Integrated laser radar chip and laser radar device

Abstract

The invention relates to the technical field of laser radars, in particular to an integrated laser radar chip and a laser radar device.The integrated laser radar chip comprises an input coupler, a gating switch array, an interlayer coupler, a phase shifter, a beam splitter and an optical antenna array which are integrated on the same chip and connected through waveguides to form a waveguide link. The input coupler receives detection light generated by the laser device, channels are selected through the gating switch array, scanning in one direction can be achieved, after the scanning direction is determined through gating scanning, the phase of the detection light of each channel is adjusted through the phase shifter, scanning in the other direction can be achieved, and through the combination of interlayer phase adjustment and channel selection, scanning in the other direction can be achieved. According to the invention, two-dimensional scanning can be realized through combination of interlayer phase adjustment and channel selection, the lens does not need to be rotated by assistance of a mechanical structure, the full-solid-state end surface emission focal plane array can be realized, and large-scale application is facilitated.

Description

Technical Field

[0001] The present invention relates to the field of laser radar technology, and in particular to an integrated laser radar chip and a laser radar device. Background Art

[0002] LiDAR (light detection and ranging) is a radar system that uses laser beams to detect the position, speed and other characteristic quantities of a target. Its working principle is to transmit a detection signal (laser beam) to the target, and then compare the received signal reflected from the target (target echo) with the transmitted signal. After appropriate processing, relevant information about the target can be obtained. For example, in the field of unmanned driving, LiDAR can be used to transmit laser pulses, receive laser pulses reflected from surrounding target objects, and measure the distance to the target object to accurately reproduce the environment around the vehicle.

[0003] Among various LiDAR technology routes, the end-emitting focal plane array has the advantages of simple structure, low power consumption, large detection range and low system complexity, and has therefore attracted much attention in the industry. However, the existing two-dimensional scanning of the end-emitting focal plane array requires the use of a mechanical structure to rotate the lens, which has problems in terms of reliability and service life, and cannot be applied on a large scale. Summary of the invention

[0004] The present invention provides an integrated laser radar chip and a laser radar device, which are used to solve the defect that the two-dimensional scanning of the end-face emission focal plane array in the existing laser radar device can only be achieved by rotating the lens with the help of a mechanical structure.

[0005] The present invention provides an integrated laser radar chip, including an input coupler, a gate switch array, an interlayer coupler, a phase shifter, a beam splitter and an optical antenna array, wherein the input coupler is used to receive input detection light; the gate switch array is composed of a plurality of gate switches arranged in a matrix to form a plurality of channels, which are used to route the detection light to the corresponding channels; the interlayer coupler is used to transmit the detection light to different structural layers; the phase shifter is used to adjust the phase of the detection light; the beam splitter is used to split the detection light into multiple beams; the optical antenna array is composed of a plurality of optical antenna end faces A matrix end-face output waveguide is formed to emit the detection light out of the integrated laser radar chip; the input coupler, the gating switch array, the interlayer coupler, the phase shifter, the beam splitter and the optical antenna array are integrated on the same chip and linked by waveguides to form a waveguide link, wherein the input coupler is located at the input end of the waveguide link, the optical antenna array is located at the output end of the waveguide link, the interlayer coupler is located before the phase shifter in the waveguide link, and the gating switch array is located before the beam splitter in the waveguide link.

[0006] According to an integrated laser radar chip provided by the present invention, the waveguide link is composed of the input coupler, the interlayer coupler, the phase shifter, the gating switch array, the beam splitter and the optical antenna array, which are linked in sequence through a waveguide.

[0007] According to an integrated laser radar chip provided by the present invention, the waveguide link is composed of the input coupler, the interlayer coupler, the gating switch array, the phase shifter, the beam splitter and the optical antenna array, which are linked in sequence through a waveguide.

[0008] According to an integrated laser radar chip provided by the present invention, the waveguide link is composed of the input coupler, the interlayer coupler, the gating switch array, the beam splitter, the phase shifter and the optical antenna array, which are linked in sequence through a waveguide.

