Ultrahigh-temperature measurement and control system and method for high-temperature purification equipment

Abstract

The invention discloses an ultrahigh temperature measurement and control system and method for high temperature purification equipment, and the system comprises a purification furnace which comprises a furnace body and a top cover, and the middle position of the top cover is provided with a temperature measurement interface; the infrared temperature measurement system comprises an adjusting support, the adjusting support is installed on the top face of the top cover, an infrared temperature measurement instrument is installed on the adjusting support, the top end of the temperature measurement interface is detachably connected with a temperature measurement glass assembly, and an emergency protection assembly is arranged between the temperature measurement glass assembly and the top end of the temperature measurement interface; the graphite temperature measurement system comprises a stepped graphite temperature measurement cylinder, and the bottom end of the stepped graphite temperature measurement cylinder is detachably connected with a graphite temperature measurement cone; and the debugging system comprises a nine-point temperature measurement bracket and a debugging temperature measurement cone. According to the stepped graphite temperature measuring cylinder, heat absorbed in the heat preservation felt is transferred to the heat preservation felt step by step through steps, the temperature is reduced through three times of heat preservation felt cooling conduction, the melting phenomenon of steel pieces on the upper portion of the furnace body is avoided, and safe operation is guaranteed.

Description

Technical Field

[0001] The present invention relates to the field of high temperature measurement and control technology, and in particular to an ultra-high temperature measurement and control system and method for high temperature purification equipment. Background Art

[0002] High-temperature purification equipment is a type of vacuum thermal equipment. It uses advanced high-temperature purification technology to evaporate impurity elements in materials such as graphite, carbon felt, and graphite powder or generate low-melting-point halides through ultra-high temperature (≥2300°C) vacuum atmosphere and process gases, and then remove them from the product itself to achieve the purpose of purification. These purified materials are the basic materials for the production of third-generation semiconductor SiC substrate materials.

[0003] In the prior art, the temperature of the measurement area of ​​the high-temperature purification equipment measurement and control system can reach 2300-2400℃. The material of the temperature measuring device inside the insulation felt is a high-temperature resistant graphite piece. However, graphite has good thermal conductivity, and it is necessary to prevent the high temperature of graphite from being transferred to the furnace body and melting the steel parts on the furnace body. At the same time, since the temperature measuring point is not allowed to enter the effective area of ​​the high-temperature purification equipment (if it enters, the volume of the effective area will be reduced), this leads to a deviation between the temperature of the temperature measuring point of the measurement and control system and the temperature of the effective space, resulting in inaccurate temperature measurement.

[0004] Based on the above technical problems, the present invention provides an ultra-high temperature measurement and control system and method for high temperature purification equipment. Summary of the invention

[0005] The purpose of the present invention is to provide an ultra-high temperature measurement and control system for high temperature purification equipment to solve the problems existing in the prior art.

[0006] To achieve the above object, the present invention provides the following solution: The present invention provides an ultra-high temperature measurement and control system for high temperature purification equipment, comprising:

[0007] A purification furnace, the purification furnace comprising a furnace body and a top cover, the top cover is fixed on the top of the furnace body, and a temperature measurement interface is provided in the middle of the top cover;

[0008] An infrared temperature measurement system, the infrared temperature measurement system comprising an adjustment bracket, the adjustment bracket being mounted on the top surface of the top cover, an infrared thermometer being mounted on the adjustment bracket, a temperature measuring glass component being detachably connected to the top of the temperature measuring interface, the infrared temperature measurement system being arranged correspondingly to the temperature measuring glass component, and an emergency protection component being arranged between the temperature measuring glass component and the top of the temperature measuring interface;

[0009] A graphite temperature measuring system, the graphite temperature measuring system comprising a stepped graphite temperature measuring cylinder, the stepped graphite temperature measuring cylinder is coaxially and detachably connected to the bottom of the temperature measuring interface, the bottom of the stepped graphite temperature measuring cylinder extends into the furnace body, and the bottom end of the stepped graphite temperature measuring cylinder is detachably connected to a graphite temperature measuring cone;

[0010] The debugging system comprises a nine-point temperature measuring bracket and a debugging temperature measuring cone. The nine-point temperature measuring bracket is detachably connected to the effective area of ​​the furnace body. The debugging temperature measuring cone is detachably connected to the bottom end of the stepped graphite temperature measuring cylinder. A calibration point is installed at the bottom of the debugging temperature measuring cone. The calibration point is set corresponding to the infrared thermometer.

