Laser damage real-time test system

Abstract

The invention discloses a laser damage real-time test system which comprises a main laser, a target material, a detection system, a control system and a data processing system. The detection system comprises an attenuator, a beam splitter, a timed shutter, a convergent lens, a sensitive galvanometer and a photoelectric galvanometer which are sequentially arranged on a main optical axis, wherein the main optical axis is an optical axis where a main laser and a target material are located; the control system is used for controlling the main laser to be started and controlling the time and the power of the main laser for outputting the laser according to preset laser emitting parameters; and the data processing system is used for calculating the energy density of the laser according to the power density of the laser beams and the size of the light spots and judging the damage condition of the surface of the target material according to the imaging after the laser beams with different energies act to obtain the damage threshold value of the target material, and the damage threshold value is the maximum laser irradiation energy density with the damage probability being zero. According to the embodiment of the invention, real-time accurate measurement of a plurality of key parameters in the interaction process of the laser and the target material is realized.

Description

Technical Field

[0001] The present application belongs to the field of laser technology, and in particular relates to a real-time laser damage testing system. Background Art

[0002] With the rapid development of laser technology, the performance and application scope of lasers are expanding. The damage capacity of lasers and the degree of damage to different materials are important indicators for evaluating their performance and application effects. Therefore, how to accurately and efficiently test the damage capacity and related parameters of lasers is an urgent problem to be solved in the fields of laser technology and measurement technology.

[0003] Traditional laser damage testing methods often have certain limitations. On the one hand, these methods can usually only measure certain basic parameters of the laser, such as output power, beam quality, etc., but cannot fully and objectively reflect the laser's ability to damage a certain material; on the other hand, when evaluating the target material's damage ability, it is often only a post-measurement and relies on the observation of the target material's surface morphology or simple physical measurement, which cannot provide in-depth and accurate results and cannot meet the needs of real-time measurement of multiple parameters in damage experiments. Summary of the invention

[0004] The embodiment of the present application provides a real-time laser damage testing system, which is used to at least solve the problem in the related art that the real-time measurement requirements for multiple parameters in laser damage experiments cannot be met.

[0005] The embodiment of the present application provides a real-time laser damage testing system, including: a main laser, a target material, a detection system, a control system and a data processing system;

[0006] The detection system comprises an attenuator, a beam splitter, a timeable shutter, a converging lens, a sensitive galvanometer and a photoelectric galvanometer which are sequentially arranged on the main optical axis, and the main optical axis is the optical axis where the main laser and the target are located;

[0007] The control system is used to control the main laser to start and control the time and power of the main laser output according to the preset laser light emission parameters, so that the laser output by the main laser passes through the attenuator and the beam splitter in sequence, and the energy of the laser with a preset proportion is projected to the converging lens to irradiate the target material, and the energy of the laser other than the preset proportion is reflected by the beam splitter to the optical energy meter to detect the energy of the laser in real time through the optical energy meter;

[0008] The data processing system is used to calculate the energy density of the laser according to the power density and spot size of the laser beam, and to determine the surface damage of the target material according to the imaging after the laser beams of different energies act to obtain the damage threshold of the target material, wherein the damage threshold is the maximum laser irradiation energy density with zero damage probability.

[0009] The real-time laser damage testing system of the embodiment of the present application uniformly controls the laser and the target material through a control system, performs real-time detection of the laser and the target material during the experiment through a detection system and realizes simultaneous loading and measurement of multiple devices, thereby realizing real-time and accurate measurement of multiple key parameters in the process of interaction between the laser and the target material, and providing strong technical support for the performance evaluation of the laser and the damage degree evaluation of the target material. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] In order to more clearly illustrate the technical solution of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0011] Figure 1 It is a schematic diagram of the architecture of a laser damage real-time testing system provided in an embodiment of the present application;

[0012] Figure 2 It is a structural schematic diagram of an electronic device provided in an embodiment of the present application;

[0013] Figure 3 It is a flow chart of a real-time laser damage testing method provided in an embodiment of the present application.