[0009] According to an integrated laser radar chip provided by the present invention, the waveguide link is composed of the input coupler, the gating switch array, the beam splitter, the interlayer coupler, the phase shifter and the optical antenna array connected in sequence through a waveguide.

[0010] According to an integrated laser radar chip provided by the present invention, the waveguide link is composed of the input coupler, the gating switch array, the interlayer coupler, the phase shifter, the beam splitter and the optical antenna array connected in sequence through a waveguide.

[0011] According to an integrated laser radar chip provided by the present invention, the waveguide link is composed of the input coupler, the gating switch array, the interlayer coupler, the beam splitter, the phase shifter and the optical antenna array connected in sequence through a waveguide.

[0012] According to an integrated laser radar chip provided by the present invention, the input coupler includes at least one of an edge coupler and a vertical coupler; the gating switch array includes at least one of a multimode interference coupler tree, a microring and a micro-electromechanical system; the interlayer coupler includes at least one of a mode spot converter and a vertical coupler; the phase shifter includes at least one of a thermo-optical phase shifter, an electro-optical phase shifter and a passive delay line phase shifter; the beam splitter includes at least one of a Y-type beam splitter, a multimode interference coupler type beam splitter, a directional coupler type beam splitter and an arrayed waveguide grating type coupler.

[0013] According to an integrated laser radar chip provided by the present invention, the manufacturing materials used for the input coupler, the gating switch array, the interlayer coupler, the phase shifter, the beam splitter and the optical antenna array include at least one of InP, GaAs, Si, SiN, Al2O3, AlN, LiNbO3 and polymer waveguide materials.

[0014] The present invention also provides a laser radar device, comprising an integrated laser radar chip as described in any one of the above, and also comprising a laser and a lens, wherein the laser is used to generate detection light; the integrated laser radar chip is connected to the laser, and is used to receive the detection light generated by the laser, and emit the detection light out of the integrated laser radar chip after processing; the transmitting end surface of the optical antenna array of the integrated laser radar chip is located in the focal plane of the lens, and the lens is used to collimate and redirect the detection light emitted by the integrated laser radar chip.

[0015] The integrated laser radar chip and laser radar device provided by the present invention receive the detection light generated by the laser by the input coupler, and combine the channel selection by adjusting the interlayer phase, and finally transmit the focal plane array from the end face of the optical antenna array to the lens for two-dimensional scanning. Among them, the gating switch array is used to route the detection light to the corresponding channel, which can realize the waveguide channel selection; the interlayer coupler is used to transmit the detection light to different structural layers, the beam splitter is used to divide the detection light into multiple beams, and the phase shifter is used to adjust the detection light phase to realize the adjustment of the interlayer phase; the optical antenna array is composed of a plurality of optical antenna end faces to form a matrix end face output waveguide, and by selecting the channel, scanning in one direction (for example, horizontal) can be realized. After the scanning direction is determined by the gating scanning, the scanning in another direction (for example, vertical) can be realized by adjusting the phase of the detection light of each channel, and two-dimensional scanning can be realized by combining the horizontal and vertical scanning. This integrated laser radar chip of the present invention can realize two-dimensional scanning by adjusting the interlayer phase in combination with channel selection, without the need for mechanical structure to assist in rotating the lens, and can realize a fully solid-state end face emission focal plane array, which is conducive to large-scale application. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 It is one of the embodiment structures of the integrated laser radar chip provided by the present invention.

[0018] Figure 2This is the second embodiment structure of the integrated laser radar chip provided by the present invention.

[0019] Figure 3 This is the third embodiment structure of the integrated laser radar chip provided by the present invention.

[0020] Figure 4 This is the fourth embodiment structure of the integrated laser radar chip provided by the present invention.

[0021] Figure 5 This is the fifth embodiment structure of the integrated laser radar chip provided by the present invention.

[0022] Figure 6 This is the sixth embodiment structure of the integrated laser radar chip provided by the present invention.

[0023] Figure 7 It is a schematic diagram of the structure of an embodiment of the optical antenna array provided by the present invention.