[0011] According to the ultra-high temperature measurement and control system of high-temperature purification equipment provided by the present invention, the adjustment bracket includes a base fixedly connected to the top cover, the top surface of the base is fixedly connected to a support rod, the top of the support rod is fixedly connected to a first manual adjustment slide, the top of the first manual adjustment slide is installed with a second manual adjustment slide, the sliding directions of the first manual adjustment slide and the second manual adjustment slide are perpendicular, the top of the second manual adjustment slide is fixedly connected with a mounting plate, the mounting plate is provided with a mounting slot, and the infrared thermometer is installed in the mounting slot.

[0012] According to the ultra-high temperature measurement and control system for high-temperature purification equipment provided by the present invention, the temperature measuring glass assembly includes a glass top plate and a glass bottom plate, both of which are annular structures, and an installation cavity is formed between the glass top plate and the glass bottom plate, and quartz glass is installed in the installation cavity. Sealing rings are respectively arranged between the top and bottom surfaces of the quartz glass and the inner wall of the installation cavity, and the glass top plate and the glass bottom plate are fixedly connected by fastening bolts.

[0013] According to the ultra-high temperature measurement and control system for high-temperature purification equipment provided by the present invention, the emergency protection component includes an emergency hand valve, a connecting piece is fixedly connected to the bottom of the glass bottom plate, a connecting piece is provided between the bottom of the emergency hand valve and the temperature measuring interface, the connecting piece and the top of the emergency hand valve are coaxially and detachably connected via a clamp, and the sealing ring is respectively provided between the connecting piece, the temperature measuring interface and the clamp.

[0014] According to the ultra-high temperature measurement and control system for high-temperature purification equipment provided by the present invention, the top end of the stepped graphite temperature measuring cylinder is fixedly connected to a metal threaded sleeve, and the stepped graphite temperature measuring cylinder is fixedly connected to the bottom end of the temperature measuring interface through the metal threaded sleeve.

[0015] According to the ultra-high temperature measurement and control system for high-temperature purification equipment provided by the present invention, the metal threaded sleeve fits in with the cooling water channel on the top cover.

[0016] According to the ultra-high temperature measurement and control system for high-temperature purification equipment provided by the present invention, a heat preservation ring is installed at the bottom end of the stepped graphite temperature measuring cylinder.

[0017] According to the ultra-high temperature measurement and control system for high-temperature purification equipment provided by the present invention, the calibration point includes a calibration light source, a through hole is opened at the bottom of the debugging temperature measuring cone, the calibration light source is fixed in the through hole, and the calibration light source and the infrared thermometer are arranged correspondingly.

[0018] The ultra-high temperature measurement and control method of high temperature purification equipment comprises the following steps:

[0019] Step 1: Fix the infrared thermometer on the top of the top cover by adjusting the bracket, install the emergency protection component and the temperature measuring glass component on the top of the temperature measuring interface in sequence, and cut a stepped through hole in the middle of the insulation felt in the furnace body to correspond to the stepped graphite temperature measuring cylinder;

[0020] Step 2: The debugging temperature measuring cone is installed at the bottom of the stepped graphite temperature measuring cylinder for debugging. The calibration point shows the temperature measuring position. The position of the infrared thermometer is adjusted by adjusting the bracket. After the infrared thermometer cursor captures the temperature measuring point, the bracket is fixed and adjusted, and the debugging temperature measuring cone is replaced with a graphite temperature measuring cone.

[0021] Step 3: The nine-point temperature measuring bracket is fixed in the effective area of ​​the furnace body. The nine temperature measuring points of the nine-point temperature measuring bracket are respectively installed with thermocouples. The thermocouples at the nine points are connected to the temperature control meter outside the furnace body. The furnace door is closed. The temperature inside the furnace body is heated from room temperature to 1000°C. The temperature values ​​of the nine points and the infrared thermometer are recorded. Since the temperature that the thermocouple can withstand cannot be tested in the full range, it is necessary to use mathematical modeling software to simulate the corresponding relationship between the thermocouple and the infrared thermometer above 1000°C. The corresponding relationship between the two is as follows;

[0022] Y=0.9406X+82.1601

[0023] Among them, Y is the temperature value at nine points; X is the test temperature value of the infrared thermometer;

[0024] Step 4: After cooling down, open the furnace door, remove the thermocouple and the nine-point temperature measuring bracket, and add the relationship obtained by the mathematical modeling software to the PLC temperature control system of the high-temperature purification equipment for temperature compensation.