[0014] Reference numerals:

[0015] Main laser 1, attenuator 2, beam splitter 3, optical energy meter 4, converging lens 5, thermal imager 6, target material 7, electrically controlled motion stage 8, sensitive galvanometer 9, photoelectric galvanometer 10, white light diode 11, test circuit 12, He-Ne laser 13, imaging lens 14, wavefront sensor array CCD 15, first electronic device 16, second electronic device 17, timeable shutter 18,

[0016] Electronic device 200 , processor 201 , memory 202 , communication interface 203 , bus 210 . DETAILED DESCRIPTION

[0017] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, rather than to limit the present application. For those skilled in the art, the present application can be implemented without the need for some of these specific details. The following description of the embodiments is only to provide a better understanding of the present application by illustrating the examples of the present application.

[0018] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the statement "include..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0019] With the rapid development of laser technology, the performance and application scope of lasers are expanding. The damage capacity of lasers and the degree of damage to different materials are important indicators for evaluating their performance and application effects. Therefore, how to accurately and efficiently test the damage capacity and related parameters of lasers is an urgent problem to be solved in the fields of laser technology and measurement technology.

[0020] For the test of laser damage, the international standard is ISO-11254 (Determination of laser-induced damage threshold of optical surfaces of lasers and laser equipment), and the relevant industry standard in my country is GB / T16601-2017 (Laser and laser-related equipment-Laser damage threshold test method). Traditional laser damage test methods often have certain limitations. On the one hand, these methods can usually only measure certain basic parameters of the laser, such as output power, beam quality, etc., and cannot fully and objectively reflect the damage ability of the laser to a certain material; on the other hand, when evaluating the damage ability of the target material, it is often only a post-measurement and relies on the observation of the surface morphology of the target material or simple physical measurement, which cannot provide in-depth and accurate results. With the current demand for real-time measurement of multiple parameters in damage experiments, current technical means have certain defects.

[0021] Currently, lasers are widely used in processing and other fields. Effectively evaluating the damage capability of lasers and the degree of damage to the corresponding target materials and obtaining the corresponding capability parameters are closely related to the normal operation of the system and are of great significance to the development of this field. It is generally believed that when the energy density (or power, energy) of the laser beam is close to or near the damage threshold of the sample, damage will appear on the sample. According to ISO-

[0022] 21254 Definition Any detectable change in an optical component can be defined as "damage", including sample surface structural destruction, structural changes, performance degradation, etc.

[0023] In order to solve the problems of related technologies, the embodiments of the present application provide a real-time laser damage testing system, which involves an advanced technical field integrating laser technology and measurement technology, especially in the research of laser damage efficiency. It not only involves the manipulation and measurement of laser beams, but also covers the processing and analysis of optical signals. It provides strong support for in-depth understanding of the laser damage mechanism, evaluation of damage effects and optimization of laser damage systems, and can measure multiple parameters in real time during the laser damage process.

[0024] The laser damage real-time testing system provided in the embodiment of the present application is described in detail below through specific embodiments and their application scenarios in conjunction with the accompanying drawings.

[0025] refer to Figure 1 , is a schematic diagram of the architecture of a real-time laser damage testing system according to an embodiment of the present application. Figure 1 As shown, the laser damage real-time test system includes: a main laser 1, a target material 7, a detection system, a control system and a data processing system. Among them, the detection system includes an attenuator 2, a beam splitter 3, a timeable shutter 18, a converging lens 5, a sensitive galvanometer 9 and a photoelectric galvanometer 10 sequentially arranged on the main optical axis. It can be understood that the main optical axis is the optical axis where the main laser 1 and the target material 7 are located.

[0026] It should be noted that in the embodiment of the present application, the target material 7 can be an optical film target material or a detector CCD target material, and the embodiment does not specifically limit the type of the target material 7. However, it should be understood that there is a certain difference in the measurement parameters of the optical film target material or the detector CCD target material. For example, in the damage degree assessment, the optical film material can be assessed by assessing the degree of damage and surface morphology, and the detector target material can be assessed by judging the parameters such as the responsivity, dark current and photocurrent.