[0024] Figure 8 It is a schematic diagram of the longitudinal scanning angle of the optical antenna array provided by the present invention when the longitudinal phase difference is 0.

[0025] Fig. 9 It is a schematic diagram of the longitudinal scanning angle of the optical antenna array provided by the present invention when the longitudinal phase difference is Π / 2.

[0026] Fig.10 It is a schematic diagram of the longitudinal scanning angle of the optical antenna array provided by the present invention when the longitudinal phase difference is -Π / 2.

[0027] Fig.11 It is a schematic diagram of the structure of the laser radar device provided by the present invention.

[0028] Figure numerals: 1. integrated lidar chip; 11. input coupler; 12. gate switch array; 13. interlayer coupler; 14. phase shifter; 15. beam splitter; 16. optical antenna array; 2. laser; 3. lens. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] In the description of the embodiments of the present invention, it should be noted that the terms used are only for describing specific embodiments and are not intended to limit the present disclosure. The terms "including", "comprising", etc. used in the embodiments of the present invention indicate the existence of the features, steps, operations and / or components, but do not exclude the existence or addition of one or more other features, steps, operations or components.

[0031] All terms (including technical and scientific terms) used in the embodiments of the present invention have the meanings commonly understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification, and should not be interpreted in an idealized or overly rigid manner.

[0032] In the description of the embodiments of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

[0033] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0034] In the description of the embodiments of the present invention, the user information (including but not limited to user personal information, user image information, user device information, such as location information, etc.) and data (including but not limited to data used for analysis, stored data, displayed data, etc.) involved are all information and data authorized by the user or fully authorized by all parties, and the collection, storage, use, processing, transmission, provision, disclosure and application of the relevant data comply with the relevant laws, regulations and standards of the relevant countries and regions, take necessary confidentiality measures, do not violate public order and good morals, and provide corresponding operation entrances for users to choose to authorize or refuse.

[0035] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0036] Combine the following Figures 1 to 11 The structure and working process of the integrated laser radar chip and laser radar device of the present invention are described.

[0037] On the one hand, the present invention provides an integrated laser radar chip, see Figure 1 As shown, it includes an input coupler 11, a gate switch array 12, an interlayer coupler 13, a phase shifter 14, a beam splitter 15 and an optical antenna array 16, wherein the input coupler 11 is used to receive input detection light; the gate switch array 12 is composed of a plurality of gate switches arranged in a matrix to form a plurality of channels for routing the detection light to the corresponding channels; the interlayer coupler 13 is used to transmit the detection light to different structural layers; the phase shifter 14 is used to adjust the phase of the detection light; the beam splitter 15 is used to split the detection light into multiple beams; the optical antenna array 16 is composed of a plurality of optical antennas The end faces form a matrix end face output waveguide, which is used to emit the detection light out of the integrated laser radar chip; the input coupler 11, the gate switch array 12, the interlayer coupler 13, the phase shifter 14, the beam splitter 15 and the optical antenna array 16 are integrated on the same chip and connected by waveguides to form a waveguide link, wherein the input coupler 11 is located at the input end of the waveguide link, the optical antenna array 16 is located at the output end of the waveguide link, the interlayer coupler 13 is located before the phase shifter 14 in the waveguide link, and the gate switch array 12 is located before the beam splitter 15 in the waveguide link.