[0025] The present invention discloses the following technical effects:

[0026] 1. The stepped graphite temperature measuring tube in the present invention transfers the absorbed heat to the insulation felt step by step through the steps. Through the cooling conduction of the insulation felt three times, the temperature of the graphite temperature measuring tube transferred to the outside of the insulation felt is reduced, the melting phenomenon of the steel parts on the upper part of the furnace body is solved, and its safe operation is ensured.

[0027] 2. The present invention can debug the temperature measurement before measurement and control by debugging the setting of the temperature measuring cone, ensuring that the temperature measuring point of the infrared thermometer of the measurement and control system is consistent with the temperature measuring point on the graphite temperature measuring cone. At the same time, the setting of the nine-point temperature measuring bracket can form a corresponding relationship between the measured value of the infrared thermometer and the actual value. A mathematical model is formed through the corresponding relationship for subsequent temperature output value compensation to ensure the accuracy of temperature measurement of high-temperature purification equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 This is a schematic diagram of the structure of the ultra-high temperature measurement and control system of the high temperature purification equipment of the present invention;

[0030] Figure 2 for Figure 1 The enlarged view of point A in the middle;

[0031] Figure 3 for Figure 1 The enlarged view of point B in the middle;

[0032] Figure 4 for Figure 1 Enlarged view of point C in the middle;

[0033] Figure 5 Axonometric diagram of the ultra-high temperature measurement and control system for high temperature purification equipment of the present invention

[0034] Figure 6 for Figure 5 The enlarged view of point D in the middle;

[0035] Figure 7 This is a schematic diagram of the structure of the temperature measuring cone for debugging of the present invention;

[0036] Figure 8 It is a structural schematic diagram of the nine-point temperature measuring bracket of the present invention.

[0037] Fig. 9 Relationship curve simulated by mathematical modeling software

[0038] Among them, 1. furnace body; 2. top cover; 3. temperature measurement interface; 4. infrared thermometer; 5. stepped graphite temperature measuring tube; 6. graphite temperature measuring cone; 7. nine-point temperature measuring bracket; 8. debugging temperature measuring cone; 9. base; 10. support rod; 11. first manual adjustment slide; 12. second manual adjustment slide; 13. mounting plate; 14. mounting groove; 15. glass top plate; 16. glass bottom plate; 17. quartz glass; 18. sealing ring; 19. emergency hand valve; 20. clamp; 21. metal threaded sleeve; 22. insulation ring; 23. calibration light source. DETAILED DESCRIPTION

[0039] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0040] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0041] Reference Figure 1-Figure 8 The present invention provides an ultra-high temperature measurement and control system for high temperature purification equipment, comprising:

[0042] A purification furnace, the purification furnace comprising a furnace body 1 and a top cover 2, the top cover 2 is fixed on the top of the furnace body 1, and a temperature measurement interface 3 is provided in the middle of the top cover 2;

[0043] An infrared temperature measurement system, the infrared temperature measurement system comprising an adjustment bracket, the adjustment bracket being mounted on the top surface of the top cover 2, an infrared thermometer 4 being mounted on the adjustment bracket, a temperature measuring glass component being detachably connected to the top of the temperature measuring interface 3, the infrared temperature measurement system being arranged correspondingly to the temperature measuring glass component, and an emergency protection component being arranged between the temperature measuring glass component and the top of the temperature measuring interface 3;

[0044] A graphite temperature measuring system, the graphite temperature measuring system comprising a stepped graphite temperature measuring cylinder 5, the stepped graphite temperature measuring cylinder 5 is coaxially and detachably connected to the bottom of the temperature measuring interface 3, the bottom of the stepped graphite temperature measuring cylinder 5 extends into the furnace body 1, and the bottom end of the stepped graphite temperature measuring cylinder 5 is detachably connected to a graphite temperature measuring cone 6;

[0045] The debugging system includes a nine-point temperature measuring bracket 7 and a debugging temperature measuring cone 8. The nine-point temperature measuring bracket 7 is detachably connected to the effective area in the furnace body 1. The debugging temperature measuring cone 8 is detachably connected to the bottom end of the stepped graphite temperature measuring cylinder 5. A calibration point is installed at the bottom of the debugging temperature measuring cone 8, and the calibration point is set corresponding to the infrared thermometer 4.