[0027] It should be noted that in the embodiment of the present application, the instructions corresponding to the data processing system are executed by the processor of the first electronic device 16, and the instructions corresponding to the control system are executed by the processor of the second electronic device (host computer) 17. Specifically, the first electronic device 16 and the second electronic device 17 both include a processor and a memory storing computer program instructions, and their specific hardware structures will be described in the corresponding embodiments below.

[0028] In some embodiments, the control system is used to control the main laser 1 to start and control the time and power of the main laser 1 to output the laser according to the preset laser emission parameters, so that the laser output by the main laser 1 passes through the attenuator 2 and the beam splitter 3 in sequence, and the energy of the laser in a preset proportion is projected to the converging lens 5 to irradiate the target material 7, and the energy in the laser other than the preset proportion is reflected by the beam splitter 3 to the optical energy meter 4 to detect the energy of the laser in real time through the optical energy meter 4. In other words, the optical energy meter 4 is used to detect the energy of the light beam split by the beam splitter 3.

[0029] Optionally, the laser emission parameters include frequency domain parameters, time domain parameters and space parameters. Among them, the frequency domain parameters at least include: central wavelength, spectral width, spectral distribution; the time domain parameters at least include: repetition frequency, pulse width, pulse stability; the space parameters at least include: spot size, spot modulation, divergence, directivity, beam quality factor.

[0030] In some embodiments, a data processing system is used to calculate the energy density of the laser based on the power density and spot size of the laser beam, and to determine the surface damage of the target material based on the imaging after the action of laser beams of different energies to obtain a damage threshold of the target material, where the damage threshold is the maximum laser irradiation energy density with zero damage probability.

[0031] As an optional embodiment, the control system is also used to control the laser irradiation time by controlling the timeable shutter 18 to open or close.

[0032] In some optional embodiments, an electrically controlled moving stage 8 is provided at the bottom of the target material 7. Thus, the control system can also be used to control the movement of the electrically controlled moving stage 8 to drive the target material 7 thereon to move to a preset position, so that the laser spot is fully irradiated on the target material. It can be understood that the preset position is the position corresponding to the focus of the main laser 1.

[0033] In this way, through the control system, the synchronous triggering and data monitoring of the corresponding optical elements during the laser damage process can be achieved.

[0034] In some optional embodiments, the real-time laser damage test system further includes a thermal imager (imaging optical system) 6. Specifically, the thermal imager 6 is disposed between the converging lens 5 and the target material 7 and is at a first preset angle to the main optical axis, and is used to detect the thermodynamic performance parameters of the target material 7. The thermodynamic performance parameters include at least the surface temperature change data of the target material. In this way, the thermal imager 6 can be externally triggered and the temperature of the area can be measured to form a thermal image and measure the maximum temperature, minimum temperature, temperature difference range, temperature histogram, etc. set in the area.

[0035] Optionally, the thermal imager 6 can be fixed in front of the target material 7 using a tripod, about 20 degrees below the main optical axis to detect the surface temperature change of the target material 7.

[0036] In another embodiment, a lifting platform ( Figure 1 ), which is used to adjust the height position of the thermal imager 6 so that the target material 7 is within the detection field of view of the thermal imager 6.

[0037] In some optional embodiments, the laser damage real-time testing system further includes a wavefront sensing array CCD 15. Specifically, the wavefront sensing array CCD 15 is arranged at a second preset angle with the main optical axis, and is used to detect the optical performance parameters of the target 7, wherein the optical performance parameters at least include the beam quality and the spot size (i.e., the spot diameter). For example, the converging lens 5 and the wavefront array CCD 15 connected thereto can be arranged within a range of 45-60 degrees above the main optical axis.

