collision gas flow state monitoring device, comprising a mounting base (1) and a gas flow sensor (2), characterized in that: A guide rail (3) is fixedly mounted on the top of the mounting seat (1), a linkage mechanism (4) is movably mounted inside the guide rail (3), side pipes (5) are fixedly mounted on both sides of the top of the linkage mechanism (4), the inner ends of the side pipes (5) are fixedly connected to sealing sleeve pipes, an adjustment mechanism (7) is fixedly mounted on one side of the back of the guide rail (3), the adjustment mechanism (7) and the linkage mechanism (4) are drivingly connected, and plug-in pipes (8) are fixedly mounted on both ends of the gas flow sensor (2), and the ends of the plug-in pipes (8) are inserted into the interior of the sealing sleeve pipe; The linkage mechanism (4) comprises a slider (41) and a first gear (42); the slider (41) is slidably connected to the two ends of the guide rail (3); the inner front end of one slider (41) and the inner rear end of the other slider (41) are both fixedly mounted with a first rack (43); the first gear (42) is rotatably connected to the middle of the guide rail (3); the first gear (42) and the first rack (43) are meshed with each other; the side pipe (5) is fixedly mounted to the middle of a slider (41) and the bottom thereof passes through the slider (41).

2. The collision gas flow state monitoring device according to claim 1, characterized in that: The bottom of the side pipe (5) passes through the linkage mechanism (4) and the mounting seat (1), and an armored delivery hose (9) is fixedly mounted on the bottom of the side pipe (5).

3. The collision gas flow state monitoring device according to claim 2, characterized in that: The outer end of the armored delivery hose (9) is fixedly connected to a connecting flange (10), and the outer side of the connecting flange (10) is provided with mounting holes (11) arranged in a ring shape at equal intervals.

4. The collision gas flow state monitoring device according to claim 1, characterized in that: Sealing gaskets (12) are sleeved on both sides of the gas flow sensor (2), the sealing gaskets (12) cover the outside of the plug-in tube (8), and the outer ends of the sealing gaskets (12) are inserted into the interior of the sealing sleeve tube.

5. The collision gas flow state monitoring device according to claim 3, characterized in that: A fixing seat (13) is fixedly mounted on both sides of the mounting seat (1), and mounting holes (11) are also provided on both the front and rear sides of the fixing seat (13), wherein the mounting holes (11) are configured as countersunk holes.

6. The collision gas flow state monitoring device according to claim 1, characterized in that: The adjusting mechanism (7) comprises a second gear (71), an adjusting component (73) and a limiting component (72); the second gear (71) is fixedly connected to the top of the first gear (42); the adjusting component (73) is fixedly mounted on one end of the back side of the guide rail (3); and the limiting component (72) is fixedly mounted on the rear side of the adjusting component (73).

7. The collision gas flow state monitoring device according to claim 6, characterized in that: The adjustment assembly (73) comprises a rail frame (731), wherein the rail frame (731) is fixedly mounted on one end of the back side of the guide rail (3), a screw rod (732) is rotatably connected inside the rail frame (731), a rear end of the screw rod (732) passes through the rail frame (731) and is connected to the limit assembly (72), a sliding block (734) is slidably connected inside the rail frame (731), a second rack (733) is fixedly mounted on the top of the sliding block (734), and the second rack (733) is meshingly connected to the second gear (71).

8. The collision gas flow state monitoring device according to claim 7, characterized in that: The overall front view shape of the sliding block (734) is set to be a cross shape, and the cross-sectional shape of the internal cavity of the rail frame (731) is also set to be a cross shape. Support seats (14) are fixedly installed on both sides of the top of the guide rail (3), and the upper end of the support seat (14) is fixedly installed on the receiving arc plate (15). The top of the receiving arc plate (15) and the bottom of the sealing sleeve pipe are fitted and connected.

9. The collision gas flow state monitoring device according to claim 8, characterized in that: The limit assembly (72) comprises a fixed plate (721) and an adjusting handle (722); the fixed plate (721) is fixedly mounted on the rear end of the rail frame (731); the rear end of the screw rod (732) passes through the fixed plate (721); the adjusting handle (722) is fixedly mounted on one end of the screw rod (732) passing through the rail frame (731); a movable groove (723) is provided on the inner side of the adjusting handle (722); a limit spring (724) is fixedly connected to the inner side of the movable groove (723); an end of the limit spring (724) is fixedly connected to a limit member (725); a limit pin (726) is fixedly mounted on a side of the limit member (725) close to the fixed plate (721); an end of the limit pin (726) passes through the limit member (725) and is clamped with the fixed plate (721); and a push plate (728) is fixedly connected to the outer end of the limit member (725).

10. The collision gas flow state monitoring device according to claim 9, characterized in that: Limiting holes (727) are arranged at equal intervals on the outer side of the fixing plate (721); the end of the limiting pin (726) passes through the adjustment handle (722) and is inserted into the inner side of the limiting hole (727); and the side surface of the adjustment handle (722) is L-shaped.

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