[0046] A further optimized solution is that the adjustment bracket includes a base 9 fixedly connected to the top cover 2, the top surface of the base 9 is fixedly connected to a support rod 10, the top of the support rod 10 is fixedly connected to a first manual adjustment slide 11, the top of the first manual adjustment slide 11 is installed with a second manual adjustment slide 12, the sliding directions of the first manual adjustment slide 11 and the second manual adjustment slide 12 are perpendicular, the top of the second manual adjustment slide 12 is fixedly connected to a mounting plate 13, the mounting plate 13 is provided with a mounting slot 14, and the infrared thermometer 4 is installed in the mounting slot 14.

[0047] The position of the infrared thermometer 4 can be adjusted by the cooperation of the first manual adjustment slide 11 and the second manual adjustment slide 12 , and both the first manual adjustment slide 11 and the second manual adjustment slide 12 adopt the existing technology.

[0048] A further optimized solution is that the temperature measuring glass assembly includes a glass top plate 15 and a glass bottom plate 16, both of which are annular structures, and an installation cavity is formed between the glass top plate 15 and the glass bottom plate 16, and a quartz glass 17 is installed in the installation cavity, and sealing rings 18 are respectively arranged between the top and bottom surfaces of the quartz glass 17 and the inner wall of the installation cavity, and the glass top plate 15 and the glass bottom plate 16 are fixedly connected by fastening bolts.

[0049] A further optimized solution is that the emergency protection component includes an emergency hand valve 19, a connecting piece is fixedly connected to the bottom of the glass bottom plate 16, a connecting piece is provided between the bottom of the emergency hand valve 19 and the temperature measuring interface 3, the connecting piece and the top of the emergency hand valve 19 are coaxially and detachably connected via a clamp 20, and the sealing ring 18 is respectively provided between the connecting piece, the temperature measuring interface 3 and the clamp 20.

[0050] During the operation of the high-temperature purification equipment, if fine carbon powder particles enter the measurement and control system, they will float to the inner surface of the quartz glass 17, causing the temperature detection of the infrared thermometer 4 to be distorted. Based on this, an emergency hand valve 19 is set, and the temperature measuring glass component is isolated from the high-temperature purification equipment through the emergency hand valve 19, and the clamp 20 is disassembled. After the temperature measuring glass component is removed, the carbon powder on the quartz glass 17 is cleaned, and then installed in the high-temperature purification equipment after cleaning, the hand valve is opened, and the glass temperature measuring component is connected to the high-temperature purification equipment again. In this way, the problem of fine carbon powder particles entering the measurement and control system during the operation of the high-temperature purification equipment causing the temperature detection of the infrared thermometer 4 to be distorted can be solved. And there is no need for the equipment to be cooled down to avoid affecting the operation of the equipment.

[0051] Further optimization scheme, the top of the stepped graphite temperature measuring cylinder 5 is fixedly connected with a metal threaded sleeve 21, and the stepped graphite temperature measuring cylinder 5 is fixedly connected to the bottom of the temperature measuring interface 3 through the metal threaded sleeve 21. The connection thread of the metal threaded sleeve 21 is a G thread, which can play a good sealing role inside the measurement and control system to prevent fine carbon powder particles from entering the measurement and control system and affecting the temperature measurement accuracy. When designing the top cover 2, the water channel of the top cover 2 is close to the metal threaded sleeve 21, further reducing the temperature of the metal threaded sleeve 21, solving the melting phenomenon of the upper steel parts of the furnace body 1, and ensuring its safe operation.

[0052] In a further optimized solution, the metal threaded sleeve 21 is fitted with the cooling water channel on the top cover 2. The stepped graphite temperature measuring tube 5 transfers the heat absorbed by the insulation felt step by step to the insulation felt, and the temperature is reduced through three times of insulation felt cooling conduction. In addition, the stepped shape increases the heat conduction path of the graphite, which can better reduce the surface temperature of the metal threaded sleeve 21.

[0053] According to a further optimization scheme, a heat preservation ring 22 is installed at the bottom end of the stepped graphite temperature measuring cylinder 5 .

[0054] According to a further optimization scheme, the calibration point includes a calibration light source 23, a through hole is provided at the bottom of the debugging temperature measuring cone 8, the calibration light source 23 is fixed in the through hole, and the calibration light source 23 is correspondingly arranged with the infrared thermometer 4.