[0038] In some optional embodiments, the laser damage real-time testing system further includes a narrow-band filter for filtering out scattered light in the optical path that may cause damage to the main laser, so as to prevent the scattered light from entering the wavefront sensing array CCD15.

[0039] In some optional embodiments, the laser damage real-time testing system further includes a white light diode 11, which is disposed within a cone angle of a third preset angle above the main optical axis, for achieving clear imaging of the wavefront array sensor CCD 15. For example, the white light diode 11 can be disposed within a cone angle of approximately 30 degrees above the main optical axis.

[0040] In some optional embodiments, the laser damage real-time test system further includes a test circuit 12, a He-Ne laser 13, and an imaging lens 14. Specifically, the test circuit 12 is used to measure the responsiveness of the detector target material 7 in real time. The He-Ne laser 13 is used to incident the He-Ne laser onto the target material 7 at a fourth preset angle (e.g., 45 degrees) and overlap the spot of the laser output by the main laser 1, so that the corresponding reflected light is received by the wavefront array sensor CCD15.

[0041] Optionally, the auxiliary He-Ne laser 13 and the test circuit 12 can be set about 45-60 degrees below the main optical axis.

[0042] In addition, in some embodiments, the data processing system is specifically used to determine the damage condition of the surface of the target material 7 based on the response change data of the target material 7 when the target material 7 is a detector CCD target material, wherein the response change data of the target material 7 is obtained by measuring the photocurrent of the target material 7 to the He-Ne laser by a sensitive galvanometer 9 and a photoelectric galvanometer 10.

[0043] also, Figure 2 A more specific hardware structure diagram of a first electronic device or a second electronic device provided in this embodiment is shown.

[0044] like Figure 2 As shown, the electronic device 200 may include a processor 201 and a memory 202 storing computer program instructions.

[0045] Specifically, the processor 201 may include a central processing unit (CPU), or an application specific integrated circuit (ASIC), or may be configured to implement one or more integrated circuits of the embodiments of the present application.

[0046] The memory 202 may include a large capacity memory for data or instructions. By way of example and not limitation, the memory 202 may include a hard disk drive (HDD), a floppy disk drive, a flash memory, an optical disk, a magneto-optical disk, a magnetic tape, or a universal serial bus (USB) drive or a combination of two or more of these. In appropriate cases, the memory 202 may include a removable or non-removable (or fixed) medium. In appropriate cases, the memory 202 may be inside or outside the integrated gateway disaster recovery device. In a specific embodiment, the memory 202 is a non-volatile solid-state memory.

[0047] In certain embodiments, the memory may include a read-only memory (ROM), a random access memory (RAM), a magnetic disk storage medium device, an optical storage medium device, a flash memory device, an electrical, optical or other physical / tangible memory storage device. Thus, typically, the memory includes one or more tangible (non-transitory) computer-readable storage media (e.g., a memory device) encoded with software including computer-executable instructions, and when the software is executed (e.g., by one or more processors), it is operable to perform the operations described with reference to the method according to one aspect of the present application.

[0048] In some examples, the electronic device 200 may further include a communication interface 203 and a bus 210. Figure 2 As shown, the processor 201, the memory 202, and the communication interface 203 are connected via a bus 210 and communicate with each other.

[0049] The communication interface 203 is mainly used to implement communication between various modules, devices, units and / or equipment in the embodiments of the present application.

[0050] Bus 210 includes hardware, software or both, and the components of online data flow billing equipment are coupled to each other. For example, but not limitation, bus 210 may include accelerated graphics port (AGP) or other graphics bus, enhanced industrial standard architecture (EISA) bus, front-end bus (FSB), hypertransport (HT) interconnection, industrial standard architecture (ISA) bus, infinite bandwidth interconnection, low pin count (LPC) bus, memory bus, micro channel architecture (MCA) bus, peripheral component interconnection (PCI) bus, PCI-Express (PCI-X) bus, serial advanced technology attachment (SATA) bus, video electronics standard association local (VLB) bus or other suitable bus or two or more of these combinations. In appropriate cases, bus 210 may include one or more buses. Although the present application embodiment describes and shows a specific bus, the present application considers any suitable bus or interconnection.