[0038] It can be understood that the integrated laser radar chip of this embodiment can be used in a laser radar device to form a laser radar device based on a multi-layer architecture end-face emission focal plane array. The input coupler 11 receives the detection light generated by the laser, and through the adjustment of the interlayer phase combined with the channel selection, the optical antenna array 16 end face emits the focal plane array to the lens for two-dimensional scanning. Among them, the gating switch array 12 is used to route the detection light to the corresponding channel, which can realize the waveguide channel selection; the interlayer coupler 13 is used to transmit the detection light to different structural layers, the beam splitter 15 is used to divide the detection light into multiple beams, and the phase shifter 14 is used to adjust the detection light phase to achieve the adjustment of the interlayer phase; the optical antenna array 16 is composed of a plurality of optical antenna end faces to form a matrix end face output waveguide. By selecting a channel, scanning in one direction (for example, horizontal) can be realized. After the scanning direction is determined by the gating scan, the scanning in another direction (for example, vertical) can be realized by adjusting the phase of the detection light of each channel, and two-dimensional scanning is realized by combining horizontal and vertical scanning. The integrated laser radar chip of this embodiment can achieve two-dimensional scanning by adjusting the inter-layer phase in combination with channel selection. It does not require a mechanical structure to assist in rotating the lens, and can realize a fully solid-state end-face emission focal plane array, which is conducive to large-scale applications.

[0039] It should be understood that the present embodiment divides the detection light into multiple beams through the beam splitter 15, and the optical antenna array 16 uses a two-dimensional matrix end face output waveguide to cooperate in realizing two-dimensional scanning. Based on the two-dimensional scanning process of the present embodiment, the integrated laser radar chip of the present embodiment can also realize two-dimensional scanning through a one-dimensional matrix end face output waveguide. At this time, the beam splitter 15 may not be included in the link of the integrated laser radar chip, and the optical antenna array 16 may also use a one-dimensional matrix end face output waveguide, that is, two-dimensional scanning can be realized through interlayer phase adjustment and channel selection. Similarly, the two-dimensional scanning realized through the one-dimensional matrix end face output waveguide does not require a mechanical structure to assist in rotating the lens.

[0040] In some specific examples of the integrated laser radar chip of the present invention, the input coupler 11 includes at least one of an edge coupler and a vertical coupler, which is used to receive the detection light input by the laser; the selection switch array 12 includes at least one of a multimode interference coupler tree, a microring and a micro-electromechanical system, which is used to route the detection light to the corresponding channel; the interlayer coupler 13 includes at least one of a mode spot converter and a vertical coupler, which is used to transmit the detection light to different structural layers; the phase shifter 14 includes at least one of a thermo-optical phase shifter, an electro-optical phase shifter and a passive delay line phase shifter, which is used to adjust the phase of the detection light; the beam splitter 15 includes at least one of a Y-type beam splitter, a multimode interference coupler type beam splitter, a directional coupler type beam splitter and an arrayed waveguide grating type coupler, which is used to divide the detection light into multiple beams; the optical antenna array 16 is composed of a plurality of optical antenna end faces to form a matrix end face output waveguide, which is used to emit the detection light out of the integrated laser radar chip.

[0041] Furthermore, the manufacturing processes of the input coupler 11, the gate switch array 12, the interlayer coupler 13, the phase shifter 14, the beam splitter 15 and the optical antenna array 16 are compatible, and the manufacturing materials used include at least one of indium phosphide (InP), gallium arsenide (GaAs), silicon (Si), silicon nitride (SiN), aluminum oxide (Al2O3), aluminum nitride (AlN), lithium niobate (LiNbO3) and polymer waveguide materials (polymethyl methacrylate PMMA, polystyrene PS, polycarbonate PC, epoxy resin, fluorinated polyimide, CYTOP, silicon-polymer composite materials, new high-performance low-cost polymers).

[0042] See also Figure 1 As shown, Figure 1 An embodiment structure of the integrated laser radar chip of the present invention is illustrated. In this embodiment, the waveguide link is composed of an input coupler 11, an interlayer coupler 13, a phase shifter 14, a gate switch array 12, a beam splitter 15 and an optical antenna array 16 which are linked in sequence through waveguides.

[0043] In conjunction with the laser radar device mentioned later, in this embodiment, the beam splitter 15 and the optical antenna array 16 are each provided with multiple groups (such as four groups in the figure), which are connected behind the gate switch array 12. The detection light generated by the laser 2 will be coupled to the integrated laser radar chip by the input coupler 11, and then the interlayer coupler 13 will receive the detection light and transmit it to different structural layers, and then the phase of the detection light will be adjusted by the phase shifter 14, and then the gate switch array 12 will route the detection light to a selected beam splitter 15, and then the beam splitter 15 will divide the detection light into multiple beams of detection light, and finally the optical antenna array 16 will emit the detection light to the lens 3 for collimation and redirection to achieve two-dimensional scanning.