[0055] The ultra-high temperature measurement and control method of high temperature purification equipment comprises the following steps:

[0056] Step 1: Fix the infrared thermometer 4 on the top of the top cover 2 by adjusting the bracket, install the emergency protection component and the temperature measuring glass component on the top of the temperature measuring interface 3 in sequence, and cut a stepped through hole in the middle of the insulation felt in the furnace body 1 to correspond to the stepped graphite temperature measuring cylinder 5;

[0057] Step 2: The debugging temperature measuring cone 8 is installed at the bottom of the stepped graphite temperature measuring cylinder 5 for debugging. The calibration point shows the temperature measuring position. The position of the infrared thermometer 4 is adjusted by adjusting the bracket. After the infrared thermometer 4 cursor captures the temperature measuring point, the bracket is fixed and adjusted, and the debugging temperature measuring cone 8 is replaced with the graphite temperature measuring cone 6.

[0058] Step three, the nine-point temperature measuring bracket 7 is fixed to the effective area in the furnace body 1, and the nine temperature measuring points of the nine-point temperature measuring bracket 7 are respectively installed with thermocouples, and the thermocouples at the 9 points are connected to the temperature control meter outside the furnace body 1, and the furnace door is closed. The temperature in the furnace body 1 is heated from room temperature to 1000°C, and the temperature values ​​of the nine points and the infrared thermometer 4 are recorded. Since the temperature that the thermocouple can withstand cannot be tested in the full range, it is necessary to use mathematical modeling software to simulate the corresponding relationship between the thermocouple above 1000°C and the infrared thermometer 4, and the corresponding relationship between the two is obtained as follows;

[0059] Y=0.9406X+82.1601

[0060] Among them, Y is the temperature value at nine points; X is the test temperature value of the infrared thermometer 4;

[0061] Step 4: After cooling, open the furnace door, remove the thermocouple and the nine-point temperature measuring bracket 7, and add the relationship obtained by the mathematical modeling software to the PLC temperature control system of the high-temperature purification equipment for temperature compensation.

[0062] In the description of the present invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0063] The embodiments described above are only descriptions of the preferred modes of the present invention, and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary technicians in this field should all fall within the protection scope determined by the claims of the present invention.

Claims

1. Ultra-high temperature measurement and control system for high temperature purification equipment, characterized in that: include: A purification furnace, the purification furnace comprising a furnace body (1) and a top cover (2), the top cover (2) being fixed on the top of the furnace body (1), and a temperature measurement interface (3) being provided in the middle of the top cover (2); An infrared temperature measurement system, the infrared temperature measurement system comprising an adjustment bracket, the adjustment bracket being mounted on the top surface of the top cover (2), an infrared thermometer (4) being mounted on the adjustment bracket, a temperature measuring glass component being detachably connected to the top of the temperature measuring interface (3), the infrared temperature measurement system being arranged correspondingly to the temperature measuring glass component, and an emergency protection component being arranged between the temperature measuring glass component and the top of the temperature measuring interface (3); A graphite temperature measuring system, the graphite temperature measuring system comprising a stepped graphite temperature measuring cylinder (5), the stepped graphite temperature measuring cylinder (5) being coaxially and detachably connected to the bottom of the temperature measuring interface (3), the bottom of the stepped graphite temperature measuring cylinder (5) extending into the furnace body (1), and the bottom end of the stepped graphite temperature measuring cylinder (5) being detachably connected to a graphite temperature measuring cone (6); A debugging system, the debugging system comprising a nine-point temperature measuring bracket (7) and a debugging temperature measuring cone (8), the nine-point temperature measuring bracket (7) being detachably connected to an effective area in the furnace body (1), the debugging temperature measuring cone (8) being detachably connected to the bottom end of the stepped graphite temperature measuring cylinder (5), a calibration point being installed at the bottom of the debugging temperature measuring cone (8), and the calibration point being arranged corresponding to the infrared thermometer (4).

2. The ultra-high temperature measurement and control system for high temperature purification equipment according to claim 1, characterized in that: The adjustment bracket comprises a base (9) fixedly connected to the top cover (2); the top surface of the base (9) is fixedly connected to a support rod (10); the top end of the support rod (10) is fixedly connected to a first manually adjustable slide (11); the top end of the first manually adjustable slide (11) is installed with a second manually adjustable slide (12); the sliding directions of the first manually adjustable slide (11) and the second manually adjustable slide (12) are perpendicular; the top end of the second manually adjustable slide (12) is fixedly connected to a mounting plate (13); the mounting plate (13) is provided with a mounting groove (14); the infrared thermometer (4) is installed in the mounting groove (14).