[0051] Exemplarily, the electronic device 200 may be a mobile phone, a tablet computer, a laptop computer, a PDA, an in-vehicle electronic device, an ultra-mobile personal computer (UMPC), a netbook, or a personal digital assistant (PDA).

[0052] Thus, the laser system can output lasers of different times and parameters to radiate the target 7 by the host computer 17 control system, and at the same time use the attenuator 2 and the beam splitter 3 to adjust the laser intensity and measure the laser energy; the detection system includes a thermal detection module and an optical detection module to detect the optical and thermodynamic properties of the target 7; at the same time, an electric control displacement module is installed at the bottom of the target 7 to achieve accurate strikes and high-precision displacement of the target 7; the data processing system is connected to the computer 16, detects parameters such as target power density and implements the judgment of the damage of the laser. Therefore, the laser damage real-time test system composed of the laser system, the damage target system, the test system, the motion module and the data processing system can accurately measure the relevant parameters in the laser damage experiment, including laser parameters, damage threshold, optical parameters, thermal parameters, etc., as well as the corresponding entire process such as data processing and evaluation.

[0053] It should be noted that, for the convenience of description, the above device or system is described as various modules according to their functions. Of course, when implementing this application, the functions of each module can be implemented in the same or multiple software and / or hardware.

[0054] The functional blocks shown in the above-described block diagram can be implemented as hardware, software, firmware or a combination thereof. When implemented in hardware, it can be, for example, an electronic circuit, an application specific integrated circuit (ASIC), appropriate firmware, a plug-in, a function card, etc. When implemented in software, the elements of the present application are programs or code segments that are used to perform the required tasks. The program or code segment can be stored in a machine-readable medium, or transmitted on a transmission medium or a communication link by a data signal carried in a carrier wave. "Machine-readable medium" can include any medium capable of storing or transmitting information. Examples of machine-readable media include electronic circuits, semiconductor memory devices, ROM, flash memory, erasable ROM (EROM), floppy disks, CD-ROMs, optical disks, hard disks, optical fiber media, radio frequency (RF) links, etc. The code segment can be downloaded via a computer network such as the Internet, an intranet, etc.

[0055] Furthermore, the present application also provides a real-time laser damage testing method. It should be noted that the real-time laser damage testing method can be applied to the real-time laser damage testing device of any of the above embodiments.

[0056] Figure 3 FIG. 2 is a flow chart showing a method for real-time testing of laser damage according to an embodiment of the present application. Figure 3 As shown, the real-time laser damage testing method can specifically include the following steps: establishing a laser system, determining a damage target, building a damage parameter testing system, assembling and jointly debugging the system, and collecting data and evaluating damage effects.

[0057] The specific implementation methods of the above steps are introduced below.

[0058] It should be noted that in the embodiments of the present application, the parameters involved in each optical element include at least: main laser, wavelength, spectrum, energy, power density, beam quality, etc. If it is a pulsed laser, it should also include repetition rate, pulse, pulse stability, pulse waveform, etc.; target material, target power density, damage threshold, target spot size, damage duration, surface morphology change; thermodynamic parameters, maximum damage temperature in the center of the target material, temperature difference histogram.

[0059] It should be noted that in the embodiments of the present application, some parameters need to be tested multiple times, for example, repeated 5 times or more and the average value is taken to accurately measure a certain parameter.

[0060] It should be noted that in the embodiment of the present application, the spot area of ​​the laser is defined according to the international standard ISO11253, by testing the spatial distribution of the beam energy on the equivalent surface, and taking the area inside the curve corresponding to the laser intensity peak as the effective area of ​​the laser beam. For example, the spot diameter measured by CCD is about 0.4 mm.

[0061] It should be noted that in the embodiments of the present application, the laser damage threshold is measured using a 1-on-1 method, where the damage threshold is defined as the maximum laser irradiation energy density at which the damage probability is zero.