[0044] See also Figure 2 As shown, Figure 2 Another embodiment structure of the integrated laser radar chip of the present invention is illustrated. In this embodiment, the waveguide link is composed of an input coupler 11, an interlayer coupler 13, a selection switch array 12, a phase shifter 14, a beam splitter 15 and an optical antenna array 16 which are linked in sequence through a waveguide.

[0045] In conjunction with the laser radar device mentioned later, in this embodiment, the phase shifter 14, the beam splitter 15 and the optical antenna array 16 are each provided with multiple groups (such as four groups in the figure), which are connected in sequence behind the gate switch array 12. The detection light generated by the laser 2 will be coupled to the integrated laser radar chip by the input coupler 11, and then the interlayer coupler 13 will receive the detection light and transmit it to different structural layers, and then the gate switch array 12 will route the detection light to a selected phase shifter 14, and then the phase shifter 14 will adjust the detection light phase of the structural layer, and then the beam splitter 15 will divide the detection light into multiple beams of detection light, and finally the optical antenna array 16 will emit the detection light to the lens 3 for collimation and redirection to achieve two-dimensional scanning. It should be understood that multiple groups of phase shifters 14 correspond to different phase adjustments. Therefore, at most one structural layer does not need to be provided with a phase shifter 14, and the original phase of the detection light can be maintained. The remaining structural layers all need to adjust the detection light phase through the corresponding phase shifter 14.

[0046] See also Figure 3 As shown, Figure 3 Another embodiment structure of the integrated lidar chip of the present invention is illustrated. In this embodiment, the waveguide link is composed of an input coupler 11, an interlayer coupler 13, a selection switch array 12, a beam splitter 15, a phase shifter 14 and an optical antenna array 16 which are linked in sequence through a waveguide.

[0047] In conjunction with the laser radar device mentioned later, in this embodiment, the beam splitter 15, the phase shifter 14 and the optical antenna array 16 are each provided with multiple groups (such as four groups in the figure), which are connected in sequence behind the gate switch array 12. The detection light generated by the laser 2 will be coupled to the integrated laser radar chip by the input coupler 11, and then the interlayer coupler 13 will receive the detection light and transmit it to different structural layers. Then the gate switch array 12 will route the detection light to a selected beam splitter 15, and the beam splitter 15 will divide the detection light into multiple beams of detection light, and then adjust the detection light phase of this structural layer through the corresponding phase shifter 14. Finally, the optical antenna array 16 will emit the detection light to the lens 3 for collimation and redirection to achieve two-dimensional scanning. It should be understood that multiple groups of phase shifters 14 correspond to different phase adjustments. Therefore, at most one structural layer does not need to be provided with a phase shifter 14, and the original phase of the detection light can be maintained. The remaining structural layers all need to adjust the detection light phase through the corresponding phase shifter 14.

[0048] See also Figure 4 As shown, Figure 4 Another embodiment structure of the integrated lidar chip of the present invention is illustrated. In this embodiment, the waveguide link is composed of an input coupler 11, a selection switch array 12, a beam splitter 15, an interlayer coupler 13, a phase shifter 14 and an optical antenna array 16 which are linked in sequence through a waveguide.

[0049] In conjunction with the laser radar device mentioned later, in this embodiment, the beam splitter 15, the interlayer coupler 13, the phase shifter 14 and the optical antenna array 16 are all provided with multiple groups (such as four groups in the figure), which are connected in sequence behind the gate switch array 12. The detection light generated by the laser 2 will be coupled to the integrated laser radar chip by the input coupler 11, and then the gate switch array 12 will route the detection light to a selected beam splitter 15, and then the beam splitter 15 will divide the detection light into multiple beams of detection light, and multiple interlayer couplers 13 will receive the detection light divided by the beam splitter 15 and transmit it to different structural layers, and then adjust the detection light phase of the structural layer through the phase shifter 14, and finally the optical antenna array 16 will emit the detection light to the lens 3 for collimation and redirection to achieve two-dimensional scanning. Similarly, in this embodiment, multiple groups of phase shifters 14 correspond to different phase adjustments, so at most one structural layer does not need to be provided with a phase shifter 14, and the original phase of the detection light can be maintained, and the remaining structural layers all need to adjust the detection light phase through the corresponding phase shifter 14.