3. The ultra-high temperature measurement and control system for high temperature purification equipment according to claim 1, characterized in that: The temperature measuring glass assembly comprises a glass top plate (15) and a glass bottom plate (16); the glass top plate (15) and the glass bottom plate (16) are both annular structures; a mounting cavity is formed between the glass top plate (15) and the glass bottom plate (16); quartz glass (17) is mounted in the mounting cavity; sealing rings (18) are respectively arranged between the top surface and the bottom surface of the quartz glass (17) and the inner wall of the mounting cavity; the glass top plate (15) and the glass bottom plate (16) are fixedly connected by fastening bolts.

4. The ultra-high temperature measurement and control system for high temperature purification equipment according to claim 3, characterized in that: The emergency protection component comprises an emergency hand valve (19), a connecting piece is fixedly connected to the bottom of the glass bottom plate (16), a connecting piece is provided between the bottom of the emergency hand valve (19) and the temperature measuring interface (3), the connecting piece and the top of the emergency hand valve (19) are coaxially detachably connected via a clamp (20), and the sealing ring (18) is provided between the connecting piece, the temperature measuring interface (3) and the clamp (20).

5. The ultra-high temperature measurement and control system for high temperature purification equipment according to claim 1, characterized in that: The top end of the stepped graphite temperature measuring cylinder (5) is fixedly connected to a metal threaded sleeve (21), and the stepped graphite temperature measuring cylinder (5) is fixedly connected to the bottom end of the temperature measuring interface (3) via the metal threaded sleeve (21).

6. The ultra-high temperature measurement and control system for high temperature purification equipment according to claim 5, characterized in that: The metal threaded sleeve (21) fits in with the cooling water channel on the top cover (2).

7. The ultra-high temperature measurement and control system for high temperature purification equipment according to claim 1, characterized in that: A heat preservation ring (22) is installed at the bottom end of the stepped graphite temperature measuring cylinder (5).

8. The ultra-high temperature measurement and control system for high temperature purification equipment according to claim 1, characterized in that: The calibration point comprises a calibration light source (23); a through hole is provided at the bottom of the debugging temperature measuring cone (8); the calibration light source (23) is fixed in the through hole; and the calibration light source (23) and the infrared thermometer (4) are arranged correspondingly.

9. An ultra-high temperature measurement and control method for high temperature purification equipment, based on the ultra-high temperature measurement and control system for high temperature purification equipment according to any one of claims 1 to 8, characterized in that: The steps include: Step 1: fix the infrared thermometer (4) on the top of the top cover (2) by adjusting the bracket, install the emergency protection component and the temperature measuring glass component on the top of the temperature measuring interface (3) in sequence, and cut a stepped through hole in the middle of the thermal insulation felt in the furnace body (1) to correspond to the stepped graphite temperature measuring tube (5); Step 2: The debugging temperature measuring cone (8) is installed on the bottom of the stepped graphite temperature measuring cylinder (5) for debugging. The calibration point displays the temperature measuring position. The position of the infrared thermometer (4) is adjusted by adjusting the bracket. After the infrared thermometer (4) cursor captures the temperature measuring point, the bracket is fixed and adjusted, and the debugging temperature measuring cone (8) is replaced with the graphite temperature measuring cone (6); Step 3: The nine-point temperature measuring bracket (7) is fixed to the effective area in the furnace body (1), and thermocouples are respectively installed at the nine temperature measuring points of the nine-point temperature measuring bracket (7). The thermocouples at the nine-point positions are connected to the temperature control meter outside the furnace body (1). The furnace door is closed, and the temperature in the furnace body (1) is raised from room temperature to 1000° C. The temperature values ​​of the nine points and the infrared thermometer (4) are recorded. Since the temperature withstanding of the thermocouple cannot be tested in the full range, it is necessary to use mathematical modeling software to simulate the corresponding relationship between the thermocouple above 1000° C. and the infrared thermometer (4), and the corresponding relationship between the two is obtained as follows; Y=0.9406X+82.1601 Wherein, Y is the temperature value at nine points; X is the test temperature value of the infrared thermometer (4); Step 4: After the temperature drops, open the furnace door, remove the thermocouple and the nine-point temperature measuring bracket (7), and add the relationship obtained by the mathematical modeling software to the PLC temperature control system of the high-temperature purification equipment for temperature compensation.

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