[0062] In some embodiments, the wavelength and system (continuous / pulsed) of the main laser are determined, and the parameters of the main laser are set by the host computer control system. The set parameters include but are not limited to: frequency domain related parameters (central wavelength, spectral width, spectral distribution); time domain related parameters (repetition frequency, pulse width, pulse stability); space related parameters (spot size, spot modulation, divergence, directivity, beam quality factor), etc.

[0063] In some embodiments, there is a certain gap in the measurement parameters of the target material, optical film target material or detector CCD target material, etc. The damage threshold range of the target material is calibrated to roughly determine the power and time required for the main laser to be turned on when damaged, so as to reduce the number of experiments.

[0064] In some embodiments, related optical elements are connected to complete the optical path construction, and the parameters of the attenuator and the beam splitter are confirmed, wherein the attenuator can adjust the energy of the incident laser.

[0065] Optionally, the display device in the embodiment of the present application can display the relevant laser parameters being measured, and the control device is used to control various measuring devices and spectroscopic devices, including realizing functions such as opening and closing, synchronous triggering, and displacement control.

[0066] In some embodiments, a host computer is used to control the laser to be ready to turn on, and the target material is mounted on an electrically controlled motion stage. It should be noted that the stage is electrically controlled and can be precisely controlled to ensure that the laser spot is fully irradiated on the target material.

[0067] In specific implementation, each time laser irradiation is completed, the position of the target is moved by adjusting the electric-controlled translation stage to ensure that each light emission only irradiates the area on the sample surface that has not been irradiated by the laser.

[0068] In some embodiments, the main laser is turned on and a mid-infrared band can be used, which is invisible to the naked eye but has a higher intensity. The energy of the laser is continuously adjusted by changing the laser operating current.

[0069] Therefore, the damaging laser first passes through the attenuator and then reaches the beam splitter. The beam splitter must be calibrated in advance so that the energy of the laser can be monitored in real time by the energy meter during the experiment. Specifically, most of the energy (95%) is projected to the converging lens, and the remaining energy is reflected by the beam splitter to the optical energy meter (i.e., the energy collection system) to detect the laser energy. The laser is then converged at the converging lens and focused on the target.

[0070] During specific implementation, a computer-controlled shutter can be used to accurately control the laser irradiation time.

[0071] In specific implementation, the white light diode is adjusted so that the wavefront array sensor CCD can present a clear image and detect it in real time in the computer to obtain parameters such as the spot area.

[0072] During specific implementation, attention should be paid to the placement angle of the He-Ne laser and the white light diode to prevent it from affecting the detection area.

[0073] Thus, the damage state of the sample surface is monitored in real time by the He-Ne laser, which is incident on the sample at 45 degrees and overlaps with the damage laser spot, and its reflected light is received by the sensor CCD. In other words, the He-Ne laser mainly acts as a reference light.

[0074] Furthermore, in some embodiments, the responsivity of the detector (target material) is obtained by measuring the photocurrent of the detector (target material) to the He-Ne laser and using a sensitive galvanometer and a photoelectric galvanometer for measurement. It can be understood that when the detector target material is damaged by the laser, the responsivity decreases. Therefore, when a change in the test circuit is detected, the damage of the detector target material can be determined by comparing the responsivity change before and after the detection.

[0075] In some optional embodiments, in order to prevent the scattered light that damages the main laser from entering the wavefront array detector CCD and interfering with the result, an aperture and a narrow-band filter with a spectral passband center of 632nm are added in front of the wavefront array detector CCD to filter out the scattered light. The wavefront array detector CCD can detect the damage of the target surface in real time.

[0076] In some optional embodiments, the thermal imager is installed in front of the target material using a lifting platform so that the target material is placed within its detection field of view to observe the thermodynamic parameters of the target material, including temperature and thermodynamic changes. In this way, the ablation and back-spray characteristics of the target material and the target damage morphology can be recorded in real time. Taking the thermal imager FOTRIC600 as an example, it can be externally triggered and the temperature of the area can be measured to form a thermal image and measure the highest temperature, lowest temperature, temperature difference range, temperature histogram, etc. set in the area.