[0050] See also Figure 5 As shown, Figure 5 Another embodiment structure of the integrated lidar chip of the present invention is illustrated. In this embodiment, the waveguide link is composed of an input coupler 11, a selection switch array 12, an interlayer coupler 13, a phase shifter 14, a beam splitter 15 and an optical antenna array 16 which are linked in sequence through a waveguide.

[0051] In conjunction with the laser radar device mentioned later, in this embodiment, the interlayer coupler 13, the phase shifter 14, the beam splitter 15 and the optical antenna array 16 are all provided with multiple groups (such as four groups in the figure), which are connected in sequence behind the gate switch array 12. The detection light generated by the laser 2 will be coupled to the integrated laser radar chip by the input coupler 11, and then the gate switch array 12 will route the detection light to a selected interlayer coupler 13, and the interlayer coupler 13 will receive the detection light and transmit it to different structural layers, and then adjust the detection light phase of the structural layer through the phase shifter 14, and then the beam splitter 15 will divide the detection light into multiple beams of detection light, and finally the optical antenna array 16 will emit the detection light to the lens 3 for collimation and redirection to achieve two-dimensional scanning. Similarly, in this embodiment, multiple groups of phase shifters 14 correspond to different phase adjustments, so at most one structural layer does not need to be provided with a phase shifter 14, and the original phase of the detection light can be maintained, and the remaining structural layers all need to adjust the detection light phase through the corresponding phase shifter 14.

[0052] See also Figure 6 As shown, Figure 6 Another embodiment structure of the integrated lidar chip of the present invention is illustrated. In this embodiment, the waveguide link is composed of an input coupler 11, a selection switch array 12, an interlayer coupler 13, a beam splitter 15, a phase shifter 14 and an optical antenna array 16 which are linked in sequence through a waveguide.

[0053] In combination with the laser radar device mentioned later, in this embodiment, the interlayer coupler 13, the beam splitter 15, the phase shifter 14 and the optical antenna array 16 are all provided with multiple groups (such as four groups in the figure), which are connected in sequence behind the gate switch array 12. The detection light generated by the laser 2 will be coupled to the integrated laser radar chip by the input coupler 11, and then the gate switch array 12 will route the detection light to a selected interlayer coupler 13, and the interlayer coupler 13 will receive the detection light and transmit it to different structural layers. Then the beam splitter 15 will divide the detection light into multiple beams of detection light, and then adjust the detection light phase of this structural layer through the phase shifter 14. Finally, the optical antenna array 16 will emit the detection light to the lens 3 for collimation and redirection to achieve two-dimensional scanning. Similarly, in this embodiment, multiple groups of phase shifters 14 correspond to different phase adjustments. Therefore, at most one structural layer does not need to be provided with a phase shifter 14, and the original phase of the detection light can be maintained. The remaining structural layers all need to adjust the detection light phase through the corresponding phase shifter 14.

[0054] It is important to understand that the above Figures 1 to 6 In the illustrated integrated laser radar chip, the optical antenna array 16 ultimately emits the detection light to the lens 3 for collimation and redirection. It should be understood that in some specific examples, the optical antenna array 16 is composed of a plurality of optical antenna end faces to form a matrix end face output waveguide, which is used to emit the detection light out of the integrated laser radar chip. Through the selection waveguide output of different channels, scanning in one direction can be achieved. Through the interlayer phase adjustment waveguide output, scanning in another direction can be achieved. Finally, with the matrix end face output waveguide, two-dimensional scanning can be achieved. For example Figure 7 The array structure of the optical antenna array 16 shown in the figure includes 2*2 end-face output waveguides. Figure 7 It is only a schematic diagram of the structure of the optical antenna array 16. The number and parameters of the end output waveguides included in the optical antenna array 16 are not limited and can be selected according to actual needs.

[0055] Figure 7 The optical antenna array 16 shown includes 2*2 end-face output waveguides. In some specific examples, Figure 7The optical antenna array 16 shown has a single end output waveguide with a longitudinal height of 200 nm and a transverse width of 1.5 μm; the longitudinal center spacing between the end output waveguides is 1 μm, and the transverse center spacing is 4 μm. The optical antenna array 16 in this example performs longitudinal gating scanning, and adjusts the detection light phase difference of the corresponding structural layer channel to 0, Π / 2, and -Π / 2 through the corresponding phase shifter 14 in the longitudinal direction, respectively, to obtain the corresponding far-field steering structure, as shown in FIG. Figure 8 , Fig. 9 and Fig.10 shown.

[0056] in, Figure 8 The longitudinal scanning angles when the phase difference in the longitudinal direction is 0 are shown, and the corresponding longitudinal scanning angle is 0°; Fig. 9 The longitudinal scanning angle when the phase difference in the longitudinal direction is Π / 2 is shown, and the corresponding longitudinal scanning angle is -7.73°; Fig.10 The longitudinal scanning angle is shown when the phase difference in the longitudinal direction is -Π / 2, and the corresponding longitudinal scanning angle is 7.73°. Figure 8 , Fig. 9 and Fig.10 The results shown show that the integrated laser radar chip of this example can successfully achieve longitudinal scanning without the assistance of mechanical structures. It can be understood that the above process of this example achieves longitudinal scanning without the assistance of mechanical structures by adjusting the phase difference of the detection light of the structural layer channel, and combined with the lateral gating scanning, it can achieve two-dimensional scanning without the assistance of mechanical structures.

[0057] It should be understood that if the phase difference is also increased in the lateral direction, lateral scanning can also be achieved by adjusting the phase difference of the detection light in the structural layer channel. The lateral scanning can be achieved by adjusting the phase within the layer, which can increase the lateral point cloud density. However, in this case, each output waveguide needs to be equipped with a phase shifter 14 and the output end face of the optical antenna array 16 must be a two-dimensional matrix.

[0058] Another aspect of the present invention provides a laser radar device, see Fig.11 As shown, the laser radar device includes the integrated laser radar chip 1 in any one of the above-mentioned embodiments or examples, and also includes a laser 2 and a lens 3. The laser 2 is used to generate detection light; the integrated laser radar chip 1 is connected to the laser 2, and is used to receive the detection light generated by the laser 2, and emit the integrated laser radar chip 1 after processing the detection light; the transmitting end face of the optical antenna array 16 of the integrated laser radar chip 1 is located in the focal plane of the lens 3, and the lens 3 is used to collimate and redirect the detection light emitted by the integrated laser radar chip 1.

[0059] It is understandable that, since the laser radar device provided by the present invention includes the integrated laser radar chip 1 of the present invention, the laser radar device of the present invention has the corresponding functions of the integrated laser radar chip 1 in all the above-mentioned embodiments. Based on the integrated laser radar chip of the present invention, the laser radar device of the present invention can form a laser radar device based on a multi-layer architecture end-emitting focal plane array, which has a simple structure, and can achieve two-dimensional scanning by adjusting the inter-layer phase combined with channel selection, and can realize a fully solid-state end-emitting focal plane array, which effectively solves the problem that the focal plane array chip in the prior art needs mechanical structure assistance when scanning, and is conducive to large-scale application.