[0077] In specific implementation, the target material can use a wavefront array sensor CCD to measure the change in its damage degree during the damage experiment. In addition, after the test, an electron microscope is used to observe and analyze the surface microscopic morphology.

[0078] Furthermore, in some embodiments, the data processing system calculates the energy density of the laser based on the power density and spot size of the laser beam, and judges the surface damage of the target material based on the sample imaging after the action of laser beams of different energies to ultimately determine the damage threshold of the target material.

[0079] Thus, optical thin film materials are evaluated by assessing the degree of damage and surface morphology, and target materials such as detectors are evaluated by judging parameters such as responsivity, dark current, and photocurrent.

[0080] It can be seen that the real-time test method for laser damage in the embodiment of the present application, after the preparation work is completed, the main laser is powered on and the power is set to record the relevant output parameters. The parameters of the damaged target are then confirmed, and the control system is used to control the parameter test of the target system and the data monitoring and monitoring module. After the test starts, the corresponding data is detected using each module of the test system to detect the damage of the target material and record the parameters involved in the damage, such as spot size, target power density, surface morphology damage, light / dark current changes and responsiveness. The system is assembled and debugged to ensure synchronous triggering and data acquisition, and the test ensures the accuracy of the data. Finally, the data is analyzed and evaluated for the next iterative optimization to measure more accurate parameters.

[0081] Therefore, combined with advanced optical measurement technology and data processing methods, the real-time measurement and data processing system greatly shortens the experimental time and improves the experimental efficiency; the high-precision measurement equipment ensures the accuracy of the experimental data, is more intelligent than manual observation, reduces the error rate, and has strong applicability and practicality, providing strong support for the research on laser damage mechanism; it integrates specific processes and comprehensively analyzes the specific required parameters, and the experimental device can measure parameters in multiple experimental processes, which can more comprehensively grasp the specific circumstances of target material damage, help to deeply analyze the laser damage mechanism, and provide a scientific basis for the application of laser technology.

[0082] It should be noted that the above describes some embodiments of the present application. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recorded in the claims can be performed in an order different from that in the above embodiments and still achieve the desired results. In addition, the processes depicted in the accompanying drawings do not necessarily require the specific order or continuous order shown to achieve the desired results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0083] Reference to "embodiment" in this application means that a particular feature, structure, or characteristic described in conjunction with the embodiment may be included in at least one embodiment of the present application. The appearance of the phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments.

[0084] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "attached" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0085] In the embodiments of the present application, the same reference numerals represent the same components, and for the sake of brevity, detailed descriptions of the same components are omitted in different embodiments. It should be understood that the thickness, length, width and other dimensions of various components in the embodiments of the present application shown in the drawings, as well as the overall thickness, length, width and other dimensions of the integrated device are only exemplary descriptions and should not constitute any limitation to the present application.

[0086] The term "plurality" used in the present application refers to two or more (including two).

[0087] Although the present application has been described with reference to preferred embodiments, various modifications may be made thereto and parts thereof may be replaced with equivalents without departing from the scope of the present application. In particular, the various technical features mentioned in the various embodiments may be combined in any manner as long as there is no structural conflict. The present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

[0088] It should also be noted that the exemplary embodiments mentioned in this application describe some methods or systems based on a series of steps or devices. However, this application is not limited to the order of the above steps, that is, the steps can be performed in the order mentioned in the embodiment, or in a different order from the embodiment, or several steps can be performed simultaneously.

[0089] The above is only a specific implementation of the present application. Those skilled in the art can clearly understand that for the convenience and simplicity of description, the specific working processes of the systems, modules and units described above can refer to the corresponding processes in the aforementioned method embodiments, and will not be repeated here. It should be understood that the protection scope of the present application is not limited to this. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed in this application, and these modifications or replacements should be included in the protection scope of this application.