[0060] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An integrated laser radar chip, characterized in that: include: An input coupler (11), used for receiving input detection light; A gate switch array (12), comprising a plurality of gate switches arranged in a matrix to form a plurality of channels, and used to route the detection light to corresponding channels; An interlayer coupler (13) for transmitting the detection light to different structural layers; A phase shifter (14), used for adjusting the phase of the detection light; A beam splitter (15), used for splitting the detection light into multiple beams; An optical antenna array (16), composed of a plurality of optical antenna end faces forming a matrix end face output waveguide, for emitting the detection light out of the integrated laser radar chip; The input coupler (11), the gating switch array (12), the interlayer coupler (13), the phase shifter (14), the beam splitter (15) and the optical antenna array (16) are integrated on the same chip and connected by waveguides to form a waveguide link, wherein the input coupler (11) is located at the input end of the waveguide link, the optical antenna array (16) is located at the output end of the waveguide link, the interlayer coupler (13) is located before the phase shifter (14) in the waveguide link, and the gating switch array (12) is located before the beam splitter (15) in the waveguide link.

2. The integrated laser radar chip according to claim 1, characterized in that: The waveguide link is composed of the input coupler (11), the interlayer coupler (13), the phase shifter (14), the gate switch array (12), the beam splitter (15) and the optical antenna array (16) which are linked in sequence through a waveguide.

3. The integrated laser radar chip according to claim 1, characterized in that: The waveguide link is composed of the input coupler (11), the interlayer coupler (13), the gate switch array (12), the phase shifter (14), the beam splitter (15) and the optical antenna array (16) which are linked in sequence through a waveguide.

4. The integrated laser radar chip according to claim 1, characterized in that: The waveguide link is composed of the input coupler (11), the interlayer coupler (13), the gate switch array (12), the beam splitter (15), the phase shifter (14) and the optical antenna array (16), which are linked in sequence through waveguides.

5. The integrated laser radar chip according to claim 1, characterized in that: The waveguide link is composed of the input coupler (11), the gate switch array (12), the beam splitter (15), the interlayer coupler (13), the phase shifter (14) and the optical antenna array (16) which are linked in sequence through a waveguide.

6. The integrated laser radar chip according to claim 1, characterized in that: The waveguide link is composed of the input coupler (11), the gate switch array (12), the interlayer coupler (13), the phase shifter (14), the beam splitter (15) and the optical antenna array (16) which are linked in sequence through a waveguide.

7. The integrated laser radar chip according to claim 1, characterized in that: The waveguide link is composed of the input coupler (11), the gate switch array (12), the interlayer coupler (13), the beam splitter (15), the phase shifter (14) and the optical antenna array (16), which are linked in sequence through waveguides.

8. The integrated laser radar chip according to any one of claims 1 to 7, characterized in that: The input coupler (11) includes at least one of an edge coupler and a vertical coupler; the gate switch array (12) includes at least one of a multimode interference coupler tree, a micro-ring and a micro-electromechanical system; the interlayer coupler (13) includes at least one of a mode spot converter and a vertical coupler; the phase shifter (14) includes at least one of a thermo-optical phase shifter, an electro-optical phase shifter and a passive delay line phase shifter; the beam splitter (15) includes at least one of a Y-type beam splitter, a multimode interference coupler type beam splitter, a directional coupler type beam splitter and an arrayed waveguide grating type coupler.

9. The integrated laser radar chip according to any one of claims 1 to 7, characterized in that: The input coupler (11), the gate switch array (12), the interlayer coupler (13), the phase shifter (14), the beam splitter (15) and the optical antenna array (16) are made of materials including at least one of InP, GaAs, Si, SiN, Al2O3, AlN, LiNbO3 and polymer waveguide materials.

10. A laser radar device, characterized in that: include: A laser (2) for generating a detection light; The integrated laser radar chip (1) according to any one of claims 1 to 9, wherein the integrated laser radar chip (1) is connected to the laser (2) and is used to receive the detection light generated by the laser (2), and emit the detection light out of the integrated laser radar chip (1) after processing; A lens (3), wherein the emission end surface of the optical antenna array (16) of the integrated laser radar chip (1) is located at the focal plane of the lens (3), and the lens (3) is used to collimate and redirect the detection light emitted by the integrated laser radar chip (1).

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