Claims

1. A laser damage real-time testing system, characterized in that: include: Main laser, target material, detection system, control system and data processing system; The detection system comprises an attenuator, a beam splitter, a timeable shutter, a converging lens, a sensitive galvanometer and a photoelectric galvanometer which are sequentially arranged on the main optical axis, and the main optical axis is the optical axis where the main laser and the target are located; The control system is used to control the main laser to start and control the time and power of the main laser output according to the preset laser light emission parameters, so that the laser output by the main laser passes through the attenuator and the beam splitter in sequence, and the energy of the laser with a preset proportion is projected to the converging lens to irradiate the target material, and the energy of the laser other than the preset proportion is reflected by the beam splitter to the optical energy meter to detect the energy of the laser in real time through the optical energy meter; The data processing system is used to calculate the energy density of the laser according to the power density and spot size of the laser beam, and to determine the surface damage of the target material according to the imaging after the laser beams of different energies act to obtain the damage threshold of the target material, wherein the damage threshold is the maximum laser irradiation energy density with zero damage probability.

2. The laser damage real-time testing system according to claim 1, characterized in that: The control system is also used to control the laser irradiation time by controlling the opening or closing of the timeable shutter.

3. The laser damage real-time testing system according to claim 1, characterized in that: An electrically controlled motion stage is provided at the bottom of the target; The control system is also used to control the movement of the electrically controlled motion stage to drive the target material thereon to move to a preset position so that the laser spot is completely irradiated on the target material. The preset position is the position corresponding to the focus of the main laser.

4. The laser damage real-time testing system according to claim 1, characterized in that: The laser damage real-time testing system also includes a thermal imager and a wavefront sensing array CCD; The thermal imager is disposed between the converging lens and the target material and is at a first preset angle to the main optical axis, and is used to detect thermodynamic performance parameters of the target material, wherein the thermodynamic performance parameters at least include surface temperature change data of the target material; The wavefront sensing area array CCD is arranged at a second preset angle with respect to the main optical axis, and is used to detect the optical performance parameters of the target material, wherein the optical performance parameters at least include beam quality and spot size.

5. The laser damage real-time testing system according to claim 4, characterized in that: A lifting platform is arranged below the thermal imager, which is used to adjust the height position of the thermal imager so that the target material is within the detection field of view of the thermal imager.

6. The laser damage real-time testing system according to claim 4, characterized in that: The laser damage real-time testing system also includes a narrow-band filter for filtering out scattered light in the optical path that may damage the main laser, so as to prevent the scattered light from entering the wavefront sensing area array CCD.

7. The laser damage real-time testing system according to claim 4, characterized in that: The laser damage real-time testing system also includes a white light diode, which is arranged in a cone angle of a third preset angle above the main optical axis and is used to achieve clear imaging of the wavefront sensing area array CCD.

8. The laser damage real-time testing system according to claim 4, characterized in that: The laser damage real-time testing system also includes a testing circuit, a He-Ne laser, and an imaging lens; The He-Ne laser is used to incident the He-Ne laser onto the target material at a fourth preset angle and overlap the light spot of the laser output by the main laser, so that the corresponding reflected light is received by the wavefront sensing area array CCD.

9. The laser damage real-time testing system according to claim 8, characterized in that: The data processing system is specifically used to determine the damage condition of the target material surface according to the target material's response change data when the target material is a detector CCD target material. The target material's response change data is obtained by measuring the photocurrent of the target material to He-Ne laser by the sensitive galvanometer and the photoelectric galvanometer.

10. The laser damage real-time testing system according to claim 1, characterized in that: The laser emission parameters include frequency domain parameters, time domain parameters and space parameters; The frequency domain parameters include at least: central wavelength, spectrum width, and spectrum distribution; The time domain parameters include at least: repetition frequency, pulse width, and pulse stability; The spatial parameters include at least: spot size, spot modulation, divergence, directivity, and beam quality factor.

Images